CN205974648U - Jet nozzle - Google Patents
Jet nozzle Download PDFInfo
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- CN205974648U CN205974648U CN201620778583.5U CN201620778583U CN205974648U CN 205974648 U CN205974648 U CN 205974648U CN 201620778583 U CN201620778583 U CN 201620778583U CN 205974648 U CN205974648 U CN 205974648U
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- Prior art keywords
- jet member
- temperature
- nozzle
- temperature maintaining
- jet
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Abstract
The utility model discloses a jet nozzle, this jet nozzle maintains the part including spraying piece and temperature, the part setting is maintain in the outside or the inboard of spraying the piece to the temperature, the temperature is maintain the part and is used for reflecting back the injection piece with the heat that sprays a spurious radiation, the temperature at the injection position of piece is sprayed with the improvement, perhaps will spray a heat conduction of bottom to the injection position that sprays the piece through heat conducting mode, the temperature at the injection position of piece is sprayed with the improvement, thereby it pastes at the injection position that sprays the piece to have avoided spraying the thing cooling, be the shower nozzle position and cause and block up and descend because of spraying a linear evaporation source utilization ratio that the blockage caused, thereby jet nozzle's work efficiency and the preparation efficiency of utilizing this jet nozzle preparation product have been improved, be heated evenly owing to jet nozzle simultaneously, consequently the homogeneity of evaporating coating film thickness that has improved that the coating by vaporization forms, thereby the performance of device has been guaranteed.
Description
Technical field
The utility model is related to organic electroluminescence device preparation field, is more particularly to a kind of nozzle.
Background technology
Organic electroluminescence shows that (Organic Light-Emitting Diode, OLED) device is spontaneous due to being provided simultaneously with
Light, be not required to backlight, contrast height, thickness of thin, visual angle is wide, reaction speed is fast, can be used for flexibility panel, use temperature range
Extensively, construction and the excellent characteristic such as manufacturing process is simpler are it is considered to be the emerging application technology of follow-on flat-panel screens.
In manufacturing process, organic material is heated OLED by linear evaporation source, and material molecule is logical after being heated
After crossing inner panel (Inner plate) homogenization, it is deposited with low temperature polycrystalline silicon through the nozzle (Nozzle) of linear evaporation source
(LTPS) on substrate.In conventional art, the temperature homogeneity of the crucible heating due to linear evaporation source is bad, crucible top temperature
Higher than bottom temp, and the bottom position of the heater strip of crucible top heated nozzle in heating process, the heating of crucible bottom
The tip position of silk heated nozzle in heating process, nipple top near coldplate, so leads to the temperature of nipple top again
Relatively low, Figure 1A, Figure 1B are respectively the side view of nozzle and the top view of linear evaporation source.Temperature is too low to lead to material to pass through
During nipple top, generating material is pasted onto the phenomenon in nozzle inner walls, and time length may result in spray nozzle clogging.At present due to nozzle
Block the frequency of linear evaporation source fault causing 10%～15% about.Crucible internal pressure is led to occur after spray nozzle clogging
Change, the organic material film caliper uniformity that evaporation is formed is deteriorated, and affects device performance.
In addition, current linear evaporation source is 10 organic vapor deposition chambers, totally 19 linear crucibles, above each crucible at least
There are 9 nozzles, and be that all chambers are deposited with together under the Inline state that works online, if any a spray on a crucible
Mouth blocks, and solves to need to stop the nozzle in other chambers during nozzle blockage (Nozzle Clogging) problem simultaneously, its
Under the utilization rate of nozzle is serious in his chamber, cause the waste of resource.And processing spray nozzle clogging needs cooling to begin to speak to post-process
Heat up again and be evacuated, at present 12 hours are at least needed for the process of this problem, had a strong impact on operating efficiency and product
Make efficiency.
Utility model content
The technical problems to be solved in the utility model is how to improve the temperature at evaporation spray-nozzle type sprinkler head position.
In order to solve above-mentioned technical problem, the utility model provides a kind of nozzle, described nozzle include jet member and
Temperature maintaining member, described temperature maintaining member is arranged on outside or the inner side of described jet member, and described temperature maintaining member is used
In described jet member is reflected back described jet member to extraradial heat, to improve the temperature of the ejection electrodes of described jet member
Degree, or the heat of jet member bottom is transmitted to the ejection electrodes of described jet member by way of heat transfer, to improve
State the temperature of the ejection electrodes of jet member.
Preferably, described temperature maintaining member is arranged on the outside of described jet member, does not contact with described jet member, and
Described temperature maintaining member is tubular structure.
Preferably, described temperature maintaining member is coaxial with described jet member.
Preferably, described temperature maintaining member is contour with described jet member.
Preferably, described temperature maintaining member includes the different tubular structure of multiple external diameters.
Preferably, the thickness of each described tubular structure of described temperature maintaining member is 0.1～1mm.
Preferably, described jet member is stainless steel jet member.
Preferably, described jet member is tubular structure, and the inwall of described jet member is provided with heat conducting film.
Preferably, described jet member is copper jet member.
Preferably, temperature maintaining member is stainless steel temperature maintaining member.
Preferably, described jet member is tubular structure, and described temperature maintaining member is to be arranged on the inwall of described jet member
Metallic film.
Preferably, the inwall of described jet member is provided with Copper thin film.
Preferably, the thickness of described Copper thin film is 0.5～5mm.
The utility model provides a kind of nozzle, and this nozzle includes jet member and temperature maintaining member, temperature maintaining member
It is arranged on outside or the inner side of jet member, temperature maintaining member is used for for jet member being reflected back jet member to extraradial heat,
To improve the temperature of the ejection electrodes of jet member, or by way of heat transfer, the heat of jet member bottom is transmitted to injection
The ejection electrodes of part, to improve the temperature of the ejection electrodes of jet member, thus avoid ejecta cooling to be pasted onto jet member
Ejection electrodes (i.e. nozzle position) and result in blockage and because of jet member (or nozzle), block under the linear evaporation source utilization rate causing
Fall, from the make efficiency that improve operating efficiency and product, simultaneously because being heated evenly of nozzle, therefore improves evaporation and is formed
Evaporation film thickness homogeneity, thus ensure that the performance of device.
Brief description
In order to be illustrated more clearly that the utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or in description of the prior art the accompanying drawing of required use be briefly described it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, in the premise not paying creative work
Under, other accompanying drawings can also be obtained according to these accompanying drawings.
Figure 1A is the side view of linear evaporation source nozzle in prior art；
Figure 1B is the top view of linear evaporation source nozzle in prior art；
Fig. 2 is the side view of the nozzle of embodiment one of the present utility model；
Fig. 3 is the side view of the nozzle of embodiment three of the present utility model；
Fig. 4 is the top view of the nozzle of example IV of the present utility model.
Specific embodiment
With reference to the accompanying drawings and examples the utility model is described in further detail.Following examples are used for illustrating this
Utility model, but can not be used for limiting scope of the present utility model.
A kind of nozzle, described nozzle includes jet member and temperature maintaining member, and described temperature maintaining member is arranged on institute
State outside or the inner side of jet member, described temperature maintaining member is described for being reflected back described jet member to extraradial heat
Jet member, to improve the temperature of the ejection electrodes of described jet member, or by the heat of jet member bottom by way of heat transfer
Amount is transmitted to the ejection electrodes of described jet member, to improve the temperature of the ejection electrodes of described jet member, thus avoiding injection
Thing cooling is pasted onto the ejection electrodes (i.e. nozzle position) of jet member and results in blockage and cause because jet member (or nozzle) blocks
Linear evaporation source utilization rate decline, thus improve operating efficiency and the make efficiency of product, simultaneously because nozzle is heated all
Even, improve the homogeneity of the evaporation film thickness that evaporation is formed, thus ensure that the performance of device.
Further, temperature maintaining member is arranged on the outside of described jet member, does not contact with described jet member, and institute
Stating temperature maintaining member is tubular structure, and the nozzle of this kind of structure can be using temperature maintaining member by outside for described jet member spoke
The heat penetrated is reflected back described jet member, to improve the temperature of the ejection electrodes of described jet member.In addition, described jet member is set
It is calculated as tubular structure.The structure of tubular makes jet member homogeneous to the pressure of its internal material, so that the material ejecting
All more uniform, thus further increasing the thickness heating homogeneity of the evaporation film of formation.
Further, for ensure temperature maintaining member be reflected back jet member heat more uniform, by described temperature maintain
Part design is coaxial with described jet member, thus realizing the uniform temperature improving jet member ejection electrodes.For carrying further
High-temperature maintaining member is reflected back the even heat of jet member, by described reflecting element and the high settings such as described jet member.For example
Temperature maintaining member and jet member can be set to contour, coaxial cylinder-like structure.Preferably, described temperature maintaining member is
Stainless steel temperature maintaining member.
In order to further improve the temperature of jet member ejection electrodes, it is to avoid ejecta is pasted, by described temperature maintenance portion
Part is designed as the tubular structure different and coaxial including multiple external diameters.Preferably, the thickness of each described tubular structure is permissible
For 0.1～1mm.The different multiple tubular structures of external diameter can will transmit through the heat energy of the tubular structure of internal layer by outer layer tubular structure
It is reflected back jet member, thus reaching the purpose improving the temperature of jet member ejection electrodes further.
Further, described jet member is stainless steel jet member, in order to improve the thermal uniformity of jet member, in jet member
Inwall is provided with the heat conducting film of good heat conductivity, such as metallic film it is preferable that the inwall of jet member is provided with Copper thin film, from
And effectively improve the thermal uniformity of temperature within jet member and jet member different parts.The thickness of wherein said Copper thin film can
Think 0.5～5mm.
In addition, described jet member can be copper jet member, further increasing the thermal conductivity of jet member, thus realize by
The heat of jet member bottom is transmitted to the ejection section of jet member well, reaches the purpose improving jet member ejection electrodes temperature.
Further, described temperature maintaining member is the metallic film of the inwall being arranged on described jet member, wherein sprays
For tubular structure it is preferable that the inwall in described jet member arranges Copper thin film, the good heat by using metallic film passes part
The heat of the property led just jet member bottom is transmitted to the ejection section of jet member well, improves jet member ejection electrodes temperature.
Below by several specific embodiments, said nozzle is described in detail.
Embodiment one：
As shown in Fig. 2 the nozzle of the present embodiment includes jet member 1 and is arranged on the temperature maintenance outside described jet member
Part 2, described jet member 1 is reflected back described jet member 1 to extraradial heat by described temperature maintaining member 2, thus improving
The temperature of the ejection electrodes of described jet member 1.
In the present embodiment, jet member adopts heat conductivility more preferable Cu material, for cylindrical shape.As shown in Fig. 2 temperature maintains
Part is multiple coaxial, contour, cylindrical shape that diameter is different, and coaxially contour with jet member.Temperature maintaining member is not using
Rust steel SUS material, thickness is 0.5mm.The effect of temperature maintaining member is to transfer heat to Cu jet member, temperature maintaining member
It is set to that multiple coaxial, radiuses are different and non-touching cylindric setting, its effect is significantly more efficient will to spray
The heat of part radiation and the heat radiateing through reflecting element are reflected back jet member again, carry such that it is able to significantly more efficient
High jet member ejection electrodes (improving Cu jet member top) and the temperature of whole jet member, head temperature sprays material after raising
Material is not easy to be pasted onto on jet member inwall, will not cause spray nozzle clogging.In addition, the diameter of the jet member of Cu material can be existing
There are the equal diameters of the half of the diameter of nozzle in technology, the diameter of the reflecting element of outermost and nozzle of the prior art,
So that the equal diameters of the diameter of nozzle in the present embodiment and nozzle in prior art.
The heat that jet member 1 radiates is reflected back spray using temperature maintaining member 2 by nozzle in the present embodiment again
Penetrate part 1, such that it is able to improve the temperature of jet member ejection electrodes, it is to avoid because the cooling of jet member ejection electrodes temperature causes soon
Ejecta cooling be pasted onto the ejection electrodes of jet member, result in blockage and problem that linear evaporation source utilization rate declines.Simultaneously
Using temperature maintaining member 2, the heat radiating of jet member 1 is reflected back the utilization rate that jet member can improve heat, section
Save the resource being consumed by the temperature keeping or improving reflecting element.
Embodiment two：
The present embodiment is with the difference of embodiment one, and the material of the jet member of the present embodiment is stainless steel SUS.Compared to
The thermal conductivity of the jet member of embodiment one the present embodiment is not good, but different due to being provided with multiple coaxial, contour, diameters
The temperature maintaining member of tubular, the heat that equally can effectively jet member be radiated and pass through internal layer temperature maintaining member spoke
The heat being shot out is reflected back jet member again, such that it is able to effective jet member ejection electrodes and the whole jet member of improving
Temperature, so that make material be not easy to be pasted onto on the jet member inwall of cooling, it is to avoid cause spray nozzle clogging.
Embodiment three：
In order to improve the thermal conductivity of jet member on the basis of embodiment two, the present embodiment plates on the inwall of jet member 1
One layer of copper film 3, as heat conducting film, as shown in figure 3, the thickness of wherein film is 2mm, by the good thermal conductivity of copper,
The heat of the part below jet member top effectively can be transmitted to the injection top of jet member, such that it is able to further
Improve the temperature at jet member top, so that blasting materials are not easy to be pasted onto causes spray nozzle clogging on jet member inwall.
Example IV：
The temperature maintaining member of the nozzle of the present embodiment is the metallic film 4 of the inwall being arranged on described jet member, such as Fig. 4
Shown, and this metallic film 4 select price low heat conductivity can good Copper thin film, the thickness of wherein Copper thin film is set to 0.5～
Between 5mm, for example, it is possible to be 2mm, individually the inwall in jet member arranges the Copper thin film of good heat conductivity, equally can realize
The heat of jet member bottom is transmitted to the ejection electrodes of jet member, reaches the purpose improving jet member ejection electrodes temperature, from
And so that blasting materials is not easy to be pasted onto and causes spray nozzle clogging on jet member inwall.
Nozzle of the present utility model improves the temperature of jet member ejection electrodes by design temperature maintaining member, and temperature is tieed up
The effect holding part is to transmit heat, the heat enabling jet member to be transmitted by temperature maintaining member to jet member, to ensure
The even heat that jet member is subject to.Because heater strip heats for nozzle, the heat that each position is subject to is discrepant, because
This to improve the thermal conductivity of jet member preferably by the jet member of copper jet member or inner wall copper plating, reaches raising jet member heat
Uniformity, the purpose of raising jet member head temperature.In addition can realize spraying using the method for multi-turn temperature maintaining member
The raising of part head temperature, it is to avoid because jet member is heated the spray nozzle clogging that leads to of inequality, waste of material and ultimately resulting in
The problem of evaporation membrane thickness unevenness, the utility model can effectively improve the temperature of jet member inwall, prevent spray nozzle clogging, carry
High volume production production capacity is it is ensured that device performance.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation are made a distinction with another entity or operation, and not necessarily require or imply these entities or deposit between operating
In any this actual relation or order.And, term " inclusion ", "comprising" or its any other variant are intended to
Comprising of nonexcludability, wants so that including a series of process of key elements, method, article or equipment and not only including those
Element, but also include other key elements being not expressly set out, or also include for this process, method, article or equipment
Intrinsic key element.In the absence of more restrictions, the key element that limited by sentence "including a ..." it is not excluded that
Also there is other identical element including in the process of described key element, method, article or equipment.Term " on ", D score etc. refers to
The orientation showing or position relationship are based on orientation shown in the drawings or position relationship, are for only for ease of the description present invention and simplification
Description, rather than indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and behaviour
Make, be therefore not considered as limiting the invention.Unless otherwise clearly defined and limited, term " installation ", " being connected ",
" connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or is integrally connected；Can be
It is mechanically connected or electrically connect；Can be to be joined directly together it is also possible to be indirectly connected to by intermediary, can be two
The connection of element internal.For the ordinary skill in the art, above-mentioned term can be understood as the case may be at this
Concrete meaning in invention.
In the specification of the present invention, illustrate a large amount of details.Although it is understood that, embodiments of the invention can
To put into practice in the case of there is no these details.In some instances, known method, structure and skill are not been shown in detail
Art, so as not to obscure the understanding of this description.Similarly it will be appreciated that disclosing and help understand respectively to simplify the present invention
One or more of individual inventive aspect, in the description to the exemplary embodiment of the present invention above, each of the present invention is special
Levy and be sometimes grouped together in single embodiment, figure or descriptions thereof.However, should not be by the method solution of the disclosure
Release be intended to following in reflection：I.e. the present invention for required protection requires than the feature being expressly recited in each claim more
Many features.More precisely, as the following claims reflect, inventive aspect is less than single reality disclosed above
Apply all features of example.Therefore, it then follows claims of specific embodiment are thus expressly incorporated in this specific embodiment,
Wherein each claim itself is as the separate embodiments of the present invention.It should be noted that in the case of not conflicting, this
Embodiment in application and the feature in embodiment can be mutually combined.The invention is not limited in any single aspect,
It is not limited to any single embodiment, be also not limited to any combination and/or the displacement of these aspects and/or embodiment.And
And, can be used alone each aspect of the present invention and/or embodiment or with other aspects one or more and/or its enforcement
Example is used in combination.
Finally it should be noted that：Various embodiments above only in order to technical scheme to be described, is not intended to limit；To the greatest extent
Pipe has been described in detail to the present invention with reference to foregoing embodiments, it will be understood by those within the art that：Its according to
So the technical scheme described in foregoing embodiments can be modified, or wherein some or all of technical characteristic is entered
Row equivalent；And these modifications or replacement, do not make the essence of appropriate technical solution depart from various embodiments of the present invention technology
The scope of scheme, it all should be covered in the middle of the claim of the present invention and the scope of specification.
Claims (13)
1. a kind of nozzle is it is characterised in that described nozzle includes jet member and temperature maintaining member；
Described temperature maintaining member is arranged on outside or the inner side of described jet member；
Described temperature maintaining member is used for for described jet member being reflected back described jet member to extraradial heat, described to improve
The temperature of the ejection electrodes of jet member；Or,
Described temperature maintaining member is used for, by way of heat transfer, the heat of jet member bottom is transmitted to described jet member
Ejection electrodes, to improve the temperature of the ejection electrodes of described jet member.
2. nozzle according to claim 1 is it is characterised in that described temperature maintaining member is arranged on the outer of described jet member
Side, is not contacted with described jet member, and described temperature maintaining member is tubular structure.
3. nozzle according to claim 2 is it is characterised in that described temperature maintaining member is coaxial with described jet member.
4. the nozzle according to any one of claims 1 to 3 is it is characterised in that described temperature maintaining member and described injection
Part is contour.
5. nozzle according to claim 4 is it is characterised in that described temperature maintaining member includes the different cylinder of multiple external diameters
Shape structure.
6. nozzle according to claim 5 is it is characterised in that each described tubular structure of described temperature maintaining member
Thickness is 0.1～1mm.
7. nozzle according to claim 5 is it is characterised in that described jet member is stainless steel jet member.
8. nozzle according to claim 7 is it is characterised in that described jet member is tubular structure, and described jet member
Inwall be provided with heat conducting film.
9. nozzle according to claim 5 is it is characterised in that described jet member is copper jet member.
10. nozzle according to claim 5 is it is characterised in that described temperature maintaining member is stainless steel temperature maintenance portion
Part.
11. nozzles according to claim 1 it is characterised in that described jet member be tubular structure, described temperature maintenance portion
Part is the metallic film of the inwall being arranged on described jet member.
12. nozzles according to claim 11 are it is characterised in that the inwall of described jet member is provided with Copper thin film.
13. nozzles according to claim 12 are it is characterised in that the thickness of described Copper thin film is 0.5～5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620778583.5U CN205974648U (en) | 2016-07-22 | 2016-07-22 | Jet nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620778583.5U CN205974648U (en) | 2016-07-22 | 2016-07-22 | Jet nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205974648U true CN205974648U (en) | 2017-02-22 |
Family
ID=58025933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620778583.5U Active CN205974648U (en) | 2016-07-22 | 2016-07-22 | Jet nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205974648U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113249687A (en) * | 2021-04-14 | 2021-08-13 | 拓荆科技股份有限公司 | Electric heating shower head structure in vacuum |
-
2016
- 2016-07-22 CN CN201620778583.5U patent/CN205974648U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113249687A (en) * | 2021-04-14 | 2021-08-13 | 拓荆科技股份有限公司 | Electric heating shower head structure in vacuum |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |