CN113998872B - Quartz spiral plate processing method - Google Patents
Quartz spiral plate processing method Download PDFInfo
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- CN113998872B CN113998872B CN202111203175.9A CN202111203175A CN113998872B CN 113998872 B CN113998872 B CN 113998872B CN 202111203175 A CN202111203175 A CN 202111203175A CN 113998872 B CN113998872 B CN 113998872B
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- product
- quartz
- lathe
- switching
- shaft
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- 239000010453 quartz Substances 0.000 title claims abstract description 64
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 64
- 238000003672 processing method Methods 0.000 title claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 238000005520 cutting process Methods 0.000 claims abstract description 4
- 238000003466 welding Methods 0.000 claims description 8
- 239000000047 product Substances 0.000 description 32
- 239000007789 gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 241001391944 Commicarpus scandens Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/0235—Re-forming glass sheets by bending involving applying local or additional heating, cooling or insulating means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
The invention discloses a quartz spiral plate processing method, which comprises the following steps that a, a slat with corresponding size is manufactured according to a quartz spiral plate to be processed, the slat is made of quartz, a product A is obtained, B, one end of the product A is fixed, the product A is heated section by flame, the corresponding section area of the product A is softened, and a certain angle is twisted at the other end of the product A every time the product A is softened, so that a product B is obtained; c. cutting off two ends of the B product to obtain a finished product; in the step b, the A product is heated segment by segment at least by 6 segments, and after each heating segment, the other end of the A product is twisted for 0.5 circle; in the step b, the other end of the A product is fixed on a back center (2) of the lathe by using one switching clamp (1), one end of the A product is fixed on a chuck (3) of the lathe by using the other switching clamp (1), and the other end of the A product is driven to twist by rotating the back center (2). The invention has the advantages of high production efficiency and difficult fracture of the obtained quartz spiral plate.
Description
Technical Field
The invention belongs to the field of semiconductor processing equipment.
Background
As shown in fig. 4, a quartz cylinder in a semiconductor processing apparatus is used for preheating an oxyhydrogen gas mixture. The two ends of the quartz cylinder are respectively provided with an air inlet and an air outlet, a quartz spiral plate is arranged in the quartz cylinder, hydrogen and oxygen are introduced from the air inlet and are fully and uniformly mixed under the action of the quartz spiral plate to form oxyhydrogen mixed gas, and the oxyhydrogen mixed gas is discharged from the air outlet. In the process that the oxyhydrogen mixed gas passes through the quartz cylinder, the semiconductor processing equipment can heat the quartz cylinder, and the heat of the quartz cylinder is transferred to the oxyhydrogen mixed gas, so that the oxyhydrogen mixed gas is preheated. The diameter of the quartz spiral plate is about 100mm, the thickness is 2.5-3mm, the length is about 255mm, and the number of spiral turns is 2.5.
In the existing quartz spiral plate processing method, 5 quartz material strips are taken, the strips are heated to a softened state by a flame spray gun for high-speed spraying, then the strips are twisted for half a turn, and then the 5 twisted strips are welded into the quartz spiral plate. The quartz spiral plate is manufactured by directly twisting a long ribbon board for 2.5 circles, the main reasons are that the flame heating coverage area is small, the cooling speed of quartz is high, the softening temperature requirement is high, after the length of the ribbon board is overlong, when flame moves from one area of the ribbon board to another area, the heated area is quickly hardened, the whole ribbon board is difficult to reach the softening temperature or higher even temperature, irregular deformation can occur when twisting is performed, the quality cannot be ensured, the yield is very low, if a plurality of flame spray guns are used for simultaneously heating the ribbon board, the jetting force of the ribbon board is overlarge, the whole deformation is overlarge in the heating stage, and the ribbon board is difficult to form into a spiral shape.
The existing quartz spiral plate can be manufactured, but a welding seam is difficult to avoid in the welding process, so that the surface smoothness of the quartz spiral plate is poor, a certain deviation exists in the twisted shape of each slat, the two twisted slats are difficult to align completely when being butted, step difference is formed at the butted position, the surface smoothness of the Dan Yingluo spiral plate is poor, and the quartz spiral plate can be used, but the appearance is very poor and is difficult to sell. In order to improve the flatness of the surface of the quartz spiral plate, it is necessary to polish and polish the welded portion, and the quartz is fragile due to the polishing on the spiral curved surface, so that the polishing efficiency is low, that is, the production efficiency of the quartz spiral plate is low. Furthermore, the stresses left after welding also lead to the quartz spiral plate being prone to fracture at the weld.
Therefore, the existing quartz spiral plate processing method has the defects of low production efficiency and easiness in breakage of the obtained quartz spiral plate.
Disclosure of Invention
The invention aims to provide a processing method of a quartz spiral plate. The invention has the advantages of high production efficiency and difficult fracture of the obtained quartz spiral plate.
The technical scheme of the invention is as follows: a processing method of a quartz spiral plate comprises the following steps,
a. manufacturing a slat with corresponding size according to the quartz spiral plate to be processed, wherein the slat is made of quartz to obtain a product A,
b. fixing one end of the A product, heating the A product section by flame to soften the corresponding section area of the A product, and twisting the other end of the A product by a certain angle every time the corresponding section area is softened to obtain the B product;
c. cutting off two ends of the B product to obtain the final product.
In the above-mentioned quartz spiral plate processing method, in the step b, the product a is heated segment by at least 6 segments, and after each heating segment, the other end of the product a is twisted by 0.5 turn.
In the above-mentioned quartz spiral plate processing method, in the step b, another end of the product a is fixed on the back center of the lathe by using one adapting clamp, one end of the product a is fixed on the chuck of the lathe by using another adapting clamp, and the other end of the product a is driven to twist by rotating the back center.
In the quartz spiral plate processing method, a socket matched with the end part of the product A is arranged on one side of the switching clamp, a jack is arranged in the middle of the socket, a positioning shaft is arranged in the jack, a switching shaft coaxial with the positioning shaft is arranged at the other end of the switching clamp, and a positioning hole is formed in the end face of the switching shaft.
In the foregoing quartz spiral plate processing method, in the step b, the positioning shaft of one switching fixture is clamped on the chuck of the lathe, then the hand wheel on the lathe is rocked to make the rear center move towards the switching fixture until the rear center is inserted into the positioning hole and tightly pushes the switching shaft, then the rear center and the switching shaft are welded to each other, the welding position is heated for several times to eliminate stress, the chuck is loosened, and the positioning shaft is taken down; and then clamping the adapter shaft of the other adapter clamp on the chuck of the lathe.
In the quartz spiral plate processing method, a rotatable reference plate is arranged on a tool rest of the lathe, and the reference plate is rotated to the lower side of a heating section of the product A before the product A is extruded; in the step b, after the other end of the product A is twisted each time, a hand wheel on the lathe is rocked at uniform speed, so that the rear center moves towards the product A at uniform speed, the product A is extruded, and a heating section on the product A is attached to the reference plate.
Compared with the prior art, the spiral quartz plate is obtained by directly twisting the strip plates in a section-by-section heating and section-by-section twisting mode, and the spiral quartz plate is formed by twisting one strip plate, so that the surface smoothness of the spiral quartz plate is good without splicing, and stress accumulation left by welding is avoided, so that the spiral quartz plate is not easy to break, a large amount of polishing time is saved, and the production efficiency of the spiral quartz plate is improved.
According to the invention, one end of the strip plate is fixed by using the chuck of the lathe, the other end of the strip plate is driven to rotate by using the back center of the lathe, the same axis of each torsion of the strip plate is ensured by using the high coaxiality between the chuck and the back center, the high straightness of the obtained spiral quartz plate is ensured, the spiral quartz plate has a regular shape, and the spiral quartz plate is convenient to sell.
The lath is fixed on the lathe through the switching anchor clamps, through optimizing the structure of switching anchor clamps and the fixed method of switching anchor clamps on the lathe, further make the axis of lath torsion at every turn the same, ensure that the straightness accuracy of the spiral quartz plate that obtains is high, makes the appearance of spiral quartz plate regular.
The twisted heating sections are attached to the reference plate through the heating sections of the extrusion strip plates, the heating sections are straightened through the reference plate, the shape of each heating section is ensured to be consistent, and then the consistency among all areas on the spiral quartz plate is ensured to be good, so that the shape of the spiral quartz plate is regular.
Therefore, the invention has the advantages of high production efficiency, difficult fracture of the obtained quartz spiral plate and regular appearance of the obtained quartz spiral plate.
Drawings
Fig. 1 is an elevation view of a lathe.
Fig. 2 is a front view of the transfer clip.
Fig. 3 is a schematic perspective view of the transfer jig.
Fig. 4 is a front view of a quartz tube.
Fig. 5 is a front view of article B.
The marks in the drawings are: the tool comprises a 1-switching clamp, a 2-back center, a 3-chuck, a 4-socket, a 5-jack, a 6-positioning shaft, a 7-switching shaft, an 8-positioning hole, a 9-hand wheel, a 10-tool rest, an 11-reference plate, a 12-bearing and 13-screws.
Detailed Description
The invention is further illustrated by the following figures and examples, which are not intended to be limiting.
Examples. A processing method of a quartz spiral plate comprises the following steps,
a. and manufacturing a slat with a corresponding size according to the quartz spiral plate to be processed, wherein the slat is made of quartz, and the product A is obtained.
b1, manufacturing two switching clamps, wherein one side of the switching clamp 1 is provided with a jack 4 matched with the end part of an A product, the middle part of the jack 4 is provided with a jack 5, a positioning shaft 6 is arranged in the jack 5, the other end of the switching clamp 1 is provided with a switching shaft 7 coaxial with the positioning shaft 6, and the end surface of the switching shaft 7 is provided with a positioning hole 8;
b2, clamping a positioning shaft 6 of one transfer fixture 1 on a chuck 3 of a lathe (the existing horizontal common lathe), then shaking a hand wheel 9 on the lathe to enable the back center 2 to move towards the transfer fixture 1 until the back center 2 is inserted into a positioning hole 8 and tightly props against the transfer shaft 7, then welding the back center 2 and the transfer shaft 7, heating for a plurality of times at the welding position to eliminate stress, loosening the chuck 3, removing the positioning shaft 6, shaking the hand wheel 9 on the lathe to enable the transfer fixture 1 on the back center 2 to be far away from the chuck 3;
b3, clamping the transfer shaft 7 of the other transfer clamp 1 on the chuck 3 of the lathe, and removing the positioning shaft 6 on the other transfer clamp 1;
b4, manufacturing a reference plate 11, wherein one end of the reference plate 11 is connected to a tool rest 10 of a lathe through a bearing 12, and the bearing 12 is connected to the tool rest 10 through a screw 13;
b5, inserting one end of the product A into the socket 4 of the switching clamp 1 fixed by the chuck 3, and rocking the hand wheel 9 on the lathe to enable the switching clamp 1 on the back center 2 to move towards the product A until the other end of the product A is inserted into the socket 4 of the switching clamp 1 on the back center 2;
b6, heating the A product section by using a flame spray gun, wherein the lengths of all the sections are the same, the temperature of the heating section is required to reach more than 1700 ℃ to soften the corresponding section, and after one section is softened, the center 2 drives the other end of the A product to twist for 0.5 circle after rotating, and quartz in the areas on two sides of the heating section is not softened and cannot deform, so that the heating section is twisted and deformed into a spiral shape; before the heating section is solidified, the knife rest 10 is axially moved to enable the rotary reference plate 11 to be positioned on one side of the heating section, the reference plate 11 is rotated to enable the end portion of the reference plate 11 to be positioned below the heating section, at the moment, the gap between the reference plate 11 and the heating section is kept at 0.1-1mm, the hand wheel 9 on the lathe is uniformly shaken, the rear center 2 is enabled to move towards the A product at a uniform speed, the A product is slightly extruded, the bottom of the heating section is attached to the reference plate 11 until the heating section is cooled and solidified, and the solidified heating section is a quartz spiral plate of 1/5 section; the A product is B product after 8 times of heating and torsion
c. Cutting off two ends of the B product, and keeping for 2.5 circles to obtain the finished product of the quartz spiral plate.
Claims (2)
1. A quartz spiral plate processing method is characterized in that: comprises the steps of,
a. manufacturing a slat with corresponding size according to the quartz spiral plate to be processed, wherein the slat is made of quartz to obtain a product A,
b. fixing one end of the A product, heating the A product section by flame to soften the corresponding section area of the A product, and twisting the other end of the A product by a certain angle every time the corresponding section area is softened to obtain the B product;
c. cutting off two ends of the B product to obtain a finished product;
in the step b, the other end of the A product is fixed on a back center (2) of the lathe by using one switching clamp (1), one end of the A product is fixed on a chuck (3) of the lathe by using the other switching clamp (1), and the other end of the A product is driven to twist by rotating the back center (2);
one side of the switching clamp (1) is provided with a jack (4) matched with the end part of the A product, the middle part of the jack (4) is provided with a jack (5), a positioning shaft (6) is arranged in the jack (5), the other end of the switching clamp (1) is provided with a switching shaft (7) coaxial with the positioning shaft (6), and the end face of the switching shaft (7) is provided with a positioning hole (8);
a rotatable reference plate (11) is arranged on a tool rest (10) of the lathe, and the reference plate (11) is rotated to the lower side of a heating section of the product A before the product A is extruded; in the step b, after the other end of the product A is twisted each time, a hand wheel (9) on the lathe is rocked at uniform speed, so that the rear center (2) moves towards the product A at uniform speed, the product A is extruded, and a heating section on the product A is attached to a reference plate;
in the step b, the A product is heated segment by segment at least by 6 segments, and after each heating segment, the other end of the A product is twisted for 0.5 circle.
2. The quartz spiral plate processing method according to claim 1, wherein: in the step b, a positioning shaft (6) of one transfer fixture (1) is clamped on a chuck (3) of a lathe, a hand wheel (9) on the lathe is rocked, the rear center (2) is moved towards the transfer fixture (1) until the rear center (2) is inserted into a positioning hole (8) and tightly abuts against the transfer shaft (7), the rear center (2) and the transfer shaft (7) are welded, the welding position is heated for a plurality of times to eliminate stress, the chuck (3) is loosened, and the positioning shaft (6) is taken down; and then clamping the switching shaft (7) of the other switching clamp (1) on the chuck (3) of the lathe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111203175.9A CN113998872B (en) | 2021-10-15 | 2021-10-15 | Quartz spiral plate processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111203175.9A CN113998872B (en) | 2021-10-15 | 2021-10-15 | Quartz spiral plate processing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113998872A CN113998872A (en) | 2022-02-01 |
| CN113998872B true CN113998872B (en) | 2023-09-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202111203175.9A Active CN113998872B (en) | 2021-10-15 | 2021-10-15 | Quartz spiral plate processing method |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR903860A (en) * | 1943-05-11 | 1945-10-19 | Method of manufacturing and shaping glass objects preferably in the form of tubes or rods | |
| US5158589A (en) * | 1991-12-13 | 1992-10-27 | Texas Instruments Incorporated | Lathe system and methodology |
| JP4583938B2 (en) * | 2005-01-13 | 2010-11-17 | 信越化学工業株式会社 | Method and apparatus for processing quartz glass rod |
| CN110127993A (en) * | 2019-05-17 | 2019-08-16 | 湖州东科电子石英有限公司 | The welding procedure of opaque quartz plate and suprasil stick |
| CN110342796B (en) * | 2019-08-15 | 2024-07-26 | 连云港睿晶石英材料有限公司 | Horizontal spiral drawing machine for quartz glass rod |
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Denomination of invention: A processing method for quartz spiral plates Granted publication date: 20230901 Pledgee: Nanxun Zhejiang rural commercial bank Limited by Share Ltd. Pledgor: Huzhou dongke electronic quartz Co.,Ltd. Registration number: Y2024980018806 |