CN112899661B - Film-coated electrode system - Google Patents
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- CN112899661B CN112899661B CN202110077026.6A CN202110077026A CN112899661B CN 112899661 B CN112899661 B CN 112899661B CN 202110077026 A CN202110077026 A CN 202110077026A CN 112899661 B CN112899661 B CN 112899661B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of vapor deposition, in particular to a coated electrode system, which comprises a first electrode assembly, a second electrode assembly and a third electrode assembly, wherein the first electrode assembly is arranged along the vertical direction; a plurality of second electrode assemblies disposed in a vertical direction, the plurality of second electrode assemblies being disposed at intervals around a circumference of the first electrode assembly; the workpiece frame assembly is arranged between the first electrode assembly and the second electrode assembly along the vertical direction, and a workpiece to be coated is placed on the workpiece frame assembly along the vertical direction; the revolution component is used for driving the workpiece frame component to rotate around the center of the first electrode component; and the rotation assembly is in transmission connection with the workpiece frame assembly and is used for driving the workpiece frame assembly to rotate around the axis of the rotation assembly. The invention can improve the uniformity of film formation and the film coating efficiency.
Description
Technical Field
The invention relates to the technical field of vapor deposition, in particular to a coated electrode system.
Background
At present, a cylindrical waterproof coating PECVD (chemical vapor deposition) electrode system is mainly used for coating a product by adopting an electric field formed between a vertical electrode plate and the wall of a vacuum chamber. However, the space of the electric field area is small, the occupation ratio of plasma formed by the excitation of the waterproof macromolecules is small, and the plasma generated in the electric field can reach the workpiece to be coated through diffusion movement at a certain distance, so that the uniformity of film formation is poor, and the efficiency is low.
Therefore, a coated electrode system is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to provide a film-coating electrode system which can improve the uniformity of film formation and the film-coating efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
a coated electrode system comprising:
a first electrode assembly disposed in a vertical direction;
a plurality of second electrode assemblies disposed in a vertical direction, the plurality of second electrode assemblies being disposed at intervals around a circumference of the first electrode assembly;
the workpiece frame assembly is arranged between the first electrode assembly and the second electrode assembly along the vertical direction, and a workpiece to be coated is placed on the workpiece frame assembly along the vertical direction;
the revolution component is used for driving the workpiece frame component to rotate around the center of the first electrode component;
and the rotation assembly is in transmission connection with the workpiece frame assembly and is used for driving the workpiece frame assembly to rotate around the axis of the rotation assembly.
Further, the first electrode assembly includes: the electrode comprises an electrode shaft, a first radio-frequency electrode plate and a first grounding electrode plate;
the electrode shaft is arranged along the vertical direction, the first radio-frequency electrode plate and the first grounding electrode plate are parallel to each other and perpendicular to the electrode shaft, the first radio-frequency electrode plate and the first grounding electrode plate are arranged on the electrode shaft at intervals in a staggered mode, the first radio-frequency electrode plate is electrically connected with a radio-frequency power supply, the first grounding electrode plate and the first radio-frequency electrode plate are insulated from each other, and the electrode shaft and the first radio-frequency electrode plate are insulated from each other.
Further, the second electrode assembly comprises a fixing frame, a second radio-frequency electrode plate and a second grounding electrode plate;
the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plate and the second grounding electrode plate are parallel to each other and perpendicular to the electrode shaft, the second radio-frequency electrode plate and the second grounding electrode plate are arranged on the fixing frame in a staggered mode at intervals, the second radio-frequency electrode plate is electrically connected with the radio-frequency power supply, the second grounding electrode plate is insulated from the second radio-frequency electrode plate, the second radio-frequency electrode plate is insulated from the fixing frame, the first radio-frequency electrode plate is located at the same height as the second radio-frequency electrode plate, and the first grounding electrode plate is located at the same height as the second grounding electrode plate.
Furthermore, the mount includes two arc and connecting piece that parallel interval set up, the connecting piece sets up along vertical direction, the both ends of connecting piece respectively with two the arc is connected.
Furthermore, the revolution component comprises a revolution driving gear and a revolution driven gear, the revolution driving gear is meshed with the revolution driven gear, the revolution driven gear is rotatably arranged on the electrode shaft, and the workpiece holder component is rotatably arranged on the revolution driven gear.
Further, revolution driven gear includes interconnect's ring gear portion and platform portion, the ring gear portion with the revolution driving gear meshes mutually, the platform portion deviates from one side of ring gear portion is provided with work rest assembly.
Furthermore, the rotation assembly comprises a rotation driving gear and a rotation relay gear, the rotation driving gear is rotatably arranged on the revolution driven gear, the rotation relay gear is meshed with the rotation driving gear, and the rotation relay gear is in transmission connection with the workpiece frame assembly.
Further, the workpiece holder assembly includes a rotation driven gear engaged with the rotation relay gear, and a workpiece holder connected with the rotation driven gear, the workpiece holder being disposed between the first electrode assembly and the second electrode assembly.
Furthermore, the workpiece frame comprises a workpiece disc, a fixed shaft and a connecting flange, the fixed shaft is arranged on the connecting flange along the vertical direction, the workpiece disc is arranged on the fixed shaft and is positioned between the first radio-frequency electrode plate and the first grounding electrode plate, and the connecting flange is connected with the rotation driven gear.
Further, the plurality of work carrier assemblies are arranged at intervals along the circumferential direction of the rotation relay gear.
The invention has the beneficial effects that:
according to the film coating electrode system, the first electrode assembly and the plurality of second electrode assemblies are arranged in the vertical direction, the workpiece holder assembly is arranged between the first electrode assembly and the second electrode assembly, and a product on the workpiece holder assembly is positioned in an electric field by arranging the workpiece holder assembly between the first electrode assembly and the second electrode assembly, so that plasma generated in the electric field can be rapidly diffused to the product, and the film coating efficiency is improved; the revolution component can drive the workpiece frame component to rotate around the center of the first electrode component, and the rotation component is in transmission connection with the workpiece frame component and drives the workpiece frame component to rotate around the axis of the rotation component. The rotation and revolution of the workpiece frame assembly are driven to enable the product to be subjected to film forming in different positions and areas with different plasma concentrations, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film forming is improved.
Drawings
FIG. 1 is a schematic view of a coated electrode system of the present invention;
FIG. 2 is a front view of a first electrode assembly of a coated electrode system of the present invention;
FIG. 3 is a front view of a second electrode assembly in a membrane electrode assembly according to the present invention;
FIG. 4 is a front view of the revolving assembly and the rotating assembly of the coated electrode system of the present invention;
FIG. 5 is a schematic view of a workpiece holder in a coated electrode system according to the present invention.
In the figure:
1. a first electrode assembly; 11. a first radio frequency electrode pad; 12. a first ground electrode pad; 13. an electrode shaft; 14. a first connecting piece; 2. a second electrode assembly; 21. an arcuate member; 22. a connecting member; 23. a second radio frequency electrode sheet; 24. a second ground electrode pad; 3. a workpiece carrier assembly; 31. a self-rotation driven gear; 32. a connecting flange; 33. a workpiece tray; 4. a revolution component; 41. a revolution driving gear; 42. a rim portion; 43. a platform part; 5. a rotation assembly; 51. a rotation driving gear; 52. and a rotation relay gear.
Detailed Description
The technical scheme of the invention is further explained by combining the attached drawings and the embodiment. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the features relevant to the present invention are shown in the drawings.
In the description of the present invention, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and encompass, for example, both fixed and removable connections unless otherwise explicitly stated or limited; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless expressly stated or limited otherwise, the recitation of a first feature "on" or "under" a second feature may include the recitation of the first and second features being in direct contact, and may also include the recitation that the first and second features are not in direct contact, but are in contact via another feature between them. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.
In order to improve the uniformity of film formation and the film coating efficiency, the invention provides a film coating electrode system as shown in figures 1-5. This coating film electrode system includes: a first electrode assembly 1, a plurality of second electrode assemblies 2, a work carrier assembly 3, a revolution assembly 4 and a rotation assembly 5.
Wherein the first electrode assembly 1 is arranged in a vertical direction; the plurality of second electrode assemblies 2 are arranged in the vertical direction, and the plurality of second electrode assemblies 2 are arranged at intervals around the circumference of the first electrode assembly 1; the work piece frame component 3 is arranged between the first electrode component 1 and the second electrode component 2 along the vertical direction, and a work piece to be coated is placed on the work piece frame component 3 along the vertical direction; the revolution component 4 is used for driving the work piece component 3 to rotate around the center of the first electrode component 1; the rotation assembly 5 is in transmission connection with the workpiece frame assembly 3 and is used for driving the workpiece frame assembly 3 to rotate around the axis of the rotation assembly.
The workpiece holder assembly 3 is arranged on the first electrode assembly 1 and the second electrode assembly 2, so that a product on the workpiece holder assembly 3 is positioned in an electric field, and plasma generated in the electric field can be rapidly diffused to the product, and the film coating efficiency is improved; the revolution component 4 can drive the workpiece frame component 3 to rotate around the center of the first electrode component 1, and the rotation component 5 is in transmission connection with the workpiece frame component 3 and drives the workpiece frame component 3 to rotate around the axis of the rotation component. The rotation and revolution of the workpiece frame assembly 3 are driven to enable the product to be subjected to film forming in different positions and areas with different plasma concentrations, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film forming is improved.
Further, the first electrode assembly 1 includes: an electrode shaft 13, a first radio frequency electrode plate 11 and a first ground electrode plate 12; the electrode shaft 13 is arranged along the vertical direction, the first radio-frequency electrode plate 11 and the first grounding electrode plate 12 are parallel to each other and perpendicular to the electrode shaft 13, and are arranged on the electrode shaft 13 at intervals in a staggered mode, the first radio-frequency electrode plate 11 is electrically connected with a radio-frequency power supply, the first grounding electrode plate 12 is insulated from the first radio-frequency electrode plate 11, and the first radio-frequency electrode plate 11 is insulated from the electrode shaft 13. In order to further improve the film coating efficiency, optionally, a plurality of first ground electrode plates 12 and a plurality of first radio-frequency electrode plates 11 are arranged in parallel at intervals, and the first ground electrode plates 12 and the first radio-frequency electrode plates 11 are arranged in a one-to-one correspondence manner. The product on the work piece holder assembly 3 can be arranged between the adjacent first radio-frequency electrode plate 11 and the first grounding electrode plate 12, so that the film coating efficiency is further improved.
In order to facilitate connection with the radio frequency power supply, optionally, a first connection tab 14 is provided along the vertical direction, the first radio frequency electrode pads 11 are all connected with the first connection tab 14, the first ground electrode pad 12 is connected with the electrode shaft 13, and the first radio frequency electrode pads 11 are insulated from the electrode shaft 13.
Further, the second electrode assembly 2 includes a holder, a second radio-frequency electrode pad 23, and a second ground electrode pad 24; the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plates 23 and the second grounding electrode plates 24 are parallel to each other and perpendicular to the fixing frame, and are arranged on the fixing frame at intervals in a staggered manner, the second radio-frequency electrode plates 23 are electrically connected with a radio-frequency power supply, the second grounding electrode plates 24 are insulated from the second radio-frequency electrode plates 23, and the second radio-frequency electrode plates 23 are insulated from the fixing frame; the first radio-frequency electrode pad 11 and the second radio-frequency electrode pad 23 are at the same height, and the first ground electrode pad 12 and the second ground electrode pad 24 are at the same height. With the above arrangement, it is convenient to arrange the workpiece holder assembly 3 between the first electrode assembly 1 and the second electrode assembly 2. Likewise, in order to further improve the film coating efficiency, optionally, a plurality of second ground electrode pads 24 and a plurality of second radio-frequency electrode pads 23 are arranged in parallel at intervals, and the second ground electrode pads 24 and the second radio-frequency electrode pads 23 are arranged in a one-to-one correspondence manner. Products on the work piece rack assembly 3 can be arranged between the adjacent second radio-frequency electrode plate 23 and the second grounding electrode plate 24, so that the film coating efficiency is further improved.
Further, the mount includes two arc parts 21 and connecting piece 22 that parallel interval set up, and connecting piece 22 sets up along vertical direction, and the both ends of connecting piece 22 are connected with two arc parts 21 respectively. By using the arc member 21, it is convenient for the fixing frame to be arranged along the circumferential direction of the first electrode assembly 1 and to be concentric with the center of the first electrode assembly 1. The connecting piece 22 connects the arc pieces 21, and the structure can be simplified.
Further, the revolution assembly 4 includes a revolution driving gear 41 and a revolution driven gear, the revolution driving gear 41 is engaged with the revolution driven gear, the revolution driven gear is rotatably disposed on the electrode shaft 13, and the work head assembly 3 is rotatably disposed on the revolution driven gear. The revolution driving gear 41 drives the revolution driven gear to drive the work piece frame assembly 3 to rotate along with the revolution driven gear, so that the work piece frame assembly 3 rotates around the center of the first electrode assembly 1, and the uniformity of film coating is improved.
Further, the revolution driven gear includes a ring gear portion 42 and a land portion 43 connected to each other, the ring gear portion 42 is engaged with the revolution driving gear 41, and a side of the land portion 43 facing away from the ring gear portion 42 is provided with the work carrier assembly 3. The provision of the terrace portions 43 and the ring gear portions 42 facilitates reduction in weight of the revolving driven gear, and also facilitates mounting of the first electrode assembly 1 and the workpiece holder assembly 3 on the terrace portions 43.
Further, the rotation assembly 5 includes a rotation driving gear 51 and a rotation relay gear 52, the rotation driving gear 51 is rotatably disposed on the revolution driven gear, the rotation relay gear 52 is engaged with the rotation driving gear 51, and the rotation relay gear 52 is drivingly connected with the work head assembly 3. The rotation of the work carrier assembly 3 around its axis is realized by driving the rotation driving gear 51 to drive the rotation relay gear 52 to rotate the work carrier assembly 3.
Further, the work carrier assembly 3 includes a rotation driven gear 31 and a work carrier, the rotation driven gear 31 is engaged with the rotation relay gear 52, the work carrier is connected with the rotation driven gear 31, and the work carrier is disposed between the first electrode assembly 1 and the second electrode assembly 2. The rotation relay gear 52 drives the rotation driven gear 31 to drive the workpiece holder to rotate, so that the workpiece holder rotates, and the uniformity of the coating film can be improved.
Further, the workpiece holder includes a workpiece tray 33, a fixed shaft and a connecting flange 32, the fixed shaft is disposed on the connecting flange 32 along a vertical direction, the workpiece tray 33 is disposed on the fixed shaft and is located between the first radio frequency electrode plate 11 and the first ground electrode plate 12, and the connecting flange 32 is connected to the rotation driven gear 31. In order to further improve the coating efficiency, the workpiece disk 33 is provided in plurality at intervals along the axial direction of the fixed shaft. The connecting flange 32 is arranged to facilitate connection with the rotation driven gear 31, and the workpiece disc 33 is arranged to facilitate placement of products.
In order to further improve the plating efficiency, a plurality of the work carrier assemblies 3 are optionally provided at intervals in the circumferential direction of the rotation relay gear 52. By providing the rotation relay gear 52, the plurality of rotation driven gears 31 can be driven to rotate at the same time, and thus the rotation of the plurality of work rests can be realized.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (9)
1. A coated electrode system, comprising:
a first electrode assembly (1) disposed in a vertical direction;
a plurality of second electrode assemblies (2) arranged in a vertical direction, the plurality of second electrode assemblies (2) being arranged at intervals around the circumference of the first electrode assembly (1);
the workpiece frame assembly (3) is arranged between the first electrode assembly (1) and the second electrode assembly (2) along the vertical direction, and a workpiece to be coated is placed on the workpiece frame assembly (3) along the vertical direction;
the revolution component (4) is used for driving the workpiece holder component (3) to rotate around the center of the first electrode component (1);
the rotation assembly (5) is in transmission connection with the workpiece frame assembly (3) and is used for driving the workpiece frame assembly (3) to rotate around the axis of the rotation assembly;
the first electrode assembly (1) comprises: the electrode comprises an electrode shaft (13), a first radio-frequency electrode plate (11) and a first grounding electrode plate (12);
the electrode shaft (13) is arranged along the vertical direction, the first radio-frequency electrode plate (11) and the first grounding electrode plate (12) are parallel to each other and perpendicular to the electrode shaft (13), and are arranged on the electrode shaft (13) at intervals in a staggered mode, the first radio-frequency electrode plate (11) is electrically connected with a radio-frequency power supply, the first grounding electrode plate (12) is mutually insulated from the first radio-frequency electrode plate (11), and the electrode shaft (13) is mutually insulated from the first radio-frequency electrode plate (11).
2. A coated electrode system according to claim 1, wherein the second electrode assembly (2) comprises a fixed mount, a second rf electrode pad (23) and a second ground electrode pad (24);
the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plates (23) and the second grounding electrode plates (24) are parallel to each other and perpendicular to the fixing frame, the second radio-frequency electrode plates are arranged on the fixing frame in a staggered mode at intervals, the second radio-frequency electrode plates (23) are electrically connected with the radio-frequency power supply, the second grounding electrode plates (24) are insulated from the second radio-frequency electrode plates (23), the second radio-frequency electrode plates (23) are insulated from the fixing frame, the first radio-frequency electrode plates (11) are located at the same height as the second radio-frequency electrode plates (23), and the first grounding electrode plates (12) are located at the same height as the second grounding electrode plates (24).
3. A coated electrode system according to claim 2, wherein the holder comprises two arc-shaped members (21) and a connecting member (22) arranged in parallel and spaced apart, the connecting member (22) is arranged in a vertical direction, and two ends of the connecting member (22) are respectively connected with the two arc-shaped members (21).
4. The coated electrode system according to claim 1, wherein the revolution assembly (4) comprises a revolution driving gear (41) and a revolution driven gear, the revolution driving gear (41) is engaged with the revolution driven gear, the revolution driven gear is rotatably arranged on the electrode shaft (13), and the workpiece holder assembly (3) is rotatably arranged on the revolution driven gear.
5. A coated electrode system according to claim 4, characterized in that the revolving driven gear comprises a gear ring portion (42) and a platform portion (43) connected to each other, the gear ring portion (42) is engaged with the revolving driving gear (41), and a side of the platform portion (43) facing away from the gear ring portion (42) is provided with the work carrier assembly (3).
6. A coated electrode system according to claim 4, wherein the rotation assembly (5) comprises a rotation driving gear (51) and a rotation relay gear (52), the rotation driving gear (51) is rotatably arranged on the revolution driven gear, the rotation relay gear (52) is meshed with the rotation driving gear (51), and the rotation relay gear (52) is in transmission connection with the workpiece holder assembly (3).
7. The system according to claim 6, wherein the workpiece holder assembly (3) comprises a rotation driven gear (31) and a workpiece holder, the rotation driven gear (31) is meshed with the rotation relay gear (52), the workpiece holder is connected with the rotation driven gear (31), and the workpiece holder is arranged between the first electrode assembly (1) and the second electrode assembly (2).
8. A coated electrode system according to claim 7, wherein the workpiece holder includes a workpiece tray (33), a fixed shaft and a connecting flange (32), the fixed shaft is disposed on the connecting flange (32) along a vertical direction, the workpiece tray (33) is disposed on the fixed shaft and is located between the first radio frequency electrode sheet (11) and the first ground electrode sheet (12), and the connecting flange (32) is connected with the rotation driven gear (31).
9. A coated electrode system according to claim 7, wherein the work carrier assembly (3) is provided in plurality at intervals in the circumferential direction of the rotation relay gear (52).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110077026.6A CN112899661B (en) | 2021-01-20 | 2021-01-20 | Film-coated electrode system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110077026.6A CN112899661B (en) | 2021-01-20 | 2021-01-20 | Film-coated electrode system |
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| CN112899661A CN112899661A (en) | 2021-06-04 |
| CN112899661B true CN112899661B (en) | 2023-04-07 |
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Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63262472A (en) * | 1987-04-20 | 1988-10-28 | Sanyo Electric Co Ltd | Formation of film |
| CN111349910B (en) * | 2020-03-17 | 2022-06-17 | 龙鳞(深圳)新材料科技有限公司 | Workpiece frame and coating system |
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