CN113649296B - But dilatation wafer sorter - Google Patents
But dilatation wafer sorter Download PDFInfo
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- CN113649296B CN113649296B CN202110965977.7A CN202110965977A CN113649296B CN 113649296 B CN113649296 B CN 113649296B CN 202110965977 A CN202110965977 A CN 202110965977A CN 113649296 B CN113649296 B CN 113649296B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/361—Processing or control devices therefor, e.g. escort memory
- B07C5/362—Separating or distributor mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/38—Collecting or arranging articles in groups
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
- B07C2501/0063—Using robots
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a but dilatation wafer sorter relates to the technical field of wafer sorter, including the box, be provided with in the box and place the platform, place to be provided with the sorting mechanism that is used for selecting separately the crystal grain on the platform, place to be provided with the fixture that is used for centre gripping and removes the wafer on the platform, place to be provided with the mount table on the platform, be provided with a plurality of categorised empty/full magazine and a plurality of unclassified sheet magazine on the mount table, be provided with a plurality of limiting plates on the mount table, limiting plate length direction is parallel to each other, and categorised empty/full magazine sets up between the limiting plate. The present application has the effect of reducing the chance of the sorted empty/full magazines being displaced within the box.
Description
Technical Field
The present disclosure relates to wafer sorting machines, and particularly to a wafer sorting machine with capacity expansion.
Background
Wafer sorters are instruments for sorting dies and have found wide application in the field of semiconductor manufacturing. The wafer sorter can mount the crystal grains with similar photoelectric characteristics on the wafer ring, and collect the wafers with similar performance characteristics together according to the parameters of the wafers, thereby completing sorting work and facilitating subsequent processing of the wafers by users.
The related wafer sorting machine comprises a box body, wherein a sorting mechanism is arranged in the box body and used for selecting and moving crystal grains, a clamping mechanism is arranged in the box body and used for moving and clamping wafers in the box body, the clamping mechanism is used for inserting the wafers into the sorting mechanism and taking out the sorted wafers, a plurality of sorted empty/full trays and unclassified wafer trays are detachably connected in the box body, a user sets the empty sorted empty/full trays in the box body, sets the sorted empty/full trays with empty wafer rings in the box body, sets the unclassified wafer trays with unsorted wafers in the box body, and then sets the unsorted wafers comprising scattered crystal grains and wafer rings in the wafer rings, the clamping mechanism can set the empty wafer rings and the wafers to be sorted in the sorting mechanism, so that the sorting mechanism can take out the crystal grains with similar photoelectric characteristics according to input information and install the crystal grains on the empty wafer rings, and pick up the clamping mechanism until the unclassified wafers are continuously sorted into the empty wafer rings, and the unclassified wafers can be sorted completely.
The prior art solutions described above have the following drawbacks: in the process that the clamping mechanism inserts the wafers into the classified empty/full tray, when the classified empty/full tray slides or the mounting position deviates, the clamping mechanism is easy to impact the wafers on the classified empty/full tray, so that the wafers are damaged.
Disclosure of Invention
In order to reduce the probability of the position deviation of the classified empty/full tray box in the box body, the application provides a expandable wafer sorting machine.
The expandable wafer sorting machine adopts the following technical scheme:
the utility model provides a but dilatation wafer sorter, includes the box, is provided with in the box and places the platform, places to be provided with the sorting mechanism that is used for selecting separately the crystal grain on the bench, places to be provided with the fixture that is used for centre gripping and removes the wafer on the bench, places to be provided with the mount table on the bench, is provided with a plurality of categorised empty/full tray magazines and a plurality of unclassified sheet magazines on the mount table, is provided with a plurality of limiting plates on the mount table, limiting plate length direction is parallel to each other, and categorised empty/full tray magazines set up between the limiting plate.
Through adopting above-mentioned technical scheme, through setting up the placing table in the box, set up sorting mechanism and fixture on placing table, make fixture can centre gripping and remove the wafer, and then make fixture can send the wafer to sorting mechanism in, through setting up empty/full tray box of having already been classified and unclassified sheet tray box on placing table, make fixture can take out the wafer in the unclassified sheet tray earlier and send into sorting mechanism, put into sorting mechanism with empty wafer ring again, fixture can take out and send into different empty/full tray boxes of having already been classified from sorting mechanism, thereby reach the effect of sorting wafer, through setting up a plurality of limiting plates on the mount table, the user can set up empty/full tray box of having already been classified between two adjacent limiting plates, and then make limiting plate butt on two lateral walls that have already been classified empty/full tray box is relative, and then reduce the probability that empty/full tray box has been classified in the box skew.
Optionally, the limiting plate is provided with a plurality of fixture blocks, the length direction of the fixture blocks is perpendicular to the length direction of the limiting plate, the plurality of fixture blocks are arranged at equal intervals along the length direction of the limiting plate, the classified empty/full tray magazine is arranged between two adjacent fixture blocks, and the fixture blocks are used for being abutted on the outer wall of the classified empty/full tray magazine.
Through adopting above-mentioned technical scheme, through setting up a plurality of fixture blocks on the limiting plate, make the fixture block set up along limiting plate length direction equidistance interval to make the fixture block can the butt on the empty/full magazine of classification, when the user will be classified empty/full magazine setting on the mount table, four lateral walls of the empty/full magazine of classification can respectively with limiting plate and fixture block butt, further reduce the probability of the skew of empty/full magazine of classification in the box.
Optionally, a plurality of mounting holes are formed in the mounting table, a plurality of fixing holes are formed in the limiting plate, the fixing holes are formed into straight notch, the length direction of the straight notch is perpendicular to the length direction of the limiting plate, the limiting plate is fixed to the mounting table through bolts, and the bolts are inserted into the fixing holes and the mounting holes.
Through adopting above-mentioned technical scheme, through seting up a plurality of mounting holes on the mount table, set up a plurality of fixed orificess on the limiting plate, make the limiting plate can pass through the bolt fastening on the mount table, the user can make the limiting plate slide along the length direction of fixed orifices on the mount table through unscrewing the bolt, and then the position of facilitating the use person adjustment limiting plate, make the limiting plate can the butt all the time on the empty/full magazine of classifying, make the empty/full magazine of classifying of equidimension all can set up between the limiting plate.
Optionally, be provided with a plurality of side cardboard on the mount table, the side cardboard sets up between two adjacent limiting plates, and the length direction of side cardboard is perpendicular with limiting plate length direction, and the side cardboard is used for the butt on the empty/full disk magazine of having already been classified.
Through adopting above-mentioned technical scheme, through setting up the side cardboard on the mount table, make side cardboard can the butt on the empty/full magazine of categorised, when the size of the empty/full magazine of categorised is less, adjacent two fixture blocks on the limiting plate are difficult to simultaneously the butt on the outer wall of the empty/full magazine of categorised, through setting up the side cardboard on the mount table, make side cardboard and a fixture block can the butt on two opposite lateral walls on the empty/full magazine of categorised, reach the effect of blocking the empty/full magazine of categorised.
Optionally, a plurality of connecting holes have been seted up on the side cardboard, and the connecting hole is offered along side cardboard length direction interval, and the connecting hole is offered to straight notch, and the length direction of connecting hole is perpendicular with side cardboard length direction, and the side cardboard passes through the bolt fastening on the mount table, and the bolt inserts in mounting hole and the connecting hole.
Through adopting above-mentioned technical scheme, through seting up a plurality of connecting holes on the side cardboard, make the side cardboard can pass through bolted connection on the mount table, use the personnel to unscrew the bolt, can make the side cardboard slide on the mount table, and then the position of convenient use personnel adjustment side cardboard makes side cardboard and fixture block can the butt on the empty/full tray magazine of categorised.
Optionally, two opposite inner side walls on the classified empty/full tray are provided with a plurality of clamping grooves, the clamping grooves are arranged at equal intervals along the linear direction, and the clamping grooves are used for inserting wafers.
Through adopting above-mentioned technical scheme, through seting up a plurality of draw-in grooves on the empty/full magazine of having already classified, make the wafer can insert in the draw-in groove through fixture, and then make every wafer can insert in a draw-in groove, when being provided with a plurality of wafers in the empty/full magazine of having already classified, there is the clearance between two adjacent wafers to reduce adjacent wafer each other butt and frictional probability, reach the effect of protection wafer.
Optionally, a handle is rotatably connected to the sorted empty/full tray, and an opening direction of the sorted empty/full tray is parallel to a rotation axis formed by the handle relative to the sorted empty/full tray.
Through adopting above-mentioned technical scheme, through rotating on the empty/full disk magazine of having already classifying and being connected with the handle, user can hold the empty/full disk magazine of having already classifying through the handle, through making the handle rotate connect on the lateral wall of empty/full disk magazine of having already classifying, user can rotate the handle, makes the handle laminating on the outer wall of empty/full disk magazine of having already classifying to play the effect that reduces the empty/full disk magazine of having already classifying and occupy the space, convenience of use personnel sets up more empty/full disk magazines of having already classifying on the mount pad.
Optionally, an opening is formed in the box body, a door body is rotatably connected to the box body, the door body is used for rotating and sealing the opening, and the door body is made of transparent materials.
Through adopting above-mentioned technical scheme, through rotating the setting door body on the box, make the door body shutoff opening, and then be in airtight state in the messenger box, reduce the probability that the dust got into in the box and attached to the wafer, through using transparent material preparation door body, the user can be through inside the door body observation box, and the convenience of use person looks over the remaining wafer quantity in the unclassified sheet magazine, the convenience of use person changes unclassified sheet magazine.
In summary, the beneficial technical effects of the application are:
1. the clamping mechanism can clamp and move the wafers to the sorting mechanism, the clamping mechanism can take out the wafers in the unclassified sheet material box and send the wafers into the sorting mechanism, the empty wafer ring is put into the sorting mechanism, the clamping mechanism can take out the sorted wafers from the sorting mechanism and send the wafers into different sorted empty/full tray material boxes, and therefore the effect of sorting the wafers is achieved;
2. the clamping blocks are arranged on the limiting plate at equal intervals along the length direction of the limiting plate, so that the clamping blocks can be abutted against the classified empty/full tray magazines, and when a user sets the classified empty/full tray magazines on the mounting table, the four side walls of the classified empty/full tray magazines can be respectively abutted against the limiting plate and the clamping blocks, so that the possibility of shifting the classified empty/full tray magazines in the box body is further reduced;
3. by arranging a plurality of clamping grooves on the classified empty/full tray, the wafers can be inserted into the clamping grooves through the clamping mechanism, and then each wafer can be inserted into one clamping groove.
Drawings
Fig. 1 is a partial sectional view of the structure of the case of embodiment 1 of the present application.
Fig. 2 is a schematic diagram of the mounting structure of the sorting mechanism and the holding mechanism of embodiment 1 of the present application.
Fig. 3 is a schematic structural view of the mount of embodiment 1 of the present application.
Fig. 4 is an enlarged schematic view of the portion a in fig. 3.
Fig. 5 is an enlarged schematic view of a portion B in fig. 3.
Fig. 6 is a schematic structural view of the classified empty/full magazine of embodiment 1 of the present application.
Fig. 7 is a schematic structural view of a mount of embodiment 2 of the present application.
Fig. 8 is a logic block diagram of embodiment 2 of the present application.
Reference numerals: 1. a case; 11. a placement table; 12. a door body; 13. a sorting mechanism; 14. a clamping mechanism; 2. a mounting table; 21. a mounting hole; 3. a limiting plate; 31. a clamping block; 32. a fixing hole; 4. a side clamping plate; 41. a connection hole; 5. classified empty/full magazines; 51. a clamping groove; 52. a handle; 6. unclassified sheet magazines; 7. a bracket; 8. a gravity sensor; 91. a controller; 92. and a user terminal.
Detailed Description
The present application is described in further detail below in conjunction with figures 1-8.
The embodiment of the application discloses a dilatable wafer separator. Referring to fig. 1 and 2, the wafer sorting machine comprises a box body 1, wherein the box body 1 is vertically arranged on the ground, an opening is formed in the box body 1, the opening is formed in the side wall of the box body 1, and a user puts wafers into the box body 1 through the opening and sorts the wafers. The door body 12 is rotatably connected to the box body 1, and the door body 12 is used for rotating and covering the opening of the box body 1, so that the box body 1 is closed, dust is reduced from entering the box body 1, and the processing quality of wafers is affected. The box 1 is internally provided with a placing table 11, the placing table 11 is horizontally arranged, a sorting mechanism 13 for sorting crystal grains is arranged on one side surface of the placing table 11 far away from the ground, wafers can be inserted into the sorting mechanism 13, a clamping mechanism 14 is arranged on the placing table 11, the clamping mechanism 14 is arranged above the sorting mechanism 13, the clamping mechanism 14 can move above the placing table 11 and clamp the wafers, the sorting mechanism 13 sorts the crystal grains according to data such as processing quality and the like through parameters such as light spot characteristics of the crystal grains, the crystal grains are mounted in empty wafer rings, and the clamping mechanism 14 can put the wafers to be sorted into the sorting mechanism 13 and convey the sorted wafers to a preset position.
Referring to fig. 1 and 2, an unclassified sheet magazine 6, a classified empty/full tray magazine 5, and a plurality of classified tray sub-full trays are detachably connected to the upper surface of the placement table 11, the unclassified sheet magazine 6 being for placing unclassified wafers, and the classified empty/full tray magazine 5 being for placing empty wafer rings without dies. The holding mechanism 14 can take out the unsorted wafers and the empty wafer ring and mount them in the sorting mechanism 13, and mount the crystal grains of a specific grade in the scattered wafers in the empty wafer ring. Six sorting tray underfills may be provided in this embodiment, and the clamping mechanism 14 is capable of picking out dies according to six photoelectric characteristic standards and mounting the dies in empty wafer rings, and disposing wafer rings mounted with dies of different grades in the sorting tray underfills, respectively. When the sorting of the die of one level is completed, the gripper mechanism 14 moves the wafer ring with the die sorted to the tray less than full magazine of the sorting tray, and takes out the second empty wafer ring from the empty/full magazine 5 of the sorted wafer, so that the sorting mechanism 13 can mount the die of the next level on the wafer ring. As sorting proceeds, the number of empty rings in the sorted empty/full magazine 5 gradually decreases, and at this time, the sorting mechanism 13 continuously installs the dies in the unsorted wafers in different wafers until the same grade of dies are arranged on the wafers and new sorted wafers are formed, and the clamping mechanism 14 places the sorted wafers into the empty slots of the sorted empty/full magazine 5 at this time, so that the sorted empty/full magazine 5 can collect the sorted wafers, and a user can continuously replace the sorted empty/full magazine 5, so that the empty rings can be continuously placed into and taken by the clamping mechanism 14, and at the same time, the sorted wafers can be taken out and processed in the next step. As the processing proceeds, the wafers to be sorted in the unclassified sheet magazine 6 are gradually sorted, so that there are no dies in the wafer rings in the unclassified sheet magazine 6, and a user can take out and replace the unclassified sheet magazine 6, so that new wafers to be sorted can be placed in the box 1, and the sorting mechanism 13 can continuously sort the dies.
Referring to fig. 1, the door body 12 is made of transparent materials, the door body 12 can be made of materials such as glass and plastic, and a user can observe the inside of the box body 1 through the door body 12 and view the number of the remaining wafers in the unclassified sheet magazine 6, so that the user can conveniently replace the unclassified sheet magazine 6.
Referring to fig. 2 and 3, a mounting table 2 is provided on a surface of the placement table 11 on a side away from the ground, and the mounting table 2 is disposed in parallel with the placement table 11. The mounting table 2 is used for carrying classified empty/full trays 5, the classified empty/full trays 5 are arranged in a rectangular box body structure, and a plurality of the classified empty/full trays 5 are arranged on the mounting table 2 at intervals along a linear direction.
Referring to fig. 3, a plurality of limiting plates 3 are detachably connected to the mounting table 2, and in this embodiment, two limiting plates 3 are provided, and the two limiting plates 3 are disposed parallel to each other on a side surface of the mounting table 2 away from the placement table 11. The limiting plates 3 are used for clamping the classified empty/full tray magazines 5, the classified empty/full tray magazines 5 are arranged between the two limiting plates 3, and a plurality of the classified empty/full tray magazines 5 are arranged at intervals along the length direction of the limiting plates 3. By arranging the limiting plate 3 on the mounting table 2, the limiting plate 3 has the effect of limiting the positions of the classified empty/full trays 5, so that the probability of position deviation of the classified empty/full trays 5 on the mounting table 2 is reduced, the clamping mechanism 14 can place the wafers into the classified empty/full trays 5 according to a preset motion track, the probability of the wafers striking the classified empty/full trays 5 is reduced, and the purpose of protecting the wafers is achieved.
Referring to fig. 3, a plurality of clamping blocks 31 are provided on the limiting plate 3, and the clamping blocks 31 are fixed on the limiting plate 3 by welding or integral molding. The clamping blocks 31 are arranged on the side wall of the limiting plate 3, which is close to the classified empty/full tray magazine 5, and the clamping blocks 31 are arranged at equal intervals along the length direction of the limiting plate 3. The length direction of the clamping block 31 is perpendicular to the length direction of the limiting plate 3. By arranging the clamping blocks 31 on the limiting plates 3, the clamping blocks 31 can be abutted on the outer side walls of the classified empty/full tray magazines 5, and by enabling the clamping blocks 31 and the limiting plates 3 to be abutted on the classified empty/full tray magazines 5, the probability of the classified empty/full tray magazines 5 shifting on the mounting table 2 is further reduced.
Referring to fig. 4, the limiting plate 3 is provided with a plurality of fixing holes 32, the mounting table 2 is provided with a plurality of mounting holes 21, and the fixing holes 32 correspond to the mounting holes 21. The user can fix the limiting plate 3 to the mount 2 by inserting the bolts into the fixing holes 32 and the mounting holes 21.
Referring to fig. 4, the fixing holes 32 are formed as straight notches, and a plurality of fixing holes 32 are formed at equal intervals along the length direction of the limiting plate 3. The length direction of the straight notch is perpendicular to the length direction of the limiting plate 3. The user can slide the limiting plate 3 in the length direction of the fixing hole 32 by unscrewing the bolts, and further slide the limiting plate 3 in the direction approaching and separating from the sorted empty/full tray magazine 5. After the limiting plates 3 are abutted on the classified empty/full tray magazine 5, a user can screw the bolts again, so that the limiting plates 3 are kept fixed on the mounting table 2, the spacing between the two limiting plates 3 is convenient for the user to adjust, and the limiting plates 3 can be abutted on two sides of the classified empty/full tray magazine 5 with different sizes.
Referring to fig. 3, a plurality of side clamping plates 4 are arranged on the mounting table 2, the side clamping plates 4 are detachably connected to the mounting table 2, the length direction of the side clamping plates 4 is perpendicular to the length direction of the limiting plate 3, and the side clamping plates 4 are arranged at equal intervals along the length direction of the limiting plate 3. When the classified empty/full magazine 5 with a smaller size is arranged on the mounting table 2, two adjacent clamping blocks 31 are difficult to simultaneously abut against the outer wall of the classified empty/full magazine 5, and at the moment, the side clamping plates 4 can abut against the outer wall of the classified empty/full magazine 5, so that the side clamping plates 4 and the clamping blocks 31 can simultaneously abut against two opposite outer side walls of the classified empty/full magazine 5, and the limiting plates 3, the clamping blocks 31 and the side clamping plates 4 respectively abut against four side walls of the classified empty/full magazine 5, thereby achieving the effect of fixing the classified empty/full magazine 5 and reducing the probability of position deviation of the classified empty/full magazine 5.
Referring to fig. 3 and 5, the side clamping plate 4 is provided with a plurality of connection holes 41, the connection holes 41 correspond to the mounting holes 21 in position, and a user can fix the side clamping plate 4 to the mounting table 2 by bolts. The connecting hole 41 is formed as a straight notch, and the length direction of the straight notch is perpendicular to the length direction of the side clamping plate 4. The user can make the side clamping plate 4 slide along the length direction of the connecting hole 41 by unscrewing the bolts, and then the side clamping plate 4 can slide along the direction close to and far away from the classified empty/full tray magazine 5, and the user can adjust the position of the side clamping plate 4, so that the classified empty/full tray magazines 5 with different sizes can be installed between the side clamping plate 4 and the clamping block 31.
Referring to fig. 6, a plurality of clamping grooves 51 are formed on the inner wall of the sorted empty/full tray 5, and the clamping grooves 51 are formed on two opposite inner side walls of the sorted empty/full tray 5, each clamping groove 51 being used for inserting one wafer. The clamping grooves 51 are formed at equal intervals along the linear direction, when the wafers are inserted into the clamping grooves 51, gaps exist between the adjacent wafers, so that the probability that the adjacent wafers are mutually abutted and rubbed is reduced, and the effect of protecting the wafers is achieved. The outer side wall of the classified empty/full tray 5 is provided with a plurality of handles 52, in this embodiment, two handles 52 are provided, a user can hold the classified empty/full tray 5 by the handles 52, the handles 52 are rotatably connected to the outer side wall of the classified empty/full tray 5, and the rotation axis formed by the handles 52 and the classified empty/full tray 5 is parallel to the opening direction of the classified empty/full tray 5. The user can rotate the handle 52 and attach the handle 52 to the outer wall of the sorted empty/full magazine 5, thereby simplifying the size of the sorted empty/full magazine 5 and arranging a large number of sorted empty/full magazines 5 on the mounting table 2.
Example 2
The present embodiment discloses a scalable wafer sorter, referring to fig. 7, which is different from embodiment 1 in that a plurality of mounting tables 2 are provided on a placement table 11, and a sorted empty/full tray magazine 5 is provided on each mounting table 2.
Referring to fig. 7, a plurality of brackets 7 are provided on one side surface of the mounting table 2, the length direction of the brackets 7 is perpendicular to the mounting table 2, and the brackets 7 are used to abut on the placement table 11 and support the mounting table 2, so that the placement table 11 can be horizontally disposed on the mounting table 2.
Referring to fig. 7 and 8, a gravity sensor 8 is provided on an end of the bracket 7 remote from the mounting table 2, the gravity sensor 8 being for monitoring the weight of the mounting table 2 and the sorted empty/full magazines 5 mounted on the mounting table 2. When the sorted empty/full magazine 5 is empty, the reading of the gravity sensor 8 is the sum of the weights of the sorted empty/full magazine 5 and the mounting table 2, and the reading of the gravity sensor 8 increases gradually as the clamping mechanism 14 places wafers into the sorted empty/full magazine 5. The gravity sensors 8 are provided with controllers 91, each gravity sensor 8 is connected with the same controller 91, the gravity sensors 8 are connected with the input end of the controller 91 in a communication mode, the output end of the controller 91 is connected with a user terminal 92 in a communication mode, the user terminal 92 is arranged outside the box body 1, and the user terminal 92 can be a mobile phone or a computer or other terminals. The user can check the weight change of the plurality of classified empty/full magazines 5 through the user terminal 92, and the user can know the wafer number change in the classified empty/full magazines 5 without opening the door 12, so that the user can replace the full classified empty/full magazines 5 conveniently.
The implementation principle of the embodiment of the application is as follows: through setting up in box 1 and placing the platform 11, place the platform 2 on placing the platform 11, make the empty/full magazine 5 of having already classified can set up on the platform 2, through setting up limiting plate 3 and side cardboard 4 on the platform 2, make limiting plate 3, fixture block 31 and side cardboard 4 can the butt on the lateral wall of empty/full magazine 5 of having already classified, and then reduce the probability that the empty/full magazine 5 of having already classified is at the skew of position on the platform 2, and then reduce the clamping mechanism 14 and insert the probability that the wafer suffered the damage when empty/full magazine 5 of having already classified, reach the effect of protecting the wafer.
The embodiments of the present invention are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in this way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (6)
1. A but dilatation wafer sorter, its characterized in that: the device comprises a box body (1), wherein a placing table (11) is arranged in the box body (1), a sorting mechanism (13) for sorting crystal grains is arranged on the placing table (11), a clamping mechanism (14) for clamping and moving wafers is arranged on the placing table (11), an installing table (2) is arranged on the placing table (11), a plurality of classified empty/full tray magazines (5) and a plurality of unclassified sheet magazines (6) are arranged on the installing table (2), a plurality of limiting plates (3) are arranged on the installing table (2), the length directions of the limiting plates (3) are parallel to each other, and the classified empty/full tray magazines (5) are arranged between the limiting plates (3); a plurality of clamping blocks (31) are welded or integrally formed on the limiting plate (3), the length direction of the clamping blocks (31) is perpendicular to the length direction of the limiting plate (3), the clamping blocks (31) are arranged at equal intervals along the length direction of the limiting plate (3), the classified empty/full tray magazines (5) are arranged between two adjacent clamping blocks (31), the clamping blocks (31) are used for being abutted to the outer wall of the classified empty/full tray magazines (5), and the classified empty/full tray magazines (5) are arranged on the mounting table (2) at intervals along the straight line direction; a plurality of side clamping plates (4) are arranged on the mounting table (2), the side clamping plates (4) are arranged between two adjacent limiting plates (3), the length direction of each side clamping plate (4) is perpendicular to the length direction of each limiting plate (3), and each side clamping plate (4) is used for being abutted to the classified empty/full tray magazine (5) and can slide along the direction of approaching to and separating from the classified empty/full tray magazine (5); the utility model discloses a portable electronic device is characterized by comprising a box body (1), a mounting table (2), a plurality of supports (7) used for being abutted on a placing table (11) and supporting the mounting table (2) are arranged on the lower side surface of the mounting table (2), one end of the support (7) away from the mounting table (2) is provided with a gravity sensor (8), a controller (91) is arranged on the gravity sensor (8), the gravity sensor (8) is in communication connection with the input end of the same controller (91), a user terminal (92) is in communication connection with the output end of the controller (91), and the user terminal (92) is arranged outside the box body (1).
2. The expandable wafer sorter of claim 1 wherein: a plurality of mounting holes (21) are formed in the mounting table (2), a plurality of fixing holes (32) are formed in the limiting plate (3), the fixing holes (32) are formed into straight notches, the length direction of the straight notches is perpendicular to the length direction of the limiting plate (3), the limiting plate (3) is fixed to the mounting table (2) through bolts, and the bolts are inserted into the fixing holes (32) and the mounting holes (21).
3. The expandable wafer sorter of claim 2 wherein: a plurality of connecting holes (41) are formed in the side clamping plate (4), the connecting holes (41) are formed in the side clamping plate (4) at intervals in the length direction, the connecting holes (41) are formed into straight notches, the length direction of the connecting holes (41) is perpendicular to the length direction of the side clamping plate (4), the side clamping plate (4) is fixed on the mounting table (2) through bolts, and the bolts are inserted into the mounting holes (21) and the connecting holes (41).
4. The expandable wafer sorter of claim 1 wherein: two opposite inner side walls of the classified empty/full tray magazine (5) are provided with a plurality of clamping grooves (51), the clamping grooves (51) are formed at equal intervals along the linear direction, and the clamping grooves (51) are used for enabling wafers to be inserted.
5. The expandable wafer sorter of claim 4 wherein: the classified empty/full tray magazine (5) is rotatably connected with a handle (52), and the opening direction of the classified empty/full tray magazine (5) is parallel to the rotation axis formed by the handle (52) relative to the classified empty/full tray magazine (5).
6. The expandable wafer handler of any one of claims 1-5, wherein: an opening is formed in the box body (1), a door body (12) is connected to the box body (1) in a rotating mode, the door body (12) is used for rotating and sealing the opening, and the door body (12) is made of transparent materials.
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US5823361A (en) * | 1996-02-06 | 1998-10-20 | Progressive System Technologies, Inc. | Substrate support apparatus for a substrate housing |
JPH1197505A (en) * | 1997-09-22 | 1999-04-09 | Haamo Tec:Kk | Housing/sorting device, housing method, sorting method and housing/sorting method for semiconductor wafer and protective sheet |
CN101241869B (en) * | 2007-02-08 | 2010-06-23 | 鸿劲科技股份有限公司 | Chip testing classifier |
US8175746B2 (en) * | 2009-06-29 | 2012-05-08 | Carefusion 303, Inc. | Weight-based dispensing system |
CN202712245U (en) * | 2012-07-13 | 2013-01-30 | 深圳市因沃客科技有限公司 | Work platform mechanism of full-automatic die bonder |
CN104776681B (en) * | 2015-03-17 | 2017-03-08 | 宁波日樱电器有限公司 | A kind of refrigerator of recordable food storage time |
CN106024679A (en) * | 2016-07-21 | 2016-10-12 | 苏州晶方半导体科技股份有限公司 | Sorting device and sorting method |
CN206200930U (en) * | 2016-10-28 | 2017-05-31 | 致茂电子股份有限公司 | Material stock casket |
CN107180780B (en) * | 2017-07-26 | 2023-09-26 | 广东阿达智能装备有限公司 | Wafer magazine positioner |
CN207458905U (en) * | 2017-12-05 | 2018-06-05 | 东莞市冠晶电子有限公司 | A kind of semiconductor packages materials casket |
CN109147170A (en) * | 2018-07-26 | 2019-01-04 | 上海凯景信息技术有限公司 | A kind of self-service cabinet based on image recognition |
CN113229686A (en) * | 2021-05-21 | 2021-08-10 | 上海追月科技有限公司 | Goods shelf |
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