CN115161599B - Vacuum cavity opening structure and method - Google Patents
Vacuum cavity opening structure and method Download PDFInfo
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- CN115161599B CN115161599B CN202210629853.6A CN202210629853A CN115161599B CN 115161599 B CN115161599 B CN 115161599B CN 202210629853 A CN202210629853 A CN 202210629853A CN 115161599 B CN115161599 B CN 115161599B
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- chamber
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- perforation
- jacks
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 90
- 230000009471 action Effects 0.000 claims abstract description 13
- 230000001174 ascending effect Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Abstract
The application discloses a vacuum cavity opening structure and a cavity opening method. The open cavity structure comprises: the top rotating device is arranged on the upper side of the cavity, the top rotating device is provided with a body, one side end of the body is provided with a perforation, the body is sleeved on the central guiding mechanism through the perforation, the side, far away from the perforation, of the body is provided with a sliding component, the sliding component is configured to slide along the surface of the rotating guide rail, one side of the body is provided with a lifting mechanism, the central guiding mechanism is sleeved with a connecting mechanism matched with the number of the cavities and connected with the corresponding cavity, one side of the rotating guide rail is provided with a pushing structure, the pushing structure is connected with the body, and based on the action of the pushing structure, the body rotates along the central guiding mechanism and the sliding component slides along the surface of the rotating guide rail to open the cavity. This allows for easy opening of selected chambers without the aid of external tools.
Description
Technical Field
The application relates to the field of semiconductor equipment, in particular to a vacuum cavity opening structure and a cavity opening method.
Background
During installation and maintenance of a large vacuum chamber, a relatively troublesome problem is encountered, and a chamber opening process is too complex, and a typical chamber opening process comprises: all connecting bolts in front of the cavity are unscrewed, then the related parts are disassembled, the cavity is lifted up by means of an external tool, finally, the installation and maintenance operations are carried out, and the cavities are assembled in reverse order after the maintenance is completed. In the mode, the cavity opening process is complex, and the cavity opening operation can be performed by means of an external tool only by unscrewing the connecting piece and detaching the related parts; in addition, the problem that parts which are repeatedly used when the connecting piece is detached are easy to be blocked, and the installation errors are easy to occur when the associated accessories are detached due to more pipelines. Furthermore, the working space requirements by means of external tools are high.
There is a need for improvements to existing chamber structures.
Disclosure of Invention
To overcome the above drawbacks, the object of the present application is: the utility model provides a vacuum cavity structure of opening, this structure can realize the function of automatic cavity that opens when equipment is inside not with the help of external tool, can independently select the cavity that needs to open under the multilayer cavity occasion.
In order to achieve the above purpose, the present application adopts the following technical scheme:
a vacuum cavity open structure, comprising:
a center guiding mechanism, a top rotating device, a guiding part and a pushing structure,
the top rotating device is arranged on the upper side of the chamber,
the top rotating device is provided with a body, one side end of the body is provided with a perforation, the body is sleeved on the central guiding mechanism through the perforation, the side of the body far away from the perforation is provided with a sliding component, a roller of the sliding component is configured to slide along the surface of the guiding part,
one side of the body is provided with a lifting mechanism, the central guiding mechanism is sleeved with connecting mechanisms matched with the number of the chambers and connected to the chambers matched and corresponding to the connecting mechanisms,
one side of the guide portion is provided with a pushing structure, the pushing structure is connected with the body, based on the action of the pushing structure, the body rotates along the central guide mechanism, and the sliding assembly slides along the surface of the guide portion to open the cavity. Through the design, during maintenance, the selected cavity can be conveniently opened without using an external tool in the equipment, so that the cavity opening process is simplified, and the maintenance time is shortened.
Preferably, the guide portion comprises a rail having an arc, and the center of curvature of the rail is located on the centerline of the center guide mechanism,
the output end of the lifting mechanism is connected with the cover plate, and the chamber is moved based on the ascending or descending of the lifting mechanism. I.e. the curvature of the guide rail is the same as the curvature of the body rotation.
Preferably, the lifting mechanism comprises a cylinder or motor which acts to raise or lower the mobile chamber.
Preferably, the body is provided with a side guide on one side arranged on the same side as the lifting mechanism, said side guide being arranged to be slidable along the side of the chamber.
Preferably, the chamber comprises a first chamber, a second chamber and a third chamber which are sequentially stacked, and at least one locking mechanism is arranged between two adjacent chambers.
Preferably, the locking mechanism is configured as a latch. This may be manual or may be based on instruction based automatic locking.
Preferably, the locking mechanism comprises a cylinder or a motor, the output end of the cylinder or the motor is connected with a bolt, and the cylinder or the motor is electrically connected to the controller and is locked or unlocked based on the instruction action of the controller.
Preferably, an annular connecting part is configured at one side configuration end of the first chamber of the vacuum chamber cavity opening structure, a plurality of first jacks are arranged on the connecting part, second jacks matched with the first jacks are arranged on the second chamber, and bolts of the locking mechanism are at least partially embedded into the corresponding second jacks and the first jacks to lock the first chamber and the second chamber.
Preferably, the connecting mechanism is provided with a second through hole which is fixed to the corresponding chamber by a connecting piece.
The embodiment of the application provides a cavity opening method, which comprises the vacuum cavity opening structure,
the cavity opening method comprises the following steps:
selecting a cavity to be opened:
unlocking the locking mechanism corresponding to the matched cavity to be opened based on the control module;
moving up the upper cover or a chamber connected with the upper cover to a predetermined position based on the action of the lifting mechanism;
and on the basis of the action of the pushing mechanism, one side of the top rotating device rotates along the central guiding mechanism, and the sliding component on the other side synchronously slides on the rotating guide rail so as to drive the upper cover or a chamber connected with the upper cover to synchronously rotate to a preset position, so that the selected chamber is opened.
Advantageous effects
The utility model provides a vacuum cavity structure of opening, it can realize the function of automatic cavity of opening at equipment inside not with the help of outside instrument, and the multilayer cavity can independently select the cavity that needs to open and open automatically, realizes safe, convenient, swift open the chamber flow. The function realizes the automatic opening of the connecting piece between the cavities, the automatic lifting and moving of the positions of the cavities, and the connecting fittings are not removed.
Drawings
The accompanying drawings are included to provide an understanding of the technical aspects of the present disclosure, and are incorporated in and constitute a part of this specification, illustrate the technical aspects of the present disclosure and together with the embodiments of the disclosure, not to limit the technical aspects of the present disclosure. The shapes and sizes of the various components in the drawings are not to scale, and are intended to be illustrative only of the present application.
Fig. 1 is a schematic perspective view of an open cavity combination according to an embodiment of the present application;
FIG. 2 is a schematic view of a three chamber stack in accordance with an embodiment of the present application;
FIG. 3 is a schematic illustration of a hidden second chamber according to an embodiment of the present application;
fig. 4 is a schematic diagram of an embodiment of the present application for opening a second chamber.
Detailed Description
The above-described aspects are further described below in conjunction with specific embodiments. It should be understood that these examples are illustrative of the present application and are not limiting the scope of the present application. The implementation conditions employed in the examples may be further adjusted as in the case of the specific manufacturer, and the implementation conditions not specified are typically those in routine experiments.
The vacuum chamber open structure proposed in the present application will be described below with reference to fig. 1 to 4 by taking an example of having 3 chambers (also referred to as chambers).
The vacuum chamber opening structure 100 includes:
a center guide mechanism 140, a top rotation device 160, a rotation guide 150 and a pushing structure 170,
the top rotating device 160 has a body 162, one side end of the body 162 is provided with a through hole 163, the body 162 is sleeved on the central guiding mechanism 140 through the through hole 163, the side of the body 162 far away from the through hole 163 is provided with a sliding component 164, and the sliding component 164 slides along the surface of the rotating guide rail 150, so that the top rotating device 160 rotates along the central guiding mechanism 140. A lifting mechanism 161 is provided at one side of the top rotating device 160, and a cover 132 is provided on the lifting mechanism 161 connected to the third chamber 130. Based on the action (ascending/descending) of the lifting mechanism 161 to close the cover plate after the cover plate is removed or to realize the lifting or descending of the cavity. A perforated 163 side guide 165 is provided on one side of the body 162, the side guide 165 being slidable along the side of the third chamber 130.
A push structure 170 is provided on one side of the top rotating device 160, and a push rod is provided on the push structure 170 for pushing out a selected chamber.
The pushing structure 170 is used for pushing the cavity (the first cavity 110, the second cavity 120 and the third cavity 130) to rotate, and when pushing, the pushing mechanism acts, the top rotating device brings the cavity to rotate together, the pushing mechanism can be realized through an air cylinder or a motor, and the sliding mechanism is matched with the sliding assembly and the bottom guide rail to form in the rotating process, so that the sliding is smoother.
The first chamber 110, the second chamber 120 and the third chamber 130, which are stacked in sequence, are locked by at least one locking mechanism 131 between the adjacent two chambers. The locking mechanism 131 is configured as a plug-pin type, which is removably mounted on two adjacent chambers.
The locking between the first chamber 110 and the second chamber 120 will be described by way of example,
an annular connecting portion 111 is disposed at one side of the first chamber 110, and a plurality of first insertion holes 112 are provided in the connecting portion 111. Preferably, the first insertion holes 112 are uniformly arranged along the circumferential direction of the connection portion 111.
An annular connecting portion 121 is disposed at one side of the second chamber 120, an annular connecting portion 123 is disposed at the side opposite to the connecting portion 121, and a plurality of second insertion holes 124 are provided in the connecting portion 123. When connected, the second chamber 120 is stacked on the first chamber 110, the first receptacle 112 is aligned with the second receptacle 124, and a locking mechanism 131 (also referred to as a latch) is inserted into the first receptacle 112 and the second receptacle 124. The first and second plurality of jacks 112 and 124 are connected in the same manner. Thereby enabling the connection of the first chamber 110 with the second chamber 120. The second chamber 120 is now connected to the central guide 140 by the connection 141. Such as: a first through hole 142 is disposed at one side of the connection structure 141, the connection structure 141 is sleeved on the central guide mechanism 140, a second through hole 143 is disposed at the side of the connection structure 141 far from the first through hole 142, and the second through hole 143 is fixed on the second chamber 120 through the locking mechanism 131. The locking of the first chamber and the second chamber is achieved, and the connection of the second chamber 120 and the third chamber 130 is similar to that described herein and will not be repeated. Through the design and maintenance, the chamber is opened quickly without using an external tool, the whole opening and closing process is safe, convenient and quick.
In the above manner, the locking mechanism 131 adopts a pluggable latch, and in other embodiments, the locking mechanism 131 can be plugged by adopting a cylinder or a motor, and the opening and closing of the locking mechanism are controlled by an external controller. The cylinder is a rotary clamping cylinder (for example, MK series of SMC) and its working principle is that a groove is opened on the piston rod of the cylinder, a convex device is mounted on the cylinder barrel to match with the groove, and the piston rod are driven by air pressure or hydraulic pressure to complete rotation in advance and then complete clamping action after rotating to a preset position and angle.
In the mode, the cavity is lifted or lowered by the lifting mechanism at the top, the mechanism can be realized through the air cylinder or the motor, and meanwhile, the side edge guiding structure, the center guiding mechanism and the connecting mechanism conduct lifting direction guiding on the cavity, so that deviation of the position in the lifting process is prevented.
In the above embodiment, 3 chambers (the first chamber, the second chamber, and the third chamber are described as an example), and in other embodiments, 2 chambers or 4 chambers or more are used.
The opening of the cavity/chamber is described next,
opening the first chamber:
opening the first chamber, and enabling the upper computer to select a locking mechanism matched with the first chamber to act, wherein the detection sensor signals detect the position;
the lifting mechanism is instructed to act, the lifting mechanism of the cavity upper cover ascends to a proper position along the side guiding mechanism and the center guiding mechanism, and the in-place sensor detects the in-place position;
the upper computer sends out an instruction to push the mechanism to act, the pushing mechanism is linked with the top rotating plate to drive the side guiding mechanism and the cavity, the cover rotates along the central guiding mechanism, and the sliding assembly slides on the rotating guide rail;
the connecting part at the upper part of the cavity upper cover rotates along with the cavity upper cover.
And the pushing structure outputs a signal in place, and the upper computer judges that the cavity rotates in place so as to open the first cavity. If the first chamber is closed, the opening step is reversed.
Opening a second chamber flow:
the upper computer selects a locking mechanism matched with the second cavity to act, and the detection sensor signal detects the position;
the upper computer sends out an instruction to lift the mechanism to act, the cavity upper cover lifting mechanism ascends to a proper position along the side guiding mechanism and the center guiding mechanism, and the in-place sensor detects the in-place position;
the sliding assembly slides on the rotary guide rail based on the action of the pushing mechanism and the linkage of the top rotary plate to drive the side guide mechanism and the cavity upper cover to rotate along the central guide mechanism; the connecting part of the second cavity rotates along with the cavity upper cover, the pushing structure outputs a signal in place, and the upper computer judges that the cavity rotates in place, and the locking mechanism of the cavity upper cover is always in a locking state in the period. The open state is shown in fig. 4. The second layer of cavities is closed in contrast to the open step.
The third layer cavity opening procedure and so on. Through the design, the cavity opening process is safe, the whole cavity opening action is performed inside the equipment, and other accessories are not required to be removed. Locking mechanisms corresponding to different layers of chambers are selected to realize automatic switching of the different layers of chambers.
The foregoing embodiments are provided to illustrate the technical concept and features of the present application and are intended to enable those skilled in the art to understand the contents of the present application and implement the same according to the contents, and are not intended to limit the scope of the present application. All such equivalent changes and modifications as come within the spirit of the disclosure are desired to be protected.
Claims (6)
1. A vacuum cavity open structure, comprising:
a center guiding mechanism, a top rotating device, a guiding part and a pushing structure,
the top rotating device is arranged on the upper side of the chamber,
the chamber comprises a first chamber and a second chamber, at least one locking mechanism is arranged between the first chamber and the second chamber, one side of the first chamber is provided with an annular connecting part, the connecting part is provided with a plurality of first jacks, the second chamber is provided with second jacks matched with the first jacks, the bolts of the locking mechanism are at least partially embedded into the corresponding second jacks and the first jacks to lock the first chamber and the second chamber, the locking mechanism comprises a cylinder or a motor, the output end of the locking mechanism is connected with the bolts, the cylinder or the motor is electrically connected to the controller, the locking mechanism is locked or unlocked based on the instruction action of the controller,
the top rotating device is provided with a body, one side end of the body is provided with a perforation, the body is sleeved on the central guiding mechanism through the perforation, the side of the body far away from the perforation is provided with a sliding component, a roller of the sliding component is configured to slide along the surface of the guiding part,
one side of the body is provided with a lifting mechanism, the central guiding mechanism is sleeved with connecting mechanisms matched with the number of the chambers and connected to the chambers matched and corresponding to the connecting mechanisms,
one side of the guide portion is provided with a pushing structure, the pushing structure is connected with the body, based on the action of the pushing structure, the body rotates along the central guide mechanism, and the sliding assembly slides along the surface of the guide portion to open the cavity.
2. The vacuum chamber opening structure according to claim 1, wherein,
the guide part comprises a guide rail with radian, the curvature center of the guide rail is positioned on the middle line of the center guide mechanism,
the output end of the lifting mechanism is connected with the cover plate, and the chamber is moved based on the ascending or descending of the lifting mechanism.
3. The vacuum chamber opening structure according to claim 2, wherein,
the lifting mechanism comprises a cylinder or motor which acts to raise or lower to move the chamber.
4. The vacuum chamber opening structure according to claim 1, wherein,
a side guide mechanism is disposed on one side of the body and is disposed on the same side as the lifting mechanism, the side guide mechanism being configured to be slidable along a side of the chamber.
5. The vacuum chamber opening structure according to claim 1, wherein,
the connecting mechanism is provided with a second perforation which is fixed to the corresponding cavity through a connecting piece.
6. A method of opening a cavity, comprising: the vacuum chamber opening structure according to any one of claim 1 to 5, wherein,
the cavity opening method comprises the following steps:
selecting a cavity to be opened:
unlocking a locking mechanism corresponding to the matched cavity to be opened based on the control module;
moving up the cover plate or a chamber connected with the cover plate to a preset position based on the action of the lifting mechanism;
and on the basis of the action of the pushing mechanism, one side of the top rotating device rotates along the central guiding mechanism, and the sliding component on the other side synchronously slides on the rotating guide rail so as to drive the cover plate or a chamber connected with the cover plate to synchronously rotate to a preset position, so that the selected chamber is opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210629853.6A CN115161599B (en) | 2022-06-05 | 2022-06-05 | Vacuum cavity opening structure and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210629853.6A CN115161599B (en) | 2022-06-05 | 2022-06-05 | Vacuum cavity opening structure and method |
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| Publication Number | Publication Date |
|---|---|
| CN115161599A CN115161599A (en) | 2022-10-11 |
| CN115161599B true CN115161599B (en) | 2024-04-12 |
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| CN202210629853.6A Active CN115161599B (en) | 2022-06-05 | 2022-06-05 | Vacuum cavity opening structure and method |
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| US20180222620A1 (en) * | 2017-02-06 | 2018-08-09 | Walmart Apollo, Llc | Multi-tiered item packaging carousel |
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| CN1829823A (en) * | 2003-06-06 | 2006-09-06 | 塞米用具公司 | Integrated tool with interchangeable processing components for processing microfeature workpieces and automated calibration systems |
| CN103276369A (en) * | 2013-05-06 | 2013-09-04 | 南方科技大学 | PECVD (plasma enhanced chemical vapour deposition) film-coating system |
| CN109611085A (en) * | 2018-12-03 | 2019-04-12 | 河南理工大学 | Hydraulic fracturing coal measures reservoir fracture extension morphological Simulation device and its analogy method |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN115161599A (en) | 2022-10-11 |
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