AU2021370481A1 - Method for preparing a josephson junction, apparatus, and device, and superconducting device - Google Patents

Method for preparing a josephson junction, apparatus, and device, and superconducting device Download PDF

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Publication number
AU2021370481A1
AU2021370481A1 AU2021370481A AU2021370481A AU2021370481A1 AU 2021370481 A1 AU2021370481 A1 AU 2021370481A1 AU 2021370481 A AU2021370481 A AU 2021370481A AU 2021370481 A AU2021370481 A AU 2021370481A AU 2021370481 A1 AU2021370481 A1 AU 2021370481A1
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Australia
Prior art keywords
josephson
pattern
junction
electrode layer
pattern structure
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AU2021370481A
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AU2021370481A9 (en
Inventor
Chunqing Deng
Ran GAO
Jin QIN
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Alibaba Group Holding Ltd
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Alibaba Group Holding Ltd
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Publication of AU2021370481A1 publication Critical patent/AU2021370481A1/en
Publication of AU2021370481A9 publication Critical patent/AU2021370481A9/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/805—Constructional details for Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
AU2021370481A 2020-10-29 2021-10-21 Method for preparing a josephson junction, apparatus, and device, and superconducting device Pending AU2021370481A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN202011187173.0 2020-10-29
CN202011187173.0A CN113257989A (zh) 2020-10-29 2020-10-29 约瑟夫森结的制备方法、装置、设备以及超导器件
PCT/US2021/055996 WO2022093618A1 (en) 2020-10-29 2021-10-21 Method for preparing a josephson junction, apparatus, and device, and superconducting device

Publications (2)

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AU2021370481A1 true AU2021370481A1 (en) 2023-06-01
AU2021370481A9 AU2021370481A9 (en) 2024-06-20

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AU2021370481A Pending AU2021370481A1 (en) 2020-10-29 2021-10-21 Method for preparing a josephson junction, apparatus, and device, and superconducting device

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US (2) US11917928B2 (https=)
EP (1) EP4238146A1 (https=)
JP (1) JP2023548757A (https=)
CN (1) CN113257989A (https=)
AU (1) AU2021370481A1 (https=)
WO (1) WO2022093618A1 (https=)

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CN113257989A (zh) 2020-10-29 2021-08-13 阿里巴巴集团控股有限公司 约瑟夫森结的制备方法、装置、设备以及超导器件
US12527234B2 (en) 2021-06-04 2026-01-13 Anyon Systems Inc. Method for fabricating tunnel junctions
JP2024526085A (ja) 2021-06-11 2024-07-17 シーク， インコーポレイテッド 超伝導量子回路のための磁束バイアスのシステム及び方法
CN118077031A (zh) 2021-10-07 2024-05-24 谷歌有限责任公司 硬掩模剥离工艺
US12462184B2 (en) * 2021-12-21 2025-11-04 Intel Corporation Apparatus and method for efficient and scalable quantum instruction implementation for a high sensitivity silicon spin qubit readout
CN116940217A (zh) 2022-03-29 2023-10-24 腾讯科技（深圳）有限公司 约瑟夫森结制备方法及生产线设备
CN116156999B (zh) * 2022-09-27 2024-11-15 本源量子计算科技（合肥）股份有限公司 约瑟夫森结及其制备方法
CN116156998B (zh) * 2022-09-27 2024-08-13 本源量子计算科技（合肥）股份有限公司 超导约瑟夫森结及其制备方法
CN115410981A (zh) * 2022-08-03 2022-11-29 北京量子信息科学研究院 用于制备约瑟夫森结的样品台和制备约瑟夫森结的方法
FI20225827A1 (en) * 2022-09-23 2024-03-24 Iqm Finland Oy Superconducting vacuum-bridged josephson junctions
US20240169232A1 (en) * 2022-11-18 2024-05-23 International Business Machines Corporation Long-range coupling qubits in quantum computing with energy loss protection via multi-mode and fluxonium qubits
CN116227391B (zh) * 2023-02-22 2023-11-10 中国计量科学研究院 可容错的约瑟夫森结阵、动态三进制设计方法及设备
CN116682721A (zh) * 2023-06-19 2023-09-01 本源量子计算科技（合肥）股份有限公司 掩膜及其制造方法、约瑟夫森结的制造方法
NL2038876B1 (en) * 2024-06-14 2026-01-12 Quantware Holding B V Josephson junction quantum mechanical device with increased critical current

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US4370359A (en) * 1980-08-18 1983-01-25 Bell Telephone Laboratories, Incorporated Fabrication technique for junction devices
JP5289673B2 (ja) * 2005-10-21 2013-09-11 中国電力株式会社 超電導接合素子および超電導接合回路
CN104701451B (zh) * 2015-03-20 2017-03-29 清华大学 一种原位三层膜边缘覆盖超导约瑟夫森结制备工艺
US20190288176A1 (en) * 2016-06-13 2019-09-19 Intel Corporation Suspended josephson junctions
US10916690B2 (en) * 2018-11-28 2021-02-09 International Business Machines Corporation Electrical leads for trenched qubits
CN111613661B (zh) * 2019-02-22 2024-03-26 中国科学院物理研究所 隧道结、其制备方法和应用
CN111244259B (zh) * 2020-01-20 2023-07-25 中国科学院上海微系统与信息技术研究所 一种约瑟夫森结及超导量子干涉器件的制备方法
CN111403590A (zh) * 2020-04-30 2020-07-10 合肥本源量子计算科技有限责任公司 一种超导约瑟夫森结的制备方法
CN111554798B (zh) * 2020-04-30 2021-06-08 合肥本源量子计算科技有限责任公司 一种量子芯片测试结构、其制备方法和测试方法
US11683995B2 (en) * 2020-08-03 2023-06-20 International Business Machines Corporation Lithography for fabricating Josephson junctions
CN113257989A (zh) * 2020-10-29 2021-08-13 阿里巴巴集团控股有限公司 约瑟夫森结的制备方法、装置、设备以及超导器件

Also Published As

Publication number Publication date
US20240188451A1 (en) 2024-06-06
EP4238146A1 (en) 2023-09-06
AU2021370481A9 (en) 2024-06-20
JP2023548757A (ja) 2023-11-21
US20220140223A1 (en) 2022-05-05
CN113257989A (zh) 2021-08-13
US11917928B2 (en) 2024-02-27
WO2022093618A1 (en) 2022-05-05

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