CN117902817A - Welding method for avoiding bubble gas line - Google Patents

Abstract

The invention discloses a welding method for avoiding bubble gas lines, which comprises the following steps: s1: determining a welding area structure, wherein the welding area structure comprises a wide welding line and a drop type welding line; s2: selecting a welding rod specification according to the type of the welding area; s3: the welding rod is inclined to correspond to the welding area by adopting regional welding, and in the welding process, the angle is kept stable before the single pass welding is completed; s4: the welding gun is arranged in the included angle range between the welding rod and the welding bead, and synchronously moves along with the welding rod. In the welding process, the contact area between the welding area and the welding rod is improved by adopting a mode of inclining the welding rod, so that air at the welding position is extruded out as much as possible, and a sufficient angle is reserved for completing flame coverage, thereby improving the melting degree of the welding wire and reducing the possibility of bubble gas line generation.

Description

Welding method for avoiding bubble gas line

Technical Field

The invention relates to the technical field of semiconductor processing, in particular to a welding method for avoiding bubble gas lines.

Background

And when the quartz windrow with large area is welded, bubble gas lines are easy to appear, after the bubble gas lines appear, grinding and digging are needed, and the welding is performed again, and when the welding is performed again, the problem of uneven stress distribution of the first welding is caused, and the quartz windrow is easy to crack after being locally heated. In the prior art, welding is performed by stacking the welding rods in parallel between layers after melting (see fig. 1), and when the welding is performed in a large area, the welding is necessarily performed in a region-by-region manner due to the large welding area (see fig. 2), the connection area between the first region 1 and the second region 2 and the connection area between the first region 3 and the third region 3 are changed into a state that the region edges are perpendicular to the welding bottom surface, and when the welding in the next region is performed by the same method, small air lines or air bubbles are easily generated at the region edges due to insufficient melting of the vertical surfaces and gaps between the welding rod edges and the region edges in parallel (see fig. 3). Resulting in a loss of work before welding.

For example, "a low-hydroxyl high-purity quartz rod/tube and a preparation method thereof", which is disclosed in Chinese patent literature, the publication number of which is CN111320357B, comprises: s1, preparing quartz powder into slurry, adding a forming agent, and vacuumizing and stirring; s2, pressurizing and injecting the slurry into a stainless steel mold, adding vibration while pouring, and standing; s3, placing the stainless steel die at 60-100 ℃ for heat preservation for 4-8 hours, and demolding to obtain a blank; s4, naturally drying the blank for 12-24 hours, and then heating and drying for 24-48 hours; s5, performing vitrification treatment on the blank in a vacuum sintering furnace to obtain a quartz rod/tube blank; s6, respectively welding a quartz handle and a tail handle at two ends of the quartz rod/tube blank, hanging the quartz handle at the top of the intermediate frequency furnace, and supporting the bottom by the quartz tail handle; s7, heating to gradually soften and deform the bottom of the blank, and adjusting the drawn diameter to obtain the low-hydroxyl high-purity quartz bar/pipe.

The preparation method of the low-hydroxyl high-purity quartz rod/pipe solves the problems of impurity introduction, bubble generation, gas line generation, stripe generation and the like. But still can not ensure that the traditional welding process adopting the interlayer parallel phase-pressed stacking is easy to have the phenomenon of insufficient melting and generate the problem of gas line bubbles when aiming at a large-area welding area or a welding area with a height difference.

Disclosure of Invention

Aiming at the problem that bubbles of gas lines are easily generated by the phenomenon of insufficient melting in the traditional welding process of parallel lamination between layers when aiming at a large-area welding area or a welding area with a height difference in the prior art, the invention provides a welding method for avoiding generating bubbles of gas lines.

In order to achieve the above purpose, the present invention adopts the following technical scheme:

A welding method for avoiding bubble gas lines comprises the following steps:

S1: determining a welding area structure, wherein the welding area structure comprises a wide welding line and a drop type welding line;

S2: selecting a welding rod specification according to the type of the welding area;

s3: the welding rod is inclined to correspond to the welding area by adopting regional welding, and in the welding process, the angle is kept stable before the single pass welding is completed;

s4: the welding gun is arranged in the included angle range between the welding rod and the welding bead, and synchronously moves along with the welding rod.

In the method, a proper welding method is required to be selected according to the specific structure of the welding seam, particularly in the traditional welding scheme, the difficult conditions comprise a wide welding seam and a drop type welding seam, wherein the wide welding seam refers to the welding work that the distance between adjacent quartz parts is larger, the width of the welding seam is larger, and the strength of the welding seam is influenced; the drop type welding seam is that the two quartz parts to be welded have the height difference, and the structure has the same difficulty and hidden strength trouble during welding. The welding method disclosed by the application aims at the difficult work and is used for regional welding of the traditional technology, the welding rod serving as a welding medium is obliquely inserted into the welding seam, and a welding gun is arranged in the included angle range between the quartz component to be welded and the welding rod, so that the fusion temperature can be ensured to reach the standard in the welding process, and the possibility of generating the bubble gas line is reduced.

Preferably, in S3, the step-up welding is performed with respect to the head-type welding bead, that is, the subsequent welding bead is overlapped on the upper side of the previous welding bead during welding, and the overlapping direction of the welding bead extends toward the higher side of the welding bead. For the drop-type welding seam, the application creatively adopts a mode of heightening layer by layer during welding, and a single welding bead formed by each welding is overlapped layer by layer in the width direction and is formed from a shorter side quartz part to a higher side quartz part one by one, and finally, the high side quartz part and the low side quartz part are welded. The welding mode of transverse stacking can strengthen the welding bead strength layer by layer, and ensure that the welding quality meets the requirements.

Preferably, at least two welding guns are arranged in the S4, the two welding guns are respectively arranged at two sides of the welding rod, and the planes of the welding guns and the welding rod are perpendicular to the welding bead. The welding guns are used for heating the welding rods at the welding joints through flames to form a molten state with the edges of the welding parts so as to be convenient for connection and formation, and the welding guns are used for uniformly heating the two sides of the welding rods under the combined action of the welding guns arranged at the two sides of the welding rods, so that the welding rods form surrounding flame heating, and bubbles or gas lines caused by the fact that tiny bubbles enter the welding joints are avoided.

Preferably, the S3 comprises a support piece for maintaining the angle stability of the welding rod, the support piece comprises a connecting base and an orientation rail arranged on the connecting base, and an adjustable clamping seat for clamping the welding rod is arranged on the orientation rail. The support is used for ensuring that a welding rod moving along a welding line in a single welding process moves stably and the angle is unchanged, because the unstable welding rod angle can cause defects and air lines or bubbles in the welding process, and the base can select the mounting position according to the specific structure of a quartz component to be welded, so that the extending direction of the directional rail is ensured to be consistent with a target welding line, and the welding rod is ensured to move stably along the welding line.

Further, the adjustable clamping seat comprises a sliding table which is connected with the directional rail in a sliding way, a clamping assembly is arranged on the sliding table, and the clamping assembly comprises a welding rod clamping port. The sliding table is used for assisting the adjustable clamping seat to smoothly move, and welding rod and welding gun are ensured to move at a uniform speed along a welding seam to finish welding. The sliding table is provided with a driving motor for driving the sliding table to reciprocate on the directional rail according to the demands of operators.

Preferably, a swivel base is arranged between the welding rod clamping opening and the sliding table, and a first hinge joint is further arranged between the swivel base and the welding rod clamping opening. When the mounting position of the base does not accord with the extending position of the welding line, the rotating seat is matched with the position of the base to conduct angle adjustment, so that the moving track of the adjustable clamping seat corresponds to the target welding line, the angles are consistent, and the length is covered. The arrangement of the first hinge joint can ensure that the orientation angle of the welding rod can be pre-adjusted before welding, thereby ensuring that the welding rod is aligned with the welding seam to assist welding work. An auxiliary motor is arranged on the rotary seat and used for accurately controlling the angle of the rotary seat.

Preferably, the clamping assembly comprises at least one welding gun clamping opening, and a second hinge joint is arranged between the welding gun clamping opening and the swivel base; and the welding gun clamping opening is arranged at the side of the welding rod clamping opening. The welding gun clamping opening is used for clamping a welding gun, the welding gun is guaranteed to be matched with a welding rod to finish welding work jointly, the second hinge joint is used for enabling an operator to quickly adjust the angle of the welding gun, welding gun flames can be guaranteed to accurately cover welding seams, and a uniform melting area is formed to achieve welding.

Further, the first hinge joint and the second hinge joint are damping hinge joints. The damping hinges are adopted for the first hinge joint and the second hinge joint, the damping hinges have a positioning function, and the hinge movement can be stopped at a specific position, so that an operator can keep the position and the angle unchanged under the condition of not being interfered by external force after adjusting the welding rod and the welding gun to a preset angle and position, the direction of a welding seam can be kept stable in the moving process of the sliding seat along the directional rail, and the quality stability of the welding seam is ensured.

Therefore, the application has the following beneficial effects: (1) In the welding process, a contact area between a welding area and a welding rod is increased by adopting a mode of inclining the welding rod, so that air at a welding position is extruded out as much as possible, and a sufficient angle is reserved for completing flame coverage, thereby improving the melting degree of the welding wire and reducing the possibility of generating bubble gas lines; (2) For the drop type welding seam, the welding method creatively adopts a mode of 'layer-by-layer heightening', and the welding mode of transverse stacking can strengthen the welding bead strength layer by layer during welding, so that the welding quality meets the requirements; (3) The directional rail is matched with the swivel base, so that the welding rod and the welding gun are ensured to be adjusted to an angle synchronous with the track of the welding line before welding, and the angle is kept stable and the speed is uniform in the welding process.

Drawings

Fig. 1 is a schematic diagram of an interlayer parallel press-stacked welding in the background art.

Fig. 2 is a schematic diagram of a split zone weld in the background art.

Fig. 3 is a schematic view showing the arrangement of a conventional welding rod during welding.

Fig. 4 is a schematic view of the arrangement of the welding rod in the present application.

Fig. 5 is a schematic structural view of the support member in the present application.

Fig. 6 is a schematic view of the operation of the support member of the present application.

In the figure: 100. a welding rod, 200, a support; 1. the welding gun comprises a first area, 2, a second area, 3, a third area, 4, a base, 5, a directional rail, 6, a sliding table, 7, a welding rod clamping opening, 71, a welding gun clamping opening, 8, a rotating seat, 81, a first hinge joint, 82, a second hinge joint, 9, an auxiliary motor, 91, a driving motor, 10 and a welding gun.

Detailed Description

The invention is further described below with reference to the drawings and detailed description. Examples of the embodiments are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality.

Example 1

In this embodiment, the welding principle of the quartz member is mainly based on its high-temperature sintering property. Quartz parts are susceptible to breakage during hot working, and therefore special welding techniques are required. The main principle of quartz welding is to weld two quartz glass pieces together by utilizing the high temperature sintering property of quartz members.

During the welding process, the quartz glass piece needs to be heated in a flame until the quartz glass is softened and completely sintered. It is noted that a distance needs to be maintained between the tip and the flame to avoid overheating and chipping of the quartz component.

As shown in fig. 4, this embodiment discloses a welding method for avoiding generating bubble gas lines, and the present invention adopts the following technical scheme: the method comprises the following steps: s1: determining a welding area structure, wherein the welding area structure comprises a wide welding line and a drop type welding line; s2: selecting a welding rod 100 specification according to the type of the welding area; s3: the welding rod 100 is inclined to correspond to the welding area by adopting regional welding, and in the welding process, the angle is kept stable before the single pass welding is completed; s4: the welding gun 10 is set in the range of the included angle between the welding rod 100 and the welding bead, and moves synchronously with the welding rod 100. And S3, overlapping welding is adopted for the drop type welding seam, namely, the later welding bead is overlapped above the former welding bead in welding, and the overlapping direction of the welding bead extends to the higher side of the welding seam. At least two welding guns 10 are arranged in the S4, the two welding guns 10 are respectively arranged at two sides of the welding rod 100, and the planes of the welding guns 10 and the welding rod 100 are perpendicular to the welding beads. In this embodiment, a suitable inclination angle of the welding rod may be selected according to the specific specification of the quartz member to be welded, and the inclination angle of the welding rod in the drawing is 45 °.

In the method, a proper welding method is required to be selected according to the specific structure of the welding seam, particularly in the traditional welding scheme, the difficult conditions comprise a wide welding seam and a drop type welding seam, wherein the wide welding seam refers to the welding work that the distance between adjacent quartz parts is larger, the width of the welding seam is larger, and the strength of the welding seam is influenced; the drop type welding seam is that the two quartz parts to be welded have the height difference, and the structure has the same difficulty and hidden strength trouble during welding. Because the two welding seams are limited by structures, bubble gas lines can be generated in the welding process due to insufficient melting, the welding method disclosed by the application aims at the difficult work and is used for regional welding of the traditional technology, the novel welding method disclosed by the application is innovatively optimized, the welding rod 100 serving as a welding medium is obliquely inserted into the welding seams, and the welding gun 10 is arranged in the range of an included angle between a quartz component to be welded and the welding rod 100, so that the melting temperature can be ensured to reach the standard in the welding process, and the possibility of generating the bubble gas lines is reduced. For the drop-type welding seam, the application creatively adopts a mode of heightening layer by layer during welding, and a single welding bead formed by each welding is overlapped layer by layer in the width direction and is formed from a shorter side quartz part to a higher side quartz part one by one, and finally, the high side quartz part and the low side quartz part are welded. The welding mode of transverse stacking can strengthen the welding bead strength layer by layer, and ensure that the welding quality meets the requirements. The welding guns 10 are used for heating the welding rod 100 at the welding seam by flame to form a molten state with the edge of the welding part so as to facilitate connection and formation, and the welding guns 10 arranged at the two sides of the welding rod are utilized to jointly act with the welding seam and uniformly heat the two sides of the welding rod, so that the welding rod is heated by surrounding flame, and bubbles or gas lines caused by the fact that tiny bubbles enter the welding seam are avoided. In this embodiment, considering the problem that the wide type weld or the drop type weld is liable to have insufficient melting during welding, the welding temperature and time are appropriately increased according to the actual situation, so as to ensure that the quartz member is sufficiently melted. In addition, depending on the nature of the quartz component and the welding requirements, a suitable welding rod material is selected and a sufficient filling is ensured. Particularly, in the welding process, the melting and diffusion of the quartz component can be promoted by properly increasing the pressure, so that the welding quality is improved; after welding is finished, quality detection can be performed to timely find and treat possible problems of insufficient melting. For example, nondestructive inspection methods such as X-ray inspection, ultrasonic inspection, etc. may be employed to determine whether defects exist inside the welded joint.

In addition, special attention is required to the quartz welding. Firstly, quartz has high transparency and hardness, so that the processing difficulty is high, and special cutters and processes are required to be matched. Secondly, in order to reduce the cracking problem caused by thermal stress, the temperature needs to be controlled in the welding process, and the welding is performed in a gradual heating and cooling mode. In addition, the use of an interlayer material to adjust the modulus of elasticity is also an effective solution. At the same time, it is also important to keep the welding environment dry to avoid air bubbles from entering the weld. Finally, after the welding is finished, quality detection is needed, and possible defects are found and processed in time so as to ensure the welding quality and reliability.

Example 2

As shown in fig. 5 and 6, in this embodiment, a support 200 for maintaining the angle of the welding rod stable is disclosed in S3, where the support 200 includes a connection base 4 and an orientation rail 5 disposed on the connection base 4, and an adjustable clamping seat for clamping the welding rod is disposed on the orientation rail 5. The adjustable clamping seat comprises a sliding table 6 which is connected with the directional rail 5 in a sliding way, a clamping assembly is arranged on the sliding table 6, and the clamping assembly comprises a welding rod clamping opening 7. A swivel seat 8 is arranged between the welding rod clamping opening 7 and the sliding table 6, and a first hinge joint 81 is further arranged between the swivel seat 8 and the welding rod clamping opening 7. The clamping assembly comprises at least one welding gun clamping opening 71, and a second hinge joint 82 is arranged between the welding gun clamping opening 71 and the swivel seat 8; the welding gun clamping port 71 is arranged at the side of the welding rod clamping port 7. The first hinge joint 81 and the second hinge joint 82 are both damping hinge joints.

The sliding table 6 is used for assisting the adjustable clamping seat to move smoothly, and welding rod and welding gun are ensured to move at a uniform speed along a welding seam to finish welding. The sliding table 6 is provided with a driving motor 91 for driving the sliding table 6 to reciprocate on the directional rail 5 according to the requirements of operators. The support 200 is used to ensure that the movement of the welding rod along the weld joint is stable and the angle is not changed in a single welding process, because the unstable angle of the welding rod can cause defects and air lines or bubbles in the welding process, and the base 4 can select the installation position according to the specific structure of the quartz component to be welded, so that the extending direction of the directional rail 5 is consistent with the target weld joint, and the welding rod can move stably along the weld joint. When the installation position of the base 4 does not accord with the extension position of the welding line, the swivel mount 8 cooperates with the position of the base 4 to conduct angle adjustment, so that the moving track of the adjustable clamping seat corresponds to the target welding line, the angles are consistent, and the length is covered. The arrangement of the first hinge joint 81 can ensure that the orientation angle of the welding rod can be pre-adjusted before welding, thereby ensuring that the welding rod is aligned with the welding seam to assist welding work. An auxiliary motor 9 is arranged on the rotary seat 8 and used for accurately controlling the angle of the rotary seat 8. The welding gun clamping opening 71 is used for clamping a welding gun, so that the welding gun can be matched with a welding rod to finish welding work, and the second hinge joint 82 is used for enabling an operator to quickly adjust the angle of the welding gun so as to ensure that welding gun flames can accurately cover welding seams to form a uniform melting area to realize welding. The first hinge joint 81 and the second hinge joint 82 both adopt damping hinges, have positioning functions, and can stop hinge movement at a specific position, so that an operator can keep the position and the angle unchanged without being interfered by external force after adjusting the welding rod and the welding gun to a preset angle and position, and can keep the orientation of the welding seam stable in the moving process of the sliding seat along the directional rail 5, and ensure the stable quality of the welding seam.

In this embodiment, the quartz welding steps are as follows: first, it is necessary to clean the welding surfaces and, prior to welding, it is necessary to clean the welding material to avoid the entry of oil or dirt into the weld. In addition, care is taken to control the welding temperature during the welding process to ensure that the temperature in the welding material and the welding environment is stable to avoid the generation of bubbles. The quartz rod can be heated firstly or slowly so as to ensure the temperature uniformity of the quartz rod. The surface of the quartz component to be welded is polished before welding, and scratches or depressions on the surface can be repaired by polishing, so that bubbles can be reduced.

When the welding is started, proper welding processes are used for the wide welding line and the drop type welding line, and different welding processes have different influences on the generation of bubbles, so that proper welding processes are selected according to specific situations. The wide welding seam adopts regional welding, and the drop type welding seam adopts transverse stacking type welding. Before welding, the welding area should be isolated as much as possible to avoid surrounding gases entering the weld; during the welding process, the humidity of the welding environment should be controlled as much as possible to avoid moisture entering the weld.

After the pretreatment is completed, the mounting position of the base 4 is selected according to the extending direction of the welding line, so that the extending direction of the directional rail 5 is ensured to be approximately the same as the extending direction of the welding line; after the base 4 is fixed by fixing pieces such as screws, a welding rod and a welding gun are respectively arranged in the welding rod clamping opening 7 and the welding gun clamping opening 71, the angle of the rotary seat 8 is adjusted by the auxiliary motor 9, the first hinge joint 81 and the second hinge joint 82 are combined to be matched together, the welding rod and the welding gun are ensured to be aligned with the welding seam, and in the welding process, the driving motor 91 can be used for driving the sliding table 6 to move at a constant speed along the directional rail 5, so that regional welding or transverse stacking welding is finished. In this embodiment, the welding guns disposed on both sides of the welding rod can reduce the mixing of the air flow into the molten state weld seam by the cross flame, thereby avoiding the generation of bubble air lines.

Aiming at the welding work with larger welding difficulty such as a wide welding line, a drop type welding line and the like, the application adopts auxiliary tools to complete welding in a matching way during welding, namely adopts a lens focusing method to focus laser beams to the welding line, thereby improving the melting efficiency; or adopting a layer-by-layer welding method, and adding a plurality of thin quartz plates as welding mediums on the basis of the welding rod to weld layer by layer so as to reduce the influence of the welding seam gap.

In addition to the above embodiments, the technical features of the present invention may be rearranged and combined within the scope of the claims and the disclosure of the present invention to form new embodiments, which may be realized by those skilled in the art without inventive effort, and thus, embodiments of the present invention not described in detail should be considered as embodiments of the present invention within the scope of the protection of the present invention.

Claims (8)

1. A welding method for avoiding bubble gas lines is characterized by comprising the following steps: the method comprises the following steps:

S1: determining a welding area structure, wherein the welding area structure comprises a wide welding line and a drop type welding line;

S2: selecting a welding rod specification according to the type of the welding area;

s3: the welding rod is inclined to correspond to the welding area by adopting regional welding, and in the welding process, the angle is kept stable before the single pass welding is completed;

s4: the welding gun is arranged in the included angle range between the welding rod and the welding bead, and synchronously moves along with the welding rod.

2. The welding method for avoiding bubble gas lines according to claim 1, wherein in S3, stacked welding is adopted for the drop type weld bead, that is, a later weld bead is stacked obliquely above a previous weld bead during welding, and the stacking direction of the weld bead extends to the higher side of the weld bead.

3. The welding method for avoiding bubble gas lines according to claim 1, wherein at least two welding guns are arranged in the step S4, the two welding guns are respectively arranged on two sides of a welding rod, and the planes of the welding guns and the welding rod are perpendicular to the welding bead.

4. A welding method for avoiding bubble air line according to any one of claims 1-3, wherein S3 comprises a support member for maintaining the angle of the welding rod stable, the support member comprises a connection base and a directional rail arranged on the connection base, and an adjustable clamping seat capable of clamping the welding rod is arranged on the directional rail.

5. The welding method for avoiding bubble air lines according to claim 4, wherein the adjustable clamping seat comprises a sliding table which is connected with the directional rail in a sliding way, and a clamping assembly is arranged on the sliding table and comprises a welding rod clamping port.

6. The welding method for preventing air bubbles from being generated according to claim 5, wherein a swivel seat is arranged between the welding rod clamping port and the sliding table, and a first hinge joint is further arranged between the swivel seat and the welding rod clamping port.

7. The welding method for avoiding bubble air line according to claim 6, wherein the clamping assembly comprises at least one welding gun clamping opening, and a second hinge joint is arranged between the welding gun clamping opening and the swivel base; and the welding gun clamping opening is arranged at the side of the welding rod clamping opening.

8. The welding method for avoiding bubble air line according to claim 7, wherein the first hinge joint and the second hinge joint are damped hinge joints.