CN113512711B

CN113512711B - Rotary device

Info

Publication number: CN113512711B
Application number: CN202110568250.5A
Authority: CN
Inventors: 王君; 闫超颖; 李昌华; 王思航; 依君; 梁惠朋
Original assignee: Liaoning Zhuoyue Vacuum Equipment Co ltd
Current assignee: Liaoning Zhuoyue Vacuum Equipment Co ltd
Priority date: 2021-05-24
Filing date: 2021-05-24
Publication date: 2023-06-27
Anticipated expiration: 2041-05-24
Also published as: CN113512711A

Abstract

The application relates to the technical field of vacuum coating, in particular to a rotating device, which comprises: the device comprises a driving device, a transmission mechanism, a first supporting member, a second supporting member, a third supporting member and a driving mechanism; the driving device can drive the first supporting member to synchronously rotate together with the second supporting member, and can drive the second supporting member to rotate relative to the first supporting member through the transmission mechanism; the third supporting member is arranged on the second supporting member, and the third supporting member rotates relative to the second supporting member under the driving of the driving mechanism when the driving device drives the second supporting member to rotate relative to the first supporting member through the transmission mechanism. The rotary device has wide application and is suitable for uniform coating of workpieces with different sizes.

Description

Rotary device

Technical Field

The application relates to the technical field of vacuum coating, in particular to a rotating device.

Background

At present, in the vacuum coating process, a rotating device for uniformly coating a workpiece is lacking.

Disclosure of Invention

The purpose of this application is to provide a rotary device to solve the technical problem that lacks a rotary device who realizes the even coating film to the work piece that exists among the prior art to a certain extent.

The application provides a rotary device, including: the device comprises a driving device, a transmission mechanism, a first supporting member, a second supporting member, a third supporting member and a driving mechanism; the driving device can drive the first supporting member to synchronously rotate together with the second supporting member, and can drive the second supporting member to revolve relative to the first supporting member and the second supporting member to automatically rotate through the transmission mechanism;

the third supporting member is arranged on the second supporting member, and the third supporting member rotates automatically under the driving of the driving mechanism when the driving device drives the second supporting member to revolve relative to the first supporting member through the transmission mechanism and the second supporting member rotates automatically;

the rotating device further comprises a fourth supporting member, and the fourth supporting member is connected with the first supporting member;

the driving mechanism comprises a fixed member, a locking member and an elastic poking member; wherein the fixing member forms a mounting cavity having an opening; the fourth supporting member is arranged in the mounting cavity of the fixing member;

the locking member is movably penetrated through the fixing member, and the end part of the locking member can extend into the mounting cavity to press the fourth supporting member into the mounting cavity;

one end of the elastic stirring member is connected with the fixed member, and the opposite end of the elastic stirring member can extend to be lapped on the third supporting member and is used for stirring the third supporting member to rotate while the third supporting member rotates along with the second supporting member;

or the driving mechanism comprises a third transmission gear, a fourth transmission gear, a stirring member and a blocking member; wherein the third transmission gear and the fourth transmission gear are connected with the second supporting member, and the fourth transmission gear is meshed with the third transmission gear; the third supporting member is connected with the central shaft of the fourth transmission gear;

the blocking member is connected with the first support member; one end of the stirring member is connected with the third transmission gear, and the opposite end of the stirring member extends to the blocking member and can interfere with the blocking member;

the driving mechanism further comprises a mounting groove body, a mounting ring and a protective cover which are assembled together; wherein the fourth transmission gear is rotatably arranged on the mounting ring; the third transmission gear is rotatably arranged on the bottom wall of the mounting groove body;

the bottom wall of the mounting groove body is provided with an avoidance hole positioned at the side part of the third transmission gear, and the third transmission gear passes through the avoidance hole to be meshed with the fourth transmission gear; the second supporting member penetrates through the mounting groove body and is connected with the mounting groove body; the stirring member is also connected with the mounting groove body;

the protection cover is buckled at the opening end of the installation groove body, a through hole is formed in the protection cover, and the central shaft of the fourth transmission gear penetrates through the through hole of the protection cover to be located outside the installation groove body.

In the above technical solution, further, the transmission mechanism includes a first transmission gear and a second transmission gear; the first transmission gear is connected with the output end of the driving device; the second transmission gear is meshed with the first transmission gear; the second support member is connected with a central shaft of the second transmission gear.

In any of the above technical solutions, further, when the driving mechanism includes a locking member, the locking member includes a limiting portion and an abutting portion that are connected, the abutting portion movably penetrates through the fixing member, the abutting portion can compress the fourth supporting member in the mounting cavity, and the limiting portion abuts against an outer wall surface of the fixing member to limit.

In any of the above solutions, further, the driving mechanism includes a third transmission gear, a fourth transmission gear, a toggle member, and a blocking member; wherein the third transmission gear and the fourth transmission gear are connected with the second supporting member, and the fourth transmission gear is meshed with the third transmission gear; the third supporting member is connected with the central shaft of the fourth transmission gear;

the blocking member is connected with the first support member; one end of the stirring member is connected with the third transmission gear, and the opposite end of the stirring member extends to the blocking member and can interfere with the blocking member.

In any one of the above solutions, further, the first support member includes a protective shell portion, a shield shell, and a support portion; the protection shell part is covered outside the transmission mechanism, and one end of a central shaft of the second transmission gear penetrates through the protection shell part and is in rotary connection with the supporting part; the shielding cover is covered outside the second transmission gear of the transmission mechanism.

In any of the above embodiments, further, the second supporting member has a cylindrical structure.

In any one of the above aspects, further, the third support member has a mounting portion for mounting a workpiece.

In any one of the above-mentioned aspects, further, a plurality of the second support members are sequentially provided along a circumferential direction of the first support member, and a plurality of the second support members are sequentially provided along a height direction of the first support member; and/or

A plurality of the third support members are sequentially provided along the circumferential direction of the second support member; the driving mechanisms and the third supporting members are the same in number and correspond to each other one by one.

Compared with the prior art, the beneficial effects of this application are:

the rotating device is suitable for coating processes of large and small workpieces, and is used for large workpieces: the large-sized workpieces to be coated are sequentially mounted on the plurality of second support members 4 along the circumferential direction of the first support members, the plurality of second support members can revolve relative to the center of the first support member 3, so that the large-sized workpieces to be coated mounted on the plurality of second support members face the multi-arc ion source one by one, each large-sized workpiece to be coated can follow the second support members to rotate, the whole circumferential surface of each large-sized workpiece to be coated can face the multi-arc ion source one by one, and uniform coating of the large workpieces is achieved.

For small-sized workpieces: the plurality of groups of small-sized workpieces to be coated are sequentially arranged on the plurality of second support members along the circumferential direction of the first support members, the plurality of second support members can revolve relative to the center of the first support members, so that the plurality of groups of small-sized workpieces to be coated face the multi-arc ion source group by group successively, the plurality of small-sized workpieces to be coated, which are arranged along the circumferential direction of the second support members in each group, can follow the rotation of the second support members, face the multi-arc ion source one by one successively, and each small-sized workpiece to be coated can also follow the rotation of the third support member, so that the whole circumferential surface of each small-sized workpiece to be coated can face the multi-arc ion source successively, and uniform coating of a large number of small-sized workpieces is realized.

Based on the description, the rotary device has wide application and is suitable for uniform coating of workpieces with different sizes.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a rotating device according to an embodiment of the present application;

FIG. 2 is an enlarged schematic view of the rotary device at A provided in FIG. 1;

fig. 3 is another schematic structural view of a rotating device according to an embodiment of the present disclosure;

FIG. 4 is a schematic view of a rotating device according to an embodiment of the present disclosure;

FIG. 5 is an enlarged schematic view of the rotary device at B provided in FIG. 4;

fig. 6 is a schematic view of a part of the structure of a driving mechanism according to an embodiment of the present disclosure;

fig. 7 is a schematic structural diagram of a further part of a driving mechanism according to an embodiment of the present application.

Reference numerals:

1-drive means, 2-drive mechanism, 21-first drive gear, 22-second drive gear, 221-central axis of second drive gear, 3-first support member, 31-shield, 32-support, 4-second support member, 5-third support member, 6-drive mechanism, 61-fixing member, 62-lock member, 63-elastic toggle member, 64-third drive gear, 65-fourth drive gear, 651-central axis of fourth drive gear, 66-toggle member, 67-blocking member, 68-mounting groove, 681-escape hole, 69-mounting ring, 70-protective cover, 7-fourth support member.

Detailed Description

The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown.

The components of the embodiments of the present application, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.

All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description of the present application and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

A rotary device according to some embodiments of the present application is described below with reference to fig. 1 to 7.

Referring to fig. 1, 2, 4 and 5, embodiments of the present application provide a rotating device, including: a driving device 1, a transmission mechanism 2, a first support member 3, a second support member 4, a third support member 5, and a driving mechanism 6;

the second support member 4 is disposed on the first support member 3, and the driving device 1 can drive the first support member 3 and the second support member 4 to rotate synchronously, and at the same time, the driving device 1 can drive the second support member 4 to revolve around the first support member 3 and the second support member 4 to rotate by itself through the transmission mechanism 2;

the third support member 5 is disposed on the second support member 4, and the third support member 5 is driven by the driving mechanism 6 to rotate by itself while the driving device 1 drives the second support member 4 to revolve around the first support member 3 through the transmission mechanism 2 and the second support member 4 rotates by itself.

The rotating device is suitable for a coating process of a large or small workpiece, and the specific working principle is as follows:

for large workpieces: the device can be placed on the second supporting member 4, after the driving device 1 starts to start, the driving device 1 drives the first supporting member 3 and the second supporting member 4 to synchronously rotate, namely, the revolution of the second supporting member 4 relative to the center of the first supporting member 3 is realized, and meanwhile, the driving device 1 can drive the second supporting member 4 to rotate through the transmission mechanism 2, so that all surfaces of a large workpiece can face the multi-arc ion source successively, and the uniformity of coating is ensured.

It can be seen that the large workpieces to be coated are sequentially mounted on the plurality of second support members 4 along the circumferential direction of the first support member 3, and the plurality of second support members 4 can revolve relative to the center of the first support member 3, so that the large workpieces to be coated mounted on the plurality of second support members 4 face the plurality of arc ion sources one by one, and each large workpiece to be coated can follow the second support members 4 to rotate, so that the whole circumferential surface of each large workpiece to be coated can face the plurality of arc ion sources one by one, and uniform coating of the large workpieces is realized.

For small-sized workpieces: it can be placed on the third support member 5, and after the driving device 1 starts to start, the driving device 1 drives the first support member 3 and the second support member 4 to synchronously rotate, that is, the rotation of the first support member 3 is realized, and meanwhile, the revolution of the second support member 4 relative to the center of the first support member 3 is realized. The driving device 1 is also capable of driving the second support member 4 to rotate by the transmission mechanism 2.

On the basis of the above movement, the second support member 4 simultaneously drives the third support member 5 and the small-sized workpiece mounted on the third support member 5 to rotate, that is, the rotation of the second support member 4 is realized, the revolution of the third support member 5 relative to the center of the second support member 4 is realized, and at the same time, the third support member 5 is driven by the driving mechanism 6 to rotate relative to the second support member 4, that is, the rotation of the third support member 5 is realized.

It can be seen that the plurality of groups of small workpieces to be coated are sequentially mounted on the plurality of second support members 4 along the circumferential direction of the first support member 3, the plurality of second support members 4 can revolve relative to the center of the first support member 3, so that the plurality of groups of small workpieces to be coated sequentially face the multi-arc ion source group by group, the plurality of small workpieces to be coated, which are arranged along the circumferential direction of the second support members 4 in each group, can follow the rotation of the second support members 4, sequentially face the multi-arc ion source group by group, and each small workpiece to be coated can also follow the rotation of the third support member 5, so that the whole circumferential surface of each small workpiece to be coated can sequentially face the multi-arc ion source group, and uniform coating of a large number of small workpieces is realized.

Of course, according to the actual needs, the large workpiece and the small workpiece can be coated at the same time, that is, the large workpiece is mounted on the second supporting member 4, and the small workpiece is mounted on the third supporting member 5.

In one embodiment of the present application, it is preferable that a plurality of second support members 4 are sequentially provided along the circumferential direction of the first support member 3, and a plurality of second support members 4 are sequentially provided along the height direction of the first support member 3, as shown in fig. 1, enabling the coating of a large number of large-sized workpieces or a large number of small-sized workpieces in combination with a plurality of third support members 5 described below.

In one embodiment of the present application, preferably, as shown in fig. 1, a plurality of third support members 5 are sequentially provided along the circumferential direction of the second support member 4; the driving mechanisms 6 and the third supporting members 5 are the same in number and correspond to each other one by one, and simultaneous coating of large-batch small-sized workpieces is realized.

In one embodiment of the present application, preferably, as shown in fig. 3, the transmission mechanism 2 includes a first transmission gear 21 and a second transmission gear 22; wherein the first transmission gear 21 is connected with the output end of the driving device 1; the second transmission gear 22 is meshed with the first transmission gear 21; the second support member 4 is connected to the central shaft 221 of the second transmission gear.

In this embodiment, the driving device 1 drives the first transmission gear 21 to rotate, the first transmission gear 21 drives the second transmission gear 22 to rotate, and the second support member 4 follows the rotation of the second transmission gear 22, so that both revolution relative to the center of the first support member 3 and rotation can be achieved.

In one embodiment of the present application, preferably, as shown in fig. 1 and 2, the driving device 1 further comprises a fourth supporting member 7, the fourth supporting member 7 being connected with the first supporting member 3;

the drive mechanism 6 includes a fixed member 61, a lock member 62, and an elastic toggle member 63; wherein the fixing member 61 is formed with an opened installation cavity; the fourth supporting member 7 is disposed in the installation cavity of the fixing member 61;

the locking member 62 is movably penetrated through the fixing member 61, and an end portion thereof can be inserted into the installation cavity to press the fourth supporting member 7 into the installation cavity;

one end of the elastic toggle member 63 is connected to the fixing member 61, and the opposite end of the elastic toggle member 63 can extend to be erected on the third support member 5 for toggling the third support member 5 to rotate while the third support member 5 follows the rotation of the second support member 4.

In this embodiment, when the third support member 5 rotates synchronously with the second support member 4, the elastic stirring member 63 applies a tangential force to the circumference of the third support member 5 along with the rapid rotation of the third support member 5, so as to stir the third support member 5 to rotate, thereby enabling the workpiece to be coated, which is mounted on the third support member 5, to rotate secondarily, and enabling the whole circumferential surface of the workpiece to be coated to be successively opposite to the multi-arc ion source, and guaranteeing the uniformity of coating.

Preferably, the elastic toggle member 63 is a spring plate structure, and includes an integral flat plate portion and an arc plate portion, and the flat plate portion conveys the arc plate portion to the third support member 5.

Of course, the structure of the driving mechanism 6 is not limited to the above, and the driving mechanism 6 may also adopt a structure, specifically, as shown in fig. 4 and 5, the driving mechanism 6 includes a third transmission gear 64, a fourth transmission gear 65, a toggle member 66, and a blocking member 67; wherein, the third transmission gear 64 and the fourth transmission gear 65 are connected with the second supporting member 4, and the fourth transmission gear 65 is meshed with the third transmission gear 64; the third support member 5 is connected with a central shaft 651 of the fourth transmission gear;

the blocking member 67 is connected with the first support member 3; one end of the toggle member 66 is connected to the third transfer gear 64, and the opposite end of the toggle member 66 extends to the blocking member 67 and is capable of interfering with the blocking member 67.

Based on the above structure, the third transmission gear 64 and the fourth transmission gear 65 both rotate synchronously along with the rotation of the second support member 4, at this time, there is no relative motion between the two, and only when the toggle member 66 connected with the third transmission gear 64 contacts with the blocking member 67 to interfere, thereby forcing the third transmission gear 64 to stop moving, the fourth gear is forced to rotate by itself, and further drives the third support member 5 connected with the central shaft 651 of the fourth transmission gear and the workpiece to be coated disposed on the third support member 5 to rotate, so that the whole peripheral surface of the workpiece faces the multi-arc ion source successively, and uniform coating is ensured.

Further, the assembly of the third transmission gear 64, the fourth transmission gear 65 and the toggle member 66 is preferably achieved by the following structure, specifically, as shown in fig. 5, 6 and 7, the driving mechanism 6 further includes a mounting groove 68 and a mounting ring 69 assembled together; wherein the fourth transmission gear 65 is rotatably arranged on the mounting ring 69; the third transmission gear 64 is rotatably arranged on the bottom wall of the mounting groove 68;

the bottom wall of the mounting groove 68 is formed with a relief hole 681 at the side of the third transmission gear 64, and the fourth transmission gear 65 is meshed with the third transmission gear 64 through the relief hole 681; the second supporting member 4 is arranged through the installation groove 68 and is connected with the installation groove 68; the toggle member 66 is also connected to the mounting slot 68;

the protective cover 70 is fastened to the open end of the mounting groove 68, and the protective cover 70 plays a role in protecting the third transmission gear 64 and the fourth transmission gear 65 from being coated.

The protective cover 70 is formed with a via hole, and the center shaft 651 of the fourth transmission gear passes through the via hole of the protective cover 70 to be located outside the mounting groove 68.

In one embodiment of the present application, preferably, the locking member 62 includes a limiting portion and an abutting portion that are connected, the abutting portion is movably penetrating through the fixing member 61, the abutting portion can compress the fourth supporting member 7 in the installation cavity, and at the same time, the limiting portion abuts against the outer wall surface of the fixing member 61 to limit, functions to lock the fixing member 61 to the fourth supporting member 7, and the degree of tightness of the locking is adjustable.

In one embodiment of the present application, preferably, as shown in fig. 3, the first support member 3 includes a protective shell portion, a shield can 31, and a support portion 32;

wherein, the protection shell part covers the outside of the transmission mechanism 2 and can protect the transmission mechanism 2 besides the supporting function, and the protection shell part comprises two parts which are buckled together and can be opened;

one end of a central shaft 221 of the second transmission gear passes through the protective shell part and is rotatably connected with the supporting part 32;

the shielding cover 31 is covered outside the second transmission gear 22 of the transmission mechanism 2 and is used for preventing coating substances from being plated on the gear, thereby ensuring the normal operation of the gear.

In one embodiment of the present application, preferably, as shown in fig. 2, the third support member 5 has a mounting portion for mounting a workpiece, for example, the mounting portion is a groove structure, for example, a small-sized blade to be coated, and the root portion thereof can be inserted into the structure of the groove without shielding the circumferential outer surface of the workpiece to be coated. Of course, the mounting portion is not limited to the structure described in this embodiment, and may be a clamping structure such as a clamping jaw for clamping the workpiece to be coated, and the mounting portion does not cover the circumferential outer surface of the workpiece to be coated, and of course, is not limited to the above two structures, and may be set according to actual needs.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A rotary device, comprising: the device comprises a driving device, a transmission mechanism, a first supporting member, a second supporting member, a third supporting member and a driving mechanism; the driving device can drive the first supporting member to synchronously rotate together with the second supporting member, and can drive the second supporting member to revolve relative to the first supporting member and the second supporting member to automatically rotate through the transmission mechanism;

2. The rotary device of claim 1, wherein the transmission mechanism comprises a first transmission gear and a second transmission gear; the first transmission gear is connected with the output end of the driving device; the second transmission gear is meshed with the first transmission gear; the second support member is connected with a central shaft of the second transmission gear.

3. The rotary device of claim 1, wherein when the drive mechanism includes a lock member, the lock member includes a limiting portion and an abutting portion connected thereto, the abutting portion is movably provided through the fixing member, the abutting portion is capable of pressing the fourth support member into the mounting cavity, and the limiting portion abuts against an outer wall surface of the fixing member to be limited.

4. The rotary device of claim 2, wherein the first support member comprises a protective shell portion, a shield, and a support portion; the protection shell part is covered outside the transmission mechanism, and one end of a central shaft of the second transmission gear penetrates through the protection shell part and is in rotary connection with the supporting part; the shielding cover is covered outside the second transmission gear of the transmission mechanism.

5. The rotating apparatus according to claim 1, wherein the third support member has a mounting portion for mounting a workpiece.

6. The rotating device according to claim 1, wherein a plurality of the second support members are sequentially provided along a circumferential direction of the first support member, and a plurality of the second support members are sequentially provided along a height direction of the first support member.

7. The rotating apparatus according to any one of claims 1 to 6, characterized in that a plurality of the third support members are provided in sequence along a circumferential direction of the second support member; the driving mechanisms and the third supporting members are the same in number and correspond to each other one by one.