CN112921306B - Vapor deposition coating system - Google Patents
Vapor deposition coating system Download PDFInfo
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- CN112921306B CN112921306B CN202110075451.1A CN202110075451A CN112921306B CN 112921306 B CN112921306 B CN 112921306B CN 202110075451 A CN202110075451 A CN 202110075451A CN 112921306 B CN112921306 B CN 112921306B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of vapor deposition, in particular to a vapor deposition coating system, which comprises a first electrode assembly, a second electrode assembly and a coating layer, wherein the first electrode assembly is arranged along the vertical direction; a plurality of second electrode assemblies disposed in a vertical direction, the plurality of second electrode assemblies being disposed at intervals around a circumference of the first electrode assembly; the jig is arranged between the first electrode assembly and the second electrode assembly, a tray perpendicular to the jig is inserted on the jig, and the tray is used for containing a workpiece to be coated; the revolution component is used for driving the jig to rotate around the center of the first electrode component; and the rotation assembly is in transmission connection with the jig and is used for driving the jig to rotate around the axis of the rotation assembly. The invention can ensure the uniformity of film formation, and the tray on the jig is convenient to disassemble and assemble.
Description
Technical Field
The invention relates to the technical field of vapor deposition, in particular to a vapor deposition coating system.
Background
The microscopic particles are of various types, such as electrons, neutrons, protons, ions, molecules and the like, and the essential characteristics of the microscopic particles are mostly used for finishing in modern material coating and physical chemical vapor deposition technologies. The technology is very practical in material surface modification and nano material and semiconductor industries, and obtains a finished product which is waterproof, wear-resistant, microprocessor, data storage and etched. Most of vacuum coating preparation is based on glow discharge principle, and can be used as chemical cleaning process and coating deposition process. The vacuum plasma enhanced chemical vapor deposition coating process is generally completed by arranging one or more groups of polar plates in a vacuum environment to be connected with a radio frequency power supply and introducing helium to initiate glow discharge. The reaction chamber is compact because of the difficulty in obtaining vacuum and the difficulty in stabilizing pressure. In particular to a workpiece placing device on a rotary platform.
The traditional jig for preparing workpieces by vapor deposition is mainly used for a fixed workpiece frame or mechanism, the film forming uniformity is seriously influenced by the vacuum pressure gradient of a fixed reaction bin, the flowing guidance of microscopic particles and the symmetry of a plasma glow starting position, and a tray on the jig for fixing the workpieces cannot be independently disassembled in the subsequent maintenance process.
Therefore, a vapor deposition coating system is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to provide a vapor deposition coating system which can ensure the uniformity of film formation and is convenient for disassembling and assembling a tray on a jig.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vapor deposition coating system comprising:
a first electrode assembly disposed in a vertical direction;
a plurality of second electrode assemblies disposed in a vertical direction, the plurality of second electrode assemblies being disposed at intervals around a circumference of the first electrode assembly;
the jig is arranged between the first electrode assembly and the second electrode assembly, a tray perpendicular to the jig is inserted on the jig, and the tray is used for containing a workpiece to be coated;
the revolution component is used for driving the jig to rotate around the center of the first electrode component;
and the autorotation assembly is in transmission connection with the jig and is used for driving the jig to rotate around the axis of the autorotation assembly.
Further, the first electrode assembly includes: the electrode comprises an electrode shaft, a first radio-frequency electrode plate and a first grounding electrode plate;
the electrode shaft is arranged along the vertical direction, the first radio-frequency electrode plate and the first grounding electrode plate are parallel to each other and perpendicular to the electrode shaft, the first radio-frequency electrode plate and the first grounding electrode plate are arranged on the electrode shaft in a staggered mode at intervals, the first radio-frequency electrode plate is electrically connected with a first radio-frequency power supply, and the first grounding electrode plate and the first radio-frequency electrode plate are insulated from each other.
Further, the second electrode assembly comprises a fixed frame, a second radio-frequency electrode plate and a second grounding electrode plate;
the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plate and the second grounding electrode plate are parallel to each other and perpendicular to the electrode shaft, the second radio-frequency electrode plate and the second grounding electrode plate are arranged on the fixing frame in a staggered mode at intervals, the second radio-frequency electrode plate is electrically connected with a second radio-frequency power supply, the second grounding electrode plate and the second radio-frequency electrode plate are insulated from each other, the first radio-frequency electrode plate and the second radio-frequency electrode plate are located at the same height, and the first grounding electrode plate and the second grounding electrode plate are located at the same height.
Further, the revolution assembly comprises a revolution driving gear and a revolution driven gear, the revolution driving gear is meshed with the revolution driven gear, the revolution driven gear is rotatably arranged on the electrode shaft, and the jig is rotatably arranged on the revolution driven gear.
Furthermore, the rotation assembly comprises a rotation driving gear, a rotation relay gear and a rotation driven gear, the rotation driving gear, the rotation relay gear and the rotation driven gear are all rotatably arranged on the revolution driven gear, the rotation relay gear is meshed with the rotation driving gear, the rotation relay gear is meshed with the rotation driven gear, and the rotation driven gear is connected with the jig.
Further, the jig comprises a fixing shaft and a connecting flange, the fixing shaft is arranged on the connecting flange in the vertical direction, the tray is inserted on the fixing shaft, the tray is perpendicular to the fixing shaft and located between the first radio-frequency electrode plate and the first grounding electrode plate, and the connecting flange is connected with the rotation driven gear.
Furthermore, the fixed shaft comprises a rotating shaft body, the elastic limiting assembly is arranged on the outer peripheral face of the rotating shaft body in the vertical direction, and the elastic limiting assembly is clamped with the tray when the tray is inserted on the rotating shaft body.
Further, the spacing subassembly of elasticity includes installed part, compression spring and ball, the installed part is fixed to be set up on the pivot body, the installed part has well cavity, compression spring sets up in the well cavity, compression spring's one end with butt at the bottom of the chamber of well cavity, the other end with the ball butt, be provided with spacing hole on the tray, the tray is inserted and is established when on the pivot body, the ball with spacing hole joint.
Furthermore, set up on the tray along the edge of tray to the joint groove of the central extension of tray, in the joint groove is kept away from the one end at tray edge is provided with joint portion, the tray passes through joint portion with pivot body joint.
Furthermore, a guide groove is formed in the clamping portion and is L-shaped, one end of the guide groove is communicated with the clamping groove, the other end of the guide groove is communicated with the limiting hole, and when the tray is inserted on the rotating shaft body, the ball slides into the limiting hole along the guide groove.
The invention has the beneficial effects that:
according to the vapor deposition coating system provided by the invention, the first electrode assembly and the plurality of second electrode assemblies are arranged in the vertical direction, the jig is arranged between the first electrode assembly and the second electrode assemblies, and the workpiece positioned on the jig is positioned in the electric field by arranging the jig between the first electrode assembly and the second electrode assemblies, so that plasma generated in the electric field can be rapidly diffused to the workpiece, and the coating efficiency is improved; the revolution component can drive the jig to rotate around the center of the first electrode component, the rotation component is in transmission connection with the jig, and the jig is driven to rotate around the axis of the rotation component. The workpiece is uniformly swept through a region generated by plasma by the rotation and revolution of the driving jig, so that the difference of plasma concentration caused by different positions is reduced, and the uniformity of film forming is improved.
The tray is inserted on the jig, and when the tray needs to be maintained, the tray only needs to be pulled out of the jig, so that the tray is convenient to disassemble and assemble.
Drawings
FIG. 1 is a schematic view of a vapor deposition coating system of the present invention;
FIG. 2 is a front view of a first electrode assembly of a vapor deposition coating system of the present invention;
FIG. 3 is a front view of a second electrode assembly of a vapor deposition coating system of the present invention;
FIG. 4 is a front view of the revolving assembly and the rotating assembly of the coated electrode system of the present invention;
FIG. 5 is a cross-sectional view of a fixture in a coated electrode system according to the present invention;
FIG. 6 is a schematic view of a fixture in a plating electrode system according to the present invention;
FIG. 7 is a schematic view of an insert disk in a coated electrode system according to the present invention.
In the figure:
1. a first electrode assembly; 11. a first radio frequency electrode pad; 12. a first ground electrode sheet; 13. an electrode shaft; 2. a second electrode assembly; 21. a fixed mount; 22. a second radio frequency electrode sheet; 23. a second ground electrode pad; 3. a jig; 31. a fixed shaft; 311. an exhaust hole; 32. a connecting flange; 33. an elastic limit component; 331. a mounting member; 332. a compression spring; 333. a ball bearing; 34. a connecting pin; 4. a revolution component; 41. a revolution driving gear; 42. a revolution driven gear; 5. a rotation assembly; 51. a rotation driving gear; 52. a rotation relay gear; 53. a self-rotation driven gear; 6. a tray; 61. insulating paper; 62. an insertion tray; 621. a limiting hole; 622. a clamping part; 623. a sloped guide surface; 624. a guide groove.
Detailed Description
The technical scheme of the invention is further explained by combining the attached drawings and the embodiment. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In order to ensure the uniformity of the formed film and facilitate the disassembly and assembly of the tray on the jig, as shown in fig. 1-7, the invention provides a vapor deposition coating system. This vapor deposition coating system includes: the electrode assembly comprises a first electrode assembly 1, a second electrode assembly 2, a jig 3, a revolution assembly 4 and a rotation assembly 5.
Wherein the first electrode assembly 1 is arranged in a vertical direction; the plurality of second electrode assemblies 2 are arranged in the vertical direction, and the plurality of second electrode assemblies 2 are arranged at intervals around the circumference of the first electrode assembly 1; the jig 3 is arranged between the first electrode assembly 1 and the second electrode assembly 2 along the vertical direction, a tray 6 which is perpendicular to the jig 3 is inserted on the jig 3, and a workpiece to be coated is arranged on the tray 6; the revolution component 4 is used for driving the jig 3 to rotate around the center of the first electrode component 1; the rotation component 5 is in transmission connection with the jig 3 and is used for driving the jig 3 to rotate around the axis of the rotation component.
The jig 3 is arranged between the first electrode assembly 1 and the second electrode assembly 2, so that a workpiece positioned on the jig 3 is positioned in an electric field, plasma generated in the electric field can be rapidly diffused to the workpiece, and the film coating efficiency is improved; the revolution component 4 can drive the jig 3 to rotate around the center of the first electrode component 1, the rotation component 5 is in transmission connection with the jig 3, and the jig 3 is driven to rotate around the axis of the rotation component. The workpiece uniformly sweeps a region generated by plasma through rotation and revolution of the driving jig 3, so that the difference of plasma concentration caused by different positions is reduced, and the uniformity of film forming is improved.
Insert on tool 3 and be equipped with tray 6, when tray 6 needs to be maintained, only need with tray 6 take out from tool 3 can, conveniently carry out the dismouting to tray 6.
Further, the first electrode assembly 1 includes: an electrode shaft 13, a first radio frequency electrode plate 11 and a first ground electrode plate 12; the electrode shaft 13 is arranged along the vertical direction, the first radio-frequency electrode plate 11 and the first grounding electrode plate 12 are parallel to each other and perpendicular to the electrode shaft 13, and are arranged on the electrode shaft 13 in a staggered mode at intervals, the first radio-frequency electrode plate 11 is electrically connected with a first radio-frequency power supply, and the first grounding electrode plate 12 and the first radio-frequency electrode plate 11 are insulated from each other. The workpiece on the jig 3 can be arranged between the adjacent first radio-frequency electrode plate 11 and the first grounding electrode plate 12, so that the film coating efficiency is further improved.
Further, the second electrode assembly 2 includes a holder 21, a second radio-frequency electrode pad 22, and a second ground electrode pad 23; the fixing frame 21 is arranged along the vertical direction, the second radio-frequency electrode plates 22 and the second grounding electrode plates 23 are parallel to each other and perpendicular to the electrode shaft 13, and are arranged on the fixing frame 21 at intervals in a staggered manner, the second radio-frequency electrode plates 22 are electrically connected with a second radio-frequency power supply, the second grounding electrode plates 23 are insulated from the second radio-frequency electrode plates 22, the first radio-frequency electrode plates 11 and the second radio-frequency electrode plates 22 are located at the same height, and the first grounding electrode plates 12 and the second grounding electrode plates 23 are located at the same height. With the above arrangement, it is convenient to arrange the jig 3 between the first electrode assembly 1 and the second electrode assembly 2. Likewise, in order to further improve the film coating efficiency, optionally, a plurality of second ground electrode pads 23 and second radio-frequency electrode pads 22 are arranged in parallel at intervals, and the second ground electrode pads 23 and the second radio-frequency electrode pads 22 are arranged in a one-to-one correspondence manner. The workpiece on the jig 3 can be arranged between the adjacent second radio-frequency electrode plate 22 and the second grounding electrode plate 23, so that the film coating efficiency is further improved.
Further, the revolution assembly 4 includes a revolution driving gear 41 and a revolution driven gear 42, the revolution driving gear 41 is engaged with the revolution driven gear 42, the revolution driven gear 42 is rotatably disposed on the electrode shaft 13, and the jig 3 is rotatably disposed on the revolution driven gear 42. The revolution driving gear 41 drives the revolution driven gear 42 to drive the work piece assembly to rotate along with the revolution driven gear 42, so that the jig 3 rotates around the first electrode assembly 1, and the uniformity of coating is improved.
Further, the rotation assembly 5 includes a rotation driving gear 51, a rotation relay gear 52, and a rotation driven gear 53, the rotation driving gear 51, the rotation relay gear 52, and the rotation driven gear 53 are rotatably provided on the revolution driven gear 42, the rotation relay gear 52 is engaged with the rotation driving gear 51, the rotation relay gear 52 is engaged with the rotation driven gear 53, and the rotation driven gear 53 is connected to the jig 3. The rotation of the jig 3 around its axis is realized by driving the rotation driving gear 51 to drive the rotation relay gear 52 and thereby the rotation driven gear 53.
Further, the jig 3 includes a fixing shaft 31 and a connecting flange 32, the fixing shaft 31 is disposed on the connecting flange 32 in the vertical direction, the tray 6 is inserted on the fixing shaft 31, is perpendicular to the fixing shaft 31, and is located between the first radio frequency electrode plate 11 and the first ground electrode plate 12, and the connecting flange 32 is connected to the rotation driven gear 53. The connecting flange 32 is arranged to facilitate connection with the rotation driven gear 53, and the tray 6 is arranged to facilitate placement of a workpiece.
Further, in order to improve the film coating efficiency, optionally, a plurality of fixing shafts 31 are inserted together along the vertical direction, specifically, a positioning hole is provided between two adjacent fixing shafts 31, one fixing shaft 31 is inserted into the other fixing shaft 31, and a connecting pin 34 is inserted into the positioning hole to fix the two adjacent fixing shafts 31. One tray 6 is provided on each fixed shaft 31. The overall height of the fixed shaft 31 can be conveniently adjusted according to actual requirements by adopting the insertion mode of the fixed shaft 31; but also facilitates the adjustment of the number of trays 6 according to the actual need. In order to prevent air from being present between two adjacent fixing shafts 31 and causing adverse effects on coating, the fixing shafts 31 are provided with exhaust holes 311.
Further, the fixed shaft 31 comprises a rotating shaft body, the elastic limiting component 33 is arranged on the outer peripheral surface of the rotating shaft body along the vertical direction, and when the tray 6 is inserted on the rotating shaft body, the elastic limiting component 33 is connected with the tray 6 in a clamping mode. The tray 6 can be limited and fixed by arranging the elastic limiting component 33, so that the tray 6 cannot be thrown out in the moving process.
Specifically, the elastic limiting component 33 includes a mounting member 331, a compression spring 332 and a ball 333, the mounting member 331 is fixedly disposed on the rotating shaft body and has a hollow cavity, the compression spring 332 is disposed in the hollow cavity, one end of the compression spring abuts against the bottom of the hollow cavity, the other end of the compression spring abuts against the ball 333, a limiting hole 621 is disposed on the tray 6, and when the tray 6 is inserted into the rotating shaft body, the ball 333 is connected with the limiting hole 621 in a clamping manner. When the tray 6 is inserted, the balls 333 abut against the lower end surface of the tray 6, the compression spring 332 is in a compressed state, and after the tray 6 is inserted in place, the balls 333 abut against the stopper holes 621 by the action of the compression spring 332, thereby locking the tray 6 to the fixed shaft 31.
Further, set up the joint groove that extends to the center of tray 6 along the edge of tray 6 on the tray 6, keep away from the one end at 6 edges of tray in the joint groove and be provided with joint portion 622, tray 6 passes through joint portion 622 and pivot body joint. Specifically, the tray 6 is in a spoke-wheel structure, so that light weight arrangement can be realized; be provided with slope guide face 623 on the joint portion 622, can cooperate with the draw-in groove on the fixed axle 31 to when inserting tray 6, it is quick convenient, fix a position accurately moreover.
Further, a guide groove 624 is formed in the clamping portion, the guide groove 624 is L-shaped, one end of the guide groove 624 is communicated with the clamping groove, the other end of the guide groove 624 is communicated with the limiting hole 621, and when the tray 6 is inserted into the rotating shaft body, the ball 333 slides into the limiting hole 621 along the guide groove 624. Specifically, since the guide groove 624 is L-shaped, when the tray 6 is inserted into the rotating shaft body, the ball 333 slides to a corner along the guide groove 624, and the tray 6 is rotated such that the ball 333 continues to slide along the guide groove 624 to the position of the limiting hole 621 and is clamped with the limiting hole 621. Through the mode, the stability of inserting the tray 6 in the rotating shaft body can be guaranteed.
Further, the tray 6 includes: the glass fiber net is clamped between the inserting disc 62 and the chuck plate. When the tray 6 is installed, firstly, the insulating paper 61 is arranged on the lower end face of the insertion disc 62, then the glass fiber net is placed on the upper end face of the insertion disc 62, and then the chuck is fixed on the insertion disc 62 through screws, so that the glass fiber net is in a tensioning state.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (5)
1. A vapor deposition coating system, comprising:
a first electrode assembly (1) arranged in a vertical direction;
a plurality of second electrode assemblies (2) arranged in a vertical direction, and the plurality of second electrode assemblies (2) are arranged at intervals around the circumference of the first electrode assembly (1);
the jig (3) is arranged between the first electrode assembly (1) and the second electrode assembly (2), a tray (6) perpendicular to the jig (3) is inserted into the jig (3), and the tray (6) is used for containing a workpiece to be coated;
the revolution component (4) is used for driving the jig (3) to rotate around the center of the first electrode component (1);
the self-rotating assembly (5) is in transmission connection with the jig (3) and is used for driving the jig (3) to rotate around the axis of the self-rotating assembly;
the first electrode assembly (1) comprises: the electrode comprises an electrode shaft (13), a first radio-frequency electrode plate (11) and a first grounding electrode plate (12);
the electrode shaft (13) is arranged along the vertical direction, the first radio-frequency electrode plate (11) and the first grounding electrode plate (12) are parallel to each other and perpendicular to the electrode shaft (13), and are arranged on the electrode shaft (13) at intervals in a staggered manner, the first radio-frequency electrode plate (11) is electrically connected with a first radio-frequency power supply, and the first grounding electrode plate (12) is insulated from the first radio-frequency electrode plate (11);
the revolution assembly (4) comprises a revolution driving gear (41) and a revolution driven gear (42), the revolution driving gear (41) is meshed with the revolution driven gear (42), the revolution driven gear (42) is rotationally arranged on the electrode shaft (13), and the jig (3) is rotationally arranged on the revolution driven gear (42);
the rotation assembly (5) comprises a rotation driving gear (51), a rotation relay gear (52) and a rotation driven gear (53), the rotation driving gear (51), the rotation relay gear (52) and the rotation driven gear (53) are all rotatably arranged on the revolution driven gear (42), the rotation relay gear (52) is meshed with the rotation driving gear (51), the rotation relay gear (52) is meshed with the rotation driven gear (53), and the rotation driven gear (53) is connected with the jig (3);
the jig (3) comprises a fixed shaft (31) and a connecting flange (32), the fixed shaft (31) is arranged on the connecting flange (32) along the vertical direction, the tray (6) is inserted on the fixed shaft (31), the tray (6) is perpendicular to the fixed shaft (31) and is positioned between the first radio-frequency electrode plate (11) and the first grounding electrode plate (12), and the connecting flange (32) is connected with the self-rotation driven gear (53);
the fixed shaft (31) comprises a rotating shaft body, an elastic limiting component (33) is arranged on the outer peripheral surface of the rotating shaft body along the vertical direction, and when the tray (6) is inserted on the rotating shaft body, the elastic limiting component (33) is connected with the tray (6) in a clamping mode.
2. A vapor deposition coating system according to claim 1, wherein the second electrode assembly (2) comprises a fixed mount (21), a second rf electrode plate (22) and a second ground electrode plate (23);
the utility model discloses a radio frequency electrode piece, including mount (21), second radio frequency electrode piece (22) and second ground connection electrode piece (23), the mount sets up along vertical direction, second radio frequency electrode piece (22) with be parallel to each other and all perpendicular to second ground connection electrode piece (23) electrode shaft (13), and the interval is crisscross to be set up on mount (21), second radio frequency electrode piece (22) are connected with second radio frequency power supply electricity, second ground connection electrode piece (23) with second radio frequency electrode piece (22) mutual insulation, first radio frequency electrode piece (11) with second radio frequency electrode piece (22) are in same height, first ground connection electrode piece (12) with second ground connection electrode piece (23) are in same height.
3. The vapor deposition coating system according to claim 1, wherein the elastic limiting component (33) comprises a mounting member (331), a compression spring (332) and a ball (333), the mounting member (331) is fixedly arranged on the rotating shaft body, the mounting member (331) has a hollow cavity, the compression spring (332) is arranged in the hollow cavity, one end of the compression spring (332) abuts against the cavity bottom of the hollow cavity, the other end of the compression spring (332) abuts against the ball (333), a limiting hole (621) is arranged on the tray (6), and when the tray (6) is inserted on the rotating shaft body, the ball (333) is clamped with the limiting hole (621).
4. The vapor deposition coating system according to claim 3, wherein the tray (6) is provided with a clamping groove extending to the center of the tray (6) along the edge of the tray (6), a clamping portion (622) is provided at one end of the clamping groove far away from the edge of the tray (6), and the tray (6) is clamped with the rotating shaft body through the clamping portion (622).
5. The vapor deposition coating system according to claim 4, wherein the locking portion has a guide groove (624), the guide groove (624) is L-shaped, one end of the guide groove (624) is connected to the locking groove, and the other end is connected to the limiting hole (621), and when the tray (6) is inserted into the rotating shaft body, the ball (333) slides along the guide groove (624) into the limiting hole (621).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110075451.1A CN112921306B (en) | 2021-01-20 | 2021-01-20 | Vapor deposition coating system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110075451.1A CN112921306B (en) | 2021-01-20 | 2021-01-20 | Vapor deposition coating system |
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| Publication Number | Publication Date |
|---|---|
| CN112921306A CN112921306A (en) | 2021-06-08 |
| CN112921306B true CN112921306B (en) | 2023-04-11 |
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| CN202110075451.1A Active CN112921306B (en) | 2021-01-20 | 2021-01-20 | Vapor deposition coating system |
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| CN115161621B (en) * | 2022-07-28 | 2024-02-13 | 龙鳞(深圳)新材料科技有限公司 | Parallel electrode rotary coating equipment |
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|---|---|---|---|---|
| JPS63262472A (en) * | 1987-04-20 | 1988-10-28 | Sanyo Electric Co Ltd | Formation of film |
| CN103590020B (en) * | 2012-08-13 | 2015-12-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pallet component and there is its MOCVD device |
| CN104342630B (en) * | 2013-07-25 | 2018-05-25 | 北京北方华创微电子装备有限公司 | Turning gear, pallet rotary mechanism and tray transport method |
| CN111349910B (en) * | 2020-03-17 | 2022-06-17 | 龙鳞(深圳)新材料科技有限公司 | Workpiece frame and coating system |
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2021
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