CN101354243B - Non-contact laser detection method of guide rail rolling angle - Google Patents
Non-contact laser detection method of guide rail rolling angle Download PDFInfo
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- CN101354243B CN101354243B CN2008101507802A CN200810150780A CN101354243B CN 101354243 B CN101354243 B CN 101354243B CN 2008101507802 A CN2008101507802 A CN 2008101507802A CN 200810150780 A CN200810150780 A CN 200810150780A CN 101354243 B CN101354243 B CN 101354243B
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Abstract
The invention discloses a non-contact laser detection method of a roll angle of a lead rail, which is carried out according to the following steps: a detection device is adopted and linear polarization laser sent by a laser is used as detecting light which irradiates into a 1/2 wave plate of a sensitive element and irradiates towards a right angle prism after passing through the 1/2 wave plate; the detecting light is reflected through the right angle prism to obtain a converse light beam which is parallel to an incident light beam, and the converse light beam irradiates in to a polarization beam splitter after passing through the 1/2 wave plate again, then two beams of emergent light of the polarization beam splitter respectively enter two photodetectors to generate an electric current signal reflecting the intensity of the light; the electric current signal passes through a signal processing circuit to obtain a voltage signal reflecting the difference of the light intensity of the two beams of the light, finally the voltage signal is processed by a computer for obtaining the reflection of the size and the direction of the roll angle of the lead rail to be detected. The method of the invention can be used by processing or measuring equipment which adopts the linear lead rail for realizing the dynamic and static detection of the roll angle of the linear lead rail thereof. The detection method of the invention has comparatively high detection precision.
Description
Technical field
The invention belongs to photoelectric detection technology field, relate to the secondary error detecting methods of a kind of guide rail movement, be specifically related to a kind of non-contact laser detection method of guide rail rolling angle.
Background technology
Because manufacturing and alignment error cause adopting the processing of line slideway or the line slideway kinematic pair of measuring equipment to have the angle of pitch, deflection angle and three angular motion errors of roll angle to some extent, directly influence the processing or the measuring accuracy of equipment at the Abbe error of its respective direction generation.At present, adopting Error Compensation Technology is to reduce and eliminates the main means of Abbe error with the raising equipment precision, but its prerequisite is accurate measured angular kinematic error.
The measuring method of roll angle, at present, mainly contain roll angle measurement method based on the collimation laser position reference, based on the roll angle measurement method of collimation laser directional reference, based on the roll angle measurement method of collimation laser polarization direction benchmark with based on roll angle measurement method of polarization laser vibration plane benchmark etc.; Wherein, based on the roll angle measurement method of polarization laser vibration plane benchmark, can be applicable to adopt the measurement of the guide rail rolling angle of line slideway equipment, but this method is during to rolling angle measurement, because of being subjected to the interference of incident light, measuring accuracy is lower.
Summary of the invention
The purpose of this invention is to provide a kind of non-contact laser detection method of guide rail rolling angle, measuring accuracy is higher.
The technical solution adopted in the present invention is, a kind of non-contact laser detection method of guide rail rolling angle specifically carries out according to the following steps:
Step 1: adopt a pick-up unit, the linearly polarized laser that sends with the laser instrument in the pick-up unit serves as to survey light, and this linearly polarized laser is injected 1/2 wave plate that is provided with along beam direction, by injecting the right-angle prism that is arranged at behind 1/2 wave plate behind 1/2 wave plate;
Step 2: the linearly polarized laser of injecting right-angle prism forms reverse detection light and the outgoing parallel with incident beam after its reflection, this reverse detection light is injected 1/2 wave plate once more;
Step 3: after reverse detection light sees through 1/2 wave plate once more, inject the polarization spectroscope that is provided with along reverse detection light direction, polarization spectroscope is divided into two bundle beam split with the reverse detection light of incident, and this two bundles beam split is injected respectively along the beam split light beam and penetrated two photodetectors that direction is provided with;
Step 4: two photodetectors produce respectively and reflect the current signal of incident light light intensity separately, and send into the signal processing circuit that is connected with two photodetectors:
Step 5: signal processing circuit is handled the current signal from photodetector, obtains reflecting the voltage signal U of polarization spectroscope two bundle outgoing divided beams light intensity difference
0
Step 6: signal processing circuit is with the voltage signal U that obtains
0Send into coupled computing machine, obtain the size and Orientation of tested guide rail roll angle after machine is handled as calculated.
The invention has the beneficial effects as follows:
1. the output voltage U of measuring system
0And be approximated to linear relationship between measured roll angle θ, measure sensitivity and precision and further improve.
2. adopt 1/2 wave plate as sensitive element, do not carry cable, the stroke that is suitable for the roll angle on-line dynamic measurement of equipment guide rail and tested guide rail is unrestricted, can fundamentally effectively improve the precision of equipment.
Description of drawings
Fig. 1 is the structural representation of the measurement mechanism that adopts in the inventive method;
Fig. 2 adopts the inventive method to measure the detection schematic diagram of guide rail rolling angle;
Fig. 3 adopts roll angle that the inventive method obtains and the graph of relation between the signal processing circuit output voltage.
Among the figure, 1. laser instrument, 2. polarization spectroscope, 3.1/2 wave plate, 4. right-angle prism, 5. worktable, 6. photodetector A, 7. photodetector B, 8. signal processor, 9. computing machine.
Embodiment
The present invention is described in detail below in conjunction with the drawings and specific embodiments:
The structure of the pick-up unit that adopts in the inventive method as shown in Figure 1.In the pick-up unit, comprise the laser instrument of produce surveying with linearly polarized laser 1, the detection light beam direction that penetrates along laser instrument 1 is disposed with 1/2 wave plate 3 and right- angle prism 4,1/2 wave plates 3 are fixed in worktable 5; Penetrate direction along right-angle prism 4 reflected light and be provided with polarization spectroscope 2,1/2 wave plates 3 between polarized light light microscopic 2 and right-angle prism 4.Penetrate direction in the beam split of 2 liang of bundles of polarization spectroscope and be respectively arranged with photodetector A6 and photodetector B7, photodetector A6 is connected with signal processing circuit 8 respectively with photodetector B7, and signal processing circuit 8 is connected with computing machine 9.
In this pick-up unit,
Adopt 1/2 very thin wave plate 3 as sensitive element, when 1/2 wave plate 3 with worktable 5 when line slideway moves, the angle of pitch of guide rail and deflection angle error can not produce very big influence to the measurement of roll angle error, can guarantee measuring accuracy.
Adopting right-angle prism 4 be catoptron, and in the time of can guaranteeing that twice of detection light that laser instrument 1 sends is vertically through 1/2 wave plate 3, not overlapping and parallel, the change of assurance measuring light polarization direction superposes.
The method of utilizing above-mentioned detection device that guide rail rolling angle is detected, specifically carry out according to the following steps:
Step 1: adopt this pick-up unit, the laser instrument 1 in the pick-up unit sends linearly polarized laser as surveying light, and this linearly polarized laser is injected 1/2 wave plate 3, through injecting the right-angle prism 4 that is arranged at behind 1/2 wave plate behind 1/2 wave plate 3;
Step 2: the linearly polarized laser of injecting right-angle prism 4 forms the reverse detection light parallel with incident beam and penetrates from right-angle prism 4 after its reflection, and this reverse laser beam is injected 1/2 wave plate 3 once more;
Step 3: behind reverse detection light transmission 1/2 wave plate 3, inject the polarization spectroscope 2 that is provided with along reverse detection light direction, polarization spectroscope 2 is divided into two bundle beam split, and this two bundles beam split is injected respectively along the beam split light beam and penetrated photodetector A6 and the photodetector B7 that direction is provided with;
Step 4: photodetector A6 and photodetector B7 produce respectively and reflect the current signal of incident light light intensity separately, and this current signal is sent into the signal processing circuit 8 that is connected with photodetector:
Step 5: 8 pairs of two current signals from photodetector of signal processing circuit are handled the voltage signal U that obtains reflecting 2 liang of bundles of polarization spectroscope outgoing divided beams light intensity difference
0
Step 6: signal processing circuit 8 is with the voltage signal U that obtains
0Send into coupled computing machine 9, obtain the size and Orientation of tested guide rail roll angle after machine 9 is handled as calculated.
Detection side's ratio juris of the present invention as shown in Figure 2.Setting up rectangular coordinate system ∑ XYZ, is the Z axle with the direction of propagation of linear polarization exploring laser light, and to be coordinate plane XOY perpendicular to the direction of propagation of surveying light, coordinate plane XOZ is a surface level.Before the detection, adjust laser instrument 1 and make the vibration plane of surveying light be positioned at coordinate plane XOZ, establishing its initial position is No. 0 position.Adjust sensitive element 1/2 wave plate 3, make detection light vertically inject 1/2 wave plate 3, make its fast axle be parallel to coordinate plane XOZ simultaneously.Survey light after right-angle prism 4 reflections, its reflected light is parallel with coordinate plane XOZ with the plane that incident light is determined.When being installed, polarization spectroscope 2 should make the output voltage U of signal processing circuit 8 as far as possible
0Be zero.
When rolling angle measurement, after 1/2 wave plate 3 rotated an angle θ with worktable 5, its fast axle forwarded position IV among the figure to by No. 0 position of initial position, and linearly polarized laser is behind 1/2 wave plate 3, the vibration plane of its emergent light will be in position I, and the angle between position I and the position IV is the roll angle θ of guide rail.Linearly polarized laser goes to position II through its vibration plane of right-angle prism 4 reflection back, is linearly polarized laser once more through the position of the preceding vibration plane of 1/2 wave plate 3.Survey light and be in position III through 1/2 wave plate, 3 its vibration planes of back once more, survey the vibration plane position III of light and the angle of No. 0 interdigit of its initial position this moment
Equal 4 θ.By the light intensity of 2 liang of emergent lights of photodetector detection polarization spectroscope, can obtain the angle of No. 0 interdigit of detection light vibration face of relative laser instrument 1 generation of polarization spectroscope 2 incident light vibration plane position III
1/4th be sensitive element 1/2 wave plate 3 with worktable 5 roll angle θ around rail axis when tested guide rail moves.Satisfy following relation between the light intensity difference Δ I of two light beams that two photodetectors produce and the roll angle θ:
Determined that by guide precision 1/2 wave plate 3 is during with working table movement, the angle theta between its fast axle and coordinate plane XOZ is very little, sin (8 θ) ≈ 8 θ, so have:
ΔI≈8θI
0
Be to be approximated to linear relationship between light intensity difference Δ I and roll angle θ, and roll angle θ is exaggerated 8 times.Light intensity difference Δ I after signal processing circuit 8 is handled, the output voltage U of signal processing circuit 8
0Also can do further and amplify light intensity difference Δ I.
Pick-up unit is in the practical installation and trial process, and the vibration plane that can not accomplish to make the linearly polarized light that laser instrument 1 produces is in surface level, and establishing between vibration plane that linear polarization surveys light and surface level has angle Δ θ
1Moreover the P axle of polarization spectroscope 2 and S axle can not be adjusted to the position of requirement, and establishing and adjusting the drift angle is Δ θ
2At this moment, according to the propagation characteristic of linearly polarized light, the light intensity difference that can get 2 liang of outgoing beams of polarization spectroscope is:
ΔI′＝I′
p-I′
s＝I
0?sin(2Aθ
2+8θ-2Δθ
1)
The error delta θ that installation causes
1With Δ θ
2Very little, guide rail rolling angle θ is also very little, promptly has:
ΔI′≈I
0(2Δθ
2+8θ-2Δθ
1)
In the pick-up unit, contain among the light intensity difference Δ I ' of polarization spectroscope two emergent lights and adjust error term 2 Δ θ
2-2 Δ θ
1, correspondingly, from the output voltage U of the reflection light intensity difference Δ I ' of signal processing circuit 8
0In also contain error term 2 Δ θ
2-2 Δ θ
1, but its influence to measurement result determines, can eliminate by the demarcation to pick-up unit.Before system uses, remove the measured output voltage U in 1/2 wave plate, 3 backs
0Be and adjust error term 2 Δ θ
2-2 Δ θ
1
Adopt the inventive method to carry out the roll angle test experience.1/2 wave plate 3 is fixed on the high precision turntable, the roll angle of this high precision turntable analog operation platform during along guide rail movement changes, obtain as shown in Figure 3 roll angle and the relation curve of voltage, show among the figure, the output voltage of roll angle and signal processing circuit is linear, the rolling angle measurement scope is ± 200 ' time, and the property degree of linear fit curve is 0.998; Experiment shows, adopts the inventive method to measure the roll angle of guide rail, and its Measurement Resolution is 2 ".Than conventional detection, the measuring accuracy and the resolution of the inventive method improve a lot.
Claims (1)
1. the non-contact laser detection method of a guide rail rolling angle, specifically carry out according to the following steps:
Step 1: adopt a pick-up unit, this pick-up unit adopts 1/2 wave plate to move along tested line slideway with worktable as sensitive element, 1/2 wave plate, the linearly polarized laser that sends with the laser instrument in the pick-up unit serves as to survey light, this linearly polarized laser is injected 1/2 wave plate that is provided with along beam direction, by injecting the right-angle prism that is arranged at behind 1/2 wave plate behind 1/2 wave plate;
Step 2: the linearly polarized laser of injecting right-angle prism forms reverse detection light and the outgoing parallel with incident beam after its reflection, this reverse detection light is injected 1/2 wave plate once more;
Step 3: after reverse detection light sees through 1/2 wave plate once more, inject the polarization spectroscope that is provided with along reverse detection light direction, polarization spectroscope is divided into two bundle beam split with the reverse detection light of incident, and this two bundles beam split is injected respectively along the beam split light beam and penetrated two photodetectors that direction is provided with;
Step 4: two photodetectors produce respectively and reflect the current signal of incident light light intensity separately, and send into the signal processing circuit that is connected with two photodetectors;
Step 5: signal processing circuit is handled the current signal from photodetector, obtains reflecting the voltage signal U of polarization spectroscope two bundle outgoing divided beams light intensity difference
0
Step 6: signal processing circuit is with the voltage signal U that obtains
0Send into coupled computing machine, obtain the size and Orientation of tested guide rail roll angle after machine is handled as calculated.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101507802A CN101354243B (en) | 2008-09-03 | 2008-09-03 | Non-contact laser detection method of guide rail rolling angle |
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|---|---|---|---|
| CN2008101507802A CN101354243B (en) | 2008-09-03 | 2008-09-03 | Non-contact laser detection method of guide rail rolling angle |
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| CN101354243A CN101354243A (en) | 2009-01-28 |
| CN101354243B true CN101354243B (en) | 2010-06-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102654392A (en) * | 2012-05-21 | 2012-09-05 | 西安交通大学 | Roll angle measurement device and method based on array-type multiple reflections |
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| CN102840980A (en) * | 2012-09-06 | 2012-12-26 | 南京理工大学 | Comprehensive accuracy and performance testing device of rolling linear guide pair |
| CN103162645B (en) * | 2013-03-08 | 2016-03-09 | 浙江大学 | A kind of rolling measurement method and apparatus measured based on the ellipse degree of bias |
| CN103471527B (en) * | 2013-08-14 | 2016-04-13 | 北京镭测科技有限公司 | A kind of laser external cavity feedback low-angle rolling angle measurement system |
| CN105222726B (en) * | 2015-07-07 | 2018-12-07 | 西安交通大学 | Photon flux method rolling angle measurement device and method based on multipass half wave plate |
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| CN107462210B (en) * | 2017-07-19 | 2019-10-18 | 中国科学院上海光学精密机械研究所 | The rolling angle measurement device of linear guide |
| CN109425310A (en) * | 2017-08-29 | 2019-03-05 | 南京雄豹精密机械有限公司 | A kind of line slideway auxiliary precision On-line Measuring Method |
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| CN110160471B (en) * | 2019-05-08 | 2020-08-28 | 华中科技大学 | Error measurement system and method for high-precision linear guide rail |
| CN110749287B (en) * | 2019-11-27 | 2021-05-07 | 复旦大学 | Optical method and device for measuring suspension gap of magnetic suspension guide rail |
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| JP2000275030A (en) * | 1999-03-29 | 2000-10-06 | Nec Corp | Rolling angle measurement method and device for moving stage |
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Patent Citations (4)
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|---|---|---|---|---|
| WO1996010729A1 (en) * | 1994-09-30 | 1996-04-11 | Drs/Photronics Corporation | Improved boresight with single-beam triaxial measurement |
| JP2000275030A (en) * | 1999-03-29 | 2000-10-06 | Nec Corp | Rolling angle measurement method and device for moving stage |
| CN1335483A (en) * | 2001-08-31 | 2002-02-13 | 清华大学 | Tumble angle measuring method and measurer |
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Cited By (2)
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| CN102654392A (en) * | 2012-05-21 | 2012-09-05 | 西安交通大学 | Roll angle measurement device and method based on array-type multiple reflections |
| CN102654392B (en) * | 2012-05-21 | 2014-12-10 | 西安交通大学 | Roll angle measurement device and method based on array-type multiple reflections |
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