CN113060931A

CN113060931A - Method and device for high-temperature butt-extrusion welding of quartz glass component

Info

Publication number: CN113060931A
Application number: CN202110440647.6A
Authority: CN
Inventors: 步东浩
Original assignee: Shenyang Diande Technology Co ltd
Current assignee: Shenyang Diande Technology Co ltd
Priority date: 2021-04-23
Filing date: 2021-04-23
Publication date: 2021-07-02

Abstract

The invention discloses a method and a device for butt-extrusion welding of quartz glass components at high temperature, which relate to the field of welding of quartz glass components and comprise a base station, wherein a sliding device is fixedly arranged on the base station, a clamp is fixedly arranged on the sliding device, and the end surface of a rod-shaped quartz glass component is made into a convex structure or a plane structure, and the rod-shaped quartz glass component is heated by flame of a burner and pressed and jointed by pressing a joint piece from the vertical direction, so that welding rods required by the traditional welding of quartz glass components are not needed, the surface deformation of the joint surface can be prevented, and the joint surface does not need to be reshaped. Further, the rod-shaped silica glass member and the plate-shaped silica glass member can be assembled efficiently by simultaneously welding and joining the plurality of rod-shaped silica glass members to the plate-shaped silica glass member without using a graphite jig, by omitting a temporary welding step by a manual operation, and by eliminating the need to modify a welded portion.

Description

Method and device for high-temperature butt-extrusion welding of quartz glass component

Technical Field

The invention relates to the field of quartz glass component welding, in particular to a method and a device for butt-extrusion welding of a quartz glass component at high temperature.

Background

In a manufacturing process of a semiconductor device, a jig is made of quartz glass, which is a high-purity material that is stable even at high temperatures and does not cause impurities to be mixed into a semiconductor. In a jig made of quartz glass used for semiconductor manufacturing, a quartz boat or a jig for cleaning quartz glass is assembled by welding a top plate and a bottom plate to a member provided with a groove.

At present, when PN junctions are manufactured in the field of solar cells, a diffusion process is the core of the solar cell technology, the diffusion process carries out high-temperature reaction in a furnace tube and bears a boat used by the cells, and because the boat is required to have the characteristics of high temperature resistance and corrosion resistance, the boat made of quartz becomes the best choice of the diffusion process, and the quartz boat plays a very important role in the field of the diffusion process.

The conventional production process is a method in which the end face of a rod-shaped quartz glass member is brought close to the surface of a plate-shaped quartz glass member, a welding rod made of quartz glass having a diameter of 2 to 6mm is used to fuse and join the periphery of the welding portion by oxyhydrogen flame using a hand-held burner, and the conventional production process is a method in which welded parts are joined to each other by the welding rod to assemble the members. Therefore, if the portion piled up with the welding rod is not melted well, the welding rod is partially defective in welding due to defective heating, and bubbles may be generated, or the joint strength may be insufficient. Therefore, in the case of bonding a quartz boat by using a welding rod suitable for an operation of increasing bonding strength by sufficient ignition, in the conventional method, a groove for mounting a silicon wafer is generally formed by cutting a quartz glass rod-shaped member with a diamond grindstone (in some cases, a quartz boat is assembled first and then a groove is formed), a plurality of (4 in the drawing) groove rods are generally arranged at predetermined positions by using a graphite jig (or other material), similarly, the groove rods are temporarily welded in sequence on a top plate and a bottom plate which are positioned in parallel at a predetermined interval, the quartz boat shape is temporarily assembled (commonly referred to as spot welding in the art), the temporarily welded assembly is taken out from the graphite jig, whether the standard is satisfied or not is checked by using a detection tool such as a three-coordinate system, the temporary welding is performed again when correction is necessary, and after it is confirmed that the dimension tolerance is within a predetermined dimension tolerance, in this conventional method, a plurality of graphite jigs must be prepared in accordance with various specifications and specifications of the quartz boat, and a large amount of time and labor are required for fine adjustment work for disposing a quartz glass member such as a top plate or a grooved bar in the graphite jig in order to achieve a predetermined size, including the problem of abrasion of the graphite jig. Further, even if the fine adjustment of the grooved bars is smoothly performed and the grooved bars themselves have variations in diameter, the finished product has a problem that the finished product is assembled with a dimensional tolerance different from the specification because the distance from the diameter center of the grooved bar to the diameter center of the other grooved bar is different.

Disclosure of Invention

The invention aims to solve the problems and designs a method and a device for high-temperature butt-extrusion welding of quartz glass components.

The technical scheme of the invention for realizing the aim is that the device for butt-extrusion welding of the quartz glass component at high temperature comprises a base station, wherein a sliding device is fixedly arranged on the base station, a clamp is fixedly arranged on the sliding device, air cylinders are fixedly arranged on the base station and positioned at two sides of the sliding device respectively, electric rotating discs are fixedly arranged on telescopic ends of the air cylinders respectively, fixing devices are fixedly arranged on rotating ends of the electric rotating discs respectively, a longitudinal electric push rod is fixedly arranged on the upper wall surface of the air cylinder, a transverse electric push rod is fixedly arranged on the telescopic end of the longitudinal electric push rod, a support rod is fixedly arranged on the telescopic end of the transverse electric push rod, a first motor is fixedly arranged on the support rod, a first combustor is fixedly arranged on the driving end of the first motor, and a mechanical arm is fixedly arranged on the base station and positioned behind, the mechanical arm is fixedly provided with a second combustor, an ascending electric push rod is fixedly arranged on the base station and between gaps on two sides of the cylinder and the sliding device respectively, a second motor is fixedly arranged on the telescopic end of the ascending electric push rod, and a third combustor is fixedly arranged on the driving end of the second motor.

Preferably, the first combustor, the second combustor and the third combustor are all bifurcated combustors or pipeline combustors.

Preferably, the flame output ends of the first burner, the second burner and the third burner are in an annular structure, a plurality of nozzles with the same structure are arranged on the flame output ends of the first burner, the second burner and the third burner, and the plurality of nozzles are linearly arranged on the annular structure of the flame output ends of the first burner, the second burner and the third burner.

Preferably, the diameter of the output end of the nozzle is 1-3 mm.

Preferably, the first combustor, the second combustor, and the third combustor are provided with flow meters in their transfer lines.

Preferably, the sliding device is an electric sliding rail.

Preferably, the mechanical arm is a 6-axis joint mechanical arm, and the fixing device is a vacuum chuck.

A method for high-temperature butt-extrusion welding of quartz glass members comprises a plate-shaped quartz glass member and a rod-shaped quartz glass member, wherein the plate-shaped quartz glass member is respectively arranged on a fixing device, the rod-shaped quartz glass member is arranged on a clamp, flame is conveyed through a first burner and a third burner to heat and soften the surface of the plate-shaped quartz glass member and the joint surface of the rod-shaped quartz glass member, the plate-shaped quartz glass member and the rod-shaped quartz glass member are pressed and butted, the joint surface of the rod-shaped quartz glass member is of a convex structure or a plane structure, and the distance from the top end of the convex structure or the plane structure of the joint surface of the rod-shaped quartz glass member to the surface of the plate.

Preferably, the cross section of the rod-shaped quartz glass member with the convex bonding surface is in a trapezoid structure, a wedge structure or a cone structure, the inclined angle of the inclined edge of the trapezoid structure, the wedge structure or the cone structure is 2-20 degrees, and the conveying flame is positioned on two sides of the trapezoid structure, the wedge structure, the cone structure or the plane structure.

Preferably, the included angle between the direction of the conveying flame and the end face of the plate-shaped quartz glass member is 5-45 degrees.

Advantageous effects

In the method and the device for butt-extrusion welding of the quartz glass member at high temperature manufactured by the technical scheme of the invention, the end surface of the rod-shaped quartz glass member is made into a convex structure or a plane structure, and the pressure is applied to the joint surface from the vertical direction for compression joint while heating is carried out by using the flame of the burner, so that the welding rod required by the welding of the prior quartz glass component is not needed, the surface deformation of the joint surface can be prevented, and the joint surface does not need to be reshaped. In addition, in the step of assembling the rod-shaped silica glass member and the plate-shaped silica glass member, it is not necessary to use a graphite jig, and it is possible to omit a temporary welding step by manual work, and it is not necessary to modify the welded portion, and it is possible to weld and join a plurality of rod-shaped silica glass members to the plate-shaped silica glass member at the same time, and it is possible to complete the assembly of the rod-shaped silica glass member and the plate-shaped silica glass member efficiently.

Drawings

FIG. 1 is a front view of the present invention;

FIG. 2 is a schematic view of the clamp of the present invention;

FIG. 3 is a schematic view of a showerhead of the present invention;

FIG. 4 is a schematic view showing the butt joint end faces of a plate-shaped silica glass member and a rod-shaped silica glass member according to the present invention;

in the figure, 1, a base station; 2. a sliding device; 3. a clamp; 4. a cylinder; 5. an electric turntable; 6. a fixing device; 7. a longitudinal electric push rod; 8. a transverse electric push rod; 9. a first burner; 10. a mechanical arm; 11. a second combustor; 12. a nozzle; 13. a plate-like quartz glass member; 14. a rod-shaped quartz glass member; 15. and a third burner.

Detailed Description

The invention is described in detail with reference to the accompanying drawings, and as shown in fig. 1-4, a device for butt-extrusion welding of quartz glass components at high temperature comprises a base platform 1, a sliding device 2 is fixedly mounted on the base platform 1, a clamp 3 is fixedly mounted on the sliding device 2, air cylinders 4 are respectively and fixedly mounted on the base platform 1 and positioned at two sides of the sliding device, electric turntables 5 are respectively and fixedly mounted on telescopic ends of the air cylinders 4, fixing devices 6 are respectively and fixedly mounted on rotating ends of the electric turntables 5, a longitudinal electric push rod 7 is fixedly mounted on an upper wall surface of each air cylinder 4, a transverse electric push rod 8 is fixedly mounted on a telescopic end of each longitudinal electric push rod 7, a support rod is fixedly mounted on a telescopic end of each transverse electric push rod 8, a first motor is fixedly mounted on each support rod, a first burner 9 is fixedly mounted on a driving end of the, base station 1 is last and be located 2 rear fixed mounting of slider and have arm 10, fixed mounting has second combustor 11 on arm 10, on base station 1 and be located respectively fixed mounting have ascending electric putter between cylinder 4 and the 2 both sides gaps of slider, ascending electric putter is flexible to be served fixed mounting has the second motor, fixed mounting has third combustor 15 on the second motor drive end, first combustor 9, second combustor 11 and third combustor 15 are forked formula combustor or pipeline formula combustor, first combustor 9, second combustor 11 and third combustor 15 flame output end are the annular structure, be equipped with a plurality of nozzles 12 that the structure is the same on first combustor 9, second combustor 11 and the 15 flame output end of third combustor, a plurality of nozzle 12 is linear arrangement and is in first combustor 9, second combustor 11, On the second combustor 11 and the third combustor 15, the diameter of the output end of the nozzle 12 is 1-3mm, flow meters are arranged on the conveying pipelines of the first combustor 9, the second combustor 11 and the third combustor 15, the sliding device 2 is an electric sliding rail, the mechanical arm 10 is a 6-axis joint mechanical arm, and the fixing device 6 is a vacuum chuck.

A method for butt-extrusion welding of quartz glass members at high temperature comprises a plate-shaped quartz glass member 13 and a rod-shaped quartz glass member 14, wherein the plate-shaped quartz glass member 13 is respectively arranged on a fixing device, the rod-shaped quartz glass member is arranged on a clamp, flame is conveyed by a first burner and a third burner to heat and soften the surface of the plate-shaped quartz glass member 13 and the joint surface of the rod-shaped quartz glass member 14, the plate-shaped quartz glass member 13 and the rod-shaped quartz glass member 14 are pressed and butted, the joint surface of the rod-shaped quartz glass member 14 is in a convex structure or a plane structure, the distance from the top end of the convex structure or the plane structure of the joint surface of the rod-shaped quartz glass member 14 to the surface of the plate-shaped quartz glass member 13 is 1-20mm, the section of the convex structure of the joint surface of the rod-, the inclined angle of the inclined edge of the trapezoid structure, the wedge structure or the conical structure is 2-20 degrees, the conveying flame is positioned on two sides of the trapezoid structure, the wedge structure, the conical structure or the plane structure, and the included angle between the direction of the conveying flame and the end face of the plate-shaped quartz glass component 13 is 5-45 degrees.

The following working principles, detailed connecting means thereof, and the following main descriptions of the working principles and processes thereof are well known in the art, and will be referred to by those skilled in the art for the specific connection and operation sequence of the components in the present disclosure.

Example (b): as can be seen from fig. 1 to 4 of the specification, a plurality of rod-shaped silica glass members 14 are supported by a jig 3, plate-shaped silica glass members 13 are fixed by fixing devices 6, the rod-shaped silica glass members 14 and the plate-shaped silica glass members 13 are moved relative to each other by cylinders 4 and electric slide rails, pressure is applied from the vertical direction to perform press bonding, and the rod-shaped members can be simultaneously press bonded by applying pressure from the direction vertical to the bonding region while heating with flames of a first burner 9 and a third burner 15;

since the bonding surface of the rod-like silica glass member 14 is a convex structure or a flat structure, the cross-sectional shape of the convex structure is an included angle between the oblique side of a trapezoidal structure, a wedge structure, or a cone structure and the horizontal plane is 2 to 20 °, and the distance between the tip of the convex structure or the flat structure of the rod-like silica glass member 14 and the plate-like silica glass member 13 is 1 to 20mm, if the plate-like silica glass member 13 and the end surface of the rod-like glass member 14 are brought into contact with each other, a time for softening the silica glass is required, and therefore, during this time, the flame and the radiant heat reflected from the plate-like silica glass member 13 are crossed as a reflected flow, and as a result, the wall surface around the end surface of the rod-like glass member 14 is melted by the radiant heat, the outer peripheral wall surface is deformed into an expanded shape by the reflected flow, and, if the distance between the, the flame flow from the burner is liable to be trapped between the members, and the same deformation is liable to occur due to the difference in the flow of the gas. If the diameter exceeds 20mm, the heating efficiency is deteriorated and a strong flame flow is required, the flame outputs of the first burner 9 and the third burner 15 are located on both sides of the convex structure or the planar structure of the rod-shaped silica glass member 14, the angle of the flame output and the plate-shaped silica glass member 13 are 5 to 45 degrees, and a bifurcated burner or a line burner is used for each of the first burner 9, the second burner 11 and the third burner 15;

the joining end face of the rod-shaped silica glass member 14 is processed in advance into a convex structure or a planar structure, and by forming the joining end face into a convex shape, the center portion of the end face is softened first at the time of heating, and further, by applying pressure, the joining end face is pressed in order from the center portion of the end face toward the outer peripheral portion, and therefore, bubbles are not easily generated on the welding surface, and even if bubbles are generated, the bubbles escape in the outward direction, and therefore, the bubbles are not. In addition, since the welding is performed from the center to the outside in order, the welding strength can be improved even if the heating amount is small, and the deformation of the welding surface can be prevented;

the flame is fed from both sides of the convex structure or the flat structure by the heating of the first burner 9 and the third burner 15, and the welding portion is relatively heated, and the distance from the flame ports of the first burner 9 and the third burner 15 to the outer peripheral surface of the rod-like silica glass member 14 is 10 to 30 mm. It is preferable that the flame angles of the first burner 9 and the third burner 15 are heated to face each other at a flame angle of 5 to 45 degrees with respect to the surface of the plate-like silica glass member 13 to be welded, and if the flame angle of the first burner 9 and the third burner 15 is less than 5 degrees, the peak of the convex portion of the rod-like silica glass member 14 is softened too fast as compared with other welded portions, the balance is deteriorated, the welding strength as a whole is lowered, and if it is more than 45 degrees, on the contrary, the outer peripheral surface of the convex member is too early as compared with other welded portions, the outer peripheral shape after welding is deformed in a shape bulging outward, and a surface layer of the plate-like silica glass member 13 is also dented;

the flame output ends of the first, second and

third burners

9, 11 and 15 are in an annular structure, and a plurality of nozzles 12 having the same structure are provided, the nozzles 12 are linearly arranged, the nozzles 12 are formed in a linear structure at the ring portion by the annular structure of the flame output ends of the first, second and

third burners

9, 11 and 15, and the supplied oxyhydrogen gas mixture circulates in the gas line, so that the deviation of the gas flow in the supply line caused by the positions of the nozzles 12 can be eliminated, each of the nozzles 12 can have the same shape, and a uniform gas flow can be provided, thereby providing a uniform flame;

when in use, the rod-shaped quartz glass member 14 is fixedly arranged on the fixture 3, the plate-shaped quartz glass members 13 are respectively fixedly arranged on the fixing device 6, the plate-shaped quartz glass member 13 is driven by the electric rotating disc 5 to rotate to adjust the butt joint position, the air cylinder 4 and the electric sliding rail are started, the distance between the plate-shaped quartz glass member 13 and the rod-shaped quartz glass member 14 is adjusted, the transverse electric push rod 8, the longitudinal electric push rod 7, the first motor, the ascending electric push rod and the second motor are started to adjust the flame spraying positions and angles of the first burner 9 and the third burner 15, the first burner 9 and the third burner 15 are started, the sprayed flame sprays flame on the joint surface of the rod-shaped quartz glass member 14, and the electric sliding rail and the air cylinder 4 are started at the same time, so that the rod-shaped quartz glass member 14 and the plate-shaped quartz glass member 13 move towards each other to, after the press-bonding, the suction of the plate-like quartz glass member 13 by the fixing device 6 is released, the first burner 9 and the third burner 15 are moved and retracted in the vertical direction, respectively, and the seal-welding of the press-bonded part is performed by the second burner 11 attached to the robot arm 10, and similarly, the above-described steps are repeated to press-bond the other end of the plate-like quartz glass member 13 and the other end of the rod-like quartz glass member 14.

The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.

Claims

1. The device for high-temperature butt-extrusion welding of the quartz glass component comprises a base platform (1) and is characterized in that a sliding device (2) is fixedly mounted on the base platform (1), a clamp (3) is fixedly mounted on the sliding device (2), air cylinders (4) are respectively and fixedly mounted on two sides of the sliding device on the base platform (1), electric turntables (5) are respectively and fixedly mounted on telescopic ends of the air cylinders (4), fixing devices (6) are respectively and fixedly mounted on rotating ends of the electric turntables (5), a longitudinal electric push rod (7) is fixedly mounted on an upper wall surface of each air cylinder (4), a transverse electric push rod (8) is fixedly mounted on the telescopic end of each longitudinal electric push rod (7), a support rod is fixedly mounted on the telescopic end of each transverse electric push rod (8), a first motor is fixedly mounted on the support rod, a first combustor (9) is fixedly mounted on a driving end of the first motor, on base station (1) and be located slider (2) rear fixed mounting have arm (10), fixed mounting has second combustor (11) on arm (10), on base station (1) and be located respectively fixed mounting have ascending electric putter between cylinder (4) and slider (2) both sides gap, ascending electric putter is flexible to be served fixed mounting and is served the second motor, third combustor (15) are served in second motor drive.

2. A high temperature butt-extrusion welding apparatus for silica glass members as claimed in claim 1, wherein said first burner (9), said second burner (11) and said third burner (15) are branched burners or in-line burners.

3. The device for high-temperature extrusion welding of the quartz glass component according to claim 1, wherein the flame output ends of the first burner (9), the second burner (11) and the third burner (15) are in an annular structure, a plurality of nozzles (12) with the same structure are arranged on the flame output ends of the first burner (9), the second burner (11) and the third burner (15), and the plurality of nozzles (12) are linearly arranged on the annular structure of the flame output ends of the first burner (9), the second burner (11) and the third burner (15).

4. A high temperature butt-extrusion quartz glass unit according to claim 3, wherein the diameter of the outlet end of the nozzle (12) is 1-3 mm.

5. A high temperature butt-extrusion welding quartz glass unit according to claim 1, characterized in that flow meters are provided in the delivery lines of the first burner (9), the second burner (11) and the third burner (15).

6. A high temperature butt-extrusion welding quartz glass unit according to claim 1, characterized in that said sliding means (2) is an electric slide rail.

7. A high temperature butt-extrusion welding apparatus for quartz glass members according to claim 1, wherein said robot arm (10) is a 6-axis joint robot arm, and said fixing device (6) is a vacuum chuck.

8. A method for high-temperature butt-extrusion welding of quartz glass members comprises a plate-shaped quartz glass member (13) and a rod-shaped quartz glass member (14), and is characterized in that the plate-shaped quartz glass member (13) is respectively installed on a fixing device, the rod-shaped quartz glass member is installed on a clamp, flame is conveyed through a first burner and a third burner to heat and soften the surface of the plate-shaped quartz glass member (13) and the joint surface of the rod-shaped quartz glass member (14), the plate-shaped quartz glass member (13) and the rod-shaped quartz glass member (14) are pressed and butted, the joint surface of the rod-shaped quartz glass member (14) is in a convex structure or a plane structure, and the distance from the top end of the convex structure or the plane structure of the joint surface of the rod-shaped quartz glass member (14) to the surface of the plate-shaped quartz glass member (.

9. A method for high temperature butt-extrusion welding of quartz glass units according to claim 8, characterized in that the joint surface of the rod-shaped quartz glass units (14) is a convex structure or a plane structure, the cross-sectional shape of the convex structure is a trapezoid structure or a wedge structure or a cone structure, the inclined angle of the inclined side of the trapezoid structure, the wedge structure and the cone structure is 2-20 degrees, and the conveying flame is positioned at two sides of the trapezoid structure or the wedge structure or the cone structure or the plane structure.

10. A method for high temperature butt-extrusion welding of quartz glass components according to claim 8, characterized in that the direction of the conveying flame is at an angle of 5-45 degrees to the end faces of the plate-like quartz glass component (13).