CN113584443B - AlN/AlScN nano composite piezoelectric coating for high-temperature-resistant fastener and preparation method thereof - Google Patents

AlN/AlScN nano composite piezoelectric coating for high-temperature-resistant fastener and preparation method thereof Download PDF

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CN113584443B
CN113584443B CN202110733602.8A CN202110733602A CN113584443B CN 113584443 B CN113584443 B CN 113584443B CN 202110733602 A CN202110733602 A CN 202110733602A CN 113584443 B CN113584443 B CN 113584443B
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aln
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coating
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杨兵
邓宏坤
张宏业
刘琰
李敬雨
瓦西里
陈燕鸣
张俊
黄家辉
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Wuhan University WHU
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    • C23C14/0021—Reactive sputtering or evaporation
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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Abstract

The invention relates to the technical field of coating materials, in particular to an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener and a preparation method thereof. The coating of the invention has better hardness, wear resistance and toughness than the conventional piezoelectric coating; the gradient structure and the nano multilayer structure are fully utilized to form a structure and gradually changed components, the stress of the coating and the matrix is lower, and the adhesive force is good; the wear resistance of the coating is improved, and the corrosion resistance is also greatly improved; the piezoelectric composite coating can be well protected from being oxidized at high temperature, and the high-temperature stability of the piezoelectric composite coating is improved.

Description

AlN/AlScN nano composite piezoelectric coating for high-temperature-resistant fastener and preparation method thereof
Technical Field
The invention relates to the technical field of coating materials, in particular to an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener and a preparation method thereof.
Background
The bolt fastening connection is widely applied to the structure of important equipment of aerospace equipment. The bolt pretightening force is pretightening force which is generated between the bolt and the connected piece under the action of the tightening torque in the bolt screwing process and is along the axial lead direction of the bolt. For a particular bolt, the magnitude of the preload force is related to the tightening torque of the bolt, the friction between the bolt and the nut, and the friction between the nut and the coupled member. Whether the pre-tightening force is proper or not is directly related to the reliability and safety of the whole product and equipment. If the pretightening force is too large during screwing, the fatigue damage of the bolt is easily caused; if the pretightening force is not enough, vibration relaxation and slippage can be caused, the overall performance of the system structure is influenced, and the two conditions can cause damage to aerospace equipment and serious accidents. Therefore, effective means must be adopted to accurately control bolt pretightening force so as to ensure the reliability of aerospace equipment.
The pre-tightening can improve the reliability and the anti-loosening capability of bolt connection and the fatigue strength of the bolt, and enhance the tightness and the rigidity of the connection. In fact, a large number of tests and experience have shown that a high pre-tension is beneficial for the reliability of the connection and for the lifetime of the connection, in particular for connections with sealing requirements. "the object must be the other way around", too high a pretension, for example if improperly controlled or accidentally overloaded, will often lead to failure of the connection. Therefore, it is very important to accurately determine the pretension of the bolt. The bolt connection is the most widely applied connection mode in products such as aerospace and the like, and the most fundamental purpose of the bolt connection is to generate reliable clamping force between connected parts, namely the pretightening force of a bolt. The pretightening force is difficult to directly monitor and control in the screwing process and the product using process, and the pretightening force is mainly controlled by a torque method, a corner method, an ultrasonic guided wave method, an electromechanical impedance method, an ultrasonic sensor method and other measuring methods at present.
Empirically, as shown in fig. 1, during tightening, 50% of the torque is consumed by the friction of the bolt face, 40% of the torque is consumed by the friction of the thread, and only 10% of the torque is used to generate the preload force. When the pre-tightening force is controlled by the tightening torque, people hope that the tightening force and the pre-tightening force of the bolt are in a linear relation, and therefore the pre-tightening force value can be calculated by controlling the magnitude of the tightening torque. However, in practice, due to the influence of friction factor and geometric parameter deviation, the variation of the pretightening force is large under a certain tightening torque, so that the precision of controlling the pretightening force of the bolt through the tightening torque is not high, and a large error exists, and the maximum pretightening force can reach +/-40%. This also results in excessive discreteness in the bolt pretension, which seriously affects the safety of the connection system.
The ultrasonic guided wave is a mechanical elastic wave which is quickly propagated along the limited boundary shape of the structural member, is restrained by the boundary shape of the structural member and is guided, and has the advantages of long detection distance, wide coverage range and high detection efficiency. The transmission wave energy of the ultrasonic guided wave is widely used as a screwing index for bolt loosening monitoring, however, according to the theory of rough contact mechanics, when the contact pressure reaches a certain value, the real contact area at the connecting interface can reach a saturation value, and at the moment, the real contact area does not change along with the increase of the contact pressure. Therefore, when the transmitted wave energy is used for detection, the transmitted guided wave energy is not changed any more after the pretightening force of the bolt reaches a certain value, and the detection sensitivity is obviously reduced. The bolt loosening can be effectively monitored by using an electromechanical impedance technology, but the detection range is limited to the vicinity of a piezoelectric sensor, and an expensive high-precision impedance analyzer is required, so that the application has certain limitation.
The method is a technology developed at present newly, wherein the method is mainly characterized in that a permanent piezoelectric sensor is prepared on a bolt to form an intelligent bolt, then an ultrasonic signal is generated in the bolt by utilizing the inverse piezoelectric effect of the sensor, and the measurement of the load in the bolt is realized by calibrating the relation between different loads, temperatures and the flight time difference of ultrasonic waves in the bolt. However, the ultrasonic sensor applied to high-temperature occasions is lack of research, and a new high-temperature-resistant ultrasonic sensor coating material needs to be developed urgently.
Disclosure of Invention
One of the purposes of the invention is to provide the AlN/AlScN nano composite piezoelectric coating for the high-temperature-resistant fastener, which inhibits the growth of AlN and AlScN columnar crystals, and improves the density of the piezoelectric coating, the wear resistance and the corrosion resistance of the coating.
The invention also aims to provide a preparation method of the AlN/AlScN nano composite piezoelectric coating for the high-temperature-resistant fastener, which has the advantages of simple and convenient preparation process, easy adjustment, easy realization of industrial production batch, higher processing efficiency and capability of greatly reducing the production cost of manufacturers.
The scheme adopted by the invention for realizing one of the purposes is as follows: the AlN/AlScN nano composite piezoelectric coating for the high-temperature-resistant fastener adopts a gradient layer structure and sequentially comprises a bonding layer, a supporting layer, a piezoelectric functional layer and a protective layer from inside to outside, wherein the bonding layer is a pure metal AlSc layer, the supporting layer is an AlScN/AlScN nano multilayer film, the piezoelectric functional layer is an AlN/AlScN nano multilayer film, and the protective layer is an AlON layer.
Preferably, the total thickness of the AlN/AlScN nano composite piezoelectric coating for the high-temperature-resistant fastener is 2.61-10.500 microns.
Preferably, the bonding layer has a thickness of 10 to 100 nm.
Preferably, the thickness of the support layer is 600-900 nm, wherein the thickness of the AlSc monolayer is 5-10 nm, the thickness of the AlScN monolayer is 4-50 nm, and the modulation period is 9-60 nm.
Preferably, the thickness of the piezoelectric functional layer is 1500-8000 nm, the piezoelectric functional layer is a (002) oriented AlN/AlScN nano multilayer film, wherein the single-layer thickness of AlN is 10-20 nm, the single-layer thickness of AlScN is 5-20 nm, and the modulation period is 15-40 nm.
Preferably, the thickness of the protective layer is 500-1500 nm, the insulation resistance of the protective layer is more than 500M omega, and the surface roughness is less than 20 nm.
The second scheme adopted by the invention for achieving the purpose is as follows: a preparation method of the AlN/AlScN nano composite piezoelectric coating for the high-temperature resistant fastener comprises the following steps:
(1) Carrying out plasma etching on the fastener in an argon and hydrogen environment at the temperature of 100-400 ℃;
(2) Depositing an AlSc bonding layer under the conditions of 0.5-1Pa and 50-150V after etching;
(3) After depositing the AlSc bonding layer, depositing an AlSc/AlScN supporting layer under the conditions of 1-2Pa and 10-150V;
(4) After the deposition of the AlSc/AlScN supporting layer is finished, depositing an AlN/AlScN piezoelectric functional layer under the conditions of 0.5-4Pa and 0-150V;
(5) And after the AlN/AlScN piezoelectric functional layer is deposited, depositing an AlON protective layer under the conditions of 1-3Pa and 0-200V, and naturally cooling after the preparation is finished to obtain the AlN/AlScN nano composite piezoelectric coating for the high-temperature resistant fastener.
Preferably, in the step (3), after the deposition of the AlSc bonding layer is finished, nitrogen is intermittently introduced to form an AlSc/AlScN nano multilayer film to prepare the supporting layer.
Preferably, in the step (4), after the deposition of the AlSc/AlScN support layer is finished, the Al target and the AlSc target are simultaneously opened, nitrogen is introduced, the AlN coating is formed when the fastener rotates in front of the Al target, the AlScN coating is formed when the fastener rotates in front of the AlSc target, and the AlN/AlScN nano-multilayer film is formed on the surface of the fastener without stopping the rotation of the fastener, so as to prepare the piezoelectric function layer.
Preferably, in the step (5), after the AlN/AlScN piezoelectric functional layer deposition is finished, oxygen and nitrogen are introduced and the aluminum target is turned on to form an AlON layer on the surface to prepare the protective layer.
The piezoelectric nano composite coating adopts a gradient multilayer structure, so that the difference of components between the piezoelectric nano composite coating material and the steel matrix of the fastener is reduced, the internal stress of the coating is reduced, and the peeling caused by the difference of expansion coefficients during high-temperature and low-temperature impact is avoided. The AlN and AlScN piezoelectric coatings are compounded mainly by using the fact that the AlN and AlScN piezoelectric coatings have similar structures, alScN has good hardness and can improve the wear resistance of the sensor, and the multi-layer structure can mainly improve the toughness of the piezoelectric coatings and avoid cracks generated when the piezoelectric coatings are impacted at high temperature.
The invention mainly aims to overcome the defect that the existing piezoelectric coating is easy to fall off at high and low temperatures, the stress of the coating is reduced by adopting a gradient structure and a nano multilayer structure, particularly a transition and supporting layer formed by compounding metal and nitride provides good stress buffering for a piezoelectric functional layer, and the risk of coating peeling is effectively reduced. Before the piezoelectric coating is prepared, in order to improve the adhesive force, the surface of the fastener is cleaned by adopting an ion etching technology, and oxides and pollutants on the surface of the fastener are mainly removed by utilizing high-energy ions. This process can provide good adhesion of the piezoelectric coating. If the etching process is not carried out, certain oxide exists on the surface of the fastener, the bonding between the oxide and the coating is poor, and the coating can be inevitably peeled off in the high-temperature heating and cooling processes.
In the preparation process of the coating, after the ion etching cleaning is finished, the surface of the fastener is in a relatively clean state. In order to improve the bonding force between the surface piezoceramic material and the metal fastener base body, the AlSc alloy is sputtered from the target material in a radio frequency sputtering mode, and a layer of AlSc alloy bonding layer is formed on the surface of the fastener. And after the preparation of the bonding layer is finished, introducing nitrogen discontinuously to form the AlSc/AlScN nano multilayer coating as a supporting layer. The aim of forming the multilayer coating is to form a coating with high hardness and low stress through a plurality of layers of metal and nitride, provide good support for the AlN/AlScN nano multilayer coating on the surface layer and form a proper hardness gradient. On the basis of the support layer, the Al target and the AlSc target are simultaneously started, nitrogen is introduced, an AlN coating is formed when the fastener rotates to the front of the Al target, and an AlScN coating is formed when the fastener rotates to the front of the AlSc target. When the fastener rotates continuously, a plurality of AlN/AlScN nano coatings with piezoelectric function layers are formed on the surface of the fastener. And after the AlN/AlScN nano multilayer coating is prepared, introducing oxygen and nitrogen and starting an aluminum target to improve the stability and the oxidation resistance of the surface of the AlN/AlScN nano multilayer coating, and preparing an AlON protective layer on the surface. And obtaining the AlN/AlScN nano composite piezoelectric coating fastener after the preparation is finished.
The invention has the following advantages and beneficial effects:
firstly, the AlN piezoelectric coating and the AlScN piezoelectric coating are compounded for the first time to construct a nano multilayer piezoelectric coating, so that the coating has better hardness, wear resistance and toughness than the conventional piezoelectric coating; secondly, the gradient structure and the nano multilayer structure are fully utilized to form a structure and gradually changed components, and the coating and the matrix have lower stress and good adhesive force; thirdly, compared with the conventional piezoelectric coating material, the invention adopts a multilayer structure technology to inhibit the growth of AlN and AlScN columnar crystals and improve the density of the piezoelectric coating, thereby not only improving the wear resistance of the coating, but also greatly improving the corrosion resistance; fourthly, the AlON coating is prepared on the surface of the piezoelectric composite coating, so that the piezoelectric composite coating can be well protected from being oxidized at high temperature, and the high-temperature stability of the piezoelectric composite coating is improved. Fifth, the invention applies the high-power radio frequency sputtering technology to the preparation of the AlN/AlScN piezoelectric composite coating, not only has high deposition rate, but also has better crystallization and combination performance, can greatly improve the adaptability of the piezoelectric coating material on various different materials, and expands the application field of the piezoelectric coating material.
The AlN/AlScN composite piezoelectric coating for the high-hardness wear-resistant intelligent fastener, which is prepared by the invention, has the characteristics of high hardness, high wear resistance and high binding force, can ensure that the piezoelectric coating can stably work on the surface of the fastener for a long time, and reduces the possibility of failure of the piezoelectric coating. Meanwhile, the industrial production is easy to realize in batch, the processing efficiency is higher, and the production cost of manufacturers can be greatly reduced.
Drawings
FIG. 1 is a schematic view of a coating apparatus used in the present invention;
FIG. 2 is a schematic diagram of the coating structure designed by the present invention.
In the figure, 1, an anode is etched; 2.a titanium target; 3.a heater; 4.Al target; 5. an air extraction opening; an AlSc target; 7. a workpiece holder; 11. a substrate; an AlSc bonding layer; an AlSc/AlScN support layer; alN/AlScN piezoelectric functional layers; and 15, forming an AlON protective layer.
Detailed Description
The following examples are provided to further illustrate the present invention for better understanding, but the present invention is not limited to the following examples.
Example 1
A preparation method of an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener comprises the following steps: carrying out plasma etching on the fastener in an environment of 100 ℃, argon and hydrogen; after etching, depositing a 10-nanometer AlSc combined layer at 0.5Pa and 50V; depositing a 600-nanometer AlSc/AlScN supporting layer under the condition of 1Pa and 10V, wherein the thickness of an AlSc single layer is 5 nanometers, the thickness of an AlScN single layer is 4 nanometers, and the modulation period is 9 nanometers; depositing 1500 nm (002) oriented AlN/AlScN piezoelectric functional layers under the condition of 0.5Pa and 0V, wherein the AlN single-layer thickness is 10 nm, the AlScN single-layer thickness is 5 nm, and the modulation period is 15 nm; and depositing 500 nm AlON protective layer under the condition of 1Pa and 0V, wherein the insulation resistance of the AlON protective layer is more than 500M omega, and the surface roughness of the AlON protective layer is less than 20 nm. The total thickness of the coating is controlled to be 2.61 microns, and the AlN/AlScN nano composite coating high-temperature resistant fastener is obtained after the preparation is finished and natural cooling is carried out.
Example 2
A preparation method of an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener comprises the following steps: carrying out plasma etching on the substrate in an argon and hydrogen environment at 400 ℃; after etching is finished, depositing a 100-nanometer AlSc bonding layer at 1Pa and 150V; depositing a 900-nanometer AlSc/AlScN supporting layer under the conditions of 2Pa and 150V, wherein the thickness of an AlSc single layer is 10 nanometers, the thickness of an AlScN single layer is 50 nanometers, and the modulation period is 60 nanometers; depositing a (002) oriented AlN/AlScN piezoelectric functional layer at 8000 nm under the conditions of 4Pa and 150V, wherein the AlN single-layer thickness is 20 nm, the AlScN single-layer thickness is 20 nm, and the modulation period is 40 nm; depositing 1500 nm AlON protective layer under 3Pa,200V, the insulation resistance is more than 500 MOmega, the surface roughness is less than 20 nm. The total thickness of the coating is controlled at 10.500 microns, and the AlN/AlScN nano composite coating high-temperature resistant fastener is obtained after the preparation is finished and natural cooling is carried out.
Example 3
A preparation method of an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener comprises the following steps: carrying out plasma etching on the substrate in an argon and hydrogen environment at the temperature of 300 ℃; after etching is finished, depositing a 50-nanometer AlSc combined layer at 0.8Pa, 100V; depositing a 700-nanometer AlSc/AlScN supporting layer under the conditions of 1.5Pa and 50V, wherein the thickness of an AlSc single layer is 5 nanometers, the thickness of an AlScN single layer is 30 nanometers, and the modulation period is 35 nanometers; depositing a 2000 nm (002) oriented AlN/AlScN piezoelectric functional layer under the condition of 1Pa,100V, wherein the AlN single-layer thickness is 10 nm, the AlScN single-layer thickness is 10 nm, and the modulation period is 20 nm; depositing 1000 nm AlON protective layer under 2Pa,100V condition, its insulation resistance is greater than 500M omega, surface roughness is less than 20 nm. The total thickness of the coating is controlled to be 3.75 micrometers, and the AlN/AlScN nano composite coating high-temperature resistant fastener is obtained by naturally cooling after the preparation is finished.
Example 4
A preparation method of an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener comprises the following steps: carrying out plasma etching on the substrate in an argon and hydrogen environment at 250 ℃; after etching is finished, depositing a 10-nanometer AlSc combined layer at 1Pa and 50V; depositing a 900-nanometer AlSc/AlScN supporting layer under the conditions of 2Pa and 10V, wherein the thickness of an AlSc single layer is 10 nanometers, the thickness of an AlScN single layer is 35 nanometers, and the modulation period is 45 nanometers; depositing a (002) oriented AlN/AlScN piezoelectric functional layer at 8000 nm under the conditions of 4Pa and 150V, wherein the AlN single-layer thickness is 20 nm, the AlScN single-layer thickness is 20 nm, and the modulation period is 40 nm; and depositing 500 nm AlON protective layer under the condition of 3Pa and 0V, wherein the insulation resistance is more than 500M omega, and the surface roughness is less than 20 nm. The total thickness of the coating is controlled to be 9.41 micrometers, and the AlN/AlScN nano composite coating high-temperature resistant fastener is obtained by natural cooling after the preparation is finished.
Example 5
A preparation method of an AlN/AlScN nano composite piezoelectric coating for a high-temperature-resistant fastener comprises the following steps: carrying out plasma etching on the substrate in an argon and hydrogen environment at 100 ℃; after etching, depositing an 80-nanometer AlSc combined layer at 0.8Pa and 120V; depositing a 700-nanometer AlSc/AlScN supporting layer under the conditions of 1.5Pa and 120V, wherein the thickness of an AlSc single layer is 10 nanometers, the thickness of an AlScN single layer is 25 nanometers, and the modulation period is 35 nanometers; depositing a 4000 nanometer (002) oriented AlN/AlScN piezoelectric functional layer under the conditions of 3Pa and 150V, wherein the AlN single-layer thickness is 20 nanometers, the AlScN single-layer thickness is 20 nanometers, and the modulation period is 40 nanometers; 1000 nm AlON protective layer is deposited under the condition of 2.5Pa,100V, the insulation resistance is more than 500 MOmega, and the surface roughness is less than 20 nm. The total thickness of the coating is controlled to be 5.78 micrometers, and the AlN/AlScN nano composite coating high-temperature resistant fastener is obtained by natural cooling after the preparation is finished.
FIG. 1 shows an apparatus according to the invention, the vacuum chamber of which is enclosed by furnace walls and has dimensions of 600X600mm. The vacuum chamber is provided with an extraction opening 5, and the vacuum pumping unit performs vacuum pumping on the vacuum chamber through the extraction opening 5. The heaters 3 are arranged at four corners of the vacuum chamber, the heating power is 25 kilowatts, and the heating efficiency is improved. 3 targets are arranged on the furnace wall in 3 rows, an etching Ti target 2, a coating Al target 4 and an AlSc target 6 are respectively arranged, and the sample is arranged on a workpiece rack 7. The arrangement enables the plasma density in the vacuum chamber to be greatly increased and the workpiece to be completely immersed in the plasma. The deposition rate, the hardness and the adhesive force of the coating are greatly improved. Because the target structure is optimized, the magnetic field distribution is more uniform, the etching of the magnetron sputtering target surface is uniform, and the uniformity of the coating is improved.
FIG. 2 is a schematic diagram of the coating structure designed by the present invention, and it can be seen that the composition and hardness gradient of the coating structure reduces the stress of the coating, and a thicker piezoelectric coating can be deposited, which comprises a substrate 11, and an AlSc bonding layer 12 and an AlScN/AlScN supporting layer 13 sequentially deposited on the surface of the substrate 11; alN/AlScN piezoelectric functional layer 14 and AlON protective layer 15.
While the foregoing is directed to the preferred embodiment of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims (10)

1. The AlN/AlScN nano composite piezoelectric coating for the high-temperature-resistant fastener is characterized by comprising the following components in percentage by weight: the AlN/AlScN nano composite piezoelectric coating adopts a gradient layer structure and sequentially comprises a bonding layer, a supporting layer, a piezoelectric functional layer and a protective layer from inside to outside, wherein the bonding layer is a pure metal AlSc layer, the supporting layer is an AlScN/AlScN nano multilayer film, the piezoelectric functional layer is an AlN/AlScN nano multilayer film, and the protective layer is an AlON layer.
2. The AlN/AlScN nanocomposite piezoelectric coating for high temperature resistant fasteners according to claim 1, wherein: the total thickness of the AlN/AlScN nano composite piezoelectric coating for the high-temperature resistant fastener is 2.61-10.500 micrometers.
3. The AlN/AlScN nanocomposite piezoelectric coating for high temperature resistant fasteners according to claim 1, wherein: the bonding layer has a thickness of 10-100 nanometers.
4. The AlN/AlScN nanocomposite piezoelectric coating for high temperature resistant fasteners according to claim 1, wherein: the thickness of the supporting layer is 600-900 nanometers, the thickness of an AlSc single layer is 5-10 nanometers, the thickness of an AlScN single layer is 4-50 nanometers, and the modulation period is 9-60 nanometers.
5. The AlN/AlScN nanocomposite piezoelectric coating for high temperature resistant fasteners according to claim 1, wherein: the thickness of the piezoelectric functional layer is 1500-8000 nm, the piezoelectric functional layer is a (002) oriented AlN/AlScN nano multilayer film, wherein the AlN single-layer thickness is 10-20 nm, the AlScN single-layer thickness is 5-20 nm, and the modulation period is 15-40 nm.
6. The AlN/AlScN nanocomposite piezoelectric coating for high temperature resistant fasteners according to claim 1, wherein: the thickness of the protective layer is 500-1500 nm, the insulation resistance of the protective layer is more than 500M omega, and the surface roughness is less than 20 nm.
7. A method for preparing the AlN/AlScN nano-composite piezoelectric coating for the high-temperature resistant fastener according to any one of claims 1 to 6, which comprises the following steps:
(1) Carrying out plasma etching on the fastener in an argon and hydrogen environment at the temperature of 100-400 ℃;
(2) Depositing an AlSc bonding layer by a radio frequency sputtering mode under the conditions of 0.5-1Pa and 50-150V after the etching is finished;
(3) After depositing the AlSc bonding layer, depositing an AlSc/AlScN supporting layer under the conditions of 1-2Pa and 10-150V;
(4) After the deposition of the AlSc/AlScN supporting layer is finished, depositing an AlN/AlScN piezoelectric functional layer under the conditions of 0.5-4Pa and 0-150V;
(5) And after the AlN/AlScN piezoelectric functional layer is deposited, depositing an AlON protective layer under the conditions of 1-3Pa and 0-200V, and naturally cooling after the preparation is finished to obtain the AlN/AlScN nano composite piezoelectric coating for the high-temperature resistant fastener.
8. The method for preparing the AlN/AlScN nano-composite piezoelectric coating for the high-temperature-resistant fastener according to claim 7, characterized in that: and (3) after the deposition of the AlSc bonding layer is finished, intermittently introducing nitrogen to form an AlSc/AlScN nano multilayer film and prepare the supporting layer.
9. The method for preparing the AlN/AlScN nano-composite piezoelectric coating for the high-temperature-resistant fastener according to claim 7, wherein the method comprises the following steps: in the step (4), after the AlSc/AlScN supporting layer is deposited, the Al target and the AlSc target are started at the same time, nitrogen is introduced, an AlN coating is formed when the fastener rotates to the front of the Al target, an AlScN coating is formed when the fastener rotates to the front of the AlScN target, and an AlN/AlScN nano multilayer film is formed on the surface of the fastener when the fastener rotates ceaselessly to prepare the piezoelectric functional layer.
10. The method for preparing the AlN/AlScN nano-composite piezoelectric coating for the high-temperature-resistant fastener according to claim 7, wherein the method comprises the following steps: and (5) after the AlN/AlScN piezoelectric functional layer is deposited, introducing oxygen and nitrogen and starting an aluminum target to form an AlON layer on the surface to prepare a protective layer.
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