CN113088916B - Intelligent control method for film thickness of evaporation coating film based on numerical calculation - Google Patents

Abstract

The invention discloses an intelligent control method for the film thickness of an evaporation coating film based on numerical calculation, which mainly comprises the following steps: a plurality of rows of temperature sensors are arranged at the bottom of the evaporation boat, and the temperature sensor rows are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensor array; a flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the film plating, a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the boundary of the evaporation area is composed of a fixed frame and a flexible frame of the evaporation boat, and the evaporation area of the evaporation boat is divided into a plurality of sub-areas in the width direction of the coating film by taking the temperature sensor row as a boundary line; in the evaporation coating process, a central intelligent control module arranged in the evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation boat, so that the real-time intelligent control on the film thickness distribution in the width direction of the coating film is realized.

Description

Intelligent control method for film thickness of evaporation coating film based on numerical calculation

Technical Field

The invention belongs to the technical field of vacuum coating, and particularly relates to an intelligent control method for the thickness of an evaporation coating film based on numerical calculation, which is adopted in vacuum evaporation coating.

Background

In recent years, high-speed development of optical technology, energy storage technology and flat panel display technology has put higher demands on uniformity and stability of film product performance. As one of important process technologies for film preparation, vacuum evaporation coating is widely used in industrial production of film products in the above fields. Due to the influence of the law of cosine of the evaporation source, if the interference is not performed, the distribution of the film layer deposited on the substrate in the vacuum evaporation process can be in an uneven state.

Currently, in the coating industry, a modified baffle control method is generally adopted to solve the problem. The film distribution on the corrected substrate is controlled by adjusting the posture and the shape of the corrected baffle, but the method has a certain problem. On one hand, the use of the correction baffle is at the expense of film coating efficiency and film material use efficiency; on the other hand, once the correction baffle is set, the correction baffle is relatively fixed in the film coating process, and evaporation materials can change in evaporation characteristics along with different stages of the correction baffle in the evaporation process, in this case, even if the correction baffle is used, the film thickness distribution on a product can gradually change in different stages of long-time film coating, which obviously cannot meet the use requirements of severe requirements on product performance such as optics, energy storage, panel display and the like. In addition, the reasonable arrangement of the correction baffles often requires a great deal of empirical data as support, which is not beneficial to the development of the product by the emerging film industry.

Disclosure of Invention

In order to solve the problems, the invention provides an intelligent control method for the film thickness of an evaporation coating film based on numerical calculation, which mainly comprises the following steps:

(1) A plurality of rows of temperature sensors are arranged at the bottom of the evaporation boat, and the temperature sensor rows are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensor array;

(2) A flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the film plating; a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the multiple groups of driving units form a flexible boundary driving system;

(3) The number of columns of the temperature sensor arrangement is consistent with the number of groups of the driving units, and the positions of the columns correspond to the positions of the driving units of the groups; dividing an evaporation area of the evaporation boat into a plurality of sub-areas in the width direction of the coating film by taking the temperature sensor row as a boundary line; the boundary of the evaporation area is composed of a fixed frame and a flexible frame of the evaporation boat;

(4) In the evaporation coating process, a central intelligent control module arranged in the intelligent evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat; in the intelligent flexible closed-loop regulation and control process, the film thickness accumulated value of the deposited film layer at each part of each sub-area in the width direction of the film coating is regulated on line by regulating and controlling the effective area of each sub-area of the evaporation area in real time, so that the film thickness distribution in the width direction of the film coating is intelligently controlled in real time.

The temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module.

The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; central intelligent control moduleAccording to physical parameters of the evaporating material, the effective area S of a certain subarea _i Average temperature T of the sub-region _i The corresponding relation with the film deposition rate is calculated by numerical calculation to obtain the film thickness h deposited on a certain part of the subarea in the width direction of the film _i Then h is _i And adding up to obtain the film thickness deposited on the part of the whole evaporation area, so as to simulate and obtain the film thickness dynamic distribution data in the width direction of the film.

Effective area S of a certain subarea _i The central intelligent control module is obtained by calculation based on the positions of the connection parts of the driving units and the segmented flexible frames on the boundary lines of the two sides of the segmented area; average temperature T of the divided regions _i Is calculated by the central intelligent control module based on the temperature obtained by the temperature sensor columns on the boundary lines of the two sides of the subarea.

The central intelligent control module calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame integrally generates concave or convex deformation and displacement with different degrees, and real-time regulation and control of the effective areas of each sub-region of the evaporation region are realized. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5mm.

And the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of a certain part in the width direction of the coating film and the target distribution data of the part, and gives out the dynamic position correction quantity of the segmented flexible frame corresponding to the part according to the standard deviation degree.

The film thickness distribution of the substrate in the width direction is uniform or reaches the preset target film thickness distribution through the intelligent film thickness control.

The intelligent control method of the film thickness of the evaporation coating does not adopt a means of arranging a correction baffle or a shielding plate to control the thickness of the film.

The central intelligent control module performs intelligent on-line regulation and control on the boundary of the evaporation area of the evaporation boat into closed-loop regulation and control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the coating film. When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move into the evaporation area, and controls the moving amount according to the difference degree. The above actions adjust and reduce the effective area of the evaporation area of the part, thereby reducing the film deposition rate of the part and enabling the film thickness dynamic distribution data of the part to approach the target distribution data.

When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation area of the part is adjusted and increased by the action, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part is approximate to the target distribution data. Then, continuously transmitting the temperature array signal and the position signal of each segmented flexible frame to a central intelligent control module, wherein the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the width direction of the film plating gradually approaches to the target distribution data, and finally, the preset target film thickness distribution is achieved; and the stability of the film thickness distribution state is maintained in the whole evaporation coating process.

In the latter half of the evaporation coating process, the accumulation state of the evaporation materials in different areas in the evaporation boat can be changed, so that the evaporation rate of the different areas can be changed to a certain extent compared with the first half of the evaporation coating process, for example, the film thickness distribution can not be kept stable in the whole evaporation coating process by adopting a relatively fixed correction baffle control method.

Through the above process, the film layer deposited on the substrate is made to exhibit a desired film thickness distribution, which may be a conventional distribution in which the film thickness is uniform in the width direction or a specific distribution in which the film thickness is gradually changed in the width direction. The special film thickness distribution state comprises, but is not limited to, (1) a gradual change film layer with thicker middle film layer and thinner two end film layers; (2) A gradual change film layer with thinner middle film layer and thicker film layers at two ends; (3) A gradual change film layer that gradually becomes thicker from one end to the other, and so on.

The intelligent control method of the film thickness of the evaporation coating based on numerical calculation is implemented by adopting an evaporation source with an intelligent adjustable boundary and an intelligent evaporation coating machine.

The intelligent boundary adjustable evaporation source mainly comprises an evaporation boat, a temperature sensing array and a flexible boundary driving system. The evaporation boat comprises a frame and a bottom, wherein the frame comprises a fixed frame, a flexible frame and a supporting frame; the flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat. The temperature sensor array mainly comprises a plurality of temperature sensors, wherein the temperature sensors are divided into a plurality of rows, and the plurality of temperature sensor rows are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film; each temperature sensor array comprises more than 2 temperature sensors, and the temperature sensors are arranged at the bottom of the evaporation boat in an extending mode along the running direction of the substrate, so that a temperature sensor array is formed at the bottom of the evaporation boat, and real-time temperature distribution signals of all areas of the bottom of the evaporation boat are obtained.

The evaporation source is mainly applied to coating equipment with a continuous substrate conveying mode, and a correction baffle or a shielding plate is not arranged between the evaporation source and the substrate.

In the evaporation coating process, the central intelligent control module controls the flexible boundary driving system to drive the flexible frame to generate concave or convex deformation and displacement with different degrees, so that intelligent online adjustment of the boundary of the evaporation area is realized. The flexible frame is made of high-temperature-resistant flexible materials, and has good high-temperature stability and flexibility. In one embodiment, the high temperature resistant flexible material is flexible graphite material.

The boundary of the evaporation area is composed of a flexible frame and a fixed frame; the support frame is arranged outside the evaporation area boundary and is arranged outside the flexible frame; the flexible boundary driving system comprises a plurality of groups of driving units; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame; the driving units are more than 3 groups. Each group of driving units comprises more than 1 micro servo motor and linear push rod or more than 1 micro linear motor, and when the height of the flexible frame of the evaporation boat is higher, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that the evaporation materials can be uniformly distributed in the evaporation area.

The number of the temperature sensors is more than 6, the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the driving units of the groups. The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame integrally generates concave or convex deformation and displacement of different degrees; the accuracy of the movement is 0.05-0.5mm. The junction of drive unit and flexible frame sets up the insulating layer. Contact type dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.

In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time, and transmits the temperature array signal to the central intelligent control module; the flexible boundary driving system also transmits the position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module. The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the central intelligent control module performs numerical calculation simulation according to the temperature array signals, the position signals of each segmented flexible frame and the physical property parameters of the evaporation material to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the film, and calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move towards the inside or the outside of the evaporation area, so that the flexible frame integrally generates concave or convex deformation and displacement with different degrees, and the intelligent online adjustment of the boundary of the evaporation area is realized.

The central intelligent control module performs intelligent on-line regulation and control on the boundary of the evaporation area of the evaporation boat into closed-loop regulation and control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the coating film. When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move into the evaporation area, and controls the moving amount according to the difference degree. The above actions adjust and reduce the effective area of the evaporation area of the part, thereby reducing the film deposition rate of the part and enabling the film thickness dynamic distribution data of the part to approach the target distribution data.

When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation area of the part is adjusted and increased by the action, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part is approximate to the target distribution data. And then, continuously transmitting the temperature array signal and the position signal of each segmented flexible frame to a central intelligent control module, wherein the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the width direction of the film plating gradually approaches to the target distribution data, finally, the preset target film thickness distribution is achieved, and the stability of the film thickness distribution state is maintained in the whole evaporation film plating process.

Through the above process, the film layer deposited on the substrate is made to exhibit a desired film thickness distribution, which may be a conventional distribution in which the film thickness is uniform in the width direction or a specific distribution in which the film thickness is gradually changed in the width direction.

The intelligent evaporation coating machine mainly comprises a coating chamber, an evaporation source, a central intelligent control module and a vacuum system. In the evaporation coating process, the central intelligent control module can control the flexible boundary driving system to carry out closed-loop on-line regulation and control on the displacement and deformation of the flexible frame of the evaporation boat, and the boundary of the evaporation area is intelligently controlled in real time, so that a film layer deposited on the substrate presents a required film thickness distribution state, and the film thickness distribution state is kept stable in the whole evaporation coating process.

The substrate in the intelligent evaporation coating machine is in a continuous conveying mode, and a correction baffle or a shielding plate is not arranged between the evaporation source and the substrate.

In one embodiment, the intelligent evaporation coating machine is a roll-to-roll coating device, and the substrate is a flexible base film. The intelligent evaporation coating machine can also be linear multi-chamber continuous vacuum coating equipment, and the substrate can be glass, organic glass, a metal sheet, acrylic or other forms which are conveyed through a straight line.

The number of the temperature sensors is more than 6, the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the driving units of the groups.

The intelligent evaporation coating machine can be used for implementing an intelligent evaporation coating method, and comprises the following steps:

(1) Starting a vacuum system of the intelligent evaporation coating machine to vacuumize the coating chamber;

(2) When the vacuum degree of the film plating chamber meets the process requirement, starting the evaporation source and the central intelligent control module; the central intelligent control module performs intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation source;

(3) When the deposited film layer presents a required film thickness distribution state in the width direction of the film, starting a substrate conveying system to enable the substrate to continuously run above an evaporation area, and forming a film layer conforming to the expected film thickness distribution on the substrate through an evaporation film coating process; the stability of the film thickness distribution state is maintained throughout the evaporation coating process.

The boundary of the evaporation area is composed of a flexible frame and a fixed frame; the flexible boundary driving system comprises a plurality of groups of driving units which are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame.

In the evaporation coating process of the step (3), the thickness of the film layer is controlled without adopting a means of arranging a correction baffle or a shielding plate.

In the evaporation coating process of the step (3), the central intelligent control module always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation source. The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the real-time intelligent flexible closed-loop regulation and control process comprises the following steps: the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module.

The central intelligent control module performs numerical calculation simulation according to the obtained temperature array signals, the position signals of each segmented flexible frame and the physical property parameters of the evaporating materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the film, and calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame integrally generates concave or convex deformation and displacement of different degrees. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5mm.

And the central intelligent control module analyzes the standard deviation of the film thickness dynamic distribution data of each part in the width direction of the coating film and the target distribution data of the corresponding part, and gives the dynamic position correction quantity of the flexible frame section corresponding to the part according to the standard deviation degree of a certain area.

The intelligent evaporation coating machine is roll-to-roll coating equipment, and the substrate is a flexible base film; the step (1) further comprises the step of placing the flexible base film on an unreeling roller of the intelligent evaporation coating machine.

The central intelligent control module performs intelligent on-line regulation and control on the boundary of the evaporation area of the evaporation boat into closed-loop regulation and control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the coating film. When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move into the evaporation area, and controls the moving amount according to the difference degree. The above actions adjust and reduce the effective area of the evaporation area of the part, thereby reducing the film deposition rate of the part and enabling the film thickness dynamic distribution data of the part to approach the target distribution data.

When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation area of the part is adjusted and increased by the action, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part is approximate to the target distribution data. And then, continuously transmitting the temperature array signals and the position signals of the segmented flexible frames to a central intelligent control module, and continuously regulating and controlling the evaporation area of the evaporation boat by the central intelligent control module according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the width direction of the film plating gradually approaches to the target distribution data, and finally, the preset target film thickness distribution is achieved.

Through the above process, the film layer deposited on the substrate is made to exhibit a desired film thickness distribution, which may be a conventional distribution in which the film thickness is uniform in the width direction or a specific distribution in which the film thickness is gradually changed in the width direction.

The invention has the beneficial effects that:

(1) The intelligent control method of the film thickness of the evaporation coating based on numerical calculation adopts a brand new idea of source type regulation and control, does not adopt a means of setting a correction baffle or a shielding plate based on a large amount of empirical data, but carries out closed-loop intelligent real-time regulation and control on the film thickness distribution in the width direction of the coating based on a coating principle and numerical calculation simulation, so that research personnel can break away from the constraint of long-term coating experience and massive empirical data groping, quickly develop and produce film products with various film thickness distribution characteristics of various film materials, and greatly shorten the research and development period of new products; on the other hand, the device does not need to be opened to reset and adjust the correction baffle plate and the like, and the evaporation material can be deposited on the substrate without shielding, so that the device efficiency and the production efficiency are improved, and a large amount of evaporation material and energy consumed during evaporation are saved.

(2) By adopting the intelligent control method for the film thickness of the evaporation coating, the film thickness distribution can be intelligently and in real time regulated in a closed loop manner in the process of evaporation coating, so that the film thickness distribution in the width direction of the coating can quickly reach a preset target and can be kept stable in the whole coating production period. The equipment and the coating method can realize that the film thickness distribution of the substrate in the width direction is uniform in the whole coating production process, and can ensure that the coated product accords with a certain special distribution state of gradual change of the film thickness in the width direction, thereby realizing the flexible and changeable special coated product which cannot be achieved by the conventional evaporation coating machine.

(3) The intelligent vacuum coating equipment realizes high intellectualization and automation, can efficiently produce various designed film products through the mutual coordination of the evaporation source with the intelligent adjustable boundary and the central intelligent control module, discards complicated debugging and setting links of conventional evaporation coating equipment, and lays a foundation for realizing the intelligent vacuum coating factory with high automation.

Drawings

Fig. 1 is a schematic top view of an embodiment of a boundary-intelligent adjustable evaporation source according to the present invention.

Fig. 2 is a schematic diagram of an embodiment of the intelligent evaporation coating machine according to the present invention.

Fig. 3 is a schematic top view of another embodiment of the boundary-intelligent adjustable evaporation source according to the present invention.

Detailed Description

Embodiments of the present invention are further described below with reference to the accompanying drawings. It should be understood that the detailed description is intended to illustrate and explain the invention, and not to limit the invention.

Fig. 1 is a schematic plan view of an embodiment of a boundary-intelligent adjustable evaporation source according to the present invention. As shown in fig. 1, the evaporation source mainly includes an evaporation boat 1, a temperature sensing array, and a flexible boundary driving system. The evaporation boat 1 comprises a frame and a bottom, wherein the frame comprises a fixed frame 3, a flexible frame 4 and a supporting frame 5; the flexible frame 4 is arranged on one side of the evaporation boat parallel to the width direction of the film plating, and the fixed frame is arranged on the other three sides of the evaporation boat. The temperature sensor array mainly comprises a plurality of temperature sensors 6, the temperature sensors are divided into a plurality of rows, and the plurality of temperature sensor rows 7 are arranged at the bottom of the evaporation boat 1 in parallel in the width direction of the coating film; each temperature sensor array comprises more than 2 temperature sensors, and the temperature sensors are arranged at the bottom of the evaporation boat in an extending mode along the running direction of the substrate, so that a temperature sensor array is formed at the bottom of the evaporation boat 1, and real-time temperature distribution signals of all areas at the bottom of the evaporation boat are obtained.

The evaporation source is mainly applied to coating equipment with a continuous substrate conveying mode, and a correction baffle or a shielding plate is not arranged between the evaporation source and the substrate.

In the evaporation coating process, the central intelligent control module 2 controls the flexible boundary driving system to drive the flexible frame 4 to generate concave or convex deformation and displacement with different degrees, so that intelligent online adjustment of the boundary of the evaporation area is realized. In the case shown in fig. 1, the flexible frame is driven by the flexible boundary driving system to generate concave deformation displacement, and in the case shown in fig. 3, the flexible frame is driven by the flexible boundary driving system to generate convex deformation displacement. The flexible frame 4 is made of high-temperature-resistant flexible materials, and has good high-temperature stability and flexibility. In one embodiment, the high temperature resistant flexible material is flexible graphite material.

The boundary of the evaporation area is composed of a flexible frame and a fixed frame, and the flexible frame and the fixed frame enclose an evaporation area 8 of the evaporation boat; the support frame 5 is arranged outside the evaporation area boundary and outside the flexible frame 4; the flexible boundary drive system comprises a plurality of sets of drive units 9; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame 5 of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame 4; the drive units 9 are more than 3 groups. Each group of driving units comprises more than 1 micro servo motor and linear push rod or more than 1 micro linear motor, and when the height of the flexible frame of the evaporation boat is higher, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that the evaporation materials can be uniformly distributed in the evaporation area 8.

The number of the temperature sensors 6 is more than 6, the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the groups of the driving units. The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame integrally generates concave or convex deformation and displacement of different degrees; the accuracy of the movement is 0.05-0.5mm. The junction of drive unit and flexible frame sets up the insulating layer. Contact type dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.

In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time, and transmits the temperature array signal to the central intelligent control module; the flexible boundary driving system also transmits the position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module. The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the central intelligent control module performs numerical calculation simulation according to the temperature array signals, the position signals of each segmented flexible frame and the physical property parameters of the evaporation material to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the film, and calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move towards the inside or the outside of the evaporation area, so that the flexible frame integrally generates concave or convex deformation and displacement with different degrees, and the intelligent online adjustment of the boundary of the evaporation area is realized.

The central intelligent control module performs intelligent on-line regulation and control on the boundary of the evaporation area of the evaporation boat into closed-loop regulation and control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the coating film. When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move into the evaporation area, and controls the moving amount according to the difference degree. The above actions adjust and reduce the effective area of the evaporation area of the part, thereby reducing the film deposition rate of the part and enabling the film thickness dynamic distribution data of the part to approach the target distribution data.

When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation area of the part is adjusted and increased by the action, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part is approximate to the target distribution data. And then, continuously transmitting the temperature array signal and the position signal of each segmented flexible frame to a central intelligent control module, wherein the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the width direction of the film plating gradually approaches to the target distribution data, finally, the preset target film thickness distribution is achieved, and the stability of the film thickness distribution state is maintained in the whole evaporation film plating process.

Through the above process, the film layer deposited on the substrate is made to exhibit a desired film thickness distribution, which may be a conventional distribution in which the film thickness is uniform in the width direction or a specific distribution in which the film thickness is gradually changed in the width direction. The special film thickness distribution state comprises, but is not limited to, (1) a gradual change film layer with thicker middle film layer and thinner two end film layers; (2) A gradual change film layer with thinner middle film layer and thicker film layers at two ends; (3) A gradual change film layer that gradually becomes thicker from one end to the other, and so on.

Fig. 2 is a schematic diagram of an embodiment of the intelligent evaporation coating machine according to the present invention. As shown in fig. 2, the intelligent evaporation coating machine mainly comprises a coating chamber 10, an evaporation source 11, a central intelligent control module 2 and a vacuum system 12. In the evaporation coating process, the central intelligent control module can control the flexible boundary driving system to carry out closed-loop on-line regulation and control on the displacement and deformation of the flexible frame of the evaporation boat, and the boundary of the evaporation area is intelligently controlled in real time, so that a film layer deposited on the substrate presents a required film thickness distribution state, and the film thickness distribution state is kept stable in the whole evaporation coating process.

The substrate in the intelligent evaporation coating machine is in a continuous conveying mode, and a correction baffle or a shielding plate is not arranged between the evaporation source and the substrate.

In the embodiment of the intelligent evaporation coating machine shown in fig. 2, the intelligent evaporation coating machine is a roll-to-roll coating device, and the substrate is a flexible base film. The intelligent evaporation coating machine can also be linear multi-chamber continuous vacuum coating equipment, and the substrate can be glass, organic glass, a metal sheet, acrylic or other forms which are conveyed through a straight line.

The boundary of the evaporation area is composed of a flexible frame and a fixed frame; the frame of the evaporation boat further comprises a supporting frame, wherein the supporting frame is positioned outside the boundary of the evaporation area and is arranged at the outer side of the flexible frame; the flexible boundary driving system comprises a plurality of groups of driving units; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame; the driving units are more than 3 groups. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that the evaporation materials can be uniformly distributed in the evaporation area.

The number of the temperature sensors is more than 6, the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the driving units of the groups.

The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame integrally generates concave or convex deformation and displacement of different degrees; the accuracy of the movement is 0.05-0.5mm. The junction of drive unit and flexible frame sets up the insulating layer. Contact type dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.

In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time, and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module.

The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the central intelligent control module performs numerical calculation simulation according to the obtained temperature array signals, the position signals of each segmented flexible frame and the physical property parameters of the evaporating materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the film, and calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame integrally generates concave or convex deformation and displacement with different degrees, and intelligent online adjustment of the boundary of the evaporation area is realized.

Each group of driving units comprises more than 1 micro servo motor and a linear push rod or more than 1 micro linear motor. When the height of the flexible frame of the evaporation boat is higher, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction.

The invention relates to an intelligent control method for the film thickness of an evaporation coating film based on numerical calculation, which mainly comprises the following steps:

(1) A plurality of rows of temperature sensors are arranged at the bottom of the evaporation boat, and the temperature sensor rows are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensor array;

(2) A flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the film plating; a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the multiple groups of driving units form a flexible boundary driving system;

(3) The number of columns of the temperature sensor arrangement is consistent with the number of groups of the driving units, and the positions of the columns correspond to the positions of the driving units of the groups; dividing an evaporation area of the evaporation boat into a plurality of sub-areas in the width direction of the coating film by taking the temperature sensor row as a boundary line; the boundary of the evaporation area is composed of a fixed frame and a flexible frame of the evaporation boat;

(4) In the evaporation coating process, a central intelligent control module arranged in the evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat; in the intelligent flexible closed-loop regulation and control process, the film thickness accumulated value of the deposited film layer at each part of each sub-area in the width direction of the film coating is regulated on line by regulating and controlling the effective area of each sub-area of the evaporation area in real time, so that the film thickness distribution in the width direction of the film coating is intelligently controlled in real time.

The temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module.

The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the central intelligent control module is used for controlling the effective area S of a certain sub-area according to the physical property parameters of the evaporating material _i Average temperature T of the sub-region _i The corresponding relation with the film deposition rate is calculated by numerical calculation to obtain the film thickness h deposited on a certain part of the subarea in the width direction of the film _i Then h is _i Adding up to obtain the film thickness deposited on the whole evaporation area at the position, thereby obtaining the film thickness deposited on the part through simulationFilm thickness dynamic distribution data in the width direction of the film coating.

Effective area S of a certain subarea _i The central intelligent control module is obtained by calculation based on the positions of the connection parts of the driving units and the segmented flexible frames on the boundary lines of the two sides of the segmented area; average temperature T of the divided regions _i Is calculated by the central intelligent control module based on the temperature obtained by the temperature sensor columns on the boundary lines of the two sides of the subarea.

The central intelligent control module calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame integrally generates concave or convex deformation and displacement with different degrees, and real-time regulation and control of the effective areas of each sub-region of the evaporation region are realized. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5mm.

And the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of a certain part in the width direction of the coating film and the target distribution data of the part, and gives out the dynamic position correction quantity of the segmented flexible frame corresponding to the part according to the standard deviation degree.

The film thickness distribution of the substrate in the width direction is uniform or reaches the preset target film thickness distribution through the intelligent film thickness control.

The intelligent control method of the film thickness of the evaporation coating does not adopt a means of arranging a correction baffle or a shielding plate to control the thickness of the film.

The central intelligent control module performs intelligent on-line regulation and control on the boundary of the evaporation area of the evaporation boat into closed-loop regulation and control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the coating film. When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move into the evaporation area, and controls the moving amount according to the difference degree. The above actions adjust and reduce the effective area of the evaporation area of the part, thereby reducing the film deposition rate of the part and enabling the film thickness dynamic distribution data of the part to approach the target distribution data.

When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation area of the part is adjusted and increased by the action, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part is approximate to the target distribution data. Then, continuously transmitting the temperature array signal and the position signal of each segmented flexible frame to a central intelligent control module, wherein the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the width direction of the film plating gradually approaches to the target distribution data, and finally, the preset target film thickness distribution is achieved; and the stability of the film thickness distribution state is maintained in the whole evaporation coating process.

Through the above process, the film layer deposited on the substrate is made to exhibit a desired film thickness distribution, which may be a conventional distribution in which the film thickness is uniform in the width direction or a specific distribution in which the film thickness is gradually changed in the width direction. The special film thickness distribution state comprises, but is not limited to, (1) a gradual change film layer with thicker middle film layer and thinner two end film layers; (2) A gradual change film layer with thinner middle film layer and thicker film layers at two ends; (3) A gradual change film layer that gradually becomes thicker from one end to the other, and so on.

The invention relates to an intelligent evaporation coating method, which comprises the following steps:

(1) Starting a vacuum system of the intelligent evaporation coating machine to vacuumize the coating chamber;

(2) When the vacuum degree of the film plating chamber meets the process requirement, starting the evaporation source and the central intelligent control module; the central intelligent control module performs intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation source;

(3) When the deposited film layer presents a required film thickness distribution state in the width direction of the film, starting a substrate conveying system to enable the substrate to continuously run above an evaporation area, and forming a film layer conforming to the expected film thickness distribution on the substrate through an evaporation film coating process; the stability of the film thickness distribution state is maintained throughout the evaporation coating process.

The evaporation source comprises an evaporation boat, a temperature sensing array and a flexible boundary driving system; the evaporation boat comprises a bottom, a fixed frame and a flexible frame; the flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the coating film, and the rest three sides of the evaporation boat are provided with fixed frames; the temperature sensing array mainly comprises a plurality of rows of temperature sensors arranged at the bottom of the evaporation boat; the boundary of the evaporation area is composed of a flexible frame and a fixed frame; the flexible boundary driving system comprises a plurality of groups of driving units which are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the driving units are more than 3 groups. The number of columns of the temperature sensor arrangement is consistent with the number of groups of the driving units, and the positions of the columns correspond to the positions of the driving units of the groups.

In the evaporation coating process of the step (3), the thickness of the film layer is controlled without adopting a means of arranging a correction baffle or a shielding plate.

In the evaporation coating process of the step (3), the central intelligent control module always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation source. The central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the real-time intelligent flexible closed-loop regulation and control process comprises the following steps: the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module.

The central intelligent control module performs numerical calculation simulation according to the obtained temperature array signals, the position signals of each segmented flexible frame and the physical property parameters of the evaporating materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the film, and calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame integrally generates concave or convex deformation and displacement of different degrees. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5mm.

And the central intelligent control module analyzes the standard deviation of the film thickness dynamic distribution data of each part in the width direction of the coating film and the target distribution data of the corresponding part, and gives the dynamic position correction quantity of the flexible frame section corresponding to the part according to the standard deviation degree of a certain area.

The intelligent evaporation coating machine is roll-to-roll coating equipment, and the substrate is a flexible base film; the step (1) further comprises the step of placing the flexible base film on an unreeling roller of the intelligent evaporation coating machine.

The central intelligent control module performs intelligent on-line regulation and control on the boundary of the evaporation area of the evaporation boat into closed-loop regulation and control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain film thickness dynamic distribution data of a deposited film layer in the width direction of the coating film. When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move into the evaporation area, and controls the moving amount according to the difference degree. The above actions adjust and reduce the effective area of the evaporation area of the part, thereby reducing the film deposition rate of the part and enabling the film thickness dynamic distribution data of the part to approach the target distribution data.

When the film thickness dynamic distribution data of a certain part in the width direction of the film coating is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation area of the part is adjusted and increased by the action, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part is approximate to the target distribution data. And then, continuously transmitting the temperature array signals and the position signals of the segmented flexible frames to a central intelligent control module, and continuously regulating and controlling the evaporation area of the evaporation boat by the central intelligent control module according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the width direction of the film plating gradually approaches to the target distribution data, and finally, the preset target film thickness distribution is achieved.

Through the above process, the film layer deposited on the substrate is made to exhibit a desired film thickness distribution, which may be a conventional distribution in which the film thickness is uniform in the width direction or a specific distribution in which the film thickness is gradually changed in the width direction.

Claims (2)

1. An intelligent control method for the film thickness of an evaporation coating film based on numerical calculation mainly comprises the following steps:

(1) A plurality of rows of temperature sensors are arranged at the bottom of the evaporation boat, and the temperature sensor rows are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensor array;

(2) A flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the film plating; a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the multiple groups of driving units form a flexible boundary driving system;

(3) The number of columns of the temperature sensor arrangement is consistent with the number of groups of the driving units, and the positions of the columns correspond to the positions of the driving units of the groups; dividing an evaporation area of the evaporation boat into a plurality of sub-areas in the width direction of the coating film by taking the temperature sensor row as a boundary line; the boundary of the evaporation area is composed of a fixed frame and a flexible frame of the evaporation boat; the fixed frame is provided with a vibration material homogenizing mechanism, so that the evaporating materials are uniformly distributed in the evaporating area;

(4) In the evaporation coating process, a central intelligent control module arranged in the evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat; in the intelligent flexible closed-loop regulation and control process, the film thickness accumulated value of the deposited film layer at each part of each sub-area in the width direction of the film coating is regulated on line by regulating and controlling the effective area of each sub-area of the evaporation area in real time, so that the film thickness distribution in the width direction of the film coating is intelligently controlled in real time; the film thickness distribution of the substrate in the width direction is uniform or the preset target film thickness distribution of gradually changing film thickness in the width direction is achieved through intelligent film thickness control, and the film thickness distribution is kept stable in the whole evaporation film coating process;

The temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connection parts of the segmented flexible frames and the driving units to the central intelligent control module; the central intelligent control module is preset with target distribution data of film thickness and an evaporation material database; the central intelligent control module is used for controlling the effective area S of a certain sub-area according to the physical property parameters of the evaporating material _i Average temperature T of the sub-region _i The corresponding relation with the film deposition rate is calculated by numerical calculation to obtain the film thickness h deposited on a certain part of the subarea in the width direction of the film _i Then h is _i Adding up to obtain the film thickness deposited on the part of the whole evaporation area, so as to simulate and obtain the dynamic film thickness distribution data in the width direction of the film coating; the central intelligent control module calculates the dynamic position correction quantity of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; then the central intelligent control module sends a driving instruction based on the dynamic position correction amount to the flexible boundary driving system to control each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frames generate concave or convex deformation and displacement with different degrees on the whole, and real-time regulation and control of the effective areas of each sub-region of the evaporation region are realized;

The intelligent control method of the film thickness of the evaporation coating does not adopt a means of arranging a correction baffle or a shielding plate between the evaporation source and the substrate to control the thickness of the film;

the central intelligent control module analyzes standard deviation of film thickness dynamic distribution data of a certain part in the width direction of the coating film and target distribution data of the part, and gives dynamic position correction quantity of a segmented flexible frame corresponding to the part according to standard deviation degree;

effective area S of a certain subarea _i The central intelligent control module is obtained by calculation based on the positions of the connection parts of the driving units and the segmented flexible frames on the boundary lines of the two sides of the segmented area; average temperature T of the divided regions _i Is calculated by the central intelligent control module based on the temperature obtained by the temperature sensor columns on the boundary lines of the two sides of the subarea.

2. The intelligent control method for the film thickness of the evaporation coating based on numerical calculation according to claim 1, wherein the method comprises the following steps: the accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5mm.

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