CN105834183A - Cleaning device and workpiece cleaning system - Google Patents

Cleaning device and workpiece cleaning system Download PDF

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Publication number
CN105834183A
CN105834183A CN201610060169.5A CN201610060169A CN105834183A CN 105834183 A CN105834183 A CN 105834183A CN 201610060169 A CN201610060169 A CN 201610060169A CN 105834183 A CN105834183 A CN 105834183A
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CN
China
Prior art keywords
cleaning
workpiece
cloth
ablution
clearing apparatus
Prior art date
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Granted
Application number
CN201610060169.5A
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Chinese (zh)
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CN105834183B (en
Inventor
蛭子胜也
笹仓伸悟
林田彻
青山博司
佐田博
今福怜生
古城健三
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Hallys Corp
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Hallys Corp
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Publication date
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Priority to CN201910668511.3A priority Critical patent/CN110369433A/en
Publication of CN105834183A publication Critical patent/CN105834183A/en
Application granted granted Critical
Publication of CN105834183B publication Critical patent/CN105834183B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/10Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143Wipes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning In General (AREA)
  • Liquid Crystal (AREA)
  • Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The invention provides a cleaning device and a workpiece cleaning system which can easily and accurately clean a cleaning face of a workpiece and can inhibit high cost and maintain complexity. The cleaning device for cleaning the cleaning face of the workpiece comprises a conveying mechanism conveying the workpiece in one direction, and a feeding mechanism for feeding a piece of cleaning cloth through a manner that part of the cleaning cloth in the shape of a long strip contacts the cleaning face of the workpiece conveyed by the conveying mechanism to clean the cleaning face, wherein at least two positions of one face of the cleaning cloth in the conveying direction of the workpiece contacts the workpiece and then the cleaning face of the workpiece is cleaned. The cleaning device further comprises a cleaning liquid supplying mechanism supplying a cleaning liquid to the cleaning cloth between cleaning positions of the two positions. The cleaning liquid supplying mechanism supplies the cleaning liquid from a face on one side, contacting the cleaning face, of the cleaning cloth. The feeding mechanism conveys the cleaning cloth in a direction opposite to the conveying direction of the workpiece.

Description

Clearing apparatus and workpiece purging system
Technical field
The present invention relates to clearing apparatus and workpiece purging system.
Background technology
Glass substrate is used at the aspect such as mobile phone or smart mobile phone.Glass substrate passes through glass substrate Manufacture device manufacture.When manufacturing glass substrate, sometimes in the surface attachment of glass substrate owing to cutting The glass dust etc. cut and produce.Additionally, also worry has dust to adhere in the conveying of glass substrate.For Remove these glass dust or dust etc., need to clean the surface of glass substrate.
As the device cleaning glass baseplate surface, it is proposed that at the clean cloth spread on conveyer belt Above carrying lamella lucida, whisk off the overall spot of the upper surface of lamella lucida by the cloth containing ethanol Clearing apparatus (Chinese patent application discloses No. 102698988).
Additionally, as the device of the portion of terminal cleaning glass substrate, it is proposed that International Publication The device of No. 2010/004456 publication.One strip thin slice of the device described in this publication is erected at First press head and the second press head.The strip thin slice of this first press head is impregnated with ablution and passes through Strip thin slice cleans containing the face being soaked with ethanol, passes through between the first press head and the second press head Roll-over unit overturns strip thin slice and carries out xerotripsis by the upturned face of strip thin slice.
Citation
Patent documentation
Patent documentation 1: Chinese patent application discloses No. 102698988 publication
Patent documentation 2: No. 2010/004456 publication of International Publication
In the composition described in patent documentation 1, carry out cleaning using the cloth comprising a large amount of ethanol In the case of, due to ethanol, striped remains, exists the worry of spot residual sometimes on a glass.Cause This, although think by be impregnated with ethanol cloth clean after, dried by dry cloth, but In this case, use and be impregnated with the cloth of ethanol and the cloth of xerotripsis, therefore there is the load that cost improves Melancholy and maintenance also become complicated.
In the composition described in patent documentation 2, the mechanism making strip thin slice overturn is the most complicated, therefore, There is the worry that cost improves.
Accordingly, as technical problem, the present invention provides the cleaning that can easily and securely clean workpiece Face also can suppress cost high and safeguard complicated clearing apparatus and workpiece purging system.
Summary of the invention
The invention completed for solving described technical problem is the cleaning dress in the face that cleans cleaning workpiece Put, it is characterised in that
Including:
Conveying mechanism, carries described workpiece in one direction;And
Sending mechanism, is carried by described conveying mechanism for making the part cleaning cloth of strip touch The cleaning face of described workpiece clean described cleaning face and give described cleaning cloth,
At least two position contact on the conveying direction of described workpiece of one face of described cleaning cloth Described workpiece and clean the cleaning face of described workpiece.
In this clearing apparatus, conveying mechanism the cleaning face of the workpiece carried is contacted also by cleaning cloth Wiping and cleaned.Herein, in workpiece carries, the face cleaning cloth of a strip is at least Secondary abuts the cleaning face of cleaning, therefore, it is possible to clean the cleaning face of workpiece exactly.Additionally, this cleaning In device, owing to cleaning cloth roll-over unit as the clearing apparatus of conventional portion of terminal without arranging, Therefore, it is possible to the complexity that suppression cost uprises and safeguards.
Described clearing apparatus be additionally may included between the cleaning position of said two position to described clearly Sweep the ablution feed mechanism of cloth supply ablution.Therefore, it is possible to enter in the cleaning position of two positions The cleaning that the impregnation amount of row ablution is different.
Described ablution feed mechanism can be from the face with described cleaning face contact side of described cleaning cloth Supply ablution.Therefore, it is possible to cleaned clearly by the face cleaning cloth being impregnated with exactly by ablution Surface sweeping.
Described sending mechanism is preferably described clearly along the direction conveying contrary with the conveying direction of described workpiece Sweep cloth.So clean cloth by sending mechanism to the direction conveying contrary with the conveying direction of workpiece, The downstream (clean cloth and give the upstream side in direction) of workpiece conveying direction, does not uses (abutting) Clean cloth abut workpiece cleaning face, workpiece conveying direction upstream side (clean cloth give direction Downstream), use after (after abutting) clean cloth abut workpiece cleaning face.Therefore, along with The conveying direction of workpiece can clean the cleaning face of workpiece by the part of spot less cleaning cloth.Need Be noted that sending mechanism to the conveying of contrary with the conveying direction of workpiece direction clean cloth refer to Few in cleaning cloth and absorption surface position (cleaning position), clean cloth to the conveying direction phase with workpiece The conveying of anti-direction, and be not intended to not with absorption surface position give direction.
Described ablution feed mechanism can be so that being located at the upstream side of the conveying direction of described workpiece The amount of the ablution being impregnated with in the part cleaning cloth of the position contacted with described workpiece is more than The cleaning cloth of the position that the downstream of the conveying direction being located at described workpiece contacts with described workpiece A part in the mode of the amount of ablution that is impregnated with to supply ablution.
Therefore, it is possible to workpiece conveying direction upstream side with impregnation ablution more clean cloth portion Distinguish and clear away surface sweeping, the downstream of this external workpiece conveying direction can with impregnation ablution less (or Be not impregnated with ablution) clean cloth part clean cleaning face.Therefore, it is possible to by fully containing being soaked with The cloth that cleans of ablution cleans the cleaning face of workpiece, and can suppress exactly by the striped etc. of ablution Generation, it is possible to more reliably clean.By the cleaning cloth more with ablution impregnation one Part cleans, it is possible to decompose the spot in the cleaning face that is attached to, thereafter, with the situation not using ablution Or the certain situation of ablution quantity delivered compares, by be impregnated with one of ablution less cleaning cloth Wiping is divided to be easier to remove spot.It should be noted that be no less than the feelings of three positions at abutted position Under condition, " that cleans cloth at upstream side and the described absorption surface of the conveying direction being positioned at workpiece The amount of the ablution point being impregnated with ratio is located at the downstream of conveying direction of described workpiece and described work The amount of the ablution that the part cleaning cloth of part contact position is impregnated with is many " refer in abutted position The impregnation amount of the ablution of the abutted position cleaning cloth that impregnation ablution is most is also than the conveying of workpiece The impregnation amount of the ablution that the abutted position of the most downstream in direction cleans cloth is many.
And then, this clearing apparatus can include the first cleaning component, presses towards the cleaning face of described workpiece Press described cleaning cloth;And second clean component, clean component, described workpiece described first The downstream of conveying direction, presses described cleaning cloth, described ablution towards the cleaning face of described workpiece Feed mechanism is to cleaning the described cleaning between component and described second cleaning component described first The part supply ablution of cloth.
Therefore, the first cloth part that cleans cleaning component and the second cleaning component is pressed to the cleaning face of workpiece Pressure, can clean the cleaning face of this workpiece.Due to by ablution feed mechanism to being positioned at described in the two Clean the cleaning cloth part supply ablution between component, it is possible to carry out described in the two, cleaning component The cleaning that the impregnation amount of ablution is different.
Described ablution feed mechanism can also clean component and described second clear to being positioned at described first Sweep the part supply ablution of the described cleaning cloth cleaning cloth direction of the supply upstream side of component.
Due to, it is possible to make ablution impregnation with first clean component and second cleaning component contact before clear Sweep cloth part.It is thus possible, for instance in the case of the cleaning face drying workpiece, exist compared to by complete The cleaning cloth of white drying, is cleaned by the cleaning cloth being impregnated with a little ablution, then can be the most clear Clear away the situation of surface sweeping, by using described mechanism in such a situation, more reliably clean into For possible.
The cleaning face that described clearing apparatus could be included for towards described workpiece presses described cleaning The press head of cloth, described first cleaning component and described second cleans component and is installed on described press head, Described first clean component and described second clean component in the plane in described cleaning face and with institute State and move back and forth on the direction that the conveying direction of workpiece is orthogonal.
Therefore, clean cloth and pressed to the cleaning face of workpiece by the first cleaning component and the second cleaning component, And clean component by the first cleaning component and second to move back and forth in said direction, then with workpiece Cleaning face contact clean cloth slide to the direction orthogonal with the conveying direction of workpiece such that it is able to more Clean cleaning face exactly.
Another invention completed for solving described technical problem is the workpiece cleaning transparent plate Workpiece purging system, including:
This clearing apparatus, cleans first of described workpiece;
Turning device, makes the described workpiece turning exported from described clearing apparatus;And
Another this clearing apparatus, while limit carries the described workpiece after being overturn by described turning device, Limit cleans second of described workpiece.
This workpiece purging system is transparent by cleaned by one face of this clearing apparatus upset Plate workpiece and transfer to another this clearing apparatus, it is possible to effectively clean the two sides of workpiece.This Outward, this workpiece purging system is carried out the two sides of the workpiece of tabular and cleans by this clearing apparatus, therefore can Enough two sides cleaning workpiece exactly.
Described workpiece purging system also includes removing by a clearing apparatus and another clearing apparatus The foreign material removing mechanism of the attachment at least one face of the described workpiece cleaned.Therefore, even if in institute State attachment attachment on workpiece, it is also possible to removed exactly by foreign material removing mechanism.
Described workpiece purging system also includes checking by a clearing apparatus and another clearing apparatus The inspection body of the described workpiece cleaned.Therefore, it is possible to check institute's quilt as mentioned above by inspection body The workpiece cleaned.
The clearing apparatus of the present invention and workpiece purging system can easily and securely clean the clear of workpiece Surface sweeping, it is possible to the complexity that suppression cost uprises and safeguards.
Accompanying drawing explanation
Fig. 1 is the schematic side elevation of the workpiece purging system of the first embodiment illustrating the present invention.
Fig. 2 is the schematic side elevation of the first clearing apparatus of the workpiece purging system of Fig. 1.
Fig. 3 is the schematic side elevation of the press head of first clearing apparatus of Fig. 2.
Fig. 4 is the schematic plan of the turning device of the workpiece purging system illustrating Fig. 1.
Fig. 5 is the schematic side elevation of the turning device of Fig. 4.
Fig. 6 is the schematic side elevation illustrating the workpiece purging system different from Fig. 1.
Detailed description of the invention
Below, the most referring to the drawings and embodiments of the present invention are described in detail.First, limit Referring to figs. 1 through Fig. 5, limit explanation includes that the workpiece of the clearing apparatus of first embodiment of the present invention is clear Sweep system 1.
[the first embodiment]
The workpiece purging system 1 of Fig. 1 be for clean such as be used in smart mobile phone glass cap or The system of lamella lucida P (workpiece) of touch screen etc..More specifically, the workpiece of present embodiment is clear The system of sweeping be automatically, clean lamella lucida P two sides (first p1 and second p2 (cleaning face)) While, and remove the foreign body being attached to lamella lucida P, and check the defect of lamella lucida P further System.In the present embodiment, workpiece (cleaning object) is thin plate as described lamella lucida Shape thing, cleaning face is the two sides of this laminal object.
The workpiece purging system 1 of present embodiment includes the clearing apparatus of two present embodiments, and Turning device is configured between two these clearing apparatus.Specifically, this workpiece purging system 1 includes limit Conveying lamella lucida P limit clean this lamella lucida P first p1 the first clearing apparatus 10A, make from The turning device 30 of lamella lucida P upset of this first clearing apparatus 10A output, limit conveying are turned over by this Rotary device 30 upset lamella lucida P limit clean this lamella lucida P second p2 (first p1's Opposite face) the second clearing apparatus 10B, can remove and be attached to from this second clearing apparatus 10B Foreign substance removing apparatus 50 and of the foreign body of first p1 and second p2 of lamella lucida P of output Check the inspection device 70 of lamella lucida P discharged from described foreign substance removing apparatus 50.Need explanation It is, as shown in Fig. 1 etc., the conveying direction X and second of lamella lucida P of the first clearing apparatus 10A The conveying direction X of lamella lucida P of clearing apparatus 10B is equidirectional.Herein, conveying direction X It is towards the direction of the second clearing apparatus 10B from the first clearing apparatus 10A.Additionally, this embodiment party The workpiece purging system 1 of formula has the loading attachment to the first clearing apparatus 10A supply lamella lucida P 90。
The workpiece purging system 1 of present embodiment also includes the control dress controlling the action etc. of various device Put (not shown).
<clearing apparatus>
The first clearing apparatus 10A and the second clearing apparatus 10B of present embodiment include a direction The conveying mechanism 11 of (conveying direction X) conveying workpieces (lamella lucida P), and make the cleaning of strip A part of cloth C be contacted with lamella lucida P carried by this conveying mechanism 11 cleaning face and carry should The sending mechanism 25 cleaning cloth in the cleaning face of cleaning.Specifically, as shown in Figures 2 and 3, first Clearing apparatus 10A and the second clearing apparatus 10B has the conveying mechanism 11 of conveying lamella lucida P, supports Meet the cleaning cloth C of the strip of lamella lucida P, for cleaning two of cloth C towards the pressing of lamella lucida P Press head 13, conveying clean the sending mechanism 25 of cloth C and to cleaning washing of cloth C supply ablution Clean liquid feed mechanism 28.This conveying mechanism 11, press head 13, sending mechanism 25 and ablution supply Mechanism 28 is carried out control action by described control device.It should be noted that the first clearing apparatus 10A With the second clearing apparatus 10B in the composition (such as carrying use strip cloth) of a part as be described hereinafter not With, other parts have identical structure.Additionally, the first clearing apparatus 10A and the second clearing apparatus 10B have be built-in with conveying mechanism 11, clean cloth C, press head 13, sending mechanism 25 and clean The housing 10h of liquid feed mechanism 28.This housing 10h (with reference to Fig. 1) has the input of lamella lucida P Mouthful and delivery outlet (not shown), and this input port and delivery outlet beyond be set to air-tight state, therefore In the first clearing apparatus 10A and the second clearing apparatus 10B, the cleaning of lamella lucida P is big fine and close Complete under closed state, it is therefore prevented that the dust comprised in extraneous air etc. are attached in lamella lucida P.Need It is noted that this housing 10h is provided with the shutter door (not shown) for maintenance etc..
(conveying mechanism)
Conveying mechanism 11 is the machine that will carry as lamella lucida P cleaning object along conveying direction X Structure.Conveying mechanism 11 is along lamella lucida P of the in-plane transporting thin plate object of lamella lucida P, specifically For, in the present embodiment, conveying mechanism 11 makes lamella lucida P with cleaning face (first and Two faces) state upward and carry, and the mechanism carried in the horizontal direction.It should be noted that " carry along in-plane " and refer to cleaning face (described first p1 and second along lamella lucida P P2) a direction conveying in direction.
The conveying mechanism 11 of the first clearing apparatus 10A carry lamella lucida P, that is be positioned at The face of the downside of lamella lucida P (second (as the face of opposite side of clean object first)) The state that contacts of whole face get off to carry lamella lucida P.Whole at second by such lamella lucida P Carried under the state of individual face contact, be the most entirely held on conveying mechanism 11 and clean between cloth C, Face (the first face) above is cleaned.Conveying mechanism as this first clearing apparatus 10A 11 can be such as made up of conveyer belt.
The conveying mechanism 11 of the second clearing apparatus 10B carry lamella lucida P, that is be positioned at The face of the downside of lamella lucida P (first (as the face of opposite side of clean object second)) The state that contacts of whole face get off to carry lamella lucida P.Connect in the first face by such lamella lucida P Carried under the state touched, the most entirely sandwich conveying mechanism 11 and clean between cloth C, second Cleaned.Can use as the conveying mechanism 11 of this second clearing apparatus 10B and have such as such as figure Conveyer belt shown in 1 and supply on this conveyer belt and with conveyer belt with identical speed move dry The clean carrying mechanism of strip thin slice 12.The conveying mechanism 11 of such second clearing apparatus 10B leads to Cross and there is carrying strip thin slice 12, then the of lamella lucida P cleaned by the first clearing apparatus 10A One side carried when being contacted with carrying strip thin slice 12, it is possible to prevent first the Make dirty in two clearing apparatus 10B.It should be noted that in the present embodiment, dress is cleaned second Put the height (upper-lower height) of lamella lucida P of conveying in the conveying mechanism 11 of 10B not enough first The height of lamella lucida P of conveying in the conveying mechanism 11 of clearing apparatus 10A.
It is described in further detail described conveyer belt.Conveyer belt includes conveyer belt 11a, conveying driven voller 11b With feed drive roller 11c.Conveyer belt 11a is made up of ring-type band member, and this conveyer belt 11a sets up In conveying driven voller 11b and feed drive roller 11c, along with the rotating conveying belt of feed drive roller 11c Carry driven voller 11b while 11a circulation also to rotate.This conveying driven voller 11b is arranged in after being positioned at Stating the more upstream side of the press head 13 of the upstream side of conveying direction X, feed drive roller 11c is arranged in It is positioned at the further downstream of the press head 13 in the downstream of aftermentioned conveying direction X.It should be noted that The equipping position of feed drive roller 11b and conveying driven voller 11c can also overturn.
Additionally, the conveying mechanism 11 of the first cleaning agency is from described loading attachment 90 (with reference to Fig. 1) Accept lamella lucida P, until being used for the first delivery areas A1 of transmission in turning device 30 after cleaning Till carry lamella lucida P (with reference to Fig. 5 and Fig. 6).Additionally, the conveying of the second clearing apparatus 10B Mechanism 11 accepts transparent in the second delivery areas A2 (with reference to Fig. 5 and Fig. 6) from turning device 30 Plate P, carries lamella lucida P till the discharging area of lamella lucida P and discharges.
(cleaning cloth)
Clean cloth C and clean the clear of lamella lucida P by moving on contact lamella lucida P limit, cleaning limit, position Surface sweeping (is positioned at the face of upside).Clean cloth C in the face cleaned in position so that lamella lucida P The relative mode in cleaning face be supplied to, by being pressed on lamella lucida P by described press head 13 limit Wiping cleaning face, limit, cleaning face, thus the cleaning face of cleaning.
Employ, as this cleaning cloth C, the cloth that fiber manufactures, such as, use fabric.As this fiber, The various fiber such as natural fiber, synthetic fibers can be used.Herein, the cleaning cloth C manufactured as fiber It is used as non-woven fabrics.In the case of using non-woven fabrics, can use as non-woven fabrics and pass through dry type Method, damp process, meltblown and form the non-woven fabrics of grabbing floss (Off リ ス).
(press head)
Two described press heads 13 are the most respectively at the conveying direction X of lamella lucida P On be arranged side-by-side successively.
Each press head 13 is provided with and will clean the part pressing of cloth C as shown in Figures 2 and 3 To the first cleaning component 14 of lamella lucida P, and the ratio first cleaning cloth C is cleaned component 14 more Part by the downstream of conveying direction X is pressed into the second cleaning component 15 of lamella lucida P.The most just It is to say, in the present embodiment, the first clearing apparatus 10A and the second clearing apparatus 10B cleans The cleaning position that cloth C contacts respectively with lamella lucida P has been arranged side by side everywhere along the conveying direction of lamella lucida. It should be noted that in the present embodiment, two press heads 13 have identical composition.This is years old One cleaning component 14 and the second cleaning component 15 are such as made up of elastic components such as silicon.
Each press head 13 has makes the first cleaning component 14 and second clean component 15 respectively in cleaning Cleaning member drives machine that is in the plane in face and that move back and forth on the orthogonal direction of conveying direction X Structure (not shown).It should be noted that " as in the plane in the face of cleaning and at conveying direction X Orthogonal direction " refer to that cleaning component 14 and second first cleans component 15 and can make cleaning cloth C contact is to the orthogonal direction of conveying direction X in the plane cleaning face of lamella lucida P, specifically, Refer to as on the face parallel with cleaning face and the orthogonal direction of conveying direction X.
It is set to for described 13 to move up and down.It is to say, it is (defeated to be arranged with respect to conveying mechanism 11 Send band) can close and separation.Therefore, when cleaning work, by make 13 to decline and can Make cleaning cloth C abut the cleaning face of lamella lucida P, when upkeep operation etc., can make again on 13 Rise.
(sending mechanism)
With reference to Fig. 1, sending mechanism 25 is illustrated.Described cleaning cloth C is by feeding device as mentioned Structure 25 carries.Herein, sending mechanism 25 has drive roll 25a and driven voller 25b.Clean cloth C It is set up in this drive roll 25a and driven voller 25b, cleans lamella lucida by the rotation of drive roll 25a The winds portions of the cleaning cloth C after P is in drive roll 25a.In this case, by driven voller 25b Release untapped cleaning cloth successively.
Sending mechanism 25 is set to along the direction contrary with the conveying direction X of lamella lucida P (Fig. 2's Y-direction) conveying cleaning cloth C (with reference to Fig. 2).It is to say, clean cloth C to pass through sending mechanism 25 are cleaning position (place abutted with lamella lucida P) rightabout (Fig. 2 along conveying direction X Y-direction) conveying clean cloth C.Described drive roll 25a is arranged in than all cleaning components 14,15 More by the upstream side of conveying direction X, described driven voller 25b be arranged in than all clean components 14, The downstream more depending on conveying direction X of 15.It should be noted that in the present embodiment, give Mechanism may be configured as carrying cleaning cloth C continuously, but be alternatively and intermittently carry, such as, cleaning During contact lamella lucida P of position, conveying cleans cloth C, stops when not contacting cleaning giving of cloth C.
Additionally, sending mechanism 25 is so that one of cleaning cloth C between two described press heads 13 Part guides from the mode of lamella lucida P separation.Specifically, sending mechanism 25 has and is arranged in The roller 26 above conveyer belt between two press heads 13.In sending mechanism 25, by by two Cleaning cloth C between press head 13 is set up in this roller 26, then the cleaning cloth C between two press heads 13 A part from lamella lucida P separate.
This roller 26 is made up of jockey pulley.It is to say, sending mechanism 25 includes having opening of jockey pulley Power adjustment portion, the tension force acting on cleaning cloth C is adjusted by tension adjustment portion.Specifically, open Power adjustment portion has two jockey pulleys of configuration side by side up and down, and the jockey pulley of top adjusts and is configured at conveying The tension force of a part of cleaning cloth C in the press head 13 in the downstream of direction X, and lower section Jockey pulley adjusts of the cleaning cloth C in the press head 13 of the upstream side being configured at conveying direction X The tension force divided.
It should be noted that described sending mechanism 25 will not clean position at four, (four will clean structure Part 14,15) cleaning cloth C turn over.It is to say, clean position at four, clean cloth C The cleaning face of face contact lamella lucida P, and the face of the other end contact each cleaning component 14, 15。
(ablution feed mechanism)
Ablution is supplied to described cleaning cloth C by ablution feed mechanism 28 as mentioned.Therefore, Lamella lucida P is cleaned by the cleaning cloth C of impregnation ablution.In the present embodiment, ablution supplies To mechanism 28 along conveying direction X respectively to being positioned at the first cleaning component 14 and the second cleaning component 15 Between cleaning cloth C a part supply ablution, and also to be positioned at described later than press head 13 more A part by the cleaning cloth C in the downstream of conveying direction X supplies ablution.
Ablution feed mechanism 28 has that to be arranged on the first cleaning component 14 and second as shown in Figure 3 clear Sweep the supply nozzle 28b between component 15.This supply nozzle 28b cleans the cleaning of cloth C from contact The surface supply ablution of side, face.Specifically, supply nozzle 28b cleans component 14 first With second clean between component 15 to cleaning the face relative with lamella lucida P of cloth C, more specifically Clean the face supply ablution of the downside of cloth C.
Supply nozzle 28b connects not shown ablution storage tank.Supply nozzle 28b supplies upward Ablution.The ablution impregnation being supplied to nozzle 28b supply cleans cloth C and arrives the clear of lamella lucida P Surface sweeping.From supply nozzle supply ablution amount so that decomposable asymmetric choice net be attached to lamella lucida P spot, Even and if the part cleaning cloth C by cleaning component 15 pressing carries out wiping action and does not the most remain bar The mode of stricture of vagina and adjust.Supply nozzle 28b is conical by its shape.In the present embodiment, formed as above Described composition, but also be able to use the composition above towards lower section supply ablution from cleaning cloth C.
As described ablution, the most particularly limit, but ethanol is preferably used, the most especially fit with ethanol Close and use.
Additionally, this workpiece purging system 1 also includes ablution supply unit 28, supply machine as ablution Structure 28, to the press head 13 being positioned at than the downstream being arranged in conveying direction X more by cleaning cloth C Part supply ablution (with reference to Fig. 1) of the cleaning cloth C of the upstream side of direction of the supply Y.Change speech It, this ablution supply unit 28 to be positioned at compare described first clean component 14 and described second clean Component 15 is more by cleaning the part supply ablution cleaning cloth of the upstream side of direction of the supply Y of cloth C. As this ablution supply unit 28, it is possible to use the various components such as injection nozzle.It should be noted that The ablution quantity delivered of this ablution supply unit 28 is less than the supply of the ablution cleaning component 14,15 Amount.
<turning device>
With reference to Fig. 1, Fig. 6 and Fig. 7, turning device 30 is described.Turning device 30 be as described make by The lamella lucida P upset that first clearing apparatus 10A (with reference to Fig. 1) exports, and to the second clearing apparatus The device that 10B (with reference to Fig. 1) supplies.Specifically, will from the first clearing apparatus 10A successively to Lamella lucida P that first delivery areas A1 (with reference to Fig. 6) supplies is delivered to the second delivery areas A2 (ginseng According to Fig. 6) in the second clearing apparatus 10B.
This turning device 30 is included in the first delivery areas A1 second p2 of absorption lamella lucida P , the maintaining part liberating described lamella lucida P in the second delivery areas A2 (adsorption section 32), This maintaining part (adsorption section 32) is attached to the arm 33 of end side and supports the other end of this arm 33 The rotating part 35 of side.It should be noted that turning device 30 has built-in described adsorption section 32, arm 33 and the housing 30h (with reference to Fig. 1) of rotating part 35 etc., this housing 30h has lamella lucida P Input port and delivery outlet (not shown), be set to air-tight state outside this input port and delivery outlet, therefore Upset and the conveying of lamella lucida P of turning device 30 complete, outside preventing under substantially air-tight state The dust etc. comprised in portion's air is attached to lamella lucida P.The housing 30h's of this turning device 30 is defeated The delivery outlet of the housing 10h of entrance and the first clearing apparatus 10A connects hermetically, additionally, upset dress The input port putting the delivery outlet of the housing 30h of 30 and the housing 10h of the second clearing apparatus 10B seals Ground connects.It should be noted that the housing 30h of this turning device 30 is provided with opening for maintenance etc. Close door (not shown).
And then, turning device 30 includes receipts component 31 and temporarily being disposed in the first delivery areas A1 Relative to rotating part 35 attracting direction prominent or retreating the prominent of described arm 33 along described adsorption section 32 Go out mechanism 34.Turning device 30 be included in the first delivery areas A1 support from below one transparent Plate P receives component 31 temporarily.Specifically, receive component 31 temporarily and be temporarily bearing in the first delivery areas A1 Second p2 of middle lamella lucida P discharged by the first clearing apparatus 10A (with reference to Fig. 1).Adsorption section Second p2 of lamella lucida P that component 31 supports is received in 32 absorption temporarily.Arm 33 is scalable.Specifically For, the end side of arm 33 is attached to adsorption section 32, from the described other end supported by rotating part 35 Scalable towards the direction of the described one end being attached to adsorption section 32.Prominent mechanism 34 is arranged on rotation Between portion 35 and arm 33, be as mentioned above relative to rotating part 35 along the attraction direction of adsorption section 32 Highlight or retreat the mechanism of arm 33.Specifically, prominent mechanism 34 by supporting arm 33 described separately The cylinder of end side is constituted.The fixing prominent mechanism 34 of rotating part 35, thus supporting arm 33 described above. During rotating part 35 with the rotary shaft being positioned in the plane parallel with lamella lucida P of adsorption section 32 absorption is The heart is rotatable.Specifically, this rotary shaft is that horizontal direction is (vertical with the direction of conveying lamella lucida P Direction), be set to the direction attracting direction vertical with adsorption section 32 in addition.Turning device 30 wraps Include multiple described adsorption section 32, described arm 33 and described prominent mechanism 34, these multiple described absorption Portion 32, described arm 33 and described prominent mechanism 34 are the most paired, adsorption section 32, institute described in a pair State arm 33 and described prominent mechanism 34 is set to substantially respectively centered by the rotary shaft of rotating part 35 Rotationally symmetrical.It should be noted that " the most rotationally symmetrical " refers not only to the situation of fully rotating symmetry, Also include absorption and the second delivery areas A2 being configured to lamella lucida P in the first delivery areas A1 In the liberation of another lamella lucida P situation about can simultaneously carry out.Such as, as the most rotationally symmetrical A pair delivery areas (or arm, adsorption section 32) even if in one with the distance of rotary shaft separately In the case of one and less than more than the 90% 110% of the distance of rotary shaft, delivery areas is the most also The most rotationally symmetrical.Relative to rotary shaft differential seat angle too, specifically, such as link make For one and rotary shaft in the most rotational symmetric a pair delivery areas (or arm, adsorption section 32) Imaginary line and link in the case of another becomes less than 10 ° with the imaginary line of rotary shaft, transmit Region is the most also the most rotationally symmetrical.
<foreign substance removing apparatus>
With reference to Fig. 1 and foreign substance removing apparatus 50 is described.Foreign substance removing apparatus 50 is for being attached to First p1 and second p2 different such as described lamella lucida P by the second clearing apparatus 10B output Thing carries out the device removed.In this workpiece purging system 1, though the cleaning cloth manufactured due to fiber C etc. and cause foreign body to be attached to lamella lucida P, it is also possible to removed by described foreign substance removing apparatus 50.
This foreign substance removing apparatus 50 includes: has and is contacted with first p1 of lamella lucida P and second The adhesion component of the bonding plane of p2 and the foreign body of the bonding plane that is attached to this adhesion component can be removed Adhesion strength recovery mechanism.In the present embodiment, foreign substance removing apparatus 50 includes clipping lamella lucida P Two adhesion components 51 relative to each other.Specifically, foreign substance removing apparatus 50 have clip transparent Plate P a pair adhesive roller opposing upper and lower 51 (adhesion component), this adhesive roller 51 has on outer peripheral face Cohesively.
Discharge additionally, foreign substance removing apparatus 50 has carrying the second clearing apparatus 10B as shown in Figure 1 The free roll 52 of lamella lucida P, the described adhesive roller 51 of upper and lower a pair is each other by driving motor (not shown) and rotate, by the rotation of adhesive roller 51, lamella lucida P is transported to downstream.
Described adhesion strength recovery mechanism has the viscous of the strip of the bonding plane that can contact adhesive roller 51 Band 53.This adhesion zone 53 adhesive roller 51 with upper and lower a pair is oppositely arranged respectively.
Described adhesion zone 53 has the adhesion strength stronger than the bonding plane (outer peripheral face) of described adhesive roller 51 Bonding plane, the bonding plane of this adhesion zone 53 can by paste, peel off adhesive roller 51 bonding plane Remove the foreign body being attached to adhesive roller 51.
Foreign substance removing apparatus 50 has the adhesion zone sending mechanism 54 carrying described adhesion zone 53.Herein, Adhesion zone sending mechanism 54 is set to intermittently make adhesion zone 53 contact adhesive roller 51.Specifically, While adhesion zone sending mechanism 54 is set to set up adhesion zone 53 and relative with adhesive roller 51 Adhesion zone roller 54 (adhesion zone sending mechanism) can close/separation adhesive roller 51.
It should be noted that foreign substance removing apparatus 50 has built-in described adhesive roller 51 and adhesion strength is extensive The housing 50h of structure 53 grade of answering a pager's call.This housing 50h has input port and the delivery outlet of lamella lucida P, It is set to air-tight state outside this input port and delivery outlet.Therefore, in foreign substance removing apparatus 50, Foreign body removes and carries out when the most airtight as mentioned, prevents the dirt being contained in extraneous air Angstrom etc. be attached to lamella lucida P.Additionally, the input port of the housing 50h of foreign substance removing apparatus 50 and the The delivery outlet of the housing 10h of two clearing apparatus 10B connects hermetically.It should be noted that this foreign body The housing 50h of removing device 50 is provided with the shutter door (not shown) for maintenance etc..
<inspection device>
Described inspection device 70 is to check such as described lamella lucida P discharged by foreign substance removing apparatus 50 Device.
This inspection device 70 has the mechanism (not shown), saturating to carried of conveying lamella lucida P The Lighting Division 71 of isotropic disk P irradiation light and shooting irradiated by light after the photographing unit of lamella lucida P 72.It should be noted that check that device 70 has built-in described Lighting Division 71 and photographing unit 72 etc. Housing 70h.This housing 70h has input port and the delivery outlet (not shown) of lamella lucida P, should It is set to air-tight state outside input port and delivery outlet.Therefore, in checking device 70, lamella lucida P Inspection carry out in sealed states.The input port of the housing 70h of this inspection device 70 is removed with foreign body The delivery outlet removing the housing 50h of device 50 connects hermetically.It should be noted that this inspection device The housing 70h of 70 is provided with the shutter door (not shown) for maintenance etc..
In the present embodiment, check that device 70 has multipair described Lighting Division 71 and photographing unit 72, Various image is shot by reflection light or through light etc. by multipair Lighting Division 71 and photographing unit 72. This workpiece purging system sends described image to described control device, carries out lamella lucida by controlling device The quality judgement adhering to or having zero defect etc. of the upper foreign body of P.
<advantage>
According to this workpiece purging system 1, cleaned the first of lamella lucida P by the first clearing apparatus 10A Face p1, cleans lamella lucida P after first p1 and is reversed device 30 and overturns, due to by this upset Second p2 of lamella lucida P cleaned by the second clearing apparatus 10B, therefore, it is possible to people just stays out of The two sides of lamella lucida P can be cleaned.
Additionally, the first clearing apparatus 10A and the second clearing apparatus 10B is defeated by conveying mechanism 11 respectively While sending lamella lucida P, and repeatedly can be cleaned by a face of the cleaning cloth C of a block length strip The cleaning face (first p1 and second p2) of this lamella lucida P.Therefore, at the first clearing apparatus In 10A and the second clearing apparatus 10B, it is possible to carry out desired cleaning, energy in multiple cleaning positions Enough two sides cleaning lamella lucida P exactly.Additionally, do not make cleaning cloth C overturn in multiple cleaning positions And clean cleaning face by cleaning a face of cloth C, and need not such as the cleaning of conventional portion of terminal Device equally arranges roll-over unit, therefore, it is possible to suppression high cost and the complexity of maintenance.
Additionally, due to clean cloth C the most described with one piece clean cloth C a face repeatedly cleaning Face, and clean cloth C along the rightabout conveying with conveying direction X, it is possible to conveying direction X's Downstream (clean cloth and give the upstream side in direction) by not using (not in contact with) cleaning cloth C clear Sweep lamella lucida P, and pass through at the upstream side (clean cloth and give the downstream in direction) of conveying direction X After using, the cleaning cloth C of (after contact) cleans lamella lucida P.Therefore, each several part energy of cloth C is cleaned It is enough in while repeatedly cleaning, and can also be along with conveying direction X is by under the less state of spot Clean cloth C and clean lamella lucida P.
Additionally, due to the first clearing apparatus 10A and the second clearing apparatus 10B includes to cleaning cloth C The ablution feed mechanism of supply ablution, it is possible to the most clear by the cleaning cloth C containing ablution Sweep the cleaning face of lamella lucida P.
And then, the first clearing apparatus 10A and the second clearing apparatus 10B includes adjusting two press heads The jockey pulley of the tension force of the cleaning cloth C between 13, therefore can give to clean cloth at each press head 13 The sufficient tension force of C, it is possible to clean more accurately.
Described ablution feed mechanism 28 also to press head 13 clean cloth direction of the supply upstream side clear Sweep cloth C supply and do not remain a small amount of ablution of striped degree, compared to the cleaning cloth by being completely dried C, by by be impregnated with a little ablution cleaning cloth C clean, it is possible to more neatly clean cleaning face, Make to clean more accurately to be possibly realized.
Described ablution feed mechanism 28 directly to the cleaning cloth C being positioned at below press head 13 with transparent Face (face of lower section) the supply ablution of plate P contact, therefore, it is possible to clear by cleaning cloth C efficiently Sweep lamella lucida P.
Additionally, clean component 15 along described transparent when cleaning by the first cleaning component 14 and second The orthogonal direction of the conveying direction X of plate P moves back and forth, clear at this first cleaning component 14 and second Sweep the cleaning cloth C of component 15 to move back and forth along the orthogonal direction of conveying direction X, therefore, it is possible to logical Cross cleaning cloth C and clean cleaning face more accurately.
Additionally, due to this workpiece purging system include can be to being attached to as described by the second clearing apparatus The foreign body that the foreign body of first p1 and second p2 of lamella lucida P of 10B output carries out removing removes Device 50, it is assumed that even if causing different in the described cleaning stage due to the cleaning cloth C etc. of fiber manufacture Thing is attached to lamella lucida P, it is also possible to remove foreign body exactly by foreign substance removing apparatus 50.
Described foreign substance removing apparatus 50 includes can be to the foreign body of the bonding plane being attached to adhesive roller 51 Adhesion zone 53 removes, therefore, it is possible to removed from the bonding plane of adhesive roller 51 by adhesion zone 53 Remove attached foreign body, therefore make the adhesion strength of the bonding plane of adhesive roller 51 recover, and this workpiece Purging system can be for a long time with suitable state operating.
Additionally, foreign substance removing apparatus 50 has the adhesion zone sending mechanism 54 of conveying adhesion zone 53, by It is set to intermittently make adhesion zone 53 contact adhesive roller 51 in this adhesion zone sending mechanism 54, it is possible to Reduce the usage amount of adhesion zone.
And then, this workpiece purging system includes checking lamella lucida P discharged by foreign substance removing apparatus 50 Inspection device 70, therefore, by checking device 70 it can be found that defect etc. same of lamella lucida P Time, even and if be attached to lamella lucida P at the foreign body cleaning stage fiber etc., it is also possible to pass through as described Foreign substance removing apparatus 50 removes described foreign body exactly, therefore, make in described inspection device 70 by It is judged as that in described foreign body the worry of the defect of lamella lucida P reduces.
[other embodiments]
Whole point of embodiment of disclosure is example, is not limited to the present invention.This Bright scope does not limit the composition of described embodiment, comprises by shown in claims and right Whole in intention that claim is impartial and scope change the displacement of the composition (, increase and delete).
It is to say, in said embodiment, illustrate that the conveying mechanism by the second clearing apparatus is defeated The height (vertical height) of lamella lucida P sent is less than by the conveying mechanism conveying of the first clearing apparatus The device of the height of lamella lucida P, but the present invention is not limited to this, clear by the first clearing apparatus and second The height of the lamella lucida of the conveyer device conveying of sweeping device also can be identical.But, clean system at this workpiece In system, the height (position) of the lamella lucida of the conveyer device conveying of the first clearing apparatus cleans with second The height (position) of the conveyer device conveying lamella lucida of device is different, preferably so that arranging rotating part Rotary shaft is positioned at the side in the vertical direction between the height (position) of two conveyors conveying lamella lucida Formula and arrange, thus, turning device can be protected under top view in the way of overlapping with rotating part Hold lamella lucida, therefore, it is possible to closely set the first delivery areas and the second delivery areas, thus reduce The proprietary area of this workpiece purging system.Specifically, as shown in Figure 6, by the second clearing apparatus 10B Lamella lucida P of conveying mechanism 11 conveying higher than by the conveying mechanism 11 of the first clearing apparatus 10A Lamella lucida P of conveying, also in the desired extent of the present invention.It should be noted that in figure 6, The component with the composition identical with the first embodiment and function uses identical symbol.
Additionally, in said embodiment, illustrate to be tightly connected housing defeated of the second clearing apparatus The device of input port of the housing of outlet and foreign substance removing apparatus, but also can be at the second clearing apparatus and different The loader that it should be noted that is configured between thing removing device.And then, in the downstream checking device Configuration lamination device, it is possible to attach protecting film on the two sides of the lamella lucida checked after terminating.
In said embodiment, as the first clearing apparatus 10A's and the second clearing apparatus 10B Conveying mechanism employs conveyer belt, but the present invention is not limited to this, it is possible in absorption lamella lucida P Use under the state of lower surface towards the conveying direction moveable conveying mechanism of X etc..
In said embodiment, clean component as first and the second cleaning component accompanying drawing illustrates respectively Use the component of the pad of same shape, it is also possible to be the variform component of each pad.Additionally, first Clean component and the second cleaning component also can be constituted with a component.
In said embodiment, it is shown that on conveying direction X, ablution feed mechanism is except pressing The external downstream of pressure head supplies to cleaning cloth less than at press head to the amount of the ablution cleaning cloth supply To the composition of the amount of ablution, but it is not limited to this.According to purpose or composition, it is also possible to be in conveying side On X, ablution feed mechanism is except the external downstream of press head is to cleaning cloth supply ablution Amount is more than the composition of the amount of the ablution supplied to cleaning cloth at press head.
In said embodiment, have employed ablution feed mechanism directly to cleaning cloth supply ablution Composition, but be not limited to this, such as, make the composition of ablution vaporization supply ablution or use roller to supply To the composition of ablution.
In said embodiment, clean cloth at one piece and use two press heads 13 to clean, but this Bright it is not limited to this, it is also possible to be the compositions using and cleaning cloth no less than two pieces.Relative to one piece of cleaning Cloth at two more than clean lamella lucida P composition.
In said embodiment, have employed the mechanism including two press heads 13, but the present invention is also It is not limited to this, can also be the structure only including a press head according to cleaning object, situation or environment etc. Become or the composition of more than three press heads of bag.
In said embodiment, have employed the first cleaning component and the second cleaning component is the most vertical The mechanism of movement, but it is not limited to this, it is also possible to it is that the first cleaning component and second cleans component respectively The composition moved vertically independently.It is further possible to use the first cleaning component and second to clean component In the plane in the face of cleaning, and the composition independently moved on the orthogonal direction of conveying direction X.
In said embodiment, have employed with the nozzle supply ablution supplying ablution upward Mechanism, but may also comprise the part pressing to the ablution supplying this mechanism and clean the mechanism of cloth.
In said embodiment, it is arranged at the supply nozzle of the press head of upstream side at conveying direction X, With the ablution quantity delivered of the supply nozzle of the press head being arranged at downstream at conveying direction X substantially Identical, but the present invention is not limited to this, material based on lamella lucida or kind, the material of scrubber or The many factors such as kind, it is also possible to the supply nozzle of one end supplies greater amount than the supply nozzle of the other end Ablution.
Additionally, illustrate that clearing apparatus has the situation of ablution feed mechanism in said embodiment, But the present invention is not necessarily limited to this, also it is not limited in the case of ablution feed mechanism is set The supply position of described embodiment, it is possible to according to cleaning the suitably design for change such as object.Such as, In said embodiment, ablution feed mechanism have employed also to lamella lucida conveying direction most upstream The composition cleaning cloth supply ablution cleaning cloth direction of the supply upstream side of press head, but can change It is designed as not supplying ablution to this part.
And then, even if cleaning, to first, the part confession cleaning cloth that component and second cleans between component In the case of ablution, also it is not limited to as described embodiment ablution feed mechanism from clearly Sweep the lower section supply ablution of cloth, it is also possible to from the top supply ablution cleaning cloth.However, it is preferred to The face that the part between component and the second cleaning component is relative to the cleaning face cleaning cloth is cleaned first Supply ablution, therefore, it is possible to clean lamella lucida efficiently with cleaning cloth as discussed.
Additionally, in said embodiment, illustrate to include the first clearing apparatus, turning device, The workpiece purging system of two clearing apparatus, foreign substance removing apparatus and inspection device, but clearing apparatus is independent Component also in the desired extent of the clearing apparatus of the present invention.In addition the workpiece purging system of the present invention Also include that two these clearing apparatus and turning device, foreign substance removing apparatus and inspection device are not must The constituent of palpus.
In the foreign substance removing apparatus of described embodiment, have employed and carry transparent by adhesive roller 51 The composition of plate P, but the present invention is not limited to this, it is also possible to and the part at free roll arranges motor Carry lamella lucida P.
In the foreign substance removing apparatus of described embodiment, in order to carry adhesion zone 53, adhesion zone is set Sending mechanism 54, but the present invention is not limited to this, it is also possible to come by the way of winding adhesion zone 53 Give.
Even if additionally, in the case of arranging foreign substance removing apparatus, being also not limited to be set to as such as Stating foreign substance removing apparatus in embodiment and can remove the foreign body on the two sides of lamella lucida, may be configured as can Remove the foreign body of cleaning face (a most only face of lamella lucida) of workpiece.It should be noted that In the case of the most described clearing apparatus uses the cleaning cloth of fiber manufacture to clean, it is preferably arranged to Foreign substance removing apparatus can remove the foreign body cleaning face cleaned with this cleaning cloth, therefore due to fiber system That makes is cleaned cloth and causes the foreign body of attachment suitably can be removed by foreign substance removing apparatus.
Industrial applicability
The clearing apparatus of the present invention and workpiece purging system can be suitably with in showing at portable equipment The cleaning of the lamella lucida of the glass substrate etc. used in showing device.
Symbol description
10A the first clearing apparatus
10B the second clearing apparatus
13 press heads
14 first clean component
15 second clean component
25 sending mechanisms
28 ablution feed mechanisms
30 turning devices
50 foreign substance removing apparatus
70 check device
C cleans cloth
P lamella lucida (workpiece)
First of P1 lamella lucida
Second of P2 lamella lucida
The conveying direction of X lamella lucida
The rightabout of the conveying direction of Y lamella lucida

Claims (11)

1. a clearing apparatus, for cleaning the cleaning face of workpiece, it is characterised in that
Including:
Conveying mechanism, carries described workpiece in one direction;And
Sending mechanism, for making the part cleaning cloth of strip touch by described conveyer The cleaning face of the described workpiece of structure conveying cleans described cleaning face and gives described cleaning cloth,
At least two position on the conveying direction of described workpiece, one face of described cleaning cloth Contact described workpiece and clean the cleaning face of described workpiece.
Clearing apparatus the most according to claim 1, wherein,
Described clearing apparatus be additionally included between the cleaning position of said two position to described clearly Sweep the ablution feed mechanism of cloth supply ablution.
Clearing apparatus the most according to claim 2, wherein,
Described ablution feed mechanism is from the face with described cleaning face contact side of described cleaning cloth Supply ablution.
Clearing apparatus the most according to claim 2, wherein,
Described sending mechanism is described clearly along the direction conveying contrary with the conveying direction of described workpiece Sweep cloth.
Clearing apparatus the most according to claim 2, wherein,
Described ablution feed mechanism is so that being located at the upstream side of the conveying direction of described workpiece The amount of the ablution being impregnated with in the part cleaning cloth of the position contacted with described workpiece The position contacted with described workpiece more than the downstream of the conveying direction being located at described workpiece The part cleaning cloth in the mode of the amount of ablution that is impregnated with to supply ablution.
Clearing apparatus the most according to claim 2, wherein,
Described clearing apparatus also includes:
First cleans component, presses described cleaning cloth towards the cleaning face of described workpiece;And
Second cleans component, cleans component, the conveying direction of described workpiece described first Downstream, towards described workpiece cleaning face press described cleaning cloth,
Described ablution feed mechanism cleans component and described second cleaning to being positioned at described first The part supply ablution of the described cleaning cloth between component.
Clearing apparatus the most according to claim 6, wherein,
Described ablution feed mechanism also cleans component and described second clear to being positioned at described first Sweep the part supply ablution of the described cleaning cloth cleaning cloth direction of the supply upstream side of component.
8. according to the clearing apparatus described in claim 5 or 6, wherein,
Described clearing apparatus also includes for pressing described cleaning towards the cleaning face of described workpiece The press head of cloth,
Described first cleaning component and described second cleans component and is installed on described press head,
Described first clean component and described second clean component in the plane in described cleaning face, And move back and forth on the direction orthogonal with the conveying direction of described workpiece.
9. a workpiece purging system, for cleaning the workpiece of transparent tabular,
Described workpiece purging system includes:
One clearing apparatus according to claim 1, cleans first of described workpiece;
Turning device, makes the described workpiece turning exported from described clearing apparatus;And
Another clearing apparatus according to claim 1, limit conveying is by described upset dress While putting the described workpiece after upset, limit cleans second of described workpiece.
Workpiece purging system the most according to claim 9, wherein,
Described workpiece purging system also includes removing by a clearing apparatus and another cleaning The foreign material removing mechanism of the attachment at least one face of the described workpiece that device cleans.
11. workpiece purging systems according to claim 9, wherein,
Described workpiece purging system also includes checking by a clearing apparatus and another cleaning The inspection body of the described workpiece that device cleans.
CN201610060169.5A 2015-01-30 2016-01-28 Clearing apparatus and workpiece purging system Active CN105834183B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113172066A (en) * 2017-07-12 2021-07-27 哈里斯股份有限公司 Cleaning system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114146920B (en) * 2021-12-02 2023-03-07 绍兴泓润纺织科技有限公司 Knitting waste collection processing apparatus

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06203257A (en) * 1992-12-26 1994-07-22 San Denshi Kogyo Kk Automatic card cleaning device
CN101151104A (en) * 2005-04-01 2008-03-26 松下电器产业株式会社 Substrate terminal cleaning apparatus and substrate terminal cleaning method
CN103447263A (en) * 2013-08-27 2013-12-18 何灯跃 Cover plate cleaning machine
CN203356136U (en) * 2013-06-05 2013-12-25 信利半导体有限公司 Electronic equipment screen wiping device
KR20140040931A (en) * 2012-09-27 2014-04-04 (주)와이티에스 Cleaning apparatus of compact display panel
DE102013223269A1 (en) * 2012-11-14 2014-05-15 Becker Systems GmbH Device for electrostatic cleaning of surfaces of e.g. flat-lying objects, has conveying unit comprising roll that brings film into contact or into close proximity to conveyer, and pressing unit pressing film to surface to be cleaned
CN204052216U (en) * 2014-06-25 2014-12-31 青岛海鼎通讯技术有限公司 Optical glass cleaning machine

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0829852B2 (en) * 1992-10-21 1996-03-27 産電子工業株式会社 Image recording card automatic cleaning device
JPH0794563A (en) * 1993-09-20 1995-04-07 Fujitsu Ltd Dust particle eliminator for semiconductor board
JP3236742B2 (en) * 1994-09-28 2001-12-10 東京エレクトロン株式会社 Coating device
JP2002126662A (en) * 2000-10-31 2002-05-08 Optrex Corp Device for cleaning liquid crystal cell
JP2005227765A (en) * 2004-01-16 2005-08-25 Ishii Hyoki Corp Apparatus for removing foreign matter from liquid crystal glass substrate
JP3964886B2 (en) * 2004-05-24 2007-08-22 日本ミクロコーティング株式会社 Panel cleaning apparatus and method
JP2006068706A (en) * 2004-09-06 2006-03-16 Nihon Micro Coating Co Ltd Panel cleaning device and method
KR20070114875A (en) * 2006-05-30 2007-12-05 삼성전자주식회사 Cleaning apparatus for glass plate
KR101270823B1 (en) * 2011-05-26 2013-06-05 이진형 Washing device
JP2013191812A (en) * 2012-03-15 2013-09-26 Dainippon Screen Mfg Co Ltd Solar cell module cleaning device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06203257A (en) * 1992-12-26 1994-07-22 San Denshi Kogyo Kk Automatic card cleaning device
CN101151104A (en) * 2005-04-01 2008-03-26 松下电器产业株式会社 Substrate terminal cleaning apparatus and substrate terminal cleaning method
KR20140040931A (en) * 2012-09-27 2014-04-04 (주)와이티에스 Cleaning apparatus of compact display panel
DE102013223269A1 (en) * 2012-11-14 2014-05-15 Becker Systems GmbH Device for electrostatic cleaning of surfaces of e.g. flat-lying objects, has conveying unit comprising roll that brings film into contact or into close proximity to conveyer, and pressing unit pressing film to surface to be cleaned
CN203356136U (en) * 2013-06-05 2013-12-25 信利半导体有限公司 Electronic equipment screen wiping device
CN103447263A (en) * 2013-08-27 2013-12-18 何灯跃 Cover plate cleaning machine
CN204052216U (en) * 2014-06-25 2014-12-31 青岛海鼎通讯技术有限公司 Optical glass cleaning machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113172066A (en) * 2017-07-12 2021-07-27 哈里斯股份有限公司 Cleaning system
CN114669568A (en) * 2017-07-12 2022-06-28 哈里斯股份有限公司 Cleaning system

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CN105834183B (en) 2019-08-16

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