CN109443248B - Common-path following type high-precision three-dimensional angle measuring method and device based on grating - Google Patents
Common-path following type high-precision three-dimensional angle measuring method and device based on grating Download PDFInfo
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Abstract
A common-path following type high-precision three-dimensional angle measuring method and a device based on a grating belong to the technical field of precision instrument manufacturing and precision test metering; the invention adopts the one-dimensional plane reflection grating as a sensitive device, realizes the three-dimensional angle change measurement of the sensitive device, utilizes the one-dimensional plane transmission grating and the polarization beam splitter group as compensation mechanisms, improves the measurement precision and the measurement stability of the angle through common light path compensation, and simultaneously adopts a following compensation mode to improve the measurement range of the rotation angle; the method and the device provided by the invention have the advantages that the measurement range of the rotation angle is enlarged while the high-precision and high-stability measurement of the three-dimensional angle is realized, the method is scientific and reasonable, and the device is compact in structure.
Description
Technical Field
The invention belongs to the technical field of precision instrument manufacturing and precision measurement and measurement, and mainly relates to a common-path following type high-precision three-dimensional angle measuring method and device based on a grating.
Background
With the continuous development of high-end manufacturing industry, higher and higher requirements are put forward on a precision manufacturing and processing technology and a high-precision measurement technology. The high-precision three-dimensional angle measurement is an important component of high-precision measurement and is widely applied to the fields of attitude monitoring of guide rail motion, surface appearance detection of objects, calibration and calibration of precise instruments, geometric deformation measurement of large buildings and the like, so that the small-angle measuring instrument is a necessary conventional instrument in the fields of precision manufacturing, precision machining, metering test, aerospace and scientific research.
Because of the advantages of non-contact, high precision, large working distance and the like, many scholars and scientific research units carry out deep research on the optical small-angle measurement based on the small-angle measurement of an optical measurement method. The optical angle measurement methods commonly used at present mainly include the following methods:
a measurement method based on combination of auto-collimation and moire fringes (Denglixin, Yang Jiankun, Daikan, etc.. A three-dimensional angle measurement method of moire fringe technology researches [ J ] optical and photoelectric technology, 2010,08(3): 39-41.). The method combines the auto-collimation angle measuring principle and the Moire fringe angle measuring principle, utilizes the auto-collimation principle to measure the yaw angle and the pitch angle of the reflector, and utilizes the Moire fringe angle measuring principle to measure the rotation angle. Although the method can realize the simultaneous three-dimensional angle measurement, in order to realize the measurement of the rotation angle, the focal length of the collimating lens cannot be too large, so that the measurement resolution of the yaw angle and the pitch angle is limited, the size of a light spot acquired by the CCD is large, the measurement range of the yaw angle and the pitch angle is limited, and in addition, as the working distance is increased, the energy of the light beam is dispersed, the contrast of the stripes is reduced, and the working distance is limited.
The method combines the principle of auto-collimation and beam deformation. For example: chinese patent No. CN103925890A discloses a "three-dimensional angle measuring system based on beam distortion". The method can measure the yaw angle and the pitch angle according to the light spot position of a CCD detector by utilizing the auto-collimation principle; the light beam is distorted by the cylindrical lens and the special tetrahedral reflector, and the rotation angle can be measured according to the change of the spot shape of the CCD detector. This method requires a very high optical performance of the system because the rotation angle is measured by measuring the deformation of the image. Therefore, the processing precision and the installation precision of the optical device limit the measurement precision of the system, and meanwhile, the imaging is incomplete due to the aberration of the system, and the measurement error of the system is large.
Based on a multi-interferometer angle measurement method (L i X, Ito S, Gao W.Measurement of six-dimension-of-free planar movement by using a multi-probe surface encoder [ J ]. OpticalEngineering,2014,53(12):122405.) the method measures the yaw angle and the pitch angle of a target by using the ratio of the optical path difference of different light beams to the distance of the corresponding light beam, and measures the rotation angle by measuring the ratio of the position difference of the different light beams in the vertical direction of a photoelectric detector to the distance between the corresponding light beams.
Based on the reflection grating auto-collimation goniometry (Gao W, Saito Y, Muto H, et al. A three-axis autocollimator for detection of angular errors of a precision stage [ J ]. CIRP Annals-Manufacturing Technology,2011,60(1):515 and 518.). The method measures the angle change value of the grating by measuring the variation of the zero-order, positive and negative first-order diffraction beam propagation directions of the reflection grating along with the three-dimensional angle change of the reflection grating. The method can realize three-dimensional angle measurement, but the method cannot eliminate the angle drift of a light source and the influence of the environment on the angle measurement, meanwhile, the method is not suitable for long-working distance measurement due to the existence of diffraction angles, and the measurement ranges of the pitch angle and the rotation angle are mutually restricted due to the measurement principle.
Disclosure of Invention
The invention aims to overcome the defects of the existing method and device, and provides a common-path following type high-precision three-dimensional angle measuring method and device based on a grating for achieving and achieving the purpose of high-precision three-dimensional angle measurement.
The purpose of the invention is realized as follows: the common-path following type high-precision three-dimensional angle measuring method based on the grating comprises the following steps:
①, forming collimated light beams by the light beams emitted by the laser light source after passing through the collimating lens and emitting the collimated light beams;
② and ① pass through the one-dimensional plane transmission grating to generate a positive first-order diffraction beam, a negative first-order diffraction beam and a zero-order diffraction beam;
③ and ②, the positive first-order diffracted light beams and the negative first-order diffracted light beams pass through a group of polarization beam splitting lens groups with mutually vertical diagonals to obtain a group of emergent light beams parallel to the positive first-order diffracted light beams and the negative first-order diffracted light beams;
④ and ③, after the emergent light beams parallel to the positive first-order diffracted light beams and the negative first-order diffracted light beams pass through the one-dimensional plane transmission grating again, a group of diffracted light beams parallel to the optical axis is obtained;
the zero-order diffracted light beams in ⑤ and ② are vertically incident to the one-dimensional plane reflection grating after passing through a 1/4 wave plate to generate a positive first-order diffracted light beam and a negative first-order diffracted light beam, and the positive first-order diffracted light beam and the negative first-order diffracted light beam are incident to the one-dimensional plane transmission grating in ② to obtain a group of emergent light beams parallel to the optical axis;
⑥, adjusting the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating to enable the group of diffracted beams parallel to the optical axis in ④ and the group of emergent beams parallel to the optical axis in ⑤ to be transmitted along a common light path respectively to form two groups of common light path beams;
⑦ and ⑥ to obtain four paths of beams to be detected;
⑧ and ⑦, respectively forming a light spot to be detected by focusing the four light beams to be detected through a focusing lens A, a focusing lens B, a focusing lens C and a focusing lens D, and simultaneously detecting the position information of the light spot to be detected by using a photoelectric detector A, a photoelectric detector B, a photoelectric detector C and a photoelectric detector D;
⑨, when the three-dimensional angle generating device generates three-dimensional angle change, the one-dimensional plane reflection grating to be measured generates corresponding three-dimensional angle change, the photoelectric detector is used for detecting the position change information of the light spot to be detected, the obtained light spot position change information is sent to the computer after being processed by the signal processing circuit, and the three-dimensional angle change of the one-dimensional plane reflection grating is obtained through calculation;
the yaw angle α, the pitch angle β and the rotation angle γ of the one-dimensional plane reflection grating to be measured are respectively obtained according to the following formulas:
in the formula: Δ dC-x、ΔdD-xThe variation amounts of the light spot position information detected by the photoelectric detector C and the photoelectric detector D in two adjacent sampling periods in the horizontal direction are respectively; Δ dA-y、ΔdB-y、ΔdC-y、ΔdD-yThe positions of light spots detected by the photoelectric detector A, the photoelectric detector B, the photoelectric detector C and the photoelectric detector D in two adjacent sampling periods respectivelyThe amount of change in the vertical direction of the information; f is the focal length of the focusing lens A, the focusing lens B, the focusing lens C and the focusing lens D; sin phi is the ratio of the wavelength of the laser to the grating constant of the one-dimensional plane transmission grating;
⑩, controlling a rotation angle compensation mechanism composed of the one-dimensional plane transmission grating, the polarizing beam splitter and the one-dimensional angle generating device to rotate a certain angle through piezoelectric ceramics, wherein the angle is the rotation angle information of the one-dimensional plane reflection grating obtained through ⑨, and the rotation angle theta of the rotation angle compensation mechanism is obtained through the following formula:
the structure of the common-path following type high-precision three-dimensional angle measuring device based on the grating is as follows: the laser, the collimating lens and the one-dimensional plane transmission grating are sequentially arranged along the propagation direction of the light ray a; the transmission surface of the one-dimensional plane transmission grating is vertical to the incident beam; the polarization spectroscope A and the polarization spectroscope B are arranged on the rear side of the one-dimensional plane transmission grating, the diagonal lines of the polarization spectroscope A and the polarization spectroscope B are mutually vertical, and the included angle between the polarization spectroscope A and the optical axis of the laser is 45 degrees; the positive first-order diffracted light beam c sequentially passes through the polarization beam splitter A and the polarization beam splitter B and then is emitted, and an emitted light beam g is parallel to the positive first-order diffracted light beam c; the negative first-order diffracted light beam d sequentially passes through the polarization beam splitter B and the polarization beam splitter A and then is emitted, and the obtained emitted light beam h is parallel to the negative first-order diffracted light beam d; the zero-order diffraction light beam B generated by the one-dimensional plane transmission grating is vertically incident to the one-dimensional plane reflection grating through an 1/4 wave plate, a positive first-order diffraction light beam e and a negative first-order diffraction light beam f generated by diffraction are respectively transmitted through the polarization spectroscope A and the polarization spectroscope B, and the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating is adjusted to ensure that the positive first-order diffraction light beam e and the negative first-order diffraction light beam f are respectively transmitted with an emergent light beam h and an emergent light beam g through the polarization spectroscope group in a light path sharing way; two groups of common-path light beams generate common-path diffracted light beams i and j and common-path diffracted light beams k and l after passing through the one-dimensional plane transmission grating; two paths of light beams generated after the common-path diffracted light beams i and j are split by the polarizing beam splitter C are focused by the focusing lens A and the focusing lens B respectively to form a light spot to be detected on a focal plane; two paths of light beams generated after the common-path diffracted light beams k and l are split by the polarizing beam splitter D are focused by the focusing lens C and the focusing lens D respectively to form a light spot to be detected on a focal plane; the photoelectric detector A and the photoelectric detector B are respectively arranged at the focal planes of the focusing lens A and the focusing lens B, and the photoelectric detector C and the photoelectric detector D are respectively arranged at the focal planes of the focusing lens C and the focusing lens D; the photoelectric detector A, the photoelectric detector B, the photoelectric detector C and the photoelectric detector D are respectively connected with a computer; 1/4 wave plate, one-dimensional plane reflection grating and three-dimensional angle generating device are rigidly connected; the one-dimensional plane transmission grating, the polarization spectroscope A and the polarization spectroscope B are rigidly connected with the one-dimensional angle generating device; the grating constants of the one-dimensional plane transmission grating and the one-dimensional plane reflection grating are the same;
the laser, the collimating lens, the one-dimensional plane transmission grating, the 1/4 wave plate, the one-dimensional plane reflection grating, the three-dimensional angle generating device, the focusing lens B, the focusing lens D, the photoelectric detector B, the photoelectric detector D and the computer form a measuring beam obtaining and measuring system;
the laser, the collimating lens, the one-dimensional plane transmission grating, the polarizing beam splitter A, the polarizing beam splitter B, the polarizing beam splitter C, the polarizing beam splitter D, the photoelectric detector A, the photoelectric detector C, the focusing lens A, the focusing lens C and the computer form a reference beam obtaining, measuring and rotation angle compensating system.
The invention has the advantages that:
(1) the one-dimensional plane reflection grating is used as a device to be measured, three-dimensional angle measurement can be simultaneously realized, the measurement principle is simple, and the structure is compact.
(2) The light beam to be measured is divided into a measuring light beam and a reference light beam by adopting a common light path measuring principle, the direction variation of the measuring light beam comprises the angle variation value of the one-dimensional plane reflection grating and the angle drift value introduced by the instability of the light source in the light beam propagation process, and the direction variation of the reference light beam comprises the angle drift value introduced by the instability of the light source and in the light beam propagation process. By analyzing the measuring light beams and the corresponding reference light beams, the influence of angle drift values caused by unstable light sources and in the light beam transmission process on the angle to be measured can be eliminated, the accurate angle change value of the reflection grating is obtained, and the measurement precision of micro-angle measurement and the stability of long-time measurement are improved. Meanwhile, the device enables the original diffraction beam with the diffraction angle to be changed into a beam parallel to the collimated beam emitted by the laser, the detection unit is more compact, the working distance is increased, and the device is more beneficial to practical application.
(3) By adopting a following type measuring mode, closed-loop control and a flexible mechanical deflection system, the measurement range of the rotation angle is greatly improved while the three-dimensional angle measurement with high precision and high stability is realized, and the limitation of the change of the rotation angle on the measurement range of the pitch angle is eliminated.
Drawings
FIG. 1 is a schematic structural diagram of a common-path following type high-precision three-dimensional angle measuring device based on a grating
FIG. 2 is a schematic view of a measuring beam measurement system
FIG. 3 is a schematic view of a reference beam measurement system
In the figure, the number of parts indicates that 1, a laser 2, a collimating lens 3, a one-dimensional plane transmission grating 4, a polarization beam splitter A5, 1/4 wave plates 6, a one-dimensional plane reflection grating 7, a three-dimensional angle generating device 8, a polarization beam splitter B9, a one-dimensional angle generating device 10, a polarization beam splitter D11, a photoelectric detector C12, a focusing lens C13, a focusing lens D14, a photoelectric detector D15, a polarization beam splitter C16, a photoelectric detector A17, a focusing lens A18, a focusing lens B19, a photoelectric detector B20 and a computer are connected in sequence
Detailed Description
The following detailed description of specific embodiments of the invention refers to the accompanying drawings.
The common-path following type high-precision three-dimensional angle measuring method based on the grating comprises the following steps of:
①, forming collimated light beams by the light beams emitted by the laser light source after passing through the collimating lens and emitting the collimated light beams;
② and ① pass through the one-dimensional plane transmission grating to generate a positive first-order diffraction beam, a negative first-order diffraction beam and a zero-order diffraction beam;
③ and ②, the positive first-order diffracted light beams and the negative first-order diffracted light beams pass through a group of polarization beam splitting lens groups with mutually vertical diagonals to obtain a group of emergent light beams parallel to the positive first-order diffracted light beams and the negative first-order diffracted light beams;
④ and ③, after the emergent light beams parallel to the positive first-order diffracted light beams and the negative first-order diffracted light beams pass through the one-dimensional plane transmission grating again, a group of diffracted light beams parallel to the optical axis is obtained;
the zero-order diffracted light beams in ⑤ and ② are vertically incident to the one-dimensional plane reflection grating after passing through a 1/4 wave plate to generate a positive first-order diffracted light beam and a negative first-order diffracted light beam, and the positive first-order diffracted light beam and the negative first-order diffracted light beam are incident to the one-dimensional plane transmission grating in ② to obtain a group of emergent light beams parallel to the optical axis;
⑥, adjusting the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating to enable the group of diffracted beams parallel to the optical axis in ④ and the group of emergent beams parallel to the optical axis in ⑤ to be transmitted along a common light path respectively to form two groups of common light path beams;
⑦ and ⑥ to obtain four paths of beams to be detected;
⑧ and ⑦, respectively forming a light spot to be detected by focusing the four light beams to be detected through a focusing lens A, a focusing lens B, a focusing lens C and a focusing lens D, and simultaneously detecting the position information of the light spot to be detected by using a photoelectric detector A, a photoelectric detector B, a photoelectric detector C and a photoelectric detector D;
⑨, when the three-dimensional angle generating device generates three-dimensional angle change, the one-dimensional plane reflection grating to be measured generates corresponding three-dimensional angle change, the photoelectric detector is used for detecting the position change information of the light spot to be detected, the obtained light spot position change information is sent to the computer after being processed by the signal processing circuit, and the three-dimensional angle change of the one-dimensional plane reflection grating is obtained through calculation;
the yaw angle α, the pitch angle β and the rotation angle γ of the one-dimensional plane reflection grating to be measured are respectively obtained according to the following formulas:
in the formula: Δ dC-x、ΔdD-xThe variation amounts of the light spot position information detected by the photoelectric detector C and the photoelectric detector D in two adjacent sampling periods in the horizontal direction are respectively; Δ dA-y、ΔdB-y、ΔdC-y、ΔdD-yThe variation amounts of the light spot position information detected by the photoelectric detector A, the photoelectric detector B, the photoelectric detector C and the photoelectric detector D in the vertical direction in two adjacent sampling periods are respectively; f is the focal length of the focusing lens A, the focusing lens B, the focusing lens C and the focusing lens D; sin phi is the ratio of the wavelength of the laser to the grating constant of the one-dimensional plane transmission grating;
⑩, controlling a rotation angle compensation mechanism composed of the one-dimensional plane transmission grating, the polarizing beam splitter and the one-dimensional angle generating device to rotate a certain angle through piezoelectric ceramics, wherein the angle is the rotation angle information of the one-dimensional plane reflection grating obtained through ⑨, and the rotation angle of the rotation angle compensation mechanism is obtained through the following formula:
the structure of the common-path following type high-precision three-dimensional angle measuring device based on the grating is as follows: the laser 1, the collimating lens 2 and the one-dimensional plane transmission grating 3 are sequentially arranged along the propagation direction of the light ray a; the transmission surface of the one-dimensional plane transmission grating 3 is vertical to the incident beam; the polarization beam splitter A4 and the polarization beam splitter B8 are arranged at the rear side of the one-dimensional plane transmission grating 3, the diagonal lines of the polarization beam splitter A4 and the polarization beam splitter B8 are mutually vertical, and an included angle between the polarization beam splitter A4 and the optical axis of the laser 1 is 45 degrees; the positive first-order diffracted light beam c sequentially passes through the polarizing beam splitter A4 and the polarizing beam splitter B8 and then is emitted, and an emitted light beam g is obtained and is parallel to the positive first-order diffracted light beam c; the negative first-order diffracted light beam d sequentially passes through the polarizing beam splitter B8 and the polarizing beam splitter A4 and then is emitted, and the obtained emitted light beam h is parallel to the negative first-order diffracted light beam d; the zero-order diffracted light beam B generated by the one-dimensional plane transmission grating 3 is vertically incident to the one-dimensional plane reflection grating 6 through an 1/4 wave plate 5, a positive first-order diffracted light beam e and a negative first-order diffracted light beam f generated by diffraction are respectively transmitted through a polarization spectroscope A4 and a polarization spectroscope B8, and the distance between the one-dimensional plane reflection grating 6 and the one-dimensional plane transmission grating 3 is adjusted to ensure that the positive first-order diffracted light beam e and the negative first-order diffracted light beam f are respectively transmitted with an emergent light beam h and an emergent light beam g through a polarization spectroscope; two groups of light beams with the common light path generate light beams i and j and light beams k and l after passing through the one-dimensional plane transmission grating 3; two paths of light beams generated after the common-path diffracted light beams i and j are split by the polarizing beam splitter C15 are focused by a focusing lens A17 and a focusing lens B18 respectively to form a light spot to be detected on a focal plane; two paths of light beams generated after the common-path diffracted light beams k and l are split by the polarizing beam splitter D10 are focused by a focusing lens C12 and a focusing lens D13 respectively to form a light spot to be detected on a focal plane; a photodetector a16 and a photodetector B19 are mounted at the focal plane of the focusing lens a17 and the focusing lens B18, respectively, and a photodetector C11 and a photodetector D14 are mounted at the focal plane of the focusing lens C12 and the focusing lens D13, respectively; the photoelectric detector A16, the photoelectric detector B19, the photoelectric detector C11 and the photoelectric detector D14 are respectively connected with the computer 20; 1/4 wave plate 5, one-dimensional plane reflection grating 6 and three-dimensional angle generating device 7 are rigidly connected; the one-dimensional plane transmission grating 3, the polarization beam splitter A4 and the polarization beam splitter B8 are rigidly connected with the one-dimensional angle generating device 9; the grating constant of the one-dimensional plane transmission grating 3 is the same as that of the one-dimensional plane reflection grating 6;
the laser 1, the collimating lens 2, the one-dimensional plane transmission grating 3, the 1/4 wave plate 5, the one-dimensional plane reflection grating 6, the three-dimensional angle generating device 7, the focusing lens B18, the focusing lens D13, the photoelectric detector B19, the photoelectric detector D14 and the computer 20 form a measuring beam obtaining and measuring system;
the laser 1, the collimating lens 2, the one-dimensional plane transmission grating 3, the polarizing beam splitter A4, the polarizing beam splitter B8, the polarizing beam splitter C15, the polarizing beam splitter D10, the photodetector A16, the photodetector C11, the focusing lens A17, the focusing lens C12 and the computer 20 form a reference beam obtaining, measuring and rotation angle compensating system.
The working process of the measuring beam obtaining and measuring system is described below with reference to fig. 1 and 2: the light beam emitted by the laser 1 is collimated by the collimating lens 2 and then becomes a collimated light beam a, the zero-order diffracted light beam B generated after the collimated light beam a vertically enters the one-dimensional plane transmission grating 3 is continuously and vertically entered into the one-dimensional plane reflection grating 6, the one-dimensional plane reflection grating 6 diffracts the collimated light beam B to generate a positive first-order diffracted light beam e and a negative first-order diffracted light beam f, the positive first-order diffracted light beam e and the negative first-order diffracted light beam f are again entered into the one-dimensional plane transmission grating 3 to respectively generate a diffracted light beam i and a diffracted light beam k which are parallel to the collimated light beam a, the diffracted light beam i and the diffracted light beam k are respectively focused by the focusing, and the three-dimensional angle change information of the one-dimensional plane transmission grating and various light beam drift disturbance signals are contained in the measurement signals which are respectively received by the photoelectric detector D14 and the photoelectric detector B19.
As shown in fig. 2, when the one-dimensional plane reflection grating 6 changes in three-dimensional angle, the positive first-order diffracted beam e and the negative first-order diffracted beam f become a diffracted beam e1 and a diffracted beam f1, respectively, and the diffracted beam e1 and the diffracted beam f1 become a diffracted beam i1 and a diffracted beam k1 after being subjected to the action of the one-dimensional plane transmission grating 3. Since the propagation direction change values between the diffracted beams i and i1 and between the diffracted beams k and k1 change with the three-dimensional angle change of the one-dimensional plane reflection grating 6, the three-dimensional angle change value of the one-dimensional plane reflection grating 6 is calculated by measuring the change value of the beam direction.
The operation of the reference beam acquisition, measurement and rotation angle compensation system is described below in conjunction with fig. 1 and 3: the light beam emitted by the laser 1 is collimated by the collimating lens 2 to become a collimated light beam a, the collimated light beam a vertically enters the one-dimensional plane transmission grating 3 to generate a positive first-order diffracted light beam c and a negative first-order diffracted light beam d, the positive first-order diffracted light beam c sequentially passes through the polarization beam splitter A4 and the polarization beam splitter B8 and then enters the one-dimensional plane transmission grating 3 again to obtain a diffracted light beam j parallel to the collimated light beam a, the negative first-order diffracted light beam d sequentially passes through the polarization beam splitter A8 and the polarization beam splitter B4 and then enters the one-dimensional plane transmission grating 3 again to obtain a diffracted light beam l parallel to the collimated light beam a, the distance between the one-dimensional plane transmission grating 3 and the one-dimensional plane reflection grating 6 is adjusted, so that the diffracted light beam j and the diffracted light beam i, the diffracted light beam l and the diffracted light beam k, the diffracted light beams j and l are reference light beams, the diffracted light beams j and l are respectively reflected by the polarization beam splitter D15 and the polarization beam splitter C10, focused by the focusing lens C12 and the focusing lens A17, and respectively received by the photoelectric detector C11 and the photoelectric detector A16 to form reference signals, wherein the reference signals comprise various light beam drift disturbance signals;
the rotation angle compensation mechanism consists of a one-dimensional plane transmission grating 3, a one-dimensional angle generating device 9, a polarization beam splitter A4 and a polarization beam splitter B8. Wherein the one-dimensional angle generating device 9 is mainly composed of a controller and a one-dimensional angle deflecting device. The controller controls the one-dimensional angle deflection device to rotate around the direction perpendicular to the collimated light beam a, and an output signal of the controller is given by the following formula:
Claims (2)
1. a common-path following type high-precision three-dimensional angle measurement method based on gratings is characterized by comprising the following steps: the method comprises the following steps:
①, forming collimated light beams by the light beams emitted by the laser light source after passing through the collimating lens and emitting the collimated light beams;
② and ① pass through the one-dimensional plane transmission grating to generate a positive first-order diffraction beam, a negative first-order diffraction beam and a zero-order diffraction beam;
③ and ②, the positive first-order diffracted light beams and the negative first-order diffracted light beams pass through a group of polarization beam splitting lens groups with mutually vertical diagonals to obtain a group of emergent light beams parallel to the positive first-order diffracted light beams and the negative first-order diffracted light beams;
④ and ③, after the emergent light beams parallel to the positive first-order diffracted light beams and the negative first-order diffracted light beams pass through the one-dimensional plane transmission grating again, a group of diffracted light beams parallel to the optical axis is obtained;
the zero-order diffracted light beams in ⑤ and ② are vertically incident to the one-dimensional plane reflection grating after passing through a 1/4 wave plate to generate a positive first-order diffracted light beam and a negative first-order diffracted light beam, and the positive first-order diffracted light beam and the negative first-order diffracted light beam are incident to the one-dimensional plane transmission grating in ② to obtain a group of emergent light beams parallel to the optical axis;
⑥, adjusting the distance between the one-dimensional plane reflection grating and the one-dimensional plane transmission grating to enable the group of diffracted beams parallel to the optical axis in ④ and the group of emergent beams parallel to the optical axis in ⑤ to be transmitted along a common light path respectively to form two groups of common light path beams;
⑦ and ⑥ to obtain four paths of beams to be detected;
⑧ and ⑦, respectively forming a light spot to be detected by focusing the four light beams to be detected through a focusing lens A, a focusing lens B, a focusing lens C and a focusing lens D, and simultaneously detecting the position information of the light spot to be detected by using a photoelectric detector A, a photoelectric detector B, a photoelectric detector C and a photoelectric detector D;
⑨, when the three-dimensional angle generating device generates three-dimensional angle change, the one-dimensional plane reflection grating to be measured generates corresponding three-dimensional angle change, the photoelectric detector is used for detecting the position change information of the light spot to be detected, the obtained light spot position change information is sent to the computer after being processed by the signal processing circuit, and the three-dimensional angle change of the one-dimensional plane reflection grating is obtained through calculation;
the yaw angle α, the pitch angle β and the rotation angle γ of the one-dimensional plane reflection grating to be measured are respectively obtained according to the following formulas:
in the formula: Δ dC-x、ΔdD-xThe variation amounts of the light spot position information detected by the photoelectric detector C and the photoelectric detector D in two adjacent sampling periods in the horizontal direction are respectively; Δ dA-y、ΔdB-y、ΔdC-y、ΔdD-yThe variation amounts of the light spot position information detected by the photoelectric detector A, the photoelectric detector B, the photoelectric detector C and the photoelectric detector D in the vertical direction in two adjacent sampling periods are respectively; f is the focal length of the focusing lens A, the focusing lens B, the focusing lens C and the focusing lens D; sin phi is the ratio of the wavelength of the laser to the grating constant of the one-dimensional plane transmission grating;
⑩, controlling a rotation angle compensation mechanism composed of the one-dimensional plane transmission grating, the polarizing beam splitter and the one-dimensional angle generating device to rotate a certain angle through piezoelectric ceramics, wherein the angle is the rotation angle information of the one-dimensional plane reflection grating obtained through ⑨, and the rotation angle theta of the rotation angle compensation mechanism is obtained through the following formula:
2. the utility model provides a three-dimensional angle measuring device of common light path following formula high accuracy based on grating which characterized in that: the laser (1), the collimating lens (2) and the one-dimensional plane transmission grating (3) are sequentially arranged along the propagation direction of light rays a; the transmission surface of the one-dimensional plane transmission grating (3) is vertical to the incident beam; the polarization spectroscope A (4) and the polarization spectroscope B (8) are arranged on the rear side of the one-dimensional plane transmission grating (3), the diagonal lines of the polarization spectroscope A (4) and the polarization spectroscope B (8) are mutually vertical, and the included angle between the polarization spectroscope A (4) and the optical axis of the laser (1) is 45 degrees; the positive first-order diffracted light beam c sequentially passes through the polarization spectroscope A (4) and the polarization spectroscope B (8) and then is emitted, and an emitted light beam g is obtained and is parallel to the positive first-order diffracted light beam c; the negative first-order diffracted light beam d sequentially passes through the polarization spectroscope B (8) and the polarization spectroscope A (4) and then is emitted, and the obtained emergent light beam h is parallel to the negative first-order diffracted light beam d; the zero-order diffracted light beam B generated by the one-dimensional plane transmission grating (3) is vertically incident to the one-dimensional plane reflection grating (6) through an 1/4 wave plate (5), a positive first-order diffracted light beam e and a negative first-order diffracted light beam f generated by diffraction are respectively transmitted through a polarization spectroscope A (4) and a polarization spectroscope B (8), and the distance between the one-dimensional plane reflection grating (6) and the one-dimensional plane transmission grating (3) is adjusted to ensure that the positive first-order diffracted light beam e and the negative first-order diffracted light beam f are respectively transmitted with an emergent light beam h and an emergent light beam g through a polarization spectroscope group in a light path sharing way; two groups of light beams with the common light path generate light beams i and j and light beams k and l after passing through the one-dimensional plane transmission grating (3); two paths of light beams generated after the common-path diffracted light beams i and j are split by the polarizing beam splitter C (15) are focused by a focusing lens A (17) and a focusing lens B (18) respectively to form a light spot to be detected on a focal plane; two paths of light beams generated after the common-path diffracted light beams k and l are split by the polarizing beam splitter D (10) are focused by a focusing lens C (12) and a focusing lens D (13) respectively to form a light spot to be detected on a focal plane; a photodetector a (16) and a photodetector B (19) are respectively mounted at the focal planes of the focusing lens a (17) and the focusing lens B (18), and a photodetector C (11) and a photodetector D (14) are respectively mounted at the focal planes of the focusing lens C (12) and the focusing lens D (13); the photoelectric detector A (16), the photoelectric detector B (19), the photoelectric detector C (11) and the photoelectric detector D (14) are respectively connected with a computer (20); 1/4 wave plate (5), one-dimensional plane reflection grating (6) and three-dimensional angle generating device (7) are rigidly connected; the one-dimensional plane transmission grating (3), the polarization spectroscope A (4) and the polarization spectroscope B (8) are rigidly connected with a one-dimensional angle generating device (9); the grating constants of the one-dimensional plane transmission grating (3) and the one-dimensional plane reflection grating (6) are the same;
the laser device (1), the collimating lens (2), the one-dimensional plane transmission grating (3), the 1/4 wave plate (5), the one-dimensional plane reflection grating (6), the three-dimensional angle generating device (7), the focusing lens B (18), the focusing lens D (13), the photoelectric detector B (19), the photoelectric detector D (14) and the computer (20) form a measuring beam obtaining and measuring system;
the device comprises a laser (1), a collimating lens (2), a one-dimensional plane transmission grating (3), a polarizing beam splitter A (4), a polarizing beam splitter B (8), a polarizing beam splitter C (15), a polarizing beam splitter D (10), a photoelectric detector A (16), a photoelectric detector C (11), a focusing lens A (17), a focusing lens C (12) and a computer (20), which form a reference beam obtaining, measuring and rotation angle compensation system.
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