CN114300821A - Phase shifter and antenna - Google Patents
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- CN114300821A CN114300821A CN202111658255.3A CN202111658255A CN114300821A CN 114300821 A CN114300821 A CN 114300821A CN 202111658255 A CN202111658255 A CN 202111658255A CN 114300821 A CN114300821 A CN 114300821A
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Abstract
A phase shifter and an antenna comprise a substrate, a coplanar waveguide transmission line arranged on the substrate and at least one capacitance bridge arranged on one side, far away from the substrate, of the coplanar waveguide transmission line, wherein the coplanar waveguide transmission line comprises a first ground wire and a second ground wire which are oppositely arranged, the first ground wire and the second ground wire are mutually insulated, at least one of the first ground wire and the second ground wire comprises an anchor point area, a peripheral area and an insulation area which separates the anchor point area from the peripheral area, and the at least one capacitance bridge is electrically connected with the anchor point area.
Description
Technical Field
The embodiment of the disclosure relates to but is not limited to the technical field of communication, in particular to a phase shifter and an antenna.
Background
With the rapid development of the information age, wireless terminals with high integration, miniaturization, multifunction, and low cost are gradually becoming the trend of communication technology. Phase shifters are essential key components in communication and radar applications. The traditional phase shifter mainly comprises a ferrite phase shifter and a semiconductor phase shifter, wherein the ferrite phase shifter has larger power capacity, and the large-scale application of the ferrite phase shifter is limited by factors such as relatively small insertion loss, complex process, expensive manufacturing cost, large volume and the like; the semiconductor phase shifter has small volume and high working speed, but has smaller power capacity, larger power consumption and high process difficulty. Compared with the traditional phase shifter, the MEMS phase shifter has obvious advantages in the aspects of insertion loss, power consumption, volume, cost and the like, and has attracted extensive attention in the fields of radio communication, microwave technology and the like. However, the MEMS phase shifter generates significant phase modulation and parasitic amplitude modulation due to capacitance change during specific operation.
Disclosure of Invention
The following is a summary of the subject matter described in detail in this disclosure. This summary is not intended to limit the scope of the claims.
In a first aspect, an embodiment of the present disclosure provides a phase shifter, including a substrate, a coplanar waveguide transmission line disposed on the substrate, and at least one capacitive bridge disposed on a side of the coplanar waveguide transmission line away from the substrate, where the coplanar waveguide transmission line includes a first ground line and a second ground line disposed opposite to each other, the first ground line and the second ground line are insulated from each other, at least one of the first ground line and the second ground line includes an anchor point region, a peripheral region, and an insulating region separating the anchor point region from the peripheral region, and the at least one capacitive bridge is electrically connected to the anchor point region.
In an exemplary embodiment, the first ground line and the second ground line each include an anchor region, a peripheral region, and an insulating region separating the anchor region from the peripheral region, the first end of the at least one capacitive bridge is electrically connected to the anchor region of the first ground line, and the second end of the at least one capacitive bridge is electrically connected to the anchor region of the second ground line.
In an exemplary embodiment, the insulating region has at least one of a U-shape, a V-shape, a circular arc shape, and a trapezoid shape in a plane parallel to the substrate.
In an exemplary embodiment, the insulating region is a trench structure or an insulating dielectric layer.
In an exemplary embodiment, the phase shifter comprises at least two capacitive bridges, a first end of each of the at least two capacitive bridges being electrically connected to one anchor region of the first ground line and/or a second end of each of the at least two capacitive bridges being electrically connected to one anchor region of the second ground line.
In an exemplary embodiment, the phase shifter includes at least n capacitive bridges, first ends of the at least n capacitive bridges are electrically connected to one anchor point region of the first ground line, and/or second ends of the at least n capacitive bridges are electrically connected to one anchor point region of the second ground line, where n is a natural number greater than or equal to 1 and less than or equal to 5.
In an exemplary embodiment, the phase shifter includes at least n capacitive bridges, first ends of the at least n capacitive bridges are electrically connected to one anchor point region of the first ground line, and/or second ends of the at least n capacitive bridges are electrically connected to one anchor point region of the second ground line, and n is 2 or 3.
In an exemplary embodiment, the coplanar waveguide transmission line further includes a signal line, the signal line is located between the first ground line and the second ground line, the signal line is insulated from the first ground line and the second ground line, at least a portion of the capacitor bridge is suspended at a side of the signal line away from the substrate, an orthographic projection of at least a portion of the suspended portion of the capacitor bridge on the substrate overlaps with an orthographic projection of the signal line on the substrate, and at least a portion of the suspended portion of the capacitor bridge and the signal line form a capacitor unit.
In an exemplary embodiment, a first insulating layer is disposed on a side of the signal line adjacent to the capacitor bridge.
In an exemplary embodiment, a first voltage control line is further included, the first voltage control line being electrically connected to the signal line.
In an exemplary embodiment, the device further comprises a control unit, the control unit is electrically connected with the capacitor bridge through the anchor point area, and the control unit is configured to control a voltage of the capacitor bridge electrically connected with the anchor point area.
In an exemplary embodiment, the number of the anchor regions is at least two, the number of the control units is at least two, and the at least two control units are connected with the at least two anchor regions in a one-to-one correspondence manner.
In an exemplary embodiment, a second voltage control line is further included, a first end of the second voltage control line being connected to the control unit, and a second end of the second voltage control line being electrically connected to the anchor region.
In an exemplary embodiment, the first ground line and the second ground line each include an anchor region, a peripheral region, and an insulating region separating the anchor region from the peripheral region, at least a portion of the second voltage control line overlaps an orthographic projection of the substrate with the peripheral region of the first ground line, and a second insulating layer is disposed between the second voltage control line and the peripheral region of the first ground line.
In a second aspect, an embodiment of the present disclosure further provides an antenna, including the phase shifter.
Other aspects will be apparent upon reading and understanding the attached drawings and detailed description.
Drawings
The accompanying drawings are included to provide an understanding of the present disclosure and are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the examples serve to explain the principles of the disclosure and not to limit the disclosure.
FIG. 1 is a schematic diagram of a phase shifter according to the related art;
FIG. 2 is a first schematic diagram of a phase shifter according to an embodiment of the present disclosure;
FIG. 3 is a cross-sectional view of a phase shifter according to an embodiment of the present disclosure;
FIG. 4 is a diagram illustrating dimensions of an isolation region in a phase shifter according to an embodiment of the present disclosure;
FIG. 5 is a second schematic diagram of a phase shifter according to an embodiment of the present disclosure;
FIG. 6 is a third schematic structural diagram of a phase shifter according to an embodiment of the present disclosure;
FIG. 7 is a fourth schematic diagram illustrating a phase shifter according to an embodiment of the present disclosure;
FIG. 8 is a fifth schematic diagram illustrating a phase shifter according to an embodiment of the present disclosure;
fig. 9 is a sixth schematic structural diagram of a phase shifter according to an embodiment of the disclosure.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Note that the embodiments may be implemented in a plurality of different forms. Those skilled in the art can readily appreciate the fact that the forms and details may be varied into a variety of forms without departing from the spirit and scope of the present disclosure. Therefore, the present disclosure should not be construed as being limited to the contents described in the following embodiments. The embodiments and features of the embodiments in the present disclosure may be arbitrarily combined with each other without conflict.
In this specification, for convenience, words such as "middle", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating orientations or positional relationships are used to explain positional relationships of constituent elements with reference to the drawings, only for convenience of description and simplification of description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present disclosure. The positional relationship of the components is changed as appropriate in accordance with the direction in which each component is described. Therefore, the words described in the specification are not limited to the words described in the specification, and may be replaced as appropriate.
In this specification, the terms "mounted," "connected," and "connected" are to be construed broadly unless otherwise specifically indicated and limited. For example, it may be a fixed connection, or a removable connection, or an integral connection; can be a mechanical connection, or an electrical connection; either directly or indirectly through intervening components, or both may be interconnected. The meaning of the above terms in the present disclosure can be understood by those of ordinary skill in the art as appropriate.
"about" in this disclosure means that the limits are not strictly defined, and that the numerical values are within the tolerances allowed for the process and measurement.
Fig. 1 is a schematic structural view of a related art phase shifter. As shown in fig. 1, the related art phase shifter may employ a MEMS phase shifter. The related art phase shifter includes a substrate, a coplanar waveguide transmission line 200 disposed on the substrate, and a capacitive bridge 300 disposed on a side of the coplanar waveguide transmission line 200 away from the substrate. The coplanar waveguide transmission line 200 includes a first ground line 21, a second ground line 22, and a signal line 23 located between the first ground line 21 and the second ground line 22, the signal line 23 is insulated from the first ground line 21 and the second ground line 22, a first end of a capacitor bridge 300 is connected to the first ground line 21, a second end of the capacitor bridge 300 is connected to the second ground line 22, the capacitor bridge 300 crosses over from a side of the signal line 23 away from the substrate, and an orthographic projection of the capacitor bridge 300 on the substrate overlaps with an orthographic projection of the signal line 23 on the substrate, so that a capacitor unit is formed between the capacitor bridge 300 and the signal line 23.
Through the research of the inventor of the present disclosure, the phase shifter in the related art generates an obvious phase modulation parasitic amplitude modulation phenomenon due to capacitance change in a specific working process. One capacitor unit of the phase shifter in the related art is calculated in simulation software, and the simulation result is shown in table 1. Wherein, the distance between the capacitor bridge 300 and the signal line 23 is h; the return loss of the phase shifter is S11; the insertion loss is S21 under the working state of the phase shifter; the phase shift degree of the phase shifter is Cand-deg.
Table 1 shows simulation results of phase shifters in the related art
According to simulation results of the phase shifter in the related art, the phase shifting degree of one capacitor unit of the phase shifter in the related art reaches 28 degrees, the insertion loss of the phase shifter in the related art reaches 1.38dB in a working state, and the insertion loss change of the phase shifter in the related art reaches 1.37dB in a switching state.
The embodiment of the disclosure provides a phase shifter, which includes a substrate, a coplanar waveguide transmission line disposed on the substrate, and at least one capacitive bridge disposed on a side of the coplanar waveguide transmission line away from the substrate, where the coplanar waveguide transmission line includes a first ground line and a second ground line disposed opposite to each other, the first ground line and the second ground line are insulated from each other, at least one of the first ground line and the second ground line includes an anchor point region, a peripheral region, and an insulating region separating the anchor point region from the peripheral region, and the at least one capacitive bridge is electrically connected to the anchor point region.
FIG. 2 is a first schematic diagram of a phase shifter according to an embodiment of the present disclosure; fig. 3 is a cross-sectional view of a phase shifter according to an embodiment of the present disclosure. Wherein fig. 3 is a sectional view at a-a in fig. 2. As shown in fig. 2 and 3, the phase shifter according to the embodiment of the present disclosure includes a substrate 100, a coplanar waveguide transmission line 200 disposed on the substrate 100, and a capacitive bridge 300 disposed on a side of the coplanar waveguide transmission line 200 away from the substrate 100, the coplanar waveguide transmission line 200 including a first ground line 21, a second ground line 22 disposed opposite to each other, and a signal line 23 disposed between the first ground line 21 and the second ground line 22. The orthographic projection of the first ground wire 21 on the substrate does not overlap the orthographic projection of the second ground wire 22 on the substrate, and the first ground wire 21 and the second ground wire 22 are insulated from each other. The orthographic projection of the signal line 23 on the substrate is not overlapped with the orthographic projection of the first ground line 21 on the substrate and the orthographic projection of the second ground line 22 on the substrate, and the signal line 23 is insulated from the first ground line 21 and the second ground line 22, that is, the orthographic projection of the first ground line 21, the orthographic projection of the second ground line 22 and the orthographic projection of the signal line 23 on the substrate are not overlapped with each other and are insulated from each other. The first and second ground lines 21, 22 each comprise an anchor area 24, a peripheral area 25 and an insulating area 26 separating the anchor area 24 from the peripheral area 25. The insulating region 26 separates the anchor region 24 from the peripheral region 25 into two parts insulated from each other. A first end of the capacitive bridge 300 is electrically connected to the anchor point area 24 of the first ground line 21, a second end of the capacitive bridge 300 is electrically connected to the anchor point area 24 of the second ground line 22,
at least part of the capacitor bridge 300 is arranged on one side of the signal line 23 away from the substrate 100 in a floating manner, the suspended part of at least part of the capacitor bridge 23 overlaps with the orthographic projection of the signal line 23 on the substrate 100, the suspended part of at least part of the capacitor bridge 23 and the signal line 23 form a capacitor unit, namely, the suspended part of the capacitor bridge 23 serves as one electrode plate of the capacitor unit, the signal line 23 serves as the other electrode plate of the capacitor unit, and the overlapped area of the suspended part of the capacitor bridge 23 and the signal line 23 forms a capacitor. The first end of the capacitor bridge 300 and the second end of the capacitor bridge 300 are located at two opposite ends of the capacitor bridge 300.
In some embodiments, the first ground line may include an anchor region, a peripheral region, and an insulation region separating the anchor region from the peripheral region, and the second ground line does not include the anchor region, the peripheral region, and the insulation region; alternatively, the second ground line may include an anchor point region, a peripheral region, and an insulating region that separates the anchor point region from the peripheral region, and the first ground line does not include the anchor point region, the peripheral region, and the insulating region, which is not described herein again in this embodiment of the disclosure.
The phase shifter of the embodiment of the disclosure divides the first ground wire 21 and/or the second ground wire 22 into the anchor point region 24 and the peripheral region 25 through the insulation region 26, thereby realizing the precise control of the phase shift degree, effectively reducing the insertion loss of the device, and reducing the influence of phase modulation parasitic amplitude modulation. The insulation region 26 can physically isolate the capacitor bridge 300 from the peripheral region 25, so that the high-voltage breakdown risk of the device is effectively reduced, and the stability of the device is improved. The phase shifter is improved in digit, the minimum phase shift degree is reduced, the bit number of the device is improved, meanwhile, the insertion loss and the phase modulation parasitic amplitude modulation phenomenon are reduced, and the pressure resistance of the device is improved.
The phase shifter disclosed by the embodiment of the invention isolates the anchor point region 24 from the peripheral region 25 through the insulating region 26, effectively reduces the unit phase shifting degree of the phase shifter under the conditions of not changing the driving voltage and not improving the driving precision, realizes the unit phase shifting degree, improves the unit phase shifting precision of the phase shifter, and further improves the bit number of the phase shifter.
The phase shifter disclosed by the embodiment of the invention isolates the anchor point region 24 from the peripheral region 25 through the insulating region 26, so that the insertion loss of the phase shifter is effectively reduced, more importantly, the insertion loss change in the working process of the phase shifter is reduced, and the phenomenon of phase modulation parasitic amplitude modulation is greatly reduced.
The phase shifter disclosed by the embodiment of the invention isolates the anchor point region 24 from the peripheral region 25 through the insulation region 26, so that physical isolation is effectively realized, namely, isolation of direct current drive signals can be effectively realized, the problem of device breakdown caused by too high drive voltage is avoided, and the stability of the device is improved.
The phase shifter according to the embodiments of the present disclosure can adjust the phase shift degree of the capacitor unit in the phase shifter by controlling the length, width, and other parameters of the insulating region 26. The scheme of changing the width of the capacitor bridge and the like also has similar effects, but the unit driving voltage can be changed, and when high-precision small-degree phase shift needs to be realized, the problem that the process difficulty is increased due to the fact that the width of the capacitor bridge is too narrow is solved.
The phase shifter of the disclosed embodiments may be a MEMS phase shifter. The working principle of the phase shifter in the embodiment of the disclosure is as follows: a capacitance bridge having a high capacitance ratio is periodically provided on a coplanar waveguide transmission line formed by a signal line and first and second ground lines, thereby increasing the distributed capacitance between the coplanar waveguide transmission line and ground. This makes the coplanar waveguide transmission line a slow wave system, which acts as a phase delay. The direct current bias voltage is applied to the coplanar waveguide transmission line, so that the distributed capacitance can be changed, the parameter of the coplanar waveguide transmission line is changed, and the phase of the electromagnetic wave is changed. The width of the capacitive bridge and the size of the period interval determine the impedance, transmission phase velocity and bragg reflection cutoff frequency of the coplanar waveguide transmission line.
When no control voltage is applied, the phase shifter of the embodiments of the present disclosure is in an on state, the floating portion of the capacitive bridge is free from electrostatic force and has an on-state capacitor Con. When a control voltage is applied, the phase shifter switches from an on state to an off state, and the floating portion of the capacitive bridge sinks under electrostatic force and has an off stateCapacitor CoffCausing an increase in the load capacitance value. This effect is increasing in the coplanar waveguide transmission line per unit length, and the distributed capacitance and transmission characteristics of the load on the coplanar waveguide transmission line are changed, and thus, a change occurs in the phase velocity and characteristic impedance, and the phase velocity change causes a phase shift. The magnitude of the phase shift is determined by the capacitance ratio C of the capacitive bridgeoff/ConAnd the capacitance of the coplanar waveguide transmission line itself.
In an exemplary embodiment, the material of the first ground line 21, the second ground line 22, and the capacitor bridge 23 may be a conductive metal with a relatively low resistivity, for example, at least one of aluminum, silver, copper, and the like.
In an exemplary embodiment, the substrate 100 may be made of various materials. For example, the substrate 100 may be at least one of a quartz substrate, a glass substrate, and a silicon substrate.
In an exemplary embodiment, as shown in fig. 2 and 3, the signal line 23 is provided with a first insulating layer 27 on a side close to the capacitive bridge 300. The orthographic projection of the first insulating layer 27 on the substrate is overlapped with the orthographic projection of the capacitor bridge 300 on the substrate, and the first insulating layer 27 can separate the signal line 23 from the capacitor bridge 300 to prevent the capacitor unit from being broken down by voltage.
In an exemplary embodiment, as shown in fig. 2, the phase shifter according to the embodiment of the disclosure further includes a first voltage control line 28, the first voltage control line 28 is located on a side of the first ground line 21 close to the substrate, and at least a portion of an orthographic projection of the first voltage control line 28 on the substrate overlaps with an orthographic projection of the first ground line 21 on the substrate, that is, the first voltage control line 28 passes through the side of the first ground line 21 close to the substrate. A third insulating layer 29 is disposed between the first voltage control line 28 and the first ground line 21, and the third insulating layer 29 separates the first voltage control line 28 from the first ground line 21. The first voltage control line 28 is electrically connected to the signal line 23, and the first voltage control line 28 can supply a voltage control signal to the signal line 23 to control the voltage of the signal line 23.
In an exemplary embodiment, as shown in fig. 2, the phase shifter according to the embodiment of the present disclosure further includes a control unit 30, the control unit 30 is electrically connected to the capacitive bridge 300 on the anchor point region 24 of the first ground line 21 through the anchor point region 24 of the first ground line 21, and the control unit 30 is configured to control a voltage of the capacitive bridge 300 on the anchor point region 24.
In an exemplary embodiment, as shown in fig. 2 and 3, the number of anchor point regions 24 in the first ground wire 21 is at least two, the number of control units 30 is at least two, and the at least two control units 30 are connected in one-to-one correspondence with the at least two anchor point regions 24 in the first ground wire 21. That is, each control unit 30 corresponds to one anchor point region 24, and each control unit 30 provides signals to one or more capacitive bridges 300 on the anchor point region 24 corresponding thereto.
The phase shifter according to the embodiments of the present disclosure can change the electric field of different regions on the coplanar waveguide transmission line more accurately by enabling one or more capacitive bridges 300 on each anchor point region 24 to independently receive the control signal of the corresponding control unit 30, and thus can change the phase of the microwave signal transmitted on the coplanar waveguide transmission line more accurately.
In an exemplary embodiment, as shown in fig. 2 and 3, the phase shifter according to the embodiment of the present disclosure further includes a second voltage control line 31, and the second voltage control line 31 is located on a substrate-near side of the first ground line 21. A first end of the second voltage control line 31 is connected to the control unit 30, a second end of the second voltage control line 31 is electrically connected to the anchor region 24 of the first ground line 21, an orthographic projection of at least a portion of the second voltage control line 31 on the substrate overlaps with an orthographic projection of the peripheral region 25 of the first ground line 21 on the substrate, a second insulating layer 32 is disposed between the second voltage control line 31 and the peripheral region 25 of the first ground line 21, and the second insulating layer 32 separates the second voltage control line 31 from the peripheral region 25 of the first ground line 21.
Fig. 4 is a schematic diagram illustrating dimensions of an isolation region in a phase shifter according to an embodiment of the present disclosure. The phase shifter according to the embodiments of the present disclosure can adjust the phase shift degree of the capacitor unit in the phase shifter by controlling the size of the insulating region 26. Specifically, as shown in fig. 4, the insulating region is a slotted structure, and the insulating region is U-shaped on a plane parallel to the substrate. The width of the outer edge of the insulating region is Ws, the height of the outer edge of the insulating region is Ls, the width of the inner edge of the insulating region is Wp, and the height of the inner edge of the insulating region is Lp. The dimensions of Ws and Ls in the insulating region were fixed, and simulation tests were performed on widths (loop widths) of the slots in the insulating region of 20um, 50um, and 100um, and the simulation results are shown in table 2. Wherein, the distance between the capacitor bridge 300 and the signal line 23 is h; the return loss of the phase shifter is S11; the insertion loss is S21 under the working state of the phase shifter; the phase shift degree of the phase shifter is Cand-deg.
Table 2 simulation results of varying the width of the trench in the insulation region
According to simulation results, the larger the width of the slot of the insulation region is, the smaller the phase shift degree of the capacitor unit is, so that small-angle fine regulation and control can be realized. In addition, the insertion loss changes are smaller than 0.1dB under the switching of the working state of the phase shifter, the problem of phase modulation parasitic amplitude modulation is effectively solved, the absolute value of the insertion loss is also lower than 0.2dB under the working state, the low insertion loss design of a device is realized, the working efficiency of the whole phase shifter is effectively improved, and the energy loss is reduced.
In the phase shifter according to the embodiment of the present disclosure, the size of the slot width (loop width) of the insulation region is fixed, the area occupied by the insulation region on the ground line is changed to perform a simulation test, the size of Ls is changed to perform a simulation test, and the size of Ws is changed to perform a simulation test, and simulation results are shown in tables 3, 4, and 5.
TABLE 3 simulation results for changing the area occupied by the insulation region on the ground wire
Table 4 simulation results for varying the size of the insulating region Ls
Table 5 simulation results of varying the size of the insulation region Ws
According to the simulation results in tables 3, 4 and 5, it can be known that, under the condition that the size of the width (loop width) of the slot of the insulation region is kept unchanged, Ls and Ws are larger, that is, the proportion of the area occupied by the insulation region on the ground wire is larger, and the phase shift degree of the capacitor unit is larger; the reduction of Ls and/or Ws reduces the degree of phase shift of the capacitive cell. And the insertion loss change under the working state switching can be controlled to be less than 0.01dB through the size adjustment of Ls and/or Ws. Meanwhile, it should be noted that the phase shifter according to the embodiment of the present disclosure hardly affects the driving voltage of the capacitor bridge, which means that the design of the capacitor units with different phase shifting degrees can be implemented without increasing the complexity of the driving system.
According to the simulation result, the phase shifter disclosed by the embodiment of the invention isolates the anchor point region from the peripheral region through the insulation region, so that the capacitor bridge is separated from the peripheral region, a new parallel capacitor is introduced, the equivalent circuit structure of the capacitor unit is changed, the phase shifter digit is improved, the minimum phase shift degree is reduced, the device bit number is improved, the insertion loss and the phase modulation parasitic amplitude modulation phenomenon are reduced, and the voltage resistance of the device is improved.
In an exemplary embodiment, a phase shifter according to an embodiment of the present disclosure includes at least two capacitor bridges, first ends of the at least two capacitor bridges are electrically connected to an anchor point region of a first ground line, second ends of the at least two capacitor bridges are electrically connected to an anchor point region of a second ground line, so that at least two capacitor bridges are connected to one anchor point region of the first ground line and the second ground line, the at least two capacitor bridges and a signal line in one anchor point region form at least two sub-capacitor units, that is, one capacitor bridge and the signal line form one sub-capacitor unit, and at least two sub-capacitor units in one anchor point region form one capacitor unit.
In an exemplary embodiment, a phase shifter according to an embodiment of the present disclosure includes at least n capacitor bridges, where first ends of the at least n capacitor bridges are electrically connected to an anchor point region of a first ground line, and second ends of the at least two capacitor bridges are electrically connected to an anchor point region of a second ground line, so that at least two capacitor bridges are connected to one anchor point region of the first ground line and the second ground line. Wherein n is a natural number of 1 or more and 5 or less. Preferably, n is 2 or 3.
In some embodiments, the first ends of the at least two capacitive bridges are electrically connected to only one anchor point region of the first ground line; alternatively, the first ends of the at least two capacitor bridges are electrically connected to only one anchor point region of the second ground line, which is not described herein again.
Fig. 5 is a second schematic structural diagram of a phase shifter according to an embodiment of the disclosure. In the exemplary embodiment, three capacitive bridges are connected to one anchor point region as an example. As shown in fig. 5, the number of the capacitor bridges 300 connected to one anchor point region 24 may be three, three capacitor bridges 300 are arranged at intervals along the extending direction of the signal line 23, and the three capacitor bridges 300 are arranged in parallel with each other. The first ends of the three capacitor bridges 300 can be connected with one anchor point region 24 of the first ground wire 21, and the second ends of the three capacitor bridges 300 can be connected with one anchor point region 24 of the second ground wire 22, so that the three capacitor bridges 300 are arranged on one side of the signal wire 23 away from the substrate in a suspension manner. Three capacitor bridges 300 on one anchor point area 24 and the signal line 23 form one capacitor unit, that is, three capacitor bridges 300 on one anchor point area 24 and the signal line 23 form three sub-capacitor units, and three sub-capacitor units formed by three capacitor bridges 300 on one anchor point area 24 form one capacitor unit.
The phase shifter according to the embodiment of the present disclosure, that is, three capacitor bridges form three sub-capacitor units, and the three sub-capacitor units form one capacitor unit, is subjected to a simulation test, and simulation results are shown in table 6.
TABLE 6 simulation results of three sub-capacitor units forming one capacitor unit
According to the simulation results in table 6, it can be seen that the phase shifter according to the embodiment of the disclosure forms one capacitor unit by using a plurality of sub-capacitor units, and improves the phase shifting degree of the capacitor unit compared with a case where one capacitor unit is formed by using one capacitor bridge under the condition of satisfying the insertion loss reduction requirement. It should be noted that, in the phase shifter according to the embodiment of the present disclosure, attention needs to be paid to control the spacing S between adjacent capacitor bridges to prevent interference between adjacent capacitor bridges. The value range of S is larger than 100um, but the value cannot be too large, the area of the device is increased, and insertion loss caused by the length of the wire is increased.
FIG. 6 is a third schematic structural diagram of a phase shifter according to an embodiment of the present disclosure; FIG. 7 is a fourth schematic diagram illustrating a phase shifter according to an embodiment of the present disclosure; fig. 8 is a fifth schematic structural diagram of a phase shifter according to an embodiment of the disclosure. In an exemplary embodiment, the insulating region may take a variety of shapes in a plane parallel to the substrate. And the shape of the insulating region in first ground line 21 and the shape of the insulating region in second ground line 22 may be the same or different. For example, on a plane parallel to the substrate, the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 may be both U-shaped, and the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 are arranged in a mirror image with the center line of the signal line as an axis, as shown in fig. 2; alternatively, on a plane parallel to the substrate, the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 may both be V-shaped, and the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 are arranged in a mirror image with the center line of the signal line as an axis, as shown in fig. 6; alternatively, on a plane parallel to the substrate, the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 may be circular arcs, and the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 are arranged in a mirror image with the center line of the signal line as an axis, as shown in fig. 7; alternatively, the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 may be trapezoidal in a plane parallel to the substrate, and the shape of the insulating region in the first ground line 21 and the shape of the insulating region in the second ground line 22 are arranged in a mirror image with the center line of the signal line as an axis, as shown in fig. 8.
Fig. 9 is a sixth schematic structural diagram of a phase shifter according to an embodiment of the disclosure. In an exemplary embodiment, the insulating region may take a variety of configurations. For example, the insulating region may take a slotted configuration, as shown in FIG. 2. Alternatively, the insulating region may employ an insulating dielectric layer, as shown in fig. 9. The insulating medium layer can be made of an inorganic insulating material or an organic insulating material. For example, SiNx, SiO, a-Si, or the like can be used as the inorganic insulating material, and PI, PDMS, OC, or the like can be used as the organic insulating material. The phase shifter provided by the embodiment of the disclosure can change the capacitance influence caused by the slotting structure through the insulating medium layer, thereby realizing the regulation and control of the phase shifting degree and the insertion loss.
The embodiment of the present disclosure also provides an antenna, including any one of the phase shifters described above.
The embodiment of the disclosure also provides a method for manufacturing a phase shifter, which includes:
forming a coplanar waveguide transmission line on a substrate; the coplanar waveguide transmission line comprises a first ground wire and a second ground wire which are oppositely arranged, the first ground wire and the second ground wire are mutually insulated, and the first ground wire and/or the second ground wire comprise an anchor point area, a peripheral area and an insulating area which separates the anchor point area from the peripheral area;
forming at least one capacitor bridge on one side of the coplanar waveguide transmission line away from the substrate; the first end of the at least one capacitive bridge is electrically connected with the anchor point region of the first ground wire, and/or the second end of the at least one capacitive bridge is electrically connected with the anchor point region of the second ground wire.
The drawings in this disclosure relate only to the structures to which this disclosure relates and other structures may be referred to in the general design. Without conflict, features of embodiments of the present disclosure, i.e., embodiments, may be combined with each other to arrive at new embodiments.
It will be understood by those skilled in the art that various modifications and equivalent arrangements may be made in the present disclosure without departing from the spirit and scope of the present disclosure, and the scope of the appended claims should be accorded the full scope of the disclosure.
Claims (15)
1. A phase shifter comprising a substrate, a coplanar waveguide transmission line disposed on the substrate, and at least one capacitive bridge disposed on a side of the coplanar waveguide transmission line remote from the substrate, the coplanar waveguide transmission line including first and second oppositely disposed ground lines, the first and second ground lines being insulated from each other, at least one of the first and second ground lines including an anchor region, a peripheral region, and an insulating region separating the anchor region from the peripheral region, the at least one capacitive bridge being electrically connected to the anchor region.
2. The phase shifter of claim 1, wherein the first ground line and the second ground line each include an anchor region, a peripheral region, and an insulating region separating the anchor region from the peripheral region, wherein a first end of the at least one capacitive bridge is electrically connected to the anchor region of the first ground line, and wherein a second end of the at least one capacitive bridge is electrically connected to the anchor region of the second ground line.
3. The phase shifter of claim 1, wherein the insulating region has at least one of a U-shape, a V-shape, a circular arc shape, and a trapezoidal shape in a plane parallel to the substrate.
4. The phase shifter of claim 1, wherein the insulating region is a slotted structure or an insulating dielectric layer.
5. Phase shifter as in claim 2, characterized in that it comprises at least two capacitive bridges, a first end of each of which is electrically connected to one anchor region of the first ground line and a second end of each of which is electrically connected to one anchor region of the second ground line.
6. The phase shifter according to claim 5, comprising at least n capacitive bridges, wherein first ends of the at least n capacitive bridges are electrically connected to an anchor point region of the first ground line, second ends of the at least n capacitive bridges are electrically connected to an anchor point region of the second ground line, and n is a natural number greater than or equal to 1 and less than or equal to 5.
7. Phase shifter as in claim 5, characterized in that it comprises at least n capacitive bridges, a first end of each of said at least n capacitive bridges being electrically connected to one anchor area of said first ground line and a second end of each of said at least n capacitive bridges being electrically connected to one anchor area of said second ground line, said n being 2 or 3.
8. The phase shifter according to any one of claims 1 to 7, wherein the coplanar waveguide transmission line further comprises a signal line, the signal line is located between the first ground line and the second ground line, the signal line is insulated from the first ground line and the second ground line, at least a part of the capacitance bridge is suspended on a side of the signal line away from the substrate, and at least a part of an orthographic projection of the suspended part of the capacitance bridge on the substrate overlaps with an orthographic projection of the signal line on the substrate, and at least a part of the suspended part of the capacitance bridge forms a capacitive unit with the signal line.
9. The phase shifter according to claim 8, wherein a first insulating layer is provided on a side of the signal line adjacent to the capacitor bridge.
10. The phase shifter of claim 8, further comprising a first voltage control line electrically connected to the signal line.
11. Phase shifter as in any of claims 1 to 7, further comprising a control unit electrically connected to the capacitive bridge via the anchor region, the control unit being configured to control a voltage of the capacitive bridge.
12. The phase shifter according to claim 11, wherein the number of the anchor regions is at least two, the number of the control units is at least two, and the at least two control units are connected to the at least two anchor regions in a one-to-one correspondence.
13. The phase shifter of claim 12, further comprising a second voltage control line, a first end of the second voltage control line being connected to the control unit, a second end of the second voltage control line being electrically connected to the anchor region.
14. The phase shifter according to claim 13, wherein the first ground line and the second ground line each include an anchor region, a peripheral region, and an insulating region separating the anchor region from the peripheral region, at least a portion of an orthographic projection of the second voltage control line on the substrate overlaps with an orthographic projection of the peripheral region of the first ground line on the substrate, the second voltage control line and the peripheral region of the first ground line having a second insulating layer disposed therebetween.
15. An antenna comprising a phase shifter as claimed in any one of claims 1 to 14.
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| CN114300821B (en) | 2023-08-29 |
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