CN113406101A - 透射光学系统的检查装置 - Google Patents
透射光学系统的检查装置 Download PDFInfo
- Publication number
- CN113406101A CN113406101A CN202110276981.2A CN202110276981A CN113406101A CN 113406101 A CN113406101 A CN 113406101A CN 202110276981 A CN202110276981 A CN 202110276981A CN 113406101 A CN113406101 A CN 113406101A
- Authority
- CN
- China
- Prior art keywords
- light
- optical system
- subject
- light source
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 59
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- 238000001514 detection method Methods 0.000 abstract description 28
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 239000010408 film Substances 0.000 description 11
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- 239000012788 optical film Substances 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 4
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
Landscapes
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Communication System (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2020-0032677 | 2020-03-17 | ||
| KR1020200032677A KR102306234B1 (ko) | 2020-03-17 | 2020-03-17 | 투과 광학계 검사 장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113406101A true CN113406101A (zh) | 2021-09-17 |
Family
ID=77677595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110276981.2A Pending CN113406101A (zh) | 2020-03-17 | 2021-03-15 | 透射光学系统的检查装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7126011B2 (ja) |
| KR (1) | KR102306234B1 (ja) |
| CN (1) | CN113406101A (ja) |
| TW (1) | TWI819285B (ja) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333563A (ja) * | 2006-06-15 | 2007-12-27 | Toray Ind Inc | 光透過性シートの検査装置および検査方法 |
| CN104237246A (zh) * | 2013-06-21 | 2014-12-24 | 东友精细化工有限公司 | 光学薄膜的缺陷辨别方法 |
| KR20170129077A (ko) * | 2017-11-06 | 2017-11-24 | 동우 화인켐 주식회사 | 투과 광학계 검사 장치 및 이를 이용한 결함 검사 방법 |
| JP2018009810A (ja) * | 2016-07-11 | 2018-01-18 | 住友化学株式会社 | 欠陥検査システム及びフィルム製造装置 |
| CN107796829A (zh) * | 2016-08-31 | 2018-03-13 | 株式会社理光 | 检查装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000137001A (ja) | 1998-11-02 | 2000-05-16 | Toyobo Co Ltd | フィルム光学欠点検査装置 |
| DE102012110793B4 (de) | 2012-11-09 | 2020-09-03 | R.A.M. Realtime Application Measurement Gmbh | Vorrichtung und Verfahren zur Abbildung eines bahnförmigen Materials |
| KR20160047360A (ko) | 2014-10-22 | 2016-05-02 | 동우 화인켐 주식회사 | 결함 검출 시스템 및 방법 |
| KR20170010675A (ko) | 2015-07-20 | 2017-02-01 | 주식회사 엘지화학 | 광학필름 검사장치 및 광학필름 검사방법 |
| TWI696820B (zh) * | 2018-02-22 | 2020-06-21 | 致茂電子股份有限公司 | 檢測裝置 |
| KR102162693B1 (ko) * | 2018-12-14 | 2020-10-07 | 동우 화인켐 주식회사 | 결함 검출 시스템 및 방법 |
-
2020
- 2020-03-17 KR KR1020200032677A patent/KR102306234B1/ko active IP Right Grant
-
2021
- 2021-03-12 TW TW110108879A patent/TWI819285B/zh active
- 2021-03-15 CN CN202110276981.2A patent/CN113406101A/zh active Pending
- 2021-03-16 JP JP2021042863A patent/JP7126011B2/ja active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333563A (ja) * | 2006-06-15 | 2007-12-27 | Toray Ind Inc | 光透過性シートの検査装置および検査方法 |
| CN104237246A (zh) * | 2013-06-21 | 2014-12-24 | 东友精细化工有限公司 | 光学薄膜的缺陷辨别方法 |
| JP2018009810A (ja) * | 2016-07-11 | 2018-01-18 | 住友化学株式会社 | 欠陥検査システム及びフィルム製造装置 |
| CN107796829A (zh) * | 2016-08-31 | 2018-03-13 | 株式会社理光 | 检查装置 |
| KR20170129077A (ko) * | 2017-11-06 | 2017-11-24 | 동우 화인켐 주식회사 | 투과 광학계 검사 장치 및 이를 이용한 결함 검사 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2021148794A (ja) | 2021-09-27 |
| JP7126011B2 (ja) | 2022-08-25 |
| TW202138753A (zh) | 2021-10-16 |
| TWI819285B (zh) | 2023-10-21 |
| KR102306234B1 (ko) | 2021-09-28 |
| KR20210116041A (ko) | 2021-09-27 |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |