CN113053778A - 太阳能电池的检查装置及检查方法 - Google Patents

太阳能电池的检查装置及检查方法 Download PDF

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Publication number
CN113053778A
CN113053778A CN202011358540.9A CN202011358540A CN113053778A CN 113053778 A CN113053778 A CN 113053778A CN 202011358540 A CN202011358540 A CN 202011358540A CN 113053778 A CN113053778 A CN 113053778A
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China
Prior art keywords
terminal pair
terminal
pair
back electrode
type
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Pending
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CN202011358540.9A
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English (en)
Chinese (zh)
Inventor
高桥昌见
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN113053778A publication Critical patent/CN113053778A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Photovoltaic Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN202011358540.9A 2019-12-26 2020-11-27 太阳能电池的检查装置及检查方法 Pending CN113053778A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-237300 2019-12-26
JP2019237300A JP7398097B2 (ja) 2019-12-26 2019-12-26 太陽電池の検査装置および検査方法

Publications (1)

Publication Number Publication Date
CN113053778A true CN113053778A (zh) 2021-06-29

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ID=76507906

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011358540.9A Pending CN113053778A (zh) 2019-12-26 2020-11-27 太阳能电池的检查装置及检查方法

Country Status (2)

Country Link
JP (1) JP7398097B2 (ja)
CN (1) CN113053778A (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010199506A (ja) * 2009-02-27 2010-09-09 Sharp Corp 半導体装置の製造方法
JP5474392B2 (ja) * 2009-03-30 2014-04-16 日置電機株式会社 回路基板検査装置および回路基板検査方法
US20120204931A1 (en) * 2009-10-29 2012-08-16 Takahiro Seike Method for manufacturing organic thin film solar cell module
JP5134075B2 (ja) * 2010-12-22 2013-01-30 シャープ株式会社 薄膜太陽電池の製造方法
CN205880059U (zh) * 2016-03-11 2017-01-11 南京汉能薄膜太阳能有限公司 一种薄膜太阳能电池内部绝缘电阻的测试装置

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Publication number Publication date
JP2021106467A (ja) 2021-07-26
JP7398097B2 (ja) 2023-12-14

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