CN207643507U - A kind of micro-structure hits the adjusting platform of a machining tool light-conducting board mold - Google Patents

A kind of micro-structure hits the adjusting platform of a machining tool light-conducting board mold Download PDF

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Publication number
CN207643507U
CN207643507U CN201721056505.5U CN201721056505U CN207643507U CN 207643507 U CN207643507 U CN 207643507U CN 201721056505 U CN201721056505 U CN 201721056505U CN 207643507 U CN207643507 U CN 207643507U
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China
Prior art keywords
regulating device
axis regulating
board mold
conducting board
axis
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CN201721056505.5U
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Inventor
陈新
张霞峰
刘强
尹自强
赵荣丽
李克天
周春强
林剑
魏棵榕
郭亚文
刘浩
姚建华
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The utility model discloses the adjusting platforms that a kind of micro-structure hits a machining tool light-conducting board mold, including pedestal and the X-axis regulating device, Y-axis regulating device, Z axis regulating device and the detection device that are mounted on the base, the levelness of detection Z axis regulating device in the X-axis direction;Electromagnetic chuck device is installed, the upper surface of the electromagnetic chuck device is equipped with that have can be by the light-conducting board mold of magnetic in the Z axis regulating device.The utility model has automation adjusting, the advantageous effect that degree of regulation is high, easy to use and work efficiency is high.

Description

A kind of micro-structure hits the adjusting platform of a machining tool light-conducting board mold
Technical field
The utility model is related to a kind of adjusting platform, refers in particular to a kind of micro-structure and hit a machining tool light-conducting board mold Adjust platform.
Background technology
Light-conducting board mold belongs to precision workpiece, and there is micro array structure, these micro array structures to be on light-conducting board mold A lathe is hit by precision hit a little be process, since the depth in micro array structure hole only has several microns, it is intended to obtain micro- battle array The being consistent property of working depth in hole and smaller error effects are arranged, adjusting platform needs high levelness.
Existing adjusting platform essentially adjusts platform manually, as the patent No. " 201610566884.6 " discloses a kind of use An adjusting platform for processing is hit in microarray, which places array on the surface of light-conducting board mold and machined multiple array circles Hole is put into circular magnet in circular hole, and this adjusting platform leans on pure mechanic structure magnetic lightguide plate fixing mold, in installation light guide plate When mold, by pushing hard it is put into suitable Working position entirely, when unloading firmly removes platform, installs and uninstalls and is both needed to cost very energetically Gas overcomes magnetic attraction of the platform to light-conducting board mold, great work intensity and inconvenience, when especially unloading light-conducting board mold, leads The bottom surface of tabula rasa mold and the upper surface for adjusting platform can be marked multiple tracks scar, reduce the service life for adjusting platform. More importantly when carrying out leveling to light-conducting board mold, the Elastic Bolts tightened manually or unscrew platform quadrangle adjust light guide plate Die horizontal degree needs repeatedly adjust repeatedly because needing to be adjusted in 2 μm, be susceptible to one jiao of Elastic Bolts in quadrangle by It tightens completely downwards, but position is still in peak herein, in such a case it is necessary to abandon all adjustings of front, again Start to adjust, the time of serious waste processor and the workload for increasing processor cause processing efficiency low.
Utility model content
Utility model aims to solve pacify loading, unloading light-conducting board mold on existing adjusting platform and adjust inconvenience And the problem of reducing processing efficiency, provide a kind of automation adjust, micro- knot that degree of regulation is high, easy to use and work efficiency is high Structure hits the adjusting platform of a machining tool light-conducting board mold.
Following technical scheme can be used to reach in the purpose of this utility model:
A kind of micro-structure hits the adjusting platform and its adjusting method of a machining tool light-conducting board mold, including pedestal and installation In X-axis regulating device, Y-axis regulating device, Z axis regulating device and detection device on pedestal, the Y-axis regulating device is set to The top of the Z axis regulating device, the detection device are installed on the Y axis adjustment devices and detect in Z axis regulating device The levelness of light-conducting board mold in the Y-axis direction;The Z axis regulating device be slidably mounted in the X-axis regulating device and It moves in the X-axis direction, the levelness of light-conducting board mold in the X-axis direction in detection Z axis regulating device;The Z axis Electromagnetic chuck device is installed, the upper surface of the electromagnetic chuck device, which is equipped with, to be led with what is unloaded by magnetic in regulating device Tabula rasa mold;The Z axis regulating device is equipped with locking device, and locking device arrives the Z axis adjustment devices of corresponding position by adjusting Locking is unclamped.
Further, the Z axis regulating device includes mounting base, voice coil motor, electric displacement sensor and connecting seat, described Mounting base is installed on the tache motorice of the X-axis regulating device, and institute is uniformly provided on the profile side of the upper surface of the mounting base State voice coil motor and electric displacement sensor, the flexible axis connection of the bottom end of the connecting seat and the voice coil motor.
Further, the Acetabula device includes electromagnetic generator and the cover board that can be magnetized, the upper table of the connecting seat Face is provided with groove, and the electromagnetic generator is installed in groove, and the cover plate lid is together on the upper surface of connecting seat.
As a preferred solution, the electromagnetic generator includes coil and iron core, and the iron core is set in groove, and Coil is sheathed on iron core.
As a preferred solution, the cover board includes several magnetic stripes and is equipped between magnetic stripe, two adjacent magnetic stripes It is described every magnetic stripe, and the magnetic pole of two adjacent magnetic stripes is opposite.
As a preferred solution, the locking device is set on the side in Z axis regulating device, the locking device Including waling stripe and two vertical connecting rods, one end of the vertical connecting rod is fixedly installed in mounting base, vertical connecting rod it is another One end is provided with slot hole, and threaded hole is provided on the side of the connecting seat, and the both ends of the waling stripe are connected through a screw thread part It is threadedly coupled with threaded hole across slot hole, when voice coil motor is drivingly connected on seat to corresponding position, twists threaded connector Connecting seat is locked.
Further, the X-axis regulating device includes the linear guide, sliding block and driving device, and the linear guide is fixed It being mounted on the base, the sliding block is slidably mounted in the linear guide, and the Z axis regulating device is fixedly installed on sliding block, The power output end of the driving device connect with the sliding block and sliding block is driven to be slided in the linear guide.
As a preferred solution, the detection device is magnetic-type probe unit.
Implement the utility model, has the advantages that:
1, the utility model uses electromagnetic chuck device, after light-conducting board mold is placed in Z axis regulating device, only needs It is powered to electromagnetic chuck device, you can light-conducting board mold is adsorbed and is fixed in Z axis regulating device;Likewise, when need by Light-conducting board mold unloads, then only need to power off to magnechuck, you can rapidly light-conducting board mold unload, install with Unloading is simple, convenient and quick.
2, the utility model carries out elevation carrection by detection device to the surface of light-conducting board mold;It is examined according to detection device The data measured control Z axis adjustment device work, are adjusted to the levelness on the surface of light-conducting board mold, make guide-lighting template die The levelness on the surface of tool reaches requirement.The levelness on the surface of light-conducting board mold is adjusted in Z axis adjusting and reaches and wants After asking, Z axis is lockked by locking device by can not be moved, then the levelness on the surface of light-conducting board mold at this time can be kept It does not spend, realizes the purpose of the levelness on the surface for keeping light-conducting board mold for a long time.
3, after the method for the utility model carries out height detection by detection device to the surface of light-conducting board mold, by right Voice coil motor on corresponding position is controlled, and makes voice coil motor that the connection seat position being connect with the voice coil motor be raised and lowered Apparent height, and finally make to reach requirement on the horizontal plane of the light-conducting board mold being positioned on connecting seat.Meanwhile displacement sensing Device is detected the driving distance of voice coil motor, after increasing or declining corresponding height, controls the voice coil electricity on corresponding position Machine is stopped, until the levelness on the surface of light-conducting board mold reaches requirement.This method is automatically to guide-lighting template die Tool carries out leveling, can greatly ensure the precision of adjusting platform adjusting, has control and easy to adjust, quick and degree of regulation height The characteristics of.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor Under, other drawings may also be obtained based on these drawings.
Fig. 1 is the structural schematic diagram for the adjusting platform that the utility model micro-structure hits a machining tool light-conducting board mold;
Fig. 2 is the X-axis regulating device and Z axis regulating device that the utility model micro-structure hits a machining tool light-conducting board mold Structural schematic diagram;
Fig. 3 is the sectional views of Fig. 2 vertically;
Fig. 4 is the structural schematic diagram of light-conducting board mold.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work The every other embodiment obtained, shall fall within the protection scope of the present invention.
Embodiment
Referring to Figures 1 and 2, the present embodiment is related to adjusting platform, including pedestal 1 is adjusted with the X-axis being installed on pedestal 1 Device 2, Y-axis regulating device 3, Z axis regulating device 4 and detection device 5, the Y-axis regulating device 3 are adjusted set on the Z axis The top of device 4, the detection device 5 are installed in the Y-axis regulating device 3 and detect guide-lighting template die in Z axis regulating device 4 The levelness of tool 10 in the Y-axis direction;The Z axis regulating device 4 is slidably mounted in the X-axis regulating device 2 and along X-axis Direction moves, and detection device 5 detects the levelness of light-conducting board mold 10 in the X-axis direction in Z axis regulating device 4;The Z axis Electromagnetic chuck device is installed, the upper surface of the electromagnetic chuck device is equipped with that have can be by the leaded light of magnetic in regulating device 4 Board mold 10;The Z axis regulating device 4 is equipped with locking device, and locking device arrives the Z axis regulating device of corresponding position by adjusting 4 lockings are unclamped.
The adjusting platform uses electromagnetic chuck device, after light-conducting board mold 10 is placed in Z axis regulating device 4, only It need to be powered to electromagnetic chuck device, you can light-conducting board mold 10 is adsorbed and is fixed in Z axis regulating device 4;Likewise, when needing Light-conducting board mold 10 is unloaded, then need to only be powered off to magnechuck, you can rapidly light-conducting board mold is unloaded, It is simple, convenient and quick to install and uninstall.
X-axis regulating device 2 drives Z axis regulating device 4 to be slided in X-direction, makes to be installed on leading in Z axis regulating device 4 Tabula rasa mold 10 is also slided along X-direction, to which detection device 5 can survey the position in light-conducting board mold 10X axis directions Amount.And Y-axis regulating device 3 drives detection device 5 along Y direction sliding and to the position in the Y direction of light-conducting board mold 10 It measures.When X-axis regulating device 2 and Y axis adjustment devices 3 work, detection device 5 to the surface of light-conducting board mold 10 into Row elevation carrection;According to the data that detection device 5 detects, control Z axis regulating device 4 works, to the table of light-conducting board mold 10 The levelness in face is adjusted, and the levelness on the surface of light guide plate is made to reach requirement.
The levelness on the surface of light-conducting board mold 10 is adjusted after reaching requirement in Z axis adjusting, passes through and lock dress It sets and Z axis is lockked and can not be moved, then the levelness on the surface of light-conducting board mold 10 at this time, which can be kept, does not spend, when realizing long Between keep light-conducting board mold 10 surface levelness purpose.
The Z axis regulating device 4 includes mounting base 41, voice coil motor 42, electric displacement sensor 43 and connecting seat 44, described Mounting base 41 is installed on the tache motorice of the X-axis regulating device 2, on the profile side of the upper surface of the mounting base 41 uniformly Equipped with the voice coil motor 42 and electric displacement sensor 43, the telescopic shaft of the bottom end of the connecting seat 44 and the voice coil motor 42 Connection.Z axis regulating device 4 is equipped with multiple, and is distributed on the profile side of mounting base 41 and connecting seat 44.It is right in detection device 5 After the upper surface of light-conducting board mold 10 carries out height detection, by controlling the voice coil motor 42 on corresponding position, make sound The apparent height for 44 position of connecting seat being connect with the voice coil motor 42 is raised and lowered in circle motor 42, and finally makes to be positioned over Reach requirement on the horizontal plane of light-conducting board mold 10 on connecting seat 44.Meanwhile driving of the displacement sensor to voice coil motor 42 Distance is detected, and after increasing or declining corresponding height, the voice coil motor 42 controlled on corresponding position is stopped.
As shown in Figures 2 and 3, the Acetabula device includes electromagnetic generator 61 and the cover board 62 that can be magnetized, the company The upper surface of joint chair 44 is provided with groove 441, and the electromagnetic generator 61 is installed in groove 441,62 company of being covered on of the cover board On the upper surface of joint chair 44.After light-conducting board mold 10 is placed on cover board 62, it need to only be powered to electromagnetic generator 61, electricity Magnetic flux generator 61 generates magnetic field and magnetizes cover board 62, then light-conducting board mold 10 is attracted by the magnetic force and is fixed on cover board 62;Together Sample, it when needing to unload light-conducting board mold 10, then need to only be powered off to electromagnetic generator 61, then magnetic patch disappears, can be quick Ground unloads light guide plate, and it is simple, convenient and quick to install and uninstall.
The electromagnetic generator 61 includes coil 611 and iron core 612, and the iron core is set in groove 441, and coil 611 It is sheathed on iron core 612.Coil 611 can generate magnetic field when being powered, and cover board 62 is made to magnetize and be adsorbed onto light-conducting board mold 10 On cover board 62.It can enhance magnetic field intensity by being inserted into iron core 612 in coil 611, improve magnetic force size so that electromagnetism occurs Device 61 has the magnetic attraction of bigger.
In order to improve the magnetic field stability after cover board 62 is magnetized, the cover board 62 is including several magnetic stripes 621 and every magnetic stripe 622, it is equipped between two adjacent magnetic stripes 621 described every magnetic stripe 622, and the magnetic pole of two adjacent magnetic stripes 621 is opposite.
The locking device is set on the side in Z axis regulating device 4, and the locking device includes waling stripe 71 and two One end of a vertical connecting rod 72, the vertical connecting rod 72 is fixedly installed in mounting base 41, and the other end of vertical connecting rod 72 is provided with Slot hole 721 is provided with threaded hole on the side of the connecting seat 44, and the both ends of the waling stripe 71 are connected through a screw thread part and wear It crosses slot hole 721 and is threadedly coupled with threaded hole, when voice coil motor 42 is drivingly connected on seat 44 to corresponding position, twist screw thread company Fitting locks connecting seat 44.In voice coil motor 42 to the surface modulation of light-conducting board mold 10 to level when, by twisting screw thread Connector is fixed connecting seat 44 by vertical connecting rod 72 and mounting base 41, and connecting seat 44 is made to be fixed and be maintained at stable In height.
The X-axis regulating device 2 includes the linear guide 21, sliding block and driving device, and the linear guide 21 is fixedly mounted In on pedestal 1, the sliding block is slidably mounted in the linear guide 21, and the Z axis regulating device 4 is fixedly installed on sliding block, The power output end of the driving device connect with the sliding block and sliding block is driven to be slided in the linear guide 21.Driving device is driven Dynamic Z axis regulating device 4 moves in a straight line on guide rail, to make the light-conducting board mold being positioned in Z axis regulating device 4 10 in X Linear slide in axis direction.
The detection device 5 is magnetic-type probe unit, and the surface of the probe and light-conducting board mold 10 of detection device 5 connects It touches, the height of the different location on 10 surface of light-conducting board mold is measured by the data of the needle table of detection device 5, to measure The difference in height of two positions.
A kind of micro-structure hits an adjusting method for machining tool light-conducting board mold 10, includes the following steps:
1) light-conducting board mold 10 is placed on the surface of cover board 62, and be powered to coil generate magnetic force and by guide-lighting template die Tool 10 is adsorbed on cover board 62;
2) control X-axis regulating device 2 and Y-axis regulating device 3 link;Drive the probe of detection device 5 to light-conducting board mold 10 surrounding profile point carries out elevation carrection, and according to the height value of the profile point of the light-conducting board mold 10 measured, control is corresponding The driving light-conducting board mold 10 of voice coil motor 42 on position increases or declines;Meanwhile displacement sensor is to voice coil motor 42 Driving distance is detected, and when increasing or declining corresponding height, the voice coil motor 42 on respective profile point stops;
3) continue step 2) and recycle, until the difference in height between the surrounding profile point of light-conducting board mold 10 reaches setting Value.
The particular content of the step 2) is:The probe of detection device 5 carries out the surrounding profile of light-conducting board mold 10 high Degree measures, according to the height difference a between the two of the light-conducting board mold 10 measured adjacent profile points, the low wheel of control height Voice coil motor 42 on exterior feature point drives light guide plate to increase a/2, or the driving of voice coil motor 42 controlled in the high profile point of height is led Tabula rasa reduces a/2.
As shown in Figure 1 and Figure 4, light-conducting board mold 10 is rectangular, rectangular four Angle Positions choose four point A, B, C and D, the measurement of the probe through detection device 5, if A points are peak, on the basis of A points, in the adjusting between A and B, and B points Under voice coil motor 42 drive and raise the 1/2 of difference in height of the height of connecting seat 44 between A and B, while passing through dielectric displacement Sensor 43 measures the driving height of voice coil motor 42, after reaching height, then controls the voice coil motor 42 under B points It is stopped;
Likewise, in adjusting between B and C, the data of B and C points are first measured by the probe of detection device 5, if B Point is high point, then on the basis of B points, the voice coil motor 42 under C points drives and raises the height of connecting seat 44 between B and C The 1/2 of difference in height, while the driving height of voice coil motor 42 is measured by electric displacement sensor 43, reaching height Afterwards, then the voice coil motor 42 controlled under C points is stopped.And so on, in the adjusting between C and D, between adjusting C and D Height value, and in adjusting between D and A, adjust the height value between D and A, a cycle be achieved and adjusts.
Probe takes a round from A-B-C-D-A and measures the displacement difference of highs and lows in 4 points again, if meet 2 μm with It is interior, there is no need to carry out next cycle, if being unsatisfactory for requiring, needs to adjust again into next cycle, be wanted until meeting Until asking.
Furthermore it is also possible to using following adjusting method:
The measurement of probe through detection device 5, if A points are peak, on the basis of B points, the adjusting between A and B In, voice coil motor 42 under A points drives and reduces the 1/2 of difference in height of the height of connecting seat 44 between A and B, passes through simultaneously Electric displacement sensor 43 measures the driving height of voice coil motor 42, after reaching height, then controls the voice coil electricity under A points Machine 42 is stopped;
Likewise, in adjusting between B and C, the data of B and C points are first measured by the probe of detection device 5, if B Point is high point, then on the basis of C points, the voice coil motor 42 under B points drives and reduces the height of connecting seat 44 between B and C The 1/2 of difference in height, while the driving height of voice coil motor 42 is measured by electric displacement sensor 43, reaching height Afterwards, then the voice coil motor 42 controlled under B points is stopped.And so on, in the adjusting between C and D, between adjusting C and D Height value, and in adjusting between D and A, adjust the height value between D and A, a cycle be achieved and adjusts.
Probe takes a round from A-B-C-D-A and measures the displacement difference of highs and lows in 4 points again, if meeting at 2.5 μm Within, there is no need to carry out next cycle, if being unsatisfactory for requiring, need to adjust again into next cycle, until meeting Until it is required that.
After this method carries out height detection by detection device 5 to the surface of light-conducting board mold 10, by corresponding position On voice coil motor 42 controlled, make voice coil motor 42 that the connecting seat 44 being connect with the voice coil motor 42 be raised and lowered The apparent height set, and finally make to reach requirement on the horizontal plane of the light-conducting board mold being positioned on connecting seat 44 10.Meanwhile Displacement sensor is detected the driving distance of voice coil motor 42, after increasing or declining corresponding height, controls corresponding position On voice coil motor 42 be stopped, until the levelness on the surface of light-conducting board mold reaches requirement.This method automates Ground carries out leveling to light guide plate, can greatly ensure the precision of adjusting platform adjusting, has control and easy to adjust, quick and tune Save feature with high accuracy.
Above disclosed is only a kind of the utility model preferred embodiment, cannot limit this practicality with this certainly Novel interest field, therefore equivalent variations made according to the claim of the utility model still belong to what the utility model was covered Range.

Claims (8)

1. a kind of micro-structure hits the adjusting platform of a machining tool light-conducting board mold, which is characterized in that including pedestal and be installed on X-axis regulating device, Y-axis regulating device, Z axis regulating device on pedestal and detection device, the Y-axis regulating device are set to institute The top of Z axis regulating device is stated, the detection device is installed in the Y-axis regulating device and detects Z axis regulating device in Y-axis Levelness on direction;The Z axis regulating device is slidably mounted in the X-axis regulating device and moves in the X-axis direction, and visits Survey the levelness of device detection Z axis regulating device in the X-axis direction;Electromagnetic chuck device is installed in the Z axis regulating device, The upper surface of the electromagnetic chuck device is equipped with magnetic or can be by the light-conducting board mold of magnetic;In the Z axis regulating device Equipped with locking device, the Z axis regulating device adjusted to corresponding position is locked or is unclamped by locking device.
2. a kind of micro-structure according to claim 1 hits the adjusting platform of a machining tool light-conducting board mold, feature exists In the Z axis regulating device includes mounting base, voice coil motor, electric displacement sensor and connecting seat, and the mounting base is installed on institute On the tache motorice for stating X-axis regulating device, the voice coil motor and electricity are uniformly provided on the profile side of the upper surface of the mounting base Displacement sensor, the flexible axis connection of the bottom end of the connecting seat and the voice coil motor.
3. a kind of micro-structure according to claim 2 hits the adjusting platform of a machining tool light-conducting board mold, feature exists In the cover board that, the Acetabula device includes electromagnetic generator and can be magnetized, the upper surface of the connecting seat is provided with groove, described Electromagnetic generator is installed in groove, and the cover plate lid is together on the upper surface of connecting seat.
4. a kind of micro-structure according to claim 3 hits the adjusting platform of a machining tool light-conducting board mold, feature exists In the electromagnetic generator includes coil and iron core, and the iron core is set in groove, and coil is sheathed on iron core.
5. a kind of micro-structure according to claim 3 hits the adjusting platform of a machining tool light-conducting board mold, feature exists Include several magnetic stripes in, the cover board and is equipped with described every magnetic stripe, and two adjacent magnetic stripes between magnetic stripe, two adjacent magnetic stripes Magnetic pole it is opposite.
6. a kind of micro-structure according to claim 2 hits the adjusting platform of a machining tool light-conducting board mold, feature exists In being equipped with the locking device on the side in the Z axis regulating device, the locking device includes waling stripe and two One end of vertical connecting rod, the vertical connecting rod is fixedly installed in mounting base, and the other end of vertical connecting rod is provided with slot hole, the company Be provided with threaded hole on the side of joint chair, the both ends of the waling stripe be connected through a screw thread part across slot hole and with threaded hole spiral shell Line connects, and when voice coil motor is drivingly connected on seat to corresponding position, twists threaded connector and locks connecting seat.
7. a kind of micro-structure according to claim 1 hits the adjusting platform of a machining tool light-conducting board mold, feature exists In the X-axis regulating device includes the linear guide, sliding block and driving device, and the linear guide is fixedly installed on pedestal, institute It states sliding block to be slidably mounted in the linear guide, the Z axis regulating device is fixedly installed on sliding block, and the driving device is moved Power output end connect with the sliding block and sliding block is driven to be slided in the linear guide.
8. a kind of micro-structure according to claim 1 hits the adjusting platform of a machining tool light-conducting board mold, feature exists In the detection device is magnetic-type probe unit.
CN201721056505.5U 2017-08-22 2017-08-22 A kind of micro-structure hits the adjusting platform of a machining tool light-conducting board mold Active CN207643507U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107471504A (en) * 2017-08-22 2017-12-15 广东工业大学 A kind of micro-structural hits the regulation platform and its adjusting method of a machining tool light-conducting board mold
CN110026616A (en) * 2019-05-27 2019-07-19 吉林大学 A kind of efficient forming machine tool in micro structure array surface and manufacturing process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107471504A (en) * 2017-08-22 2017-12-15 广东工业大学 A kind of micro-structural hits the regulation platform and its adjusting method of a machining tool light-conducting board mold
CN110026616A (en) * 2019-05-27 2019-07-19 吉林大学 A kind of efficient forming machine tool in micro structure array surface and manufacturing process

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