CN113249687A - Electric heating shower head structure in vacuum - Google Patents
Electric heating shower head structure in vacuum Download PDFInfo
- Publication number
- CN113249687A CN113249687A CN202110403470.2A CN202110403470A CN113249687A CN 113249687 A CN113249687 A CN 113249687A CN 202110403470 A CN202110403470 A CN 202110403470A CN 113249687 A CN113249687 A CN 113249687A
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- spraying
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- top plate
- spray
- vacuum
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
Abstract
The invention belongs to the technical field of vacuum coating equipment, and particularly provides a vacuum internal electric heating spray head structure which comprises a spray top plate, wherein a channel for medium circulation is arranged in the spray top plate; a spraying gas inlet is formed in the spraying top plate; a circle of sealing strips are arranged at the joint of the spraying top plate and the cavity shell; the spraying plate is connected with the spraying top plate and provided with a concave part, and a plurality of spraying through holes are formed in the spraying plate. The heating ring is arranged at the joint of the spray plate and the spray top plate in an embedded mode; and the heat resistance ring is arranged between the heating ring and the spray top plate and is connected with the spray top plate. The high-temperature heating of the spray plate in the vacuum cavity can be realized, the temperature of the spray plate can reach 300 ℃ after the thermal resistance is adjusted through structural optimization, the heat loss to the outside through the spray top plate is reduced, and the temperature fluctuation is guaranteed to be less than or equal to +/-5 ℃. And meanwhile, the temperature of the space on the external atmosphere side is ensured to meet the production specification.
Description
Technical Field
The invention belongs to the technical field of vacuum coating equipment, and particularly provides a vacuum inner electric heating spray head structure.
Background
In the vacuum coating equipment, the temperature process requirement of relevant coating deposition needs to be met in a vacuum cavity, in the prior art, the temperature in the vacuum cavity reaches an internal temperature process in an external heat conduction mode, namely, an atmospheric-end heat source indirectly transfers heat to a spraying plate through a top plate, the temperature is not recommended to be 250 ℃ higher than the temperature, otherwise, a sealing ring of the top plate and a container is aged quickly and cannot be used to realize the sealing effect, and the vacuum degree in the vacuum cavity is influenced. But the temperature is low, and the temperature process in the vacuum cavity cannot be met, so that the coating deposition effect is influenced. In addition, the spraying top plate is not beneficial to safety production when the temperature is too high, and accidents are easy to occur.
Disclosure of Invention
In view of the above problems, the present invention provides a vacuum internal electric heating shower head structure, which is disposed on a coating apparatus having a vacuum chamber, comprising,
the spraying top plate is positioned in the atmosphere side and is internally provided with a channel for medium circulation; a spraying gas inlet is formed in the spraying top plate;
the spraying plate is positioned on the vacuum side, is connected with the spraying top plate and is provided with a concave part, a plurality of spraying through holes are arranged on the concave part, and the concave part covers a spraying gas inlet to form a spraying cavity;
the heating ring is arranged at the joint of the spray plate and the spray top plate in a manner of being embedded in the spray plate or being arranged on the upper end surface of the spray plate;
and the heat resistance ring is arranged between the heating ring and the spraying top plate and is connected with the spraying top plate.
Further: the spraying plate is provided with an annular groove, and the heating ring is embedded into the groove, and the upper end face of the heating ring is in contact connection with the heat insulation ring.
Further: the heat radiation baffle plate is arranged between the heating ring and the heat resistance ring.
Further: and sealing rings are arranged at the contact part of the heat resisting ring and the spraying plate and at the contact part of the spraying top plate and the spraying plate.
Further: the heating ring heats the spraying top plate by being externally connected with a power supply device.
Further: the heating ring and the heat resistance ring are made of nickel-based alloy materials.
Further: still be equipped with a spoiler in the spraying chamber, be equipped with a plurality of choked flow through-holes on this spoiler, spray that gaseous entering direction is for passing through gas inlet, spoiler and spraying the board in order.
Further: the diameter of the heat blocking air holes on the flow blocking plate is smaller than that of the air holes of the spraying plate.
The invention has the advantages that: the high-temperature heating of the spray plate in the vacuum cavity can be realized, the temperature of the spray plate can reach 300 ℃ after the thermal resistance is adjusted through structural optimization, the heat loss to the outside through the spray top plate is reduced, and the temperature fluctuation is guaranteed to be less than or equal to +/-5 ℃. And meanwhile, the temperature of the space on the external atmosphere side is ensured to meet the production specification.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another embodiment of the present invention:
wherein, the spray top plate-1, the spray gas inlet-2, the sealing strip-3, the spray plate-4, the spray chamber-5, the heating ring-6, the heat-resistant ring-7, the heat radiation baffle-8, the sealing ring-9, the spoiler-10 and the heat-resistant ring screw-11.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1, the present invention provides a specific embodiment of a vacuum internal electrical heating showerhead structure: the spray head structure is arranged on a coating device with a vacuum cavity and comprises,
the spray top plate 1 is positioned on the atmosphere side, a channel for medium circulation is arranged in the spray top plate 1, a cooling medium is arranged in the channel, the temperature of the medium is 30-75 ℃, and the spray top plate is connected with a circulating refrigerating unit; a spraying gas inlet 2 is arranged on the spraying top plate 1; a circle of sealing strips 3 are arranged at the joint of the spray top plate 1 and the cavity shell;
the spraying plate 4 is positioned on the vacuum side, is connected with the spraying top plate 1 and is provided with a concave part, a plurality of spraying through holes are formed in the concave part, and the concave part covers the spraying gas inlet 2 to form a spraying cavity 5;
and the heating ring 6 is arranged at the joint of the spray plate 4 and the spray top plate 1 in a manner of being embedded in the spray plate 4. The upper end face of the spray plate 4 is provided with an annular groove at the contact part with the spray top plate 1, the heating ring 6 is embedded into the groove, and the upper end face is in contact connection with the heat insulation ring.
There is another arrangement for the heating ring to be disposed on the upper end surface of the shower plate, as shown with reference to figure 2,
the heat resistance ring 7 is arranged between the heating ring 6 and the spray top plate 1, the heating ring 6 is fixed on the spray top plate 1 through heat resistance screws, and the heat transfer of the heating ring 6 to the spray top plate 1 is blocked.
As the improvement of the scheme, the spraying device also comprises a heat radiation clapboard 8, at least 1 layer of metal heat radiation clapboard 8 is arranged on the periphery of at least 1 surface of the heating ring 6, the heat radiation loss of the heating ring 6 and the low-temperature surface is reduced, and the spraying device is used for preventing the heat from being transferred to the spraying top plate 1.
As an improvement of the scheme, a sealing ring 9 is arranged at the contact part of the heat resistant ring 7 and the spray plate 4 and the contact part of the spray top plate 1 and the spray plate 4.
As a scheme improvement, the heating ring 6 is heated by externally connecting a power supply device to the spray top plate 1. The power supply end is provided with (+)/(-) two connecting terminals connected with AC or DC.
As an improvement of the scheme, the heating ring 6 and the heat resistance ring 7 are made of nickel-based alloy materials (Inconel718, Hastel loy C276 and the like), and the high-temperature heat deformation is small and the strength is high.
As an improvement of the scheme, a spoiler 10 is further arranged in the spraying cavity 5 and fixed on the spraying top plate 1 through screws, a plurality of spoiler through holes are formed in the body of the spoiler 10, and the thermal resistance holes in the spoiler 10 are smaller than the vent holes of the spraying plate 4. The spray gas passes through the gas inlet, the spoiler 10 and the spray plate 4 in sequence. The function is to make the gas entering the small holes of the spray header uniformly distributed.
The vacuum internal heating is adopted, if the reasonable design temperature of the structure without process limitation can reach 600 ℃, the top plate has the effect of a constant-temperature circulating cooling medium, on one hand, the temperature of the sealing ring 9 is protected from exceeding 100 ℃, and the service life of the sealing ring 9 is greatly prolonged; on the other hand, the ambient temperature of the atmospheric side of the top plate is not too high, so that accidents are not caused.
Through the two embodiments, the heating ring 6 is arranged at the joint of the spray plate 4 and the spray top plate 1, but the position arrangement mode is different. As shown in fig. 1, one way is to embed the spray plate 4 in a groove on the upper end surface; another embodiment is provided above the upper end face of the shower plate 4, both of which can achieve a reduction in heat loss to the outside through the shower top plate. However, experiments show that the thermal resistance is higher and the thermal efficiency is better than the structural design of arranging the heating ring 6 on the upper end face of the spray plate 4 due to the position structural design of the heating ring 6 shown in the figure 1. The design is not only designed from the heat resistance angle, but also designed through different structures, and different heat resistance effects can be achieved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. The utility model provides an electrical heating shower head structure in vacuum, sets up on the filming equipment that has vacuum cavity, its characterized in that: comprises the steps of (a) preparing a mixture of a plurality of raw materials,
the spraying top plate is positioned in the atmosphere side and is internally provided with a channel for medium circulation; a spraying gas inlet is formed in the spraying top plate;
the spraying plate is positioned on the vacuum side, is connected with the spraying top plate and is provided with a concave part, a plurality of spraying through holes are arranged on the concave part, and the concave part covers a spraying gas inlet to form a spraying cavity;
the heating ring is arranged at the joint of the spray plate and the spray top plate in a manner of being embedded in the spray plate or being arranged on the upper end surface of the spray plate;
and the heat resistance ring is arranged between the heating ring and the spraying top plate and is connected with the spraying top plate.
2. The in-vacuum electrically heated showerhead structure of claim 1, wherein: an annular groove is formed in the spraying plate, and the heating ring is embedded into the groove, and the upper end face of the heating ring is in contact connection with the heat insulation ring.
3. The in-vacuum electrically heated showerhead structure of claim 1, wherein: the heat radiation baffle plate is arranged between the heating ring and the heat resistance ring.
4. The in-vacuum electrically heated showerhead structure of claim 1, wherein: and sealing rings are arranged at the contact part of the heat resisting ring and the spraying plate and at the contact part of the spraying top plate and the spraying plate.
5. The in-vacuum electrically heated showerhead structure of claim 1, wherein: the heating ring heats the spraying top plate by being externally connected with a power supply device.
6. The in-vacuum electrically heated showerhead structure of claim 1, wherein: the heating ring and the heat resistance ring are made of nickel-based alloy materials.
7. The in-vacuum electrically heated showerhead structure of claim 1, wherein: still be equipped with a spoiler in the spraying chamber, be equipped with a plurality of choked flow through-holes on this spoiler, spray that gaseous entering direction is for passing through gas inlet, spoiler and spraying the board in order.
8. The in-vacuum electrically heated showerhead structure of claim 7, wherein: the diameter of the heat blocking air holes on the flow blocking plate is smaller than that of the air holes of the spraying plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110403470.2A CN113249687B (en) | 2021-04-14 | 2021-04-14 | Electric heating shower head structure in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110403470.2A CN113249687B (en) | 2021-04-14 | 2021-04-14 | Electric heating shower head structure in vacuum |
Publications (2)
| Publication Number | Publication Date |
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| CN113249687A true CN113249687A (en) | 2021-08-13 |
| CN113249687B CN113249687B (en) | 2022-09-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110403470.2A Active CN113249687B (en) | 2021-04-14 | 2021-04-14 | Electric heating shower head structure in vacuum |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114165611A (en) * | 2021-12-14 | 2022-03-11 | 拓荆科技股份有限公司 | Gate valve, gate valve opening and closing method and semiconductor equipment |
| CN114300335A (en) * | 2021-12-22 | 2022-04-08 | 拓荆科技股份有限公司 | Wafer processing device |
| CN115058702A (en) * | 2022-07-27 | 2022-09-16 | 拓荆科技(上海)有限公司 | Spray header and vacuum treatment equipment |
| CN116288273A (en) * | 2023-03-10 | 2023-06-23 | 拓荆科技(上海)有限公司 | Showerhead, method of heating gas, and apparatus and method for processing semiconductor device |
Citations (8)
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| CN1220772A (en) * | 1997-03-17 | 1999-06-23 | 松下电器产业株式会社 | Plasma processing method and apparatus |
| EP1174527A1 (en) * | 2000-07-22 | 2002-01-23 | IPS Ltd | Atomic layer deposition (ALD) film deposition equipment and cleaning method |
| JP3149701U (en) * | 2009-01-27 | 2009-04-09 | 日本エー・エス・エム株式会社 | Shower head for semiconductor processing equipment |
| CN202322985U (en) * | 2011-11-24 | 2012-07-11 | 甘国工 | Equipment for depositing conducting film or semiconductor material on substrate |
| CN104278254A (en) * | 2013-07-03 | 2015-01-14 | 诺发系统公司 | Multi-plenum, dual-temperature showerhead |
| CN205974648U (en) * | 2016-07-22 | 2017-02-22 | 鄂尔多斯市源盛光电有限责任公司 | Jet nozzle |
| CN106609360A (en) * | 2015-10-27 | 2017-05-03 | 沈阳拓荆科技有限公司 | Spraying structure capable of heating dopant gases |
| CN212948956U (en) * | 2020-08-13 | 2021-04-13 | 台州市黄岩热通精密仪器科技有限公司 | Hot nozzle of hot runner |
-
2021
- 2021-04-14 CN CN202110403470.2A patent/CN113249687B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1220772A (en) * | 1997-03-17 | 1999-06-23 | 松下电器产业株式会社 | Plasma processing method and apparatus |
| EP1174527A1 (en) * | 2000-07-22 | 2002-01-23 | IPS Ltd | Atomic layer deposition (ALD) film deposition equipment and cleaning method |
| JP3149701U (en) * | 2009-01-27 | 2009-04-09 | 日本エー・エス・エム株式会社 | Shower head for semiconductor processing equipment |
| CN202322985U (en) * | 2011-11-24 | 2012-07-11 | 甘国工 | Equipment for depositing conducting film or semiconductor material on substrate |
| CN104278254A (en) * | 2013-07-03 | 2015-01-14 | 诺发系统公司 | Multi-plenum, dual-temperature showerhead |
| CN106609360A (en) * | 2015-10-27 | 2017-05-03 | 沈阳拓荆科技有限公司 | Spraying structure capable of heating dopant gases |
| CN205974648U (en) * | 2016-07-22 | 2017-02-22 | 鄂尔多斯市源盛光电有限责任公司 | Jet nozzle |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114165611A (en) * | 2021-12-14 | 2022-03-11 | 拓荆科技股份有限公司 | Gate valve, gate valve opening and closing method and semiconductor equipment |
| CN114300335A (en) * | 2021-12-22 | 2022-04-08 | 拓荆科技股份有限公司 | Wafer processing device |
| CN114300335B (en) * | 2021-12-22 | 2024-01-19 | 拓荆科技股份有限公司 | Wafer processing apparatus |
| CN115058702A (en) * | 2022-07-27 | 2022-09-16 | 拓荆科技(上海)有限公司 | Spray header and vacuum treatment equipment |
| CN116288273A (en) * | 2023-03-10 | 2023-06-23 | 拓荆科技(上海)有限公司 | Showerhead, method of heating gas, and apparatus and method for processing semiconductor device |
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| Publication number | Publication date |
|---|---|
| CN113249687B (en) | 2022-09-20 |
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