CN112981346A - Multi-chamber magnetic control multilayer optical coating equipment and coating method - Google Patents

Abstract

The invention discloses multi-chamber magnetic control multilayer optical coating equipment and a method, wherein the equipment comprises a workpiece in-out device, a pretreatment chamber, a workpiece in-out conversion chamber and coating chambers which are connected in sequence, wherein the pretreatment chamber and the plurality of coating chambers are distributed on the periphery of the workpiece in-out conversion chamber; a first vacuum door valve mechanism is arranged between the workpiece in-out conversion chamber and the pretreatment chamber, a second vacuum door valve mechanism is arranged between the workpiece in-out conversion chamber and each coating chamber, and a rotating door mechanism is arranged on one side of the pretreatment chamber facing the workpiece in-out device. The method comprises the steps that firstly, the pretreatment chamber carries out ion surface treatment on a workpiece frame, then the workpiece enters and exits the conversion chamber and is lifted to the upper part, after the coating of one coating chamber is finished, the workpiece frame and the workpiece are sent out through the workpiece entering and exiting conversion chamber, and the workpiece frame to be coated descends and is sent into the coating chamber. The invention can effectively improve the uniformity of vacuum degree among the coating chambers, thereby improving the consistency of the performance of the workpiece film layer after coating and improving the coating quality of the workpiece.

Description

Multi-chamber magnetic control multilayer optical coating equipment and coating method

Technical Field

The invention relates to the technical field of vacuum coating, in particular to a multi-chamber magnetic control multilayer optical coating device and a coating method.

Background

In the technical field of vacuum coating, the traditional vacuum coating equipment mostly adopts a single-furnace structural form or a linear multi-chamber serial structural form.

In actual production, vacuum coating equipment in the form of a single furnace body structure only has one vacuum chamber, atmosphere needs to be filled into the furnace body after coating is finished every time, and the opening time of a door of the vacuum chamber is different every time, so that the atmosphere change in the vacuum chamber is easily influenced, the fluctuation of the vacuum degree is large, finally, the performance of a workpiece film processed in each furnace is different, and the quality of the workpiece film is different.

In the linear vacuum coating equipment with multiple chambers connected in series, each coating chamber is usually in a rectangular structure, magnetic control targets in the coating chambers can only be distributed on two side walls of the coating chamber and are difficult to realize uniform arrangement, meanwhile, because a workpiece frame needs to enter and exit each coating chamber, a channel between adjacent coating chambers is generally large, working gas is needed to be inflated to the coating chambers during coating operation, the arrangement difficulty of gas barriers is quite large, the working atmosphere states in the coating chambers are different, the uniformity of the working gas on the magnetic control targets is difficult to control, and the coating quality of workpieces is easy to influence finally.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide the multi-chamber magnetic control multilayer optical coating equipment which can effectively improve the uniformity of the vacuum degree among coating chambers, thereby improving the consistency of the performance of a workpiece film layer after coating and improving the coating quality and the yield of the workpiece.

The invention also aims to provide a multi-chamber magnetic control multilayer optical coating method realized by the equipment.

The technical scheme of the invention is as follows: a multi-chamber magnetic control multilayer optical coating device comprises a workpiece in-out device, a plurality of pretreatment chambers, a workpiece in-out conversion chamber and coating chambers which are connected in sequence, wherein the pretreatment chambers and the coating chambers are distributed on the periphery of the workpiece in-out conversion chamber; the connection part between the workpiece in-out conversion chamber and the pretreatment chamber is provided with a first vacuum gate valve mechanism, the connection part between the workpiece in-out conversion chamber and each coating chamber is provided with a second vacuum gate valve mechanism, and one side of the pretreatment chamber facing the workpiece in-out device is provided with a rotating gate mechanism.

The workpiece in-and-out device is a rotary lifting table mechanism, and the outer side of the workpiece in-and-out device is also respectively connected with a workpiece loading platform and a workpiece unloading platform. The workpiece in-and-out device can adopt an existing rotary lifting table on the market and has a lifting function and a rotary switching function. In the operation process of the coating equipment, when the revolving door mechanism of the pretreatment chamber needs to be opened or closed and swings, the workpiece in-and-out device descends to provide space for the swinging of the revolving door mechanism, so that interference is avoided, and when the workpiece in-and-out device needs to convey workpieces to the pretreatment chamber, the workpiece in-and-out device ascends to the same level of a platform of the workpiece in-and-out device and the platform of the pretreatment chamber. By utilizing the rotation switching function of the workpiece in-out device, the workpiece in-out device can be switched between the workpiece loading platform and the workpiece unloading platform so as to realize the feeding or discharging of the workpiece.

The workpiece in-out conversion chamber is internally provided with a workpiece frame lifting mechanism and a workpiece frame rotating mechanism, the workpiece frame lifting mechanism is arranged at the upper part of the workpiece in-out conversion chamber, and the workpiece frame rotating mechanism is arranged at the lower part of the workpiece in-out conversion chamber.

The workpiece frame lifting mechanism comprises a lifting basket frame, a first winch and first guide wheels, the first winch is installed at the top of the workpiece in-out conversion chamber, one end of a steel wire rope of the first winch is fixedly connected with the top of the lifting basket frame, the workpiece frame is arranged in the lifting basket frame, and a plurality of first guide wheels connected with the inner wall of the workpiece in-out conversion chamber are distributed on the outer side of the lifting basket frame. Wherein, the lift basketball stands are frame rack structure, first winch adopt traditional structure the hoist engine can, according to the actual demand of equipment, the quantity of first winch can be adjusted, when first winch drives lift basketball stands and work rest and carries out elevating movement, for avoiding the lift basketball stands to produce and rock and lead to the fact the influence to work rest and the last work piece, through setting up first leading wheel at lift basketball stands outer wall, carry out the in-process that reciprocates along work piece business turn over conversion room inner wall at first leading wheel, make the lift basketball stands carry out elevating movement steadily.

And a first guide rail matched with the first guide wheel is further arranged on the inner wall of the workpiece in and out of the conversion chamber along the motion track of the first guide wheel. The first guide rail can provide a more stable moving path for the first guide wheel, so that the stability of the lifting basket frame and the workpiece frame during lifting is further improved, and the installation stability of the workpiece on the workpiece frame is ensured.

The workpiece frame rotating mechanism comprises a rotating tray and a rotating driving assembly, the rotating tray is located in a workpiece in-out switching chamber, the rotating driving assembly is arranged at the bottom of the rotating tray, a plurality of rows of horizontal conveying rollers are further arranged on the top surface of the rotating tray, and the conveying direction of the horizontal conveying rollers is switched along with the rotation of the rotating tray. The specific structure and the driving mode of the rotary driving component are the same as those of the rotary driving component of the existing similar equipment, and the rotary driving component can be driven by a motor or an air cylinder; the rotary tray is used as a receiving platform and a direction switching platform of the workpiece frame, so that the workpiece frame can be conveyed to the pretreatment chamber and each coating chamber distributed on the periphery of the workpiece in-out conversion chamber through the horizontal conveying rollers.

The main structure of the first vacuum gate valve mechanism is the same as that of the second vacuum gate valve mechanism, the first vacuum gate valve mechanism and the second vacuum gate valve mechanism respectively comprise a gate valve body, a second winch, a second guide wheel and a gate valve pressing cylinder, the gate valve body is arranged on the outer side of a passage of a workpiece in and out of a conversion chamber, the gate valve body is provided with the gate valve pressing cylinder on the outer side, the second winch is installed on the top of the workpiece in and out of the conversion chamber, one end of a steel wire rope of the second winch is fixedly connected with the top of the gate valve body, and. In the structure, two sides of a channel for the workpiece to pass in and out of the conversion chamber are also provided with side walls in an outward extending mode, the second guide wheels are connected with the side walls, the second winch is a winch with a traditional structure, the number of the second winch can be adjusted according to the actual requirement of equipment, in the process that the second winch drives the gate valve body to perform lifting motion, the positioning of the gate valve body is influenced in order to avoid the gate valve body from shaking, and the gate valve body can perform lifting motion stably in the process that the second guide wheels move up and down along the side walls of the workpiece to pass in and out of the conversion chamber through the second guide wheels arranged on the two sides of the gate valve body (in order to further improve the stability of the gate valve body, the side walls can be provided with second guide rails matched with the second guide wheels); when the gate valve body falls on the outer side of a channel for the workpiece to enter and exit the conversion chamber to form a closed structure, the outer side of the gate valve body is compressed by at least one gate valve compressing cylinder, so that a vacuum chamber which is sealed and isolated and is mutually independent is formed between the workpiece entering and exiting the conversion chamber and the pretreatment chamber or the film coating chamber.

Preferably, in the first vacuum valve mechanism, a first sealing ring is further arranged on a joint surface of the gate valve body and the workpiece in-out conversion chamber, the cross section of the first sealing ring is triangular with a rounded corner, the first sealing ring is fixedly arranged on the gate valve body, and one rounded tip of the first sealing ring faces the workpiece in-out conversion chamber. The workpiece enters and exits the conversion chamber and is sealed between the vacuum side and the atmosphere side, the gate valve body is compressed and sealed by the gate valve compression cylinder, the pressure of the gate valve compression cylinder is limited, the pressure of the gate valve compression cylinder is often insufficient at the moment when the pretreatment chamber is filled with the atmosphere, and if a traditional sealing ring with a circular or square cross section is adopted, the cross section deformation is insufficient under the condition of insufficient pressure, so that the sealing effect of the gate valve body is easily influenced, and the workpiece enters and exits the conversion chamber and is easily subjected to air leakage; if the first sealing ring with the structure is adopted, the round tip can achieve larger compression deformation under smaller pressure, so that a very good sealing effect can be formed, and the air leakage phenomenon is avoided.

In another preferred embodiment, in the second vacuum valve mechanism, a second sealing ring is further disposed on a contact surface between the gate valve body and the workpiece in-out conversion chamber, the second sealing ring has a Y-shaped cross section, the second sealing ring is fixedly mounted on the gate valve body, and an opening of the second sealing ring faces the workpiece in-out conversion chamber. The vacuum side and the vacuum side are sealed between the workpiece entering and exiting conversion chamber and the coating chamber, the pressure difference between the two sides of the gate valve body is small, so that the phenomenon of gas leakage is less, and the second sealing ring adopting the structure can achieve a good sealing and isolating effect under the condition of small pressing force, so that the use amount of the gate valve pressing cylinder can be reduced, and the equipment structure is simplified.

The invention realizes a multi-chamber magnetic control multilayer optical coating method through the equipment, which comprises the following steps:

(1) the workpiece frame carries the workpieces, and the workpieces are conveyed into the pretreatment chamber by the workpiece in-out device to be subjected to ion surface treatment;

(2) after ion surface treatment is finished, opening a first vacuum gate valve mechanism, waiting for a workpiece frame for workpiece film coating to enter a workpiece in-out conversion chamber, and then closing the first vacuum gate valve mechanism;

(3) lifting the workpiece frame waiting for coating the workpiece to the upper part of the workpiece in-out conversion chamber;

(4) after the coating of one coating chamber is finished, opening a second vacuum gate valve mechanism and sending out the workpiece frame which finishes the coating of the workpiece, then closing the second vacuum gate valve mechanism, opening a first vacuum gate valve mechanism and sending out the workpiece frame which finishes the coating of the workpiece into a pretreatment chamber;

(5) after the first vacuum gate valve mechanism is closed, the workpiece frame waiting for workpiece coating falls to the lower part of the workpiece in-out conversion chamber; and then opening the second vacuum gate valve mechanism, conveying the workpiece rack waiting for workpiece coating into the coating chamber, closing the second vacuum gate valve mechanism, and then coating.

The specific operation process of the coating method is as follows:

when workpiece mounting is carried out before film coating, the workpiece is arranged on the workpiece mounting platform to the workpiece frame and then is conveyed to the workpiece in-out device; when the workpiece is unloaded after the film coating is finished, the workpiece frame is conveyed to the workpiece unloading platform by the workpiece in-out device, and the workpiece is unloaded from the workpiece unloading platform.

The workpiece frame is conveyed by roller-type transmission components between the workpiece in-out device and the pretreatment chamber, between the pretreatment chamber and the workpiece in-out conversion chamber, and between the workpiece in-out conversion chamber and each coating chamber, the horizontal conveying rollers in the workpiece in-out conversion chamber are part of the roller-type transmission components, and the roller-type transmission components can adopt roller conveying mechanisms with traditional structures.

In the process of conveying the workpiece frame, when a revolving door mechanism of the pretreatment chamber needs to be opened, a revolving lifting platform used as a workpiece in-out device descends, and the revolving door mechanism of the pretreatment chamber is opened under the driving of a power driving mechanism; then the rotary lifting platform rises and rotates to face the workpiece loading platform, and the workpiece frame is driven by the roller type transmission assembly to enter the pretreatment chamber from the rotary lifting platform; then the rotary lifting table descends, a rotary door mechanism of the pretreatment chamber is closed, a vacuum unit of the pretreatment chamber performs vacuum pumping on the pretreatment chamber, and after the vacuum pumping is performed to a set vacuum degree, ion surface treatment is performed on each workpiece on the workpiece frame; after the ion surface treatment is finished, the pretreatment chamber is continuously vacuumized, after the set vacuum degree is reached, the first vacuum door valve mechanism is opened, and the workpiece frame is conveyed into the workpiece in-out conversion chamber; after the workpiece frame is in place, the first vacuum gate valve mechanism is closed, and the workpiece frame is lifted to the upper part of the workpiece in-out conversion chamber by a workpiece frame lifting mechanism in the workpiece in-out conversion chamber; after one of the coating chambers finishes coating, and a workpiece frame which finishes coating is sent out to the pretreatment chamber through a channel at the lower part of the workpiece in-out conversion chamber, the workpiece frame descends to the lower part of the workpiece in-out conversion chamber, is driven by a workpiece frame rotating mechanism to rotate to the same direction as the coating chamber, then enters the corresponding coating chamber, and after a second gate valve mechanism corresponding to the coating chamber is closed, the coating chamber is continuously vacuumized by a vacuum unit of the coating chamber, then working gas is filled, and the target is opened to coat the multilayer optical film; and (3) carrying out surface coating treatment on the coated workpiece in a pretreatment chamber by using an AF (anti-fingerprint) coating evaporation source, introducing atmosphere into the pretreatment chamber after the surface coating treatment is finished, then opening a rotating door mechanism, and conveying the workpiece frame to a workpiece unloading platform by a workpiece in-out device.

Compared with the prior art, the invention has the following beneficial effects:

according to the multi-chamber magnetic control multilayer optical coating equipment and the method, the workpiece in-out conversion chamber is arranged between the pretreatment chamber and the coating chamber and serves as an air exhaust transition chamber, so that a more effective vacuum isolation effect is realized, partial air is prevented from leaking into the coating chamber when the pretreatment chamber is introduced into the atmosphere to influence the working atmosphere in the coating chamber, and simultaneously, the uniformity of the vacuum degree among the coating chambers can be effectively improved, so that the uniformity of the performance of the film layer of the workpiece after coating is improved, and the coating quality of the workpiece is improved.

In the multi-chamber magnetic control multilayer optical coating equipment, a plurality of coating chambers can be distributed on the periphery of a workpiece in-out conversion chamber, the workpiece in-out conversion chamber is used for switching the conveying direction of a workpiece rack to be matched with each coating chamber, so that each coating chamber can keep a continuous production state, a higher vacuum degree can be kept, the purity of working atmosphere participating in coating is high, and the consistency of the performance of a finally formed film on the workpiece in each coating chamber is higher. Meanwhile, as the coating chambers are not distributed in a linear manner but in a circumferential manner, the magnetic control targets of the coating chambers can be distributed along the circumferential direction of the coating chambers, the arrangement of the gas paths is more reasonable, the uniformity of the working atmosphere of the magnetic control targets in the coating chambers is effectively improved, and the uniformity of the film layer on the workpiece after coating is greatly improved.

In the multi-chamber magnetic control multilayer optical coating equipment, independent vacuum gate valve mechanisms are arranged on connecting passages between a workpiece in-out conversion chamber and a pretreatment chamber and among coating chambers, and sealing rings with corresponding structures are arranged on the vacuum gate valve mechanisms to ensure the sealing effect of the vacuum gate valve mechanisms.

In the multi-chamber magnetic control multilayer optical coating equipment, the workpiece frame lifting mechanism and the workpiece frame rotating mechanism are arranged in the workpiece in-out conversion chamber, after a workpiece is carried by the workpiece frame and enters the workpiece in-out conversion chamber, the workpiece frame is lifted to the upper part of the workpiece in-out conversion chamber by the workpiece frame lifting mechanism, and a channel for sending out the workpiece frame in the coating chamber is reserved at the lower part of the workpiece frame lifting mechanism, so that the workpiece frame can be rapidly fed in and out, the production period is shortened, and the yield of the coating equipment is greatly improved. Meanwhile, the workpiece frame rotating mechanism can be used for rapidly switching the conveying direction of the workpiece frame so as to ensure that the workpiece frame can accurately enter and exit the corresponding coating chamber.

Drawings

FIG. 1 is a schematic diagram of the multi-chamber magnetic control multi-layer optical coating device.

FIG. 2 is a longitudinal sectional view of the workpiece in-out apparatus, the pre-treatment chamber, the workpiece in-out transfer chamber, and the coating chamber of FIG. 1 connected in sequence.

Fig. 3 is a schematic structural diagram of the workpiece frame lifting mechanism driving the workpiece frame to descend when the workpiece enters and exits the transfer chamber.

Fig. 4 is a schematic structural diagram of the workpiece frame lifting mechanism driving the workpiece frame to lift in the workpiece in-out transfer chamber.

Fig. 5 is a schematic structural view of the workpiece holder rotating mechanism in the workpiece transfer chamber.

Fig. 6 is a view in the direction a of fig. 5.

FIG. 7 is a schematic structural view of the first and second vacuum gate valve mechanisms disposed around the workpiece transfer chamber.

FIG. 8 is a longitudinal cross-sectional view of the first and second vacuum gate valve mechanisms on either side of the transfer chamber for movement of the workpiece in and out.

Fig. 9 is a schematic cross-sectional view of a first seal ring of the first vacuum gate valve mechanism.

FIG. 10 is a schematic cross-sectional view of a second seal ring of the second vacuum gate valve mechanism.

In the above figures, the components indicated by the respective reference numerals are as follows:

the device comprises a workpiece loading platform 1, a workpiece unloading platform 2, a workpiece in-out device 3, a pretreatment chamber 4, a workpiece in-out conversion chamber 5, a coating chamber 6, a first vacuum gate valve mechanism 7, a second vacuum gate valve mechanism 8, a rotary gate mechanism 9, a roller type transmission assembly 10 and a workpiece frame 11;

12 is a lifting basket frame, 13 is a first winch, and 14 is a first guide wheel; 15 is a rotary tray, 16 is a rotary driving component; 17 is a door valve body, 18 is a second winch, 19 is a second guide wheel, 20 is a door valve pressing cylinder, 21 is a steel wire rope, 22 is a first sealing ring, 23 is a second sealing ring, and 24 is a vacuum unit.

Detailed Description

The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.

Example 1

The multi-chamber magnetic control multilayer optical coating equipment comprises a workpiece loading platform 1, a workpiece unloading platform 2, a workpiece in-out device 3, a pretreatment chamber 4, a workpiece in-out conversion chamber 5 and three coating chambers 6, wherein the pretreatment chamber and the three coating chambers are distributed around the workpiece in-out conversion chamber, and the workpiece loading platform and the workpiece unloading platform are distributed on two outer sides of the workpiece in-out device in different directions, as shown in fig. 1. A first vacuum door valve mechanism 7 is arranged at the joint between the workpiece in-out conversion chamber and the pretreatment chamber, second vacuum door valve mechanisms 8 are respectively arranged at the joints between the workpiece in-out conversion chamber and each coating chamber, and a rotary door mechanism 9 is arranged on one side of the pretreatment chamber facing the workpiece in-out device.

The coating equipment comprises the following components in specific structure:

in the coating equipment, the workpiece frame 11 is conveyed by roller type transmission components 10, and horizontal conveying rollers for conveying the workpieces into and out of the conversion chamber are part of the roller type transmission components, and the roller type transmission components can adopt roller conveying mechanisms with traditional structures.

The workpiece in-out device is a rotary lifting platform mechanism, and the outer side of the workpiece in-out device is respectively connected with a workpiece loading platform and a workpiece unloading platform. The workpiece in-and-out device can adopt an existing rotary lifting table on the market and has a lifting function and a rotary switching function. In the operation process of the coating equipment, when the revolving door mechanism of the pretreatment chamber needs to be opened or closed and swings, the workpiece in-and-out device descends to provide space for the swinging of the revolving door mechanism, so that interference is avoided, and when the workpiece in-and-out device needs to convey workpieces to the pretreatment chamber, the workpiece in-and-out device ascends to the same level of a platform of the workpiece in-and-out device and the platform of the pretreatment chamber. By utilizing the rotation switching function of the workpiece in-out device, the workpiece in-out device can be switched between the workpiece loading platform and the workpiece unloading platform so as to realize the feeding or discharging of the workpiece.

The workpiece in-out conversion chamber is internally provided with a workpiece frame lifting mechanism and a workpiece frame rotating mechanism, the workpiece frame lifting mechanism is arranged at the upper part of the workpiece in-out conversion chamber, and the workpiece frame rotating mechanism is arranged at the lower part of the workpiece in-out conversion chamber.

As shown in fig. 3 or 4, the workpiece rack lifting mechanism includes a lifting basket 12, a first winch 13 and a first guide wheel 14, the first winch is installed on the top of the workpiece in-out conversion chamber, one end of a steel wire rope of the first winch is fixedly connected with the top of the lifting basket, the workpiece rack is arranged in the lifting basket, and a plurality of first guide wheels connected with the inner wall of the workpiece in-out conversion chamber are distributed on the outer side of the lifting basket. Wherein, the lift basket is frame rack structure, first winch adopt traditional structure the hoist engine can, according to the actual demand of equipment, the quantity of first winch can be adjusted, when first winch drives lift basket and work rest and carries out elevating movement, for avoiding the lift basket to produce and rock and lead to the fact the influence to work rest and the last work piece, through setting up first leading wheel at lift basket outer wall, the in-process that reciprocates is carried out along work piece business turn over conversion room inner wall at first leading wheel, make the lift basket carry out elevating movement steadily, the concrete structure of first leading wheel has and the leading wheel structure common use the same with the market. Further, along the movement track of the first guide wheel, a first guide rail (not shown in the figure) matched with the first guide wheel can be further arranged on the inner wall of the workpiece entering and exiting conversion chamber. The first guide rail can provide a more stable moving path for the first guide wheel, so that the stability of the lifting basket frame and the workpiece frame during lifting is further improved, and the installation stability of the workpiece on the workpiece frame is ensured.

As shown in fig. 5 or fig. 6, the workpiece holder rotating mechanism includes a rotating tray 15 and a rotating driving assembly 16, the rotating tray is located in the workpiece in-out switching chamber, the rotating driving assembly is disposed at the bottom of the rotating tray, a plurality of rows of horizontal conveying rollers are further disposed on the top surface of the rotating tray, and the conveying direction of the horizontal conveying rollers is switched along with the rotation of the rotating tray. The specific structure and the driving mode of the rotary driving component are the same as those of the rotary driving component of the existing similar equipment, and the rotary driving component can be driven by a motor or an air cylinder; the rotary tray is used as a receiving platform and a direction switching platform of the workpiece frame, so that the workpiece frame can be conveyed to the pretreatment chamber and each coating chamber distributed on the periphery of the workpiece in-out conversion chamber through the horizontal conveying rollers.

As shown in fig. 7 or 8, the first vacuum gate valve mechanism and the second vacuum gate valve mechanism have the same main structure, and respectively include a gate valve body 17, a second hoist 18, a second guide wheel 19 and a gate valve pressing cylinder 20, the gate valve body is disposed outside a passage of a workpiece entering and exiting conversion chamber, the gate valve pressing cylinder is disposed outside the gate valve body, the second hoist is mounted on the top of the workpiece entering and exiting conversion chamber, one end of a steel wire rope 21 of the second hoist is fixedly connected with the top of the gate valve body, and second guide wheels are further disposed on two sides of the gate valve body. In the structure, two sides of a channel for the workpiece to pass in and out of the conversion chamber are also provided with side walls in an outward extending mode, the second guide wheels are connected with the side walls, the second winch is a winch with a traditional structure, the number of the second winch can be adjusted according to the actual requirement of equipment, in the process that the second winch drives the gate valve body to perform lifting motion, the positioning of the gate valve body is influenced in order to avoid the gate valve body from shaking, the second guide wheels arranged on two sides of the gate valve body enable the gate valve body to perform lifting motion stably in the process that the second guide wheels move up and down along the side walls of the workpiece to pass in and out of the conversion chamber (in order to further improve the stability of the gate valve body, second guide rails matched with the second guide wheels can also be arranged on the side walls), and the specific structure of the second guide wheels is the same as the structure of the conventional guide wheels in the; when the gate valve body falls on the outer side of a channel for the workpiece to enter and exit the conversion chamber to form a closed structure, the outer side of the gate valve body is compressed by at least one gate valve compressing cylinder, so that a vacuum chamber which is sealed and isolated and is mutually independent is formed between the workpiece entering and exiting the conversion chamber and the pretreatment chamber or the film coating chamber.

In the first vacuum valve mechanism, a first sealing ring 22 is further disposed on a joint surface of the gate valve body and the workpiece in and out of the conversion chamber, as shown in fig. 9, a cross section of the first sealing ring is triangular with a rounded corner, the first sealing ring is fixedly mounted on the gate valve body, and one rounded tip of the first sealing ring faces the workpiece in and out of the conversion chamber. The workpiece enters and exits the conversion chamber and is sealed between the vacuum side and the atmosphere side, the gate valve body is compressed and sealed by the gate valve compression cylinder, the pressure of the gate valve compression cylinder is limited, the pressure of the gate valve compression cylinder is often insufficient at the moment when the pretreatment chamber is filled with the atmosphere, and if a traditional sealing ring with a circular or square cross section is adopted, the cross section deformation is insufficient under the condition of insufficient pressure, so that the sealing effect of the gate valve body is easily influenced, and the workpiece enters and exits the conversion chamber and is easily subjected to air leakage; if the first sealing ring with the structure is adopted, the round tip can achieve larger compression deformation under smaller pressure, so that a very good sealing effect can be formed, and the air leakage phenomenon is avoided.

In the second vacuum valve mechanism, a second sealing ring 23 is further disposed on a contact surface between the gate valve body and the workpiece in-out conversion chamber, as shown in fig. 10, the second sealing ring has a Y-shaped cross section, and is fixedly mounted on the gate valve body, and an opening of the second sealing ring faces the workpiece in-out conversion chamber. The vacuum side and the vacuum side are sealed between the workpiece entering and exiting conversion chamber and the coating chamber, the pressure difference between the two sides of the gate valve body is small, so that the phenomenon of gas leakage is less, and the second sealing ring adopting the structure can achieve a good sealing and isolating effect under the condition of small pressing force, so that the use amount of the gate valve pressing cylinder can be reduced, and the equipment structure is simplified.

Example 2

The multi-chamber magnetic control multilayer optical coating method is realized by the coating equipment in the embodiment 1, and comprises the following steps:

(1) the workpiece frame carries the workpieces, and the workpieces are conveyed into the pretreatment chamber by the workpiece in-out device to be subjected to ion surface treatment;

(2) after ion surface treatment is finished, opening a first vacuum gate valve mechanism, waiting for a workpiece frame for workpiece film coating to enter a workpiece in-out conversion chamber, and then closing the first vacuum gate valve mechanism;

(3) lifting the workpiece frame waiting for coating the workpiece to the upper part of the workpiece in-out conversion chamber;

(4) after the coating of one coating chamber is finished, opening a second vacuum gate valve mechanism and sending out the workpiece frame which finishes the coating of the workpiece, then closing the second vacuum gate valve mechanism, opening a first vacuum gate valve mechanism and sending out the workpiece frame which finishes the coating of the workpiece into a pretreatment chamber;

(5) after the first vacuum gate valve mechanism is closed, the workpiece frame waiting for workpiece coating falls to the lower part of the workpiece in-out conversion chamber; and then opening the second vacuum gate valve mechanism, conveying the workpiece rack waiting for workpiece coating into the coating chamber, closing the second vacuum gate valve mechanism, and then coating.

The specific operation process of the coating method is as follows:

when workpiece mounting is carried out before film coating, the workpiece is arranged on the workpiece mounting platform to the workpiece frame and then is conveyed to the workpiece in-out device; when the workpiece is unloaded after the film coating is finished, the workpiece frame is conveyed to the workpiece unloading platform by the workpiece in-out device, and the workpiece is unloaded from the workpiece unloading platform.

The workpiece frame is conveyed by roller-type transmission components between the workpiece in-out device and the pretreatment chamber, between the pretreatment chamber and the workpiece in-out conversion chamber, and between the workpiece in-out conversion chamber and each coating chamber, the horizontal conveying rollers in the workpiece in-out conversion chamber are part of the roller-type transmission components, and the roller-type transmission components can adopt roller conveying mechanisms with traditional structures.

In the process of conveying the workpiece frame, when a revolving door mechanism of the pretreatment chamber needs to be opened, a revolving lifting platform used as a workpiece in-out device descends, and the revolving door mechanism of the pretreatment chamber is opened under the driving of a power driving mechanism; then the rotary lifting platform rises and rotates to face the workpiece loading platform, and the workpiece frame is driven by the roller type transmission assembly to enter the pretreatment chamber from the rotary lifting platform; then the rotary lifting table descends, a rotary door mechanism of the pretreatment chamber is closed, a vacuum unit of the pretreatment chamber performs vacuum pumping on the pretreatment chamber, and after the vacuum pumping is performed to a set vacuum degree, ion surface treatment is performed on each workpiece on the workpiece frame; after the ion surface treatment is finished, the pretreatment chamber is continuously vacuumized, after the set vacuum degree is reached, the first vacuum door valve mechanism is opened, and the workpiece frame is conveyed into the workpiece in-out conversion chamber; after the workpiece frame is in place, the first vacuum gate valve mechanism is closed, and the workpiece frame is lifted to the upper part of the workpiece in-out conversion chamber by a workpiece frame lifting mechanism in the workpiece in-out conversion chamber; after one of the coating chambers finishes coating, and a workpiece frame which finishes coating is sent out to the pretreatment chamber through a channel at the lower part of the workpiece in-out conversion chamber, the workpiece frame descends to the lower part of the workpiece in-out conversion chamber, is driven by a workpiece frame rotating mechanism to rotate to the same direction as the coating chamber, then enters the corresponding coating chamber, and after a second gate valve mechanism corresponding to the coating chamber is closed, the coating chamber is continuously vacuumized by a vacuum unit of the coating chamber, then working gas is filled, and the target is opened to coat the multilayer optical film; and (3) carrying out surface coating treatment on the coated workpiece in a pretreatment chamber by using an AF (anti-fingerprint) coating evaporation source, introducing atmosphere into the pretreatment chamber after the surface coating treatment is finished, then opening a rotating door mechanism, and conveying the workpiece frame to a workpiece unloading platform by a workpiece in-out device.

As mentioned above, the present invention can be better realized, and the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; all equivalent changes and modifications made according to the present disclosure are intended to be covered by the scope of the claims of the present invention.

Claims (10)

1. A multi-chamber magnetic control multilayer optical coating device is characterized by comprising a plurality of workpiece in-out devices, a pretreatment chamber, a workpiece in-out conversion chamber and coating chambers which are connected in sequence, wherein the pretreatment chamber and each coating chamber are distributed on the periphery of the workpiece in-out conversion chamber; the connection part between the workpiece in-out conversion chamber and the pretreatment chamber is provided with a first vacuum gate valve mechanism, the connection part between the workpiece in-out conversion chamber and each coating chamber is provided with a second vacuum gate valve mechanism, and one side of the pretreatment chamber facing the workpiece in-out device is provided with a rotating gate mechanism.

2. The multi-chamber magnetic control multilayer optical coating equipment according to claim 1, wherein the workpiece in-out device is a rotary elevating table mechanism, and the outer side of the workpiece in-out device is further connected with a workpiece loading platform and a workpiece unloading platform respectively.

3. The multi-chamber magnetically controlled multi-layer optical coating apparatus according to claim 1, wherein a workpiece holder lifting mechanism and a workpiece holder rotating mechanism are disposed in the workpiece in-out transfer chamber, the workpiece holder lifting mechanism is disposed at an upper portion of the workpiece in-out transfer chamber, and the workpiece holder rotating mechanism is disposed at a lower portion of the workpiece in-out transfer chamber.

4. The multi-chamber magnetic control multilayer optical coating device according to claim 3, wherein the workpiece holder lifting mechanism comprises a lifting basket, a first winch and a first guide wheel, the first winch is installed at the top of the workpiece in-out conversion chamber, one end of a steel wire rope of the first winch is fixedly connected with the top of the lifting basket, the workpiece holder is arranged in the lifting basket, and a plurality of first guide wheels connected with the inner wall of the workpiece in-out conversion chamber are distributed on the outer side of the lifting basket.

5. The multi-chamber magnetically controlled multi-layer optical coating apparatus according to claim 4, wherein along the motion track of the first guide wheel, the inner wall of the workpiece entering and exiting the conversion chamber is further provided with a first guide rail matched with the first guide wheel.

6. The multi-chamber magnetically controlled multi-layer optical coating apparatus according to claim 3, wherein the workpiece holder rotating mechanism comprises a rotating tray and a rotating driving assembly, the rotating tray is located in the workpiece in-out switching chamber, the rotating driving assembly is disposed at the bottom of the rotating tray, a plurality of rows of horizontal conveying rollers are further disposed on the top surface of the rotating tray, and the conveying direction of the horizontal conveying rollers is switched along with the rotation of the rotating tray.

7. The multi-chamber magnetic control multilayer optical coating device according to claim 1, wherein the first vacuum gate valve mechanism and the second vacuum gate valve mechanism have the same main structure and respectively comprise a gate valve body, a second winch, a second guide wheel and a gate valve pressing cylinder, the gate valve body is arranged outside a passage of a workpiece into and out of the conversion chamber, the gate valve pressing cylinder is arranged outside the gate valve body, the second winch is installed at the top of the workpiece into and out of the conversion chamber, one end of a steel wire rope of the second winch is fixedly connected with the top of the gate valve body, and the second guide wheels are arranged on two sides of the gate valve body.

8. The multi-chamber magnetically controlled multi-layer optical coating apparatus according to claim 7, wherein the first vacuum valve mechanism further comprises a first sealing ring disposed at a junction surface of the gate valve body and the workpiece in/out conversion chamber, the first sealing ring has a triangular cross section with rounded corners, the first sealing ring is fixedly mounted on the gate valve body, and one of the rounded corners faces the workpiece in/out conversion chamber.

9. The multi-chamber magnetically controlled multi-layer optical coating apparatus according to claim 7, wherein the second vacuum valve mechanism further comprises a second sealing ring disposed on a surface of the gate valve body facing the workpiece in/out conversion chamber, the second sealing ring has a Y-shaped cross section and is fixedly mounted on the gate valve body, and an opening of the second sealing ring faces the workpiece in/out conversion chamber.

10. A multi-chamber magnetic control multilayer optical coating method is realized according to any one of the equipment of claims 1 to 9, and is characterized by comprising the following steps:

(1) the workpiece frame carries the workpieces, and the workpieces are conveyed into the pretreatment chamber by the workpiece in-out device to be subjected to ion surface treatment;

(2) after ion surface treatment is finished, opening a first vacuum gate valve mechanism, waiting for a workpiece frame for workpiece film coating to enter a workpiece in-out conversion chamber, and then closing the first vacuum gate valve mechanism;

(3) lifting the workpiece frame waiting for coating the workpiece to the upper part of the workpiece in-out conversion chamber;

(4) after the coating of one coating chamber is finished, opening a second vacuum gate valve mechanism and sending out the workpiece frame which finishes the coating of the workpiece, then closing the second vacuum gate valve mechanism, opening a first vacuum gate valve mechanism and sending out the workpiece frame which finishes the coating of the workpiece into a pretreatment chamber;

(5) after the first vacuum gate valve mechanism is closed, the workpiece frame waiting for workpiece coating falls to the lower part of the workpiece in-out conversion chamber; and then opening the second vacuum gate valve mechanism, conveying the workpiece rack waiting for workpiece coating into the coating chamber, closing the second vacuum gate valve mechanism, and then coating.

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