CN113088916A - Intelligent control method for thickness of evaporation coating film based on numerical calculation - Google Patents

Intelligent control method for thickness of evaporation coating film based on numerical calculation Download PDF

Info

Publication number
CN113088916A
CN113088916A CN202110495520.4A CN202110495520A CN113088916A CN 113088916 A CN113088916 A CN 113088916A CN 202110495520 A CN202110495520 A CN 202110495520A CN 113088916 A CN113088916 A CN 113088916A
Authority
CN
China
Prior art keywords
evaporation
intelligent control
coating film
film thickness
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110495520.4A
Other languages
Chinese (zh)
Other versions
CN113088916B (en
Inventor
李成林
杜雪峰
郝明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosuye Technology Shenyang Co ltd
Original Assignee
Liaoning Molecular Flow Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Liaoning Molecular Flow Technology Co ltd filed Critical Liaoning Molecular Flow Technology Co ltd
Priority to CN202110495520.4A priority Critical patent/CN113088916B/en
Publication of CN113088916A publication Critical patent/CN113088916A/en
Application granted granted Critical
Publication of CN113088916B publication Critical patent/CN113088916B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses an intelligent control method of evaporation coating film thickness based on numerical calculation, which mainly comprises the following steps: arranging a plurality of rows of temperature sensors at the bottom of the evaporation boat, wherein the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensing array; arranging a flexible frame on one side of the evaporation boat parallel to the width direction of the coating film, and uniformly distributing a plurality of groups of driving units along the transverse direction of the flexible frame, wherein each group of driving units is connected with different sections of the flexible frame; the boundary of the evaporation area is composed of a fixed frame and a flexible frame of the evaporation boat, and the evaporation area of the evaporation boat is divided into a plurality of subareas in the width direction of the coating film by taking the temperature sensor as a boundary line; in the evaporation coating process, a central intelligent control module arranged in an evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat, so that real-time intelligent control on film thickness distribution in the width direction of a coating film is realized.

Description

Intelligent control method for thickness of evaporation coating film based on numerical calculation
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to an intelligent control method for the thickness of an evaporation coating film based on numerical calculation, which is adopted in vacuum evaporation coating.
Background
In recent years, the rapid development of optical technology, energy storage technology, and flat panel display technology has made higher demands on the uniformity and stability of the properties of thin film products. As one of the important process technologies for thin film preparation, vacuum evaporation coating is widely used in the industrial production of thin film products in the above fields. Due to the influence of the law of cosine of the evaporation source, if the interference is not carried out, the distribution of the film layer deposited on the substrate in the vacuum evaporation process can be in an uneven state.
Currently, in the coating industry, a modified baffle control method is generally adopted to solve the problem. The film distribution on the modified substrate is controlled by adjusting the attitude and shape of the modifying baffle, but this has certain problems. On one hand, the use of the correction baffle plate is at the cost of sacrificing the film coating efficiency and the film material use efficiency; on the other hand, once the correction baffle is set, the correction baffle is relatively fixed in the coating process, and the evaporation property of the evaporation material is changed along with different stages of the evaporation process, so that even if the correction baffle is used, the film thickness distribution on the product is gradually changed in different stages of long-time coating, which obviously cannot meet the use requirements of optics, energy storage, flat panel display and the like which have strict requirements on the product performance. In addition, a large amount of experience data is often needed to support the rear of the reasonably arranged correction baffle, which is not beneficial to the development and development of original products of emerging film manufacturers.
Disclosure of Invention
In order to solve the above problems, the present invention provides an intelligent control method for the thickness of an evaporation coating film based on numerical calculation, which mainly comprises:
(1) arranging a plurality of rows of temperature sensors at the bottom of the evaporation boat, wherein the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensing array;
(2) a flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the coating film; a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the multiple groups of driving units form a flexible boundary driving system;
(3) the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the groups of the driving units; dividing an evaporation area of the evaporation boat into a plurality of subareas in the width direction of the coating film by taking the temperature sensor as a boundary line; the boundary of the evaporation area is formed by a fixed frame and a flexible frame of the evaporation boat;
(4) in the evaporation coating process, a central intelligent control module arranged in an intelligent evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat; in the intelligent flexible closed-loop regulation and control process, the accumulated value of the film thickness of the deposited film layer of each part of each subarea in the width direction of the coating film is regulated on line by regulating and controlling the effective area of each subarea of the evaporation area in real time, so that the real-time intelligent control on the film thickness distribution in the width direction of the coating film is realized.
The temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module.
Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module is used for controlling the effective area S of a certain subarea according to the physical property parameters of the evaporation materialiAnd the average temperature T of the sub-areaiCorresponding to the film deposition rate, and obtaining the film thickness h deposited on a certain part of the sub-region in the width direction of the film coating by numerical calculationiThen h is mixediThe film thickness deposited on the part in the whole evaporation area is obtained through accumulation, so that the dynamic distribution data of the film thickness in the width direction of the coating film is simulated and obtained.
Effective area S of a certain sub-regioniThe intelligent control system is obtained by calculating the position of a connecting part of a driving unit and a segmented flexible frame on two boundary lines of the partitioned area by a central intelligent control module; average temperature T of the sub-zoneiThe central intelligent control module calculates and obtains the temperature based on the temperature obtained by the temperature sensor columns on the two boundary lines of the sub-area.
The central intelligent control module calculates the dynamic position correction of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frames generate concave or convex deformation and displacement with different degrees on the whole, and the real-time regulation and control of the effective area of each sub-area of the evaporation area are realized. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5 mm.
And the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of a certain part in the width direction of the coating film and the target distribution data of the part, and provides the dynamic position correction amount of the segmented flexible frame corresponding to the part according to the standard deviation degree.
The intelligent control of the film thickness enables the film thickness distribution of the substrate in the width direction to be uniform or reach the preset target film thickness distribution.
The method for intelligently controlling the thickness of the evaporation coating film does not adopt a means of setting a correction baffle or a shielding plate to control the thickness of the film.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to a central intelligent control module, and the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, and finally the preset target film thickness distribution is achieved; and the film thickness distribution state is kept stable in the whole evaporation coating process.
In the latter half of the evaporation coating process, the accumulation state of the evaporation materials in different areas in the evaporation boat is changed, so that the evaporation rate of different areas is changed to a certain extent compared with the former half of the evaporation coating process, if a fixed correction baffle control method is adopted, the film thickness distribution can not be kept stable in the whole evaporation coating process, but the invention solves the problem by carrying out closed-loop online regulation and control on the evaporation area and the film thickness dynamic distribution data, and keeps the film thickness distribution state stable in the whole evaporation coating process.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction. The special distribution state of the film thickness includes but is not limited to (1) a gradient film layer with a thicker middle film layer and thinner two end film layers; (2) the middle film layer is thinner, and the two end film layers are thicker; (3) a graded film layer that becomes thicker gradually from one end to the other, and so on.
The method for intelligently controlling the thickness of the evaporation coating film based on numerical calculation is implemented by adopting an evaporation source with intelligently adjustable boundary and an intelligent evaporation coating machine.
The evaporation source with the intelligent adjustable boundary mainly comprises an evaporation boat, a temperature sensing array and a flexible boundary driving system. The evaporation boat comprises a frame and a bottom, wherein the frame comprises a fixed frame, a flexible frame and a supporting frame; the flexible frame is arranged on one side of the evaporation boat parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat. The temperature sensing array mainly comprises a plurality of temperature sensors, the temperature sensors are divided into a plurality of rows, and the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film; each temperature sensor array comprises more than 2 temperature sensors and is arranged at the bottom of the evaporation boat in an extending mode along the substrate traveling direction, so that a temperature sensing array is formed at the bottom of the evaporation boat, and real-time temperature distribution signals of all areas at the bottom of the evaporation boat are obtained.
The evaporation source is mainly applied to coating equipment with a substrate in a continuous transfer mode, and a correction baffle plate or a shielding plate is not arranged between the evaporation source and the substrate.
In the evaporation coating process, the central intelligent control module controls the flexible boundary driving system to drive the flexible frame to generate concave or convex deformation and displacement with different degrees, so that the intelligent online adjustment of the evaporation area boundary is realized. The flexible frame is made of high-temperature-resistant flexible materials and has good high-temperature stability and flexibility. In one embodiment, the flexible material resistant to high temperature is a flexible graphite-based material.
The boundary of the evaporation area consists of a flexible frame and a fixed frame; the supporting frame is positioned outside the boundary of the evaporation area and arranged on the outer side of the flexible frame; the flexible boundary driving system comprises a plurality of groups of driving units; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame; the number of the driving units is more than 3. Each group of driving units comprises more than 1 micro servo motor and linear push rod or more than 1 micro linear motor, and when the flexible frame of the evaporation boat is high, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in an evaporation area.
The number of the temperature sensors is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units. The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame can generate concave or convex deformation and displacement with different degrees on the whole; the precision of the movement is 0.05-0.5 mm. The connection part of the driving unit and the flexible frame is provided with a heat insulation layer. Contact dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.
In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; the flexible boundary driving system transmits the position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module. Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module performs numerical calculation simulation according to the temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction amount of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move towards the inside or the outside of the evaporation area, so that the flexible frame generates concave or convex deformation and displacement with different degrees on the whole, and intelligent online adjustment of the boundary of the evaporation area is realized.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to a central intelligent control module, the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, the preset target film thickness distribution is finally achieved, and the stability of the film thickness distribution state is kept in the whole evaporation film coating process.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction.
The intelligent evaporation coating machine mainly comprises a coating chamber, an evaporation source, a central intelligent control module and a vacuum system. In the evaporation coating process, the central intelligent control module can control the flexible boundary driving system to carry out closed-loop online regulation and control on the displacement and the deformation of the flexible frame of the evaporation boat, and the boundary of the evaporation area is intelligently controlled in real time, so that the film layer deposited on the substrate presents the required film thickness distribution state, and the stability of the film thickness distribution state is kept in the whole evaporation coating process.
The substrate in the intelligent evaporation coating machine is in a continuous transmission mode, and a correction baffle plate or a shielding plate is not arranged between the evaporation source and the substrate.
In one embodiment, the intelligent evaporation coating machine is a roll-to-roll coating device, and the substrate is a flexible base film. The intelligent evaporation coating machine can also be a linear multi-chamber continuous vacuum coating device, and the substrate can be glass, organic glass, a metal sheet, acrylic or other forms conveyed linearly.
The number of the temperature sensors is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units.
The intelligent evaporation coating machine can be used for implementing an intelligent evaporation coating method, and comprises the following steps:
(1) starting a vacuum system of the intelligent evaporation coating machine to vacuumize the coating chamber;
(2) when the vacuum degree of the coating chamber meets the process requirement, starting the evaporation source and the central intelligent control module; the central intelligent control module carries out intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of the evaporation source;
(3) when the deposited film layer presents a required film thickness distribution state in the width direction of the coating film, starting a substrate conveying system to enable the substrate to continuously move above an evaporation area, and forming the film layer which accords with the expected film thickness distribution on the substrate through the evaporation coating process; the film thickness distribution state is kept stable in the whole evaporation coating process.
The boundary of the evaporation area is composed of a flexible frame and a fixed frame; the flexible boundary driving system comprises a plurality of groups of driving units which are uniformly distributed in the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame.
And (4) in the evaporation coating process in the step (3), the thickness of the film layer is controlled without adopting a means of arranging a correction baffle or a shielding plate.
And (4) in the evaporation coating process in the step (3), the central intelligent control module always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation source. Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the real-time intelligent flexible closed-loop regulation and control process comprises the following steps: the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module.
The central intelligent control module performs numerical calculation simulation according to the obtained temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame generates inwards concave or outwards convex deformation and displacement in different degrees on the whole. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5 mm.
And the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of each part in the coating width direction and the target distribution data of the corresponding part, and provides the dynamic position correction of the flexible frame section corresponding to the part according to the standard deviation degree of a certain region.
The intelligent evaporation coating machine is roll-to-roll coating equipment, and the substrate is a flexible base film; the step (1) also comprises the step of placing the flexible base film on a unreeling roller of the intelligent evaporation coating machine.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to the central intelligent control module, and the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, and finally the preset target film thickness distribution is achieved.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction.
The invention has the beneficial effects that:
(1) the evaporation coating film thickness intelligent control method based on numerical calculation adopts the completely new idea of sourced regulation and control, does not adopt the means of setting a correction baffle or a shielding plate based on a large amount of experience data, and carries out closed-loop intelligent real-time regulation and control on the film thickness distribution in the coating width direction based on the coating principle and numerical calculation simulation, so that research and development personnel can be out of the constraint of long-term coating experience and a large amount of experience data, film products with various film thickness distribution characteristics of various film materials are quickly researched and produced, and the research and development period of new products is greatly shortened; on the other hand, the equipment does not need to be opened to reset and adjust the correction baffle plate and the like, and the evaporation material can be deposited on the substrate without being shielded, so that the equipment efficiency and the production efficiency are improved, and a large amount of evaporation material and energy consumed during evaporation are saved.
(2) The intelligent control method for the thickness of the evaporation coating film can carry out closed-loop intelligent real-time regulation and control on the thickness distribution in the evaporation coating process, so that the thickness distribution in the coating width direction quickly reaches the preset target and is kept stable in the whole coating production period. The equipment and the coating method of the invention not only can realize that the film thickness distribution of the substrate in the width direction is uniform and consistent in the whole coating production process, but also can ensure that the coated product conforms to a certain special distribution state of gradual change of the film thickness in the width direction, thereby realizing flexible and changeable special coated products which cannot be achieved by the conventional evaporation coating machine.
(3) The high degree of intellectualization and automation are realized, various designed film products can be efficiently produced by the mutual matching of the evaporation source with the intelligent control module, the complicated debugging and setting links of the conventional evaporation coating equipment are abandoned, and the foundation is laid for the intelligent vacuum coating factory with high degree of automation.
Drawings
Fig. 1 is a schematic top view of an embodiment of an intelligently adjustable boundary evaporation source according to the present invention.
FIG. 2 is a schematic view of an embodiment of the intelligent evaporation coating machine according to the present invention.
Fig. 3 is a schematic top view of another embodiment of the intelligently boundary-adjustable evaporation source according to the present invention.
Detailed Description
The following further describes the embodiments of the present invention with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are intended for purposes of illustration and explanation only and are not intended to limit the scope of the invention.
Fig. 1 is a schematic top view of an embodiment of an intelligently adjustable boundary evaporation source according to the present invention. As shown in fig. 1, the evaporation source mainly includes an evaporation boat 1, a temperature sensing array, and a flexible boundary driving system. The evaporation boat 1 comprises a frame and a bottom, wherein the frame comprises a fixed frame 3, a flexible frame 4 and a supporting frame 5; the flexible frame 4 is arranged on one side of the evaporation boat parallel to the width direction of the coating film, and the fixed frame is arranged on the other three sides of the evaporation boat. The temperature sensing array mainly comprises a plurality of temperature sensors 6, the temperature sensors are divided into a plurality of rows, and a plurality of temperature sensor rows 7 are arranged at the bottom of the evaporation boat 1 in parallel in the width direction of the coating film; each temperature sensor array comprises more than 2 temperature sensors and is arranged at the bottom of the evaporation boat in an extending mode along the substrate running direction, so that a temperature sensing array is formed at the bottom of the evaporation boat 1, and real-time temperature distribution signals of all areas at the bottom of the evaporation boat are obtained.
The evaporation source is mainly applied to coating equipment with a substrate in a continuous transfer mode, and a correction baffle plate or a shielding plate is not arranged between the evaporation source and the substrate.
In the evaporation coating process, the central intelligent control module 2 controls the flexible boundary driving system to drive the flexible frame 4 to generate concave or convex deformation and displacement with different degrees, so that the intelligent online adjustment of the evaporation area boundary is realized. In the case shown in fig. 1, the flexible bezel is driven by the flexible boundary driving system to generate a concave deformation displacement, and in the case shown in fig. 3, the flexible bezel is driven by the flexible boundary driving system to generate a convex deformation displacement. The flexible frame 4 is made of high-temperature-resistant flexible materials and has good high-temperature stability and flexibility. In one embodiment, the flexible material resistant to high temperature is a flexible graphite-based material.
The boundary of the evaporation area is composed of a flexible frame and a fixed frame, and the flexible frame and the fixed frame enclose an evaporation area 8 of the evaporation boat; the supporting frame 5 is positioned outside the boundary of the evaporation area and is arranged outside the flexible frame 4; the flexible boundary drive system comprises a plurality of groups of drive units 9; a plurality of groups of driving units are transversely and uniformly distributed on a supporting frame 5 of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame 4; the number of the driving units 9 is 3 or more. Each group of driving units comprises more than 1 micro servo motor and linear push rod or more than 1 micro linear motor, and when the flexible frame of the evaporation boat is high, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in the evaporation area 8.
The number of the temperature sensors 6 is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units. The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame can generate concave or convex deformation and displacement with different degrees on the whole; the precision of the movement is 0.05-0.5 mm. The connection part of the driving unit and the flexible frame is provided with a heat insulation layer. Contact dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.
In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; the flexible boundary driving system transmits the position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module. Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module performs numerical calculation simulation according to the temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction amount of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move towards the inside or the outside of the evaporation area, so that the flexible frame generates concave or convex deformation and displacement with different degrees on the whole, and intelligent online adjustment of the boundary of the evaporation area is realized.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to a central intelligent control module, the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, the preset target film thickness distribution is finally achieved, and the stability of the film thickness distribution state is kept in the whole evaporation film coating process.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction. The special distribution state of the film thickness includes but is not limited to (1) a gradient film layer with a thicker middle film layer and thinner two end film layers; (2) the middle film layer is thinner, and the two end film layers are thicker; (3) a graded film layer that becomes thicker gradually from one end to the other, and so on.
FIG. 2 is a schematic view of an embodiment of the intelligent evaporation coating machine according to the present invention. As shown in fig. 2, the intelligent evaporation coating machine mainly comprises a coating chamber 10, an evaporation source 11, a central intelligent control module 2 and a vacuum system 12. In the evaporation coating process, the central intelligent control module can control the flexible boundary driving system to carry out closed-loop online regulation and control on the displacement and the deformation of the flexible frame of the evaporation boat, and the boundary of the evaporation area is intelligently controlled in real time, so that the film layer deposited on the substrate presents the required film thickness distribution state, and the stability of the film thickness distribution state is kept in the whole evaporation coating process.
The substrate in the intelligent evaporation coating machine is in a continuous transmission mode, and a correction baffle plate or a shielding plate is not arranged between the evaporation source and the substrate.
In the embodiment of the intelligent evaporation coating machine shown in fig. 2, the intelligent evaporation coating machine is a roll-to-roll coating device, and the substrate is a flexible base film. The intelligent evaporation coating machine can also be a linear multi-chamber continuous vacuum coating device, and the substrate can be glass, organic glass, a metal sheet, acrylic or other forms conveyed linearly.
The boundary of the evaporation area is composed of a flexible frame and a fixed frame; the frame of the evaporation boat also comprises a supporting frame, and the supporting frame is positioned outside the boundary of the evaporation area and is arranged on the outer side of the flexible frame; the flexible boundary driving system comprises a plurality of groups of driving units; the multiple groups of driving units are transversely and uniformly distributed on the supporting frame of the evaporation boat, and each group of driving units is connected with different sections of the flexible frame; the number of the driving units is more than 3. The fixed frame of the evaporation boat is provided with a vibration material homogenizing mechanism, so that evaporation materials can be uniformly distributed in an evaporation area.
The number of the temperature sensors is more than 6, the number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units.
The part of the flexible frame connected with the driving unit can move inwards or outwards under the driving of the driving unit, so that the flexible frame can generate concave or convex deformation and displacement with different degrees on the whole; the precision of the movement is 0.05-0.5 mm. The connection part of the driving unit and the flexible frame is provided with a heat insulation layer. Contact dynamic seal can be arranged between the flexible frame and other parts of the evaporation boat.
In the evaporation coating process, the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module.
Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module performs numerical calculation simulation according to the obtained temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame generates concave or convex deformation and displacement with different degrees on the whole, and intelligent online adjustment of the boundary of the evaporation area is realized.
Each group of driving units comprises more than 1 micro servo motor and a linear push rod or more than 1 micro linear motor. When the flexible frame of the evaporation boat is high, each group of driving units is provided with a plurality of micro servo motors and linear push rods or a plurality of micro linear motors in the height direction.
The invention discloses an intelligent control method of evaporation coating film thickness based on numerical calculation, which mainly comprises the following steps:
(1) arranging a plurality of rows of temperature sensors at the bottom of the evaporation boat, wherein the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensing array;
(2) a flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the coating film; a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the multiple groups of driving units form a flexible boundary driving system;
(3) the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the groups of the driving units; dividing an evaporation area of the evaporation boat into a plurality of subareas in the width direction of the coating film by taking the temperature sensor as a boundary line; the boundary of the evaporation area is formed by a fixed frame and a flexible frame of the evaporation boat;
(4) in the evaporation coating process, a central intelligent control module arranged in an evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat; in the intelligent flexible closed-loop regulation and control process, the accumulated value of the film thickness of the deposited film layer of each part of each subarea in the width direction of the coating film is regulated on line by regulating and controlling the effective area of each subarea of the evaporation area in real time, so that the real-time intelligent control on the film thickness distribution in the width direction of the coating film is realized.
The temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module.
Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module is used for controlling the effective area S of a certain subarea according to the physical property parameters of the evaporation materialiAnd the average temperature T of the sub-areaiCorresponding to the film deposition rate, and obtaining the film thickness h deposited on a certain part of the sub-region in the width direction of the film coating by numerical calculationiThen h is mixediThe film thickness deposited on the part in the whole evaporation area is obtained through accumulation, so that the dynamic distribution data of the film thickness in the width direction of the coating film is simulated and obtained.
Effective area S of a certain sub-regioniThe intelligent control system is obtained by calculating the position of a connecting part of a driving unit and a segmented flexible frame on two boundary lines of the partitioned area by a central intelligent control module; average temperature T of the sub-zoneiThe central intelligent control module calculates and obtains the temperature based on the temperature obtained by the temperature sensor columns on the two boundary lines of the sub-area.
The central intelligent control module calculates the dynamic position correction of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frames generate concave or convex deformation and displacement with different degrees on the whole, and the real-time regulation and control of the effective area of each sub-area of the evaporation area are realized. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5 mm.
And the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of a certain part in the width direction of the coating film and the target distribution data of the part, and provides the dynamic position correction amount of the segmented flexible frame corresponding to the part according to the standard deviation degree.
The intelligent control of the film thickness enables the film thickness distribution of the substrate in the width direction to be uniform or reach the preset target film thickness distribution.
The method for intelligently controlling the thickness of the evaporation coating film does not adopt a means of setting a correction baffle or a shielding plate to control the thickness of the film.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to a central intelligent control module, and the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, and finally the preset target film thickness distribution is achieved; and the film thickness distribution state is kept stable in the whole evaporation coating process.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction. The special distribution state of the film thickness includes but is not limited to (1) a gradient film layer with a thicker middle film layer and thinner two end film layers; (2) the middle film layer is thinner, and the two end film layers are thicker; (3) a graded film layer that becomes thicker gradually from one end to the other, and so on.
The invention relates to an intelligent evaporation coating method, which comprises the following steps:
(1) starting a vacuum system of the intelligent evaporation coating machine to vacuumize the coating chamber;
(2) when the vacuum degree of the coating chamber meets the process requirement, starting the evaporation source and the central intelligent control module; the central intelligent control module carries out intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of the evaporation source;
(3) when the deposited film layer presents a required film thickness distribution state in the width direction of the coating film, starting a substrate conveying system to enable the substrate to continuously move above an evaporation area, and forming the film layer which accords with the expected film thickness distribution on the substrate through the evaporation coating process; the film thickness distribution state is kept stable in the whole evaporation coating process.
The evaporation source comprises an evaporation boat, a temperature sensing array and a flexible boundary driving system; the evaporation boat comprises a bottom, a fixed frame and a flexible frame; the flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the coating film, and the other three sides of the evaporation boat are provided with fixed frames; the temperature sensing array mainly comprises a plurality of rows of temperature sensors arranged at the bottom of the evaporation boat; the boundary of the evaporation area is composed of a flexible frame and a fixed frame; the flexible boundary driving system comprises a plurality of groups of driving units which are uniformly distributed in the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the number of the driving units is more than 3. The number of the arranged columns of the temperature sensors is consistent with the number of the groups of the driving units, and the position of each column corresponds to the position of each group of the driving units.
And (4) in the evaporation coating process in the step (3), the thickness of the film layer is controlled without adopting a means of arranging a correction baffle or a shielding plate.
And (4) in the evaporation coating process in the step (3), the central intelligent control module always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of the evaporation area of the evaporation source. Target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the real-time intelligent flexible closed-loop regulation and control process comprises the following steps: the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module.
The central intelligent control module performs numerical calculation simulation according to the obtained temperature array signal, the position signal of each segmented flexible frame and the physical property parameter of the evaporation material to obtain the film thickness dynamic distribution data of the deposited film layer in the width direction of the coating film, and calculates the dynamic position correction of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frame generates inwards concave or outwards convex deformation and displacement in different degrees on the whole. The accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5 mm.
And the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of each part in the coating width direction and the target distribution data of the corresponding part, and provides the dynamic position correction of the flexible frame section corresponding to the part according to the standard deviation degree of a certain region.
The intelligent evaporation coating machine is roll-to-roll coating equipment, and the substrate is a flexible base film; the step (1) also comprises the step of placing the flexible base film on a unreeling roller of the intelligent evaporation coating machine.
The central intelligent control module is used for intelligently controlling the boundary of the evaporation area of the evaporation boat on line into closed-loop control. In the evaporation coating process, the temperature sensing array and the flexible boundary driving system transmit real-time temperature array signals and position signals of each segmented flexible frame to the central intelligent control module, and the central intelligent control module performs numerical calculation simulation according to the signals and physical property parameters of evaporation materials to obtain dynamic film thickness distribution data of a deposited film layer in the coating width direction. When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is higher than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move towards the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and reduced by the actions, so that the film deposition rate of the part is reduced, and the film thickness dynamic distribution data of the part approaches to the target distribution data.
When the dynamic film thickness distribution data of a certain part in the width direction of the coating film is lower than the target distribution data, the central intelligent control module sends a driving instruction to the flexible boundary driving system, controls the driving unit to drive the segmented flexible frame corresponding to the part to move outside the evaporation area, and controls the movement amount according to the difference degree. The effective area of the evaporation region of the part is adjusted and increased by the actions, so that the film deposition rate of the part is improved, and the film thickness dynamic distribution data of the part approaches to the target distribution data. Then, the temperature array signal and the position signal of each segmented flexible frame are continuously transmitted to the central intelligent control module, and the central intelligent control module continuously regulates and controls the evaporation area of the evaporation boat according to the difference between the obtained film thickness dynamic distribution data and the target distribution data, so that the film thickness dynamic distribution data in the film coating width direction gradually approaches the target distribution data, and finally the preset target film thickness distribution is achieved.
Through the above process, the film deposited on the substrate is in the required film thickness distribution state, which may be a regular distribution state with uniform film thickness in the width direction or a special distribution state with gradually changed film thickness in the width direction.

Claims (9)

1. An intelligent control method for the thickness of an evaporation coating film based on numerical calculation mainly comprises the following steps:
(1) arranging a plurality of rows of temperature sensors at the bottom of the evaporation boat, wherein the plurality of temperature sensors are arranged at the bottom of the evaporation boat in parallel in the width direction of the coating film to form a temperature sensing array;
(2) a flexible frame is arranged on one side of the evaporation boat, which is parallel to the width direction of the coating film; a plurality of groups of driving units are uniformly distributed along the transverse direction of the flexible frame, and each group of driving units is connected with different sections of the flexible frame; the multiple groups of driving units form a flexible boundary driving system;
(3) the number of the rows of the temperature sensors is consistent with the number of the groups of the driving units, and the positions of the rows correspond to the positions of the groups of the driving units; dividing an evaporation area of the evaporation boat into a plurality of subareas in the width direction of the coating film by taking the temperature sensor as a boundary line; the boundary of the evaporation area is formed by a fixed frame and a flexible frame of the evaporation boat;
(4) in the evaporation coating process, a central intelligent control module arranged in an evaporation coating machine always carries out real-time intelligent flexible closed-loop regulation and control on the boundary of an evaporation area of an evaporation boat; in the intelligent flexible closed-loop regulation and control process, the accumulated value of the film thickness of the deposited film layer of each part of each subarea in the width direction of the coating film is regulated on line by regulating and controlling the effective area of each subarea of the evaporation area in real time, so that the real-time intelligent control on the film thickness distribution in the width direction of the coating film is realized.
2. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 1, characterized in that: the temperature sensing array obtains a temperature array signal at the bottom of the evaporation boat in real time and transmits the temperature array signal to the central intelligent control module; meanwhile, the flexible boundary driving system transmits position signals of the connecting parts of the segmented flexible frames and the driving units to the central intelligent control module.
3. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 1, characterized in that: target distribution data of film thickness and an evaporation material database are preset in the central intelligent control module; the central intelligent control module is used for controlling the effective area S of a certain subarea according to the physical property parameters of the evaporation materialiAnd the average temperature T of the sub-areaiCorresponding to the film deposition rate, and obtaining the film thickness h deposited on a certain part of the sub-region in the width direction of the film coating by numerical calculationiThen h is mixediThe film thickness deposited on the part in the whole evaporation area is obtained through accumulation, so that the dynamic distribution data of the film thickness in the width direction of the coating film is simulated and obtained.
4. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 1, characterized in that: effective area S of a certain sub-regioniThe intelligent control system is obtained by calculating the position of a connecting part of a driving unit and a segmented flexible frame on two boundary lines of the partitioned area by a central intelligent control module; average temperature T of the sub-zoneiThe central intelligent control module calculates and obtains the temperature based on the temperature obtained by the temperature sensor columns on the two boundary lines of the sub-area.
5. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 3, characterized in that: the central intelligent control module calculates the dynamic position correction of each segmented flexible frame according to the difference between the film thickness dynamic distribution data and the target distribution data; and then the central intelligent control module sends a driving instruction based on the dynamic position correction to the flexible boundary driving system, and controls each driving unit to drive each segmented flexible frame to move inwards or outwards, so that the flexible frames generate concave or convex deformation and displacement with different degrees on the whole, and the real-time regulation and control of the effective area of each sub-area of the evaporation area are realized.
6. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 5, characterized in that: the accuracy of inward or outward movement of each segmented flexible frame is 0.05-0.5 mm.
7. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 5, characterized in that: and the central intelligent control module performs standard deviation analysis on the film thickness dynamic distribution data of a certain part in the width direction of the coating film and the target distribution data of the part, and provides the dynamic position correction amount of the segmented flexible frame corresponding to the part according to the standard deviation degree.
8. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 1, characterized in that: the intelligent control of the film thickness enables the film thickness distribution of the substrate in the width direction to be uniform or reach the preset target film thickness distribution.
9. The intelligent control method for the thickness of the evaporation coating film based on the numerical calculation according to claim 1, characterized in that: the method for intelligently controlling the thickness of the evaporation coating film does not adopt a means of setting a correction baffle or a shielding plate to control the thickness of the film.
CN202110495520.4A 2021-05-07 2021-05-07 Intelligent control method for film thickness of evaporation coating film based on numerical calculation Active CN113088916B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110495520.4A CN113088916B (en) 2021-05-07 2021-05-07 Intelligent control method for film thickness of evaporation coating film based on numerical calculation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110495520.4A CN113088916B (en) 2021-05-07 2021-05-07 Intelligent control method for film thickness of evaporation coating film based on numerical calculation

Publications (2)

Publication Number Publication Date
CN113088916A true CN113088916A (en) 2021-07-09
CN113088916B CN113088916B (en) 2023-04-21

Family

ID=76681625

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110495520.4A Active CN113088916B (en) 2021-05-07 2021-05-07 Intelligent control method for film thickness of evaporation coating film based on numerical calculation

Country Status (1)

Country Link
CN (1) CN113088916B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000080466A (en) * 1998-09-01 2000-03-21 Kobe Steel Ltd Vacuum arc deposition device
CN103866239A (en) * 2012-12-18 2014-06-18 北京汉能创昱科技有限公司 Linear evaporation source device
CN207313687U (en) * 2017-08-29 2018-05-04 京东方科技集团股份有限公司 A kind of limiting structure, limits device and deposition system
CN108385077A (en) * 2018-03-02 2018-08-10 中国计量大学 A kind of coating apparatus and film plating process for capableing of real-time indirect monitoring thicknesses of layers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000080466A (en) * 1998-09-01 2000-03-21 Kobe Steel Ltd Vacuum arc deposition device
CN103866239A (en) * 2012-12-18 2014-06-18 北京汉能创昱科技有限公司 Linear evaporation source device
CN207313687U (en) * 2017-08-29 2018-05-04 京东方科技集团股份有限公司 A kind of limiting structure, limits device and deposition system
CN108385077A (en) * 2018-03-02 2018-08-10 中国计量大学 A kind of coating apparatus and film plating process for capableing of real-time indirect monitoring thicknesses of layers

Also Published As

Publication number Publication date
CN113088916B (en) 2023-04-21

Similar Documents

Publication Publication Date Title
CN105177510B (en) Evaporated device and evaporation coating method
JP5644418B2 (en) Roll press machine
CN104659071B (en) A kind of AMOLED display panels preparation method and producing device
CN102903730A (en) Mask frame assembly used for organic deposition and package, and manufacturing method and device thereof
CN111014340B (en) Winding tension control system and method for crude foil machine
CN113186496B (en) Intelligent evaporation coating method
CN113186495B (en) Edge intelligent adjustable evaporation source
CN113174567B (en) Intelligent evaporation coating machine
CN113235053B (en) Evaporation coating method with intelligently adjustable evaporation rate
CN105652485B (en) Method for preparing liquid crystal cylindrical lens grating film in roll-to-roll mode
CN113088916B (en) Intelligent control method for film thickness of evaporation coating film based on numerical calculation
CN104004995A (en) Vapor plating device, vapor plating equipment and vapor plating method
CN103451625A (en) Deposition apparatus and method for manufacturing organic light emitting diode display using the same
CN215628251U (en) Vacuum evaporation coating machine
CN215668180U (en) Intelligent evaporation source
CN113215535B (en) Evaporation coating machine with intelligently adjustable evaporation rate
CN205258591U (en) A heating device and evaporation equipment for coating by vaporization
CN214612730U (en) Evaporation coating machine
CN111545937A (en) Laser metal additive deposition temperature control method and system
CN204803215U (en) Float glass apparatus for producing
CN114032509A (en) Evaporation plating equipment
CN203065568U (en) Adjusting device for uniformity of large-area continuous magnetron sputtering coating
CN215628252U (en) Linear evaporation source
CN103223394A (en) Novel high-precision MG coating unit
CN113215547B (en) Controllable linear evaporation source of intelligence

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20240403

Address after: No. C5-1, 158 Puhe Road, Shenbei New District, Shenyang City, Liaoning Province, 110000

Patentee after: Bosuye Technology (Shenyang) Co.,Ltd.

Country or region after: China

Address before: 110179 no.6-5, Qixia street, Hunnan District, Shenyang City, Liaoning Province (1-12-2)

Patentee before: Liaoning molecular flow technology Co.,Ltd.

Country or region before: China

TR01 Transfer of patent right