CN113188441A - PSD sensor-based device and method for measuring three degrees of freedom of plane of motion mechanism - Google Patents
PSD sensor-based device and method for measuring three degrees of freedom of plane of motion mechanism Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
The invention relates to a PSD sensor-based device and a method for measuring three degrees of freedom of a plane of a motion mechanism; the device comprises a laser, a plurality of PSD sensors, a plurality of signal processing boards and a multi-channel AD signal acquisition card, wherein the laser and the PSD sensors move relatively; when laser irradiates the light-sensitive part of the PSD sensor, the translation motion of the laser relative to the plane X, Y axis of the PSD sensor and the rotation motion around the Z axis are calculated through the voltage signal of the PSD sensor. The movement mechanism carrying the device can realize non-contact planar three-degree-of-freedom measurement; the invention solves the problem that the conventional sensor is difficult to measure three degrees of freedom of a plane at one time, has higher precision and sampling frequency compared with the traditional machine vision measurement, and can meet the real-time measurement feedback requirement of the tail end of a plane motion mechanism.
Description
Technical Field
The invention relates to a device and a method for measuring a motion state of the tail end of a motion mechanism, in particular to a device and a method for measuring planar three-degree-of-freedom non-contact of the motion mechanism.
Background
At present, the motion control of the mechanism can be generally divided into an open-loop control system, a semi-closed-loop control system containing only joint feedback, and a full-closed-loop system containing joint feedback and end feedback. However, due to cost limitations and lack of suitable multi-degree-of-freedom measurement means, most mechanisms are semi-closed loop mechanisms containing only drive joint feedback. Although the drive joint has the capability of realizing high-precision positioning control, the transmission chain can introduce non-linear factors such as machining assembly errors, gaps, friction force, elastic deformation and the like, and the non-linear factors limit the motion performance of the mechanism. If the motion state information of the mechanism driving joint and the tail end multiple degrees of freedom of the mechanism can be measured and fed back in real time, the motion mechanism can improve the comprehensive performance through the tail end feedback, and the application value of the mechanism is greatly improved. Therefore, the measurement and feedback of the tail end degree of freedom of the mechanism is an important technical means for improving the movement performance of the mechanism, and the addition of a tail end sensor to build a full closed-loop control system is undoubtedly an ideal solution, but the existing sensor has limited measurement degree of freedom, and a proper multiple-degree-of-freedom sensor for the tail end feedback of the mechanism is lacked at present. The measurement feedback of the motion state information of multiple degrees of freedom at the tail end of the mechanism is the key for realizing the full closed loop control, is one of bottleneck problems restricting the further improvement of the performance of the mechanism, and is also a problem to be solved by the invention.
Therefore, the invention discloses a novel PSD sensor-based planar three-degree-of-freedom non-contact measuring device and method for a motion mechanism, which are constructed by optimally arranging a one-dimensional PSD sensor to be matched with a cross laser for use, and can directly acquire terminal pose information of the mechanism under the non-contact condition for measurement feedback so as to break through the technical bottleneck of motion control of the traditional mechanism. Compared with the traditional semi-closed loop control mechanism, the movement mechanism adopting the invention to construct the full closed loop control can feed back the movement state information of the tail end on line in real time, is beneficial to the design of a control algorithm, and can improve the performances of the mechanism such as stability, precision, speed and the like.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a PSD sensor-based three-degree-of-freedom planar measuring device for a motion mechanism, which adopts the optimized arrangement of a cross laser and a plurality of one-dimensional PSD sensors to realize the aim of measuring three degrees of freedom of a plane at one time, and can meet the requirement of real-time measurement feedback of the tail end of the planar motion mechanism under the non-contact condition by benefiting from the high precision and high sampling frequency of the PSD sensors.
The invention also provides a motion mechanism plane three-degree-of-freedom measuring method based on the PSD sensor.
The invention relates to a PSD sensor-based three-degree-of-freedom measuring device for a plane of a motion mechanism, which comprises a laser, an upper computer, a multi-channel AD signal acquisition card, a plurality of one-dimensional PSD sensors and a plurality of signal processing boards, wherein the upper computer is connected with the laser;
the laser is fixedly connected with the object to be measured; the signal processing boards process output signals of the PSD sensors, and voltage signals obtained after processing are transmitted to corresponding acquisition channels of the AD signal acquisition card; the AD signal acquisition card sends the acquired voltage signal to an upper computer;
when measuring the actual displacement of the measured object, a plurality of one-dimensional PSD sensors are fixedly arranged according to a preset rule and move relative to the laser; the laser excites the PSD sensor to output electric signals, the signal processing board and the AD signal acquisition card are used for acquiring the electric signals and transmitting the acquired electric signals to the upper computer, the curve of the electric signals and the relative displacement curve between the PSD sensor and the laser beam of the laser have a conversion relation, and the upper computer calculates the actual displacement of the measured object according to the conversion relation.
The invention relates to a PSD sensor-based three-degree-of-freedom measuring method for a plane of a motion mechanism, which is based on the measuring device and comprises the following steps:
s1, placing the PSD sensor on a fixed platform, placing the object to be measured on a movable platform, and driving the laser to do plane motion by the movable platform; the light sensing part of the PSD sensor generates corresponding photocurrent due to the light beam irradiation of the laser, the photocurrent represents the corresponding displacement of the light sensing part of the PSD sensor, the photocurrent is converted into a voltage signal through a signal processing board, and an AD signal acquisition card acquires the voltage signal and then sends the voltage signal to an upper computer;
s2, calibrating the conversion relation between the photocurrent and the actual light spot position to obtain the one-dimensional coordinate of the actual light spot, wherein the actual light spot refers to the geometric midpoint of the laser line irradiated on the light-sensitive part of the PSD sensor by the laser;
and S3, the upper computer calculates the translation amount of the measured object along the coordinate axis and the included angle of the rotation around the Z axis according to the one-dimensional coordinate.
The movement mechanism carrying the measuring device can realize non-contact plane three-degree-of-freedom measurement; the invention solves the problem that the conventional sensor is difficult to measure three degrees of freedom of a plane at one time, has higher precision and sampling frequency compared with the traditional machine vision measurement, and can meet the real-time measurement feedback requirement of the tail end of a plane motion mechanism. Specifically, compared with the prior art, the invention has the following advantages and beneficial effects:
1. the invention is a non-contact measurement, which can not generate additional disturbance influence on the motion of the existing mechanism;
2. compared with the existing measuring method, the invention can simultaneously measure the translation amount of two directions and the rotation amount of one direction of the plane, and has three plane degrees of freedom;
3. the measurement of the invention is independent of the height, and the height change of the laser does not influence the planar three-degree-of-freedom measurement result;
3. the PSD sensor adopted by the invention has micron-sized resolution, and can realize high-precision measurement;
4. the invention is based on the photoelectric measurement principle, is an analog signal output, has the response frequency completely determined by the sampling circuit, can realize very high measurement frequency, and meets the requirement of high-speed measurement feedback.
Drawings
FIG. 1 is a schematic structural diagram of a PSD sensor-based motion mechanism planar three-degree-of-freedom measurement apparatus in an embodiment of the present invention;
FIG. 2 is a three-degree-of-freedom solution coordinate diagram;
FIG. 3 is a flow chart of displacement calculation of the object under test according to an embodiment of the present invention;
the reference numbers in the figures are: 1-cross line laser, 2-laser line, 3-PSD sensor, 4-mounting base plate, P1Laser spots 1, P2Laser spots 2, P3Laser spots 3, P4A laser spot 4.
Detailed Description
The present invention will be described in further detail with reference to the following drawings and examples, but the practice of the present invention is not limited thereto.
Examples
As shown in fig. 1, in the present embodiment, the measuring device mainly includes a PSD sensor measuring portion and a laser portion, and there is a relative movement between the PSD sensor measuring portion and the laser portion. In the embodiment, according to the characteristics of the mechanism to be measured, the measured object is arranged on the movable platform, the measuring part of the PSD sensor is fixed on the fixed platform, and the laser is driven to move by the movement mechanism for measurement; the laser can also be fixed, and the PSD sensor measuring part is driven by the movement mechanism to carry out measurement.
The PSD sensor measuring part comprises a sensor mounting base plate, 4 one-dimensional PSD sensors, 4 signal processing boards and an 8-channel AD signal acquisition card, wherein the 4 signal processing boards are respectively connected with the 4 one-dimensional PSD sensors, and after I-V conversion, voltage amplification and other processing are carried out on output signals of the PSD sensors, obtained voltage signals are transmitted to corresponding acquisition channels of the AD signal acquisition card.
The 4 one-dimensional PSD sensors are connected end to form a square structure and are orthogonally distributed around the sensor mounting base plate. The sensor mounting base plate is an aluminum alloy base plate which is subjected to finish machining, and the flatness and the mounting precision are guaranteed.
The coordinate arrangement of the 4 one-dimensional PSD sensors is consistent, the sensors face the sensor mounting base plate, the origin of the coordinate axis of the one-dimensional PSD sensors is located in the middle of the photosensitive area, negative displacement is arranged on the left side relative to the origin, the maximum displacement is-35 mm, and positive displacement is arranged on the right side, and the maximum displacement is 35 mm.
In the embodiment, the model of the selected one-dimensional PSD sensor is DRX-1DPSD-0A03-70, the length of the light sensing part is 70mm, and the width of the light sensing part is 2.5 mm; a DRX-1DPSD-OA03-X signal processing board is adopted to carry out I-V conversion, amplification and other operation processing on the micro current signals output by the PSD sensors, the test condition is that the input power voltage is +/-15 VDC, and 4 PSD sensors are matched with 4 signal processing boards. After the output signals of the 4 PSD sensors are amplified by the 4 signal processing boards respectively, the obtained amplified signals are collected to an upper computer through an AD signal collecting card to be calculated.
As shown in fig. 2, the middle of the aluminum alloy sensor mounting base plate is a two-dimensional plane world coordinate origin, which is the origin connection position of 4 PSD sensors.
The laser part mainly comprises a laser which is in non-contact with the PSD sensor and is fixedly connected with the measured object through a mounting clamp. If the PSD sensor measuring part is fixed on the fixed platform, the laser is fixedly connected with the movable platform, and vice versa.
In this embodiment, the laser is an orthogonal cross line laser, the included angle of light is 90 degrees, the laser with a wavelength of 650nm and a power of 3mW is selected, and the cross line width is 0.5 mm. The laser and the moving platform of the object to be measured are fixedly connected through the clamp, during measurement, the measuring part of the PSD sensor is fixed on the fixed platform to be stationary, and the laser and the moving platform move simultaneously.
In this embodiment, a current signal generated by the PSD sensor under the excitation of the laser spot is transmitted and amplified by the signal processing board to obtain a voltage signal within a range of ± 10VDC, the AD acquisition card acquires the voltage signal converted by the PSD sensor, and ± 10VDC corresponds to ± 35mm of displacement and needs to be calibrated before measurement. The calibration process comprises the following steps: the method comprises the steps of fixing a laser to be vertical to a measuring plane, emitting laser beams, driving a PSD sensor to do uniform linear motion of X, Y axes through a precision positioning platform, recording a displacement curve of the precision positioning platform, obtaining a voltage signal curve of a signal processing board through an AD acquisition card, performing regression analysis on the obtained voltage signal curve and the displacement curve of the precision positioning platform (namely a relative displacement curve between the PSD sensor and the laser beams), and obtaining a calibration conversion relation formula of the voltage signal and actual displacement to serve as a calibration formula. The voltage signal curve is a curve of a voltage signal output by the PSD sensor excited by the laser after the ambient light interference is removed; the voltage signal output by the PSD sensor is approximately linear, and can also be calibrated by other displacement sensors, and the PSD sensor can measure the displacement of the measured object after calibration.
In this embodiment, the measurement method is implemented based on the measurement apparatus, and specifically includes the following steps:
s1, placing the PSD sensor measuring part on a fixed platform, placing the measured object on a movable platform, and driving the cross laser to do plane motion by the movable platform; the light sensing parts of the four one-dimensional PSD sensors generate corresponding photocurrents due to the irradiation of light beams of the laser, the photocurrents represent the corresponding displacement of the light sensing parts of the PSD sensors, the photocurrents are converted into voltage signals through the signal processing board, and the voltage signals are collected by the AD signal collection card and then are sent to the upper computer;
and S2, calibrating the conversion relation between the photocurrent and the actual light spot position to obtain the one-dimensional coordinate of the actual light spot. The actual light spot refers to the geometric midpoint of the cross-line laser that impinges on the light-sensitive portion of the PSD sensor, because the current induced by the PSD sensor is only related to the geometric center of the light spot or ray.
Specifically, the laser flashes at a certain preset frequency (for example, 10Hz), and when the laser is on, the AD signal acquisition card acquires a mixed voltage signal V-on reflecting an ambient light signal and a laser beam signal; when the laser is not bright, the AD signal acquisition card acquires a voltage signal V-off reflecting ambient light; subtracting the voltage signal V-off of the reaction environment light from the mixed voltage signal V-on to remove the interference of the environment light and obtain a voltage signal of the reaction laser beam; the upper computer calculates the displacement for removing the ambient light interference through a calibration formula to obtain a light spot one-dimensional coordinate P1、P2、P3、P4The units are mm, and are used for calculating the actual displacement of the measured object, as shown in fig. 3.
And S3, the upper computer calculates the translation amount of the measured object along the coordinate axis and the included angle of the rotation around the Z axis according to the one-dimensional coordinates.
In this embodiment, the local coordinates of the PSD sensor are one-dimensional coordinates, the middle is the origin,the left side is a negative number, and the right side is a positive number; the middle position of the sensor mounting bottom plate is a two-dimensional plane world coordinate origin passing through a one-dimensional coordinate P1、P2、P3、P4The translation amount of the measured object along the coordinate axis can be calculated as follows:
x＝(b2-b1)/(k1-k2)
y＝k1x+b1
k1＝-(P1+P3)/2D
k2＝2D/(P2+P4)
b1＝P3-(P1+P3)/2
b2＝D-2D·P4/(P2+P4)
d is the length of a light sensing part of the PSD sensor and is in mm; and further calculating the included angle of the anticlockwise rotation of the measured object around the Z axis:
α＝arctan(k1)
because the measured object is fixedly connected with the laser, the translation and the rotation of the motion mechanism carrying the laser can be obtained by measuring the translation and the rotation of the laser line.
The above examples of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (9)
1. The device is characterized by comprising a laser, an upper computer, a multi-channel AD signal acquisition card, a plurality of one-dimensional PSD sensors and a plurality of signal processing boards;
the laser is fixedly connected with the object to be measured; the signal processing boards process output signals of the PSD sensors, and voltage signals obtained after processing are transmitted to corresponding acquisition channels of the AD signal acquisition card; the AD signal acquisition card sends the acquired voltage signal to an upper computer;
when measuring the actual displacement of the measured object, a plurality of one-dimensional PSD sensors are fixedly arranged according to a preset rule and move relative to the laser; the laser excites the PSD sensor to output electric signals, the signal processing board and the AD signal acquisition card are used for acquiring the electric signals and transmitting the acquired electric signals to the upper computer, the curve of the electric signals and the relative displacement curve between the PSD sensor and the laser beam of the laser have a conversion relation, and the upper computer calculates the actual displacement of the measured object according to the conversion relation.
2. The planar three-degree-of-freedom measuring device of the motion mechanism as claimed in claim 1, wherein the PSD sensor is fixed on a fixed platform, the object to be measured is arranged on a movable platform, and the laser is fixedly connected with the movable platform of the object to be measured; during measurement, the PSD sensor is fixed on the fixed platform and is still, and the laser and the movable platform move simultaneously.
3. The device for measuring three degrees of freedom in the plane of a moving mechanism according to claim 2, wherein the laser is fixedly connected with the object to be measured through a mounting fixture.
4. The device as claimed in claim 1, wherein the laser is a cross line laser with an included angle of 90 degrees.
5. The device of claim 1, wherein the plurality of one-dimensional PSD sensors are mounted on a sensor mounting base plate.
6. The device for measuring three degrees of freedom in the plane of a moving mechanism as claimed in claim 5, wherein the one-dimensional PSD sensors are provided with 4, and the 4 one-dimensional PSD sensors are connected end to form a square structure and are orthogonally distributed around the sensor mounting base plate.
7. PSD sensor-based three-degree-of-freedom measurement method for plane of moving mechanism, which is characterized in that the measurement method is based on the measurement device of any one of claims 1-6, and the method comprises the following steps:
s1, placing the PSD sensor on a fixed platform, placing the object to be measured on a movable platform, and driving the laser to do plane motion by the movable platform; the light sensing part of the PSD sensor generates corresponding photocurrent due to the light beam irradiation of the laser, the photocurrent represents the corresponding displacement of the light sensing part of the PSD sensor, the photocurrent is converted into a voltage signal through a signal processing board, and an AD signal acquisition card acquires the voltage signal and then sends the voltage signal to an upper computer;
s2, calibrating the conversion relation between the photocurrent and the actual light spot position to obtain the one-dimensional coordinate of the actual light spot, wherein the actual light spot refers to the geometric midpoint of the laser line irradiated on the light-sensitive part of the PSD sensor by the laser;
and S3, the upper computer calculates the translation amount of the measured object along the coordinate axis and the included angle of the rotation around the Z axis according to the one-dimensional coordinate.
8. The method for measuring three degrees of freedom in the plane of a moving mechanism according to claim 7, wherein in step S2, the laser flashes at a preset frequency, and when the laser is on, the AD signal acquisition card acquires a mixed voltage signal V-on reflecting an ambient light signal and a laser beam signal; when the laser is not bright, the AD signal acquisition card acquires a voltage signal V-off reflecting ambient light; subtracting the voltage signal V-off of the reaction environment light from the mixed voltage signal V-on to remove the interference of the environment light and obtain a voltage signal of the reaction laser beam; the upper computer calculates the displacement for removing the ambient light interference through a calibration formula to obtain a light spot one-dimensional coordinate P1、P2、P3、P4And the displacement sensor is used for calculating the actual displacement of the measured object.
9. The method for measuring three degrees of freedom in the plane of a motion mechanism of claim 8, wherein in step S3, the one-dimensional coordinate P is used1、P2、P3、P4Calculating the translation amount of the measured object along the coordinate axis:
x＝(b2-b1)/(k1-k2)
y＝k1x+b1
k1＝-(P1+P3)/2D
k2＝2D/(P2+P4)
b1＝P3-(P1+P3)/2
b2＝D-2D·P4/(P2+P4)
and calculating the included angle of the anticlockwise rotation of the measured object around the Z axis:
α＝arctan(k1)
wherein D is the length of the light sensing part of the PSD sensor.
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2021
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| JP2000266537A (en) * | 1999-03-15 | 2000-09-29 | Showa Optronics Kk | Electro-optical distance measuring apparatus |
| US20070253002A1 (en) * | 2006-04-28 | 2007-11-01 | Prueftechnik Dieter Busch Ag | Device and process for quantitative assessment of the three-dimensional position of two machine parts, shafts, spindles, workpieces or other articles relative to one another |
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Application publication date: 20210730 |