CN113126370A

CN113126370A - Transmission line structure and manufacturing method thereof, phase shifter and liquid crystal antenna

Info

Publication number: CN113126370A
Application number: CN202110441456.1A
Authority: CN
Inventors: 杨作财; 段勤肄; 何宁; 王东花; 扈映茹; 席克瑞; 贾振宇; 陈飞
Original assignee: Chengdu Tianma Micro Electronics Co Ltd
Current assignee: Chengdu Tianma Micro Electronics Co Ltd
Priority date: 2021-04-23
Filing date: 2021-04-23
Publication date: 2021-07-16

Abstract

The invention discloses a transmission line structure and a manufacturing method thereof, a phase shifter and a liquid crystal antenna, and relates to the technical field of signal transmission, wherein the transmission line structure comprises: a first substrate, a first conductive part and a first auxiliary part; the first auxiliary part is arranged on the side surface of the first conductive part along the direction parallel to the first substrate, the first side surface of the first auxiliary part is contacted with the first conductive part, and the second side surface is positioned on one side of the first side surface far away from the first conductive part; the second side surface comprises a first end part and a second end part, and the second end part is positioned on one side of the first end part far away from the first conductive part; the distance between the first end part and the first substrate is larger than that between the second end part and the first substrate along the direction vertical to the first substrate; an acute angle in an included angle between the extending direction of the second side face and the extending direction of the plane where the first substrate is located is alpha, and an included angle between the bottom face and the side face of the first conductive part is beta, wherein alpha is less than beta. Thus, the in-plane alignment uniformity of the transmission line structure is improved.

Description

Transmission line structure and manufacturing method thereof, phase shifter and liquid crystal antenna

Technical Field

The invention relates to the technical field of signal transmission, in particular to a transmission line structure, a manufacturing method thereof, a phase shifter and a liquid crystal antenna.

Background

With the continuous development of communication technology, people have increasingly greater demands for high-capacity and high-transmission-speed communication. The transmission line structure is an important component of communication media, and devices such as liquid crystal antennas and the like all comprise the transmission line structure, wherein the liquid crystal antenna is an antenna which utilizes the dielectric anisotropy of liquid crystal to change the dielectric constant of the liquid crystal by controlling the deflection direction of the liquid crystal so as to change the phase shifting magnitude of a phase shifter and further adjust the alignment direction of a phased array antenna. Compared with the traditional horn antenna, the spiral antenna, the array antenna and the like, the liquid crystal antenna has the characteristics of miniaturization, wide frequency band, multiband, high gain and the like, and is an antenna more suitable for the current technical development direction.

In the existing transmission line structure, the thickness of the metal line resistor is large, so that an enlarged segment difference appears in the transmission line structure, and in the friction alignment process, the friction cloth is possibly damaged by the edge of the high segment difference, the alignment uniformity is influenced, and the normal work of the transmission line is further influenced.

Disclosure of Invention

In view of this, the present invention provides a transmission line structure, a manufacturing method thereof, a phase shifter and a liquid crystal antenna, so as to improve the in-plane alignment uniformity of the transmission line structure, and further enable the phase adjustment control of the phase shifter and the liquid crystal antenna to be more accurate.

In a first aspect, the present application provides a transmission line structure comprising:

the conductive substrate comprises a first base, a first conductive part and a first auxiliary part, wherein the first conductive part and the first auxiliary part are arranged on the first base; in a direction perpendicular to the first substrate, a surface of the first auxiliary portion away from the first substrate does not exceed a surface of the first conductive portion away from the first substrate;

the first auxiliary portion is arranged on the side surface of the first conductive portion along a direction parallel to the plane of the first substrate, the first auxiliary portion comprises a first side surface and a second side surface, the first side surface is in contact with the first conductive portion, and the second side surface is positioned on one side of the first side surface, which is far away from the first conductive portion; the second side surface comprises a first end part and a second end part, and the second end part is positioned on one side of the first end part far away from the first conductive part; the distance between the first end part and the first substrate is larger than the distance between the second end part and the first substrate along the direction perpendicular to the plane of the first substrate;

an acute angle in an included angle between the extending direction of the second side face and the extending direction of the plane where the first substrate is located is alpha, and an included angle between the bottom face and the side face of the first conductive part is beta, wherein alpha is less than beta.

In a second aspect, the present invention provides a method for manufacturing a transmission line structure, which is applied to the transmission line structure in the present application, and the method includes:

providing a first substrate;

manufacturing a conductive part on the first substrate, and coating photosensitive glue on one side of the conductive part, which is far away from the first substrate;

forming a first conductive part by adopting an exposure development and etching mode, and reserving the photosensitive glue on the surface of the first conductive part far away from the first substrate;

forming a first auxiliary part on the side wall of the first conductive part by adopting an organic material electroplating process;

removing the photosensitive resist on one side of the first conductive part, which is far away from the first substrate;

the first auxiliary portion comprises a first side surface and a second side surface along a direction parallel to the plane of the first substrate, the first side surface is in contact with the first conductive portion, and the second side surface is located on one side, away from the first conductive portion, of the first side surface; the second side surface includes a first end portion and a second end portion arranged in a direction in which the first conductive portion is directed to the first auxiliary portion; the distance between the first end part and the first substrate is larger than the distance between the second end part and the first substrate along the direction perpendicular to the plane of the first substrate; an acute angle in an included angle between the extending direction of the second side face and the extending direction of the plane where the first substrate is located is alpha, and an included angle between the bottom face and the side face of the first conductive part is beta, wherein alpha is less than beta.

In a third aspect, the present invention provides another manufacturing method of a transmission line structure, which is applied to the transmission line structure in the present application, and the manufacturing method includes:

providing a first substrate;

manufacturing a first conductive part on the first substrate, and coating photosensitive glue on one side of the first conductive part, which is far away from the first substrate;

removing part of the photosensitive resist by adopting an exposure and development mode, and reserving part of the photosensitive resist to form a first auxiliary part, wherein the first auxiliary part is arranged on the side surface of the first conductive part along the direction parallel to the plane of the first substrate;

In a fourth aspect, the present application provides a phase shifter, comprising: the liquid crystal display panel comprises a first substrate, a second substrate and liquid crystal filled between the first substrate and the second substrate, wherein the first substrate and the second substrate are oppositely arranged;

the first substrate comprises a grounding layer which is of a planar structure; the second substrate includes the transmission line structure described herein.

In a fifth aspect, the present application provides a liquid crystal antenna, including:

the liquid crystal display panel comprises a first substrate, a second substrate, liquid crystal and a radiator electrode, wherein the first substrate and the second substrate are arranged oppositely, the liquid crystal is filled between the first substrate and the second substrate, and the radiator electrode is positioned on one side of the second substrate, which is far away from the first substrate;

the first substrate and/or the second substrate comprise a transmission line structure as provided herein.

Compared with the prior art, the transmission line structure, the manufacturing method thereof, the phase shifter and the liquid crystal antenna provided by the invention at least realize the following beneficial effects:

in the invention, a first auxiliary part is arranged on the side surface of a first conductive part of a transmission line structure, and the first auxiliary part does not exceed the first conductive part along the direction vertical to a first substrate; the first side surface of the first auxiliary portion is in contact with the first conductive portion, and the second side surface is located on one side, away from the first conductive portion, of the first side surface. The second side surface of the first auxiliary portion is obliquely arranged, and the distance between the first end portion close to the first conductive portion and the first substrate is larger than the distance between the second end portion far away from the first conductive portion and the first substrate, that is, the second side surface of the first auxiliary portion is in a slope structure along the direction in which the first conductive portion points to the first auxiliary portion. Particularly, an acute angle in an included angle between the extending direction of the second side surface and the extending direction of the plane where the first substrate is located is smaller than an included angle between the bottom surface and the side surface of the first conductive part, that is, with respect to the first substrate, the slope of the second side surface in the first auxiliary part is smaller, and the slope of the side surface of the first conductive part is larger. When the first auxiliary part is not arranged, in the process of rubbing and aligning, a sharp corner is formed on one side, far away from the first substrate, of the first conductive part with a large gradient. The first auxiliary part is introduced into the side face of the first conductive part, the first side face of the first auxiliary part is in direct contact with the side face of the first conductive part, in the friction alignment process, fluff in a gap between two adjacent first conductive parts moves, the first auxiliary part serves as a transition medium, the fluff sequentially passes through the gap, the first auxiliary part further reaches the surface of the first conductive part, the transition is smooth, the phenomenon that the fluff directly moves to a sharp-corner position from the gap and damages friction cloth by the sharp corner is avoided, the problem that the uniformity of in-plane alignment caused by damage to the friction cloth in the friction alignment process is poor is effectively solved, and therefore the uniformity of in-plane alignment is favorably improved, and the phase adjustment control of the phase shifter and the liquid crystal antenna is more accurate.

Of course, it is not necessary for any product in which the present invention is practiced to achieve all of the above-described technical effects simultaneously.

Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.

Fig. 1 is a top view of a transmission line structure according to an embodiment of the present invention;

fig. 2 is an AA cross-sectional view of the transmission line structure of fig. 1;

FIG. 3 is a relative position diagram of the first conductive portion and the first auxiliary portion;

FIG. 4 is a schematic diagram of a conductive portion of a related art transmission line structure;

fig. 5 is a diagram illustrating another relative position relationship between the first conductive part and the first auxiliary part according to an embodiment of the present invention;

fig. 6 is a diagram illustrating another relative position relationship between the first conductive part and the first auxiliary part according to an embodiment of the present invention;

fig. 7 is a diagram illustrating another relative position relationship between the first conductive part and the first auxiliary part according to an embodiment of the invention;

fig. 8 is a diagram illustrating another relative position relationship between the first conductive part and the first auxiliary part according to the embodiment of the invention;

fig. 9 is a flowchart illustrating a method for manufacturing a transmission line structure according to an embodiment of the present invention;

FIG. 10 is a schematic diagram illustrating a conductive portion and a photoresist formed on a first substrate in a method according to an embodiment of the invention;

FIG. 11 is a schematic illustration of the structure of FIG. 10 being processed by exposure and development;

FIG. 12 is a schematic illustration of the structure of FIG. 11 being processed by etching;

FIG. 13 is a schematic view of an organic material being grown on the sidewalls of the first conductive portion using an organic material electroplating process;

FIG. 14 is a schematic view illustrating the photoresist layer on the side of the first conductive portion away from the first substrate being removed;

fig. 15 is another flow chart of a method for manufacturing a transmission line structure according to an embodiment of the invention;

FIG. 16 is a schematic view of a first conductive portion formed on a first substrate;

FIG. 17 is a schematic view of a photoresist applied to one side of the first conductive portion of FIG. 16;

FIG. 18 is a schematic view showing a process of exposing and developing a photoresist;

FIG. 19 is a schematic view showing a structure formed after the process of exposure and development shown in FIG. 18;

fig. 20 is a schematic structural diagram of a phase shifter according to an embodiment of the present invention;

fig. 21 is a schematic structural diagram of a phase shifter according to an embodiment of the present invention.

Detailed Description

Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.

In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

Fig. 1 is a top view of a transmission line structure according to an embodiment of the present invention, fig. 2 is an AA cross-sectional view of the transmission line structure in fig. 1, fig. 3 is a relative position diagram of a first conductive part and a first auxiliary part, and with reference to fig. 1 to 3, the present invention provides a transmission line structure 100 including:

a conductive substrate including a first base 10, and a first conductive part 20 and a first auxiliary part 30 disposed on the first base 10; in a direction perpendicular to the first substrate 10, a surface of the first auxiliary portion 30 away from the first substrate 10 does not exceed a surface of the first conductive portion 20 away from the first substrate 10;

the first auxiliary portion 30 is disposed on a side surface of the first conductive portion 20 along a direction parallel to a plane of the first substrate 10, the first auxiliary portion 30 includes a first side surface 31 and a second side surface 32, the first side surface 31 contacts with the first conductive portion 20, and the second side surface 32 is located on a side of the first side surface 31 away from the first conductive portion 20; the second side 32 includes a first end D1 and a second end D2, the second end D2 being located on a side of the first end D1 away from the first conductive portion 20; the distance between the first end portion D1 and the first substrate 10 is greater than the distance between the second end portion D2 and the first substrate 10 in a direction perpendicular to the plane of the first substrate 10;

an acute angle between the extending direction of the second side surface 32 and the extending direction of the plane of the first substrate 10 is α, and an angle between the bottom surface and the side surface of the first conductive part 20 is β, where α < β.

It should be noted that fig. 1 only shows an arrangement schematic diagram of the transmission line structure 100, and does not limit the actual arrangement of the transmission line structure 100, in some other embodiments of the present invention, the transmission line structure 100 may also adopt other arrangement structures, and the present invention is not described in detail herein. Fig. 2 shows the relative positional relationship of the first conductor and the first auxiliary portion 30 by the sectional structure, and does not limit the actual size of the first conductor and the first auxiliary portion 30.

With reference to fig. 1 to fig. 3, in the present invention, a first auxiliary portion 30 is disposed on a side surface of the first conductive portion 20 of the transmission line structure 100, and the first auxiliary portion 30 does not exceed the first conductive portion 20 along a direction perpendicular to the first substrate 10, in other words, along the direction perpendicular to the first substrate 10, a distance between a surface of the first auxiliary portion 30 away from the first substrate 10 and an upper surface of the first substrate 10 is smaller than or equal to a distance between a surface of the first conductive portion 20 away from the first substrate 10 and the upper surface of the first substrate. The first side surface 31 of the first auxiliary portion 30 contacts the first conductive portion 20, and the second side surface 32 is located on a side of the first side surface 31 away from the first conductive portion 20. The second side 32 of the first auxiliary portion 30 is disposed obliquely, and along a direction perpendicular to the first substrate 10, a distance between the first end D1 of the first auxiliary portion 30 close to the first conductive portion 20 and the upper surface of the first substrate 10 is greater than a distance between the second end D2 of the first auxiliary portion 30 far away from the first conductive portion 20 and the upper surface of the first substrate 10, that is, along a direction in which the first conductive portion 20 points to the first auxiliary portion 30, the second side 32 of the first auxiliary portion 30 is in a slope structure, and a highest point of the slope is closer to the first conductive portion 20 than a lowest point thereof.

Particularly, an acute angle α of an included angle between the extending direction of the second side surface 32 in the first auxiliary portion 30 and the extending direction of the plane where the first substrate 10 is located is smaller than an included angle β between the bottom surface and the side surface of the first conductive portion 20, that is, the slope of the second side surface 32 in the first auxiliary portion 30 is smaller and the corresponding slope is slower relative to the first substrate 10; the slope of the side surface of the first conductive part 20 is large, and the corresponding slope is steep. It should be noted that, in the angle shown in fig. 3, for example, at the right side of the first conductive portion 20, the acute angle α may be an angle formed by clockwise rotation of the second side surface 32 with respect to the plane of the first substrate 10, and the included angle β may be an angle formed by clockwise rotation of the side surface of the first conductive portion 20 with respect to the plane of the first substrate 10; for example, at the position on the left side of the first conductive part 20, the acute angle α can be regarded as an included angle formed by the second side surface 32 rotating counterclockwise relative to the plane of the first substrate 10, and the included angle β can be regarded as an included angle formed by the side surface of the first conductive part 20 rotating counterclockwise relative to the plane of the first substrate 10.

In the related art, fig. 4 is a schematic structural diagram of a conductive portion in a transmission line structure of the related art, in which a side surface of the conductive portion 20 'is approximately perpendicular to the substrate 10' and has a larger slope. In the rubbing process, the conductive part 20 ' with a larger gradient forms a sharp angle J ' on the side far from the substrate 10 ', which is easy to damage the rubbing cloth, resulting in poor uniformity of in-plane alignment. In the present invention, please refer to fig. 2 and fig. 3, a first auxiliary portion 30 is introduced into a side surface of a first conductive portion 20, a first side surface 31 of the first auxiliary portion 30 directly contacts with the side surface of the first conductive portion 20, during the rubbing process, the first auxiliary portion 30 serves as a transition medium during the movement of the nap located in the gap between two adjacent first conductive portions, so that the nap of the rubbing cloth sequentially passes through the gap and the first auxiliary portion and then reaches the surface of the first conductive portion, the transition is smooth, and the phenomenon that the nap directly moves from the gap to the position of the sharp corner to cause the sharp corner to damage the rubbing cloth is avoided, thereby effectively reducing the problem of poor in-plane alignment uniformity caused by damage to the rubbing cloth by the sharp corners of the first conductive part 20 during rubbing alignment, therefore, the in-plane alignment uniformity is favorably improved, and the phase adjustment control of the transmission line structure is more accurate. It should be noted that, in the drawings provided by the present invention, only the second side surface 32 in the first auxiliary portion 30 is taken as a plane structure for illustration, and an actual structure of the second side surface is not limited, in some other embodiments of the present invention, the second side surface 32 may be embodied as a structure similar to an arc surface, at this time, an acute angle α in an included angle between an extending direction of the second side surface and an extending direction of a plane in which the first base is located may be embodied as an included angle between an extending direction of a tangent of a portion of the second side surface close to the first base and an extending direction of a plane in which the first base is located.

In addition, referring to fig. 4, when the first auxiliary portion is not disposed on the side surface of the conductive portion 20 ', an included angle is formed between the side surface of the conductive portion 20 ' and the substrate 10 ', and a position corresponding to the included angle may not be rubbed during the rubbing alignment process, thereby affecting uniformity of the rubbing alignment. With reference to fig. 3, the first auxiliary portion 30 is introduced into the side surface of the first conductive portion 20, and a gently-transiting slope is formed on the side surface of the first conductive portion 20, so that the rubbing cloth is more easily contacted with the alignment liquid on the slope formed by the first conductive portion 20 during the rubbing alignment process, thereby being more beneficial to improving the uniformity of the rubbing alignment.

With continued reference to FIG. 3, in an alternative embodiment of the invention, an acute angle of an angle between the extending direction of the second side surface 32 in the first auxiliary portion 30 and the extending direction of the plane in which the first base 10 is located satisfies 0 < α ≦ 60. When the first auxiliary portion 30 is not provided, the angle between the upper surface of the first conductive portion 20 and the side surface thereof is about 90 °, and thus a sharp corner is formed which easily damages the rubbing cloth. When the first auxiliary portion 30 is introduced into the side surface of the first conductive portion 20, the second side surface 32 of the first auxiliary portion 30 is inclined, when the acute angle of the extending direction of the plane of the second side surface 32 and the first substrate 10 is less than or equal to 60 degrees, so that the angle between the upper surface of the first conductive portion 20 and the second side surface 32 is an obtuse angle of about 120, in the rubbing alignment process, the damage effect of the obtuse angle to the rubbing cloth is much smaller than the damage effect of the sharp angle to the rubbing cloth when the first auxiliary portion 30 is not provided, therefore, the acute angle between the extending direction of the second side surface 32 in the first auxiliary portion 30 and the extending direction of the plane of the first substrate 10 is set to 0 < α ≦ 60, which is beneficial to reducing the phenomenon of poor in-plane alignment uniformity caused by the damage to the rubbing cloth during rubbing alignment and improving the in-plane alignment uniformity of the transmission line structure 100. Alternatively, 0 < α ≦ 55 ° or, 0 < α ≦ 50 °.

Alternatively, 45 ° ≦ α ≦ 60 °, and further, acute angles in the angles between the extending directions of the second side surfaces 32 in the first auxiliary portions 30 and the extending direction of the plane in which the first substrate 10 is located may be set to 50 °, 53 °, 55 °, 58 °, 60 °, and so on.

In an alternative embodiment of the invention, 0 < α ≦ 45. When the acute angle between the extending direction of the second side surface 32 in the first auxiliary portion 30 and the extending direction of the plane of the first substrate 10 is set to 0 < α ≦ 45 °, the included angle between the upper surface of the first conductive portion 20 and the second side surface 32 is close to or greater than 135 °, the larger the included angle between the upper surface of the first conductive portion 20 and the second side surface 32 is, the more gradual the engagement between the two is, the more favorable the reduction of the damage to the rubbing cloth in the rubbing alignment process is, and thus the more favorable the improvement of the in-plane alignment uniformity of the transmission line structure 100 is. Alternatively, 0 < α ≦ 40 ° or, alternatively, 0 < α ≦ 30 °. Alternatively, an acute angle in an angle between the extending direction of the second side surface 32 in the first auxiliary portion 30 and the extending direction of the plane of the first substrate 10 may be set to 40 °, 43 °, 45 °, or the like.

With continued reference to FIG. 3, in an alternative embodiment of the invention, the angle between the bottom surface and the side surface of the first conductive portion 20 satisfies 70 ≦ β ≦ 90. Usually, before the first conductive portion 20 is fabricated on the first substrate 10, the entire conductive portion is formed on the first substrate 10, then a photosensitive resist is coated on a side of the first conductive portion 20 away from the first substrate 10, the first conductive portion 20 is formed by exposure and development, and in the first conductive portion 20 directly formed by exposure and development, an included angle between a bottom surface and a side surface of the first conductive portion 20 can satisfy β ≦ 70 ° or more and β ≦ 90 °, and further processing is not required, thereby facilitating simplification of the fabrication process of the transmission line structure 100 and improving the production efficiency of the transmission line structure 100. Alternatively, 75 ≦ β ≦ 95, and further, β may be selected near 80, such as between 80 and 81 (including 80 and 81), such as 80.3 or 80.5, and so forth.

When the included angle between the bottom surface and the side surface of the first conductive part 20 is greater than or equal to 70 degrees and less than or equal to 90 degrees, the first side surface 31 of the first auxiliary part 30 is in direct contact with the side surface of the first conductive part 20, so the first side surface 31 of the first auxiliary part 30 is not necessarily perpendicular to the first substrate 10.

With continued reference to fig. 3, in an alternative embodiment of the invention, a surface of the first auxiliary portion 30 away from the first substrate 10 is flush with a surface of the first conductive portion 20 away from the first substrate 10, so as to avoid a phenomenon that a step difference is formed between an upper surface of the first conductive portion 20 and a surface of the first auxiliary portion 30 away from the first substrate 10 to form a new sharp corner, so that a transition between the first conductive portion 20 and the first auxiliary portion 30 is more gradual, and thus, a phenomenon that the sharp corner damages a rubbing cloth during a rubbing alignment process is avoided or reduced.

It should be noted that fig. 2 and fig. 3 illustrate a case where the first side surface 31 and the second side surface 32 of the first auxiliary portion 30 are directly connected, and in this case, when the surface of the first auxiliary portion 30 away from the first substrate 10 is flush with the surface of the first conductive portion 20 away from the first substrate 10, it means that the first end portion D1 of the first auxiliary portion 30 is flush with the upper surface of the first conductive portion 20.

In some other embodiments of the present invention, the first side surface 31 and the second side surface 32 of the first auxiliary portion 30 may not be directly connected, for example, please refer to fig. 5, fig. 5 is another relative position diagram of the first conductive portion and the first auxiliary portion provided in the embodiment of the present invention, the first auxiliary portion 30 further includes a fourth side surface 34, the fourth side surface 34 is located on a side of the second side surface 32 away from the first substrate 10, and the fourth side surface 34 is respectively connected to end portions of the second side surface 32 and the first side surface 31 away from the first substrate 10; an included angle θ between the fourth side surface 34 of the first auxiliary portion 30 and the second side surface 32 is larger than an included angle γ between the surface of the first conductive portion 20 away from the first substrate and the side surface of the first conductive portion 20. It should be noted that, the side surface of the first conductive part 20, the fourth side surface 34 and the second side surface 32 may be configured to approximate to a cambered surface, and at this time, an included angle θ between the fourth side surface 34 and the second side surface 32 may be configured to be an included angle between an extending direction of a tangent line of a plane where the side of the fourth side surface 34 is away from the first substrate 10 and an extending direction of a tangent line of a plane where the side of the second side surface 32 is away from the first substrate 10; the included angle γ between the surface of the first conductive portion 20 away from the first substrate and the side surface of the first conductive portion 20 can be represented as an included angle between the extending direction of the plane of the first conductive portion 20 away from the first substrate surface and the extending direction of the tangent line of the side surface of the first conductive portion.

Thus, when the fourth side 34 is introduced, it is equivalent to outwardly extending the fourth side in a direction away from the first conductive portion 20 by a certain angle, so that the fourth side 34 of the first auxiliary portion 30 and the surface of the first conductive portion 20 away from the first substrate 10 form a relatively smooth surface, thereby eliminating the sharp corner of the first conductive portion 20 originally exposed outside, and playing a role in smooth transition on the position movement of the rubbing cloth in the rubbing alignment process, which is more favorable for reducing the problem of poor in-plane alignment uniformity caused by the damage to the rubbing cloth in the rubbing alignment process, and is favorable for improving the in-plane alignment uniformity.

In other embodiments of the present invention, for example, referring to fig. 6, fig. 6 is another relative position relationship diagram of the first conductive part 20 and the first auxiliary part 30 provided in the embodiment of the present invention, when a fourth side 34 is introduced between the first side 31 and the second side 32 of the first auxiliary part 30, the fourth side 34 is flush with the upper surface of the first conductive part 20, and at this time, the cross-sectional structure of the first auxiliary part 30 is a trapezoid. The upper surface (corresponding to the fourth side surface 34) of the first auxiliary portion 30 directly contacts with the upper surface of the first conductive portion 20 and is located on the same plane, the position of the original sharp corner on the first conductive portion 20 is changed into a planar structure, and a gently transitional structure is formed between the upper surface 34 of the first auxiliary portion 30 and the second side surface 32, so that the possibility that the sharp corner damages the friction cloth is reduced or avoided.

In an alternative embodiment of the invention, the second side 32 of the first auxiliary portion 30 is directly connected to the first substrate 10.

Specifically, with continuing reference to fig. 2, fig. 3 and fig. 6, these embodiments show a scheme in which the second side surface 32 of the first auxiliary portion 30 is directly connected to the first substrate 10, that is, the second end of the second side surface 32 is directly contacted to the first substrate 10, and at this time, the first auxiliary portion 30 has only three surfaces, that is, the first side surface 31, the second side surface 32 and the bottom surface, and the structure is simpler and easier to manufacture.

Fig. 7 is a diagram illustrating another relative position relationship between the first conductive part 20 and the first auxiliary part 30 according to an embodiment of the present invention, in an alternative embodiment of the present invention, the first auxiliary part 30 further includes a third side surface 33, and the third side surface 33 is located between the first substrate 10 and the second side surface 32 and respectively connects the first substrate 10 and the second side surface 32. Optionally, the third side 33 is perpendicular to the first substrate 10, or the third side 33 is not perpendicular to the first substrate 10. When the third side surface 33 is not perpendicular to the first substrate 10, it can be embodied that the third side surface 33 expands outward to a certain angle away from the first conductive part 20, that is, an included angle between the third side surface 33 of the first auxiliary part 30 and the bottom surface of the first auxiliary part 30 is embodied as an acute angle.

Referring to fig. 7, in the transmission line structure 100 provided in this embodiment, the first auxiliary portion 30 includes a third side surface 33 disposed between the second side surface 32 and the bottom surface, in addition to the first side surface 31, the second side surface 32 and the bottom surface. When the third side 33 is introduced in the first auxiliary portion 30, the height of the second side 32 in a direction perpendicular to the first substrate 10 is reduced. In the view shown in fig. 7, when the width of the first auxiliary portion 30 is fixed, assuming that the height of the second side surface 32 in the direction perpendicular to the first substrate 10 is h and the width of the first auxiliary portion 30 is d, an acute angle α between the extending direction of the second side surface 32 and the extending direction of the plane of the first substrate 10 is arctan (h/d), h is in positive correlation with α, and h is smaller, and if d is not the same, the corresponding α is smaller. When α is smaller, the included angle between the second side surface 32 and the side surface of the first conductive part 20 is larger, the transition from the upper surface of one conductive part to the second side surface 32 of the first auxiliary part 30 is more gradual, and the influence of the corner formed by the upper surface of the first conductive part 20 and the second side surface 32 of the first auxiliary part 30 on the rubbing cloth is smaller, so that the arrangement mode is more favorable for reducing the possibility of damage to the rubbing cloth in the rubbing alignment process, and is more favorable for improving the in-plane alignment uniformity of the transmission line structure 100.

Fig. 8 is a diagram illustrating another relative position relationship between the first conductive part 20 and the first auxiliary part 30 according to an embodiment of the present invention, in an alternative embodiment of the present invention, the first substrate 10 includes a first groove 11, the first conductive part 20 includes a first part 21 and a second part 22 connected to each other, the first part 21 is located in the first groove 11, and the second part 22 is located outside the first groove 11; the first auxiliary portion 30 is disposed at a side of the second portion 22 in a direction parallel to a plane of the first substrate 10.

Specifically, with reference to fig. 8, in the transmission line structure 100 provided by the present invention, a first groove 11 is formed on the first substrate 10, a portion of the first conductive part 20 is located in the first groove 11, and another portion is located outside the first groove 11. Assuming that the first conductive part 20 includes a first part 21 and a second part 22 connected to each other in a direction perpendicular to the first substrate 10, the first part 21 is located in the first groove 11, and the second part 22 is located outside the first groove 11. Note that, the first portion 21 and the second portion 22 are only a portion of the first conductive portion 20 located inside the first groove 11 and a portion located outside the first groove 11, and do not represent that the first portion 21 and the second portion 22 are independent units, and alternatively, the first portion 21 and the second portion 22 are an integrally molded integral structure.

When the portion of the first conductive part 20 is disposed in the first groove 11, the step between the upper surface of the first conductive part 20 and the upper surface of the first substrate 10 is reduced. The first auxiliary portion 30 is formed on the side surface of the second portion 22 of the first conductive portion 20, in this case, the height of the first auxiliary portion 30 in the direction perpendicular to the first substrate 10 is reduced, when the height is reduced, in the case where the width of the bottom surface of the first auxiliary portion 30 is maintained, the acute angle a of the included angle between the second side surface 32 of the first auxiliary portion 30 and the first substrate 10 is reduced, so that the angle between the second side surface 32 and the upper surface of the first conductive part 20 becomes larger, the transition from the upper surface of one conductive part to the second side surface 32 of the first auxiliary part 30 becomes more gradual, the influence of the corner formed by the upper surface of the first conductive part 20 and the second side surface 32 of the first auxiliary part 30 on the rubbing cloth becomes smaller, therefore, the arrangement is also beneficial to further reducing the possibility of damage to the rubbing cloth in the rubbing alignment process, and is more beneficial to improving the in-plane alignment uniformity of the transmission line structure 100. It should be noted that, when the first substrate 10 is provided with the first groove and a part of the first conductive part 20 is disposed in the first groove, the shape and the related features of the first auxiliary part 30 disposed on the side surface of the first conductive part 20 can be referred to the shape and the features of the first auxiliary part 30 in any of the above embodiments, and the description of the present invention is omitted here.

In an alternative embodiment of the invention, please refer to fig. 3 and 8, a first gap G is included between two adjacent first conductive portions 20 along a direction parallel to the first substrate 10, and the first auxiliary portion 30 is located in the first gap G;

the first interval G includes a first region G1 where the first auxiliary portion 30 is disposed and a second region G2 where the first auxiliary portion 30 is not disposed, and in the same first interval G, an orthographic projection area of the first region G1 on the first substrate 10 is S1, and an orthographic projection area of the second region G2 on the first substrate 10 is S2, wherein S1/(S1+ S2) ≦ 50%.

With reference to fig. 8, when the transmission line structure provided by the embodiment of the invention is applied to a liquid crystal device, such as a phase shifter or a liquid crystal antenna, in the process of manufacturing the devices, a liquid crystal filling process is performed, and the second region G2 of the first interval G of the transmission line structure is not provided with the first auxiliary portion 30, so that the filling condition of the liquid crystal, such as whether the filling amount of the liquid crystal is sufficient, whether bubbles are generated, and the like, can be observed through the second region G2, thereby facilitating the improvement of the production yield of the liquid crystal device. Since the first auxiliary portion 30 in the present invention is disposed on the side of the first conductive portion 20, this will make the first auxiliary portion 30 located in the first gap G, occupying part of the space of the first gap G, and the light transmittance of the region in the first gap G where the first auxiliary portion 30 is disposed will be smaller than that of the region where the first auxiliary portion 30 is not disposed. Assuming that the region of the first gap G where the first auxiliary portion 30 is disposed is the first region G1 (corresponding to the area S1), and the region of the first gap G where the first auxiliary portion 30 is not disposed is the second region G2 (corresponding to the area S2), the present invention defines S1/(S1+ S2) ≦ 50%, so that the area occupied by the first auxiliary portion 30 in the first gap G is less than or equal to half of the total area of the first gap G, i.e., a portion of the region with high light transmittance is still remained, thereby reducing the problem of poor uniformity of in-plane alignment caused by damage to the rubbing cloth during the rubbing alignment process by disposing the first auxiliary portion 30, and simultaneously ensuring that the liquid crystal device manufactured by using the transmission line structure provided by the present invention has better transparency.

In an alternative embodiment of the invention, S1/(S1+ S2) ≦ 20%, such that the area occupied by the first auxiliary portion 30 in the first gap G is less than or equal to 20% of the total area of the first gap G, and 80% or more of the first gap G is a high transmittance region, thereby facilitating to improve the in-plane rubbing alignment uniformity of the transmission line structure 100 and simultaneously facilitating to improve the transparency of the corresponding liquid crystal device.

In an alternative embodiment of the invention, the first auxiliary portion 30 comprises an organic material. Alternatively, the first auxiliary portion 30 includes photosensitive material such as PS (polystyrene) or OC (photoresist), so that the first auxiliary portion 30 can be formed by exposure and development or electroplating process using organic material, and the organic material is insulating and will not affect the electrical signal in the transmission line structure.

Based on the same inventive concept, the present invention further provides a manufacturing method of the transmission line structure 100, and fig. 9 is a flowchart of the manufacturing method of the transmission line structure 100 according to the embodiment of the present invention, where the manufacturing method is applied to the transmission line structure 100 according to any of the embodiments of the present invention, and the manufacturing method includes:

s01, please refer to fig. 10, providing a first substrate 10;

s02, with reference to fig. 10, fabricating the conductive portion 40 on the first substrate 10, and coating a photosensitive resist 50 on a side of the conductive portion 40 away from the first substrate 10, where fig. 10 is a schematic diagram illustrating the conductive portion and the photosensitive resist 50 formed on the first substrate 10 in the fabrication method according to the embodiment of the invention; alternatively, the conductive portion 40 may be embodied as a layer of conductive metal, such as copper.

S03, referring to fig. 11 and 12, forming the first conductive portion 20 by exposing, developing and etching, and leaving the photosensitive resist 50 on the surface of the first conductive portion 20 away from the first substrate 10; fig. 11 is a schematic diagram illustrating the structure shown in fig. 10 being processed by exposure and development, specifically, a portion of the photoresist 50 is removed by exposure and development, and a portion of the photoresist is remained; fig. 12 is a schematic diagram illustrating the structure in fig. 11 being processed by etching, specifically, the conductive portion 40 not covered by the photoresist 50 is removed, and only the conductive portion 40 covered by the photoresist 50 remains, so as to form the first conductive portion 20.

S04, referring to fig. 13, forming a first auxiliary portion 30 on the sidewall of the first conductive portion 20 by an organic material electroplating process; fig. 13 is a schematic view illustrating an organic material is grown on the sidewall of the first conductive portion 20 by an organic material electroplating process; specifically, the semi-finished product (corresponding to the structure of fig. 12) produced in step S03 may be placed in an organic material plating solution (e.g., an electrolytic bath), the first conductive part 20 may be energized, and the organic material may be grown on the sidewall of the first conductive part 20 by an organic plating process, thereby forming the first auxiliary part 30. Optionally, the present invention may further adopt a solution method to shape the organic material on the sidewall of the first conductive portion 20, for example, remove the organic material on the photoresist 50 and other excess organic materials, so as to form the first auxiliary portion 30 with a uniform shape. It should be noted that fig. 13 only shows a scheme that the second side 32 of the first auxiliary portion 30 is in direct contact with the first substrate 10, and in some other embodiments of the present invention, the first auxiliary portion 30 may also be formed as shown in fig. 7 by controlling the time of electroplating.

S05, please refer to fig. 13 and 14, removing the photoresist 50 on the side of the first conductive portion 20 away from the first substrate 10; fig. 14 is a schematic diagram illustrating the photoresist 50 on the side of the first conductive portion 20 away from the first substrate 10 is removed.

Referring to fig. 3 and 14, along a direction parallel to a plane of the first substrate 10, the first auxiliary portion 30 includes a first side surface 31 and a second side surface 32, the first side surface 31 contacts the first conductive portion 20, and the second side surface 32 is located on a side of the first side surface 31 away from the first conductive portion 20; the second side face 32 includes a first end portion D1 and a second end portion D2 provided in a direction in which the first conductive portion 20 is directed toward the first auxiliary portion 30; the distance between the first end portion D1 and the first substrate 10 is greater than the distance between the second end portion D2 and the first substrate 10 in a direction perpendicular to the plane of the first substrate 10; an acute angle between the extending direction of the second side surface 32 and the extending direction of the plane of the first substrate 10 is α, and an angle between the bottom surface and the side surface of the first conductive part 20 is β, where α < β.

Specifically, in the manufacturing method of the transmission line structure 100 provided by the present invention, after the first conductive part 20 is formed on the first substrate 10, the sidewall of the first conductive part 20 is exposed, and the top of the first conductive part is covered by the photosensitive resist 50, at this time, the semi-finished product is placed into an electrolytic cell, and the first conductive part 20 in the electrolytic cell is energized, so that the organic material in the electrolytic cell grows on the sidewall of the first conductive part 20 through electrolysis, and the first auxiliary part 30 is further formed. In the actual manufacturing process, the actual structure of the first auxiliary portion 30 can be controlled by controlling the time of energization to the first conductive portion 20. In the present invention, an acute angle α of an included angle between an extending direction of the second side surface 32 in the first auxiliary portion 30 and an extending direction of a plane on which the first substrate 10 is located is smaller than an included angle β between a bottom surface and a side surface of the first conductive portion 20, that is, with respect to the first substrate 10, a slope of the second side surface 32 in the first auxiliary portion 30 is smaller, and a corresponding slope is slower; the slope of the side surface of the first conductive part 20 is large, and the corresponding slope is steep. The invention utilizes the second side surface 32 with smaller gradient in the first auxiliary part 30 to avoid the situation that the sharp corner at the top end of the first conductive part 20 is exposed outside, thereby effectively reducing the problem of poor in-plane alignment uniformity caused by damage to friction cloth in the process of rubbing alignment, being beneficial to improving in-plane alignment uniformity and further enabling the phase adjustment control of the transmission line structure 100 to be more accurate.

Based on the same inventive concept, the present invention further provides a manufacturing method of the transmission line structure 100, and fig. 15 is another flowchart of the manufacturing method of the transmission line structure 100 according to the embodiment of the present invention, where the manufacturing method is applied to the transmission line structure 100 according to any of the above embodiments of the present invention, and the manufacturing method includes:

s11, please refer to fig. 16, a first substrate 10 is provided.

S12, referring to fig. 16 and 17, fabricating a first conductive portion 20 on the first substrate 10, and coating a photoresist 60 on a side of the first conductive portion 20 away from the first substrate 10; fig. 16 is a schematic view illustrating the fabrication of the first conductive portion 20 on the first substrate 10, and fig. 17 is a schematic view illustrating the application of a photoresist 60 on one side of the first conductive portion 20 in fig. 16. It should be noted that the manufacturing method of the first conductive portion 20 shown in fig. 16 can refer to steps S01-S03 in the foregoing embodiment, and after step S03 is completed, the photoresist 60 on the surface of the first conductive portion 20 is removed to form the structure shown in fig. 16, which is not described herein again.

S13, please refer to fig. 18 and 19, removing a portion of the photoresist 60 by exposure and development, and retaining a portion of the photoresist 60 to form a first auxiliary portion 30, wherein the first auxiliary portion 30 is disposed on a side surface of the first conductive portion 20 along a direction parallel to a plane of the first substrate, and the first auxiliary portion 30 is the retained photoresist 60; fig. 18 is a schematic view illustrating a process of exposing and developing the photoresist 60, and fig. 19 is a schematic view illustrating a structure formed after the process of exposing and developing shown in fig. 18; before the exposure process is performed on the photoresist 60, the areas where the photoresist 60 needs to be removed and the areas where the photoresist 60 needs to be left may be controlled by disposing a mask 90 on the side of the photoresist 60 away from the first substrate 10. It should be noted that fig. 19 only shows a scheme that the second side 32 of the first auxiliary portion 30 is in direct contact with the first substrate 10, and in some other embodiments of the present invention, the first auxiliary portion 30 may also form the structure shown in fig. 7 by controlling the time of exposure and development.

Referring to fig. 3 and fig. 19, along a direction parallel to a plane of the first substrate 10, the first auxiliary portion 30 includes a first side surface 31 and a second side surface 32, the first side surface 31 contacts the first conductive portion 20, and the second side surface 32 is located on a side of the first side surface 31 away from the first conductive portion 20; the second side face 32 includes a first end portion and a second end portion disposed in a direction in which the first conductive portion 20 is directed toward the first auxiliary portion 30; the distance between the first end and the first substrate 10 is greater than the distance between the second end and the first substrate 10 in a direction perpendicular to the plane of the first substrate 10; an acute angle between the extending direction of the second side surface 32 and the extending direction of the plane of the first substrate 10 is α, and an angle between the bottom surface and the side surface of the first conductive part 20 is β, where α < β.

Specifically, in the method for manufacturing the transmission structure according to the above embodiment of the invention, the first conductive portion 20 is first manufactured on the first substrate 10, then the side of the first conductive portion 20 away from the first substrate 10 is coated with the layer of the photosensitive resist 60, the mask 90 is disposed on the side of the layer of the photosensitive resist 60 away from the first substrate 10, the layer of the photosensitive resist 60 on the upper surface and the layer of the photosensitive resist 60 on the side surface of the first conductive portion 20 are removed by exposure, and the remaining layer of the photosensitive resist 60 can form the first auxiliary portion 30 of the invention. In the present invention, an acute angle α of an included angle between an extending direction of the second side surface 32 in the first auxiliary portion 30 and an extending direction of a plane on which the first substrate 10 is located is smaller than an included angle β between a bottom surface and a side surface of the first conductive portion 20, that is, with respect to the first substrate 10, a slope of the second side surface 32 in the first auxiliary portion 30 is smaller, and a corresponding slope is slower; the slope of the side surface of the first conductive part 20 is large, and the corresponding slope is steep. The invention utilizes the second side surface 32 with smaller gradient in the first auxiliary part 30 to avoid the situation that the sharp corner at the top end of the first conductive part 20 is exposed outside, thereby effectively reducing the problem of poor in-plane alignment uniformity caused by damage to friction cloth in the process of rubbing alignment, being beneficial to improving in-plane alignment uniformity and further enabling the phase adjustment control of the transmission line structure 100 to be more accurate.

Based on the same inventive concept, the present invention further provides a phase shifter, and fig. 20 is a schematic structural diagram of the phase shifter according to the embodiment of the present invention, where the phase shifter 200 includes: a first substrate 201 and a second substrate 202 which are oppositely arranged, and a liquid crystal 204 filled between the first substrate 201 and the second substrate 202;

the first substrate 201 comprises a ground layer 203, wherein the ground layer 203 is a planar structure; the second substrate 202 includes the transmission line structure 100 according to any of the above embodiments of the invention.

Specifically, when the transmission line structure 100 provided by any of the above embodiments of the invention is adopted as the second substrate 202 in the phase shifter, the first conductive part 20 in the transmission line structure 100 is equivalent to a microstrip line in the phase shifter, and the first auxiliary part 30 is disposed on the side surface of the microstrip line, so that the problem of poor in-plane alignment uniformity caused by damage to the rubbing cloth in the rubbing alignment process is effectively reduced, which is beneficial to improving in-plane alignment uniformity, and further, the phase adjustment control of the phase shifter is more accurate. In the phase shifter 200 of the present invention, an alignment layer is further disposed on the sides of the first conductive part 20 and the first auxiliary part 30 away from the first substrate.

It should be noted that, for the specific embodiment of the phase shifter 200, reference may be made to the above-mentioned embodiment of the transmission line structure 100 of the present invention, and no further description is provided herein.

Based on the same inventive concept, the present application further provides a liquid crystal antenna, and fig. 21 is a schematic structural diagram of the phase shifter according to the embodiment of the present invention, where the liquid crystal antenna 300 includes:

the liquid crystal display panel comprises a first substrate 301, a second substrate 302, liquid crystal 309 and a radiator electrode 303, wherein the first substrate 301 and the second substrate 302 are arranged oppositely, the liquid crystal 309 is filled between the first substrate 301 and the second substrate 302, and the radiator electrode 303 is positioned on one side, away from the first substrate 301, of the second substrate 302;

the first substrate 301 and/or the second substrate 302 comprise a transmission line structure 100 as provided in any of the above embodiments of the invention.

Specifically, when the transmission line structure 100 provided by the embodiment of the present invention is used as the first substrate 301 and/or the second substrate 302 of the liquid crystal antenna 300, the first auxiliary portion 30 is introduced into the transmission line structure 100, and the second side surface 32 with a smaller slope in the first auxiliary portion 30 is used to avoid the situation that the sharp corner at the top end of the first conductive portion 20 is exposed outside, so that the problem of poor in-plane alignment uniformity caused by damage to the rubbing cloth during the rubbing alignment process is effectively reduced, thereby facilitating improvement of in-plane alignment uniformity, and further enabling the phase adjustment control of the liquid crystal antenna to be more accurate.

In an alternative embodiment of the present invention, with continued reference to FIG. 21, a first substrate 301 includes a transmission electrode 304, a second substrate includes a ground electrode 305; the ground electrode 305 includes a plurality of hollow-out portions 306, and a vertical projection of at least a portion of the hollow-out portions 306 on the second substrate 302 is located within a vertical projection range of the radiator electrode 303 on the second substrate 302;

when the first substrate 301 includes the transmission line structure 100, the transmission electrode 304 corresponds to the first conductive portion 20 in the transmission line structure 100; when the second substrate includes the transmission line structure 100, the ground electrode 305 corresponds to the first conductive portion 20 in the transmission line structure 100. In the liquid crystal antenna 300 of the present invention, an alignment layer is further disposed on the first substrate 301 on the side of the first conductive part 20 and the first auxiliary part 30 away from the first substrate, and an alignment layer is also disposed on the second substrate 302 on the side of the first conductive part 20 and the first auxiliary part 30 away from the first substrate.

When the liquid crystal antenna works, a certain voltage signal is applied to the transmission electrode 304, a certain voltage signal is applied to the ground electrode 305, and the voltage signals on the transmission electrode 304 and the ground electrode 305 are different, so that an electric field is formed between the transmission electrode 304 and the ground electrode 305, liquid crystal molecules are deflected under the driving of the electric field, meanwhile, a microwave signal is transmitted to the transmission electrode 304 through a power distribution network structure (not shown in the figure), in the transmission process of the microwave signal, the phase is changed due to the deflection of the liquid crystal molecules, so that the phase shifting function of the microwave signal is realized, that is, the deflection angle of the liquid crystal molecules can be controlled by controlling the voltages on the transmission electrode 304 and the ground electrode 305, and further, the phase adjusted in the phase shifting process of the microwave signal can be controlled. The first auxiliary part 30 is introduced into the side surface of the transmission electrode 304 and/or the first auxiliary part 30 is introduced into the side surface of the grounding electrode 305, so that the phenomenon that the rubbing cloth is damaged in the process of rubbing and aligning the first substrate or the second substrate is avoided, the in-plane alignment uniformity of the first substrate or the second substrate is improved, and the phase adjustment control of the liquid crystal antenna is more accurate.

In summary, the transmission line structure, the manufacturing method thereof, the phase shifter and the liquid crystal antenna provided by the invention at least achieve the following beneficial effects:

Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims

1. A transmission line structure, comprising:

the conductive substrate comprises a first base, a first conductive part and a first auxiliary part, wherein the first conductive part and the first auxiliary part are arranged on the first base; along a direction perpendicular to a plane where the first substrate is located, the surface, away from the first substrate, of the first auxiliary portion does not exceed the surface, away from the first substrate, of the first conductive portion;

2. The transmission line structure according to claim 1, characterized in that 0 < α ≦ 60 °.

3. The transmission line structure according to claim 1, characterized in that 0 < α ≦ 45 °.

4. The transmission line structure according to claim 1, characterized in that β ≦ 70 ° β ≦ 90 °.

5. The transmission line structure according to claim 1, characterized in that the surface of the first auxiliary portion remote from the first substrate is flush with the surface of the first conductive portion remote from the first substrate.

6. The transmission line structure according to claim 1, characterized in that the second side is directly connected to the first substrate.

7. The transmission line structure according to claim 1, characterized in that the first auxiliary portion further comprises a third side surface located between the first substrate and the second side surface and connecting the first substrate and the second side surface, respectively.

8. The transmission line structure according to claim 1, characterized in that the first auxiliary portion further includes a fourth side surface located on a side of the second side surface remote from the first substrate, and the fourth side surfaces respectively connect ends of the second side surface and the first side surface remote from the first substrate; an included angle between the fourth side surface and the second side surface of the first auxiliary portion is larger than an included angle between the surface of the first conductive portion, which is far away from the first substrate, and the side surface of the first conductive portion.

9. The transmission line structure according to any one of claims 1 to 8, characterized in that the first substrate comprises a first groove, the first conductive part comprises a first portion and a second portion connected to each other, the first portion being located in the first groove and the second portion being located outside the first groove; the first auxiliary portion is arranged on the side face of the second portion along the direction parallel to the plane where the first substrate is located.

10. The transmission line structure according to claim 1, characterized in that, in a direction parallel to the first substrate, two adjacent first conductive parts include a first space therebetween, the first auxiliary part being located in the first space;

the first interval comprises a first zone provided with the first auxiliary part and a second zone not provided with the first auxiliary part, and in the same first interval, the orthographic projection area of the first zone on the first substrate is S1, and the orthographic projection area of the second zone on the first substrate is S2, wherein S1/(S1+ S2) ≦ 50%.

11. The transmission line structure according to claim 10, characterized in that S1/(S1+ S2) is ≦ 20%.

12. The transmission line structure according to claim 1, characterized in that the first auxiliary portion comprises an organic material.

13. A method for manufacturing a transmission line structure, applied to the transmission line structure of any one of claims 1 to 12, the method comprising:

providing a first substrate;

14. A method for manufacturing a transmission line structure, applied to the transmission line structure of any one of claims 1 to 12, the method comprising:

providing a first substrate;

15. A phase shifter, comprising: the liquid crystal display panel comprises a first substrate, a second substrate and liquid crystal filled between the first substrate and the second substrate, wherein the first substrate and the second substrate are oppositely arranged;

the first substrate comprises a grounding layer which is of a planar structure; the second substrate comprising the transmission line structure of any of claims 1 to 12.

16. A liquid crystal antenna, comprising:

the first substrate and/or the second substrate comprising the transmission line structure of any of claims 1 to 12.

17. The liquid crystal antenna of claim 16, wherein the first substrate comprises a transmission electrode and the second substrate comprises a ground electrode; the grounding electrode comprises a plurality of hollow parts, and the vertical projection of at least part of the hollow parts on the second substrate is positioned in the vertical projection range of the radiator electrode on the second substrate;

when the first substrate comprises the transmission line structure, the transmission electrode corresponds to a first conductive part in the transmission line structure; when the second substrate includes the transmission line structure, the ground electrode corresponds to the first conductive portion of the transmission line structure.