CN214810725U - Revolution and rotation platform and vacuum chemical reaction cavity - Google Patents

Abstract

The utility model discloses a revolution rotation platform and vacuum chemical reaction cavity belongs to rotary platform technical field. The utility model discloses a revolution rotation platform installs rotation drive assembly in the installation space of revolution platform bottom, and then has solved among the prior art gear train and set up two-layer at least, and bulky problem has compact structure, advantage that bearing capacity is strong. A first avoidance through hole is formed in the center of the revolution table and used for installing the radio-frequency electrode assembly, so that the radio-frequency electrode assembly is not interfered when the revolution table rotates, and the problem of conductive connection of the radio-frequency electrode assembly is solved. The utility model discloses a vacuum chemical reaction cavity through using above-mentioned revolution rotation platform, has still improved vacuum environment utilization ratio.

Description

Revolution and rotation platform and vacuum chemical reaction cavity

Technical Field

The utility model relates to a rotary platform technical field especially relates to a revolution rotation platform and vacuum chemical reaction cavity.

Background

The vacuum environment space is precious, the revolution and rotation platform applied to the chemical reaction cavity is large in volume and low in space utilization rate, so that the vacuum environment is wasted, and the radio frequency electrode assembly is interfered. In addition, in order to meet the requirements of revolution and rotation, the gear sets of the revolution and rotation platforms are at least provided with two layers of gear sets, and the size is large. Some manufacturers reduce the thickness of the gear in order to save space, and this treatment reduces the carrying capacity of the platform and shortens the service life of the platform.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a revolution rotation platform, compact structure, bearing capacity is strong, still can not interfere radio frequency electrode subassembly.

Another object of the utility model is to provide a vacuum chemical reaction cavity has improved vacuum environment utilization through using above-mentioned revolution rotation platform.

In order to realize the purpose, the following technical scheme is provided:

in one aspect, a revolving and rotating platform is provided, which includes:

the revolution platform is rotatably arranged on the equipment base; the bottom of the revolution platform is provided with an installation space; a first avoidance through hole is formed in the center of the revolution platform;

the plurality of self-rotating tables are rotatably arranged on the revolution table;

the revolution driving component is configured to drive the revolution table to rotate;

a rotation driving assembly configured to drive the rotation of the plurality of rotation tables; the rotation driving assembly is arranged in the installation space.

As a preferable aspect of the revolution and rotation platform, the rotation driving assembly includes:

the inner and outer gear wheels are rotatably arranged in the mounting space, and the plurality of self-rotating tables are in transmission connection with the inner and outer gear wheels;

and the rotation driving piece is configured to drive the inner and outer gear wheels to rotate.

As a preferable aspect of the revolution and rotation platform, the rotation driving assembly further includes:

the rotation driving gear is arranged on the rotation driving piece and is meshed with the inner gear and the outer gear;

the automatic rotating table is provided with a plurality of automatic rotating driven gears, and the automatic rotating driven gears are meshed with the inner and outer gear wheels.

As a preferred scheme of the revolution and rotation platform, the rotation driving assembly further comprises an adapter, the inner and outer gear wheels are fixedly connected with the adapter, the adapter is rotatably arranged at the bottom of the revolution platform, and a second avoidance through hole matched with the first avoidance through hole is arranged at the center of the adapter.

As the preferred scheme of revolution rotation platform, be equipped with regulation through-hole and multiunit connecting hole on the equipment base, the rotation driving piece wears to establish in the regulation through-hole, the multiunit connecting hole is followed the radial interval of regulation through-hole sets up, the rotation driving piece is connected with the alternative of multiunit connecting hole.

As a preferable aspect of the revolution and rotation platform, the revolution driving assembly includes:

the revolution rotary support gear is arranged at the bottom of the revolution table and is rotationally connected with the equipment base;

and the revolution driving piece is configured to drive the revolution rotary supporting gear to rotate.

As a preferred scheme of the revolution and rotation platform, a hollow supporting column is arranged on the equipment base, the revolution and rotation supporting gear is rotatably sleeved on the supporting column, and the installation space is formed between the revolution and rotation supporting gear and the supporting column.

As a preferred scheme of the revolution and rotation platform, the revolution driving assembly further comprises a revolution driving gear, the revolution driving gear is arranged on the revolution driving member, and the revolution driving gear is meshed with the revolution rotation supporting gear.

As a preferable scheme of the revolution and rotation platform, the upper surfaces of the rotation platforms are all higher than the revolution platform.

In another aspect, a vacuum chemical reaction chamber is provided, which includes the revolution and rotation platform, and the equipment base is the bottom of the vacuum chemical reaction chamber.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses a revolution and rotation platform, which comprises a revolution platform, a plurality of rotation platforms, a revolution driving assembly and a rotation driving assembly, wherein the revolution platform is rotatably arranged on an equipment base; the bottom of the revolution platform is provided with an installation space; a first avoidance through hole is formed in the center of the revolution platform; the plurality of self-rotating tables are rotatably arranged on the revolution table; the revolution driving component is configured to drive the revolution table to rotate; the rotation driving assembly is configured to drive the rotation of the plurality of rotation tables; the rotation driving assembly is arranged in the installation space. The rotation driving assembly is arranged in the installation space at the bottom of the revolution platform, so that the problems that in the prior art, gear sets are at least two layers and large in size are solved, and the rotation driving assembly has the advantages of being compact in structure and high in bearing capacity. A first avoidance through hole is formed in the center of the revolution table and used for installing the radio-frequency electrode assembly, so that the radio-frequency electrode assembly is not interfered when the revolution table rotates, and the problem of conductive connection of the radio-frequency electrode assembly is solved.

The utility model discloses a vacuum chemical reaction cavity through using above-mentioned revolution rotation platform, has still improved vacuum environment utilization ratio.

Drawings

Fig. 1 is a schematic structural view of a revolving and rotating platform in an embodiment of the present invention;

fig. 2 is a side view of the revolving and rotating platform in the embodiment of the present invention;

fig. 3 is a sectional view of the revolving and rotating platform according to the embodiment of the present invention.

Reference numerals:

100. an equipment base; 101. installing a shaft; 102. adjusting the through hole; 103. connecting holes; 104. a support pillar;

1. a revolution table; 11. an installation space; 12. a first avoidance through hole;

2. a self-rotating table; 21. a rotation shaft;

3. a revolution driving assembly; 31. a revolving slewing bearing gear; 32. a revolution driving member; 33. a revolution driving gear;

4. a rotation driving assembly; 41. internal and external gear wheels; 42. a self-rotation driving member; 43. a rotation driving gear; 44. a self-rotation driven gear; 45. an adapter; 451. a transfer ring; 452. a transfer seat; 4521. and a second avoiding through hole.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description of the present invention and simplification of description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; either mechanically or electrically. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

As shown in fig. 1 to 3, the present embodiment is directed to providing a revolving and rotating platform, which includes a revolving stage 1, a plurality of rotating stages 2, a revolving driving assembly 3, and a rotating driving assembly 4, wherein the revolving stage 1 is rotatably disposed on an apparatus base 100; the bottom of the revolution platform 1 is provided with an installation space 11; a first avoidance through hole 12 is formed in the center of the revolution platform 1; a plurality of self-rotating tables 2 are rotatably arranged on the revolution table 1; the revolution driving assembly 3 is configured to drive the revolution table 1 to rotate; the rotation driving assembly 4 is configured to drive the plurality of self-rotating tables 2 to rotate; the rotation driving unit 4 is disposed in the installation space 11. The number of the self-rotating tables 2 can be set according to requirements.

It can be understood that the rotation driving assembly 4 is installed in the installation space 11 at the bottom of the revolution platform 1, so that the problem that the size is large because the gear set is at least two layers in the prior art is solved, and the rotation driving assembly has the advantages of compact structure and strong bearing capacity.

Optionally, the rotation driving assembly 4 includes an internal and external gear 41 and a rotation driving member 42, the internal and external gear 41 is rotatably disposed in the installation space 11, and the plurality of self-rotating tables 2 are in transmission connection with the internal and external gear 41; the rotation drive member 42 is configured to drive the internal and external gear 41 to rotate. Further, the rotation driving assembly 4 further includes a rotation driving gear 43 and a plurality of rotation driven gears 44, the rotation driving gear 43 is disposed on the rotation driving member 42, and the rotation driving gear 43 is engaged with the inner and outer gear wheels 41; the self-rotating tables 2 are each provided with a rotation driven gear 44, and the rotation driven gear 44 is engaged with the internal and external gear 41. Illustratively, the rotation table 2 is provided with a rotation shaft 21 at the center thereof, the rotation shaft 21 is rotatably connected with the revolution table 1 through a bearing, the bottom end of the rotation shaft 21 passes through the revolution table 1 and then is positioned below the revolution table 1, and a rotation driven gear 44 is fixed at the bottom end of the rotation shaft 21. The inner sides of the internal and external gears 41 are provided with internal teeth, the outer sides of the internal and external gears 41 are provided with external teeth, the rotation driving gear 43 is meshed with the internal teeth of the internal and external gears 41, the rotation driven gear 44 is meshed with the external teeth of the internal and external gears 41, the rotation driving member 42 is a motor, the motor is used for driving the rotation driving gear 43 to rotate, the rotation driving gear 43 drives the internal and external gears 41 to rotate, the internal and external gears 41 drive the rotation driven gear 44 to rotate, and then the corresponding rotation table 2 is driven to rotate through the rotation driven gear 44.

In order to increase the rotation fluency and the bearing capacity of the self-rotating platform 2, a supporting bearing is arranged between the self-rotating platform 2 and the revolution platform 1.

Further, the rotation driving assembly 4 further comprises an adaptor 45, the inner and outer gear wheels 41 are fixedly connected with the adaptor 45, the adaptor 45 is rotatably arranged at the bottom of the revolution platform 1, and a second avoidance through hole 4521 matched with the first avoidance through hole 12 is arranged at the center of the adaptor 45. Illustratively, the adaptor 45 includes an adaptor ring 451 and an adaptor base 452, the adaptor base 452 is fixed at the bottom of the revolving stage 1 by bolts, an outer edge of the adaptor ring 451 is fixedly connected with the inner and outer toothed gears 41 by bolts, and an inner edge of the adaptor ring 451 is rotatably connected with the adaptor base 452 by a bearing. The second avoidance through hole 4521 is arranged at the center of the adapter 452, that is, the adapter 452 is sleeved outside the first avoidance through hole 12, and the second avoidance through hole 4521 and the first avoidance through hole 12 are coaxially arranged to form an independent area at the center of the revolving and rotating platform.

Illustratively, the mounting shaft 101 is arranged on the device base 100, the mounting shaft 101 penetrates through the first avoidance through hole 12 and the second avoidance through hole 4521, the mounting shaft 101 can be arranged in an independent area formed at the center of the revolution and rotation platform, and the radio frequency electrode assembly (the cathode plate and the anode plate are alternately arranged and conduct electricity) is arranged at the top of the mounting shaft 101, so that the radio frequency electrode assembly is prevented from interfering the work when the revolution platform 1 rotates, and the problem of conductive connection of the radio frequency electrode assembly in the center is solved. The mounting shaft 101 may be fixed or rotatably disposed on the apparatus base 100 without interference of the radio frequency electrode assembly with rotation of the revolution table 1. At the same time, the rotation driving gear 43 meshes with the internal teeth of the internal and external gears 41, and the rotation driven gear 44 meshes with the external teeth of the internal and external gears 41, and also functions to escape from the mounting shaft 101.

Optionally, the apparatus base 100 is provided with an adjusting through hole 102 and a plurality of sets of connection holes 103, the rotation driving member 42 is inserted into the adjusting through hole 102, the plurality of sets of connection holes 103 are arranged at intervals along the radial direction of the adjusting through hole 102, and the rotation driving member 42 is selectively connected with the plurality of sets of connection holes 103. The rotation driving member 42 is connected with different sets of connecting holes 103 by bolts to adjust the distance between the rotation driving gear 43 and the internal and external gear 41, thereby ensuring the good matching between the two.

Alternatively, the revolution driving assembly 3 includes a revolution slewing bearing gear 31 and a revolution driving member 32, the revolution slewing bearing gear 31 is disposed at the bottom of the revolution table 1, and the revolution slewing bearing gear 31 is rotatably connected with the apparatus base 100; the revolving drive 32 is configured to drive the revolving slewing bearing gear 31 to rotate. Further, the revolution driving assembly 3 further includes a revolution driving gear 33, the revolution driving gear 33 is disposed on the revolution driving member 32, and the revolution driving gear 33 is engaged with the revolution rotary supporting gear 31. Further, a hollow supporting column 104 is arranged on the equipment base 100, the revolving rotary support gear 31 is rotatably sleeved on the supporting column 104, and an installation space 11 is formed between the revolving rotary support gear 31 and the supporting column 104. Illustratively, the revolving rotary support gear 31 is sleeved outside the support column 104 and is rotatably connected with the support column 104 through a bearing. The revolution driving member 32 is a motor, and the revolution driving gear 33 is driven by the motor to rotate, the revolution driving gear 33 drives the revolution slewing bearing gear 31 to rotate, and further drives the revolution table 1 to rotate through the revolution slewing bearing gear 31, and the revolution slewing bearing gear 31 can drive the revolution table 1 to rotate and can also play a supporting role for the revolution table 1.

Preferably, the upper surfaces of the rotation tables 2 are all higher than the revolution table 1. When designing and manufacturing, the upper surface of the self-rotating table 2 is required to be a plurality of millimeters higher than the revolution table 1 so as to prevent the workpieces placed on the self-rotating table 2 from rubbing against the revolution table 1. It is understood that, in order to prevent foreign matters from falling into a gap between the self-rotation table 2 and the revolution table 1, the self-rotation table 2 may be made higher than the revolution table 1 and the diameter of the self-rotation table 2 may be increased to cover an opening on the revolution table 1.

The present embodiment further provides a vacuum chemical reaction chamber, which includes the revolution and rotation platform, and the apparatus base 100 is a bottom of the vacuum chemical reaction chamber. By applying the revolution and rotation platform, the utilization rate of the vacuum environment is improved.

It should be noted that, when the revolution and rotation platform is applied in the vacuum chemical reaction chamber, each component of the revolution and rotation platform needs to have the effects of chemical corrosion resistance and plasma oxidation cleaning, so as to solve the material selection problem under the high-corrosivity chemical environment. Illustratively, all the end cover parts, the revolution table 1 and the rotation table 2 are made of aluminum alloy, all the gears are made of common gear materials, and the surfaces of all the gears are provided with hard chromium plating to reduce surface chemical corrosion.

It should be further noted that, when the revolution and rotation platform is applied to a vacuum environment, the revolution driving element 32 and the rotation driving element 42 are both disposed outside the vacuum environment, and the revolution driving assembly 3 and the rotation driving assembly 4 both include a magnetic fluid sealing element or a rotary shaft lip-shaped sealing element, so as to seal the vacuum environment.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims (10)

1. A revolving and rotating platform, comprising:

the revolution platform (1) is rotatably arranged on the equipment base (100); the bottom of the revolution platform (1) is provided with an installation space (11); a first avoidance through hole (12) is formed in the center of the revolution platform (1);

a plurality of self-rotating tables (2), a plurality of self-rotating tables (2) being rotatably provided on the common rotating table (1);

a revolution driving component (3) which is configured to drive the revolution platform (1) to rotate;

a rotation driving assembly (4) configured to drive the rotation of the plurality of self-rotating tables (2); the rotation driving assembly (4) is arranged in the installation space (11).

2. A revolving and rotating platform according to claim 1, wherein said rotation driving assembly (4) comprises:

the internal and external gear wheels (41) are rotatably arranged in the mounting space (11), and the self-rotating tables (2) are in transmission connection with the internal and external gear wheels (41);

and a rotation driving member (42) configured to drive the internal and external gear (41) to rotate.

3. A revolving and rotating platform according to claim 2, wherein said rotation driving assembly (4) further comprises:

a rotation driving gear (43) provided on the rotation driving member (42), the rotation driving gear (43) being engaged with the internal and external gear (41);

the automatic rotating table is characterized by comprising a plurality of automatic rotating driven gears (44), the automatic rotating driven gears (44) are arranged on the automatic rotating table (2), and the automatic rotating driven gears (44) are meshed with the internal and external gear wheels (41).

4. A revolving and rotating platform according to claim 2, wherein the rotating drive assembly (4) further comprises an adaptor (45), the inner and outer gears (41) are fixedly connected with the adaptor (45), the adaptor (45) is rotatably arranged at the bottom of the revolving platform (1), and a second avoiding through hole (4521) matched with the first avoiding through hole (12) is arranged at the center of the adaptor (45).

5. A revolving and rotating platform according to claim 2, wherein the apparatus base (100) is provided with an adjusting through hole (102) and a plurality of sets of connecting holes (103), the rotating driving member (42) is inserted into the adjusting through hole (102), the plurality of sets of connecting holes (103) are arranged at intervals along the radial direction of the adjusting through hole (102), and the rotating driving member (42) is selectively connected with the plurality of sets of connecting holes (103).

6. A revolving and rotating platform according to claim 1, characterized in that said revolving drive assembly (3) comprises:

the revolution rotary supporting gear (31) is arranged at the bottom of the revolution table (1), and the revolution rotary supporting gear (31) is rotationally connected with the equipment base (100);

and a revolving drive member (32) configured to rotationally drive the revolving slewing bearing gear (31).

7. A revolving and rotating platform according to claim 6, wherein the equipment base (100) is provided with a hollow support column (104), the revolving and rotating support gear (31) is rotatably sleeved on the support column (104), and the installation space (11) is formed between the revolving and rotating support gear (31) and the support column (104).

8. A revolving and rotating platform according to claim 6, wherein the revolving drive assembly (3) further comprises a revolving drive gear (33), the revolving drive gear (33) is arranged on the revolving drive member (32), and the revolving drive gear (33) is meshed with the revolving slewing bearing gear (31).

9. A revolving and rotating platform according to any one of claims 1-8, wherein the upper surfaces of the self-rotating tables (2) are all higher than the revolving tables (1).

10. A vacuum chemical reaction chamber, comprising a revolving and rotating platform according to any one of claims 1 to 9, wherein the equipment base (100) is the bottom of the vacuum chemical reaction chamber.

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