CN112899660B - Rotary electrode coating system - Google Patents
Rotary electrode coating system Download PDFInfo
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- CN112899660B CN112899660B CN202110075454.5A CN202110075454A CN112899660B CN 112899660 B CN112899660 B CN 112899660B CN 202110075454 A CN202110075454 A CN 202110075454A CN 112899660 B CN112899660 B CN 112899660B
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- electrode
- assembly
- radio frequency
- frame assembly
- revolution
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Abstract
The invention relates to the technical field of vapor deposition, in particular to a rotary electrode coating system, which comprises an electrode assembly, and comprises the following components: the electrode frame assembly, the radio frequency electrode plate and the grounding electrode plate; the radio frequency electrode plate and the grounding electrode plate are arranged on the electrode frame assembly at intervals in parallel, the radio frequency electrode plate is electrically connected with a radio frequency power supply, and the grounding electrode plate and the radio frequency electrode plate are mutually insulated; the revolution assembly is used for driving the electrode frame assembly to rotate around a set center; and the autorotation assembly is in transmission connection with the electrode frame assembly and is used for driving the electrode frame assembly to rotate around the axis of the electrode frame assembly. The invention can improve the uniformity and the coating efficiency of film formation.
Description
Technical Field
The invention relates to the technical field of vapor deposition, in particular to a rotary electrode coating system.
Background
At present, an electrode coating system for PECVD (chemical vapor deposition) mainly uses electric field excitation plasmas formed between fixed electrode plates with different polarities to coat a product. However, the plasma concentration of the fixed electrode plate excited in the electric field is poor in uniformity due to position difference caused by uneven distribution of the flow field of the monomer in the use process, and in the prior art, the product is located outside the electric field, so that the time for the plasma to move to the surface of the product is long, and the film coating efficiency is low.
Therefore, a rotary electrode coating system is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to provide a rotary electrode coating system which can improve the uniformity and the coating efficiency of film formation.
To achieve the purpose, the invention adopts the following technical scheme:
a rotary electrode coating system comprising:
an electrode assembly, comprising: the electrode frame assembly, the radio frequency electrode plate and the grounding electrode plate;
the radio frequency electrode plate and the grounding electrode plate are arranged on the electrode frame assembly at intervals in parallel, the radio frequency electrode plate is electrically connected with a radio frequency power supply, and the grounding electrode plate and the radio frequency electrode plate are mutually insulated;
the revolution assembly is used for driving the electrode frame assembly to rotate around a set center;
the autorotation assembly is in transmission connection with the electrode frame assembly and is used for driving the electrode frame assembly to rotate around the axis of the electrode frame assembly, and the set center and the axis of the electrode frame assembly are arranged at intervals.
Further, the revolution assembly includes a revolution driving gear and a revolution driven gear, the revolution driving gear is engaged with the revolution driven gear, the electrode holder assembly is rotatably provided on the revolution driven gear, and the set center is a rotation center of the revolution driven gear.
Further, the rotation assembly comprises a rotation driving gear and a rotating shaft, the rotation driving gear is fixedly sleeved on the rotating shaft, and the rotation driving gear is in transmission connection with the electrode frame assembly.
Further, the rotating shaft is arranged on the revolution driven gear in a penetrating way and is arranged coaxially with the revolution driven gear.
Further, the electrode frame assembly comprises an electrode frame and a rotation driven gear, the rotation driven gear is rotatably arranged on the revolution driven gear and meshed with the rotation driving gear, the electrode frame is arranged on the rotation driven gear, and the radio frequency electrode plate and the grounding electrode plate are arranged on the electrode frame.
Further, the radio frequency electrode plate and the grounding electrode plate are arranged at intervals along the height direction of the electrode frame assembly, and the radio frequency electrode plate and the grounding electrode plate are arranged in one-to-one correspondence.
Further, the rotary electrode device comprises a first rotary electrode assembly and a second rotary electrode assembly which are connected with each other, the upper end of the rotating shaft is rotatably arranged on the first rotary electrode assembly, and the electrode frame assembly is rotatably arranged on the second rotary electrode assembly.
Further, the first rotary electrode assembly comprises a first outer ring and a first inner ring which are coaxially arranged, a first relay roller is arranged between the first outer ring and the first inner ring, and the first inner ring is fixedly sleeved on the rotating shaft.
Further, the second rotary electrode assembly comprises a second outer ring piece and a second inner ring piece which are coaxially arranged, a second relay roller is arranged between the second outer ring piece and the second inner ring piece, the second inner ring piece is fixedly sleeved on the electrode frame assembly, and the second outer ring piece is electrically connected with the radio frequency electrode slice.
Further, be provided with the opening on the first outer ring spare, in the position of opening is provided with locking subassembly, locking subassembly includes:
the two connecting lug plates are arranged at two ends of the opening part at intervals;
the mounting shaft is arranged on the two connecting lug plates in a penetrating way;
and the elastic piece is sleeved on the mounting shaft, one end of the elastic piece is abutted with the end part of the mounting shaft, and the other end of the elastic piece is abutted with one of the connecting lug plates.
The invention has the beneficial effects that:
according to the rotary electrode coating system provided by the invention, the radio frequency electrode plate and the grounding electrode plate are arranged on the electrode frame assembly at intervals in parallel, the radio frequency electrode plate is electrically connected with the radio frequency power supply, the grounding electrode plate and the radio frequency electrode plate are insulated from each other, a product to be coated is arranged between the radio frequency electrode plate and the grounding electrode plate, and the time for moving plasma to the surface of the product is shortened because the product is positioned in an electric field, so that the coating efficiency is improved; the radio frequency electrode plate and the grounding electrode plate can rotate around a set center under the drive of the revolution component or rotate around the axis of the radio frequency electrode plate and the grounding electrode plate under the drive of the rotation component, and products to be coated can be formed into films in different areas and under different plasma concentrations through the rotation or revolution of the radio frequency electrode plate and the grounding electrode plate, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film formation is improved.
Drawings
FIG. 1 is a schematic illustration of a rotary electrode coating system of the present invention;
FIG. 2 is a schematic illustration of an electrode assembly in a rotary electrode coating system according to the present invention;
FIG. 3 is a schematic view of a revolution assembly and a rotation assembly in a rotary electrode coating system according to the present invention;
FIG. 4 is a schematic diagram of a rotary electrode device in a rotary electrode coating system according to the present invention.
In the figure:
1. an electrode assembly; 11. an electrode holder; 12. a radio frequency electrode sheet; 13. a first connecting piece; 14. a ground electrode sheet; 15. a second connecting piece; 16. a self-rotation driven gear; 2. a revolution assembly; 21. a revolution driving gear; 22. revolution driven gears; 3. a self-rotation assembly; 31. a rotation driving gear; 32. a rotating shaft; 4. rotating the electrode device; 41. a first outer ring member; 42. a first relay roller; 43. a first inner ring member; 44. a second outer ring member; 45. a second relay roller; 46. a second inner ring member; 47. a locking assembly; 471. connecting an ear plate; 472. a mounting shaft; 473. an elastic member; 48. and a fixing piece.
Detailed Description
The technical scheme of the invention is further described below with reference to the attached drawings and the embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the drawings related to the present invention are shown.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In order to improve uniformity and coating efficiency of chemical vapor deposition, as shown in fig. 1-4, the invention provides a rotary electrode coating system. The rotary electrode coating system comprises: an electrode assembly 1, a revolution assembly 2, and a rotation assembly 3.
Wherein the electrode assembly 1 includes: an electrode frame assembly, a radio frequency electrode pad 12 and a ground electrode pad 14; the radio frequency electrode plate 12 and the grounding electrode plate 14 are arranged on the electrode frame assembly at intervals in parallel, the radio frequency electrode plate 12 is electrically connected with a radio frequency power supply, and the grounding electrode plate 14 and the radio frequency electrode plate 12 are mutually insulated; the revolution assembly 2 is used for driving the electrode frame assembly to rotate around a set center; the autorotation assembly 3 is in transmission connection with the electrode frame assembly and is used for driving the electrode frame assembly to rotate around the axis of the electrode frame assembly, and the set center is arranged at intervals with the axis of the electrode frame assembly.
The radio frequency electrode plate 12 and the grounding electrode plate 14 are arranged on the electrode frame assembly at intervals in parallel, the radio frequency electrode plate 12 is electrically connected with a radio frequency power supply, the grounding electrode plate 14 and the radio frequency electrode plate 12 are insulated from each other, a product to be coated is arranged between the radio frequency electrode plate 12 and the grounding electrode plate 14, and the time for moving plasma to the surface of the product is shortened because the product is positioned in an electric field, so that the coating efficiency is improved; the radio frequency electrode plate 12 and the grounding electrode plate 14 can rotate around a set center under the drive of the revolution component 2 or rotate around the axis of the radio frequency electrode plate 12 and the grounding electrode plate 14 under the drive of the rotation component 3, and products to be coated can be formed into films in different areas and at different plasma concentrations through the rotation or revolution of the radio frequency electrode plate 12 and the grounding electrode plate 14, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film formation is improved.
Further, the revolution assembly 2 includes a revolution driving gear 21 and a revolution driven gear 22, the revolution driving gear 21 is engaged with the revolution driven gear 22, and the electrode holder assembly is rotatably provided on the revolution driven gear 22. By driving the revolution driving gear 21 to thereby drive the revolution driven gear 22, the electrode holder assembly rotates around the axis of the revolution driven gear 22, with the set center being the rotation center of the revolution driven gear 22.
Further, the rotation assembly 3 comprises a rotation driving gear 31 and a rotating shaft 32, the rotation driving gear 31 is fixedly sleeved on the rotating shaft 32, and the rotation driving gear 31 is in transmission connection with the electrode frame assembly. The rotation driving gear 31 is driven to rotate by the driving rotating shaft 32 so as to drive the electrode frame assembly to rotate, and the electrode frame assembly rotates around the axis of the electrode frame assembly. The product to be coated can be formed into films in different areas and at different plasma concentrations through the rotation or revolution of the radio frequency electrode plate 12 and the grounding electrode plate 14, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film formation is improved.
Further, the rotation shaft 32 is provided to pass through the revolution driven gear 22 and is provided coaxially with the revolution driven gear 22. By disposing the rotation shaft 32 on the revolution driven gear 22, the structural complexity of the revolution assembly 2 and the rotation assembly 3 can be reduced, the occupation space of the revolution assembly 2 and the rotation assembly 3 can be reduced, and the compact structure can be ensured.
Further, the electrode frame assembly includes an electrode frame 11 and a rotation driven gear 16, the rotation driven gear 16 is rotatably disposed on the revolution driven gear 22 and is meshed with the rotation driving gear 31, the electrode frame 11 is disposed on the rotation driven gear 16, and the radio frequency electrode sheet 12 and the ground electrode sheet 14 are disposed on the electrode frame 11. The rotation of the radio frequency electrode plate 12 and the grounding electrode plate 14 is realized by the meshing transmission of the rotation driven gear 16 and the rotation driving gear 31.
Further, the radio frequency electrode plates 12 and the ground electrode plates 14 are arranged in plurality at intervals along the height direction of the electrode frame assembly, and the radio frequency electrode plates 12 and the ground electrode plates 14 are arranged in one-to-one correspondence. In order to facilitate connection of the radio frequency electrode plates 12 and the radio frequency power supply, the grounding electrode plates 14 are grounded, in this embodiment, a first connecting plate 13 and a second connecting plate 15 are provided on the electrode frame 11, the first connecting plate 13 is electrically connected with the radio frequency power supply, the plurality of radio frequency electrode plates 12 are all connected with the first connecting plate 13, the second connecting plate 15 is grounded, and the plurality of grounding electrode plates 14 are all connected with the second connecting plate 15. By arranging the plurality of radio frequency electrode plates 12 and the grounding electrode plates 14, products to be coated can be arranged on the adjacent radio frequency electrode plates 12 and the grounding electrode plates 14, so that the coating efficiency is further improved.
Further, the rotary electrode coating system further comprises a rotary electrode device 4, the rotary electrode device 4 comprises a first rotary electrode assembly and a second rotary electrode assembly which are connected with each other, the upper end of the rotating shaft 32 is rotatably arranged on the first rotary electrode assembly, and the electrode frame assembly is rotatably arranged on the second rotary electrode assembly. The rotational stability of the rotation shaft 32 and the electrode holder assembly can be ensured by providing the first and second electrode rotating assemblies.
Further, the first rotary electrode assembly includes a first outer ring 41 and a first inner ring 43 coaxially disposed, a first relay roller 42 is disposed between the first outer ring 41 and the first inner ring 43, and the first inner ring 43 is fixedly sleeved on the rotating shaft 32. The first inner ring member 43 rotates relative to the first outer ring member 41 through the first relay roller 42, ensuring the smoothness of the rotation of the first inner ring member 43.
Further, the second rotary electrode assembly includes a second outer ring member 44 and a second inner ring member 46 coaxially disposed, a second relay roller 45 is disposed between the second outer ring member 44 and the second inner ring member 46, the second inner ring member 46 is fixedly sleeved on the connecting shaft of the electrode frame assembly, and the second outer ring member 44 is electrically connected with the rf electrode plate 12 through a fixing piece 48. In this embodiment, in order to further improve the coating efficiency, a plurality of electrode assemblies 1 are disposed on the revolution driven gear 22 at intervals, and the rf power source is connected to the first inner ring member 43 and then transmitted to the second outer ring member 44 through the first relay rotor and the first outer ring member 41, so that the plurality of electrode assemblies 1 can be all communicated with the rf power source.
Since the rotation shaft 32 will cause the abrasion of the first inner ring member 43 during rotation, the stability of the transmission between the first relay roller 42 and the first outer ring member 41 will be reduced, further, the first outer ring member 41 is provided with an opening, and the locking assembly 47 is disposed at the position of the opening, where the locking assembly 47 includes: two connecting lugs 471 are arranged at two ends of the opening at intervals; the mounting shaft 472 is arranged on the two connecting lugs 471 in a penetrating way; the elastic member 473 is sleeved on the mounting shaft 472, and has one end abutting against the end of the mounting shaft 472 and the other end abutting against one of the connecting lugs 471. The first outer ring 41 can be tightened at the opening of the first outer ring 41 under the action of the elastic force of the elastic member 473, so as to ensure the stability of the transmission between the first outer ring 41 and the first relay roller 42.
Further, in order to prevent the second inner ring 46 from being worn, and thus the stability of the transmission between the second relay roller 45 and the second outer ring 44 is lowered, the second outer ring 44 is also provided with an opening portion, and a locking member 47 is also provided at the position of the opening portion.
It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (5)
1. A rotary electrode coating system, comprising:
an electrode assembly (1) comprising: an electrode frame assembly, a radio frequency electrode sheet (12) and a ground electrode sheet (14);
the radio frequency electrode plate (12) and the grounding electrode plate (14) are arranged on the electrode frame assembly at intervals in parallel, the radio frequency electrode plate (12) is electrically connected with a radio frequency power supply, and the grounding electrode plate (14) and the radio frequency electrode plate (12) are mutually insulated;
a revolution assembly (2) for driving the electrode frame assembly to rotate around a set center;
the autorotation assembly (3) is in transmission connection with the electrode frame assembly and is used for driving the electrode frame assembly to rotate around the axis of the electrode frame assembly, and the set center is arranged at intervals with the axis of the electrode frame assembly; the self-rotation assembly (3) comprises a self-rotation driving gear (31) and a rotating shaft (32), the self-rotation driving gear (31) is fixedly sleeved on the rotating shaft (32), and the self-rotation driving gear (31) is in transmission connection with the electrode frame assembly;
the revolution assembly (2) comprises a revolution driving gear (21) and a revolution driven gear (22), the revolution driving gear (21) is meshed with the revolution driven gear (22), the electrode frame assembly is rotatably arranged on the revolution driven gear (22), and the set center is the rotation center of the revolution driven gear (22);
the rotating shaft (32) is arranged on the revolution driven gear (22) in a penetrating way and is arranged coaxially with the revolution driven gear (22);
the electrode frame assembly comprises an electrode frame (11) and a rotation driven gear (16), the rotation driven gear (16) is rotatably arranged on the revolution driven gear (22) and meshed with the rotation driving gear (31), the electrode frame (11) is arranged on the rotation driven gear (16), and the radio frequency electrode plate (12) and the grounding electrode plate (14) are arranged on the electrode frame (11);
the rotary electrode device (4), the rotary electrode device (4) comprises a first rotary electrode assembly and a second rotary electrode assembly which are connected with each other, the upper end of the rotating shaft (32) is rotatably arranged on the first rotary electrode assembly, and the electrode frame assembly is rotatably arranged on the second rotary electrode assembly.
2. The rotary electrode coating system according to claim 1, wherein the radio frequency electrode sheet (12) and the ground electrode sheet (14) are arranged in a plurality at intervals along the height direction of the electrode frame assembly, and the radio frequency electrode sheet (12) and the ground electrode sheet (14) are arranged in one-to-one correspondence.
3. The rotary electrode coating system according to claim 1, wherein the first rotary electrode assembly comprises a first outer ring (41) and a first inner ring (43) which are coaxially arranged, a first relay roller (42) is arranged between the first outer ring (41) and the first inner ring (43), and the first inner ring (43) is fixedly sleeved on the rotating shaft (32).
4. The rotary electrode coating system according to claim 1, wherein the second rotary electrode assembly comprises a second outer ring (44) and a second inner ring (46) which are coaxially arranged, a second relay roller (45) is arranged between the second outer ring (44) and the second inner ring (46), the second inner ring (46) is fixedly sleeved on the electrode frame assembly, and the second outer ring (44) is electrically connected with the radio-frequency electrode sheet (12).
5. A rotary electrode coating system according to claim 3, wherein the first outer ring member (41) is provided with an opening portion, a locking member (47) is provided at a position of the opening portion, and the locking member (47) comprises:
two connecting lug plates (471) which are arranged at two ends of the opening at intervals;
the mounting shaft (472) is arranged on the two connecting lug plates (471) in a penetrating way;
and an elastic member (473) which is sleeved on the mounting shaft (472), one end of which is in contact with the end of the mounting shaft (472), and the other end of which is in contact with one of the connecting lugs (471).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110075454.5A CN112899660B (en) | 2021-01-20 | 2021-01-20 | Rotary electrode coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110075454.5A CN112899660B (en) | 2021-01-20 | 2021-01-20 | Rotary electrode coating system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112899660A CN112899660A (en) | 2021-06-04 |
| CN112899660B true CN112899660B (en) | 2023-07-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110075454.5A Active CN112899660B (en) | 2021-01-20 | 2021-01-20 | Rotary electrode coating system |
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| CN (1) | CN112899660B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62146262A (en) * | 1985-12-20 | 1987-06-30 | Fuji Electric Co Ltd | Apparatus for producing electrophotographic sensitive body |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63262472A (en) * | 1987-04-20 | 1988-10-28 | Sanyo Electric Co Ltd | Formation of film |
| CN106048552A (en) * | 2016-07-19 | 2016-10-26 | 深圳市东丽华科技有限公司 | Vacuum coating machine |
| JP2018067427A (en) * | 2016-10-18 | 2018-04-26 | 株式会社ティー・ピー・エス | Connector device and manufacturing method thereof |
| CN111349910B (en) * | 2020-03-17 | 2022-06-17 | 龙鳞(深圳)新材料科技有限公司 | Workpiece frame and coating system |
-
2021
- 2021-01-20 CN CN202110075454.5A patent/CN112899660B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62146262A (en) * | 1985-12-20 | 1987-06-30 | Fuji Electric Co Ltd | Apparatus for producing electrophotographic sensitive body |
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| CN112899660A (en) | 2021-06-04 |
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