CN113039432A - 优化自动视觉检查过程中的设置阶段 - Google Patents

优化自动视觉检查过程中的设置阶段 Download PDF

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Publication number
CN113039432A
CN113039432A CN201980074977.9A CN201980074977A CN113039432A CN 113039432 A CN113039432 A CN 113039432A CN 201980074977 A CN201980074977 A CN 201980074977A CN 113039432 A CN113039432 A CN 113039432A
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image
cluster
images
inspection
clusters
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Chinese (zh)
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约纳坦·亚特
达恩·卡蒙
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Siemens Corp
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Insecto Amway Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515Objects of complex shape, e.g. examined with use of a surface follower device
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • G06F18/20Analysing
    • G06F18/23Clustering techniques
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras
    • G06T7/73Determining position or orientation of objects or cameras using feature-based methods
    • G06T7/74Determining position or orientation of objects or cameras using feature-based methods involving reference images or patches
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/888Marking defects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10004Still image; Photographic image
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20081Training; Learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20092Interactive image processing based on input by user
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20212Image combination
    • G06T2207/20216Image averaging
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30164Workpiece; Machine component

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Data Mining & Analysis (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Evolutionary Computation (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Artificial Intelligence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
CN201980074977.9A 2018-11-18 2019-11-18 优化自动视觉检查过程中的设置阶段 Pending CN113039432A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862768934P 2018-11-18 2018-11-18
IL263097 2018-11-18
IL263097A IL263097B2 (en) 2018-11-18 2018-11-18 Optimizing a set-up stage in an automatic visual inspection process
US62/768,934 2018-11-18
PCT/IL2019/051260 WO2020100146A1 (en) 2018-11-18 2019-11-18 Optimizing a set-up stage in an automatic visual inspection process

Publications (1)

Publication Number Publication Date
CN113039432A true CN113039432A (zh) 2021-06-25

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US (1) US12524866B2 (https=)
EP (1) EP3881059A4 (https=)
JP (1) JP2022507678A (https=)
KR (1) KR20210091189A (https=)
CN (1) CN113039432A (https=)
BR (1) BR112021009487A2 (https=)
CA (1) CA3117917A1 (https=)
IL (1) IL263097B2 (https=)
MX (1) MX2021005739A (https=)
WO (1) WO2020100146A1 (https=)

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IL259285B2 (en) * 2018-05-10 2023-07-01 Inspekto A M V Ltd A system and method for detecting defects on objects in an image
IL260417B (en) 2018-07-04 2021-10-31 Tinyinspektor Ltd System and method for automated visual inspection
US11816827B2 (en) 2020-02-13 2023-11-14 Inspekto A.M.V. Ltd. User interface device for autonomous machine vision inspection
JP7537095B2 (ja) * 2020-02-18 2024-08-21 株式会社リコー 情報処理装置、プログラム、情報生成方法、情報処理システム
WO2023218441A1 (en) * 2022-05-11 2023-11-16 Inspekto A.M.V. Ltd. Optimizing a reference group for visual inspection

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JP2011232302A (ja) * 2010-04-30 2011-11-17 Ricoh Elemex Corp 画像検査方法及び画像検査装置
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US20040156540A1 (en) * 2003-02-12 2004-08-12 Kla-Tencor Technologies, Corporation Automatic supervised classifier setup tool for semiconductor defects
JP2005274157A (ja) * 2004-03-22 2005-10-06 Olympus Corp 欠陥画像検査装置及びその方法
US20080100844A1 (en) * 2006-10-31 2008-05-01 Negevtech, Ltd. Defect detection through image comparison using relative measures
CN101853797A (zh) * 2009-01-13 2010-10-06 联达科技设备私人有限公司 用于检测晶片的系统和方法
TW201118370A (en) * 2009-09-02 2011-06-01 Hermes Microvision Inc Substrate inspection method
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JP2011232302A (ja) * 2010-04-30 2011-11-17 Ricoh Elemex Corp 画像検査方法及び画像検査装置
CN103196914A (zh) * 2012-01-06 2013-07-10 株式会社其恩斯 外观检查装置和外观检查方法
CN104219996A (zh) * 2012-02-06 2014-12-17 因赛泰克有限公司 在运动器官的成像期间的参考库扩展
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CN106934794A (zh) * 2015-12-01 2017-07-07 株式会社理光 信息处理装置,信息处理方法和检查系统

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Publication number Publication date
IL263097A (en) 2020-05-31
WO2020100146A1 (en) 2020-05-22
BR112021009487A2 (pt) 2021-08-10
KR20210091189A (ko) 2021-07-21
EP3881059A1 (en) 2021-09-22
IL263097B2 (en) 2024-01-01
JP2022507678A (ja) 2022-01-18
US12524866B2 (en) 2026-01-13
CA3117917A1 (en) 2020-05-22
EP3881059A4 (en) 2022-05-11
US20220020136A1 (en) 2022-01-20
IL263097B1 (en) 2023-09-01
MX2021005739A (es) 2021-08-11

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