CN113564663A

CN113564663A - Surface treatment method suitable for laser radar resonance part and laser radar resonance part

Info

Publication number: CN113564663A
Application number: CN202010352127.5A
Authority: CN
Inventors: 毛胜平; 申士林; 叶良琛; 高永丰; 向少卿
Original assignee: Hesai Technology Co Ltd
Current assignee: Hesai Technology Co Ltd
Priority date: 2020-04-28
Filing date: 2020-04-28
Publication date: 2021-10-29
Anticipated expiration: 2040-04-28
Also published as: CN113564663B

Abstract

The invention provides a surface treatment method suitable for a laser radar resonance part, which comprises the following steps: providing a conductive resonator member having a metal substrate; providing a non-metallic coating; and depositing the non-metallic paint on at least a part of the surface of the conductive resonance member to form a coating film on the at least a part of the surface of the conductive resonance member. By the embodiment of the invention, the fatigue resistance and the reliability of the alternating deformation structure are effectively improved under the condition that the characteristics of the alternating deformation structure are not obviously influenced, and the service life of the alternating deformation structure is prolonged.

Description

Surface treatment method suitable for laser radar resonance part and laser radar resonance part

Technical Field

The disclosure relates to the field of laser radars, in particular to a surface treatment method suitable for a laser radar resonance part and the laser radar resonance part.

Background

Fatigue failure of a material is a major cause of mechanical failure accidents in practical working scenarios. Fatigue failure typically occurs because the mechanical structure is under a certain stress level, under its own working requirements or external cyclic loads, carrying a load in excess of the number of cycles allowed for use. Generally, the limited life design is realized by setting a permissible safe stress, and when the limited life design works below the safe stress, the structure or the device completely has the life meeting the working requirement. However, too low a permissible safety stress also tends to limit the performance characteristics of the structure or device. The fatigue resistance of materials and structures can be improved by special methods, such as fine grain strengthening, surface treatment strengthening and the like, so that the allowable service life of the same structural design or device is prolonged.

Generally, the fatigue resistance of the material or structure is improved by heat treatment, such as surface quenching, nitriding and carburizing, and other methods such as shot peening, and the strength of the base material can also be improved by adjusting the element components of the base material, but the methods have obvious requirements on the material per se, and the process is complicated and therefore the cost is high. Other surface coating techniques, such as sputtering, spraying, electroplating, etc., are also widely used to improve the surface strength, corrosion resistance, and fatigue resistance of the structural member. However, in the common method for plating hard chromium or black zinc on the surface, because the plating layer is easy to form a processing notch, the fatigue life of the plated steel is not increased or decreased under the high-frequency cyclic stress scenes of some structures.

The statements in this background section merely represent techniques known to the public and are not, of course, representative of the prior art.

Disclosure of Invention

The invention provides a surface treatment method suitable for a laser radar resonance part_，The surface treatment method has the advantages of simple process, low requirement on equipment, short time consumption, low cost and no obvious influence on the performance characteristics of the structure or the deviceAnd the fatigue resistance of the non-contact structure is obviously improved.

In order to solve the above technical problem, an embodiment of the present invention provides a surface treatment method for a laser radar resonator, including:

step S101: providing a conductive resonator member having a metal substrate;

step S102: providing a non-metallic coating; and

step S103: depositing the non-metallic paint on at least a part of the surface of the conductive resonance member, and forming a coating film on the at least a part of the surface of the conductive resonance member.

According to an aspect of the present invention, the step S103 is performed by means of electrophoresis, and the young 'S modulus of the coating film is smaller than the young' S modulus of the conductive resonator.

According to one aspect of the invention, the conductive resonator comprises one or more of a mechanical resonator, a pendulum mirror, a swing arm, a torsion beam, a vibrating mirror, a spring, and a spring plate.

According to one aspect of the invention, the non-metallic coating comprises one or more of epoxy, polyurethane, polyimide, polybutadiene.

According to an aspect of the present invention, the surface treatment method further includes: preparing a non-metal coating solution, wherein the non-metal coating solution is prepared from the non-metal coating, a solvent and water according to a preset proportion value.

According to one aspect of the invention, step S103 comprises:

placing the conductive resonance part in the non-metal coating solution, and setting a preset temperature and a preset PH value;

energizing the non-metallic coating solution;

and after the preset time of deposition, taking the conductive resonance part out of the non-metal coating solution.

According to one aspect of the invention, the surface treatment method further comprises the step of pretreating the surface of the conductive resonance part, wherein the pretreatment comprises one or more of oil removal, rust removal, surface conditioning, phosphorization and deionized water washing on the surface of the conductive resonance part.

According to an aspect of the present invention, the surface treatment method further includes cleaning and/or drying the conductive resonance member having the coating film.

According to an aspect of the present invention, the young's modulus of the coating film is one tenth or less of the young's modulus of the conductive resonance member.

The invention also relates to a resonant piece of the laser radar, which comprises a coating film of the non-metallic coating and a metal substrate, wherein the coating film is positioned on the surface of the metal substrate.

According to an aspect of the present invention, the coating film is applied by the surface treatment method as described above.

By the embodiment of the invention, the fatigue life of the material with lower strength can be the same as that of the base material with higher strength after treatment, or the base material with the same strength has higher fatigue life after surface treatment, so that the material cost is saved, and the fatigue resistance of the material is improved. The surface treatment method provided by the invention meets the requirements of the laser radar resonance part on application scenes with higher fatigue resistance.

Drawings

The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and are not to limit the disclosure. In the drawings:

FIG. 1 shows a flow diagram of a surface treatment method according to one embodiment of the invention;

FIG. 2 shows a substep of step S103 of the surface treatment method flow of FIG. 1;

FIG. 3 shows a schematic diagram of cathode electrophoresis according to one embodiment of the present invention;

fig. 4 shows a schematic view of a conductive resonator element having a coating film according to an embodiment of the present invention;

FIGS. 5A, 5B and 5C respectively show results of cross-sectional stress simulations for different situations;

FIGS. 6A, 6B and 6C are stress simulation results of torsional cross-sections when the film layers are 10, 20 and 30 microns, respectively;

FIG. 7 is a schematic diagram illustrating the mechanism of action of a coating film to inhibit crack initiation and growth in a conductive resonator member according to an embodiment of the present invention;

FIG. 8 is a schematic diagram illustrating the mechanism of action of the interface layer of the coating and the conductive resonator element for inhibiting the propagation of cracks to the conductive resonator element according to an embodiment of the present invention;

FIGS. 9A and 9B show simulation results of cross-sectional stress of a substrate having the same notch on its surface without an electrophoretic layer and with an electrophoretic layer; and

fig. 10 shows the experimental results of the control.

Detailed Description

In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection, either mechanically, electrically, or in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.

Based on the fatigue failure theory of materials, fatigue reflects a process that microcracks of metal materials are gradually initiated and the length of the microcracks is increased in cyclic load, the fatigue failure is caused by continuous extension and increase of the cracks under alternating cycle, and as the lengths of the cracks are gradually expanded, stress intensity factors are gradually increased, and finally the stress intensity factors reach the threshold value of the materials to cause the material failure. The rate of change of the crack length can be derived by the following equation:

where a is the crack length, N is the number of cycles of operation, C, N is a material dependent constant, and K is the stress intensity factor. The expansion of the microcracks has a stress intensity factor threshold (namely, the expansion occurs when the stress intensity factor is higher than a certain value), and a formula of the change rate of the crack length shows that the linear growth section of the microcracks occupies most of time in the fatigue process, and when the number of working cycles is increased to a certain threshold, the microcracks can rapidly expand and enter a rapid growth unstable stage.

Fig. 1 shows a flow chart of a surface treatment method according to an embodiment of the present invention, which is described in detail below with reference to fig. 1. As shown in fig. 1, the surface treatment method 100 is used to treat the surface of a resonating device of a lidar to provide the resonating device with a higher fatigue life without significantly affecting the performance of the resonating device. The surface treatment method 100 includes the steps of:

in step S101: a conductive resonator member is provided having a metal substrate.

The surface treatment method 100 is generally applied to structures which are subjected to significant alternating deformation and are not in contact with each other in mechanical parts, including but not limited to various mechanical resonance devices, such as a pendulum mirror, a swing arm, a torsion beam, a vibrating mirror, a spring, and a spring plate, which are mechanical resonance devices commonly used in laser radars. For example, the swing mirror comprises a longitudinal shaft and a swing mirror main body, and the swing mirror main body is arranged on the longitudinal shaft through a swing arm perpendicular to the swing mirror main body, so that the swing mirror main body swings back and forth around the longitudinal shaft. The conductive resonator is usually made of at least one metal, such as iron, copper, aluminum, or their alloys, and at least its surface is made of conductive metal.

In step S102: non-metallic coatings are provided. The non-metallic coating is typically a polymer, such as a resin. Typically used non-metallic coatings include one or more of epoxy, polyurethane, polyimide, polybutadiene. It will be understood by those skilled in the art that the non-metallic coating is not limited to the materials listed above, and that other polymers may be used as the coating in the surface treatment method 100, and certainly fall within the scope of the present invention.

In step S103: depositing the non-metallic paint on at least a part of the surface of the conductive resonance member, and forming a coating film on the at least a part of the surface of the conductive resonance member.

The step S103 of depositing the non-metal coating on at least a portion of the surface of the conductive resonance member may be performed by electrophoresis. The electrophoresis can be generally divided into anode electrophoresis and cathode electrophoresis according to the process, specifically, if the coating particles are negatively charged, the workpiece is an anode, and the coating particles deposit to form a film on the workpiece under the action of an electric field force, which is called anode electrophoresis; conversely, if the coating particles are positively charged and the workpiece is a cathode, the coating particles deposit a film on the workpiece, known as cathodic electrophoresis. The anode electrophoresis has the characteristics of low price, simple equipment, low technical requirement, poorer corrosion resistance of the coating and the like, and the cathode electrophoresis has higher price than the anode electrophoresis but has higher corrosion resistance of the coating.

Fig. 2 shows a substep of step S103 in the flow of the surface treatment method described in fig. 1, and fig. 3 shows a schematic diagram of cathode electrophoresis according to an embodiment of the present invention. The sub-step of step S103 in FIG. 2 will be described in detail with reference to the process of cathode electrophoresis in FIG. 3. According to a preferred embodiment of the present invention, the non-metal coating is epoxy resin, as shown in fig. 3, the cathode electrophoresis diagram includes a substrate workpiece 20 (i.e. a conductive resonator in the present invention) as a cathode, an anode 30, a coating film 10, a non-metal coating solution 40, a power supply 50, and cationic coating particles 60. As shown in fig. 2, the step S103 further includes the following sub-steps:

at step S103-1: the conductive resonant member 20 is placed in a prepared non-metallic coating solution 40, and a predetermined coating solution temperature and PH are set. Wherein the non-metallic coating solution 40 is prepared by the non-metallic coating, a solvent and water at a predetermined ratio. According to a preferred embodiment of the present invention, the non-metallic coating solution 40 is an epoxy resin solution, and is prepared by epoxy resin, a solvent and water in a predetermined ratio. As shown in fig. 3, the conductive resonator 20 is electrically connected to the negative electrode of the power supply 50, and the surface-cleaned conductive resonator 20 is immersed in the prepared epoxy resin solution 40 as a cathode, and further, an anode 30 corresponding to the conductive resonator 20 as a cathode is additionally provided in the epoxy resin solution 40.

At step S103-2: the non-metallic coating solution 40 is energized. After the conductive resonator element 20 and the anode 30 are placed in the non-metallic coating solution 40, the power supply 50 is turned on, and a direct current is applied between the anode 30 and the cathode. After the energization, the positively charged paint particles, i.e., the cationic paint particles 60, are attracted to the conductive resonance member 20 as a cathode by the electrolytic action of the solution, and then coalesce and electrodeposit on the surface of the conductive resonance member 20 to form a uniform and continuous coating film 10.

At step S103-3: after a predetermined time of deposition, the conductive resonance member 20 is taken out from the non-metallic coating solution 40. The just-deposited coating film 10 contains a large amount of moisture, and after a certain period of deposition, the coating film 10 is at least partially shrunk due to the influence of the current, and the solvent and water are removed, and the dehydrated coating film 10 is firmly adhered to the conductive resonance member 20. When the coating film 10 reaches a certain thickness, it will form an insulating layer on the surface of the conductive resonance member 20, the cationic paint particles 60 slow down and stop the migration toward the conductive resonance member 20, and the electrophoresis process is finished, at this time, the conductive resonance member 20 covered with the coating film 10 is taken out from the non-metallic solution 40 for subsequent processing. The thickness of the deposited coating film 10 generally increases with increasing deposition time. According to one embodiment of the present invention, the thickness of the coating film 10 is between several micrometers and several tens of micrometers.

In addition, although the methods of the embodiments of the present invention are described above in a certain order, the present invention is not limited to the order described above, and may be carried out in various orders as long as a coating film can be formed on at least a part of the surface of the conductive resonance member 20, which are within the scope of the present invention.

According to an embodiment of the present invention, the surface treatment method as described above further includes performing a pretreatment on the surface of the conductive resonance member 20, the pretreatment including one or more of oil removal, rust removal, surface conditioning, phosphating, and deionized water washing on the surface of the conductive resonance member. Before the surface treatment method as described above is applied to the conductive resonance member 20, it is required to perform a pretreatment to ensure that the surface thereof is clean and flat. It will be understood by those skilled in the art that, for the conductive resonant member 20 with a high surface requirement, other corresponding surface treatments, such as chemical polishing, zinc plating, nickel plating, silver plating, etc., are performed to achieve the requirements of surface cleanliness, strength, corrosion resistance, etc., so as to obtain a coating film 10 with good quality and strong adhesion by the surface treatment method 100 of the present invention.

According to an embodiment of the present invention, the surface treatment method as described above further includes cleaning and/or drying the conductive resonance member 20 having the coating film after step S103. For example, the conductive resonator 20 taken out from the non-metal solution 40 is cleaned in a closed cycle, and is respectively washed with water and deionized water to clean impurities such as floating films on the conductive resonator 20. After cleaning, the conductive resonance member 20 is placed in an oven for drying. In the baking process, the temperature rise of the oven is not too fast, the baking process can be divided into a pre-baking process and a baking curing process, the conductive resonance part 20 is taken out after certain temperature and time are reached, and the temperature and the time can be set according to specific requirements. For example, the cleaned conductive resonator 20 is baked at 165 ± 5 ℃) for 40-60 min in an oven, and then taken out, so as to obtain the conductive resonator with the uniform and strong adhesive coating 10.

Fig. 4 shows a schematic view of a conductive resonator element having a coating film according to an embodiment of the present invention. As shown in the drawing, the coating film 10 deposited by the non-metallic paint is formed to a certain thickness and uniformly covers the outer surface of the conductive resonance member 20. According to an embodiment of the present invention, the young's modulus of the coating film formed of the non-metallic paint is smaller than the young's modulus of the conductive resonance member. It is known from material mechanics that when a structure is deformed by an external force, the maximum stress generally occurs on the surface of the structure. When the young's modulus of the coating film 10 is smaller than the young's modulus of the conductive resonant member 20, the occurrence of the alternating deformation has little influence on the performance of the conductive resonant member 20, the maximum stress in the coating film 10 is lower than that of the conductive resonant member 20, so that the maximum stress generated by an external force appears in the conductive resonant member 20, thereby protecting the surface of the conductive resonant member 20, and the threshold stress in the conductive resonant member 20 is not increased compared with that in the absence of the coating film 10, and the performance of the conductive resonant member 20 is not additionally influenced on the basis of prolonging the service life of the conductive resonant member 20.

The inventor of the invention finds that the higher the Young modulus of the surface film layer is, the higher the stress in the film layer under the same torsion amplitude is, and the threshold stress in the substrate material is slightly reduced; although in this way, the surface of the base material is strengthened by special treatment or a layer of high-strength material is directly deposited by thermal spraying or the like, which can reduce the stress borne by the base material and improve the fatigue resistance of the base material, the base material which generally has requirements on fatigue resistance in actual structural members is a material with high strength, it is difficult to further search for a material with higher strength, and the stress is largely transferred into the coating, which inevitably has microscopic defects and the like, so that the coating has a high risk of fatigue failure.

Thus according to a preferred embodiment of the invention, the young's modulus of said non-metallic paint is substantially smaller than the young's modulus of said conductive resonator member, e.g. less than or equal to one tenth of the young's modulus of the conductive resonator member. It is found through simulation that when the young's modulus of the surface coating film 10 is small, for example, 10 times smaller than that of the base material, the stress in the coating film 10 is extremely small, and the threshold stress in the conductive resonance member 20 is not significantly changed; therefore, when the young's modulus in the surface coating film 10 is significantly smaller than that of the base material, the stress state of the conductive resonance member 20 is not deteriorated. For example, the young's modulus of the polymer material as the non-metallic coating in the present invention is small, generally about several GPa, the threshold stress in the simulated coating film 10 is only several mpa, and the fatigue limit of the epoxy polymer is generally about several tens mpa or more, so that the film layer 10 itself has high fatigue resistance characteristics at a desired range and is not easily deteriorated.

In addition, the surface defects of the surface electrophoretic coating are far less than the surface of the processed base material, the failure rate of the electrophoretic coating layer is greatly reduced, and meanwhile, even if cracks are initiated in the electrophoretic layer, the direct expansion of the cracks to the base material is also hindered by the high interface bonding between the electrophoretic coating layer and the base material, and the crack expansion direction deflects. Fig. 5A, 5B and 5C show the results of cross-sectional stress simulations for different cases, respectively. Wherein FIG. 5A shows the stress simulation results for a substrate without any film layers; FIG. 5B shows the stress simulation results for the substrate with a polymer film layer (low Young's modulus); fig. 5C shows the stress simulation results for the substrate with a high modulus film layer. As shown in the figure, the polymer film layer with low young modulus has no obvious influence on the threshold stress under the same torsion amount, and the stress of the film layer is low; however, the stress in the high young's modulus film layer is greatly increased.

In addition, the method according to the invention is not sensitive to the thickness of the coating layer and therefore to the control parameters during the process. Fig. 6A, 6B and 6C are stress simulation results of the twist cross-section when the film thickness is 10, 20 and 30 microns, respectively, showing that the difference in film thickness has no significant effect on the stress distribution as well as the threshold stress. Therefore, the implementation effect of the method is insensitive to the thickness of the film layer under the same level of film layer thickness (after several microns to tens of microns), and therefore, is insensitive to the time control of the electrophoresis process, thereby having more tolerance of processing and manufacturing errors.

Fig. 7 shows a schematic diagram of the mechanism of action of the coating film for inhibiting crack initiation and growth in the conductive resonator member according to an embodiment of the present invention. As shown in fig. 7, including the coating film 10, the conductive resonator element 20, and the conductive resonator element microcracks 71. In the action mechanism diagram shown in fig. 7, the action mechanism of improving the fatigue resistance of the structure by surface electrophoretic coating does not reduce the threshold stress in the conductive resonance member 20 under the ideal condition, but inhibits the initiation and the expansion of the original surface microcracks 71 of the conductive resonance member 20 by the additional action of the surface coating film 10, thereby improving the service life cycle of the conductive resonance member 20 under the same working condition or the allowable stress under the same cycle number.

Fig. 8 is a schematic diagram illustrating the mechanism of action of the coating and the interface layer of the conductive resonator element for inhibiting the propagation of cracks to the conductive resonator element according to an embodiment of the present invention. As shown, including the coating 10, the conductive resonator element 20, the coating microcracks 72, and the interfacial bond energy 80.

Unlike the action mechanism shown in fig. 7, in the action mechanism diagram shown in fig. 8, when a crack is generated in the coating film 10 and propagates to the deep part of the structure and toward the conductive resonant member 20, since the interface between the coating film 10 and the conductive resonant member 20 has the interface bonding energy 80 that needs to be overcome by propagating to the conductive resonant member 20, and the interface bonding energy 80 tends to prevent the coating film microcracks 72 from further propagating to the conductive resonant member 20, so that the coating film microcracks 72 are deflected in the development direction, since the young modulus of the coating film 10 in the present invention is much lower than the young modulus of the conductive resonant member 20, the main structure of the conductive resonant member 20 and the corresponding device performance characteristics are not significantly affected even if the coating film 10 fails. Therefore, the action mechanism shown in fig. 7 or fig. 8 indicates that by applying the surface treatment method of the present invention to at least a part of the outer surface of the conductive resonance member 20, the fatigue resistance of the conductive resonance member 20 can be improved and the fatigue life of the conductive resonance member can be increased without substantially changing the properties of the conductive resonance member 20.

FIGS. 9A and 9B show simulation results of cross-sectional stress for the same notch in the substrate surface without the electrophoretic layer and without the electrophoretic layer in the case of FIG. 9A where the substrate surface has a notch and without the electrophoretic layer; in FIG. 9B, the substrate surface had the same gap and had a 10 micron electrophoretic layer. As shown, the arrows indicate the stretching direction, the black outlines indicate the initial position of the substrate before stretching, the substrate structures in the two comparative simulations are deformed correspondingly when stretched in the transverse direction by the same displacement, and the dark areas indicate the deformation of the substrate after stretching. As can be seen from the ordinate of the graph, the maximum stress of the electrocoated substrate in fig. 9B is reduced by about 10% compared to the substrate in fig. 9A. It can be seen that the polymer coating according to the present invention has a significant effect of suppressing the threshold stress at the gap of the substrate, for example, the stress at the gap of the substrate can be reduced by 10% at an elastic modulus of 1GPa, and if a coating with a higher elastic modulus is selected, the stress at the gap of the substrate can be further reduced, but the stress is significantly transferred to the film. And the smaller the stress, the slower the crack growth rate.

The inventors designed two experimental controls, surface treated and non-surface treated, respectively, and the results of the control are shown in fig. 10, where the number of cycles to failure is shown on the abscissa (logarithmic) and the magnitude of stress is shown on the ordinate. The experimental results show that under the condition that the base material, the structural design and the stress amplitude are completely the same, the average failure cycle number of the experimental group adopting electrophoretic coating is 2 times of that of electroless coating at the lowest, and is 5 times or more in most cases, which indicates that the structural fatigue resistance adopting the surface treatment process is obviously improved.

The invention also relates to a resonant piece of the laser radar, which comprises a metal substrate and a coating film of the non-metallic coating on the surface of the metal substrate. Wherein the coating film of the laser radar resonator is applied by the surface treatment method described above.

As described above, the present invention provides a surface treatment method, which utilizes the electrophoresis process technology under the condition that the material of the conductive resonance member has no significant requirement, and has the advantages of simple process, low equipment requirement, short time consumption, low cost, only conductive requirement for the base material, no significant requirement for the material, and wide application range. By utilizing the invention, the fatigue life of the material with lower strength can be obtained after the treatment with the higher strength base material, or the base material with the same strength has higher fatigue life after the surface treatment, thereby saving the material cost and improving the fatigue resistance. The surface treatment process adopted by the invention can not obviously influence the performance characteristics of the structure or the device, and the inherent loss characteristic of the system is not changed, so that the quality factor can not be changed while the fatigue resistance is improved, therefore, the invention is particularly suitable for application scenes of parts such as mechanical resonators, springs, elastic sheets and the like which bear obvious alternating mechanical deformation, and has obvious effect on the improvement of the non-contact structure fatigue resistance. In addition, the method has simple process and low cost, can meet the requirement on application scenes with higher fatigue resistance, and has considerable economic value.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A surface treatment method suitable for a laser radar resonator comprises the following steps:

step S101: providing a conductive resonator member having a metal substrate;

step S102: providing a non-metallic coating; and

2. The surface treatment method according to claim 1, wherein the step S103 is performed by electrophoresis, and the young 'S modulus of the coating film is smaller than the young' S modulus of the conductive resonator.

3. The surface treatment method according to claim 1 or 2, wherein the conductive resonance member includes one or more of a mechanical resonator, a swing mirror, a swing arm, a torsion beam, a galvanometer, a spring, and a spring plate.

4. A surface treatment method according to claim 1 or 2, wherein the non-metallic coating comprises one or more of epoxy, polyurethane, polyimide, polybutadiene.

5. The surface treatment method according to claim 2, further comprising: preparing a non-metal coating solution, wherein the non-metal coating solution is prepared from the non-metal coating, a solvent and water according to a preset proportion value.

6. The surface treatment method according to claim 5, wherein step S103 includes:

energizing the non-metallic coating solution;

7. The surface treatment method according to claim 1 or 2, further comprising pretreating the surface of the conductive resonance member, the pretreatment including one or more of degreasing, derusting, surface conditioning, phosphating, and deionized water washing of the surface of the conductive resonance member.

8. The surface treatment method according to claim 1 or 2, further comprising cleaning and/or drying the conductive resonance member having the coating film.

9. The surface treatment method according to claim 2, wherein the young's modulus of the coating film is one tenth or less of the young's modulus of the conductive resonance member.

10. A laser radar resonance part comprises a coating film of non-metallic paint and a metal substrate, wherein the coating film is positioned on the surface of the metal substrate.

11. The resonator element according to claim 10, wherein the coating film is applied by a surface treatment method according to any one of claims 1 to 9.