JP2010145313A - Autocollimator apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To approximately simultaneously detect and measure the inclination of a measuring surface of an object to be inspected to a horizontal surface and the eccentricity of a rotating object to be inspected to a center of rotation when the object to be inspected is a rotating object to be inspected. <P>SOLUTION: An optical system 13 for inclination measurement for directing luminous flux from a laser light source 1 to a rotating object to be inspected D, detecting reflected light from its measuring surface d1 by a telecentric object lens 7, and performing projection to a light-receiving part 11 by an object lens 10 is formed. An optical system 15 for microscopes for detecting an index previously applied to the measuring surface d1 of the object to be inspected by the telecentric object lens 7 and performing projection to the light-receiving part 11 by the object lens 10 is formed. Both optical systems 13 and 15 are combined to project images detected by each of the optical systems to the common light-receiving part 11, to display them on a display part C, and to perform measurements. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to an autocollimator apparatus, which is capable of detecting and measuring the inclination (parallelism) and eccentricity of a measurement surface almost simultaneously while confirming a surface image of a subject measurement surface.

Various materials such as metal, glass, plastic, etc. are used in various fields to measure the inclination (parallelism) of the object measurement surface. An autocollimator is known for measuring the inclination of the measurement surface.
A conventional autocollimator will be described with reference to an optical system explanatory diagram of FIG. In FIG. A, a subject 35 is set on a reference surface 37 of a measurement table whose surface is a measurement surface 36 and in which accuracy in the horizontal direction is guaranteed in advance. In this example, the subject measurement surface 36 has an angle θ with respect to the reference surface 37. When the light source 38 is turned on with respect to the measurement surface 36 of the subject 35, the light passes through the lens 39, the screen 40 with a cross line, the beam splitter 41, and the collimator lens 42, and becomes a parallel light beam. And some of them pass through to the reference plane 37. For this reason, the cross line 43 of the screen 40 is reflected by the measurement surface 36 and the reference surface 37 and returns to the collimator lens 42 as a first cross line 44 and a second cross line 45 (FIGS. B and C). Reflected and projected on different positions of the light receiving surface 46.
The projected position is determined in accordance with the inclination θ between the measurement surface 36 and the reference surface 37. FIG. B shows the light receiving surface where the first cross line 44 and the second cross line 45 have a difference of the distance tx1. This is an example projected on 46. That is, the cross line 43 is projected as 44, 45 on the light receiving surface 46 with a difference of tx1 due to the inclination θ of the measurement surface 36 and the reference surface 37. As the inclination θ increases, the value of tx1 also increases. Conversely, as shown in FIG. C, the two cross lines 44 and 45 overlap from tx1 to tx, and when “θ = 0” is approached, the measurement surface 36 and the reference surface 37 It is determined that there is no inclination in the parallel state. Accordingly, if the image projected on the light receiving surface 46 is sent to a display unit (not shown) and displayed, the tilt angle θ can be measured.
However, with the collimator as described above, the surface shape of the measurement surface 36 of the subject 35 cannot be confirmed on the display unit. Therefore, it cannot be determined whether or not the position of the cross line 43 projected on the measurement surface 36 is the correct position. For example, if there is a scratch or dust on the measurement surface 36 and the cross line 43 is projected thereon, the cross lines 44 and 45 directed to the light receiving surface 46 in FIGS. It will have an effect. Further, when the subject rotates like a rotary encoder, if the subject and the rotation shaft are attached with eccentricity, the inclination tx becomes an unstable value depending on the measurement position. Therefore, when the subject rotates, it is important to measure both the tilt and the eccentricity, which affects the measurement accuracy. However, the conventional autocollimator including the example shown in FIG. 10 cannot detect both the inclination and the eccentricity almost simultaneously while confirming the surface shape of the measurement surface 36 as an image. For this reason, the measurement and adjustment are performed separately using different devices.

Patent Document 1 is known as an autocollimator for measuring the tilt of a subject. According to this Patent Document 1, it is described that a microscope is used so that the measurement site of the subject can be enlarged and confirmed. However, this Patent Document 1 does not disclose a method for dealing with a case where inclination and eccentricity are detected and measured almost simultaneously while confirming the measurement surface as an image and adjusted.
JP 2003-148939 A

An object of the present invention is to solve the above problems and to detect and measure and adjust the tilt of the subject and the microscope detection image almost simultaneously while confirming the microscope detection image with an optical system having a simple overall structure. It is to obtain a collimator device.

In order to solve the above-mentioned problems, the present invention converts a light beam from a laser light source into a parallel light beam, which is directed to a subject via an afocal converter lens formed by a first imaging lens and a telecentric objective lens, and reflected from the measurement surface. Telecentric optical system for tilt measurement that transmits light back to the second imaging lens as a parallel light beam and projects it onto the light receiving unit as a tilt detection image, an index applied in advance to the object measurement surface, and a surface image of the measurement surface A microscope optical system that detects at the imaging plane position of the objective lens and projects it as a microscope detection image from the second imaging lens onto the light receiving unit, and an inclination measuring optical system and a microscope optical system detect the common light receiving unit. And a display unit that receives and displays the detection image projected on the display, and the tilt of the measurement surface of the subject and the microscope detection image can be confirmed almost simultaneously on the display unit.
According to a second aspect of the present invention, in the autocollimator device according to the first aspect, an illumination light source is installed, a light beam from the illumination light source is directed to the subject measurement surface via the telecentric objective lens, and the measurement surface is illuminated. This is characterized in that it is an optical system for a microscope.
According to the third aspect of the present invention, the light beam from the laser light source is converted into a parallel light beam by the collimator lens, projected onto the primary image formation surface by the first imaging lens after passing through the first half mirror, and the light beam passes through the telecentric objective lens. A first optical unit for tilt measurement directed to the measurement surface of the subject, and the reflected light from the measurement surface by the first optical unit are returned to the outward path, through the telecentric objective lens, the primary imaging surface, and the first imaging lens. Formed with a second optical unit for tilt measurement that is reflected in the direction orthogonal to the first half mirror, transmitted to the second imaging lens after passing through the third half mirror, and projected onto the light receiving unit as a tilt detection image. The tilt measuring optical system and the light beam from the illumination light source are passed through the condenser lens toward the fourth half mirror, and the first imaging lens of the tilt measuring optical system is used. A first optical unit for a microscope that converges on a telecentric objective lens after passing through a second half mirror installed in a light beam directed toward the primary imaging surface and illuminates the measurement surface, and an object measurement surface illuminated by the first optical unit The surface image of the object and the index applied in advance to the measurement surface of the subject are detected at the position of the imaging surface of the telecentric objective lens, and the detected image is returned to the forward path in a direction orthogonal to the fourth half mirror after passing through the second half mirror. A microscope optical system formed by a second optical unit for microscope that reflects, reflects in a direction orthogonal to the third half mirror, and projects as a microscope detection image from the second imaging lens to the light receiving unit; It consists of an optical system for tilt measurement and a display unit that receives and displays the detection image projected on a common light receiving unit, and detects the tilt of the object measurement surface and the microscope detection image. Characterized in that to be able to check the display section.
According to the invention of claim 4, a plurality of lens barrels accommodating afocal converter lenses having different magnifications, and a lens turret having a plurality of lens barrels accommodating microscope imaging lenses having different magnifications are installed. The light beam from the laser light source is directed to the subject through the afocal converter lens barrel of the lens turret, the reflected light from the measurement surface is returned to the outward path, transmitted to the second imaging lens as a parallel light beam, and received as an inclination detection image. An index measurement optical system projected onto the part and an imaging lens barrel for the microscope of the lens turret detect an index previously applied to the subject measurement surface and a surface image of the measurement surface, and detect the microscope from the second imaging lens A microscope optical system that projects onto the light receiving unit as an image, and a display unit that receives and displays the detection image projected on the common light receiving unit, which is detected by the tilt measuring optical system and the microscope optical system. It is configured, using alternately the two optical systems in the rotation of the lens turret, characterized by being able to see on the display unit the slope and microscopic detection image of a subject measurement surface.

An autocollimator device according to the present invention includes a detection image from an optical system for tilt measurement for measuring the tilt of an object, and a detection image from an optical system for a microscope that detects a microscopic image of the object and measures eccentricity. Is basically sent to the display unit for display and measurement. As a result, even when the subject rotates like a rotary encoder, both tilt and eccentricity can be detected and measured almost simultaneously while checking the surface image of the subject measurement surface. This can also be simplified because the overall structure is a combination of the optical system for measuring the tilt of the subject and the optical system for detecting the microscope image. In addition, by installing a lens turret containing an afocal converter lens or the like in the optical path, it is possible to select and measure and adjust the inclination and eccentricity individually.

An autocollimator device according to the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is an explanatory front view showing an outline of the overall configuration of an autocollimator apparatus according to the present invention. In the figure, A is an optical system unit of the autocollimator apparatus, B is a control unit that controls the entire apparatus, and is connected to an input unit such as a keyboard and a mouse and various output devices. A display unit C connected to the control unit B displays an image sent from the optical system unit A. D is a subject, which is held by a mounting portion E and placed on a measurement table (not shown). A motor or the like is accommodated in the attachment portion E, and the subject D is rotated continuously or intermittently by rotation or manual operation of the motor. The light beam b1 from the laser light source 1 installed in the optical system part A passes through the collimator lens 2 to become a parallel light beam, and passes toward the first half mirror 3 installed at 45 degrees with respect to this light beam b1. . The light beam b1 that has passed through the first half mirror 3 passes through the first imaging lens 4 and is reflected by the second half mirror 5, and once forms an image on the primary imaging surface 6 in a different direction. Then, the telecentric objective lens 7 forms a parallel light beam and travels toward the subject measurement surface d1. Accordingly, the first imaging lens 4 and the telecentric objective lens 7 form an afocal converter lens. Hereinafter, the optical path from the laser light source 1 to the subject measurement surface d1 is referred to as a first optical unit 8 for measuring the tilt of the subject.
The light beam that has reached the subject measurement surface d1 by the first optical unit 8 returns to the outward path as reflected light b2, and the telecentric objective lens 7, the primary imaging surface 6, the second half mirror 5, and the first imaging lens. 4 is converted into a parallel light flux, reflected by the first half mirror 3 installed at 45 degrees, and deflected in the orthogonal direction. The reflected light beam b <b> 2 deflected at right angles to this optical path passes through the third half mirror 9 installed at 45 degrees, and is projected onto the light receiving unit 11 by the second imaging lens 10. The optical path from the subject measurement surface d1 to the light receiving unit 11 is hereinafter referred to as a second optical unit 12 for measuring the tilt of the subject. The tilt measuring first optical unit 8 and the tilt measuring second optical unit 12 are collectively referred to as a tilt measuring optical system 13.

  On the other hand, the subject measurement surface d1 is illuminated by room light or an illumination light source (not shown) installed around the measurement surface d1. Since the measurement surface d1 is preliminarily provided with an index m for detecting eccentricity as will be described later, the telecentric objective lens 7 has the index m on the measurement surface d1 illuminated at the position of the image plane and the index. A surface image around m is detected as a microscope detection image, and is directed toward the second half mirror 5 as a light beam b3. In the figure, the telecentric objective lens 7 detects the index m and the surface image on the measurement surface d1 at the image plane position, and the light beam b3 directed toward the second half mirror 5 is represented as a dotted line. The dotted light beam b3 that has passed through the second half mirror 5 is reflected in a direction orthogonal to the mirror 14 installed at 45 degrees. Then, the light is reflected by the third half mirror 9 installed at 45 degrees in the second optical unit 12 for tilt measurement and projected onto the light receiving unit 11 by the second imaging lens 10. Hereinafter, the portion from the measurement surface d1 to the light receiving unit 11 is referred to as the microscope optical system 15 of the subject. Since the telecentric objective lens 7 is prepared so that the primary imaging surface 6 of the tilt measurement optical system 13 and the object measurement surface d1 are in focus, the index m and the surface image applied to the measurement surface d1 are prepared. Is detected in focus. Further, the distance from the telecentric objective lens 7 to the measurement surface d1 is the working distance (WD).

The light beams projected from the two optical systems 13 and 15 onto the common light receiving unit 11 constituted by a CCD or the like are transmitted to the display unit C via the control unit B that controls the whole and are displayed almost simultaneously. As described above, the image displayed by the tilt measurement optical system 13 is used as a detection image for measuring the tilt of the subject measurement surface d1 placed on a measurement table (not shown), and the other microscope optical system. The image displayed by 15 becomes a microscope detection image, and is used as an eccentricity detection image while confirming the surface image of the subject.
When the object D is not provided with the eccentricity detection index m, that is, when the eccentricity measurement is not required, the microscope optical system 15 takes in only the surface image of the measurement surface d1 at the same time, and receives the light. Projected on. Accordingly, the inclination measuring optical system 13 detects and measures the inclination related to the minute portion in the visual field displayed on the display unit C.

As described above, the optical system unit A of this collimator device directs the light beam from the laser light source 1 toward the subject D, projects the reflected light from the measurement surface d1 onto the light receiving unit 11, and displays it on the display unit C. An optical system 13 for tilt measurement, and a microscope optical system 15 for displaying the surface image of the measurement surface d1 and the detection image of the index previously applied to the measurement surface d1 on the display unit C toward the common light receiving unit 11. The telecentric objective lens 7 and the second imaging lens 10 are connected to each other. Since such an optical system part A is used, it is possible to proceed with measurement and adjustment by detecting the tilt and eccentricity under the same conditions while confirming the surface of the measurement surface d1 as an image. Each lens, half mirror, etc. in the optical system part A are attached to the optical system part A main body by members not shown in the figure, but the description of all of them is omitted.

FIG. 2 explains the inclination of the subject measurement surface d1, where A is an explanatory view showing the subject D on the measurement table 16, and B is a display screen c1 of the display unit C. FIG. In FIG. A, the attachment portion E holding the subject D is installed on the measurement table 16. In this example, the measurement surface d1 is attached with an inclination of an angle θ with respect to the measurement table 16 (horizontal plane). FIG. B shows a state in which the reflected light from the measurement surface d1 by the tilt measurement optical system 13 is transmitted and displayed on the display screen c1 of the display unit C via the light receiving unit 11 of FIG. Reference numerals 17a, 17b, and 17c represent display positions of reflected light that change according to the inclination angle θ. For example, the bright spot 17c indicates the reflected light display position when the inclination angle of the measurement surface d1 is “θ = c”. That is, the light beam b1 from the light source 1 illuminates the measurement surface d1 having the inclination θ through the telecentric objective lens 7, and the reflected light b2 is projected onto the light receiving unit 11 by the second imaging lens 10 and displayed on the display unit C. The position when it is done is shown.
Assuming that the subject D is rotated around the rotation axis when the bright spot 17c is displayed, the intersection of the center lines 18 that are preset and displayed on the screen c1 if there is no eccentricity. The bright spot 17c draws a circular trajectory 19c centering on. In the figure, the locus 19c is indicated by a dotted line. If the distance from the center line 18 to the locus 19c is measured, the measurement surface d1 is measured to have an inclination of “θc”. Accordingly, the bright spot 17c is obtained by the tilt measurement optical system 13 as a detection image for tilt measurement. However, the setting of the center line 18 displays reflected light from the horizontal plane of the measurement table 16 on the display unit C. This can be obtained in advance.

While confirming the indicator of the bright spot 17c displayed on the screen c1, the attachment state of the rotating shaft of the motor and the subject D accommodated in the attachment portion E of FIG. 1 is adjusted, and the value of “θc” is decreased. . Then, the inclination angle of the measurement surface d1 is adjusted, and the reflected light angle from the measurement surface d1 also changes. The tilt measuring optical system 13 detects this and the second imaging lens 10 projects it onto the light receiving unit 11. Then, the bright spot 17b is displayed on the display screen c1, and it can be confirmed that the position of the bright spot 17c has changed and moved. If the subject D is rotated in this state, the locus 19b is displayed if there is no eccentricity. If the distance from the displayed bright spot 17b (trajectory 19b) to the center line 18 is measured, it is confirmed that the inclination of the measurement surface d1 has changed from “θc” to “θb”.
Thereafter, the attachment state of the subject D and the motor rotation shaft is adjusted in the same manner, and the value of “θb” is decreased. Then, on the screen c1, the bright spot 17b changes to the bright spot 17a and is displayed at a position that coincides with or approximates the intersection of the center lines 18. The bright spot 17a does not generate the locus 19 even when the subject D is rotated. If this state can be confirmed on the screen c1, the inclination of the subject D is measured as “θ = 0”.
As described above, the reflected light from the measurement surface d1 by the tilt measurement optical system 13 is displayed as the bright spot 17 on the screen c1. Then, by sequentially adjusting based on the bright spot 17, “θ = 0” can be obtained. When adjusting the tilt, the microscope optical system 15 constantly projects the surface image of the measurement surface d1 onto the light receiving unit 11 as described above, so that the surface image and the bright spot 17 are simultaneously displayed on the screen c1. Is done.

When the subject D has an inclination of “θ = 0”, the eccentricity is measured and adjusted while confirming the surface image of the subject measurement surface d1. First, the subject D will be described with reference to the explanatory perspective view of FIG. In the figure, the subject D is connected to the motor in the mounting portion E and can rotate. In this example, the rotation shaft of the motor is connected to the subject D at a position p2 that is eccentric from the center point p1 of the subject D by n. This eccentricity occurs due to an error in attaching the subject D and the motor, and the amount thereof becomes the value of the eccentricity n. On the measurement surface d1 of the subject D, an eccentricity detection index, for example, slits m1, m2, m3,... Is provided in advance on a virtual circle 20 having a radius r centered on the normal center point p1. Yes. 1 detects this index m1, m2, m3,... And sends it to the light receiving unit 11 together with the surface image of the measurement surface d1, and displays it as a microscope detection image of the subject D. C.
In the example of FIG. 3, since the eccentricity amount is n as described above, when the subject D is rotated around the position p2, the index m on the virtual circle 20 by the center point p1 is an elliptical locus. Draw. The eccentricity generated in the subject D is adjusted while confirming the index m on the locus on the display unit 10.

4 to 6 are diagrams for explaining the eccentricity of the subject D, and show the adjustment process of the detected eccentricity. FIG. 4A is a perspective view showing an example where the eccentricity “nc” is generated in the subject D, and B is displayed on the display screen c1 when the subject D of A is rotated. It is a figure explaining the locus | trajectory which the parameter | index m draws. In FIG. 4A, the indices m1, m2,... Are arranged on the virtual circle 20 having the radius r from the normal center point p1 as described above. However, due to the eccentricity “nc”, the center of rotation changes to the position p2c, and when the subject D is rotated, the index m on the virtual circle 20 centered on the position p1 rotates in an elliptical shape. When the index m rotating in an elliptical shape is confirmed on the display screen c1, it becomes as shown in FIG. 4B.

FIG. 4B shows the position indicated by the dotted circle 21 in FIG. 4A detected by the telecentric objective lens 7 of the microscope optical system 15 as the light beam b3, projected onto the light receiving unit 11 and displayed on the display screen c1. . When the index m is detected by the microscope optical system 15 while rotating the subject D, and sequentially sent to the display unit C for display, the position of the index m displayed on the screen c1 is sequentially rotated in an elliptical shape. Move. At this time, the microscope optical system 15 simultaneously detects not only the index m but also the measurement surface around the index m and sends it to the display screen c1. Therefore, when the index m is confirmed on the screen c1, the surface of the measurement surface d1 is also confirmed together. Therefore, when using a rotary encoder or the like as a subject, not only scratches and dust but also surface roughness The change of the will be confirmed. However, in the figure, the surface image is not shown at all in order to avoid complexity.
In FIG. B, of the trajectory of the index m moving on the ellipse, for example, the trajectory due to m1 is shown as 20c1 on the innermost circumference side. An image with the index m1 is shown as mc1 on the locus 20c1. Next to the locus 20c1, a locus 20c2 drawn by the index m2 following the index m1 is shown. Similarly, on the outermost peripheral side, an image mcn with a locus 20cn and an index mn that draws the locus 20cn is shown.
Since the innermost track 20c1 to the outermost track 20cn are actually connected to one, they are not independent tracks as shown in FIG. However, there is a difference corresponding to the eccentricity “nc” between the locus from the innermost side to the outermost side. That is, as the subject D rotates, the arbitrary index m appears to move while sequentially rotating from the innermost circumferential locus 20c1 position to the outermost circumferential locus 20cn position. In this example, the two images mc1 and mcn are shown as being displayed simultaneously on the left and right with the center line 18 as the center, but they are not displayed simultaneously. If the state in which the index m moves on the screen c1 can be confirmed in this way, it can be determined that the subject D is eccentric, and the value from the innermost track 20c1 to the outermost track 20cn can be obtained. Thus, the eccentricity “nc” is obtained.

  In the above description, the eccentricity after adjusting the inclination to the state of “θ = 0” as described in FIG. 2 is an example. Therefore, the center line 18 used at the time of tilt adjustment is displayed and used as it is on the screen c1, but the index m is displayed with the center line 18 as a reference, and the index m is sequentially moved on the screen c1. If it can be confirmed, the subject D is determined to have an eccentricity “nc”.

When the presence of the eccentricity “nc” is confirmed on the screen c1 as shown in FIG. 4, the attachment state of the motor and the subject D is adjusted while viewing the screen c1, and the value of “nc” is decreased. Then, “nc” becomes “nb” as shown in FIG. 5A.
FIG. 5A is a perspective view showing an example when the eccentricity “nb” is generated in the subject D, and B is an index displayed on the display screen c1 when the subject D of A is rotated. It is a figure explaining the state where the locus | trajectory which m draws moves sequentially and changes. 5A, the same indices m1, m2,... As in FIG. 4A are arranged on a virtual circle 20 having a radius r from the normal center point p1. However, since an eccentricity “nb” occurs at the attachment position of the subject D, the center of rotation is the position p2b. If the subject D is rotated, the index m on the virtual circle 20 centered on the position p1 is an ellipse. Rotate into a shape. When the index m rotating in an elliptical shape is detected by the microscope optical system 15 and confirmed on the display screen c1, the result is as shown in FIG. 5B.

FIG. 5B is an example when the position of the dotted circle 21 in FIG. 5A is detected by the microscope optical system 15 and the index m is projected on the light receiving unit 11 as a detection image and displayed on the screen c1. When the index m that rotates and moves elliptically while rotating the subject D is sequentially displayed on the screen c1, the position of the displayed index m sequentially rotates on the ellipse and draws a locus. In FIG. B, the innermost track drawn by the ellipse is shown as 20b1, the next track is 20b2,... The outermost track is shown as 20bn. Further, an image mb1 by the index m1 and an image mbn by the index mn are shown on the innermost track 20b1 and the outermost track 20bn.
If the state as if the innermost peripheral image mb1 sequentially moves to the outermost peripheral image mbn position by the rotation of the subject D can be confirmed on the screen c1, the subject D is eccentric. It is determined that “nb” exists. Then, by obtaining the distance from the innermost track 20b1 to the outermost track 20bn, the eccentricity “nb” can be obtained.

Thereafter, the attachment state of the subject D is adjusted in the same manner, and the value of “nb” is decreased to “na” as shown in FIG. 6A. If it is confirmed that the trajectories 20a1 to 20an drawn by the indices m1 to mn all coincide with the intersections of the center lines 18 as shown in FIG. 6B or that the trajectories are approximate positions, the inclination of the subject D is “n = It is determined as “0”.
If the eccentricity “n = 0” is determined in this way, the measurement operation of the subject D is completed together with the result of the previous inclination “θ = 0”. However, in the above description, for the sake of convenience, the tilt adjustment and the eccentricity adjustment are performed separately, but actually, the tilt measurement optical system 13 and the microscope optical system 15 are simultaneously measured from the subject measurement surface d1. Thus, both detection images are displayed on the display unit C at the same time. Accordingly, the tilt and the eccentricity can be adjusted simultaneously while viewing the screen c1.

As described above, in this embodiment, the telecentric objective lens 7 and the second imaging lens 10 combine the tilt measuring optical system 13 and the microscope optical system 15 and project the detected image onto one common light receiving unit 11. The inclination and eccentricity are obtained simultaneously. As a result, even when the subject D rotates, the eccentricity and inclination can be detected in a focused state under the same conditions, and the measurement and adjustment can proceed. When the subject D is stationary, it is only necessary to proceed with the detection of the tilt image by the tilt measurement optical system 13 as described above, but even in this case, the microscope optical system 15 should be used. Thus, the surface image of the measurement surface can be observed together.

  FIG. 7 is an explanatory front view of the second embodiment, and the same elements as those in FIG. In the figure, an illumination light source 22 dedicated to the microscope optical system 15 is installed in the optical system section A, and a light beam b4 from the illumination light source 22 is installed at 45 degrees while being condensed through a condenser lens 23. Heading toward the fourth half mirror 14a. The fourth half mirror 14a is installed at the position of the mirror 14 in FIG. 1. In the figure, the light beam b4 directed to the fourth half mirror 14a is cut immediately before the fourth half mirror 14a, and the optical path after that is omitted. As a thing. The light beam b4 that has passed through the fourth half mirror 14a is a second half mirror that is installed in the light beam b1 from the first imaging lens 4 of the tilt measurement optical system 13 described in FIG. 5 passes through and is focused on the telecentric objective lens 7 to illuminate the subject measurement surface d1.

Hereinafter, the optical path from the illumination light source 22 to the subject measurement surface d1 is referred to as a first optical unit 24 for microscope. Since the index m of the measurement surface d1 in the region illuminated by the first optical unit 24 is set so as to coincide with the imaging surface position of the telecentric objective lens 7, the reflected light from the illumination region is The telecentric objective lens 7 is detected in focus. The detected reflected light beam b3 indicated by the dotted line returns in the forward path, is reflected by the fourth half mirror 14a installed at 45 degrees through the second half mirror 5, and deflects the optical path in the orthogonal direction. Then, the light is reflected by the third half mirror 9 installed at 45 degrees in the second optical unit 12 for tilt measurement described with reference to FIG. 1 and projected onto the common light receiving unit 11 by the second imaging lens 10. The optical path from the subject measurement surface d1 to the light receiving unit 11 is referred to as a second optical unit for microscope 25. The microscope second optical unit 25 and the first microscope optical unit 24 are collectively referred to as a microscope optical system 15a. The indicators m1, m2,... And the surface image of the measurement surface d1 detected by the microscope optical system 15a are projected on the light receiving unit 11 as a microscope detection image as described with reference to FIG. It is transmitted and displayed on the display unit C. The tilt measuring optical system 13 is the same as that in FIG.

  As described above, in this embodiment, the optical system 13 for tilt measurement and the optical system 15a for the microscope are combined by one telecentric objective lens 7 and the second imaging lens 10 in the same manner as the example of FIG. The tilt and eccentricity of the subject D are simultaneously detected by the telecentric objective lens 7 and displayed on the display unit C. Since the illumination light source 22 can provide a measurement surface d1 illumination area under the same conditions, the quality of the surface image can be made constant. In addition, if the emission wavelengths of the laser light source 1 for tilt measurement and the light source 22 for illumination are different, the eccentricity on the display unit C and the tilt detection image can be easily identified.

Next, Embodiment 3 will be described with reference to FIGS. In this embodiment, a lens turret 28 is newly installed between the second half mirror 5 in the optical system part A and the subject D, and the rotation of the lens turret 28 causes the tilt measuring optical system 13 and the microscope optical system 15a to be connected. It can be used alternately.
The lens turret 28 is mounted in the optical system part A so as to be able to rotate about the central axis 29, and includes a plurality of afocal converter lens barrels 30a, 30b, 30c,..., And a microscope imaging lens barrel 31a. , 31b, 31c,... Are concentrically attached. When the lens turret 28 is rotated and the lens barrel 30 is set in the optical path, it is used as the tilt measuring optical system 13, and when the other lens barrel 31 is set in the optical path, it is used as the microscope optical system 15a. The lens barrels 30a, 30b, 30c,... Accommodate afocal converter lenses having various magnifications. This afocal converter lens is formed of a first imaging lens 4a and a telecentric objective lens 7a, and corresponds to the first imaging lens 4 and the telecentric objective lens 7 of FIGS. The lens barrels 31a, 31b, 31c,... Accommodate objective lenses 32 having various magnifications. Descriptions of the specific structure and mounting method of the lens turret 28, the position defining means for the central axis 29, and the like are omitted.

When the afocal converter lens barrel 30a is set in the optical path as shown in FIG. 8, the light beam b1 from the light source 1 becomes a parallel light beam through the collimator lens 2 as described in FIG. 7, and the first half mirror 3 of FIG. Is reflected by the second half mirror 5 and passes through the first imaging lens 4a in the afocal converter lens barrel 30a as a parallel light flux. Then, the light converges once on the primary imaging surface 6a, becomes a parallel light beam by the telecentric objective lens 7a, and moves toward the measurement surface d1. The light beam b2 reflected by the measurement surface d1 returns in the forward path, is reflected by the first half mirror 3 through the telecentric objective lens 7a, the primary imaging surface 6a, the first imaging lens 4a, and the second half mirror 5, and is shown in FIG. The light passes through the third half mirror 9 and is projected onto the light receiving unit 11 by the second imaging lens 10. When this projected light beam is transmitted from the control unit B to the display unit C, an image for tilt measurement is displayed.
When the lens turret 28 is rotated and the afocal converter lens barrel 30a is exchanged with other barrels 30b, 30c,..., The primary image formation surface depends on the magnification of the barrels 30b, 30c,. The position of 6a changes. Therefore, the telecentric objective lens 7a in the lens barrels 30b, 30c,... Is in focus so that the changed position of the primary imaging surface 6a and the position of the measurement surface d1 of the subject D installed at the fixed position are in focus. The shape and the like are designed in advance.

  As described above, when the afocal converter lens barrel 30 having an arbitrary magnification is set in the optical path and selected as the tilt measuring optical system 13, detection is projected onto the light receiving unit 11 according to the magnification of the barrel 30. The position of the image changes. That is, even if the inclination θ of the subject is the same, the position of the detection image projected on the light receiving unit 11 changes by changing the magnification. This change in magnification is determined by the distance f1 (FIG. 7) from the second imaging lens 10 to the light receiving unit 11 and the magnification AM in the afocal converter lens barrel 30. In this case, since the focal length f1 of the second imaging lens 10 is constant, the position of the image projected on the light receiving unit 11 is changed by rotating the lens turret 28 and converting the magnification of the lens barrel 30. I can do it. Therefore, when the value of the inclination θ is small, the accuracy can be improved by using the lens barrel 30 having a large magnification AM. If the magnification AM of the lens barrel 30 is initially reduced and used, the work can be advanced over a wide range of the measurement surface d1. Accordingly, the case where the inclination of the subject D is measured with normal accuracy and the case where the inclination is measured with high accuracy can be selected by rotating the lens turret 28.

In FIG. 8, the reflected light from the subject D becomes a parallel light beam when passing through the lens barrel 30 a, is reflected by the second half mirror 5 and travels toward the first half mirror 3, and passes through the second half mirror 5. Then, it is separated into a light beam that goes straight as it is. In FIG. 8, the separated straight light flux 26 is shown as 26, but the straight light flux 26 is reflected by the fourth half mirror 14 a of FIG. 7 and merged with the light flux from the first half mirror 3 by the third half mirror 9. . At this time, depending on the installation angle of each of the half mirrors 5, 14 a, 9, 3, a deviation occurs in the combined light beam, and the projected light beam to the light receiving unit 11 is disturbed. Therefore, it is preferable to install a light blocking device 27 in the optical path in order to prevent the straight beam 26 that has passed through the second half mirror 5 from being projected onto the light receiving unit 11. For example, a shutter 27s (FIG. 8) is installed, or the third half mirror 9 and the fourth half mirror 14a of FIG. 7 are fixed to one pedestal 27d. If it is made to prevent that advancing, projection to the light-receiving part 11 can be interrupted.

FIG. 9 shows a case where the optical system part A is selectively used as the microscope optical system 15a. In the figure, the lens turret 28 rotates around the central axis 29 from the state of FIG. 8, and the lens barrel 31a is set in the optical path.
When the illumination light source 22 in FIG. 7 is turned on in this state, the light beam b4 passes through the fourth half mirror 14a and the second half mirror 5 while being converged by the condenser lens 23 in FIG. Once converged near the objective lens 32 in the lens barrel 31a, the measurement surface d1 is illuminated. In the figure, this illuminated area is shown as an illumination area 33. In FIG. 7, the dotted optical path to the illumination area 33 extends to immediately before the fourth half mirror 14a, but the index m located in the illumination area 33 and the surface image of the surrounding area are determined by the objective lens 32 of the set lens barrel 31a. Detected. The detected image returns in the forward path, passes through the second half mirror 5, is reflected by the fourth half mirror 14 a, and is projected onto the common light receiving unit 11 through the third half mirror 9 and the second imaging lens 10. The microscope detection image projected on the light receiving unit 11 is transmitted from the control unit B to the display unit C and displayed as a surface image and an index m. In this way, the lens turret 28 is rotated to set an arbitrary lens barrel 31 in the optical path, thereby being used as the microscope optical system 15a.
In the case of this microscope optical system 15a, the reflected light from the subject illumination area 33 that passes through the lens barrel 31a does not become a parallel light beam, so even if a light beam reflected by the second half mirror 5 is generated, the light receiving unit 11 Never reach. Therefore, it is not necessary to install the light blocking device 27 as shown in FIG.

  When the lens turret 28 is rotated and converted into objective lens barrels 31a, 31b, 31c,... With a desired magnification, the size of the detection image projected on the light receiving unit 11 according to the magnification of the lens barrel 31 is Change. This change in magnification can be obtained as f1 / f2 by the focal length f1 of the second imaging lens 10 in FIG. 7 and the focal length f2 of the objective lens 32 in FIG. Then, the microscope detection image can be confirmed on the display unit C by the obtained magnification.

  As described above, the third embodiment has been described with reference to FIGS. In the case of this example, it is not possible to display both detected images by the tilt measuring optical system 13 and the microscope optical system 15a on the display unit C at the same time. However, by rotating the lens turret 28 and using both the optical systems 13 and 15 alternately, it is possible to confirm on the display section C that the states are almost simultaneously.

The autocollimator apparatus according to the present invention has been described above, but the entire optical system shown in the drawing illustrates only basic elements, and various members normally installed in the optical system, such as filters and diaphragms, etc. Is omitted and not described in detail. Further, the control unit B and the display unit C can be replaced with a general personal computer.

BRIEF DESCRIPTION OF THE DRAWINGS Schematic for description which showed the whole structure of the autocollimator apparatus by this application. The figure explaining the inclination of a subject. The perspective view explaining a subject. The figure explaining eccentricity of a subject. The figure explaining eccentricity of a subject. The figure explaining eccentricity of a subject. Explanatory drawing of Example 2. FIG. Explanatory drawing of Example 3. FIG. Explanatory drawing of Example 3. FIG. Explanatory drawing of a prior art example.

Explanation of symbols

A ... autocollimator optical system B ... control unit C ... display unit D ... subject E ... mounting part d1 ... measurement surface m ... index 1 ... laser light source DESCRIPTION OF SYMBOLS 2 ... Collimator lens 3 ... 1st half mirror 4 ... 1st imaging lens 5 ... 2nd half mirror 6 ... Primary imaging surface 7 ... Telecentric objective lens 8 ... First optical unit for tilt measurement 9 ... third half mirror 10 ... second imaging lens 11 ... light receiving part 12 ... second optical unit for tilt measurement 13 ... optical system for tilt measurement DESCRIPTION OF SYMBOLS 14 ... Mirror 15 ... Optical system for microscopes 18 ... Center line 22 ... Light source for illumination 23 ... Condenser lens 24 ... First optical unit for microscope 25 ... Second for microscope Optical unit 27 ... Light blocking device 28 ... Zurlet 30 ... Afocal converter lens barrel 31 ... Microscope imaging lens barrel 32 ... Objective lens 33 ... Illumination area 35 ... Subject 36 ... Measuring surface 37 ... Reference plane 38 ... light source 39 ... lens 40 ... screen 41 ... beam splitter 42 ... collimator lens 43 ... cross line 46 ... light receiving surface

Claims (4)

The light beam from the laser light source is converted into a parallel light beam, directed to the subject via an afocal converter lens formed by the first imaging lens and the telecentric objective lens, and the reflected light from the measurement surface is returned to the forward path as the second parallel light beam. An optical system for tilt measurement that is transmitted to the imaging lens and projected onto the light receiving unit as a tilt detection image, an index applied in advance to the subject measurement surface, and a surface image of the measurement surface are detected at the imaging surface position of the telecentric objective lens. The microscope optical system that projects the microscope detection image from the second imaging lens as a microscope detection image onto the light receiving unit, the tilt measurement optical system, and the microscope optical system detect and receive and display the detection image projected on the common light receiving unit. An autocollimator device comprising a display unit, wherein the tilt of the subject measurement surface and the microscope detection image can be confirmed almost simultaneously on the display unit. 2. An optical system for a microscope in which an illumination light source is installed and a light beam from the illumination light source is directed to an object measurement surface via a telecentric objective lens to illuminate the measurement surface. The autocollimator device described. The light beam from the laser light source is converted into a parallel light beam by a collimator lens, projected onto the primary imaging surface by the first imaging lens after passing through the first half mirror, and tilted to direct the light beam to the measurement surface of the subject via the telecentric objective lens. The first optical unit for measurement and the reflected light from the measurement surface by the first optical unit are returned to the outward path, and converted into a parallel light beam through the telecentric objective lens, the primary imaging surface, and the first imaging lens. An inclination measuring optical system formed by an inclination measuring second optical unit that reflects in an orthogonal direction, passes through the third half mirror and is transmitted to the second imaging lens and is projected onto the light receiving unit as an inclination detection image, and illumination The light beam from the light source for light passes through the condenser lens toward the fourth half mirror, and the light beam travels from the first imaging lens of the tilt measurement optical system toward the primary imaging surface. A first optical unit for a microscope that converges on a telecentric objective lens after passing through the placed second half mirror and illuminates the measurement surface, a surface image of the object measurement surface illuminated by the first optical unit, and an object measurement surface Is detected at the image plane position of the telecentric objective lens, the detected image is returned to the forward path, reflected by the fourth half mirror in the direction orthogonal to the second half mirror, and directed to the third half mirror. A microscope optical system, a tilt measuring optical system, and a microscope optical system formed by a second optical unit for a microscope that is reflected in a direction orthogonal to each other and projected from the second imaging lens as a microscope detection image onto a light receiving unit. The system is configured with a display unit that receives and displays the detection image that is detected and projected on the common light receiving unit, so that the tilt of the measurement surface of the subject and the microscope detection image can be confirmed almost simultaneously on the display unit Autocollimator and wherein the a. A lens barrel with a plurality of lens barrels containing afocal converter lenses with different magnifications and a lens barrel with a plurality of microscope imaging lenses with different magnifications are installed. An optical system for tilt measurement that directs the light beam from the laser light source to the subject via the path, returns the reflected light from the measurement surface to the outward path, transmits it to the second imaging lens as a parallel light beam, and projects it as a tilt detection image on the light receiving unit And a microscope imaging lens barrel of the lens turret for detecting an index previously applied to the object measurement surface and a surface image of the measurement surface, and projecting from the second imaging lens to the light receiving unit as a microscope detection image It consists of an optical system, a tilt measuring optical system and a microscope optical system, and a display unit that receives and displays a detection image projected on a common light receiving unit. Use alternately rotating the Retto, autocollimator apparatus being characterized in that to be able to check the display unit slope and microscopic detection image of a subject measurement surface.