CN113278926A - Coating film shielding device and coating film device comprising same - Google Patents
Coating film shielding device and coating film device comprising same Download PDFInfo
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- CN113278926A CN113278926A CN202110411111.1A CN202110411111A CN113278926A CN 113278926 A CN113278926 A CN 113278926A CN 202110411111 A CN202110411111 A CN 202110411111A CN 113278926 A CN113278926 A CN 113278926A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a film coating shielding device, which comprises: the device comprises a driving part, a fixing plate, a film coating plate, a supporting plate, a baffle and a sliding structure; the first supporting plate and the second supporting plate are respectively arranged on two sides of the fixing plate; a guide rod is arranged between the two supporting plates; the film plating plate is arranged on the fixing plate and is provided with a chute and a hole for placing a workpiece to be processed; the sliding structure comprises a sliding block and a connecting rod; the guide rods are arranged between the support plates at intervals; the slide block is arranged on the guide rod in a sliding manner and is connected with the driving part; one end of the connecting rod is connected with the sliding block, and the other end of the connecting rod passes through the sliding groove and is connected with the film coating plate; the baffle plate moves back and forth along the sliding groove under the action of the driving part so as to block or expose the workpiece to be processed. The invention also provides a film coating device comprising the shielding device. The invention can accurately control the coating precision and shorten the preparation time.
Description
Technical Field
The invention relates to the field of optical coating, in particular to a coating shielding device and a coating device comprising the same.
Background
Linear graded filter (LVOF) is a new type of optical splitting element developed following prisms, gratings and more recently developed optical elements. Because the linear gradient filter can be combined with a CCD/CMOS detector array to form a detector capable of identifying a spectrum, the light splitting system can be greatly simplified, and the reliability, the stability and the optical efficiency of an instrument are improved, so that more and more attention is paid.
At present, the preparation method of the linear gradient optical filter is as follows: a baffle plate with a certain shape is arranged between the ion beam and the workpiece to be plated, during ion beam etching, the sample wafer moves back and forth at a certain constant speed, after certain etching times, the thickness difference perpendicular to the moving direction of the sample is obtained, and finally the designed spacing layer is obtained. The preparation process comprises the following steps: firstly, performing first coating on a substrate, and coating a lower layer film system and an intermediate layer; secondly, etching the intermediate layer according to the method to obtain a cavity layer with a certain angle; and finally, matching with the second coating, and finishing the preparation of the linear gradient optical filter. The coating method can cause insufficient control precision due to the distance between the baffle and the substrate and the angle between the baffle and the etching ion source. In addition, in the preparation process, the coating is performed first and then the etching is performed, and secondary coating is required, so that the preparation time is long.
Disclosure of Invention
In view of this, embodiments of the present invention provide a film-coating shielding device, which is installed in a film-coating vacuum chamber, and can precisely control the precision and shorten the preparation time. The invention also provides a coating device comprising the coating shielding device.
The embodiment of the invention provides a film coating shielding device, which comprises: the device comprises a driving part, a fixing plate, a film coating plate, a first supporting plate, a second supporting plate, a first guide rod, a second guide rod, a baffle and a sliding structure; the first supporting plate and the second supporting plate are respectively arranged on two sides of the fixing plate; the film plating plate is arranged on the fixing plate and is provided with a first sliding chute, a second sliding chute and a hole for placing a workpiece to be processed; the first guide rod and the second guide rod are arranged between the first support plate and the second support plate at intervals; the sliding structure comprises a sliding block, a first connecting rod and a second connecting rod; the sliding block is arranged on the first guide rod and the second guide rod in a sliding mode and is connected with the driving part; one end of each of the first connecting rod and the second connecting rod is connected with the sliding block, and the other end of each of the first connecting rod and the second connecting rod penetrates through the first sliding groove and the second sliding groove to be connected with the film plating plate; the baffle plate moves back and forth along the sliding groove under the action of the driving part so as to block or expose the workpiece to be machined.
Another embodiment of the present invention provides a plating apparatus, including: the vacuum chamber is provided with a rotary driving device above, an arc-shaped rotating frame is arranged in the vacuum chamber and connected with the rotary driving device, and a plurality of coating shielding devices according to claim 1 are arranged on the arc-shaped rotating frame.
The coating shielding device and the coating device comprising the same provided by the embodiment of the invention can accurately control the coating precision and shorten the preparation time.
Drawings
FIG. 1 is a schematic structural diagram of a film-coating shielding apparatus according to an embodiment of the present invention;
FIG. 2 is a bottom view of a masking device for plating film according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a coating apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, an embodiment of the present invention provides a film-coating shielding apparatus 1, including: a driving part 101, a fixing plate 102, a coating plate 103, a first supporting plate 104, a second supporting plate 105, a baffle 106 and a sliding structure.
Wherein, the first support plate 104 and the second support plate 105 are respectively arranged at two sides of the fixing plate 102; a guide bar is provided between the first support plate 104 and the second support plate 105. As shown in fig. 2, in one example, the guide bar may include a first guide bar 108 and a second guide bar 109 spaced between the first support plate 104 and the second support plate 105.
The coating plate 103 may be protrudingly provided on the fixing plate 102 and provided with a slide groove and an opening hole 107 for placing a member to be processed such as a glass substrate. The slide groove may include a first slide groove 113 and a second slide groove 114 respectively disposed at both sides of the opening hole 107.
The sliding structure may include a slider 110, a first connection rod 111, and a second connection rod 112. As shown in fig. 2, the slider 110 is slidably disposed on the first guide bar 108 and the second guide bar 109, and is connected to the driving portion 101. As shown in fig. 1, one end of each of the first connecting rod 111 and the second connecting rod 112 is connected to the slider 110, and the other end thereof passes through the first sliding slot 113 and the second sliding slot 114 to be connected to the plating plate 103. Thus, the baffle 106 can slide back and forth along the guide rod and the sliding groove under the driving of the driving part through the sliding structure.
In the embodiment of the present invention, the driving part 101 may be a stepping motor, and the driving shaft of the driving part 101 and the slider 110 may be connected by a lead screw-nut mechanism. The screw 115 is connected to a driving shaft of the driving part, and a nut is slidably provided on the screw 115 and connected to the slider 110. When the driving portion 101 is driven, the screw nut structure connected to the driving shaft drives the slider 110 to move back and forth along the guide rod, and further drives the baffle 106 to move back and forth along the sliding groove to block or expose the workpiece to be processed.
Another embodiment of the present invention provides a plating device 2, including: the vacuum chamber 201 is provided with a rotary driving device 202 above the vacuum chamber 201, an arc-shaped rotating frame 203 is arranged in the vacuum chamber, the arc-shaped rotating frame 203 is connected with the rotary driving device 202, and a plurality of the coating shielding devices 1 are arranged on the arc-shaped rotating frame 203.
Further, a plurality of mounting holes for mounting the film coating shielding device 1 are formed on the arc-shaped rotating frame 203. The coated plate 103 is inserted into the mounting hole, i.e. extends into the inner space of the arc-shaped rotating frame 203, and the fixed plate 102 is fixed on the arc-shaped rotating frame, for example, the fixed plate 102 can be fixed on the arc-shaped rotating frame 203 by bolts.
Further, in the embodiment of the present invention, the rotation driving device 202 may be a driving motor, and may be connected to the arc-shaped rotating frame 203 by any existing connection method. For example, the arc-shaped rotating frame 203 may be connected by a rotating disk 204. The rotating disc 204 may be a spur gear or a helical gear, and the driving shaft of the rotation driving device 202 may be connected by a driving wheel 205, and the driving wheel 205 is a spur gear or a helical gear engaged with the rotating disc 204. The rotary plate 204 is connected to the top of the arc rotary frame 203 through the rotary cylinder 206. When the rotary driving device 202 drives, the rotary disc can be driven to rotate at a high speed, so that the arc-shaped rotating frame 203 is driven to rotate at a high speed, and the axial uniformity of the substrate on the arc-shaped rotating frame 203 during film coating can be ensured.
In an embodiment of the present invention, a vacuum plug 207 may be further provided on the top of the vacuum chamber 201. A vacuum plug 207 may be provided on a flange provided on the rotary cylinder 206, and one end of the vacuum plug 207 is connected to the control device and the other end is connected to each driving part 101 in a wireless or wired manner to transmit a motor control signal and a power supply signal to each driving part 101.
In one embodiment, the vacuum plug 207 and each drive section are wired. Specifically, a conductive slip ring 208 may be provided at a lower end of the rotary cylinder 206, and the vacuum plug 207 and each driving part may be connected through the conductive slip ring 208. Through the connection of the conductive slip ring, the rotation and signal connection can be realized without cable twisting, and the power supply and control signal connection of each driving part can be ensured in the rotation process of the arc-shaped rotating frame.
In another embodiment, the vacuum plug 207 and each driving part are connected wirelessly, that is, the motor control signal and the power supply signal can be sent to each driving part wirelessly, and any existing wireless transmission method can be adopted, and the present invention is not particularly limited thereto as long as the function can be realized.
Further, the coating device provided by the embodiment of the invention further comprises: an evaporation source 209 arranged at the bottom of the arc-shaped rotating frame 203, and film thickness controllers 210 arranged at two sides of the vacuum chamber, wherein the number of the film thickness controllers 210 can be 1 or 2, and can be the existing quartz crystal oscillation sensor.
It should be noted that the coating apparatus according to the embodiment of the present invention further includes other structures of the conventional coating apparatus, and since these structures are not the improvement point of the present invention, detailed descriptions thereof are omitted.
According to the coating device provided by the embodiment of the invention, in the actual coating process, the evaporated material in the evaporation process can be simultaneously deposited on the substrate and the film thickness controller, and the automatically controlled baffle plate is arranged between the evaporation source and the substrate. A portion of the material will be deposited directly on the substrate and the location blocked by the baffle will be free of material deposition. Specifically, the running speed and the position of the baffle can be controlled according to the set different film thicknesses, the driving part can drive the baffle to perform linear motion according to the calculated time and speed under the control of the motor, and when the baffle moves, the substrate positioned on the opening can be shielded by the baffle to reduce the film thickness, so that the adjustment of different film thicknesses at different positions is realized. When the step is finished and before the next step of coating, the motor drives the baffle to return to the original position to prepare for the next step.
According to the film coating device provided by the embodiment of the invention, the baffle can directly cover the substrate, so that the problem of insufficient control precision caused by the distance between the baffle and the substrate and the angle between the baffle and an etching ion source in the prior art can be solved. In addition, in the coating process, the substrate can be shielded by controlling the baffle in real time, so that the coating can be finished at one time without the etching process, and the preparation time can be greatly shortened.
The above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. A coating film shielding device is characterized by comprising: the device comprises a driving part, a fixing plate, a film coating plate, a first supporting plate, a second supporting plate, a first guide rod, a second guide rod, a baffle and a sliding structure;
the first supporting plate and the second supporting plate are respectively arranged on two sides of the fixing plate;
the film plating plate is arranged on the fixing plate and is provided with a first sliding chute, a second sliding chute and a hole for placing a workpiece to be processed;
the first guide rod and the second guide rod are arranged between the first support plate and the second support plate at intervals;
the sliding structure comprises a sliding block, a first connecting rod and a second connecting rod; the sliding block is arranged on the first guide rod and the second guide rod in a sliding mode and is connected with the driving part; one end of each of the first connecting rod and the second connecting rod is connected with the sliding block, and the other end of each of the first connecting rod and the second connecting rod penetrates through the first sliding groove and the second sliding groove to be connected with the film plating plate;
the baffle plate moves back and forth along the sliding groove under the action of the driving part so as to block or expose the workpiece to be machined.
2. A plating device, characterized by comprising: the vacuum chamber is provided with a rotary driving device above, an arc-shaped rotating frame is arranged in the vacuum chamber and connected with the rotary driving device, and a plurality of coating shielding devices according to claim 1 are arranged on the arc-shaped rotating frame.
3. The plating device according to claim 2, wherein a plurality of mounting holes are formed in the arc-shaped rotating frame, the plating plates are fitted into the mounting holes, and the fixing plate is fixed to the arc-shaped rotating frame.
4. The plating device according to claim 3, wherein the fixed plate is fixed to the arc-shaped rotating frame by bolts.
5. The plating device according to claim 2, wherein a vacuum plug is further provided on the vacuum chamber, and the vacuum plug is connected to the driving section by wireless or wired connection.
6. The plating device according to claim 5, wherein a conductive slip ring is further provided on the vacuum chamber, and the vacuum plug and the driving section are connected through the conductive slip ring.
7. The plating device according to claim 5, wherein the vacuum plug and the driving section are connected wirelessly.
8. The plating device according to claim 2, further comprising: the evaporation source is arranged at the bottom of the arc-shaped rotating frame, and the film thickness controllers are arranged on two sides of the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110411111.1A CN113278926B (en) | 2021-04-16 | 2021-04-16 | Coating film shielding device and coating film device comprising same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110411111.1A CN113278926B (en) | 2021-04-16 | 2021-04-16 | Coating film shielding device and coating film device comprising same |
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| CN113278926A true CN113278926A (en) | 2021-08-20 |
| CN113278926B CN113278926B (en) | 2022-06-03 |
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| CN202110411111.1A Active CN113278926B (en) | 2021-04-16 | 2021-04-16 | Coating film shielding device and coating film device comprising same |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114262876A (en) * | 2021-11-29 | 2022-04-01 | 歌尔股份有限公司 | Film coating device and film coating method |
| CN114990479A (en) * | 2022-08-05 | 2022-09-02 | 江苏佳成冷却系统有限公司 | Local vacuum coating device for radiator |
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| CN209243156U (en) * | 2018-08-28 | 2019-08-13 | 浙江摩鼎纳米科技有限公司 | A kind of Horizontal multi-station continuous vacuum evaporation coating machine |
| CN111850468A (en) * | 2020-08-11 | 2020-10-30 | 江苏集萃有机光电技术研究所有限公司 | Mask assembly, evaporation device and OLED optimization method |
| JP2021038425A (en) * | 2019-09-02 | 2021-03-11 | キヤノントッキ株式会社 | Shutter device, film deposition apparatus, film deposition method, and manufacturing method of electronic device |
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| US20140264120A1 (en) * | 2013-03-14 | 2014-09-18 | Samsung Display Co., Ltd. | Vacuum evaporating apparatus |
| JP2017008409A (en) * | 2015-06-18 | 2017-01-12 | キヤノントッキ株式会社 | Vacuum evaporation device, production method of evaporation film and production method of organic electronic device |
| CN107604305A (en) * | 2017-08-31 | 2018-01-19 | 武汉华星光电半导体显示技术有限公司 | A kind of actuation mechanism of the lower photochopper of the organic cavity of evaporator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114262876A (en) * | 2021-11-29 | 2022-04-01 | 歌尔股份有限公司 | Film coating device and film coating method |
| CN114990479A (en) * | 2022-08-05 | 2022-09-02 | 江苏佳成冷却系统有限公司 | Local vacuum coating device for radiator |
| CN114990479B (en) * | 2022-08-05 | 2022-10-21 | 江苏佳成冷却系统有限公司 | Local vacuum coating device for radiator |
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| CN113278926B (en) | 2022-06-03 |
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