CN113030026A - 一种lspr多波长窄带可调谐传感器 - Google Patents
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
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Abstract
一种LSPR多波长窄带可调谐传感器,属于微纳光电子器件。在硅衬底上覆盖一层T2=1600nm的SiO2,在SiO2上覆盖一层厚度为T1=2200nm的氧化铝。将制备的石墨烯固定在Al2O3上,其上E字形金纳米颗粒周期排列。其周期P为1500nm,纳米颗粒长度和宽度t1=600nm,t2=120nm,t3=440nm,厚度h=30nm。本发明利用Au纳米颗粒有序阵列在非对称介质环境下与平板波导的耦合,产生Fano效应,得到多波长窄带反射谱。通过施加偏置电压或化学掺杂来改变石墨烯的费米能级,进而改变它的电导率,从而实现光谱的动态可调谐。
Description
技术领域
本发明属于微纳光电子器件。
背景技术
21世纪人类已进入以光通信和信息网络为主要特征的信息时代,与信息相关的光通信、光电子、光传感、光集成等各种技术正以空前的速度和规模迅猛发展。
传感器(Sensor)是一种检测装置,能感受到被测量的信息,并能将感受到的信息,按一定规律变换成为电信号或其他所需形式的信息输出,以满足信息的传输、处理、存储、显示、记录和控制等要求。光学传感器是依据光学原理进行测量的,它有许多优点,如非接触和非破坏性测量、几乎不受干扰、高速传输以及可遥测、遥控等。局域表面等离激元共振(Localized surface plasmon resonance,LSPR),入射光子频率和金属纳米粒子的振动频率相匹配,对光子能量产生很强的吸收作用,吸收率随着光子能量的减少呈指数衰减。LSPR对粒子结构和周围环境媒介等很多因素都非常敏感,[马文英,罗吉,许诚昕,凌味未,汪为民.金属纳米结构对光谱响应及折射率灵敏度的影响[J].光学学报,2012,32(12):261-266.],体积小、易集成、可应用于近场传感检测,因此得到了广泛研究。
但是,金属颗粒振荡过程中,其自身具有吸光损耗,加之LSPs产生的局部高强度电场使得其辐射阻尼更加明显,从而能量衰减快,共振峰谱线被展宽,因此检测品质因数(Figure of Merit,FOM)大大降低。如何设计得到具有窄带多波长光谱,在多样本传感检测中具有重要意义。
Fano共振是得到窄带多波长光谱的有效手段,其谱线带宽窄且陡峭,从而很好的提高了共振品质。对金属颗粒结构来说,Fano共振的实现一般由共振损耗较低的“暗模”与LSPs耦合得到。金属颗粒聚合体结构、法布里-珀罗共振腔等手段均已被广泛研究。
石墨烯以其优异的光电特性与金属纳米结构中的等离激元共振之间的协同作用促成了电调制等离激元共振的发展。通过施加偏置电压或化学掺杂来改变石墨烯的费米能级,进而改变它的电导率,随之改变器件的光学特性。石墨烯和金属纳米结构的相互作用及光学效应成为了研究的热点,可作为可调谐等离激元器件的平台[Emani NK,Chung T-F,NiX,Kildishev AV,Chen YP,Boltasseva A.Electrically tunable damping of plasmonicresonances with graphene.Nano Lett.2012;12(10):5202-6.]
发明内容
本发明的目的是,
利用金属纳米颗粒和光波导耦合效应,以及石墨烯的可调谐效应,设计得到一种多波长窄带可调谐传感器。
本发明提供的传感器,利用波导模式作为共振“暗模”,实现多波长窄带光谱的传感器。并且利用石墨烯,实现了可调谐光谱检测。
为了达到上述目的,本发明采用的技术方案是:
一种LSPR多波长窄带可调谐传感器,从下到上依次为硅衬底、SiO2膜、Al2O3膜、石墨烯薄膜,石墨烯薄膜上具有E字形金纳米颗粒周期排列。
进一步的,硅衬底上覆盖的SiO2层厚度为T2=1600nm。
进一步的,SiO2上覆盖的氧化铝(aluminium oxide,Al2O3)厚度为T1=2200nm。
进一步的,石墨烯固定在Al2O3上,其上E字形金纳米颗粒周期排列,周期P为1500nm。
进一步的,纳米颗粒长度t1=600nm,宽度t2=120nm,开口宽度t3=440nm,厚度h=30nm。
本发明的有益效果是:
1、利用Au纳米颗粒有序阵列在非对称介质环境下与平板波导的耦合,产生Fano效应,得到多波长窄带反射谱。
2、通过施加偏置电压或化学掺杂来改变石墨烯的费米能级,进而改变它的电导率,从而实现光谱的动态可调谐。
3、在波段2000~3000nm内,实现了多波长窄带反射/吸收谱,其中在2290nm处和2500nm处,共振带宽仅约为30nm和10nm。当载流子浓度从1×1013cm-2到9×1013cm-2,反射谱蓝移变窄,调谐范围可达27nm。
4、外部环境折射率增大时,共振波长红移,各共振峰传感广义品质因数FOM*最高可达6401。
附图说明
图1为本发明传感器结构示意图。
图2为本发明石墨烯可调谐传感器反射谱。
图3为本发明石墨烯可调谐传感器传感特性。
具体实施方式
本发明提供的LSPR多波长可调谐传感器,利用金属纳米颗粒激发波导模式,得到了多波长窄带反射谱。在平板波导两侧上光刻电极,施加偏置电压,可通过电压调谐改变石墨烯的费米能级,使传感器输出曲线的波长位置可调谐,调谐范围可达到27nm,广义品质因数FOM*最高可达6401。
所设计的传感器可采用超净室纳米加工与器件集成工艺进行制备(W.S.Chang,J.B.Lassiter,P.Swanglap,H.Sobhani,S.Khatua,P.Nordlander,N.J.Halas,S.Link,Aplasmonic Fano switch,Nano.Lett.,2012,12,4977-4982.)。其大概流程为:在Si衬底上用CVD(化学气相沉积)依次制备一定厚度的SiO2膜和Al2O3膜,将通过CVD(化学气相沉积)制备的石墨烯薄膜转移到平板波导上;采用电子束刻蚀技术制备金属纳米颗粒周期性阵列。所得传感器结构如图1所示:从下到上依次为硅衬底、SiO2膜、Al2O3膜、石墨烯薄膜,具体是在硅衬底上覆盖一层T2=1600nm的SiO2,在SiO2上覆盖一层厚度为T1=2200nm的氧化铝(aluminium oxide,Al2O3)。将制备的石墨烯固定在Al2O3上,其上E字形金(Au)纳米颗粒周期排列。其周期P为1500nm,纳米颗粒长度和宽度t1=600nm,t2=120nm,t3=440nm,厚度h=30nm。
本发明传感器采用COMSOL软件进行数值模拟,图2展示了光垂直于基底平面入射,该传感器在2000nm~3000nm波段利用石墨烯进行调谐的反射光谱。在此波段内实现了多波长窄带反射/吸收谱,其中在2290nm处和2500nm处,共振带宽仅约为30nm和10nm。当载流子浓度从1×1013cm-2到9×1013cm-2,反射谱蓝移变窄。图3展示了该传感器的传感特性,外部环境折射率增大时,共振波长红移,各共振峰传感广义品质因数FOM*最高可达6401。
Claims (8)
1.一种LSPR多波长窄带可调谐传感器,其特征是:从下到上依次为硅衬底、SiO2膜、Al2O3膜、石墨烯薄膜,石墨烯薄膜上具有E字形金纳米颗粒周期排列。
2.根据权利要求1所述的LSPR多波长窄带可调谐传感器,其特征是:硅衬底上覆盖的SiO2层厚度为T2=1600nm。
3.根据权利要求1所述的LSPR多波长窄带可调谐传感器,其特征是:SiO2上覆盖的氧化铝(aluminium oxide,Al2O3)厚度为T1=2200nm。
4.根据权利要求1所述的LSPR多波长窄带可调谐传感器,其特征是:石墨烯固定在Al2O3上,其上E字形金纳米颗粒周期排列,周期P为1500nm。
5.根据权利要求1或4所述的LSPR多波长窄带可调谐传感器,其特征是:纳米颗粒长度t1=600nm,宽度t2=120nm,开口宽度t3=440nm,厚度h=30nm。
6.根据权利要求1所述的LSPR多波长窄带可调谐传感器,其特征是:光垂直于基底平面入射,在波段2000~3000nm内,实现了多波长窄带反射/吸收谱,其中在2290nm处和2500nm处,共振带宽为30nm和10nm。
7.根据权利要求1所述的LSPR多波长窄带可调谐传感器,其特征是:载流子浓度从1×1013cm-2到9×1013cm-2,反射谱蓝移变窄。
8.根据权利要求1所述的LSPR多波长窄带可调谐传感器,其特征是:外部环境折射率增大时,共振波长红移,各共振峰传感广义品质因数FOM*最高为6401。
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