CN219758481U - Magnetic field intensity measuring equipment for magnetron sputtering cathode magnetic rod - Google Patents
Magnetic field intensity measuring equipment for magnetron sputtering cathode magnetic rod Download PDFInfo
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- CN219758481U CN219758481U CN202321109414.9U CN202321109414U CN219758481U CN 219758481 U CN219758481 U CN 219758481U CN 202321109414 U CN202321109414 U CN 202321109414U CN 219758481 U CN219758481 U CN 219758481U
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- bar magnet
- magnetron sputtering
- sliding table
- field intensity
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 161
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 24
- 238000005259 measurement Methods 0.000 claims abstract description 36
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 230000006698 induction Effects 0.000 claims abstract description 21
- 238000006073 displacement reaction Methods 0.000 claims description 24
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 7
- 239000010962 carbon steel Substances 0.000 claims description 7
- 239000003638 chemical reducing agent Substances 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 5
- 230000000712 assembly Effects 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 239000000306 component Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
The utility model discloses magnetic field intensity measuring equipment for a magnetron sputtering cathode magnetic bar, which comprises a support base, a magnetic bar rotary support mechanism and a magnetic induction intensity measuring instrument, wherein the magnetic bar rotary support mechanism is arranged on the support base and is used for installing a magnetic bar and driving the magnetic bar to rotate around the axial direction of the magnetic bar, a moving mechanism is arranged on the support base and is provided with a position adjusting assembly, the magnetic induction intensity measuring instrument is arranged on the position adjusting assembly, the position adjusting assembly is used for adjusting the positions of the magnetic induction intensity measuring instrument in the Y-axis and Z-axis directions, and the moving mechanism is used for driving the magnetic induction intensity measuring instrument to move along the X-axis direction so as to measure the magnetic field intensity of different spatial positions of the magnetic bar. The measuring equipment can measure the magnetic field intensity of different spatial positions of the magnetic rod with high precision according to requirements, and improves the measurement precision and the measurement efficiency of the cathode magnetic field intensity.
Description
Technical Field
The utility model relates to the technical field of measurement of magnetron sputtering equipment, in particular to magnetic field intensity measurement equipment for a magnetron sputtering cathode magnetic rod.
Background
The magnetron sputtering cathode is widely used in various coating industries at present, such as building glass coating, solar cell coating, electronic industry coating, tool coating, decorative coating, various lens coating and the like.
The magnetron sputtering coating is to make electrons run in a spiral way near the target surface by utilizing the interaction of a magnetic field and an electric field, so that the probability of the electrons striking argon to generate ions is increased, the generated ions strike the target surface under the action of the electric field to sputter out the target, and the target is deposited on a substrate to form a film.
The magnetic rod is used as one of core components in the magnetron sputtering process, the magnetic field strength of the cathode magnetic rod is one of key factors of film plating uniformity, and the magnetic field strength deviation of the cathode magnetic rod is required to be higher. In the prior art, most of detection modes of magnetic field intensity uniformity of the magnetic rod are purely manual measurement or semi-automatic measurement, measurement stability is not high, measurement errors are large, the length of the magnetic rod is long, the distance between measurement points is small, and measurement efficiency in the prior art is low.
Disclosure of Invention
In order to solve the technical problems in the background technology, the utility model provides magnetic field intensity measuring equipment for a magnetron sputtering cathode magnetic rod.
The utility model provides magnetic field intensity measuring equipment for a magnetron sputtering cathode magnetic rod, which comprises a support base, a magnetic rod rotary support mechanism and a magnetic induction intensity measuring instrument, wherein the magnetic rod rotary support mechanism is arranged on the support base and is used for installing a magnetic rod and driving the magnetic rod to rotate around the axial direction of the magnetic rod, a moving mechanism is arranged on the support base and is provided with a position adjusting assembly, the magnetic induction intensity measuring instrument is arranged on the position adjusting assembly, the axial direction of the magnetic rod is taken as the X-axis direction, the direction vertical to the axis of the magnetic rod on a horizontal plane is taken as the Y-axis direction, the direction vertical to the axis of the magnetic rod on a vertical plane is taken as the Z-axis direction, the position adjusting assembly is used for adjusting the positions of the magnetic induction intensity measuring instrument in the Y-axis and Z-axis directions, and the moving mechanism is used for driving the magnetic induction intensity measuring instrument to move along the X-axis direction so as to measure the magnetic field intensity of different spatial positions of the magnetic rod.
Preferably, the moving mechanism is a linear module, the linear module comprises a guide rail and a sliding table slidably mounted on the guide rail, and the guide rail is fixed on the support base along the X-axis direction.
Preferably, the position adjusting component comprises a connecting seat, a Y-axis displacement sliding table and a Z-axis displacement sliding table, wherein the connecting seat is fixedly connected to a sliding table of the linear module, the Z-axis displacement sliding table is fixedly connected to the connecting seat, the Y-axis displacement sliding table is fixedly connected to a sliding table of the Z-axis displacement sliding table, an installation connecting plate is fixedly connected to the sliding table of the Y-axis displacement sliding table, and the Y-axis displacement sliding table and the Z-axis displacement sliding table can be manually adjusted and controlled to move through a threaded rotating handle.
Preferably, the magnetic induction measuring device is a gauss meter which is arranged vertically and is locked on the mounting connection plate by a fixed pressing plate and a screw.
Preferably, the magnetic rod rotation supporting mechanism comprises a driving rotation driving assembly and a driven rotation assembly, wherein the driving rotation driving assembly is fixedly arranged on a supporting base and used for clamping one end of a magnetic rod, a linear sliding rail is fixed on the supporting base along the X-axis direction, and the driven rotation mechanism is opposite to the driving rotation driving assembly in position and is slidably arranged on the linear sliding rail through a sliding block and used for clamping the other end of the magnetic rod.
Preferably, the initiative rotary driving assembly comprises a first installation seat vertically and fixedly connected to the supporting base, a first connection disc is rotatably installed on the first installation seat through a bearing, one end of the first connection disc is coaxially provided with the initiative three-jaw chuck, and the other end of the first connection disc is sequentially connected with a coupler, a speed reducer and a first servo motor.
Preferably, the driven rotating assembly comprises a second mounting seat vertically and fixedly connected to a sliding block of the linear sliding rail, a second connecting disc is rotatably mounted on the second mounting seat through a bearing, a driven three-jaw chuck is coaxially mounted at one end of the second connecting disc, and the driven three-jaw chuck is coaxial with the driving three-jaw chuck.
Preferably, the magnetic rod rotating support mechanism further comprises a plurality of rotating support assemblies arranged between the driving rotating drive assembly and the driven rotating assembly, each rotating support assembly comprises a moving support seat and a moving support plate, the moving support seats are slidably mounted on the linear sliding rail through sliding blocks, the upper ends of the moving support seats are provided with slots, the moving support plates are detachably inserted on the slots, and the upper ends of the moving support plates are provided with V-shaped grooves for supporting the magnetic rods.
Preferably, the support base is formed by welding a carbon steel rectangular tube and a carbon steel plate.
Preferably, the bottom of the support base is mounted with a height-adjusting foot.
When the magnetic field intensity measuring equipment of the magnetron sputtering cathode magnetic rod is used for measuring the magnetic field of the magnetic rod, the magnetic induction intensity measuring instrument is connected with the data acquisition system, the magnetic rod is driven to rotate by a certain angle by automatically controlling the magnetic rod rotating supporting mechanism through a program, the measuring speed of the magnetic induction intensity measuring instrument is automatically controlled and the magnetic rod is moved to a measuring point, the magnetic field intensity of the magnetic rod can be customized according to requirements, the measuring result of each measuring point is automatically recorded, and the measuring result is analyzed and whether the magnetic rod is qualified or not is judged. Therefore, the measuring equipment can measure the magnetic field intensity of different spatial positions of the magnetic rod with high precision according to the requirement, and improves the measurement precision and the measurement efficiency of the cathode magnetic field intensity.
Drawings
FIG. 1 is an overall construction diagram of a magnetic field strength measuring apparatus of a magnetron sputtering cathode bar in an embodiment;
FIG. 2 is a partial block diagram of a support base in an embodiment;
FIG. 3 is a partial block diagram of the upper surface of the support base in an embodiment;
FIG. 4 is a cross-sectional view of an active rotary drive assembly in an embodiment;
FIG. 5 is a cross-sectional view of a driven rotation assembly in an embodiment;
FIG. 6 is an overall construction diagram of a magnetic rod rotation support mechanism in the embodiment;
FIG. 7 is a front view of an assembled Gaussian gauge, position adjustment assembly, and linear die set in an embodiment;
FIG. 8 is a side view of an assembled Gaussian gauge, position adjustment assembly, and linear die set of an embodiment;
FIG. 9 is a magnetic strength measurement path in an embodiment;
FIG. 10 is another magnetic strength measurement path in an embodiment.
Detailed Description
Referring to fig. 1-10, the embodiment of the utility model provides a magnetic field intensity measuring device for a magnetron sputtering cathode magnetic bar, which can drive the magnetic bar to rotate and drive a gauss meter 8 to linearly displace for measurement, so that the magnetic field intensity of different spatial positions of the magnetic bar can be measured with high precision as required.
The magnetic field intensity measuring device for the magnetron sputtering cathode magnetic rod comprises a supporting base 1, a magnetic rod rotating supporting mechanism and a magnetic induction intensity measuring instrument. Wherein, the magnetic rod rotation support mechanism is installed on the support base 1 for installing the magnetic rod and can drive the magnetic rod to rotate around the axial direction thereof. The magnetic induction intensity measuring instrument is installed on the supporting base 1 through the moving mechanism and the position adjusting component 7, referring to fig. 1, the axial direction of the magnetic rod 9 is taken as the X-axis direction, the direction perpendicular to the axis of the magnetic rod 9 on the horizontal plane is taken as the Y-axis direction, the direction perpendicular to the axis of the magnetic rod 9 on the vertical plane is taken as the Z-axis direction, the position adjusting component 7 can adjust the positions of the magnetic induction intensity measuring instrument in the Y-axis direction and the Z-axis direction, and the moving mechanism can drive the magnetic induction intensity measuring instrument to move along the X-axis direction, so that the magnetic field intensity of different spatial positions of the magnetic rod 9 is measured.
In a specific embodiment, the support base 1 is formed by welding a carbon steel rectangular tube 11 and a carbon steel plate 12, and after welding, the welding stress is removed by heat treatment, and then a slide rail mounting groove 121, a linear module mounting groove 122 and a first mounting seat mounting groove 123 are machined on the upper surface of the support base 1. The bottom of the support base 1 is provided with a height adjusting foot 13 for adjusting the height of each position of the support base 1, so that the upper surface of the support base 1 is in a horizontal position.
Referring to fig. 4, 5 and 6, the bar magnet rotary support mechanism includes a driving rotary drive assembly 2 and a driven rotary assembly 3. The driving rotary driving assembly 2 is provided with a first mounting seat 21, the first mounting seat 21 is vertically and fixedly connected to a first mounting seat mounting groove 123 of the supporting base 1, a first connecting disc 22 is rotatably mounted on the first mounting seat 21 through a deep groove ball bearing, clamping springs and bearing covers are further mounted at two ends of the bearing, a driving three-jaw chuck 23 is coaxially mounted at one end of the first connecting disc 22, the driving three-jaw chuck 23 is used for clamping one end of the magnetic rod 9, and a coupler 24, a speed reducer 25 and a first servo motor 26 are sequentially connected to the other end of the first connecting disc 22. Two linear slide rails 4 are fixedly connected to the slide rail mounting groove 121 of the support base 1 along the X-axis direction through stainless steel bolts, the driven rotating mechanism is opposite to the driving rotating driving assembly 2, the driven rotating assembly 3 comprises a second mounting seat 31, the second mounting seat 31 is vertically and fixedly connected to the sliding block 41 of the linear slide rails 4, a second connecting disc 32 is rotatably mounted on the second mounting seat 31 through a deep groove ball bearing, a clamping spring and a bearing cover are also mounted at two ends of the bearing, a driven three-jaw chuck 33 is coaxially mounted at one end of the second connecting disc 32, the driven three-jaw chuck 33 is coaxial with the driving three-jaw chuck 23, the coaxiality deviation during mounting cannot exceed 0.1mm, and the driven three-jaw chuck 33 is used for clamping the other end of the magnetic rod 9. When the magnetic rod driving three-jaw chuck works, the first servo motor 26 is connected with a servo motor control system, the output shaft of the first servo motor 26 is connected with the first connecting disc 22 through the speed reducer 25 and the coupler 24, and the driving three-jaw chuck 23 is driven to rotate at a given angle according to a program, so that the magnetic rod is driven to rotate.
In order to avoid bending of the magnetic rods due to self weight, the magnetic rod rotating support mechanism further comprises a plurality of rotating support assemblies 5 arranged between the driving rotating drive assembly 2 and the driven rotating assembly 3, and the distance between the rotating support assemblies 5 of each magnetic rod is not more than 1000mm in principle due to the difference of the lengths of the magnetic rods. Each rotary support assembly 5 comprises a movable support seat 51 and a movable support plate 52, the movable support seat 51 is slidably mounted on the linear slide rail 4 through a sliding block 41, a slot is formed in the upper end of the movable support seat 51, the movable support plate 52 is detachably inserted into the slot in a bolt fixing mode, and a V-shaped groove for supporting a magnetic rod is formed in the upper end of the movable support plate 52. Based on the difference of the rotation radius of the magnetic rod, the movable supporting plate 52 can be replaced according to the difference of the rotation radius of the magnetic rod, so that the V-shaped groove can support the magnetic rod, and the movable supporting plate 52 is made of a material with a low friction coefficient, such as engineering plastic. Preferably, the sliding block 41 on the linear sliding rail 4 has a locking function, so that the distance between the rotary supporting component 5 and the driven rotary mechanism can be adjusted through the sliding block 41, and the linear sliding rail can be positioned at any time, and is more convenient to use.
According to the magnetic rod rotating supporting mechanism, when the magnetic rod rotating supporting mechanism is used for measuring, the magnetic rod can be prevented from bending, the magnetic rod is convenient to install, the coaxiality is high, and the axial precision of the magnetic rod during rotation can be guaranteed.
Referring to fig. 1, 7 and 8, in the present embodiment, the moving mechanism is a linear module 6, the linear module 6 includes a guide rail 61 and a sliding table 62 slidably mounted on the guide rail 61, the guide rail 61 is fixed on a linear module mounting groove 122 of the support base 1 along the X axis direction, the linear module 6 further includes a second servo motor 63 and a speed reducer 64, the second servo motor 63 and the speed reducer 64 are mounted on one end of the guide rail 61, and are connected with the sliding table 62 through a screw mechanism inside the guide rail 61, and can drive the sliding table 62 to slide along the guide rail 61, and the second servo motor 63 is connected with a servo motor control system for control.
The position adjusting assembly 7 comprises a connecting seat 71, a Y-axis displacement sliding table 72 and a Z-axis displacement sliding table 73, wherein the connecting seat 71 is fixedly connected to the sliding table 62 of the linear module 6, the Z-axis displacement sliding table 73 is fixedly connected to the connecting seat 71, the Y-axis displacement sliding table 72 is fixedly connected to the sliding table of the Z-axis displacement sliding table 73, the Y-axis displacement sliding table 72 is fixedly connected to a mounting connecting plate 74, and the Y-axis displacement sliding table 72 and the Z-axis displacement sliding table 73 can be manually adjusted and controlled to move through a threaded rotary handle. The magnetic induction intensity measuring instrument adopts a gauss meter 8, the gauss meter 8 is vertically arranged and is locked on an installation connecting plate 74 through a fixed pressing plate 75 and a screw, a signal transmission line of the gauss meter 8 is connected to a gauss data acquisition system, and for facilitating wiring, the signal transmission line of the gauss meter 8 can be penetrated by installing a drag chain on one side of the linear sliding rail 4, one end of the drag chain is fixed on a carbon steel plate 12 of the supporting base 1, and the other end of the drag chain is fixed on the connecting seat 71.
According to the measuring equipment of the embodiment, when the magnetic field intensity of the magnetic rod is measured, the first servo motor drives the magnetic rod to rotate, the linear module 6 drives the Gaussian meter 8 to axially move along the magnetic rod, the position and the measuring speed of a magnetic field measuring point are controlled through a program, the magnetic field intensity of the magnetic rod at the point is automatically recorded when the magnetic rod rotates by one point each time the Gaussian meter 8 moves, and finally the measuring result is analyzed and whether the magnetic rod is qualified or not is judged. Therefore, the Gaussian gauge 8 is convenient to adjust in position, and can measure the magnetic field intensity of different spatial positions of the magnetic rod with high precision according to requirements, so that the measurement precision and the measurement efficiency of the cathode magnetic field intensity are improved.
As shown in fig. 9, a magnetic intensity measurement path of the measuring apparatus is shown, and the measuring method of the path is: and rotating the magnetic rod at a certain angle along the axis of the magnetic rod, measuring magnetic measurement intensities of the magnetic rod at different angle positions, moving a distance along the axial direction of the magnetic rod after the magnetic measurement intensity of the magnetic rod in the required angle is measured, rotating the magnetic rod at a certain angle in the opposite direction, and measuring the magnetic measurement intensities of the magnetic rod at different angle positions, so that the magnetic rod reciprocates to finish the magnetic measurement intensity measurement in the effective magnetic surface of the magnetic rod.
As shown in fig. 10, another magnetic intensity measurement path of the measuring apparatus is shown, and the measurement method of this path is: and measuring the magnetic measurement intensity of the magnetic rod along the axial direction of the magnetic rod, and measuring the magnetic measurement intensity of the magnetic rod in the opposite direction of the axial direction of the magnetic rod after rotating for an angle, so that the magnetic measurement intensity in the effective magnetic surface of the magnetic rod is finished.
It should be noted that, in order to avoid the ferromagnetic material affecting the magnetic field intensity measurement accuracy of the magnetic rod and eliminating the interference, in this embodiment, all the parts contacting with the magnetic rod are made of non-magnetic materials, and the materials in the effective magnetic field range of the magnetic rod are also made of non-magnetic materials, and other areas can be selected to have magnetic materials.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (10)
1. The utility model provides a magnetron sputtering cathode bar magnet magnetic field intensity measuring equipment, a serial communication port, including supporting base (1), bar magnet rotary support mechanism and magnetic induction intensity measuring apparatu, bar magnet rotary support mechanism installs on supporting base (1) for install the bar magnet and can drive the bar magnet around its axial rotation, install moving mechanism on supporting base (1), install position adjustment subassembly (7) on the moving mechanism, magnetic induction intensity measuring apparatu installs on position adjustment subassembly (7), position adjustment subassembly (7) are used for adjusting the position of magnetic induction intensity measuring apparatu in Y axle and Z axial direction, moving mechanism is used for driving magnetic induction intensity measuring apparatu and removes along X axial direction, in order to measure the magnetic field intensity of the different spatial positions of bar magnet.
2. The magnetron sputtering cathode bar magnet field intensity measurement apparatus as claimed in claim 1, wherein the moving mechanism is a linear module (6), the linear module (6) includes a guide rail (61) and a slide table (62) slidably mounted on the guide rail (61), and the guide rail (61) is fixed on the support base (1) along the X-axis direction.
3. The magnetron sputtering cathode bar magnet field intensity measurement device according to claim 2, wherein the position adjustment assembly (7) comprises a connecting seat (71), a Y-axis displacement sliding table (72) and a Z-axis displacement sliding table (73), the connecting seat (71) is fixedly connected to a sliding table (62) of the linear module (6), the Z-axis displacement sliding table (73) is fixedly connected to the connecting seat (71), the Y-axis displacement sliding table (72) is fixedly connected to a sliding table of the Z-axis displacement sliding table (73), a mounting connection plate (74) is fixedly connected to a sliding table of the Y-axis displacement sliding table (72), and the Y-axis displacement sliding table (72) and the Z-axis displacement sliding table (73) can be manually adjusted and controlled to move through a threaded rotary handle.
4. A magnetron sputtering cathode bar magnet field strength measuring apparatus according to claim 3 wherein the magnetic induction strength measuring instrument is a gauss meter (8), the gauss meter (8) being arranged vertically and locked to the mounting connection plate (74) by a stationary press plate (75) and screw.
5. The magnetron sputtering cathode bar magnet field intensity measurement device according to claim 1, wherein the bar magnet rotating support mechanism comprises a driving rotation driving assembly (2) and a driven rotation assembly (3), the driving rotation driving assembly (2) is fixedly installed on the support base (1) and used for clamping one end of a bar magnet, a linear slide rail (4) is fixed on the support base (1) along the X-axis direction, and the driven rotation mechanism is opposite to the driving rotation driving assembly (2) in position and slidably installed on the linear slide rail (4) through a slide block (41) and used for clamping the other end of the bar magnet.
6. The magnetron sputtering cathode bar magnet field intensity measurement device according to claim 5, wherein the active rotation driving assembly (2) comprises a first mounting seat (21) vertically and fixedly connected to the supporting base (1), a first connecting disc (22) is rotatably mounted on the first mounting seat (21) through a bearing, one end of the first connecting disc (22) is coaxially provided with an active three-jaw chuck (23), and the other end of the first connecting disc (22) is sequentially connected with a coupler (24), a speed reducer (25) and a first servo motor (26).
7. The magnetron sputtering cathode bar magnet field intensity measurement device according to claim 6, wherein the driven rotating assembly (3) comprises a second mounting seat (31) vertically and fixedly connected to a sliding block (41) of the linear sliding rail (4), a second connecting disc (32) is rotatably mounted on the second mounting seat (31) through a bearing, a driven three-jaw chuck (33) is coaxially mounted at one end of the second connecting disc (32), and the driven three-jaw chuck (33) is coaxial with the driving three-jaw chuck (23).
8. Magnetron sputtering cathode bar magnet field strength measurement equipment according to any of claims 5-7, characterized in that the bar magnet rotating support mechanism further comprises a plurality of rotating support assemblies (5) arranged between the driving rotating drive assembly (2) and the driven rotating assembly (3), each rotating support assembly (5) comprises a moving support seat (51) and a moving support plate (52), the moving support seat (51) is slidably mounted on the linear slide rail (4) through a sliding block (41), a slot is arranged at the upper end of the moving support seat (51), the moving support plate (52) is detachably inserted on the slot, and a V-shaped groove for supporting the bar magnet is arranged at the upper end of the moving support plate (52).
9. The magnetron sputtering cathode bar magnet field strength measurement device according to claim 1, wherein the support base (1) is formed by welding a carbon steel rectangular tube (11) and a carbon steel plate (12).
10. The magnetron sputtering cathode bar magnet field strength measurement device according to claim 1, wherein the bottom of the support base (1) is provided with a height adjusting foot (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321109414.9U CN219758481U (en) | 2023-05-10 | 2023-05-10 | Magnetic field intensity measuring equipment for magnetron sputtering cathode magnetic rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321109414.9U CN219758481U (en) | 2023-05-10 | 2023-05-10 | Magnetic field intensity measuring equipment for magnetron sputtering cathode magnetic rod |
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| Publication Number | Publication Date |
|---|---|
| CN219758481U true CN219758481U (en) | 2023-09-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321109414.9U Active CN219758481U (en) | 2023-05-10 | 2023-05-10 | Magnetic field intensity measuring equipment for magnetron sputtering cathode magnetic rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219758481U (en) |
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2023
- 2023-05-10 CN CN202321109414.9U patent/CN219758481U/en active Active
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