CN113701609B - Method and device for controlling and measuring assembly coaxiality of glass column of laser output head - Google Patents

Method and device for controlling and measuring assembly coaxiality of glass column of laser output head Download PDF

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Publication number
CN113701609B
CN113701609B CN202110848813.6A CN202110848813A CN113701609B CN 113701609 B CN113701609 B CN 113701609B CN 202110848813 A CN202110848813 A CN 202110848813A CN 113701609 B CN113701609 B CN 113701609B
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output head
glass column
coaxiality
air floatation
reflecting mirror
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CN113701609A (en
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李文涛
刘广柏
李骁军
白云娜
韦锦
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Shanghai Feibo Laser Technology Co ltd
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Shanghai Feibo Laser Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/24Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B5/25Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B5/252Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes for measuring eccentricity, i.e. lateral shift between two parallel axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a method and a device for controlling and measuring the assembly coaxiality of a glass column of a laser output head, wherein the control and measurement device comprises an air floatation turntable, a control module and a control module, wherein the air floatation turntable is used for clamping the laser output head and adjusting X, Y and theta X、θY of the laser output head; the dial indicator is used for checking whether the output head metal shell of the laser output head is coaxial with the air floatation turntable or not; the coaxiality measuring module is used for checking whether the output head glass column of the laser output head is coaxial with the air floatation turntable or not and measuring the assembly coaxiality of the output head glass column and the output head metal shell; the device support frame is used for fixing the air floatation turntable and the coaxiality measuring module. The invention greatly improves the accuracy of the coaxiality of the assembly of the glass column of the laser output head, and improves the quality of the laser for cutting, welding and other applications; the machining precision requirement of the mechanical shell is reduced, so that the production cost of the laser output head is reduced.

Description

Method and device for controlling and measuring assembly coaxiality of glass column of laser output head
Technical Field
The invention relates to a method and a device for controlling and measuring the assembly coaxiality of a glass column of a laser output head.
Background
The high-power fiber laser has very high power density of the fiber core when outputting laser, is easy to damage at the output end face of the fiber, causes the failure of the laser, and solves the problem by welding a larger glass column at the output end face of the fiber to reduce the output optical power density. Because the optical fiber and the glass column are welded and cannot meet the requirement of subsequent integrated use and are easy to damage, the welded glass column is required to be further packaged to form a laser output head. In order to meet the processing quality requirements of subsequent laser cutting, welding and other applications, the requirement on the output beam pointing angle of the output head is high, and the coaxiality tolerance of the glass column assembly plays a key role in controlling the output beam pointing angle.
The prior art generally processes mechanical parts with smaller tolerance, so that the inner diameter of the mechanical parts is matched with the outer diameter of the glass column as much as possible, but the requirements on processing precision are very high, the processing difficulty is high, the cost is high, and the coaxiality of the glass column assembly cannot be quantitatively controlled in the production process by simply relying on tolerance matching, so that the parameter requirements of the laser output beam pointing angle cannot be met.
Disclosure of Invention
The invention aims to solve the technical problems that: the existing laser output head glass column assembly coaxiality control method has the problems of high requirement and high difficulty.
In order to solve the above problems, the technical solution of the present invention is to provide a device for controlling and measuring the assembly coaxiality of a glass column of a laser output head, which is characterized in that: the device comprises an air floatation turntable, a laser output head and a control unit, wherein the air floatation turntable is used for clamping the laser output head and adjusting X, Y and theta X、θY of the laser output head;
The dial indicator is used for checking whether the output head metal shell of the laser output head is coaxial with the air floatation turntable or not;
The coaxiality measuring module is used for checking whether the output head glass column of the laser output head is coaxial with the air floatation turntable or not and measuring the assembly coaxiality of the output head glass column and the output head metal shell;
The device support frame is used for fixing the air floatation turntable and the coaxiality measuring module, and the coaxiality measuring module is arranged right above the laser output head.
Preferably, the coaxiality measuring module comprises a beam emitting module, a half mirror, a lens, a plane mirror, a CCD and a CCD photosurface display screen, wherein the plane mirror is arranged on the air floatation turntable, the lens is arranged between the half mirror and the plane mirror, the CCD is arranged above the half mirror, the beam emitting module emits a beam with a cross reticle image to be incident on the half mirror, the beam reflected by the half mirror is incident on the lens to form a parallel beam to be emitted on the plane mirror, and the center of the cross reticle image reflected back to the CCD photosurface display screen is the original position when the plane mirror is coaxial with the axis of the air floatation turntable;
The angle of the glass column of the output head on the air-float turntable is adjusted until the offset between the center point of the cross reticle image received by the CCD and the original position is minimum, and the assembly coaxiality of the glass column of the output head is controlled;
And calculating to obtain the assembly coaxiality parameter of the output head glass column according to the offset between the center point of the cross reticle image reflected back by the output head glass column and the original position received by the CCD, and measuring the assembly coaxiality of the output head glass column.
Preferably, the air floatation turntable is provided with a through hole for the tail fiber of the laser output head to pass through.
The invention provides a method for controlling and measuring the assembly coaxiality of a glass column of a laser output head, which is characterized by comprising the following steps of:
step one, clamping the metal shell of the output head on the table top of the air-float rotary table, and rotating the air-float rotary table to rotate around the axis of the air-float rotary table together with the metal shell of the output head;
Step two, using a dial indicator to contact the arbitrary central symmetry circular ring surface of the metal shell of the output head, adjusting X, Y and theta X、θY shafts of the air floatation turntable, enabling the numerical value on the dial indicator to be in a range and enabling the numerical value to be unchanged along with the rotation of the air floatation turntable, wherein the axis of the metal shell of the output head is coaxial with the axis of the air floatation turntable;
Step three, placing the output head glass column into the output head metal shell, and continuing to rotate the air floatation rotary table, wherein the air floatation rotary table drives the output head metal shell and the output head glass column to rotate;
The coaxiality measuring module emits parallel light beams with the cross division plate images to be incident on the end face of the output head glass column, reflected light of the end face of the output head glass column with the cross division plate images is received by the coaxiality measuring module, and the coaxiality measuring module obtains an offset angle value of the output head glass column relative to the axis of the output head metal shell according to the received offset between the center point of the cross division plate images reflected by the output head glass column and the original position;
Adjusting the angle of the glass column of the output head until the offset between the center point of the cross reticle image received by the coaxiality measuring module and the original position is minimum, wherein the end face of the glass column of the output head is vertical to the axis of the metal shell of the output head to the greatest extent;
And fourthly, fixing the output head glass column under the minimum fitting circle radius with the output head metal shell to form a laser output head, and calculating to obtain the assembly coaxiality parameter of the output head glass column according to the offset between the center point of the cross reticle image received by the coaxiality measurement module and the original position.
Preferably, in the fourth step, the output head glass column under the smallest fitting circle radius and the output head metal shell are fixed by adopting glue or jackscrew mode to form the laser output head.
Preferably, the coaxiality measuring module comprises a light beam emitting module, a half mirror, a lens, a plane mirror, a CCD and a CCD photosurface display screen, wherein the plane mirror is arranged on the air floatation turntable, the lens is arranged between the half mirror and the plane mirror, the CCD is arranged above the half mirror, the light beam emitting module emits a light beam with a cross reticle image to be incident on the half mirror, the light beam reflected by the half mirror is incident on the lens to form a parallel light beam to be emitted on the plane mirror, and the center of the cross reticle image reflected back to the CCD photosurface display screen is the original position when the plane mirror is coaxial with the axis of the air floatation turntable.
Preferably, the method for determining the original position of the center of the cross reticle image of the CCD photosurface display screen comprises the following steps:
The plane mirror is clamped on the air floatation turntable, the air floatation turntable rotates around the axis of the air floatation turntable together with the plane mirror, a dial indicator contacts the central symmetrical circular ring surface of the plane mirror, and X, Y, thetax and thetay axes of the air floatation turntable are adjusted, so that the numerical value on the dial indicator is in a range of measuring range and the numerical value is unchanged along with the rotation of the air floatation turntable, and at the moment, the axis of the plane mirror is coaxial with the axis of the air floatation turntable;
The positions of the incident light path light beam emitting module, the half-transparent half-reflecting mirror, the lens and the CCD are adjusted, so that the center of the cross reticle image reflected by the plane reflecting mirror is just positioned at the center of an imaging area of the CCD, namely the center of a CCD photosurface display screen, and the center of the cross reticle image reflected by the plane reflecting mirror at the moment is marked as an original position.
Preferably, the calculation formula of the assembly coaxiality parameter of the output head glass column is as follows:
α=d/(2*f)
Wherein alpha is the assembly coaxiality, namely the inclination angle, d is the offset of the center point of the cross reticle image received by the CCD photosurface display screen and the original position, and f is the focal length of the lens.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the coaxiality of the output head metal shell and the output head glass column is checked by means of the air floatation turntable in sequence, so that the assembly coaxiality precision of the laser output head glass column is greatly improved, and the quality of laser cutting, welding and other applications is improved; the machining precision requirement of the mechanical shell is reduced, so that the production cost of the laser output head is reduced.
Drawings
FIG. 1 is a schematic diagram of a laser output head glass column assembly coaxiality control and measurement device;
FIG. 2 is a schematic diagram of a laser output head;
FIG. 3 is a schematic bottom view of the device support frame;
Fig. 4 is a schematic structural diagram of the coaxiality measurement module.
Detailed Description
In order to make the invention more comprehensible, preferred embodiments accompanied with figures are described in detail below.
As shown in fig. 1 to 3, the device for controlling and measuring the assembly coaxiality of the glass column of the laser output head comprises an air floatation turntable 2 which can clamp the laser output head 1 and can adjust X, Y and theta X、θY, a dial indicator 3 for axis verification, a coaxiality measuring module 4 for angle verification and measurement of the glass column and a device supporting frame 5.
The laser output head 1 is used for coupling output laser to equipment of an application end, and comprises an output head glass column 1-1 and an output head metal shell 1-2, wherein the output head glass column is welded with a laser output tail fiber. The air-float turntable 2 is used for clamping the output head, can provide X, Y, thetax and thetay adjustment of the output head, and provides high-precision positioning function in the process of controlling and measuring the assembly coaxiality of the glass column 1-1 of the output head. The air-float turntable 2 comprises a non-damping rotation module, a 4-dimensional adjusting frame is arranged above the non-damping rotation module, X, Y, thetax and thetay can be adjusted, the centers of the non-damping rotation module and the 4-dimensional adjusting frame comprise a through hole, and the minimum inscription diameter of the through hole is generally 2-10 cm. A chuck capable of clamping the laser output head 1 is arranged above the 4-dimensional adjusting frame. The dial indicator 3 is mounted on the base of the device support 5 or other stable table top for verifying the coaxial alignment of the output head metal housing 1-2 and the air bearing turret 2.
The device support frame 5 is used for fixing the air-float turntable 2 and the coaxiality measuring module 4, and the coaxiality measuring module 4 is fixed on the air-float turntable 2 and right above the laser output head 1. The bottom surface of the device support frame 5 comprises a through hole 5-1, the through hole 5-1 can be round, square or other shapes, and is used for penetrating through the laser output tail fiber, and the minimum inscription diameter is generally 1-10 cm.
The coaxiality measuring module 4 is used for verifying that the end face reflected light of the output head glass column 1-1 is coaxial with the air floatation turntable 2 and measuring the assembly coaxiality of the glass column. As shown in fig. 4, the coaxiality measuring module 4 comprises a beam emitting module 4-1, a half mirror 4-2, a lens 4-3, a plane mirror 4-4, a CCD4-5 and a CCD photosurface display screen 4-6. The beam emitting module 4-1 emits a beam with a cross reticle image to be incident on the half mirror 4-2, and the beam reflected by the half mirror 4-2 to be incident on the lens 4-3 to form a parallel beam. The plane reflector 4-4 is arranged on the air floatation turntable 2, the lens 4-3 is arranged between the half mirror 4-2 and the plane reflector 4-4, and the CCD4-5 is arranged above the half mirror 4-2. The parallel light beam is emitted to the plane reflecting mirror 4-4, and the center of the cross reticle image reflected back to the CCD photosurface display screen 4-6 when the plane reflecting mirror 4-4 is coaxial with the axis of the air floatation turntable 2 is the original position 4-6-1.
A plane mirror 4-4 is clamped on an air floatation turntable 2, the air floatation turntable 2 rotates around the axis of the air floatation turntable 2 together with the plane mirror 4-4, a dial gauge 3 is used for contacting the central symmetry circular ring surface of the plane mirror 4-4, and the X, Y shaft and the theta X、θY shaft of the air floatation turntable 2 are regulated, so that the numerical value on the dial gauge 3 is in a range and the numerical value is unchanged along with the rotation of the air floatation turntable 2, and at the moment, the axis of the plane mirror 4-4 is coaxial with the axis of the air floatation turntable 2. The positions of all components of an incident light path and the CCD 4-5 are adjusted, so that the center of the cross reticle image reflected by the plane mirror 4-4 is just positioned at the center of an imaging area of the CCD 4-5, namely the center of the CCD photosurface display screen 4-6, and the center of the cross reticle image reflected by the plane mirror 4-4 at the moment is marked as an original position 4-6-1.
And when the air floatation turntable 2 is rotated, a center point 4-6-2 of the cross reticle image reflected by the output head glass column 1-1 forms a circular ring 4-6-3, and when the circle center of the circular ring 4-6-3 deviates from the original position 4-6-1, the plane mirror 4-4 is required to be used for adjusting the light path again to recalibrate the original position 4-6-1.
The plane mirror 4-4 is taken down, the beam emitting module 4-1 emits a beam with a cross reticle image to enter the half mirror 4-2, the beam reflected by the half mirror 4-2 enters the lens 4-3 to form a parallel beam and enters the end face of the output head glass column 1-1, the CCD 4-5 receives the reflected light with the cross reticle image of the end face of the output head glass column 1-1, the received cross reticle image is sent to the CCD photosurface display screen 4-6, and the assembly coaxiality parameter of the output head glass column 1-1 is calculated according to the offset of the center point 4-6-2 of the received cross reticle image and the original position 4-6-1.
The invention relates to a method for controlling and measuring the assembly coaxiality of a glass column of a laser output head, which is applied to the control and measuring device, and comprises the following specific operation methods:
Step one, clamping the output head metal shell 1-2 onto the table top of the air-floating rotary table 2, and rotating the air-floating rotary table 2 to rotate around the axis of the air-floating rotary table 2 together with the output head metal shell 1-2.
Step two, the dial indicator 3 is used for contacting the arbitrary central symmetry circular ring surface of the output head metal shell 1-2, X, Y and theta X、θY shafts of the air floatation rotary table 2 are adjusted, so that the numerical value on the dial indicator 3 is in a range and is unchanged along with the rotation numerical value of the air floatation rotary table 2, and at the moment, the axis of the output head metal shell 1-2 is coaxial with the axis of the air floatation rotary table 2.
And thirdly, placing the output head glass column 1-1 into the output head metal shell 1-2, continuously rotating the air floatation rotary table 2, and rotating the air floatation rotary table 2 with the output head metal shell 1-2 and the output head glass column 1-1. The parallel light beam with the cross division plate image emitted by the light beam emitting module 4-1 of the coaxiality measuring module 4 is incident to the end face of the output head glass column 1-1, the end face reflection light with the cross division plate image is received by the imaging module CCD 4-5 in the coaxiality measuring module 4, and the imaging module CCD 4-5 obtains the offset angle value of the output head glass column 1-1 relative to the axis of the output head metal shell 1-2 according to the offset of the center point 4-6-2 of the cross division plate image reflected by the received output head glass column 1-1 and the original position 4-6-1.
And adjusting the angle of the output head glass column 1-1 until the offset between the center point 4-6-2 of the cross reticle image received by the coaxiality measuring module 4 and the original position 4-6-1 is minimum, wherein the end face of the output head glass column 1-1 is vertical to the axis of the output head metal shell 1-2 to the greatest extent.
And fourthly, fixing the output head glass column 1-1 under the smallest fitting radius with the output head metal shell 1-2 by adopting glue or jackscrew and other modes to form the output head 1, and calculating to obtain the assembly coaxiality parameter of the output head glass column 1-1 according to the offset between the center point of the cross reticle image received by the coaxiality measuring module 4 and the original position.
The calculation formula of the assembly coaxiality of the output head glass column 1-1 is as follows:
α=d/(2*f)
Wherein alpha is the assembly coaxiality, namely the inclination angle, d is the offset of the center point 4-6-2 of the cross reticle image received by the CCD photosurface display screen 4-6 and the original position 4-6-1, and f is the focal length of the lens 4-3.

Claims (6)

1. The utility model provides an assembly axiality control and measuring device of laser instrument output head glass post which characterized in that: the device comprises an air floatation turntable (2) which is used for clamping a laser output head (1) and adjusting X, Y, theta X and theta Y of the laser output head (1);
the dial indicator (3) is used for checking whether the output head metal shell (1-2) of the laser output head (1) and the air floatation turntable (2) are coaxial or not;
the coaxiality measuring module (4) is used for checking whether the output head glass column (1-1) of the laser output head (1) is coaxial with the air floatation turntable (2) or not and measuring the assembly coaxiality of the output head glass column (1-1) and the output head metal shell (1-2);
The device support frame (5) is used for fixing the air-float turntable (2) and the coaxiality measuring module (4), and the coaxiality measuring module (4) is arranged right above the laser output head (1);
The coaxiality measuring module (4) comprises a light beam emitting module (4-1), a half mirror (4-2), a lens (4-3), a plane reflecting mirror (4-4), a CCD (4-5) and a CCD photosurface display screen (4-6), wherein the plane reflecting mirror (4-4) is arranged on the air floatation turntable (2), the lens (4-3) is arranged between the half mirror (4-2) and the plane reflecting mirror (4-4), the CCD (4-5) is arranged above the half mirror (4-2), the light beam emitting module (4-1) emits a light beam with a cross reticle image to be incident on the half mirror (4-2), the light beam reflected by the half mirror (4-2) is incident on the lens (4-3) to form a parallel light beam to be emitted on the plane reflecting mirror (4-4), and the center of the cross reticle image of the CCD photosurface display screen (4-6) is the original position (4-1) when the plane reflecting mirror (4-6) and the axis of the air floatation turntable (2) are coaxial;
the angle of the output head glass column (1-1) on the air-float turntable (2) is adjusted until the offset between the center point (4-6-2) of the cross reticle image received by the CCD (4-5) and the original position (4-6-1) is minimum, and the assembly coaxiality of the output head glass column (1-1) is controlled;
Calculating to obtain an assembly coaxiality parameter of the output head glass column (1-1) according to the offset of the center point (4-6-2) of the cross reticle image reflected by the output head glass column (1-1) received by the CCD (4-5) and the original position (4-6-1), and measuring the assembly coaxiality of the output head glass column (1-1);
The calculation formula of the assembly coaxiality parameter of the output head glass column (1-1) is as follows:
α=d/(2*f)
Wherein alpha is the assembly coaxiality, namely the inclination angle, d is the offset of the center point (4-6-2) of the cross reticle image received by the CCD photosurface display screen (4-6) and the original position (4-6-1), and f is the focal length of the lens (4-3).
2. The laser output head glass column assembly coaxiality control and measurement device according to claim 1, wherein: the air-floating turntable (2) is provided with a through hole (5-1) for the tail fiber of the laser output head (1) to pass through.
3. A method for controlling and measuring the assembly coaxiality of a glass column of a laser output head, characterized in that the method for controlling and measuring the assembly coaxiality of the glass column of the laser output head comprises the following steps:
Step one, clamping the output head metal shell (1-2) onto a table top of the air floatation rotary table (2), and rotating the air floatation rotary table (2) to rotate around the axis of the air floatation rotary table (2) together with the output head metal shell (1-2);
Step two, using a dial indicator (3) to contact any central symmetry circular ring surface of the output head metal shell (1-2), and adjusting X, Y and theta X、θY shafts of the air floatation rotary table (2) to enable the numerical value on the dial indicator (3) to be in a range and unchanged along with the rotation numerical value of the air floatation rotary table (2), wherein the axis of the output head metal shell (1-2) is coaxial with the axis of the air floatation rotary table (2);
Step three, placing the output head glass column (1-1) into the output head metal shell (1-2), continuously rotating the air floatation rotary table (2), and enabling the air floatation rotary table (2) to rotate with the output head metal shell (1-2) and the output head glass column (1-1);
The coaxiality measuring module (4) emits parallel light beams with cross division plate images to be incident to the end face of the output head glass column (1-1), reflected light of the end face of the output head glass column (1-1) with the cross division plate images is received by the coaxiality measuring module (4), and the coaxiality measuring module (4) obtains an offset angle value of the output head glass column (1-1) relative to the axis of the output head metal shell (1-2) according to the offset of the center point (4-6-2) of the cross division plate images reflected back by the received output head glass column (1-1) and the original position (4-6-1);
The angle of the output head glass column (1-1) is regulated until the offset between the center point of the cross reticle image received by the coaxiality measuring module (4) and the original position is minimum, and the end face of the output head glass column (1-1) is vertical to the axis of the output head metal shell (1-2) to the greatest extent;
And fourthly, fixing the output head glass column (1-1) under the radius of the minimum fitting circle and the output head metal shell (1-2) to form the laser output head (1), and calculating the assembly coaxiality parameter of the output head glass column (1-1) according to the offset of the center point of the cross reticle image received by the coaxiality measuring module (4) and the original position.
4. A method for controlling and measuring the assembly coaxiality of a glass column of a laser output head as defined in claim 3, wherein: and in the fourth step, the output head glass column (1-1) and the output head metal shell (1-2) under the smallest fitting radius are fixed by adopting a glue or jackscrew mode to form the laser output head (1).
5. A method for controlling and measuring the assembly coaxiality of a glass column of a laser output head as defined in claim 3, wherein: the coaxiality measuring module (4) comprises a light beam emitting module (4-1), a semi-transparent semi-reflecting mirror (4-2), a lens (4-3), a plane reflecting mirror (4-4), a CCD (4-5) and a CCD photosurface display screen (4-6), wherein the plane reflecting mirror (4-4) is arranged on the air floatation turntable (2), the lens (4-3) is arranged between the semi-transparent semi-reflecting mirror (4-2) and the plane reflecting mirror (4-4), the CCD (4-5) is arranged above the semi-transparent semi-reflecting mirror (4-2), the light beam emitted by the light beam emitting module (4-1) and provided with a cross reticle image is incident on the semi-transparent semi-reflecting mirror (4-2), the light beam reflected by the semi-transparent semi-reflecting mirror (4-2) is incident on the lens (4-3) to form a parallel light beam, and the cross reticle image center (4-1) of the CCD photosurface display screen (4-6) is reflected back to the original position (4-1) when the plane reflecting mirror (4-6) and the axis of the air floatation turntable (2).
6. The method for controlling and measuring the assembly coaxiality of a glass column of a laser output head according to claim 5, wherein the method for determining the original position (4-6-1) of the center of a cross reticle image of a CCD photosurface display screen (4-6) comprises the following steps:
Clamping a plane reflecting mirror (4-4) onto an air floatation rotary table (2), rotating the air floatation rotary table (2) with the plane reflecting mirror (4-4) to rotate around the axis of the air floatation rotary table (2), contacting the central symmetrical circular ring surface of the plane reflecting mirror (4-4) with a dial indicator (3), and adjusting X, Y and theta X、θY shafts of the air floatation rotary table (2) to enable the numerical value on the dial indicator (3) to be in a range and enable the numerical value to be unchanged along with the rotation of the air floatation rotary table (2), wherein the axis of the plane reflecting mirror (4-4) is coaxial with the axis of the air floatation rotary table (2);
The positions of the incident light path light beam emitting module (4-1), the semi-transparent semi-reflecting mirror (4-2), the lens (4-3) and the CCD (4-5) are adjusted, so that the center of the cross reticle image reflected from the plane reflecting mirror (4-4) is just positioned at the center of an imaging area of the CCD (4-5), namely the center of a CCD photosurface display screen (4-6), and the center of the cross reticle image reflected from the plane reflecting mirror (4-4) at the moment is marked as an original position (4-6-1).
CN202110848813.6A 2021-07-27 2021-07-27 Method and device for controlling and measuring assembly coaxiality of glass column of laser output head Active CN113701609B (en)

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US5450245A (en) * 1993-10-26 1995-09-12 Laser Communications, Inc. Laser alignment apparatus
JP2010145313A (en) * 2008-12-22 2010-07-01 Opcell Co Ltd Autocollimator apparatus
CN102879882A (en) * 2012-09-21 2013-01-16 长春理工大学 Method and apparatus for assembling and correcting lens group based on coaxiality conversion
CN104075671A (en) * 2014-07-10 2014-10-01 华中农业大学 Large-view-field photoelectric auto-collimator for secondary imaging
WO2016011942A1 (en) * 2014-07-23 2016-01-28 北京航天控制仪器研究所 Apparatus for detecting coaxiality of rotary table frame
CN207439442U (en) * 2017-11-07 2018-06-01 扬州莱达光电技术有限公司 A kind of laser pick-off emission element commissioning device
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CN208374471U (en) * 2018-06-19 2019-01-15 南京引创光电科技有限公司 A kind of laser focusing system for realizing coaxial displacement measurement function
CN109781390A (en) * 2019-01-18 2019-05-21 苏州迅镭激光科技有限公司 A kind of detection method of laser export head light path coaxial
CN112414278A (en) * 2020-11-02 2021-02-26 广东电网有限责任公司 Cylinder axiality offset measuring tool
CN112713932A (en) * 2020-12-21 2021-04-27 中国科学院西安光学精密机械研究所 Laser communication terminal optical path relay unit assembling and detecting system and detecting method based on same
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