CN113512711A

CN113512711A - Rotating device

Info

Publication number: CN113512711A
Application number: CN202110568250.5A
Authority: CN
Inventors: 王君; 闫超颖; 李昌华; 王思航; 依君; 梁惠朋
Original assignee: Liaoning Glory Technology Co ltd; Liaoning Zhuoyue Vacuum Equipment Co ltd; Jiangsu Aikesi Vacuum Technology Co ltd
Current assignee: Liaoning Zhuoyue Vacuum Equipment Co ltd
Priority date: 2021-05-24
Filing date: 2021-05-24
Publication date: 2021-10-19
Anticipated expiration: 2041-05-24
Also published as: CN113512711B

Abstract

The application relates to vacuum coating technical field, especially relate to a rotary device, include: the device comprises a driving device, a transmission mechanism, a first supporting member, a second supporting member, a third supporting member and a driving mechanism; wherein the second support member is disposed on the first support member, and the driving device can drive the first support member to rotate synchronously with the second support member, and the driving device can also drive the second support member to rotate relative to the first support member through the transmission mechanism; the third support member is disposed on the second support member, and the third support member is driven by the driving mechanism to rotate relative to the second support member while the driving device drives the second support member to rotate relative to the first support member through the transmission mechanism. The rotating device has wide application and is suitable for uniform coating of workpieces with different sizes.

Description

Rotating device

Technical Field

The application relates to the technical field of vacuum coating, in particular to a rotating device.

Background

At present, a rotating device for uniformly coating a workpiece is lacked in a vacuum coating process.

Disclosure of Invention

The application aims to provide a rotating device to solve the technical problem that the rotating device for uniformly coating a workpiece is lacked in the prior art to a certain extent.

The application provides a rotary device, includes: the device comprises a driving device, a transmission mechanism, a first supporting member, a second supporting member, a third supporting member and a driving mechanism; the second support member is arranged on the first support member, the driving device can drive the first support member and the second support member to synchronously rotate, and the driving device can also drive the second support member to revolve relative to the first support member and the second support member to rotate by itself through the transmission mechanism;

the third supporting member is arranged on the second supporting member, and the third supporting member rotates by itself under the driving of the driving mechanism while the driving device drives the second supporting member to revolve relative to the first supporting member through the transmission mechanism and the second supporting member to rotate by itself.

In the above technical solution, further, the transmission mechanism includes a first transmission gear and a second transmission gear; the first transmission gear is connected with the output end of the driving device; the second transmission gear is meshed with the first transmission gear; the second support member is connected with a central shaft of the second transmission gear.

In any of the above technical solutions, further, the driving device further includes a fourth supporting member, and the fourth supporting member is connected with the first supporting member;

the driving mechanism comprises a fixed component, a locking component and an elastic toggle component; wherein the fixing member forms a mounting cavity having an opening; the fourth supporting member is arranged in the mounting cavity of the fixing member;

the locking member is movably arranged in the fixing member in a penetrating mode, and the end portion of the locking member can extend into the mounting cavity to press the fourth supporting member into the mounting cavity;

one end of the elastic toggle component is connected with the fixed component, and the other opposite end of the elastic toggle component can extend to and be overlapped on the third supporting component and is used for toggling the third supporting component to rotate while the third supporting component rotates along with the second supporting component.

In any one of the above technical solutions, the locking member further includes a limit portion and an abutting portion connected to each other, the abutting portion is movably disposed through the fixing member, the abutting portion can press the fourth supporting member into the installation cavity, and the limit portion abuts against an outer wall surface of the fixing member to limit the position.

In any of the above technical solutions, further, the driving mechanism includes a third transmission gear, a fourth transmission gear, a toggle member, and a blocking member; the third transmission gear and the fourth transmission gear are both connected with the second supporting member, and the fourth transmission gear is meshed with the third transmission gear; the third supporting member is connected with a central shaft of the fourth transmission gear;

the blocking member is connected with the first support member; one end of the toggle member is connected with the third transmission gear, and the other opposite end of the toggle member extends to the blocking member and can interfere with the blocking member.

In any of the above technical solutions, further, the driving mechanism further includes an installation groove, an installation ring, and a protection cover assembled together; the fourth transmission gear is rotatably arranged on the mounting ring; the third transmission gear is rotatably arranged on the bottom wall of the installation groove body;

an avoidance hole positioned at the side part of the third transmission gear is formed in the bottom wall of the mounting groove body, and the third transmission gear penetrates through the avoidance hole to be meshed with the fourth transmission gear; the second supporting member penetrates through the installation groove body and is connected with the installation groove body; the toggle component is also connected with the installation groove body;

the protection cover is buckled at the open end of the installation groove body, a through hole is formed in the protection cover, and the central shaft of the fourth transmission gear penetrates through the through hole of the protection cover and is located outside the installation groove body.

In any one of the above technical solutions, further, the first support member includes a shield shell portion, a shield cover, and a support portion; the protective shell is covered outside the transmission mechanism, and one end of a central shaft of the second transmission gear penetrates through the protective shell and is rotatably connected with the supporting part; the shielding cover is arranged outside the second transmission gear of the transmission mechanism in a covering mode.

In any of the above technical solutions, further, the second support member has a column structure.

In any of the above aspects, further, the third support member has a mounting portion for mounting a workpiece.

In any one of the above aspects, further, a plurality of the second support members are sequentially provided along a circumferential direction of the first support member, and a plurality of the second support members are sequentially provided along a height direction of the first support member; and/or

A plurality of the third support members are sequentially provided along a circumferential direction of the second support member; the driving mechanisms and the third supporting members are the same in number and correspond to each other one by one.

Compared with the prior art, the beneficial effect of this application is:

the application provides a rotary device is applicable to in the coating film technology of big, small-size work piece, to large-scale work piece: the large workpieces to be coated are sequentially arranged on the second support members 4 along the circumferential direction of the first support member, the second support members can revolve relative to the center of the first support member 3, so that the large workpieces to be coated arranged on the second support members sequentially face the multi-arc ion source one by one, each large workpiece to be coated can rotate along with the second support member, the whole circumferential surface of each large workpiece to be coated can sequentially face the multi-arc ion source, and uniform coating of the large workpieces is achieved.

For small workpieces: the plurality of groups of small workpieces to be coated are sequentially arranged on the plurality of second supporting members along the circumferential direction of the first supporting member, the plurality of second supporting members can revolve relative to the center of the first supporting member, so that the plurality of groups of small workpieces to be coated face the multi-arc ion source one by one, the plurality of small workpieces to be coated arranged along the circumferential direction of the second supporting members in each group can face the multi-arc ion source one by one along with the rotation of the second supporting members, and each small workpiece to be coated can also face the multi-arc ion source one by one along with the rotation of the third supporting member, so that the whole circumferential surface of each small workpiece to be coated can face the multi-arc ion source one by one, and the uniform coating of the large-batch small workpieces is realized.

Based on the above description, the rotating device has wide application and is suitable for the uniform coating of workpieces with different sizes.

Drawings

In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic structural diagram of a rotating apparatus according to an embodiment of the present disclosure;

FIG. 2 is an enlarged schematic view of the rotary apparatus provided in FIG. 1 at A;

fig. 3 is another schematic structural diagram of a rotating device according to an embodiment of the present disclosure;

FIG. 4 is a schematic view of another structure of a rotating device according to an embodiment of the present disclosure;

FIG. 5 is an enlarged schematic view of the rotary apparatus provided in FIG. 4 at B;

FIG. 6 is a schematic partial structural view of a driving mechanism provided in an embodiment of the present application;

fig. 7 is a schematic structural diagram of another part of the driving mechanism provided in the embodiment of the present application.

Reference numerals:

1-a driving device, 2-a transmission mechanism, 21-a first transmission gear, 22-a second transmission gear, 221-a central shaft of the second transmission gear, 3-a first supporting member, 31-a shielding cover, 32-a supporting part, 4-a second supporting member, 5-a third supporting member, 6-a driving mechanism, 61-a fixing member, 62-a locking member, 63-an elastic toggle member, 64-a third transmission gear, 65-a fourth transmission gear, 651-a central shaft of the fourth transmission gear, 66-a toggle member, 67-a blocking member, 68-an installation groove body, 681-an avoidance hole, 69-an installation ring, 70-a protective cover and 7-a fourth supporting member.

Detailed Description

The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present application, but not all embodiments.

The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application.

All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

Turning now to fig. 1-7, a turning gear according to some embodiments of the present application is described.

Referring to fig. 1, 2, 4, and 5, embodiments of the present application provide a rotating apparatus including: a drive device 1, a transmission mechanism 2, a first support member 3, a second support member 4, a third support member 5, and a drive mechanism 6;

the second support member 4 is disposed on the first support member 3, and the driving device 1 can drive the first support member 3 and the second support member 4 to rotate synchronously, and at the same time, the driving device 1 can also drive the second support member 4 to revolve relative to the first support member 3 through the transmission mechanism 2 and the second support member 4 to rotate by itself;

the third support member 5 is provided to the second support member 4, and the third support member 5 rotates by itself under the drive of the drive mechanism 6 while the drive device 1 drives the second support member 4 to revolve relative to the first support member 3 through the transmission mechanism 2 and the second support member 4 rotates by itself.

The application provides a rotary device is applicable to in the coating film technology to large-scale or small-size work piece, and specific theory of operation is as follows:

for large workpieces: the device can be placed on the second supporting member 4, after the driving device 1 starts to be started, the driving device 1 drives the first supporting member 3 to synchronously rotate together with the second supporting member 4, namely, the second supporting member 4 revolves relative to the center of the first supporting member 3, and meanwhile, the driving device 1 can also drive the second supporting member 4 to rotate through the transmission mechanism 2, so that all surfaces of a large workpiece can continuously face the multi-arc ion source, and the uniformity of coating is ensured.

It can be seen that, the large-sized workpieces to be coated are sequentially mounted on the plurality of second support members 4 along the circumferential direction of the first support member 3, the plurality of second support members 4 can revolve relative to the center of the first support member 3, so that the large-sized workpieces to be coated mounted on the plurality of second support members 4 sequentially face the multi-arc ion source one by one, and each large-sized workpiece to be coated can rotate along with the second support member 4, so that the whole circumferential surface of each large-sized workpiece to be coated can sequentially face the multi-arc ion source, thereby realizing uniform coating of the large workpieces.

For small workpieces: it can be placed on the third support member 5, and after the driving device 1 starts to start, the driving device 1 drives the first support member 3 to rotate synchronously with the second support member 4, that is, the rotation of the first support member 3 is realized, and simultaneously, the revolution of the second support member 4 relative to the center of the first support member 3 is realized. The driving device 1 is also capable of driving the second support member 4 to rotate by the transmission mechanism 2.

On the basis of the above movement, the second support member 4 simultaneously rotates the third support member 5 and the small-sized workpiece mounted on the third support member 5, that is, the second support member 4 rotates, and simultaneously, the third support member 5 revolves about the center of the second support member 4, and at the same time, the third support member 5 rotates relative to the second support member 4 under the driving of the driving mechanism 6, that is, the third support member 5 rotates.

It can be seen that, a plurality of groups of small-sized workpieces to be coated are sequentially mounted on the plurality of second supporting members 4 along the circumferential direction of the first supporting member 3, the plurality of second supporting members 4 can revolve relative to the center of the first supporting member 3, so that the plurality of groups of small-sized workpieces to be coated sequentially face the multi-arc ion source one by one, and the plurality of small-sized workpieces to be coated arranged along the circumferential direction of the second supporting member 4 in each group can sequentially face the multi-arc ion source along with the rotation of the second supporting member 4, and each small-sized workpiece to be coated can also sequentially face the multi-arc ion source along with the rotation of the third supporting member 5, so that the whole circumferential surface of each small-sized workpiece to be coated can sequentially face the multi-arc ion source, thereby realizing uniform coating of large-batch small workpieces.

Of course, the large workpiece and the small workpiece can be coated simultaneously according to actual requirements, that is, the large workpiece is arranged on the second supporting member 4, and the small workpiece is arranged on the third supporting member 5.

In one embodiment of the present application, preferably, as shown in fig. 1, a plurality of second support members 4 are sequentially arranged along a circumferential direction of the first support member 3, and a plurality of second support members 4 are sequentially arranged along a height direction of the first support member 3, so that a large batch of large-sized workpieces or a large batch of small-sized workpieces can be coated with a film by combining a plurality of third support members 5 described below.

In one embodiment of the present application, preferably, as shown in fig. 1, a plurality of third support members 5 are sequentially provided along the circumferential direction of the second support member 4; the driving mechanisms 6 are the same in number with the third supporting members 5 and correspond to the third supporting members one by one, and simultaneous film coating of large-batch small-sized workpieces is achieved.

In one embodiment of the present application, preferably, as shown in fig. 3, the transmission mechanism 2 includes a first transmission gear 21 and a second transmission gear 22; wherein, the first transmission gear 21 is connected with the output end of the driving device 1; the second transmission gear 22 is meshed with the first transmission gear 21; the second support member 4 is connected to the central shaft 221 of the second transmission gear.

In this embodiment, the driving device 1 drives the first transmission gear 21 to rotate, the first transmission gear 21 drives the second transmission gear 22 to rotate, and the second support member 4 follows the rotation of the second transmission gear 22, so that both the revolution and the rotation relative to the center of the first support member 3 can be realized.

In one embodiment of the present application, preferably, as shown in fig. 1 and 2, the driving device 1 further comprises a fourth supporting member 7, the fourth supporting member 7 being connected with the first supporting member 3;

the driving mechanism 6 comprises a fixed member 61, a locking member 62 and an elastic toggle member 63; wherein the fixing member 61 is formed with an opened installation cavity; the fourth supporting member 7 is disposed in the mounting cavity of the fixing member 61;

the locking member 62 is movably arranged through the fixing member 61, and the end part of the locking member can extend into the mounting cavity to press the fourth supporting member 7 in the mounting cavity;

one end of the elastic toggle member 63 is connected with the fixed member 61, and the other opposite end of the elastic toggle member 63 can extend to overlap the third supporting member 5, so as to toggle the third supporting member 5 to rotate while the third supporting member 5 rotates along with the second supporting member 4.

In this embodiment, when the third supporting member 5 rotates synchronously with the second supporting member 4, the elastic toggle member 63 applies a tangential force to the circumferential direction of the third supporting member 5 along with the rapid rotation of the third supporting member 5, and then toggles the third supporting member 5 to rotate, so that the workpiece to be coated mounted on the third supporting member 5 rotates twice, and the whole circumferential surface of the workpiece is sequentially opposite to the multi-arc ion source, thereby ensuring the uniformity of coating.

Preferably, the elastic toggle member 63 is a spring structure and includes an integrated flat piece portion and an arc-shaped piece portion, and the flat piece portion conveys the arc-shaped piece portion to the third support member 5.

Of course, the structure of the driving mechanism 6 is not limited to the above, and the driving mechanism 6 may also adopt the following structure, specifically, as shown in fig. 4 and 5, the driving mechanism 6 includes a third transmission gear 64, a fourth transmission gear 65, a toggle member 66 and a blocking member 67; wherein, the third transmission gear 64 and the fourth transmission gear 65 are both connected with the second supporting member 4, and the fourth transmission gear 65 is meshed with the third transmission gear 64; the third support member 5 is connected to a center shaft 651 of the fourth transmission gear;

the blocking member 67 is connected with the first support member 3; one end of the toggle member 66 is connected to the third transmission gear 64, and the other end of the toggle member 66 extends to the blocking member 67 and can interfere with the blocking member 67.

Based on the above structure, the third transmission gear 64 and the fourth transmission gear 65 both rotate synchronously with the rotation of the second support member 4, and at this time, there is no relative movement therebetween, only when the toggle member 66 connected to the third transmission gear 64 contacts and interferes with the blocking member 67, so as to force the third transmission gear 64 to stop moving, the fourth gear is forced to rotate by itself, and further the third support member 5 connected to the central shaft 651 of the fourth transmission gear and the workpiece to be coated disposed on the third support member 5 are driven to rotate, so that the entire peripheral surface of the workpiece continuously faces the multi-arc ion source, and uniform coating is ensured.

Further, it is preferable that the assembly of the third transmission gear 64, the fourth transmission gear 65 and the toggle member 66 is achieved by using a structure that, as shown in fig. 5, 6 and 7, the driving mechanism 6 further includes a mounting groove 68 and a mounting ring 69 which are assembled together; wherein the fourth transmission gear 65 is rotatably disposed on the mounting ring 69; the third transmission gear 64 is rotatably arranged on the bottom wall of the mounting groove body 68;

an avoiding hole 681 located at the side of the third transmission gear 64 is formed in the bottom wall of the mounting groove 68, and the third transmission gear 64 penetrates through the avoiding hole 681 to be engaged with the fourth transmission gear 65; the second supporting member 4 is inserted into the mounting groove 68 and connected with the mounting groove 68; the toggle member 66 is also connected with the mounting slot 68;

the protective cover 70 is buckled at the opening end of the installation groove body 68, and the protective cover 70 plays a role of protecting the third transmission gear 64 and the fourth transmission gear 65 from being coated with films.

The protective cover 70 is formed with a through hole, and a center shaft 651 of the fourth transmission gear passes through the through hole of the protective cover 70 to be located outside the mounting slot body 68.

In an embodiment of the present application, preferably, the locking member 62 includes a limit portion and an abutting portion connected to each other, the abutting portion is movably disposed through the fixing member 61, the abutting portion can press the fourth supporting member 7 in the installation cavity, and at the same time, the limit portion abuts against an outer wall surface of the fixing member 61 to limit, so as to lock the fixing member 61 on the fourth supporting member 7, and the degree of tightness of the locking is adjustable.

In one embodiment of the present application, preferably, as shown in fig. 3, the first support member 3 includes a shield shell portion, a shield shell 31, and a support portion 32;

wherein, the protective shell covers the outside of the transmission mechanism 2, which not only plays a supporting role, but also plays a role of protecting the transmission mechanism 2, and it is noted that the protective shell comprises two parts buckled together and can be opened;

one end of a central shaft 221 of the second transmission gear penetrates through the protective shell part to be rotatably connected with the supporting part 32;

the shielding case 31 covers the outside of the second transmission gear 22 of the transmission mechanism 2 to prevent the coating material from being coated on the gear, thereby ensuring the normal operation of the gear.

In one embodiment of the present application, preferably, as shown in fig. 2, the third support member 5 has a mounting portion for mounting a workpiece, for example, the mounting portion is a groove structure, for example, a small-sized tool bit to be coated, and the root portion thereof can be inserted into the groove structure without shielding the circumferential outer surface of the workpiece to be coated. Of course, the installation part is not limited to the structure described in this embodiment, and the installation part may also be a clamping structure such as a clamping jaw for clamping the workpiece to be coated, and also may not shield the circumferential outer surface of the workpiece to be coated, and certainly, is not limited to the above two structures, and may also be arranged according to actual needs.

Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A rotary device, comprising: the device comprises a driving device, a transmission mechanism, a first supporting member, a second supporting member, a third supporting member and a driving mechanism; the second support member is arranged on the first support member, the driving device can drive the first support member and the second support member to synchronously rotate, and the driving device can also drive the second support member to revolve relative to the first support member and the second support member to rotate by itself through the transmission mechanism;

2. The rotary device of claim 1, wherein the transmission mechanism comprises a first transmission gear and a second transmission gear; the first transmission gear is connected with the output end of the driving device; the second transmission gear is meshed with the first transmission gear; the second support member is connected with a central shaft of the second transmission gear.

3. The rotary device of claim 1, wherein the drive device further comprises a fourth support member connected with the first support member;

4. The rotating device according to claim 3, wherein the locking member includes a limit portion and an abutting portion connected to each other, the abutting portion is movably disposed through the fixing member, the abutting portion can press the fourth supporting member into the mounting cavity, and the limit portion abuts against an outer wall surface of the fixing member to limit the position.

5. The rotary device of claim 1, wherein the drive mechanism comprises a third drive gear, a fourth drive gear, a toggle member, and a blocking member; the third transmission gear and the fourth transmission gear are both connected with the second supporting member, and the fourth transmission gear is meshed with the third transmission gear; the third supporting member is connected with a central shaft of the fourth transmission gear;

6. The rotary device as claimed in claim 5, wherein the driving mechanism further comprises a mounting groove, a mounting ring and a protective cover assembled together; the fourth transmission gear is rotatably arranged on the mounting ring; the third transmission gear is rotatably arranged on the bottom wall of the installation groove body;

the protection cover is buckled at the open end of the installation groove body, a through hole is formed in the protection cover, and a central shaft of the fourth transmission gear penetrates through the through hole of the protection cover to be located outside the installation groove body.

7. The rotary device of claim 2, wherein the first support member includes a shield case portion, a shield case, and a support portion; the protective shell is covered outside the transmission mechanism, and one end of a central shaft of the second transmission gear penetrates through the protective shell and is rotatably connected with the supporting part; the shielding cover is arranged outside the second transmission gear of the transmission mechanism in a covering mode.

8. The rotary device of claim 1, wherein the third support member has a mounting portion for mounting a workpiece.

9. The rotating apparatus according to claim 1, wherein a plurality of the second support members are provided in sequence along a circumferential direction of the first support member, and a plurality of the second support members are provided in sequence along a height direction of the first support member.

10. The rotating apparatus according to any one of claims 1 to 9, wherein a plurality of the third support members are provided in sequence along a circumferential direction of the second support member; the driving mechanisms and the third supporting members are the same in number and correspond to each other one by one.