CN113117970A - Coating device - Google Patents
Coating device Download PDFInfo
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- CN113117970A CN113117970A CN202110044860.5A CN202110044860A CN113117970A CN 113117970 A CN113117970 A CN 113117970A CN 202110044860 A CN202110044860 A CN 202110044860A CN 113117970 A CN113117970 A CN 113117970A
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- coating liquid
- coating
- slit
- discharge port
- coated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
- B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
- B05C5/0262—Coating heads with slot-shaped outlet adjustable in width, i.e. having lips movable relative to each other in order to modify the slot width, e.g. to close it
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
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- Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
When a coating liquid (P) is applied to the surface of an object to be coated from a slit-shaped discharge port (11) by relatively moving a coating nozzle (10) and the object to be coated on the object to be coated (W) and coating the coating liquid (P) in a coating liquid accommodating portion (11) of the coating nozzle, a coating liquid supply device (20) and the coating nozzle are provided with: a control means (22) for controlling the supply and stop of the coating liquid to the coating liquid storage section; coating width adjusting mechanisms (13, 13) for adjusting the coating width of the coating liquid applied to the surface of the coated body from the slit-shaped outlet; and a gas supply mechanism (30) which supplies gas into the coating liquid containing part at a constant pressure and discharges the coating liquid stored in the coating liquid containing part.
Description
Technical Field
The present invention relates to a coating apparatus in which a coating nozzle having a slit-shaped discharge port at a distal end portion thereof for discharging a coating liquid in a coating liquid containing portion is disposed above an object to be coated, and the coating liquid is supplied from a coating liquid supply device into the coating liquid containing portion inside the coating nozzle, and the object to be coated and the coating nozzle are relatively moved, whereby the coating liquid in the coating liquid containing portion is applied to a surface of the object to be coated through the slit-shaped discharge port. In particular, the following features are provided: while the object to be coated and the coating nozzle are relatively moved as described above and the coating liquid is applied to the surface of the object to be coated through the slit-shaped discharge port provided in the coating nozzle, the width of the coating liquid applied to the surface of the object to be coated is changed, and when the coating liquid is applied to the surface of the object to be coated so as to form various shapes such as a circular shape, the coating liquid can be applied without causing unevenness in the thickness of the applied coating liquid.
Background
Conventionally, the following coating apparatuses have been widely used: the coating nozzle is provided with a slit-shaped outlet at the front end thereof for discharging the coating liquid in the coating liquid storage part, the coating liquid is supplied from the coating liquid supply device into the coating liquid storage part inside the coating nozzle through the coating liquid supply pipe, and the coated body and the coating nozzle are relatively moved, so that the coating liquid in the coating liquid storage part is applied to the surface of the coated body through the slit-shaped outlet.
In recent years, as shown in patent documents 1 to 4, the following techniques have been proposed: in the coating apparatus as described above, when the coating liquid contained in the coating liquid containing portion of the coating nozzle is applied to the surface of the object to be coated from the slit-shaped discharge port provided at the tip of the coating nozzle, the width of the coating liquid to be applied is changed while the coating liquid is applied to the surface of the object to be coated, and the coating liquid is applied to the surface of the object to be coated, such as a wafer, so as to have various shapes, such as a circular shape.
Here, as described above, when the coating liquid is supplied from the coating liquid supply device into the coating liquid storage portion inside the coating nozzle through the coating liquid supply pipe and is coated on the surface of the object to be coated from the slit-shaped discharge port, when the width of the coating liquid to be coated is changed while the coating liquid is coated on the surface of the object to be coated, even if the pressure of the coating liquid supplied from the coating liquid supply device to the coating liquid supply pipe is constant, the piping pressure loss (pressure loss) occurs when the coating liquid is supplied from the coating liquid supply device to the coating liquid storage portion through the coating liquid supply pipe, and the piping pressure loss changes in accordance with the change in the amount of the coating liquid discharged from the slit-shaped discharge port while changing the width of the coating liquid, and therefore, there is a problem as follows: in a wide portion of the coating liquid to be applied, the film thickness of the coating liquid on the surface of the object to be coated becomes thin, while in a narrow portion of the coating liquid to be applied, the film thickness of the coating liquid on the surface of the object to be coated becomes thick, and it becomes difficult to apply the coating liquid to the surface of one object to be coated with a constant film thickness.
Therefore, patent documents 3 and 4 show the following: when the coating liquid is supplied from the coating liquid supply device into the coating liquid containing part through the coating liquid supply pipe, the pressure of the coating liquid supplied into the coating liquid containing part through the coating liquid supply pipe is adjusted so that the liquid pressure of the coating liquid in the coating liquid containing part is constant, and even when the width of the coating liquid applied to the surface of the coated body is changed, the coating liquid is applied to the surface of the coated body with a constant film thickness.
However, when the pressure of the coating liquid supplied from the coating liquid supply device into the coating liquid containing unit through the coating liquid supply pipe is adjusted in this manner so that the liquid pressure of the coating liquid in the coating liquid containing unit is constant, the structure is complicated, the control is very troublesome, it is difficult to adjust the liquid pressure of the coating liquid in the coating liquid containing unit to be constant, and the coating liquid is applied to the surface of the object to be coated with a constant film thickness.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open No. 2014-22545
Patent document 2: japanese patent laid-open No. 2012-120938
Patent document 3: japanese patent No. 4040144
Patent document 4: japanese patent laid-open No. 2018-69230
Disclosure of Invention
Technical problem to be solved by the invention
The present invention has been made to solve the above-described problems in an application device configured to arrange a coating nozzle having a slit-shaped discharge port at a distal end portion thereof for discharging a coating liquid in a coating liquid storage portion, on an object to be coated, supply the coating liquid from a coating liquid supply device into the coating liquid storage portion inside the coating nozzle, and move the object to be coated and the coating nozzle relative to each other, thereby causing the coating liquid in the coating liquid storage portion to pass through the slit-shaped discharge port and to be applied to the surface of the object to be coated.
That is, the present invention solves the technical problem of: as described above, when the coating liquid is applied to the surface of the object to be coated by relatively moving the object to be coated and the coating nozzle, the width of the coating liquid to be applied is changed while the coating liquid is applied to the surface of the object to be coated through the slit-shaped discharge port provided in the coating nozzle, and when the coating liquid is applied to the surface of the object to be coated so as to form various shapes such as a circular shape, the coating liquid can be applied to the surface of the object without causing unevenness or the like in the thickness of the coating liquid applied to the surface of the object to be coated.
Technical scheme for solving technical problem
In order to solve the above-described problems, a coating apparatus according to the present invention is a coating apparatus in which a coating nozzle having a slit-shaped discharge port at a tip end portion thereof for discharging a coating liquid in a coating liquid containing portion is disposed on an object to be coated, the coating liquid is supplied from a coating liquid supply device into the coating liquid containing portion inside the coating nozzle, and the object to be coated and the coating nozzle are relatively moved so that the coating liquid in the coating liquid containing portion passes through the slit-shaped discharge port and is applied to a surface of the object to be coated, the coating apparatus including: a control means for controlling supply and stop of the coating liquid to the coating liquid containing section; a coating width adjusting mechanism that adjusts a coating width of the coating liquid that is applied to the surface of the object to be coated by passing the coating liquid in the coating liquid accommodating portion through the slit-shaped discharge port; and a gas supply mechanism for supplying gas into the coating liquid containing part at a constant pressure to discharge the coating liquid in the coating liquid containing part.
In the coating apparatus of the present invention, as described above, when the coating liquid in the coating container is applied to the surface of the object through the slit-shaped discharge port by relatively moving the object and the coating nozzle, the control means supplies the coating liquid from the coating liquid supply device into the coating liquid container of the coating nozzle, and then stops supplying the coating liquid into the coating liquid container.
When the amount of the coating liquid supplied from the coating liquid supply device into the coating liquid containing unit decreases as described above, the gas supply mechanism supplies gas into the coating liquid containing unit at a constant pressure to discharge the coating liquid stored in the coating liquid containing unit, and the coating width adjustment mechanism adjusts the coating width of the coating liquid that is applied to the surface of the object to be coated by passing the coating liquid stored in the coating liquid containing unit through the slit-shaped discharge port.
Here, as in the coating apparatus of the present invention, when the coating width of the coating liquid applied to the surface of the object through the slit-shaped discharge port is adjusted by the coating width adjusting mechanism in a state in which the coating liquid is supplied from the coating liquid supply device into the coating liquid accommodating portion of the coating nozzle by the control mechanism and then the supply of the coating liquid into the coating liquid accommodating portion is stopped, and the coating liquid is supplied from the gas supply mechanism into the coating liquid accommodating portion at a constant pressure to discharge the coating liquid stored in the coating liquid accommodating portion, the coating liquid supply pipe is independent of the discharge of the coating liquid, and there is no problem as in the related art: when the pressure of the coating liquid supplied from the coating liquid supply device into the coating liquid containing part through the coating liquid supply pipe is adjusted to adjust the pressure of the coating liquid stored in the coating liquid containing part, pipe pressure loss occurs when the coating liquid is supplied from the coating liquid supply device into the coating liquid containing part through the coating liquid supply pipe.
In the coating apparatus of the present invention, as described above, when the gas is supplied from the gas supply mechanism into the coating liquid containing unit at a constant pressure to keep the pressure in the coating liquid containing unit constant, even when the coating width of the coating liquid is changed while the coating liquid in the coating liquid containing unit is applied to the surface of the object through the slit-shaped discharge port, the liquid pressure of the coating liquid in the coating liquid containing unit is kept constant, and the coating liquid can be applied to the surface of the object at a uniform thickness so that the applied coating liquid does not have unevenness in thickness or the like.
In the coating apparatus of the present invention, when the coating liquid is supplied from the coating liquid supply device into the coating liquid containing portion, if the exhaust valve for exhausting the gas in the coating liquid containing portion is provided, the exhaust valve is opened to form a hole for exhausting the gas, and the coating liquid can be smoothly supplied from the coating liquid supply device into the coating liquid containing portion.
In the coating apparatus of the present invention, as the coating width adjusting means for adjusting the coating width of the coating liquid applied to the surface of the object through the slit-shaped discharge port, the slit width adjusting means for adjusting the width of the coating liquid guided to the surface of the object through the slit-shaped discharge port may be provided.
In addition, as another coating width adjusting mechanism, it is possible to provide: a cylindrical coating liquid supply body having a coating liquid receiving recess formed in a predetermined pattern shape for receiving the coating liquid in the coating liquid receiving portion on an outer peripheral surface thereof is rotatably provided so as to be positioned above the slit-shaped discharge port, and the coating liquid supply body is rotated above the slit-shaped discharge port, whereby the coating liquid received in the coating liquid receiving recess is supplied to a surface of an object to be coated which moves relative to the coating nozzle through the slit-shaped discharge port, and the coating liquid is applied to the surface of the object to be coated in accordance with the shape of the coating liquid receiving recess.
Effects of the invention
In the coating apparatus of the present invention, as described above, when the object to be coated and the coating nozzle are moved relatively, when the coating liquid in the coating liquid containing part passes through the slit-shaped discharge opening and is coated on the surface of the coated body, a predetermined amount of the coating liquid is supplied from the coating liquid supply device into the coating liquid containing part of the coating nozzle by the control mechanism, and the supply of the coating liquid to the coating liquid containing part is stopped, in this state, the gas is supplied from the gas supply mechanism into the coating liquid containing part at a constant pressure, thereby discharging the coating liquid stored in the coating liquid storage part, and adjusting the coating width of the coating liquid which is coated on the surface of the coated body by the coating width adjusting mechanism through the slit-shaped discharge port, therefore, the coating liquid supply pipe is irrelevant to the discharge of the coating liquid, and the problems of the prior art do not exist: when the pressure of the coating liquid supplied from the coating liquid supply device into the coating liquid containing part through the coating liquid supply pipe is adjusted to adjust the pressure of the coating liquid stored in the coating liquid containing part, pipe pressure loss occurs when the coating liquid is supplied from the coating liquid supply device into the coating liquid containing part through the coating liquid supply pipe.
As a result, in the coating apparatus of the present invention, since the pressure in the coating liquid container can be made constant only by supplying the gas from the gas supply mechanism into the coating liquid container at a constant pressure as described above, even when the coating width of the coating liquid to be applied is changed while the coating liquid in the coating liquid container is applied to the surface of the object through the slit-shaped discharge port, the amount of the coating liquid to be supplied to the surface of the object through the slit-shaped discharge port is proportional to the change in the coating width, and the thickness of the coating liquid applied to the surface of the object is made constant in accordance therewith, so that the coating liquid can be applied at a uniform thickness on the surface of the object without using a complicated mechanism and control so that the thickness of the coating liquid after application does not become uneven or the like.
Drawings
Fig. 1 shows a state in which a slit-shaped outlet for discharging a coating liquid contained in a coating liquid containing portion inside a coating nozzle is provided at a tip end portion of the coating nozzle, and a pair of width adjusting members for adjusting an open/close state of the slit-shaped outlet are provided as a coating width adjusting mechanism, and the coating liquid is supplied from a coating liquid supply device into the coating liquid containing portion inside the coating nozzle, (a) is a schematic cross-sectional explanatory view of a width direction of the slit-shaped outlet of the coating nozzle, and (B) is a schematic cross-sectional explanatory view of a direction of the coating nozzle intersecting the width direction of the slit-shaped outlet.
Fig. 2 shows a state before a predetermined amount of coating liquid is supplied from the coating liquid supply device into the coating liquid containing unit inside the coating nozzle and coating of the coating liquid by the coating nozzle is started in the coating device according to the above-described embodiment, (a) is a schematic cross-sectional explanatory view in the width direction of the slit-shaped discharge port of the coating nozzle, and (B) is a schematic cross-sectional explanatory view in the direction intersecting the width direction of the slit-shaped discharge port of the coating nozzle.
Fig. 3 shows a state in which the application nozzle is moved on the object to be coated and the pair of width adjustment members in a state in which the slit-shaped discharge port at the tip end portion of the application nozzle is closed are moved, and the coating liquid contained in the coating liquid containing section is applied to the surface of the object to be coated through the slit-shaped discharge port between the pair of width adjustment members, (a) is a schematic cross-sectional explanatory view showing the longitudinal direction of the application nozzle and a direction intersecting the longitudinal direction in an initial state in which the coating liquid is applied to the surface of the object to be coated by the application nozzle, (B) is a schematic cross-sectional explanatory view showing the longitudinal direction of the application nozzle and a direction intersecting the longitudinal direction in a state in which the coating liquid is applied to the surface of the object to be coated by the application nozzle with the maximum width, (C) is a schematic cross-sectional explanatory view showing the longitudinal direction of the application nozzle and the direction intersecting the longitudinal direction in a state in which the coating liquid is applied to the entire surface of the object to be coated by the application nozzle, A schematic cross-sectional explanatory view of the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction.
Fig. 4 shows a planar state of the coating object in which the coating nozzle is moved over the coating object and the width between the pair of width adjustment members is changed, and the coating liquid contained in the coating liquid containing portion is applied to the surface of the coating object through the slit-shaped discharge port between the pair of width adjustment members in the coating device of the above-described embodiment, (a) is a plan view showing a state of fig. 3 (a), (B) is a plan view showing a state of fig. 3 (B), and (C) is a plan view showing a state of fig. 3 (C), as shown in fig. 3.
Fig. 5 shows a state in which, in a coating apparatus according to another embodiment of the present invention, as a coating width adjustment mechanism, a coating liquid accommodating recess having an elliptical shape for accommodating a coating liquid is provided on an outer peripheral surface of a coating liquid supply body rotatably provided in a coating liquid accommodating portion of a coating nozzle to which the coating liquid is supplied, (a) is a schematic front view of the coating liquid supply body provided with the coating liquid accommodating recess, and (B) is a developed plan view of the coating liquid accommodating recess provided on the outer peripheral surface of the coating liquid supply body.
Fig. 6 shows a schematic cross-sectional explanatory view of a direction crossing the longitudinal direction of the coating nozzle in a state where the coating liquid is supplied to the coating liquid storage section of the coating nozzle, in which the coating nozzle is guided above the object to be coated, the coating nozzle is moved above the object to be coated, and the coating liquid supply body is rotated in the coating liquid introduction section, and the coating liquid stored in the coating liquid storage recess of the coating liquid supply body is applied to the surface of the object to be coated from the slit-shaped discharge port at the tip end of the coating nozzle in the above-described coating liquid application apparatus according to another embodiment, (a) shows a schematic cross-sectional explanatory view of a direction crossing the longitudinal direction of the coating nozzle in a state where the coating nozzle is guided above the object to be coated in a state where the coating liquid is supplied to the coating liquid storage section of the coating nozzle, (B) shows a schematic cross-sectional explanatory view of a direction crossing the longitudinal direction of the coating nozzle in a state where the coating liquid is applied to the surface of the object to be coated through the coating nozzle, (C) the drawing is a schematic cross-sectional explanatory view showing a direction intersecting with a longitudinal direction of the coating nozzle in a state where the coating liquid is applied to the surface of the object to be coated with the maximum width by the coating nozzle, and (D) is a schematic cross-sectional explanatory view showing a direction intersecting with the longitudinal direction of the coating nozzle in a case where the coating liquid is applied to the entire surface of the object to be coated with the coating nozzle.
Detailed Description
Hereinafter, a coating apparatus according to an embodiment of the present invention will be specifically described with reference to the drawings. The coating apparatus and coating method of the present invention are not limited to those described in the following embodiments, and can be implemented by making appropriate changes within the scope not changing the gist of the invention.
Here, as shown in the drawings such as fig. 1 (a) and (B), the coating apparatus according to the embodiment of the present invention is provided with a coating liquid storage section 11 for storing the coating liquid P therein as a coating nozzle 10, and a slit-shaped discharge port 12 for discharging the coating liquid P stored in the coating liquid storage section 11 is provided at a distal end portion thereof, and a pair of slit width adjusting members 13, 13 are provided as a coating width adjusting mechanism below the slit-shaped discharge port 12 so as to slide in a longitudinal direction of the slit-shaped discharge port 12 by a moving device (not shown), and the pair of slit width adjusting members 13, 13 are slid in the longitudinal direction of the slit-shaped discharge port 12 to adjust a width for opening and closing the slit-shaped discharge port 12.
In the coating apparatus of this embodiment, as a control structure, a coating liquid supply valve 22 is provided in a coating liquid supply pipe 21 for supplying the coating liquid P from the coating liquid supply device 20 to the coating liquid accommodating portion 11 of the coating nozzle 10, and the coating liquid supply valve 22 is opened and closed to stop the supply and discharge of the coating liquid P to the coating liquid accommodating portion 11, and a supply/discharge pipe 31 for supplying and discharging gas into the coating liquid accommodating portion 11 is provided, and a gas supply mechanism 30 for supplying gas into the coating liquid accommodating portion 11 through a supply valve 31b provided in a supply side pipe 31a of the supply/discharge pipe 31 is provided, while the gas in the coating liquid accommodating portion 11 is discharged through a discharge valve 32b provided in a discharge side pipe 32a of the supply/discharge pipe 31.
When the coating liquid P is dropped from above when the coating liquid P is supplied to the coating liquid storage part 11, bubbles are generated in the coating liquid P and mixed, and therefore, in order to avoid this, the coating liquid supply pipe 21 is connected to the bottom of the coating liquid storage part 11. In the coating liquid supply device 20, the coating liquid P stored in the closed container is fed under pressure through the coating liquid supply pipe 21 by the pressure of the gas introduced from the gas inlet 23.
Here, in the coating apparatus of this embodiment, when the coating liquid P is supplied into the coating liquid containing portion 11 of the coating nozzle 10, as shown in fig. 1 (a) and (B), in a state where the slit-shaped discharge port 12 at the tip end portion of the coating nozzle 10 is closed by the pair of slit width adjusting members 13, the coating liquid supply valve 22 provided in the coating liquid supply pipe 21 is opened to supply the coating liquid P from the coating liquid supply apparatus 20 to the coating liquid containing portion 11, the exhaust valve 32B provided in the exhaust side pipe 32a is opened to discharge (degas) the gas in the coating liquid containing portion 11 through the exhaust side pipe 32a, and the supply valve 31B provided in the supply side pipe 31a is closed to prevent the gas supply from the gas supply mechanism 30 to the coating liquid containing portion 11. In the figures, the valves 22, 31b, and 32b are shown in an open state by white open and in a closed state by black solid.
After a predetermined amount of the coating liquid P is supplied into the coating liquid containing portion 11 of the coating nozzle 10 as described above, as shown in fig. 2 (a) and (B), in a state where the slit-shaped discharge port 12 at the distal end portion of the coating nozzle 10 is closed by the pair of slit width adjusting members 13 and 13, the coating liquid supply valve 22 provided in the coating liquid supply pipe 21 is closed, so that the coating liquid P is not supplied from the coating liquid supply device 20 to the coating liquid containing portion 11, and the exhaust valve 32B provided in the exhaust side pipe 32a is closed, so that the gas in the coating liquid containing portion 11 is not exhausted, while the supply valve 31B provided in the supply side pipe 31a is opened, and the gas is supplied from the gas supply mechanism 30 into the coating liquid containing portion 11 at a constant pressure by using a pressure adjusting valve (not shown).
In the coating apparatus of the present embodiment, when the coating liquid P is applied from the coating nozzle 10 to the surface of the object W, a predetermined amount of the coating liquid P is supplied into the coating liquid containing unit 11 of the coating nozzle 10 while the slit-shaped discharge port 12 at the distal end portion of the coating nozzle 10 is closed by the pair of slit width adjusting members 13, 13 as described above, and the gas is supplied from the gas supply mechanism 30 at a constant pressure so that the pressure in the coating liquid containing unit 11 becomes a predetermined pressure, whereby the coating nozzle 10 is guided from the slit-shaped discharge port 12 to a position where the coating liquid P starts to be applied to the surface of the object W.
The following will be explained: with the application device of this embodiment, as shown in fig. 3 (a) to (C) and 4 (a) to (C), the coating liquid P is applied in a circular shape to the surface of the circularly shaped object W by varying the application width of the coating liquid P while applying the coating liquid P to the surface of the object W from the coating nozzle 10.
Here, in the coating apparatus of the present embodiment, the gas is supplied from the gas supply mechanism 30 at a constant pressure so that the inside of the coating liquid containing section 11 is at a predetermined pressure, and as shown in fig. 3 (a) to (C), the coating nozzle 10 is moved in the direction of applying the coating liquid P to the surface of the object W, and from the state in which the slit-shaped discharge port 12 is closed by the pair of slit-width adjusting members 13, 13 as described above, the pair of slit-width adjusting members 13, 13 is moved in the direction of separating to slightly open the slit-shaped discharge port 12, and the coating liquid P is applied to the surface of the object W from the slit-shaped discharge port 12, as shown in fig. 3 (a).
Then, while moving the application nozzle 10 in this manner, the pair of slit width adjustment mechanisms 13 and 13 are gradually moved in the direction of separation, and the slit-shaped discharge port 12 is further opened widely, so that the coating liquid P is applied to the entire diameter direction of the surface of the circular object to be coated W, as shown in fig. 3 (B). Then, in a state where the pair of slit width adjusting members 13, 13 are moved in the approaching direction while the coating nozzle 10 is further moved to gradually decrease the width of the slit-shaped discharge port 12 to be opened and the coating nozzle 10 is moved to the end of the body W to be coated with the coating liquid P, as shown in fig. 3 (C), the slit-shaped discharge port 12 is closed by the pair of slit width adjusting members 13, 13 as described above, and the coating liquid P is prevented from leaking from the slit-shaped discharge port 12.
Here, in the coating apparatus of this embodiment, when the coating liquid P is applied in a circular shape to the surface of the circularly shaped object to be coated W while moving the coating nozzle 10 over the object to be coated W, the gas is supplied from the gas supply mechanism 30 at a constant pressure so that the inside of the coating liquid storage 11 is always at a predetermined pressure, and therefore, it is not necessary to adjust the pressure of the coating liquid supplied from the coating liquid supply apparatus into the coating liquid storage through the coating liquid supply pipe to adjust the liquid pressure of the coating liquid stored in the coating liquid storage in order to cope with the occurrence of piping pressure loss when the coating liquid is supplied from the coating liquid supply apparatus into the coating liquid storage through the coating liquid supply pipe as in the related art.
As a result, even when the opening width of the slit-shaped discharge port 12 is changed by moving the pair of slit- width adjustment mechanisms 13, 13 as described above, and the application width of the coating liquid P applied to the surface of the object W from the application nozzle 10 is changed, the liquid pressure is kept constant, and therefore, the amount of the coating liquid P supplied to the surface of the object W through the slit-shaped discharge port 12 is proportional to the application width, and the coating liquid P can be applied to the surface of the object W at a uniform thickness without using a complicated mechanism or control so that the thickness of the coating liquid P after application does not become uneven or the like.
Further, when the pressure of the gas supplied from the gas supply mechanism 30 into the coating liquid containing unit 11 is changed, the thickness of the coating liquid P applied to the surface of the object W can be changed, and thus, the thickness of a part of the coating liquid P can be changed while the coating liquid P is applied to the surface of the object W.
The coating apparatus of the present invention is not limited to the coating apparatus shown in the above-described embodiment, and various coating width adjusting mechanisms can be used as the coating width adjusting mechanism for changing the coating width of the coating liquid P applied from the coating nozzle 10 to the surface of the object W to be coated.
For example, as shown in fig. 5 (a) and (B), the coating width adjusting mechanism may be configured such that a coating liquid accommodating recess 41 having an elliptical shape is recessed in the outer peripheral surface of a coating liquid supply body 40 having a cylindrical shape, and as shown in fig. 4 (a) to (C), the coating liquid P can be applied in a circular shape on the surface of the object W having a circular shape.
In the coating apparatus of the embodiment using the coating liquid feeder 40, as shown in fig. 6 (a) to (D), the coating liquid feeder 40 having a columnar shape is positioned above the slit-shaped discharge port 12 and arranged along the slit-shaped discharge port 12 in the coating liquid storage section 11 of the coating nozzle 10, and the coating liquid feeder 40 arranged in this manner can be rotated by a rotating device (not shown) so that the coating liquid storage concave section 41 recessed in the outer peripheral surface of the coating liquid feeder 40 faces the slit-shaped discharge port 12.
In the coating apparatus of the embodiment using the coating liquid supplier 40, as shown in fig. 6 (a), in the coating liquid supplier 40 which is formed in a cylindrical shape, a portion of the coating liquid supplier 40 where the coating liquid accommodating concave portion 41 is not provided is positioned above the slit-shaped discharge port 12, and in a state where the slit-shaped discharge port 12 is closed by the coating liquid supplier 40, a predetermined amount of the coating liquid P is supplied into the coating liquid accommodating portion 11 of the coating nozzle 10, the coating liquid supply valve 22 provided in the coating liquid supply pipe 21 is closed, the coating liquid P is not supplied from the coating liquid supply apparatus 20 to the coating liquid accommodating portion 11, and the exhaust valve 32b provided in the exhaust side pipe 32a is closed, so that the gas in the coating liquid accommodating portion 11 is not exhausted, while the supply valve 31b provided in the supply side pipe 31a is opened, the coating nozzle 10 is guided onto the object W to be coated in a state where the gas is supplied from the gas supply mechanism 30 into the coating liquid containing unit 11 at a constant pressure.
Next, the gas is supplied from the gas supply mechanism 30 at a constant pressure so that the inside of the coating liquid storage 11 is at a predetermined pressure, and as shown in fig. 6 (B) to (D), the coating nozzle 10 is moved in a direction of applying the coating liquid P to the surface of the object W, and the coating liquid supply body 40 in a state of closing the slit-shaped discharge port 12 is rotated as described above, and the coating liquid P stored in the coating liquid storage recess 41 having an elliptical shape and recessed from the outer peripheral surface of the coating liquid supply body 40 is supplied to the surface of the object W through the slit-shaped discharge port 12 in accordance with the width of the coating liquid P overlapping the slit-shaped discharge port 12 from the portion overlapping the slit-shaped discharge port 12 where the coating liquid storage recess 41 having an elliptical shape overlaps the slit-shaped discharge port 12. In this coating apparatus, the coating liquid P is accumulated in the entire slit-shaped discharge port 12 during operation, and as shown in FIGS. 6 (B) and (C), when the coating liquid receiving recess 41 recessed in the outer peripheral surface of the coating liquid supplier 40 overlaps the slit-shaped discharge port 12 of the coating nozzle 10, the coating liquid P, which has passed through the slit-shaped discharge port 11 only from the overlapped portion and is contained in the coating liquid containing recess 14a, is supplied to the surface of the object W, and on the other hand, as shown in FIGS. 6 (A) and (D), in a state where the coating liquid receiving recess 41 recessed in the outer peripheral surface of the coating liquid supplier 40 does not overlap the slit-shaped discharge port 12 of the coating nozzle 10, the coating liquid P is not resupplied to the slit-shaped discharge port 11, and the coating liquid P is not resupplied from the slit-shaped discharge port 11 to the surface of the object W.
Here, in the coating apparatus of the present embodiment, since the coating liquid storage recess 41 having an elliptical shape with a long axial length is recessed in the outer peripheral surface of the coating liquid supply body 40 having a cylindrical shape as described above, when coating liquid P contained in a coating liquid containing concave portion 41 recessed in the outer peripheral surface of a coating liquid supply body 40 is applied in a circular shape from a slit-shaped discharge port 12 of a coating nozzle 10 to the surface of a circular object W to be coated, the moving speed of the coating nozzle 10 moving on the coated body W is set to be higher than the peripheral speed of the coating liquid supplier 40, and the coating liquid storage recess 41 which becomes elliptical and whose axial length is long passes through the slit-shaped discharge port 12, as shown in fig. 4 (a) to (C), the coating liquid P can be applied to the surface of the circular object W in a circular shape.
In the coating apparatus of the present embodiment, since the gas is supplied from the gas supply mechanism 30 at a constant pressure so that the coating liquid P is at a predetermined pressure in the coating liquid storage 11 when the coating liquid P is applied onto the surface of the circularly shaped object W in a circular shape while the coating nozzle 10 is moved over the object W, even in the case where the coating liquid P stored in the coating liquid storage 41 having an elliptical shape recessed in the outer peripheral surface of the coating liquid supplier 40 and the slit-shaped discharge port 12 of the coating nozzle 10 are supplied to the surface of the object W through the slit-shaped discharge port 12 in accordance with the width overlapping the slit-shaped discharge port 12 by passing the portion where the coating liquid storage recess 41 having an elliptical shape and the slit-shaped discharge port 12 overlap as described above, the liquid pressure is kept constant, and therefore the amount of the coating liquid P supplied to the surface of the object W through the slit-shaped discharge port 12 is proportional to the coating width, thus, the coating liquid P can be applied to the surface of the object W with a uniform thickness without using a complicated mechanism and control so that the thickness of the coating liquid P after application does not become uneven.
Description of the symbols
10: nozzle for coating
11: coating liquid storage part
12: slit-shaped discharge port
13: slit width adjusting member (coating width adjusting mechanism)
20: coating liquid supply device
21: coating liquid supply tube
22: coating liquid supply valve (control mechanism)
23: gas inlet
30: gas supply mechanism
31: exhaust pipe
31 a: supply side pipe
31 b: supply valve
32 a: exhaust side pipe
32 b: air exhaust valve
40: coating liquid supply body (coating width adjusting mechanism)
41: coating liquid receiving recess
P: coating liquid
W: an object to be coated.
Claims (5)
1. An application apparatus in which an application nozzle having a slit-shaped discharge port at a distal end portion thereof is disposed on an object to be applied, the slit-shaped discharge port discharging a coating liquid in a coating liquid containing portion, the coating liquid being supplied from a coating liquid supply device into the coating liquid containing portion inside the application nozzle, and the object to be applied and the application nozzle being moved relative to each other, whereby the coating liquid in the coating liquid containing portion is applied to a surface of the object to be applied through the slit-shaped discharge port, the application apparatus being characterized in that: a control means for controlling supply and stop of the coating liquid to the coating liquid containing section; a coating width adjusting mechanism that adjusts a coating width of the coating liquid that is applied to the surface of the object to be coated by passing the coating liquid in the coating liquid accommodating unit through the slit-shaped discharge port; and a gas supply mechanism that supplies gas into the coating liquid housing portion at a constant pressure to discharge the coating liquid stored in the coating liquid housing portion.
2. A coating apparatus as in claim 1,
when the body to be coated and the coating nozzle are moved relatively to each other to apply the coating liquid in the coating container to the surface of the body to be coated through the slit-shaped discharge port, the control means supplies the coating liquid from the coating liquid supply device into the coating liquid container of the coating nozzle, and then stops supplying the coating liquid to the coating liquid container.
3. A coating apparatus as in claim 1 or 2,
an exhaust valve is provided for exhausting gas from the coating liquid storage part when the coating liquid is supplied from the coating liquid supply device into the coating liquid storage part.
4. A coating apparatus as in claim 1 or 2,
the coating width adjusting mechanism is provided with a slit width adjusting member that adjusts the width of the coating liquid in the coating liquid storage unit that is guided to the surface of the object to be coated through the slit-shaped discharge port.
5. A coating apparatus as in claim 1 or 2,
the coating width adjusting mechanism is configured such that a cylindrical coating liquid supply body having a coating liquid accommodating recess formed in an outer peripheral surface thereof is rotatably provided so as to be positioned above the slit-shaped discharge port, the coating liquid accommodating recess is formed into a predetermined pattern shape for accommodating the coating liquid in the coating liquid accommodating portion, the coating liquid supply body is rotated above the slit-shaped discharge port, the coating liquid accommodated in the coating liquid accommodating recess is supplied to a surface of the object to be coated which moves relative to the coating nozzle through the slit-shaped discharge port, and the coating liquid is applied to the surface of the object to be coated in accordance with the shape of the coating liquid accommodating recess.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020003532A JP6808304B1 (en) | 2020-01-14 | 2020-01-14 | Coating device |
| JP2020-003532 | 2020-01-14 |
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| CN113117970A true CN113117970A (en) | 2021-07-16 |
| CN113117970B CN113117970B (en) | 2023-01-31 |
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| CN202110044860.5A Active CN113117970B (en) | 2020-01-14 | 2021-01-13 | Coating device |
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| JP (1) | JP6808304B1 (en) |
| KR (1) | KR102413491B1 (en) |
| CN (1) | CN113117970B (en) |
| TW (1) | TWI756842B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114146831A (en) * | 2020-09-07 | 2022-03-08 | 中外炉工业株式会社 | Coating device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7266957B2 (en) * | 2022-04-25 | 2023-05-01 | 中外炉工業株式会社 | Coating device and coating method |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI756842B (en) | 2022-03-01 |
| TW202126391A (en) | 2021-07-16 |
| CN113117970B (en) | 2023-01-31 |
| JP6808304B1 (en) | 2021-01-06 |
| KR20210091648A (en) | 2021-07-22 |
| KR102413491B1 (en) | 2022-06-24 |
| JP2021109156A (en) | 2021-08-02 |
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