CN113701609A - Method and device for controlling and measuring assembly coaxiality of laser output head glass column - Google Patents

Method and device for controlling and measuring assembly coaxiality of laser output head glass column Download PDF

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Publication number
CN113701609A
CN113701609A CN202110848813.6A CN202110848813A CN113701609A CN 113701609 A CN113701609 A CN 113701609A CN 202110848813 A CN202110848813 A CN 202110848813A CN 113701609 A CN113701609 A CN 113701609A
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output head
glass column
rotary table
coaxiality
semi
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CN113701609B (en
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李文涛
刘广柏
李骁军
白云娜
韦锦
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Shanghai Feibo Laser Technologies Co ltd
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Shanghai Feibo Laser Technologies Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/24Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B5/25Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B5/252Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes for measuring eccentricity, i.e. lateral shift between two parallel axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a method and a device for controlling and measuring the assembly coaxiality of a glass column of a laser output head, wherein the control and measurement device comprises an air-floating rotary table which is used for clamping the laser output head and carrying out X, Y theta and theta on the laser output headX、θYAdjusting; the dial indicator is used for verifying whether an output head metal shell of the laser output head is coaxial with the air floatation rotary table or not; the coaxiality measuring module is used for verifying whether an output head glass column of the laser output head is coaxial with the air floatation rotary table or not and measuring the assembly coaxiality of the output head glass column and the output head metal shell; and the device supporting frame is used for fixing the air floatation rotary table and the coaxiality measuring module. The invention greatly improves the assembly coaxiality precision of the laser output head glass column and improves the application quality of laser cutting, welding and the like; the machining precision requirement of the mechanical shell is reduced, and therefore the production cost of the laser output head is reduced.

Description

Method and device for controlling and measuring assembly coaxiality of laser output head glass column
Technical Field
The invention relates to a method and a device for controlling and measuring the assembly coaxiality of a glass column of a laser output head.
Background
The high-power fiber laser has very high fiber core power density when outputting laser, and the high-power fiber laser is easy to damage the output end face of the fiber to cause the failure of the laser. Because the optical fiber and the glass column after being welded cannot meet the requirement of subsequent integrated use and are easy to damage, the welded glass column needs to be further packaged to form the laser output head. In order to meet the processing quality requirements of subsequent laser cutting, welding and other applications, the high requirement is provided for the pointing angle of the output beam of the output head, and the tolerance of the assembly coaxiality of the glass column plays a key role in controlling the pointing angle of the output beam.
The prior art is the less mechanical part of machining tolerance generally, makes it internal diameter and glass post external diameter match as far as possible, but very high to the machining precision requirement like this, and the processing degree of difficulty is big, and is expensive, and relies on the tolerance matching alone and can't the axiality of quantitative control glass post assembly in process of production, leads to the parameter requirement that can't satisfy laser output beam directive angle.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the existing laser output head glass column assembly coaxiality control method has the problems of high requirement and high difficulty.
In order to solve the problems, the technical scheme of the invention is to provide a device for controlling and measuring the assembly coaxiality of a glass column of a laser output head, which is characterized in that: comprises an air-float rotary table for holding the laser output head and carrying out X, Y theta on the laser output headX、θYAdjusting;
the dial indicator is used for verifying whether an output head metal shell of the laser output head is coaxial with the air floatation rotary table or not;
the coaxiality measuring module is used for verifying whether an output head glass column of the laser output head is coaxial with the air floatation rotary table or not and measuring the assembly coaxiality of the output head glass column and the output head metal shell;
the device support frame is used for fixing the air floatation rotary table and the coaxiality measuring module, and the coaxiality measuring module is arranged right above the laser output head.
Preferably, the coaxiality measuring module comprises a light beam emitting module, a semi-transparent semi-reflecting mirror, a lens, a plane reflecting mirror, a CCD (charge coupled device) and a CCD (charge coupled device) photosensitive surface display screen, wherein the plane reflecting mirror is arranged on the air floatation rotary table, the lens is arranged between the semi-transparent semi-reflecting mirror and the plane reflecting mirror, the CCD is arranged above the semi-transparent semi-reflecting mirror, the light beam emitting module emits a light beam with a cross reticle image to be incident on the semi-transparent semi-reflecting mirror, the light beam reflected by the semi-transparent semi-reflecting mirror is incident on the lens to form a parallel light beam to be emitted onto the plane reflecting mirror, and the center of the cross reticle image reflected back to the CCD photosensitive surface display screen when the plane reflecting mirror and the axis of the air floatation rotary table are coaxial;
adjusting the angle of an output head glass column on the air floatation rotary table until the offset between the center point of the cross reticle image received by the CCD and the original position is minimum, and controlling the assembly coaxiality of the output head glass column;
and calculating to obtain the assembly coaxiality parameter of the output head glass column according to the offset between the center point of the cross reticle image reflected by the output head glass column and the original position received by the CCD, and measuring the assembly coaxiality of the output head glass column.
Preferably, the air-floating rotary table is provided with a through hole for the tail fiber of the laser output head to pass through.
The invention also provides a method for controlling and measuring the assembly coaxiality of the glass column of the laser output head, which is characterized in that the device for controlling and measuring the assembly coaxiality of the glass column of the laser output head is applied, and comprises the following steps:
clamping an output head metal shell on a table top of an air floatation rotary table, and rotating the air floatation rotary table to drive the output head metal shell to rotate around the axis of the air floatation rotary table;
step two, contacting the surface of any centrosymmetric circular ring of the metal shell of the output head by using a dial indicator, and adjusting X, Y and theta of the air floatation rotary tableX、θYThe shaft enables the numerical value on the dial indicator to be within the measuring range and not to change along with the rotation of the air floatation rotary table, and the axis of the metal shell of the output head is coaxial with the axis of the air floatation rotary table;
step three, putting the output head glass column into the output head metal shell, and continuously rotating the air floatation rotary table, wherein the air floatation rotary table drives the output head metal shell and the output head glass column to rotate;
the coaxiality measuring module emits parallel light beams with a cross-shaped differentiation plate image to be incident on the end face of the output head glass column, reflected light of the end face of the output head glass column with the cross-shaped differentiation plate image is received by the coaxiality measuring module, and the coaxiality measuring module obtains a deviation angle value of the output head glass column relative to the axis of the output head metal shell according to the received offset between the center point of the cross-shaped division plate image reflected by the output head glass column and the original position;
adjusting the angle of the glass column of the output head until the offset between the center point of the cross reticle image received by the coaxiality measuring module and the original position is minimum, and at the moment, the end surface of the glass column of the output head is vertical to the axis of the metal shell of the output head to the maximum extent;
and step four, fixing the output head glass column under the minimum fitting circle radius and the output head metal shell to form a laser output head, and calculating to obtain the assembly coaxiality parameter of the output head glass column according to the offset between the central point of the cross reticle image and the original position received by the coaxiality measuring module.
Preferably, in the fourth step, the output head metal shell and the output head glass column below the minimum fitting circle radius are fixed by glue or jackscrew to form the laser output head.
Preferably, the coaxiality measuring module comprises a light beam emitting module, a semi-transparent semi-reflecting mirror, a lens, a plane reflecting mirror, a CCD (charge coupled device) and a CCD (charge coupled device) photosensitive surface display screen, wherein the plane reflecting mirror is arranged on the air floatation rotary table, the lens is arranged between the semi-transparent semi-reflecting mirror and the plane reflecting mirror, the CCD is arranged above the semi-transparent semi-reflecting mirror, the light beam emitting module emits a light beam with a cross reticle image to be incident on the semi-transparent semi-reflecting mirror, the light beam reflected by the semi-transparent semi-reflecting mirror is incident on the lens to form a parallel light beam to be emitted onto the plane reflecting mirror, and the cross reticle image center of the CCD photosensitive surface display screen is reflected back to an original position when the axes of the plane reflecting mirror and the air floatation rotary table are coaxial.
Preferably, the method for determining the original position of the center of the cross reticle image of the CCD photosurface display screen comprises:
clamping the plane reflector on an air floatation rotary table, rotating the air floatation rotary table to drive the plane reflector to rotate around the axis of the air floatation rotary table, contacting the surface of a central symmetrical ring of the plane reflector with a dial indicator, adjusting X, Y, theta X and theta Y axes of the air floatation rotary table to enable the numerical value on the dial indicator to be within a measuring range and to be unchanged along with the rotation of the air floatation rotary table, and enabling the axis of the plane reflector to be coaxial with the axis of the air floatation rotary table at the moment;
the positions of the incident light path light beam emitting module, the semi-transmitting and semi-reflecting mirror, the lens and the CCD are adjusted, so that the center of the cross reticle image reflected by the plane reflector is just positioned at the center of an imaging area of the CCD, namely the center of a CCD photosensitive surface display screen, and the center of the cross reticle image reflected by the plane reflector at the moment is marked as an original position.
Preferably, the output head glass column has the following assembly coaxiality parameter calculation formula:
α=d/(2*f)
wherein alpha is the assembly coaxiality, namely the inclination angle, d is the offset between the central point of the image of the cross reticle and the original position received by the CCD photosensitive surface display screen, and f is the focal length of the lens.
Compared with the prior art, the invention has the beneficial effects that:
the coaxiality of the output head metal shell and the output head glass column is checked in sequence by means of the air-floating rotary table, so that the assembly coaxiality precision of the laser output head glass column is greatly improved, and the application quality of cutting, welding and the like of a laser is improved; the machining precision requirement of the mechanical shell is reduced, and therefore the production cost of the laser output head is reduced.
Drawings
FIG. 1 is a schematic view of an assembly coaxiality control and measurement device for a glass column of a laser output head according to the present invention;
FIG. 2 is a schematic diagram of a laser output head;
FIG. 3 is a bottom view of the device holder;
fig. 4 is a schematic structural diagram of a coaxiality measuring module.
Detailed Description
In order to make the invention more comprehensible, preferred embodiments are described in detail below with reference to the accompanying drawings.
As shown in FIGS. 1 to 3, the device for controlling and measuring the assembly coaxiality of the glass column of the laser output head comprises a clamping device which can clamp the laser output head 1 and can perform operations of X, Y and thetaX、θYThe device comprises an adjusted air floatation rotary table 2, a dial indicator 3 for axis verification, a coaxiality measuring module 4 for glass column angle verification and measurement and a device support frame 5.
The laser output head 1 is used for coupling output laser to equipment of an application end and comprises an output head glass column 1-1 and an output head metal shell 1-2, wherein the output head glass column 1-1 is welded with a laser output tail fiber. The air-floating rotary table 2 is used for clamping the output head, can provide X, Y, thetax and thetay adjustment of the output head, and provides high-precision positioning function in the process of assembly coaxiality control and measurement of the output head glass column 1-1. The air flotation rotary table 2 comprises a non-damping rotary module, a 4-dimensional adjusting frame is arranged above the non-damping rotary module and can be used for X, Y, theta X and theta Y adjustment, the centers of the non-damping rotary module and the 4-dimensional adjusting frame both comprise a through hole, and the minimum inscribed diameter of the through hole is generally 2-10 cm. A chuck which can clamp the laser output head 1 is arranged above the 4-dimensional adjusting frame. And the dial indicator 3 is arranged on a base of a device support frame 5 or other stable table tops and used for checking the coaxiality of the metal shell 1-2 of the output head and the air floatation rotary table 2.
The device support frame 5 is used for fixing the air floatation rotary table 2 and the coaxiality measuring module 4, and the coaxiality measuring module 4 is fixed right above the laser output head 1 on the air floatation rotary table 2. The bottom surface of the device support frame 5 comprises a through hole 5-1 which penetrates through the device support frame, the through hole 5-1 can be in a circular shape, a square shape or other shapes and is used for penetrating through a tail fiber output by a laser, and the minimum internal cutting diameter is generally 1-10 cm.
The coaxiality measuring module 4 is used for checking that the end face reflected light of the output head glass column 1-1 is coaxial with the air floatation rotary table 2 and measuring the assembly coaxiality of the glass column. As shown in FIG. 4, the coaxiality measuring module 4 comprises a light beam emitting module 4-1, a half mirror 4-2, a lens 4-3, a plane mirror 4-4, a CCD4-5 and a CCD light-sensitive surface display screen 4-6. The light beam emitting module 4-1 emits light beams with a cross reticle image to enter the half-transmitting and half-reflecting mirror 4-2, and the light beams reflected by the half-transmitting and half-reflecting mirror 4-2 enter the lens 4-3 to form parallel light beams. The plane reflector 4-4 is arranged on the air-floating turntable 2, the lens 4-3 is arranged between the semi-transparent semi-reflecting mirror 4-2 and the plane reflector 4-4, and the CCD4-5 is arranged above the semi-transparent semi-reflecting mirror 4-2. The parallel light beams are emitted to the plane reflector 4-4, and when the plane reflector 4-4 is coaxial with the axis of the air floating rotary table 2, the parallel light beams are reflected to the center of the cross reticle image of the CCD photosensitive surface display screen 4-6 to be at the original position 4-6-1.
Clamping a plane reflector 4-4 on an air-floating rotary table 2, rotating the air-floating rotary table 2 to drive the plane reflector 4-4 to rotate around the axis of the air-floating rotary table 2, contacting the surface of a centrosymmetric ring of the plane reflector 4-4 by a dial indicator 3, and adjusting X, Y and theta of the air-floating rotary table 2X、θYAnd the axis makes the value on the dial indicator 3 in the measuring range and the value is unchanged along with the rotation of the air floatation rotary table 2, and the axis of the plane reflecting mirror 4-4 is coaxial with the axis of the air floatation rotary table 2. And adjusting the positions of each part of the incident light path and the CCD4-5 to ensure that the center of the cross reticle image reflected by the plane reflector 4-4 is exactly positioned at the center of an imaging area of the CCD4-5, namely the center of a CCD light-sensitive surface display screen 4-6, and marking the center of the cross reticle image reflected by the plane reflector 4-4 at the moment as an original position 4-6-1.
Rotating the air-flotation turntable 2, forming a circular ring 4-6-3 by the central point 4-6-2 of the cross reticle image reflected by the output head glass column 1-1, and when the center of the circular ring 4-6-3 deviates from the original position 4-6-1, adjusting the light path again by using the plane mirror 4-4 to recalibrate the original position 4-6-1.
The plane reflector 4-4 is taken down, the light beam emitting module 4-1 emits a light beam with a cross reticle image to be incident on the semi-transparent semi-reflective mirror 4-2, the light beam reflected by the semi-transparent semi-reflective mirror 4-2 is incident on the lens 4-3 to form a parallel light beam and is incident on the end face of the output head glass column 1-1, the CCD4-5 receives the reflected light with the cross reticle image on the end face of the output head glass column 1-1 and sends the received cross reticle image to the CCD photosensitive surface display screen 4-6, and the assembly coaxiality parameter of the output head glass column 1-1 is calculated according to the offset of the central point 4-6-2 of the received cross reticle image and the original position 4-6-1.
The invention relates to a method for controlling and measuring the assembly coaxiality of a laser output head glass column, which applies the control and measurement device and has the following specific operation method:
firstly, clamping the output head metal shell 1-2 on the table top of the air floatation rotary table 2, and rotating the air floatation rotary table 2 to drive the output head metal shell 1-2 to rotate around the axis of the air floatation rotary table 2.
Step two, contacting the surface of any centrosymmetric circular ring of the metal shell 1-2 of the output head by using a dial indicator 3, and adjusting X, Y and theta of the air-floating rotary table 2X、θYAnd the shaft enables the numerical value on the dial indicator 3 to be within a measuring range and the numerical value to be unchanged along with the rotation of the air floatation rotary table 2, and the axis of the metal shell 1-2 of the output head is coaxial with the axis of the air floatation rotary table 2.
And step three, placing the output head glass column 1-1 into the output head metal shell 1-2, and continuing to rotate the air floatation rotary table 2, wherein the air floatation rotary table 2 drives the output head metal shell 1-2 and the output head glass column 1-1 to rotate. Parallel light beams with a cross-shaped differentiation plate image, which are emitted by a light beam emitting module 4-1 of a coaxiality measuring module 4, are incident on the end face of an output head glass column 1-1, end face reflected light with the cross-shaped differentiation plate image is received by an imaging module CCD4-5 in the coaxiality measuring module 4, and the imaging module CCD4-5 obtains the offset angle value of the output head glass column 1-1 relative to the axis of an output head metal shell 1-2 according to the offset of a central point 4-6-2 of the cross-shaped division plate image reflected by the received output head glass column 1-1 and an original position 4-6-1.
And adjusting the angle of the output head glass column 1-1 until the offset between the central point 4-6-2 of the cross reticle image received by the coaxiality measuring module 4 and the original position 4-6-1 is minimum, and at the moment, the end surface of the output head glass column 1-1 is vertical to the axis of the output head metal shell 1-2 to the maximum extent.
And step four, fixing the output head glass column 1-1 and the output head metal shell 1-2 under the minimum fitting circle radius by adopting glue or jackscrews and other modes to form the output head 1, and calculating the assembly coaxiality parameter of the output head glass column 1-1 according to the offset between the central point of the cross reticle image and the original position received by the coaxiality measuring module 4.
The assembly coaxiality calculation formula of the output head glass column 1-1 is as follows:
α=d/(2*f)
wherein alpha is the assembly coaxiality, namely the inclination angle, d is the offset of the central point 4-6-2 of the cross reticle image received by the CCD photosensitive surface display screen 4-6 and the original position 4-6-1, and f is the focal length of the lens 4-3.

Claims (8)

1. The utility model provides an assembly axiality control and measuring device of laser instrument output head glass post which characterized in that: comprises an air-floating rotary table (2) used for clamping a laser output head (1) and carrying out X, Y theta on the laser output head (1)XAnd thetaYAdjusting;
the dial indicator (3) is used for verifying whether an output head metal shell (1-2) of the laser output head (1) and the air floatation rotary table (2) are coaxial or not;
the coaxiality measuring module (4) is used for verifying whether an output head glass column (1-1) of the laser output head (1) and the air floatation rotary table (2) are coaxial or not and measuring the assembly coaxiality of the output head glass column (1-1) and the output head metal shell (1-2);
the device support frame (5) is used for fixing the air floatation rotary table (2) and the coaxiality measuring module (4), and the coaxiality measuring module (4) is arranged right above the laser output head (1).
2. The apparatus for controlling and measuring the assembly coaxiality of the glass column of the output head of the laser as set forth in claim 1, wherein: the coaxiality measuring module (4) comprises a light beam transmitting module (4-1), a semi-transparent and semi-reflective mirror (4-2), a lens (4-3), a plane reflecting mirror (4-4), a CCD (4-5) and a CCD photosensitive surface display screen (4-6), the plane reflecting mirror (4-4) is arranged on the air floatation rotary table (2), the lens (4-3) is arranged between the semi-transparent and semi-reflective mirror (4-2) and the plane reflecting mirror (4-4), the CCD (4-5) is arranged above the semi-transparent and semi-reflective mirror (4-2), the light beam transmitting module (4-1) transmits a light beam with a cross reticle image to be incident to the semi-transparent and semi-reflective mirror (4-2), and the light beam reflected by the semi-transparent and semi-reflective mirror (4-2) is incident to the lens (4-3) to form a parallel light beam to be transmitted to the plane reflecting mirror (4-4), when the plane reflector (4-4) is coaxial with the axis of the air-floating rotary table (2), the plane reflector reflects back to the center of the cross reticle image of the CCD photosensitive surface display screen (4-6) as an original position (4-6-1);
adjusting the angle of an output head glass column (1-1) on the air-floating rotary table (2) until the offset between the central point (4-6-2) of the cross reticle image received by the CCD (4-5) and the original position (4-6-1) is minimum, and controlling the assembly coaxiality of the output head glass column (1-1);
according to the offset between the central point (4-6-2) of the cross reticle image reflected by the output head glass column (1-1) and the original position (4-6-1) received by the CCD (4-5), the assembly coaxiality parameter of the output head glass column (1-1) is obtained through calculation, and the assembly coaxiality of the output head glass column (1-1) is measured.
3. The apparatus for controlling and measuring the assembly coaxiality of the glass column of the output head of the laser as set forth in claim 2, wherein: and the air-floatation rotary table (2) is provided with a through hole (5-1) for the tail fiber of the laser output head (1) to pass through.
4. A method for controlling and measuring the assembly coaxiality of a glass column of a laser output head, which is characterized in that the device for controlling and measuring the assembly coaxiality of the glass column of the laser output head as claimed in any one of claims 1 to 3 is applied, and comprises the following steps:
firstly, clamping an output head metal shell (1-2) on the table top of an air floatation rotary table (2), and rotating the air floatation rotary table (2) to drive the output head metal shell (1-2) to rotate around the axis of the air floatation rotary table (2);
secondly, contacting any centrosymmetric circular ring surface of the metal shell (1-2) of the output head by using a dial indicator (3) to adjust X, Y and theta of the air-floating rotary table (2)X、θYThe shaft is used for enabling the numerical value on the dial indicator (3) to be within a measuring range and the numerical value to be unchanged along with the rotation of the air floatation rotary table (2), and the axis of the metal shell (1-2) of the output head is coaxial with the axis of the air floatation rotary table (2);
thirdly, placing the output head glass column (1-1) into the output head metal shell (1-2), and continuing to rotate the air-floating rotary table (2), wherein the air-floating rotary table (2) drives the output head metal shell (1-2) and the output head glass column (1-1) to rotate;
the coaxiality measuring module (4) emits parallel light beams with a cross-shaped differentiation plate image to be incident on the end face of the output head glass column (1-1), reflected light of the end face of the output head glass column (1-1) with the cross-shaped differentiation plate image is received by the coaxiality measuring module (4), and the coaxiality measuring module (4) obtains a deviation angle value of the output head glass column (1-1) relative to the axis of the output head metal shell (1-2) according to the offset between the central point (4-6-2) of the cross-shaped division plate image reflected back by the received output head glass column (1-1) and the original position (4-6-1);
adjusting the angle of the output head glass column (1-1) until the offset between the central point of the cross reticle image received by the coaxiality measuring module (4) and the original position is minimum, and at the moment, the end surface of the output head glass column (1-1) is vertical to the axis of the output head metal shell (1-2) to the maximum extent;
and fourthly, fixing the output head glass column (1-1) and the output head metal shell (1-2) under the minimum fitting circle radius to form the laser output head (1), and calculating the assembly coaxiality parameter of the output head glass column (1-1) according to the offset between the central point of the cross reticle image and the original position received by the coaxiality measuring module (4).
5. The method for controlling and measuring the assembly coaxiality of the glass column of the output head of the laser as claimed in claim 4, wherein: and in the fourth step, the output head glass column (1-1) under the minimum fitting circle radius and the output head metal shell (1-2) are fixed by adopting a glue or jackscrew mode to form the laser output head (1).
6. The method for controlling and measuring the assembly coaxiality of the glass column of the output head of the laser as claimed in claim 4, wherein: the coaxiality measuring module (4) comprises a light beam transmitting module (4-1), a semi-transparent and semi-reflective mirror (4-2), a lens (4-3), a plane reflecting mirror (4-4), a CCD (4-5) and a CCD photosensitive surface display screen (4-6), the plane reflecting mirror (4-4) is arranged on the air floatation rotary table (2), the lens (4-3) is arranged between the semi-transparent and semi-reflective mirror (4-2) and the plane reflecting mirror (4-4), the CCD (4-5) is arranged above the semi-transparent and semi-reflective mirror (4-2), the light beam transmitting module (4-1) transmits a light beam with a cross reticle image to be incident to the semi-transparent and semi-reflective mirror (4-2), and the light beam reflected by the semi-transparent and semi-reflective mirror (4-2) is incident to the lens (4-3) to form a parallel light beam to be transmitted to the plane reflecting mirror (4-4), when the plane reflector (4-4) is coaxial with the axis of the air-floating rotary table (2), the plane reflector reflects back to the center of the cross reticle image of the CCD photosensitive surface display screen (4-6) as an original position (4-6-1).
7. The method for controlling and measuring the assembly coaxiality of the glass column of the laser output head as set forth in claim 6, wherein the method for determining the original position (4-6-1) of the center of the cross reticle image of the CCD photosensitive surface display screen (4-6) comprises the following steps:
clamping the plane reflector (4-4) on the air-floating rotary table (2), rotating the air-floating rotary table (2) and driving the plane reflector (4-4) to rotate around the axis of the air-floating rotary table (2), contacting the surface of the centrosymmetric ring of the plane reflector (4-4) by using the dial indicator (3), and adjusting X, Y and theta of the air-floating rotary table (2)X、θYThe shaft is used for enabling the numerical value on the dial indicator (3) to be within a measuring range and keeping the numerical value unchanged along with the rotation of the air floatation rotary table (2), and the axis of the plane reflector (4-4) is coaxial with the axis of the air floatation rotary table (2);
the positions of an incident light path light beam emitting module (4-1), a half-transmitting and half-reflecting mirror (4-2), a lens (4-3) and a CCD (4-5) are adjusted, so that the center of a cross reticle image reflected by a plane reflector (4-4) is just positioned at the center of an imaging area of the CCD (4-5), namely the center of a CCD light-sensing surface display screen (4-6), and the center of the cross reticle image reflected by the plane reflector (4-4) at the moment is marked as an original position (4-6-1).
8. The method for controlling and measuring the assembly coaxiality of the glass column of the output head of the laser as claimed in claim 6, wherein: the assembly coaxiality parameter calculation formula of the output head glass column (1-1) is as follows:
α=d/(2*f)
wherein alpha is the assembly coaxiality, namely the inclination angle, d is the offset of the central point (4-6-2) of the cross reticle image received by the CCD photosensitive surface display screen (4-6) and the original position (4-6-1), and f is the focal length of the lens (4-3).
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