CN113172066A

CN113172066A - Cleaning system

Info

Publication number: CN113172066A
Application number: CN202110502212.XA
Authority: CN
Inventors: 青山博司; 林田彻
Original assignee: Hallys Corp
Current assignee: Hallys Corp
Priority date: 2017-07-12
Filing date: 2018-07-06
Publication date: 2021-07-27
Also published as: TW201908023A; JP2019018127A; CN109248892A; CN114669568A; CN109248892B; TWI710411B

Abstract

A cleaning system, a cleaning method of a transparent substrate and a manufacturing method of an electronic component are provided, which can clean the surface of a thin plate efficiently and reliably. The cleaning system removes foreign matters attached to the surface of the thin plate, and comprises: a conveying device for conveying the thin plate; and a cleaning device having a cleaning section disposed to face the surface of the sheet conveyed by the conveying device, the cleaning device including a relative movement mechanism that causes the cleaning section to repeat relative stationary and moving operations with respect to the surface of the sheet in a state where the cleaning section is brought into direct or indirect contact with the surface of the sheet for cleaning. Preferably, the conveying device conveys the surface of the sheet in a cleaning state by the cleaning device in one direction, and the relative movement mechanism alternately repeats a movement operation in one direction and a movement operation in an opposite direction, and in the movement operation, a maximum movement speed of the cleaning unit moved by the relative movement mechanism is higher than a movement speed of the surface of the sheet conveyed by the conveying device.

Description

Cleaning system

The present application is a divisional application of patent applications having application dates 2018, 07/06, application number 201810738124.8, entitled "cleaning system, method for cleaning transparent substrate, and method for manufacturing electronic component", and the entire contents of the divisional application are incorporated herein by reference.

Technical Field

The invention relates to a cleaning system, a cleaning method of a transparent substrate and a manufacturing method of an electronic component.

Background

A glass substrate is used for electronic devices such as mobile phones and smart phones. In a production line of electronic devices, as a cleaning system for cleaning a surface of a glass substrate, for example, a cleaning system described in japanese patent application laid-open No. 2006-272223 is known. The system described in this publication is configured to clean the surface of a glass substrate by covering a blade with a cloth and moving the glass substrate while pressing the cloth (cloth) against the glass substrate with the blade. In the system described in this publication, the operation of relatively moving the squeegee from one end of the glass substrate to the other end is repeated 3 times.

Patent document 1: japanese patent laid-open publication No. 2006-272223

However, when a foreign substance having a high viscosity such as an adhesive is adhered to the surface of the glass substrate or when oil is adhered to the center of the glass substrate, the foreign substance cannot be erased even by only 3 times of erasing as in the system described in the above publication.

In the system described in the above publication, after the squeegee is moved relatively from one end of the glass substrate to the other end, the squeegee is returned to the one end of the glass substrate again for the next erasing operation, and the erasing operation is performed.

Disclosure of Invention

Accordingly, an object of the present invention is to provide a cleaning system and a cleaning method capable of efficiently and reliably cleaning a surface of a thin plate, and a method of manufacturing an electronic device.

The invention made in order to solve the above-mentioned technical problem is a cleaning system for removing foreign matter adhering to a surface of a thin plate, the cleaning system including:

a conveying device for conveying the thin plate; and

a cleaning device having a cleaning part disposed opposite to the surface of the thin plate conveyed by the conveying device,

at least a part of the cleaning surface of the cleaning part is in the following shape: is bent in the thickness direction of the sheet as it goes toward the conveying direction of the sheet.

In the cleaning system, at least a part of the cleaning surface of the cleaning unit has the following shape: is bent in the thickness direction of the sheet as it goes toward the conveying direction of the sheet. That is, for example, at least a part of the cleaning surface of the cleaning unit has a semicircular cross section in the conveying direction. Thereby, the contact area between the cleaning surface of the cleaning portion and the surface of the thin plate can be reduced. Therefore, resistance in the conveyance of the sheet is reduced, so that the sheet surface can be surely cleaned with high efficiency.

Preferably, the cleaning unit has a shape corresponding to the sheet in a direction perpendicular to both the conveying direction of the sheet and the thickness direction of the sheet. That is, it is preferable that the shape of the cleaning portion corresponds to the shape of the surface of the thin plate in a direction (width direction of the thin plate) orthogonal to the conveying direction of the thin plate. This ensures efficient cleaning of the surface of the thin plate in the width direction.

Preferably, the cleaning device includes a relative movement mechanism that repeats a relative stationary operation and a relative moving operation of the cleaning unit with respect to the surface of the thin plate in a state where the cleaning unit is brought into direct or indirect contact with the surface of the thin plate for cleaning. The relative movement mechanism repeats the relative stationary operation and the relative moving operation of the cleaning section with respect to the surface of the thin plate in a state where the cleaning section is in direct or indirect contact with the surface of the thin plate, so that the cleaning section can efficiently and reliably remove foreign matter on the surface of the thin plate. That is, in this cleaning system, since the cleaning unit performs not only the relative movement operation but also the stationary operation with respect to the surface of the thin plate, the foreign matter can be removed not only by the dynamic friction but also by the static friction, and the foreign matter on the surface of the thin plate can be reliably removed. Here, direct means that the contact surface is in direct contact with the sheet to perform wiping, and when the cleaning portion has a structure suitable for wiping the sheet, the cleaning portion is in direct contact with the sheet to perform wiping. Indirect means that the cleaning part is indirectly brought into contact with the sheet to be wiped off, such as when 1 or a plurality of other members such as a textile member are disposed between the contact surface and the sheet, or when the contact surface is not of a structure suitable for wiping off the sheet.

Preferably, the cleaning part moves in 3 directions. That is, the cleaning unit abutting on the surface of the sheet is preferably movable in the conveying direction of the sheet, the direction opposite to the conveying direction, and other directions. Thus, the cleaning section can perform cleaning while moving in 3 directions on the surface of the thin plate, thereby ensuring more efficient cleaning of the surface of the thin plate.

Preferably, the cleaning device further includes a switching mechanism that switches the cleaning unit between a state of being in direct or indirect contact with the surface of the sheet and a state of being separated from the surface of the sheet. Thus, the cleaning operation can be performed with the cleaning unit in direct or indirect contact with the surface of the sheet by the switching mechanism, and the cleaning unit can be moved to the separated position without performing the cleaning operation.

Preferably, the cleaning part is indirectly contacted to the surface of the sheet via a fabric member. Thus, the fabric member is directly contacted with the surface of the thin plate, and foreign matters on the surface of the thin plate can be transferred to the fabric member by cleaning operation.

Preferably, the cleaning device further includes a supply mechanism that supplies the fabric member to the cleaning section. Thus, when the foreign matter on the surface of the thin plate is transferred to the fabric member, (part of) the new fabric member is supplied to the cleaning section by the supply mechanism, and the cleaning operation can be performed by (part of) the new fabric member.

Preferably, the cleaning device further includes: a columnar member having the cleaning part on a front end surface; and a pressing member that presses the fabric member to the columnar member, thereby preventing the elongated fabric member supplied from the supply mechanism to the cleaning section from being displaced with respect to the cleaning section. Thus, the long-sized fabric member can be pressed toward the side wall surface of the columnar member by the pressing member, and displacement of the fabric member with respect to the cleaning section (sliding of the fabric member on the cleaning section) is less likely to occur during cleaning work, thereby enabling accurate cleaning work to be performed.

Preferably, the conveying device further includes a supply nozzle for supplying a cleaning liquid to the cleaning portion. Thus, cleaning by the cleaning liquid can be performed by supplying the cleaning liquid to the cleaning portion by the supply nozzle.

Preferably, the sweeping system includes: a first said conveyor holding said sheet from one of its surfaces; a first cleaning device for cleaning the other surface of the sheet conveyed by the first conveying device; a second conveying device for holding the sheet, one surface of which has been cleaned by the first cleaning device, from the other surface; and a second cleaning device that cleans one surface of the thin plate conveyed by the second conveying device. In this way, the second cleaning device can clean the second surface of the sheet, and the second cleaning device can clean the first surface of the sheet.

Drawings

Fig. 1 is a schematic front view showing a cleaning system according to an embodiment of the present invention.

Fig. 2 is a schematic front view of a first sweeping device of the sweeping system.

Fig. 3 is a schematic front view of a second sweeping device of the sweeping system.

Fig. 4A is a schematic perspective view of an enlarged main portion of the cleaning device.

Fig. 4B is an enlarged schematic front view of a main part of a columnar member of the cleaning device.

Fig. 5 is a schematic perspective view of a main part of the cleaning device in an enlarged manner.

Fig. 6 (a) to (D) are explanatory views for explaining the operation of the cleaning device, fig. 6 (a) shows a state in which the fabric member is supplied, fig. 6 (B) shows a state in which the fabric member is pressed by the pressing member, fig. 6 (C) shows a state in which the cleaning liquid is supplied, and fig. 6 (D) shows a cleaning state.

Fig. 7 is a schematic explanatory view for explaining a relationship between a moving speed of a sheet and a moving speed of a cleaning surface and time when cleaning work is performed.

Fig. 8 is an explanatory diagram for explaining a cleaning state by the cleaning device.

Description of the reference numerals

W: sheet, C: textile member, 1A: first conveying device, 1B: second conveying device, 3A: first cleaning device, 3B: second cleaning device, 5: supply mechanism, 13: columnar member, 13 a: cleaning surface (cleaning portion), 15: pressing member, 17: switching mechanism, 19: relative movement mechanism, 25: holding section, 27: track, 100: and (4) cleaning the system.

Detailed Description

[ first embodiment ]

Hereinafter, a cleaning system according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings as appropriate.

< cleaning System >

A cleaning system 100 shown in fig. 1 is a system for cleaning foreign matter adhering to the surface of a glass plate (sheet W) such as a cover glass used in an electronic device such as a smartphone or a mobile phone in a production line. The sheet W to be cleaned is not limited to the cover glass, and other various substrates can be used as objects, and the cleaning system 100 can be suitably used for cleaning a transparent sheet W in a rectangular shape in a plan view.

The sweeping system 100 includes: conveying devices 1A and 1B for conveying a thin sheet W; and

cleaning devices

3A and 3B each having a cleaning surface 13A (see fig. 2) as a cleaning unit disposed to face the surface of the sheet W conveyed by the conveying devices 1A and 1B. The cleaning system 100 includes 2 conveying devices 1A and 1B and

cleaning devices

3A and 3B, respectively. Specifically, the sweeping system 100 includes: a first conveying device 1A that conveys a sheet W while holding one of its surfaces by suction; a first cleaning device 3A that cleans the other surface of the sheet W conveyed by the first conveying device 1A; a second conveying device 1B that conveys the sheet W by sucking and holding the other surface of the sheet W whose one surface has been cleaned by the first cleaning device 3A; and a second cleaning device 3B that cleans one surface of the sheet W conveyed by the second conveying device 1B. Further, if necessary, the following members and the like may be provided: a removing device for removing dust and the like generated by cleaning on the surface of the sheet W cleaned by the

cleaning devices

3A and 3B; and a laminating device for attaching a protective film or the like to the surface of the sheet W cleaned by the

cleaning devices

3A and 3B. The cleaning system 100 further includes a control device (not shown) for controlling operations of various devices such as the conveying devices 1A and 1B and the

cleaning devices

3A and 3B.

The first conveying device 1A conveys the sheet W from a position P1 at which the sheet W is received from a feeding device (not shown) to a position P2 at which the sheet W is transferred to the second conveying device 1B. The first cleaning device 3A is disposed between a position P1 at which the sheet W is received and a position P2 at which the sheet W is conveyed. The first cleaning device 3A cleans one surface (lower surface) of the sheet W conveyed by the first conveying device 1A. The first conveying device 1A conveys the surface of the sheet W in a cleaned state by the first cleaning device 3A in one direction (the direction (X direction)) from the position P1 where the sheet W is received to the position P2 where the sheet W is transferred. Here, the cleaning state means a state in which the surface of the sheet W is being cleaned by the

cleaning devices

3A and 3B. The first conveying device 1A conveys the web W in one direction (hereinafter, sometimes referred to as a conveying direction) at a constant speed.

The second conveyor 1B conveys the sheet W from a position P2 at which the sheet W is conveyed by the first conveyor 1A to a position P3 at which the sheet W is conveyed to a delivery device (not shown). The second cleaning device 3B is disposed between the position P2 at which the sheet W is conveyed and the position P3 at which the sheet W is conveyed. The second cleaning device 3B cleans the other surface (upper surface) of the sheet W conveyed by the second conveying device 1B. The second conveying device 1B conveys the surface of the sheet W in a cleaned state by the second cleaning device 3B in one direction (the direction (X direction) from the position P2 where the sheet W is received to the position P3 where the sheet W is transferred). The second conveying device 1B conveys the sheet W in one direction at a constant speed.

(first cleaning device)

Referring to fig. 2, the first cleaning device 3A includes a relative movement mechanism 19, and the relative movement mechanism 19 repeats a relative stationary operation and a relative moving operation of the cleaning surface 13A with respect to the surface of the sheet W in a state where the cleaning surface 13A is brought into direct or indirect contact with the surface of the sheet W for cleaning. The cleaning surface 13a indirectly contacts the surface of the sheet W via the long cloth member C. The fabric member C is selected according to the type of the web W, the frictional force with the web W, the degree of absorption of the cleaning liquid, and the like.

As shown in fig. 2, the first cleaning device 3A further includes a feeding mechanism 5 that feeds the fabric member C to the cleaning surface 13A. The feeding mechanism 5 includes a drive roller 7 on which the fabric member C is stretched and a driven roller 9, and the fabric member C is wound around the drive roller 7 side after the cleaning of the sheet W by the rotation of the drive roller 7, and the unused fabric member C is discharged from the driven roller 9 along with this. The feeding mechanism 5 also includes various rollers for adjusting the tension and feeding the elongated fabric member C.

The supply mechanism 5 supplies the long-sized textile member C to the cleaning surfaces 13a of the two columnar members 13 as described later. The elongated fabric member C is first fed to the cleaning surface 13a which is then in contact with the thin sheet W, and then fed to the cleaning surface 13a which is first in contact with the thin sheet W. In other words, the elongated fabric member C is conveyed in the direction of the arrow T in fig. 2. That is, the drive roller 7 is disposed in the opposite direction (the (-X direction) of the transport direction of the sheet W from the driven roller 9.

As shown in fig. 2 and fig. 4A and 4B to 6, the first cleaning device 3A includes a pair of cleaning members 11 each having a cleaning surface 13A. Specifically, the cleaning member 11 on the upstream side (the (-X direction side) in the transport direction cleans the sheet W with the cleaning liquid supplied through the supply nozzle 29 described later, and the cleaning member 11 on the downstream side (the X direction side) in the transport direction erases the wiping marks and/or the wiping residues adhering to the surface of the sheet W.

Each cleaning member 11 has: a columnar member 13 having a cleaning surface 13a at a front end (an upper surface of the columnar member 13 in fig. 2); and a pressing member 15 that presses the long textile member C (see fig. 4A and 4B to 6) supplied from the supply mechanism 5 to the cleaning surface 13a toward the side wall surface 13B of the columnar member 13. In each cleaning member 11, one columnar member 13 sandwiches the fabric member C from both sides by a pair of pressing members 15.

As shown in fig. 4B, a pair of side wall surfaces 13B is provided substantially perpendicularly to the front end surface (cleaning surface 13a) of the columnar member 13, and the columnar member 13 has an edge R between the front end surface (cleaning surface 13a) and the side wall surfaces 13B. Specifically, the leading end face (cleaning face 13a) and the side wall face 13b are continuous via an angle having a radius of curvature of 1mm or less in a cross-sectional shape in a direction intersecting the leading end face and the side wall face 13 b.

As shown in fig. 4A, 4B, and 5, the columnar member 13 extends in a direction (Y direction) orthogonal to both the conveying direction (X direction) of the sheet W and the thickness direction (Z direction) of the sheet W, and the length in the orthogonal direction is set to be substantially the same as the width of the sheet W (length in the direction orthogonal to the conveying direction). The material of the columnar member 13 is not particularly limited, and a hard resin blade can be used. The shape of the distal end surface (cleaning surface 13a) of the columnar member 13 is set to correspond to the sheet W in a direction (Y direction) orthogonal to both the conveying direction (X direction) of the sheet W and the thickness direction (Z direction) of the sheet W. Specifically, when the surface shape of the sheet W is a flat surface (when the surface shape of the sheet W is a shape in which straight lines in the Y direction are continuous in the X direction), the distal end surface of the columnar member 13 is a flat surface, and when a part of the surface shape of the sheet W is a shape that curves in the Z direction as it goes toward the Y direction (when the surface shape of the sheet W is a shape in which curves in the Y direction are continuous in the X direction), the distal end surface of the columnar member 13 is a shape in which curves in the Y direction are continuous (for example, a fish plate shape).

As shown in fig. 2, the first cleaning device 3A further includes a switching mechanism 17, and the switching mechanism 17 switches each cleaning member 11 between a state of indirectly contacting the surface of the sheet W via the fabric member C and a state of being separated from the surface of the sheet W. Specifically, the switching mechanism 17 is constituted by a cylinder connected to each cleaning member 11 (the columnar member 13 and the pair of pressing members 15), and moving the cleaning member 11 and the relative movement mechanism 19 up and down, and the cleaning surface 13a indirectly contacts the surface of the sheet W to be conveyed through the fabric member C by the cleaning member 11 being lifted by the switching mechanism 17.

The switching mechanism 17 is provided so as to be able to indirectly bring the cleaning surface 13a into contact with the surface of the holding portion 25 of the first conveying device 1A, which will be described later, via the fabric member C. That is, in the cleaning system 100, the cleaning member 11 can clean the holding portion 25 (see fig. 1) that does not hold the sheet W.

The relative movement mechanism 19 is a mechanism that reciprocates the cleaning member 11 in the conveyance direction (X direction). Here, fig. 7 shows a relationship between the speed of the cleaning member 11 and time. The straight line K in fig. 7 indicates the transport speed of the web W. Therefore, at the position of S1, the sheet W moves at the same speed as the cleaning member 11. The relative movement mechanism 19 alternately repeats movement operations of the cleaning surface 13a in the conveying direction (X direction) and in the opposite direction (the-X direction), and during the movement operations, the movement speed of the cleaning surface 13a by the relative movement mechanism 19 is faster than the movement speed of the surface of the sheet W by the first conveying device 1A (see fig. 7). In other words, the relative movement mechanism 19 repeats the relative stationary operation (S1 in fig. 7) and the moving operation of the cleaning surface 13a relative to the surface of the sheet W in a state where the cleaning surface 13a is indirectly in contact with the surface of the sheet W. Therefore, in the relative movement mechanism 19, the static friction force and the dynamic friction force with the cloth member C are alternately applied to the surface of the sheet W. Further, the amplitude width of the reciprocating motion of the cleaning member 11 by the relative movement mechanism 19 is 1/10 to 1/40 of the length of the sheet W, and the relative movement mechanism 19 drives the cleaning member 11 to reciprocate a predetermined number between 1000 and 2500 in 1 minute.

Specifically, the relative movement mechanism 19 includes: a motor (not shown); a cam 21 rotated by a rotational force of the motor; and a transmission member 23 that converts the rotational force of the cam 21 into a driving force for reciprocating the cleaning member 11 (the columnar member 13 and the pair of pressing members 15) and transmits the driving force to the cleaning member 11. Therefore, the cleaning member 11 reciprocates by the rotational force of the motor. Specifically, a crank-rocker mechanism can be used as the relative movement mechanism 19.

(first transport device)

As shown in fig. 1, the first transport apparatus 1A includes: a holding portion 25 for holding the sheet W by suction; a rail 27 along which the holding portion 25 travels along the conveyance direction (X direction); and a driving unit (not shown) for moving the holding unit 25. The holding portion 25 moves along the rail 27 in the conveying direction (X direction) and cleans the front surface (lower surface) of the sheet W by the first cleaning device 3A while being conveyed.

The first conveying device 1A further includes a supply nozzle 29 for supplying the cleaning liquid to the cleaning surface 13 a. The supply nozzle 29 supplies the cleaning liquid to the cleaning surface 13a before the cleaning surface 13a cleans the surface of the sheet W. Specifically, the supply nozzle 29 is provided in the holding portion 25 and moves in the conveyance direction (X direction) together with the holding portion 25. The supply nozzle 29 supplies the cleaning liquid to the cleaning surface 13a on the upstream side in the conveying direction (on the (-X direction side) before the start of the cleaning operation when the sheet W is conveyed. The supply nozzle 29 may supply a small amount of cleaning liquid to the cleaning surface 13a on the downstream side in the transport direction (the X direction side), or may not supply the cleaning liquid. The supply nozzle 29 is provided on the conveyance direction side (X direction side) of the holding portion 25. The supply nozzle 29 extends in the Y direction, and the length in the orthogonal direction is set to be substantially the same as the length of the cleaning surface 13a (the length in the Y direction).

The first conveying device 1A has a vertical movement mechanism (not shown) for lowering the holding portion 25 to transfer the thin sheet W at a position P2 where the thin sheet W is transferred.

(second cleaning device)

The second cleaning device 3B has substantially the same configuration as the first cleaning device 3A, and cleans the surface (upper surface) of the sheet W opposite to the surface on which cleaning has been completed. As shown in fig. 3, the second cleaning device 3B has a configuration in which it is disposed upside down from the first cleaning device 3A, and members having the same configuration or function as those of the first cleaning device 3A are denoted by the same reference numerals in fig. 3, and detailed description thereof is omitted.

(second conveying device)

The second conveying device 1B is a device having substantially the same configuration as the first conveying device 1A and conveying the sheet W cleaned by the second cleaning device 3B. In the second conveying device 1B, members having the same configuration or function as those of the first conveying device 1A are denoted by the same reference numerals, and detailed description thereof is omitted.

The second conveying device 1B has a holding portion 25 on which the thin sheet W received from the first conveying device 1A is placed. The holding portion 25 is supported from the lower surface of the sheet W, has suction holes, and holds the sheet W by suction.

The second conveying device 1B may also include a vertical movement mechanism (not shown) for raising the holding portion 25 to receive the thin sheet W at the position P2 for receiving the thin sheet W.

< action >

Next, the operation performed by the cleaning system 100 will be described.

First, the thin sheet W is transferred from the feeding device to the holding portion 25 of the first conveying device 1A (position P1 in fig. 1). Then, while the holding portion 25 of the first conveying device 1A is moving in the conveying direction (X direction), the cleaning liquid is supplied from the supply nozzle 29 to the cleaning surface 13A (a part of the fabric member C in contact therewith) of the first cleaning device 3A when the supply nozzle 29 is positioned on the cleaning surface 13A.

At the time of cleaning, a new portion of the cloth member C is supplied to the cleaning surface 13 a. Specifically, as shown in fig. 6 a, in a state where the pair of pressing members 15 are separated (a state where the pressing of the pressing members 15 against the side wall surfaces 13b of the columnar members 13 is released), the drive roller 7 of the feeding mechanism 5 rotates to discharge the unused textile member C from the driven roller 9, and a new portion of the textile member C is fed to the cleaning surface 13 a. Then, as shown in fig. 6 (B), the pair of pressing members 15 are moved toward the columnar member 13, and the fabric member C is pressed toward the side wall surface 13B of the columnar member 13 by the pair of pressing members 15. In this state, the fabric member C moves as one body with the columnar member 13. In other words, the fabric member C is not displaced with respect to the columnar member 13. Next, as described above, the supply nozzle 29 supplies the cleaning liquid to the cleaning surface 13a (see fig. 6C). Then, as shown in fig. 6D, the cleaning member 11 (the columnar member 13 and the pair of pressing members 15) is moved (raised) toward the sheet W being conveyed by the switching mechanism 17.

At this time, as shown in fig. 8 (a), the cleaning surface 13a is located at the end of the sheet W in the conveying direction. The cleaning member 11 moves in the-X direction from this state. When the cleaning member 11 moves in the-X direction by a predetermined distance as shown in fig. 8B, the cleaning member 11 moves in the X direction (fig. 8C). Then, the cleaning member 11 moves in the X direction by a predetermined distance and then moves in the-X direction again. During this operation, the web W is always conveyed in the X direction at a predetermined speed. In this operation, when the sheet W and the cleaning member 11 move in the same direction and at the same speed, a static friction force is applied to the sheet W and the foreign matter on the sheet W by the cleaning member 11. On the other hand, the dynamic friction force acts on the thin plate and the foreign matter on the thin plate W except for the timing at which the static friction force acts. The cleaning member 11 is thereby relatively moved and stationary to perform cleaning, and foreign matter is removed by static friction (wiping operation) as well as by dynamic friction (wiping operation), thereby cleaning the lower surface of the sheet W.

The sheet W is continuously moved in the X direction with respect to the cleaning member 11, and after the cleaning member 11 is positioned at the-X direction side end portion of the sheet W ((D) of fig. 8), the cleaning member 11 is moved in the X direction by a predetermined distance in the same manner as before ((E) of fig. 8). Then, the cleaning unit is moved in the-X direction by a predetermined distance. After the cleaning member 11 wipes off the end of the sheet W in the-X direction several times, the cleaning member 11 is separated from the sheet W ((F) of fig. 8 and (G) of fig. 8). Note that fig. 8 (a) to 8 (G) are expressed on a scale different from the actual scale for understanding the configuration and operation.

The sheet W whose upper surface has been cleaned by the first cleaning device 3A is transferred from the first conveying device 1A to the second conveying device 1B (position P2 in fig. 1). Specifically, the holding portion 25 of the first conveyor 1A is moved downward by the air cylinder (W1 in fig. 1), and at the time point when the thin sheet W held by the holding portion 25 comes into contact with the holding portion 25 of the second conveyor 1B, the suction holding by the holding portion 25 of the first conveyor 1A is completed and the suction holding by the holding portion 25 of the second conveyor 1B is started.

In this way, after the sheet W is transferred from the first conveying device 1A to the second conveying device 1B, the second conveying device 1B and the second cleaning device 3B also perform the same operation as the first conveying device 1A and the first cleaning device 3A, and clean the lower surface of the sheet W. The sheet W whose lower surface has been cleaned by the second cleaning device 3B is then conveyed to the feeding device (position P3 in fig. 1).

On the other hand, the holding portion 25 of the first conveyor 1A that transfers the thin sheet W to the second conveyor 1B returns to the position P1 in fig. 1. Similarly, the holding portion 25 of the second conveyor 1B that has delivered the thin sheet W to the feeding device returns to the position P2 in fig. 1. The holding portion 25 can be cleaned by the cleaning member 11 even when the holding portion 25 is returned to each position.

< method for manufacturing electronic device >

Next, a method of manufacturing an electronic device using the cleaning system 100 will be described. The method for manufacturing an electronic device includes a step of cleaning a transparent substrate as a thin sheet W by using a cleaning system 100. In this cleaning step, both surfaces of the transparent substrate are cleaned using the cleaning system 100.

< advantage >

When cleaning is performed by the cleaning system 100, the cleaning surface 13a is not only relatively moved but also statically moved with respect to the surface of the sheet W as described above, so that foreign matter on the surface of the sheet W can be reliably removed by removing foreign matter due to static friction as well as dynamic friction. That is, since the static friction exerts a force stronger than the dynamic friction on the foreign matter, the foreign matter can be removed more effectively.

Further, since the cleaning surface 13a reciprocates in the conveying direction with respect to the surface of the sheet W and the cleaning surface 13a moves in both the conveying direction and the opposite direction, forces in a plurality of different directions act on the foreign matter, as compared with the case where only a force acts in one direction, and the foreign matter can be effectively removed.

Even when a foreign substance having a strong adhesive force adheres to the thin sheet W, an impact force can be applied to the foreign substance a plurality of times through the edge R of the columnar member 13, so that the foreign substance having a strong adhesive force can be easily removed.

Further, since the cleaning surface 13a moves relative to the surface of the sheet W in the direction along the conveying direction, the cleaning surface 13a corresponding to the shape of the sheet W can be used to clean various types of sheets W. Specifically, even if the cleaning object is not formed of a simple flat surface, such as an object to be cleaned (sheet W) having terminals provided around a glass, such as a liquid crystal panel, an object to be cleaned (sheet W) having a glass substrate fitted in a frame, or a 3D glass (sheet W) having a curved surface, it is possible to perform accurate cleaning by providing the cleaning surface 13a along the shape thereof. In particular, since the

cleaning devices

3A and 3B include the switching mechanism 17, the cleaning surface 13A is brought into contact with the sheet W only at the portion to be cleaned and then separated, whereby the portion to be cleaned can be accurately cleaned even with the sheet W having a special shape.

[ other embodiments ]

The embodiments disclosed herein are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is not limited to the configurations and numerical values of the above embodiments, and is defined by the claims, and the meaning thereof includes meanings equivalent to the claims and all changes (substitutions, additions, and deletions) within the scope.

In other words, in the above-described embodiment, the case where the supply nozzle for supplying the cleaning liquid is provided in the transport device has been described, but the present invention is not limited to this. For example, the supply nozzle may be provided in the cleaning device, and specifically, the supply nozzle may be provided to supply the cleaning liquid to the fabric member between the pair of cleaning portions. In addition, when the supply nozzle is provided in the holding portion of the transport device, the supply nozzle is not limited to be provided on the transport direction side of the holding portion, and may be provided on the opposite direction side (the (-X direction side) of the transport direction.

In the above-described embodiment, the resin blade is used as the columnar member, but a member in which the tip end surface is covered with resin, rubber, or the like without using resin, or a pad or the like may be used as the columnar member.

Further, a groove may be formed in the front end surface (cleaning surface) of the columnar member, and a friction force or the like may be more easily exerted than when the front end surface is a flat surface.

In the above-described embodiment, the description has been given of the case where the cleaning surface reciprocates, but a configuration in which the cleaning surface is intermittently moved in one direction, that is, the movement and the stop in one direction are repeated, may be used. Further, the moving direction of the cleaning surface is not limited to the conveying direction (X direction) of the sheet W and/or the opposite direction, and may be moved in other directions, in other words, in 3 or more directions. In this case, forces in different directions act on the foreign matter, so the foreign matter is more easily removed.

In the above embodiment, the description has been given of the configuration in which the cleaning surface reciprocates to wipe off the surface of the sheet W while the sheet W is conveyed at a constant speed, but the columnar member 13 may be moved without conveying the sheet W in the cleaning state.

In the above embodiment, the 2 cleaning members 11 are moved (reciprocated) in both the X direction and the-X direction, but the present invention is not limited thereto. The cleaning member 11 on the rear side in the conveying direction of the sheet W may not be reciprocated. When the brush is reciprocated, wiping marks or the like may remain on the portion where static friction acts, but with this configuration, the wiping marks can be prevented from remaining.

In the above embodiment, the cleaning member 11 is driven by the relative movement mechanism 19 so that the reciprocating amplitude width of the cleaning member 11 moved by the relative movement mechanism 19 is 1/10 to 1/40 of the sheet W and the cleaning member 11 is driven by the relative movement mechanism 19 to reciprocate a predetermined number of 1000 to 2500 in 1 minute. The amplitude width may be about 1/5 or about 1/50 of the thin sheet W, and the number of reciprocations in 1 minute may be about 500 or about 3000. When the foreign matter is moved rapidly, the force acting on the foreign matter becomes large, and therefore, the foreign matter is effective, but the foreign matter is easily removed when the number of times of the static friction force is large. The most suitable conditions are preferably determined by the material of the sheet and/or the cleaning environment.

In the above embodiment, both surfaces of the thin plate have been described, but only one surface of the thin plate may be cleaned. In this case, the first cleaning device and the first conveying device, or the second cleaning device and the second conveying device may be used.

In the above embodiment, the conveying device conveys the sheet W while holding the sheet W by suction, but the present invention is not limited to this, and the sheet W may be held and conveyed by another means, for example, a configuration in which the sheet W is mechanically and physically held may be adopted.

In the above-described embodiment, the sheet is cleaned by the cleaning surface, but the present invention is not limited to this, and a configuration in which the sheet is contacted linearly or in a spot shape to be cleaned may be employed.

In the above-described embodiment, the case of cleaning a flat plate-like thin plate has been described, but the present invention is not limited to this, and can be applied to a thin plate having a protruding portion instead of a flat plate when an object having a member that does not require cleaning is disposed around a portion to be cleaned.

Further, in the above-described embodiment, the description has been given of the case where the columnar member has substantially the same length as the width of the thin plate, but the present invention is not limited to this. For example, the columnar member may have a length larger than the width of the sheet, and in this case, cleaning can be performed for sheets of various widths. Further, when cleaning a sheet having a shape protruding from both ends in the width direction, the cleaning surface can be cleaned while avoiding the protruding portion or erasing the protruding portion by using a columnar member having a length shorter than the width of the sheet.

The cleaning system of the present invention can be suitably used for cleaning a transparent plate such as a glass substrate used for a display device of a portable device.

Claims

1. A cleaning system for removing foreign matter adhering to a surface of a sheet, the cleaning system comprising:

a conveying device for conveying the thin plate; and

2. The sweeping system of claim 1,

the cleaning unit has a shape corresponding to the sheet in a direction perpendicular to both the conveying direction of the sheet and the thickness direction of the sheet.

3. The sweeping system of claim 2,

the cleaning device includes a relative movement mechanism that repeats a relative stationary operation and a relative moving operation of the cleaning unit with respect to the surface of the thin plate in a state where the cleaning unit is brought into direct or indirect contact with the surface of the thin plate for cleaning.

4. The sweeping system of claim 3,

the cleaning part moves in 3 directions.

5. The sweeping system according to any one of claims 1 to 4,

the cleaning device further includes a switching mechanism that switches the cleaning portion between a state of being in direct or indirect contact with the sheet surface and a state of being separated from the sheet surface.

6. The sweeping system of claim 1,

the cleaning part indirectly contacts the surface of the thin plate via a fabric member.

7. The sweeping system of claim 6,

the cleaning device further includes a supply mechanism that supplies the fabric member to the cleaning section.

8. The sweeping system of claim 7,

the cleaning device further includes:

a columnar member having the cleaning part on a front end surface thereof; and

and a pressing member that presses the fabric member against the columnar member to prevent the elongated fabric member supplied from the supply mechanism to the cleaning section from being displaced from the cleaning section.

9. The sweeping system of claim 1,

the conveying device further includes a supply nozzle that supplies the cleaning liquid to the cleaning portion.

10. The sweeping system of claim 1,

the sweeping system includes:

a first conveying device for holding a thin plate from one surface thereof;

a first cleaning device configured to clean the other surface of the sheet conveyed by the first conveying device;

a second conveying device for holding the sheet, one surface of which has been cleaned by the first cleaning device, from the other surface of the sheet; and

and a second cleaning device for cleaning one surface of the sheet conveyed by the second conveying device.

11. The sweeping system of claim 1,

the thin plate is a glass plate.