CN113257989A - 约瑟夫森结的制备方法、装置、设备以及超导器件 - Google Patents

约瑟夫森结的制备方法、装置、设备以及超导器件 Download PDF

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Publication number
CN113257989A
CN113257989A CN202011187173.0A CN202011187173A CN113257989A CN 113257989 A CN113257989 A CN 113257989A CN 202011187173 A CN202011187173 A CN 202011187173A CN 113257989 A CN113257989 A CN 113257989A
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type
junction
josephson
josephson junction
pattern structure
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Chinese (zh)
Inventor
高然
秦金
邓纯青
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Alibaba Group Holding Ltd
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Alibaba Group Holding Ltd
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Priority to CN202011187173.0A priority Critical patent/CN113257989A/zh
Publication of CN113257989A publication Critical patent/CN113257989A/zh
Priority to EP21887219.0A priority patent/EP4238146A1/en
Priority to AU2021370481A priority patent/AU2021370481A1/en
Priority to US17/507,099 priority patent/US11917928B2/en
Priority to JP2023521560A priority patent/JP2023548757A/ja
Priority to PCT/US2021/055996 priority patent/WO2022093618A1/en
Priority to US18/419,990 priority patent/US20240188451A1/en
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/805—Constructional details for Josephson-effect devices

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
CN202011187173.0A 2020-10-29 2020-10-29 约瑟夫森结的制备方法、装置、设备以及超导器件 Withdrawn CN113257989A (zh)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN202011187173.0A CN113257989A (zh) 2020-10-29 2020-10-29 约瑟夫森结的制备方法、装置、设备以及超导器件
EP21887219.0A EP4238146A1 (en) 2020-10-29 2021-10-21 Method for preparing a josephson junction, apparatus, and device, and superconducting device
AU2021370481A AU2021370481A1 (en) 2020-10-29 2021-10-21 Method for preparing a josephson junction, apparatus, and device, and superconducting device
US17/507,099 US11917928B2 (en) 2020-10-29 2021-10-21 Method for preparing a Josephson junction, apparatus, and device, and superconducting device
JP2023521560A JP2023548757A (ja) 2020-10-29 2021-10-21 ジョセフソン接合を作製するための方法、装置、およびデバイス、ならびに超伝導デバイス
PCT/US2021/055996 WO2022093618A1 (en) 2020-10-29 2021-10-21 Method for preparing a josephson junction, apparatus, and device, and superconducting device
US18/419,990 US20240188451A1 (en) 2020-10-29 2024-01-23 Method for preparing a josephson junction, apparatus, and device, and superconducting device

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CN202011187173.0A CN113257989A (zh) 2020-10-29 2020-10-29 约瑟夫森结的制备方法、装置、设备以及超导器件

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CN113257989A true CN113257989A (zh) 2021-08-13

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US (2) US11917928B2 (https=)
EP (1) EP4238146A1 (https=)
JP (1) JP2023548757A (https=)
CN (1) CN113257989A (https=)
AU (1) AU2021370481A1 (https=)
WO (1) WO2022093618A1 (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022093618A1 (en) * 2020-10-29 2022-05-05 Alibaba Group Holding Limited Method for preparing a josephson junction, apparatus, and device, and superconducting device
WO2023060239A1 (en) * 2021-10-07 2023-04-13 Google Llc Hard mask liftoff processes
CN116156998A (zh) * 2022-09-27 2023-05-23 合肥本源量子计算科技有限责任公司 超导约瑟夫森结及其制备方法
CN116156999A (zh) * 2022-09-27 2023-05-23 合肥本源量子计算科技有限责任公司 约瑟夫森结及其制备方法
CN116682721A (zh) * 2023-06-19 2023-09-01 本源量子计算科技（合肥）股份有限公司 掩膜及其制造方法、约瑟夫森结的制造方法
EP4301119A4 (en) * 2022-03-29 2024-11-20 Tencent Technology (Shenzhen) Company Limited METHOD FOR PRODUCING A JOSEPHSON TRANSITION AND DEVICE FOR A PRODUCTION LINE

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US12527234B2 (en) 2021-06-04 2026-01-13 Anyon Systems Inc. Method for fabricating tunnel junctions
JP2024526085A (ja) 2021-06-11 2024-07-17 シーク， インコーポレイテッド 超伝導量子回路のための磁束バイアスのシステム及び方法
US12462184B2 (en) * 2021-12-21 2025-11-04 Intel Corporation Apparatus and method for efficient and scalable quantum instruction implementation for a high sensitivity silicon spin qubit readout
CN115410981A (zh) * 2022-08-03 2022-11-29 北京量子信息科学研究院 用于制备约瑟夫森结的样品台和制备约瑟夫森结的方法
FI20225827A1 (en) * 2022-09-23 2024-03-24 Iqm Finland Oy Superconducting vacuum-bridged josephson junctions
US20240169232A1 (en) * 2022-11-18 2024-05-23 International Business Machines Corporation Long-range coupling qubits in quantum computing with energy loss protection via multi-mode and fluxonium qubits
CN116227391B (zh) * 2023-02-22 2023-11-10 中国计量科学研究院 可容错的约瑟夫森结阵、动态三进制设计方法及设备
NL2038876B1 (en) * 2024-06-14 2026-01-12 Quantware Holding B V Josephson junction quantum mechanical device with increased critical current

Citations (8)

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US4370359A (en) * 1980-08-18 1983-01-25 Bell Telephone Laboratories, Incorporated Fabrication technique for junction devices
US20070158791A1 (en) * 2005-10-21 2007-07-12 The Chugoku Electric Power Co., Inc. Superconducting junction element and superconducting junction circuit
CN104701451A (zh) * 2015-03-20 2015-06-10 清华大学 一种原位三层膜边缘覆盖超导约瑟夫森结制备工艺
WO2017217959A1 (en) * 2016-06-13 2017-12-21 Intel Corporation Suspended josephson junctions
US20200168782A1 (en) * 2018-11-28 2020-05-28 International Business Machines Corporation Electrical leads for trenched qubits
CN111244259A (zh) * 2020-01-20 2020-06-05 中国科学院上海微系统与信息技术研究所 一种约瑟夫森结及超导量子干涉器件的制备方法
CN111554798A (zh) * 2020-04-30 2020-08-18 合肥本源量子计算科技有限责任公司 一种量子芯片测试结构、其制备方法和测试方法
CN111613661A (zh) * 2019-02-22 2020-09-01 中国科学院物理研究所 隧道结、其制备方法和应用

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Publication number Priority date Publication date Assignee Title
CN111403590A (zh) * 2020-04-30 2020-07-10 合肥本源量子计算科技有限责任公司 一种超导约瑟夫森结的制备方法
US11683995B2 (en) * 2020-08-03 2023-06-20 International Business Machines Corporation Lithography for fabricating Josephson junctions
CN113257989A (zh) * 2020-10-29 2021-08-13 阿里巴巴集团控股有限公司 约瑟夫森结的制备方法、装置、设备以及超导器件

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370359A (en) * 1980-08-18 1983-01-25 Bell Telephone Laboratories, Incorporated Fabrication technique for junction devices
US20070158791A1 (en) * 2005-10-21 2007-07-12 The Chugoku Electric Power Co., Inc. Superconducting junction element and superconducting junction circuit
CN104701451A (zh) * 2015-03-20 2015-06-10 清华大学 一种原位三层膜边缘覆盖超导约瑟夫森结制备工艺
WO2017217959A1 (en) * 2016-06-13 2017-12-21 Intel Corporation Suspended josephson junctions
US20200168782A1 (en) * 2018-11-28 2020-05-28 International Business Machines Corporation Electrical leads for trenched qubits
CN111613661A (zh) * 2019-02-22 2020-09-01 中国科学院物理研究所 隧道结、其制备方法和应用
CN111244259A (zh) * 2020-01-20 2020-06-05 中国科学院上海微系统与信息技术研究所 一种约瑟夫森结及超导量子干涉器件的制备方法
CN111554798A (zh) * 2020-04-30 2020-08-18 合肥本源量子计算科技有限责任公司 一种量子芯片测试结构、其制备方法和测试方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022093618A1 (en) * 2020-10-29 2022-05-05 Alibaba Group Holding Limited Method for preparing a josephson junction, apparatus, and device, and superconducting device
US11917928B2 (en) 2020-10-29 2024-02-27 Alibaba Group Holding Limited Method for preparing a Josephson junction, apparatus, and device, and superconducting device
WO2023060239A1 (en) * 2021-10-07 2023-04-13 Google Llc Hard mask liftoff processes
US12525461B2 (en) 2021-10-07 2026-01-13 Google Llc Hard mask liftoff processes
EP4301119A4 (en) * 2022-03-29 2024-11-20 Tencent Technology (Shenzhen) Company Limited METHOD FOR PRODUCING A JOSEPHSON TRANSITION AND DEVICE FOR A PRODUCTION LINE
US12550626B2 (en) 2022-03-29 2026-02-10 Tencent Technology (Shenzhen) Company Limited Method for preparing josephson junction and production line device
CN116156998A (zh) * 2022-09-27 2023-05-23 合肥本源量子计算科技有限责任公司 超导约瑟夫森结及其制备方法
CN116156999A (zh) * 2022-09-27 2023-05-23 合肥本源量子计算科技有限责任公司 约瑟夫森结及其制备方法
CN116156998B (zh) * 2022-09-27 2024-08-13 本源量子计算科技（合肥）股份有限公司 超导约瑟夫森结及其制备方法
CN116156999B (zh) * 2022-09-27 2024-11-15 本源量子计算科技（合肥）股份有限公司 约瑟夫森结及其制备方法
CN116682721A (zh) * 2023-06-19 2023-09-01 本源量子计算科技（合肥）股份有限公司 掩膜及其制造方法、约瑟夫森结的制造方法

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US20240188451A1 (en) 2024-06-06
EP4238146A1 (en) 2023-09-06
AU2021370481A9 (en) 2024-06-20
JP2023548757A (ja) 2023-11-21
US20220140223A1 (en) 2022-05-05
AU2021370481A1 (en) 2023-06-01
US11917928B2 (en) 2024-02-27
WO2022093618A1 (en) 2022-05-05

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Application publication date: 20210813