CN101968341A - Industrial robot zero-position self-calibration method and device - Google Patents
Industrial robot zero-position self-calibration method and device Download PDFInfo
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Abstract
The invention discloses a novel industrial robot zero-position self-calibration method and a novel industrial robot zero-position self-calibration device. In the method, a PSD device is optionally arranged in a robot-reachable working space first, and then a central point projected on the PSD is automatically positioned by depending on a beam of laser passing through the tail end of the robot so as to realize a calibration task of the robot. Accurate positioning and control of the robot is realized through high-precision PSD feedback; the position of the PSD central point is calculated by a wire-based method; and the zero error of the robot is obtained through an iterative algorithm by establishing a target function based on point constraint. The method does not need the position of the PSD central point or actual physical contact measurement, and has the obvious advantages of low cost, automation, portability, high efficiency, high precision and the like.
Description
Technical field
The invention belongs to the calibration technique of industrial robot, particularly a kind of self-calibrating method and device thereof of 6DOF industrial robot joint zero-bit.
Background technology
Along with the expansion of industrial robot range of application and the needs of complex task, the bearing accuracy of industrial robot is more and more important.Industrial robot has high repeatable accuracy (0.1mm or higher) at present, however (definitely) bearing accuracy but very low (reaching 1cm or poorer), and the bearing accuracy problem has seriously restricted the application power and the range of application of industrial robot.Although cause the not high factor of robot bearing accuracy to have a lot, as the mechanical deformation of gear error, thermal expansion and robot rod member, topmost factor comes from the parameter error of robot kinematics's model.The robot calibration technique is the most effectual way of eliminating these parameter errors and then improving the robot bearing accuracy, therefore, becomes one of hot issue of robot research.
The zero-bit problem of so-called robot is exactly the deviation that joint angle reference point and actual robot joint angles in the kinematics model of robot feeds back the reference point of code-disc.The subtle change of robot zero-bit is because the amplification of rod member length etc. causes robot end's position to produce very large deviation.It is generally acknowledged null position problem (the W.S.Newman and D.W.Osborn that causes industrial robot bearing accuracy problem on the low side 90% to come from robot, " A new method for kinematic parameter calibration via laser line; " in Proc.IEEE Int.Conf.Robot.Autom., 1993, vol.2, pp.160-165).Robot Zero calibration problem does not also have good solution, the present method of the more use weight of factory, but exist equipment to carry difficulty, complicated operation and problem such as be subjected to that operating personnel influence.
More than two decades comes, and demarcates the more domestic and international scholars in field in robot and has obtained the achievement in research that attracts people's attention.Conclude and get up to mainly contain two robotlike's scaling methods, wherein class methods need the position or the attitude of the accurate robot measurement end of high-precision measuring equipment.Three-coordinate measuring method (Coordinate Measurement Machines) (M.R.Driels such as classics, L.W.Swayze, and L.S.Potter, " Full-pose calibration of a robot manipulator using a coordinate measuring machine; " Int.J.Adv.Manuf.Techno., vol.8, no.1, pp.34-41,1993) and method (M.Vincze such as angle subdivision type Laser Tracking test and the test of spherical coordinates type Laser Tracking, J.P.Prenninger, and H.Gander, " A laser tracking system to measure position and orientation of robot end effectors under motion; " Int.J.Robot.Res., vol.13, pp.305-314,1994), the optical theodolite test macro, test macro (B.Preising, T.C.Hsia.Robot Performance Measurement and Calibration Using a 3D Computer Vision System.Proceeding of the 1991 IEEE International Conference on Robotics and Automation Sacramen to California.1991:2079-2084) based on twin camera.But these method three coordinate measuring machines and Laser Tracking tester equipment are very expensive, and Installation and Debugging and operation more complicated mainly are suitable for manufacturing enterprise of robot laboratory applications, and operating process depends on operating personnel's level and loses time very much.The problem that not only exists binocular camera itself to demarcate based on the visible sensation method of stereo camera, and visible sensation method since the contradiction of visual field and resolving power be difficult to obtain than higher measuring accuracy.
Thereby another kind of method is to apply some constraints the robot end to form the kinematics endless chain.Zhuang and Ikits etc. apply a plurality of planes or a plane restriction (H.Zhuang to the robot end, S.H.Motaghedi, and Z.S.Roth, " Robot calibration with planar constraints, " in Proc.IEEE Int.Conf.Robot.Autom., Detroit, MI, 1999, pp.805-810.), these manual manipulation methods are subject to accurate location and the not high problem of efficient.(W.S.Newman and D.W.Osborn such as Newman, " A new method for kinematic parameter calibration via laser line; " in Proc.IEEE Int.Conf.Robot.Autom., 1993, vol.2 pp.160-165) proposes a kind of method of following the tracks of based on laser rays.The characteristics of this method are that certain point of constrained robot's end moves along a branch of static any laser rays, but fail to provide feasible, accurate, the automated method of following the tracks of laser rays.Be fit to the robot working site, be easy to carry and low-cost robot Zero positioning method and equipment have become the problem that robot application enterprise presses for solution.
Summary of the invention
The objective of the invention is to propose the virtual point constrained robot's self-calibrating method and the device thereof of a kind of position-based Sensitive Apparatus (PSD) and laser, to solve bottleneck problems such as existing method apparatus expensive, fitting operation complexity or bearing accuracy are low.
The technical solution that realizes the object of the invention is: a kind of industrial robot zero-bit self-calibrating method, and step is as follows:
A. set up the constraint of space virtual point, a position sensitive detector PSD device is placed on industrial robot arbitrarily can reaches work space, the central point of PSD device is an obligatory point;
B. locate based on the accurate robot of laser and PSD, the industrial machine robot end carry laser instrument with the pose of 30～60 ° of Right deviations as position 1, laser beam is projected the PSD surface, PSD accurately measures the two-dimensional position of hot spot on the PSD surface as feedback transducer, by robot closed loop servo location, realize that robot carries the effective surface center position that laser beam spot accurately is positioned at PSD based on PSD high precision position feedback;
C. after accurately locating, industrial control computer reads the angle value of 6 joint of robot by network communication or industrial robot communication interface from industrial robot controller, and each angle value reads and gets the joint of robot angle of its mean value as position 1 more than twice;
D. the industrial machine robot end carries laser instrument position-based 1 to anticlockwise, the angle of rotation is that the scope at inclination angle, the left and right sides is divided by number of revolutions, maximum left-leaning 30～60 °, the pose of rotation is as position 2 for the first time, and repeating step b and c obtain 6 joint angles of robot of position 2;
E. rotate 6 joint angles of robot that obtain position i successively, up to position N, N-1 is a number of revolutions;
F. obtain each joint angles value of robot of N position according to above step,, obtain the robot end position and the attitude of N position then based on robot kinematics's error model of setting up;
G. calculate the locus of obligatory point, method based on the line intersection point, promptly physically any two laser beam intersect at the central point on PSD surface, robot end position and attitude according to N the position that obtains, set up N laser beam geometric equation, the mid point of wherein any two space line Equation for Calculating intersection points or perpendicular bisector obtains the locus of obligatory point;
H. the optimization aim function obtains robot Zero positioning parameter, sets up objective function with a constraint, by iterative algorithm searching machine people calibrating parameters, converges on a bit up to the intersection point of any two space line Equation for Calculating.
A kind of device of realizing above-mentioned industrial robot zero-bit self-calibrating method, comprise laser instrument, coupling arrangement, position sensitive detector PSD, signal processing circuit, industrial control computer, data collecting card, described laser instrument is fixedly mounted on the industrial machine robot end by coupling arrangement, position sensitive detector PSD and signal processing circuit thereof, be collectively referred to as the PSD device, the PSD device is placed on reached at the work space of industrial robot arbitrarily, and the central point of PSD device is an obligatory point; Data collecting card adopts wireless communication mode and industrial control computer communication; The industrial machine human body carries laser instrument by the robot end laser facula is incident upon the PSD surface, hot spot sends industrial control computer in the exact position of PSD to by signal processing circuit and data collecting card, conversely, industrial control computer says the word to move to robot controller control robot body based on this position feedback and drives laser instrument hot spot is accurately navigated to the centre of surface point position of PSD, realizes that physically virtual point retrains.
The present invention compared with prior art, its remarkable advantage: (1) and present robot scaling method essential different only need to be the space single-point constraint, and do not need to know the locus of this point, and there is not the physics contact, therefore this method is " virtual point constraint ", be the precision height of measuring like this, be not subjected to the influence of operating personnel's level.(2) locate automatically based on the position realization robot of PSD feedback laser bundle hot spot, under the different poses of robot, realize the demarcation task of robot in the Automatic Positioning Control process, do not need manual intervention, the automaticity height, simple to operate.(3) not only solve the robot Zero positioning problem of industry spot widespread demand, can also be used for the demarcation of robot total movement mathematic(al) parameter.(4) be easy to developing low-cost, portable, high precision, automatic machinery people caliberating device based on this method.Because caliberating device only needs 1 semiconductor laser and 1 PSD device and signal Processing Acquisition Circuit with resolving power of 0.1um, cost is very low and precision is very high.
Below in conjunction with accompanying drawing the present invention is described in further detail.
Description of drawings
Fig. 1 is the synoptic diagram of industrial robot zero-bit of the present invention from caliberating device.
Fig. 2 is an industrial robot zero-bit self-calibrating method synoptic diagram of the present invention.
Fig. 3 is based on the location measurement method of line.
Fig. 4 is that the situation example is demarcated by robot.
Embodiment
In conjunction with Fig. 1 and Fig. 2, industrial robot zero-bit self-calibrating method of the present invention, step is as follows:
A. set up the constraint of space virtual point, a position sensitive detector PSD device is placed on industrial robot arbitrarily can reaches work space, the central point 11 of PSD device is an obligatory point;
B. locate based on the accurate robot of laser and PSD, industrial machine robot end 10 carry laser instrument 2 with the pose of 30～60 ° of Right deviations as position 1, laser beam is projected the PSD surface, PSD accurately measures the two-dimensional position of hot spot on the PSD surface as feedback transducer, by robot closed loop servo location, realize that robot carries the effective surface center position that laser beam spot accurately is positioned at PSD based on PSD high precision position feedback;
C. after accurately locating, industrial control computer 7 reads the angle value of 6 joint of robot by network communication or industrial robot communication interface from industrial robot controller 8, and each angle value reads and gets the joint of robot angle of its mean value as position 1 more than twice;
D. industrial machine robot end 10 carries laser instrument 2 position-baseds 1 to anticlockwise, the angle of rotation is that the scope at inclination angle, the left and right sides is divided by number of revolutions, maximum left-leaning 30～60 °, the pose of rotation is as position 2 for the first time, and repeating step b and c obtain 6 joint angles of robot of position 2;
E. rotate 6 joint angles of robot that obtain position i successively, up to position N, N-1 is a number of revolutions;
F. obtain each joint angles value of robot of N position according to above step,, obtain the robot end position and the attitude of N position then based on robot kinematics's error model of setting up;
G. calculate the locus of obligatory point, method based on the line intersection point, promptly physically any two laser beam intersect at the central point on PSD surface, robot end position and attitude according to N the position that obtains, set up N laser beam geometric equation, the mid point of wherein any two space line Equation for Calculating intersection points or perpendicular bisector obtains the locus of obligatory point;
H. the optimization aim function obtains robot Zero positioning parameter, sets up objective function with a constraint, by iterative algorithm searching machine people calibrating parameters, converges on a bit up to the intersection point of any two space line Equation for Calculating.
In conjunction with Fig. 1, the present invention realizes the device of above-mentioned industrial robot zero-bit self-calibrating method, comprise laser instrument 2, coupling arrangement 1, position sensitive detector PSD 4, signal processing circuit 5, industrial control computer 7, data collecting card 6, described laser instrument 2 is fixedly mounted on industrial machine robot end 10 by coupling arrangement 1, and coupling arrangement 1 guarantees installation accuracy with robot end 10 by the standard mechanical locating interface.Position sensitive detector PSD 4 and signal processing circuit 5 thereof are collectively referred to as the PSD device, and the PSD device is placed on reached at the work space of industrial robot arbitrarily, and the central point 11 of PSD device is an obligatory point; Data collecting card 6 adopts wireless communication mode and industrial control computer 7 communications; Industrial machine human body 9 carries laser instrument 2 by robot end 10 laser facula is incident upon PSD 4 surfaces, hot spot sends industrial control computer 7 in the exact position of PSD 4 to by signal processing circuit 5 and data collecting card 6, conversely, industrial control computer 7 says the word to move to robot controller 8 control robot bodies 9 based on this position feedback and drives laser instrument 2 centre of surface that hot spot accurately navigates to PSD 4 is put 11 positions, physically realizes the virtual point constraint.{ B} is a robot base coordinate sys-tem, and { E} represents robot end's coordinate system.
Above-mentioned laser instrument 2 is the accurate semiconductor lasers of adjustable focal length, power 1mW, and wavelength 670nm, the spot diameter of laser beam 3 are 2.5mm.The relation of Calibration of Laser bundle 3 and coupling arrangement 1 in advance, or do not demarcate then when demarcating the robot zero-bit, demarcate simultaneously between relation.Position sensitive detector PSD 4 adopts sectional type high precision photoelectric device, and resolution reaches 0.1um, and the effective surface diameter is 10mm, but the detection laser beam hot spot is at the two-dimensional position on PSD surface.The PSD output signal provides the two-dimensional position coordinate of laser facula on the PSD surface through signal processing circuit 5, and as the position of the accurate control robot of feedback signal, promptly the central point on PSD surface is as robot localizing objects position.Data collecting card 6 adopts wireless communication mode and industrial control computer 7 communications, can realize the wireless work of PSD device.The PSD device is by the poly-powered battery of chargeable lithium, and the power supply of realizing the PSD device is from supplying with.These measures have guaranteed the portable of PSD device and have been easy to fitting operation.
Embodiment
Adopt device of the present invention to carry out rating test on industrial robot IRB1600, concrete implementation step is as follows:
A) the PSD device is placed on the robot working space arbitrarily, sets up the constraint of space virtual point.The locus of noting this obligatory point is unknown.Position sensitive detector PSD 4 adopts sectional type high precision photoelectric device, and resolution reaches 0.1um, and the effective surface diameter is 10mm, but the detection laser beam hot spot is at the two-dimensional position on PSD surface.The PSD output signal provides the two-dimensional position coordinate of laser facula on the PSD surface through signal processing circuit 5, and as the position of the accurate control robot of feedback signal, promptly the central point on PSD surface is as robot localizing objects position.
B) locate based on the accurate robot of laser and PSD.The robot end carries laser instrument and with the pose (position 1) of 30 ° of Right deviations laser beam is projected the PSD surface, PSD accurately measures the two-dimensional position of hot spot on the PSD surface as feedback transducer, locate by the robot closed loop servo based on PSD high precision position feedback, realize that robot carries the effective surface center position that laser beam spot accurately is positioned at PSD, as shown in Figure 1, a laser instrument 2 is fixedly mounted on robot end 10 by coupling arrangement 1, industrial control computer 7 is connected with the PSD device by data collecting card 6, industrial control computer 7 is connected with robot controller 8 by network interface, and robot controller 8 is connected with industrial machine human body 9.
C) behind the accurate location, industrial control computer reads the angle value of 6 joint of robot by network communication or industrial robot communication interface (as serial ports) from industrial robot controller, and each angle value reads the joint of robot angle of averaging more than twice as position 1.System initialization is also set up and robot controller.8 communication connects, and carries out then based on the diverse location robot of PSD and laser and accurately locatees, step such as d) to g);
D) the industrial machine robot end carries laser instrument position-based 1 to anticlockwise, the angle of rotation is that the scope at inclination angle, the left and right sides is divided by number of revolutions, maximum left-leaning 30～60 °, the pose of rotation is as position 2 for the first time, repeating step b) and c) obtain 6 joint angles of robot of position 2.As shown in Figure 2, the robot end carries the pose (position 1) of laser instrument with 30 ° of Right deviations, based on the effective surface center 11 of the servo feedback locating laser of PSD bundle hot spot at PSD;
E) accurately behind the location, industrial control computer reads the angle value of 6 joint of robot by the LAN communication from robot controller, averages as the joint angles of position 1 for three times;
F) rotation obtains 6 joint angles of robot of position i (position when i is a certain number of revolutions) successively, and up to position N, N-1 is a number of revolutions.Carry laser instrument as the robot end and reduce 10 ° of poses (position 2), repeating step c with 20 ° of Right deviations) and d) obtain 6 joint angles of robot of position 2;
G) 6 joint angles of robot that successively decrease successively 10 ° and obtain position i are up to position N (N=7 here).Entire machine people's position fixing process is finished automatically, and is consuming time less than 3 minutes;
H) calibration process finishes automatically, so far obtains 6 joint angles values under 7 different machines people positions.
I) based on robot kinematics's error model of following foundation, the above 7 groups of joint data of substitution obtain robot end's position and attitude.
Industrial robot is an example with the IRB1600 of ABB, and the D-H relation that each joint of robot comprises robot rod member parameter and robot null position error can be rewritten as,
Wherein, a
i, α
i, d
iAnd θ
iBe respectively rod member length, connecting rod torsional angle, connecting rod distance and joint angles.C θ and respectively s θ represent cos θ and sin θ.δ
iThe error of zero of representing i joint,
With
Represent cos (θ respectively
i+ δ
i) and sin (θ
i+ δ
i).Then six-DOF robot positive motion equation is expressed as,
J) based on method computing center's point position of line
Among the present invention, the PSD device is placed on the robot working space arbitrarily, and the position of PSD central point is unknown.For the N that is accurately positioned in a PSD central point robot location, the laser under wherein any two robot locations all intersects at same point among Fig. 2, and this same point is a PSD central point 11, as shown in Figure 3.That is to say that the equation by any two laser rays can calculate the PSD center position.Joint angles according under each robot location of above robot positive motion equation and acquisition can obtain the pose matrix of robot end under robot base coordinate sys-tem.Because laser of installing and robot end's the R that concerns fix, and can obtain in advance as the CNC coordinate measuring method by simple demarcation, also can demarcate as unknown parameter is online R with other parameters of robot.Therefore, the equation of i bar laser rays under robot base coordinate sys-tem that can provide under each robot location be,
(x wherein
IB, y
IB, z
IB) be the coordinate of a certain point of fixity of i bar laser rays under robot base coordinate sys-tem, (m
IB, n
IB, p
IB) be the unit vector direction of this laser rays.
Then any two laser beam can obtain by the following equation of simultaneous as the intersection point or the common vertical line mid point of i bar laser rays and j bar laser rays:
K) the optimization aim function is realized the robot demarcation
Suppose to ignore based on the robot positioning error of PSD position feedback, if do not have robot rod member parameter error and robot null position error, in theory, N bar laser rays should intersect at same point, be the center position (11) of PSD, situation shown in Fig. 4 (a).If there is error in the robot parameter, then shown in Fig. 4 (b), the intersection point (12) between any two laser rays (3) that calculate or the mid point (12) of common vertical line are then in certain areal distribution, error parameter by iterative algorithm searching machine people infinitely converges on some set of laser beam intersection point, i.e. Shi Ji PSD center position (11).That is to say that we can minimize following objective function and optimize robot rod member parameter error and robot null position error.
δ
*＝arg?Min(
xΨ
k 2+
yΨ
k 2+
zΨ
k 2)
Wherein, P
kBe laser rays Γ
LiAnd Γ
LjThe intersection point of (i ≠ j, i, j ∈ N, k ∈ M) or the central point of common vertical line.
nP
AveThe P of all laser rays intersection points when representing the n time iteration
kK=1, L, the central point of M.
xΨ
k,
yΨ
k,
zΨ
kRepresent P respectively
kWith
nP
AveAt x, y, the distribution error on the z direction.
By iteration optimization algorithms computing machine person joint Zero positioning parameter, this example laboratory calibration result and as shown in table 1 with Laser Tracking calibration result compare error; From experimental result, repeatedly the average error of rating test result and actual value is less than 0.1 °, experiment show the validity of this method and the accuracy of calibration result.
M) change robot controller zero-bit parameter.
The table 1 example IRB1600 Zero positioning result of robot (unit: degree)
Claims (7)
1. industrial robot zero-bit self-calibrating method is characterized in that step is as follows:
A. set up the constraint of space virtual point, a position sensitive detector PSD device is placed on industrial robot arbitrarily can reaches work space, the central point of PSD device (11) is an obligatory point;
B. locate based on the accurate robot of laser and PSD, industrial machine robot end (10) carry laser instrument (2) with the pose of 30～60 ° of Right deviations as position 1, laser beam is projected the PSD surface, PSD accurately measures the two-dimensional position of hot spot on the PSD surface as feedback transducer, by robot closed loop servo location, realize that robot carries the effective surface center position that laser beam spot accurately is positioned at PSD based on PSD high precision position feedback;
C. after accurately locating, industrial control computer (7) reads the angle value of 6 joint of robot by network communication or industrial robot communication interface from industrial robot controller (8), and each angle value reads and gets the joint of robot angle of its mean value as position 1 more than twice;
D. industrial machine robot end (10) carries laser instrument (2) position-based 1 to anticlockwise, the angle of rotation is that the scope at inclination angle, the left and right sides is divided by number of revolutions, maximum left-leaning 30～60 °, the pose of rotation is as position 2 for the first time, and repeating step b and c obtain 6 joint angles of robot of position 2;
E. rotate 6 joint angles of robot that obtain position i successively, up to position N, N-1 is a number of revolutions;
F. obtain each joint angles value of robot of N position according to above step,, obtain the robot end position and the attitude of N position then based on robot kinematics's error model of setting up;
G. calculate the locus of obligatory point, method based on the line intersection point, promptly physically any two laser beam intersect at the central point on PSD surface, robot end position and attitude according to N the position that obtains, set up N laser beam geometric equation, the mid point of wherein any two space line Equation for Calculating intersection points or perpendicular bisector obtains the locus of obligatory point;
H. the optimization aim function obtains robot Zero positioning parameter, sets up objective function with a constraint, by iterative algorithm searching machine people calibrating parameters, converges on a bit up to the intersection point of any two space line Equation for Calculating.
2. industrial robot zero-bit self-calibrating method according to claim 1 is characterized in that among the step f, and the D-H relation that each joint of industrial robot comprises robot rod member parameter and robot null position error is rewritten as,
Wherein, a
i, α
i, d
iAnd θ
iBe respectively rod member length, connecting rod torsional angle, connecting rod distance and joint angles; C θ and respectively s θ represent cos θ and sin θ.δ
iThe error of zero of representing i joint,
With
Represent cos (θ respectively
i+ δ
i) and sin (θ
i+ δ
i).Then six-DOF robot positive motion equation is expressed as,
3. industrial robot zero-bit self-calibrating method according to claim 1, it is characterized in that in the step g, method computing center's point position based on the line intersection point, promptly for the N that is accurately positioned in a PSD central point robot location, laser under wherein any two robot locations all intersects at same point, this same point is PSD central point (11), according to the joint angles under each robot location of robot positive motion equation and acquisition, obtain the pose matrix of robot end under robot base coordinate sys-tem, the equation of i bar laser rays under robot base coordinate sys-tem that provides under each robot location is
(x wherein
IB, y
IB, z
IB) be the coordinate of a certain point of fixity of i bar laser rays under robot base coordinate sys-tem, (m
IB, n
IB, p
IB) be the unit vector direction of this laser rays;
Then any two laser beam obtain by the following equation of simultaneous as the intersection point or the common vertical line mid point of i bar laser rays and j bar laser rays:
4. industrial robot zero-bit self-calibrating method according to claim 1 is characterized in that among the step h, and the optimization aim function is realized the robot demarcation, promptly minimizes following objective function and optimizes robot rod member parameter error and robot null position error:
δ
*＝arg?Min(
xΨ
k 2+
yΨ
k 2+
zΨ
k 2)
Wherein, P
kBe laser rays Γ
LiAnd Γ
LjThe intersection point of (i ≠ j, i, j ∈ N, k ∈ M) or the central point of common vertical line.
nP
AveThe P of all laser rays intersection points when representing the n time iteration
kK=1, L, the central point of M;
xΨ
k,
yΨ
k,
zΨ
kRepresent P respectively
kWith
nP
AveAt x, y, the distribution error on the z direction.
5. device of realizing the described any industrial robot zero-bit self-calibrating method of claim 1 to 4, it is characterized in that comprising laser instrument (2), coupling arrangement (1), position sensitive detector PSD (4), signal processing circuit (5), industrial control computer (7), data collecting card (6), described laser instrument (2) is fixedly mounted on industrial machine robot end (10) by coupling arrangement (1), position sensitive detector PSD (4) and signal processing circuit (5) thereof, be collectively referred to as the PSD device, the PSD device is placed on reached at the work space of industrial robot arbitrarily, and the central point of PSD device (11) is an obligatory point; Data collecting card (6) adopts wireless communication mode and industrial control computer (7) communication; Industrial machine human body (9) carries laser instrument (2) by robot end (10) laser facula is incident upon PSD (4) surface, hot spot sends industrial control computer (7) in the exact position of PSD (4) to by signal processing circuit (5) and data collecting card (6), conversely, industrial control computer (7) says the word based on this position feedback and move to drive laser instrument (2) to robot controller (8) control robot body (9) hot spot is accurately navigated to centre of surface point (11) position of PSD (4), physically realizes the virtual point constraint.
6. industrial robot zero-bit according to claim 5 is characterized in that from caliberating device laser instrument (2) is the accurate semiconductor laser of adjustable focal length, power 1mW, and wavelength 670nm, the spot diameter of laser beam (3) is 2.5mm.
7. industrial robot zero-bit according to claim 5 is from caliberating device, it is characterized in that position sensitive detector PSD (4) adopts sectional type high precision photoelectric device, resolution reaches 0.1um, and the effective surface diameter is 10mm, but the detection laser beam hot spot is at the two-dimensional position on PSD surface; The PSD output signal provides the two-dimensional position coordinate of laser facula on the PSD surface through signal processing circuit (5), and as the position of the accurate control robot of feedback signal, promptly the central point on PSD surface is as robot localizing objects position.
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