CN215668180U - Intelligent evaporation source - Google Patents
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- CN215668180U CN215668180U CN202120959212.8U CN202120959212U CN215668180U CN 215668180 U CN215668180 U CN 215668180U CN 202120959212 U CN202120959212 U CN 202120959212U CN 215668180 U CN215668180 U CN 215668180U
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- 238000001704 evaporation Methods 0.000 title claims abstract description 132
- 230000008020 evaporation Effects 0.000 title claims abstract description 132
- 238000000576 coating method Methods 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 29
- 239000011248 coating agent Substances 0.000 claims abstract description 26
- 238000006073 displacement reaction Methods 0.000 claims abstract description 11
- 238000009826 distribution Methods 0.000 claims description 59
- 238000009413 insulation Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 78
- 238000012937 correction Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000007888 film coating Substances 0.000 description 8
- 238000009501 film coating Methods 0.000 description 8
- 238000013459 approach Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004146 energy storage Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
The utility model discloses an intelligent evaporation source which mainly comprises an evaporation boat, a temperature sensing array, a flexible boundary driving system and a central intelligent control module; the evaporation boat comprises a frame and a bottom, wherein the frame comprises a fixed frame, a flexible frame and a supporting frame; the flexible frame is arranged on one side of the evaporation boat parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat; the fixed frame is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in an evaporation area; the temperature sensing array mainly comprises a plurality of temperature sensors, the temperature sensors are divided into a plurality of rows, and the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film; in the evaporation coating process, the central intelligent control module controls the flexible boundary driving system to drive the flexible frame to generate concave or convex deformation and displacement with different degrees, so that the intelligent online adjustment of the evaporation area boundary is realized.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating, and particularly relates to an intelligent evaporation source used in vacuum evaporation coating.
Background
In recent years, the rapid development of optical technology, energy storage technology, and flat panel display technology has made higher demands on the uniformity and stability of the properties of thin film products. As one of the important process technologies for thin film preparation, vacuum evaporation coating is widely used in the industrial production of thin film products in the above fields. Due to the influence of the law of cosine of the evaporation source, if the interference is not carried out, the distribution of the film layer deposited on the substrate in the vacuum evaporation process can be in an uneven state.
The vacuum evaporation coating machine applied in the coating industry at present generally adopts a correction baffle plate to solve the problem, and the film distribution on a correction substrate is controlled by adjusting the posture and the shape of the correction baffle plate, but the method has certain problems. On one hand, the use of the correction baffle plate is at the cost of sacrificing the film coating efficiency and the film material use efficiency; on the other hand, once the correction baffle is set, the correction baffle is relatively fixed in the coating process, and the evaporation property of the evaporation material is changed along with different stages of the evaporation process, so that even if the correction baffle is used, the film thickness distribution on the product is gradually changed in different stages of long-time coating, which obviously cannot meet the use requirements of optics, energy storage, flat panel display and the like which have strict requirements on the product performance. In addition, a large amount of experience data is often needed to support the rear of the reasonably arranged correction baffle, which is not beneficial to developing and developing the original products efficiently and quickly by emerging film industries.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, the present invention provides an intelligent evaporation source, which mainly comprises an evaporation boat, a temperature sensing array, a flexible boundary driving system and a central intelligent control module. The evaporation boat comprises a frame and a bottom, wherein the frame comprises a fixed frame, a flexible frame and a supporting frame; the flexible frame is arranged on one side of the evaporation boat parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat; the fixed frame is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in the evaporation area. The temperature sensing array mainly comprises a plurality of temperature sensors, the temperature sensors are divided into a plurality of lines, and the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film. Each temperature sensor array comprises more than 2 temperature sensors and is arranged at the bottom of the evaporation boat in an extending mode along the substrate traveling direction, so that a temperature sensing array is formed at the bottom of the evaporation boat, and real-time temperature distribution signals of all areas at the bottom of the evaporation boat are obtained. In the evaporation coating process, the central intelligent control module controls the flexible boundary driving system to drive the flexible frame to generate concave or convex deformation and displacement with different degrees, so that the intelligent online adjustment of the evaporation area boundary is realized. Contact dynamic seals are arranged between the flexible frame and the fixed frame and between the flexible frame and the bottom.
The flexible frame is made of high-temperature-resistant flexible materials and has good high-temperature stability and flexibility. In one embodiment, the flexible material resistant to high temperature is a flexible graphite-based material.
The boundary of the evaporation area consists of a flexible frame and a fixed frame; the supporting frame is positioned outside the boundary of the evaporation area and arranged on the outer side of the flexible frame; the flexible boundary driving system comprises a plurality of groups of driving units; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame; the number of the driving units is more than 3. Each group of driving units comprises more than 1 micro servo motor and linear push rod or more than 1 micro linear motor, and when the flexible frame of the evaporation boat is high, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction.
The number of the temperature sensors is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units. The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame can generate concave or convex deformation and displacement with different degrees on the whole; the precision of the movement is 0.05-0.5 mm. The connection part of the driving unit and the flexible frame is provided with a heat insulation layer.
In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; the flexible boundary driving system transmits the position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module. Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module performs numerical calculation simulation according to the temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction amount of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move towards the inside or the outside of the evaporation area, so that the flexible frame generates concave or convex deformation and displacement with different degrees on the whole, and intelligent online adjustment of the boundary of the evaporation area is realized.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to a central intelligent control module, the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, the preset target film thickness distribution is finally achieved, and the stability of the film thickness distribution state is kept in the whole evaporation film coating process.
In the latter half of the evaporation coating process, the accumulation state of the evaporation materials in different areas in the evaporation boat is changed, so that the evaporation rate of different areas is changed to a certain extent compared with the former half of the evaporation coating process, if a fixed correction baffle control method is adopted, the film thickness distribution can not be kept stable in the whole evaporation coating process, but the utility model solves the problem by carrying out closed-loop online regulation and control on the evaporation area and the film thickness dynamic distribution data, and keeps the film thickness distribution state stable in the whole evaporation coating process.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction. The special distribution state of the film thickness includes but is not limited to (1) a gradient film layer with a thicker middle film layer and thinner two end film layers; (2) the middle film layer is thinner, and the two end film layers are thicker; (3) a graded film layer that becomes thicker gradually from one end to the other, and so on.
The evaporation source is mainly applied to coating equipment with a substrate in a continuous transfer mode, and a correction baffle plate or a shielding plate is not arranged between the evaporation source and the substrate.
The utility model has the beneficial effects that:
(1) the intelligent evaporation source adopts a completely new idea of originating regulation and control, does not adopt a means of setting a correction baffle plate or a shielding plate based on a large amount of empirical data, and carries out closed-loop intelligent real-time regulation and control on the film thickness distribution in the film coating width direction based on the film coating principle and numerical calculation simulation, so that research and development personnel can be free from the constraint of long-term film coating experience and a large amount of empirical data, film products with various film thickness distribution characteristics of various film layer materials are quickly researched and produced, and the research and development period of new products is greatly shortened; on the other hand, the equipment does not need to be opened to reset and adjust the correction baffle plate and the like, and the evaporation material can be deposited on the substrate without being shielded, so that the equipment efficiency and the production efficiency are improved, and a large amount of evaporation material and energy consumed during evaporation are saved.
(2) The intelligent evaporation source can intelligently regulate and control the film thickness distribution in a closed loop in real time in the process of evaporation coating, so that the film thickness distribution in the coating width direction quickly reaches the preset target and is stable in the whole coating production period.
Drawings
Fig. 1 is a schematic top view of an intelligent evaporation source according to an embodiment of the present invention.
Fig. 2 is a schematic top view of another embodiment of the intelligent evaporation source of the present invention.
Detailed Description
The following further describes the embodiments of the present invention with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are intended for purposes of illustration and explanation only and are not intended to limit the scope of the utility model.
Fig. 1 is a schematic top view of an intelligent evaporation source according to an embodiment of the present invention. As shown in fig. 1, the intelligent evaporation source of the present invention mainly includes an evaporation boat 1, a temperature sensing array, a flexible boundary driving system, and a central intelligent control module 2. The evaporation boat 1 comprises a frame and a bottom, wherein the frame comprises a fixed frame 3, a flexible frame 4 and a supporting frame 5; the flexible frame 4 is arranged on one side of the evaporation boat parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat. The temperature sensing array mainly comprises a plurality of temperature sensors 6, the temperature sensors are divided into a plurality of rows, and a plurality of temperature sensor rows 7 are arranged at the bottom of the evaporation boat 1 in parallel in the width direction of the coating film; each temperature sensor array comprises more than 2 temperature sensors and is arranged at the bottom of the evaporation boat in an extending mode along the substrate running direction, so that a temperature sensing array is formed at the bottom of the evaporation boat 1, and real-time temperature distribution signals of all areas at the bottom of the evaporation boat are obtained. The fixed frame is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in the evaporation area.
The evaporation source is mainly applied to coating equipment with a substrate in a continuous transfer mode, and a correction baffle plate or a shielding plate is not arranged between the evaporation source and the substrate.
In the evaporation coating process, the central intelligent control module 2 controls the flexible boundary driving system to drive the flexible frame 4 to generate concave or convex deformation and displacement with different degrees, so that the intelligent online adjustment of the evaporation area boundary is realized. In the case shown in fig. 1, the flexible frame 4 is driven by the flexible boundary driving system to generate a concave deformation displacement, and in the case shown in fig. 2, the flexible frame 4 is driven by the flexible boundary driving system to generate a convex deformation displacement. The flexible frame 4 is made of high-temperature-resistant flexible materials and has good high-temperature stability and flexibility. In one embodiment, the flexible material resistant to high temperature is a flexible graphite-based material.
The boundary of the evaporation area is composed of a flexible frame and a fixed frame, and the flexible frame 4 and the fixed frame 3 enclose an evaporation area 8 of the evaporation boat; the supporting frame 5 is positioned outside the boundary of the evaporation area and is arranged outside the flexible frame 4; the flexible boundary drive system comprises a plurality of groups of drive units 9; a plurality of groups of driving units are transversely and uniformly distributed on a supporting frame 5 of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame 4; the number of the driving units 9 is 3 or more. Each group of driving units comprises more than 1 micro servo motor and linear push rod or more than 1 micro linear motor, and when the flexible frame of the evaporation boat is high, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in the evaporation area 8.
The number of the temperature sensors 6 is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units. The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame can generate concave or convex deformation and displacement with different degrees on the whole; the precision of the movement is 0.05-0.5 mm. The connection part of the driving unit and the flexible frame is provided with a heat insulation layer. Contact dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.
In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; the flexible boundary driving system transmits the position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module. Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module performs numerical calculation simulation according to the temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction amount of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move towards the inside or the outside of the evaporation area, so that the flexible frame generates concave or convex deformation and displacement with different degrees on the whole, and intelligent online adjustment of the boundary of the evaporation area is realized.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to a central intelligent control module, the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, the preset target film thickness distribution is finally achieved, and the stability of the film thickness distribution state is kept in the whole evaporation film coating process.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction. The special distribution state of the film thickness includes but is not limited to (1) a gradient film layer with a thicker middle film layer and thinner two end film layers; (2) the middle film layer is thinner, and the two end film layers are thicker; (3) a graded film layer that becomes thicker gradually from one end to the other, and so on.
Claims (7)
1. An intelligence evaporation source which characterized in that: the system mainly comprises an evaporation boat, a temperature sensing array, a flexible boundary driving system and a central intelligent control module; the evaporation boat comprises a frame and a bottom, wherein the frame comprises a fixed frame, a flexible frame and a supporting frame; the flexible frame is arranged on one side of the evaporation boat parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat; the fixed frame is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in an evaporation area; the temperature sensing array mainly comprises a plurality of temperature sensors, the temperature sensors are divided into a plurality of rows, and the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film; in the evaporation coating process, the central intelligent control module controls the flexible boundary driving system to drive the flexible frame to generate concave or convex deformation and displacement, so that the intelligent online adjustment of the boundary of the evaporation area is realized; contact dynamic seals are arranged between the flexible frame and the fixed frame and between the flexible frame and the bottom.
2. The intelligent evaporation source of claim 1, wherein: the boundary of the evaporation area consists of a flexible frame and a fixed frame; the supporting frame is positioned outside the boundary of the evaporation area and arranged on the outer side of the flexible frame; the flexible boundary driving system comprises a plurality of groups of driving units; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame; the number of the driving units is more than 3.
3. The intelligent evaporation source of claim 2, wherein: each group of driving units comprises more than 1 micro servo motor and a linear push rod or more than 1 micro linear motor.
4. The intelligent evaporation source of claim 2, wherein: the number of the temperature sensors is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units.
5. The intelligent evaporation source of claim 2, wherein: the part of the flexible frame connected with the driving unit can move under the driving of the driving unit, so that the flexible frame generates concave or convex deformation and displacement with different degrees on the whole.
6. The intelligent evaporation source of claim 1, wherein: the central intelligent control module is internally preset with target distribution data of film thickness and an evaporation material database.
7. The intelligent evaporation source of claim 2, wherein: the connection part of the driving unit and the flexible frame is provided with a heat insulation layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120959212.8U CN215668180U (en) | 2021-05-07 | 2021-05-07 | Intelligent evaporation source |
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|---|---|---|---|
| CN202120959212.8U CN215668180U (en) | 2021-05-07 | 2021-05-07 | Intelligent evaporation source |
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| CN215668180U true CN215668180U (en) | 2022-01-28 |
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| CN202120959212.8U Active CN215668180U (en) | 2021-05-07 | 2021-05-07 | Intelligent evaporation source |
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2021
- 2021-05-07 CN CN202120959212.8U patent/CN215668180U/en active Active
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Address after: No. C5-1, No. 158 Puhe Road, Shenbei New District, Shenyang City, Liaoning Province, 110142 Patentee after: Bosuye Technology (Shenyang) Co.,Ltd. Address before: 110142 No. 37-1, Kaifa 23rd Road, Shenyang Economic and Technological Development Zone, Liaoning Province Patentee before: Bosuye Technology (Shenyang) Co.,Ltd. |
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