CN112840175A - 用于透明或半透明材料曲面的测量系统 - Google Patents

用于透明或半透明材料曲面的测量系统 Download PDF

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Publication number
CN112840175A
CN112840175A CN201880098407.9A CN201880098407A CN112840175A CN 112840175 A CN112840175 A CN 112840175A CN 201880098407 A CN201880098407 A CN 201880098407A CN 112840175 A CN112840175 A CN 112840175A
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CN201880098407.9A
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向贤毅
吴明军
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Chengdu Pintai Dingfeng Enterprise Management Center LP
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Chengdu Pintai Dingfeng Enterprise Management Center LP
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

一种用于透明或半透明材料曲面的测量系统(1)，包括：表面处理装置(10)、三维测量装置(20)和第二传送装置；表面处理装置(10)用于对透明或半透明材料的表面进行霜化或雾化，形成霜化或雾化表面，即在透明或半透明材料的表面形成均匀的霜或雾；三维测量装置(20)用于对霜化或雾化后的透明或半透明材料的表面进行三维测量，从而获取测量数据；第二传送装置用于将表面霜化或雾化后的材料传送到三维测量装置(20)。

Description

PCT国内申请，说明书已公开。

Claims (10)

  1. PCT国内申请，权利要求书已公开。
CN201880098407.9A 2018-10-15 2018-11-08 用于透明或半透明材料曲面的测量系统 Pending CN112840175A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN2018111950275 2018-10-15
CN201811195027 2018-10-15
PCT/CN2018/114597 WO2020077709A1 (zh) 2018-10-15 2018-11-08 用于透明或半透明材料曲面的测量系统

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CN112840175A true CN112840175A (zh) 2021-05-25

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CN (1) CN112840175A (zh)
WO (1) WO2020077709A1 (zh)

Citations (8)

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JP2007062219A (ja) * 2005-08-31 2007-03-15 Canon Inc 記録装置及び距離検出方法
CN104114976A (zh) * 2011-12-27 2014-10-22 株式会社Sumco 氧化硅玻璃坩埚的三维形状测量方法、单晶硅的制造方法
CN104729420A (zh) * 2015-03-24 2015-06-24 中国科学院上海技术物理研究所 一种测量红外焦平面模块低温形变的装置及方法
CN105091784A (zh) * 2015-06-30 2015-11-25 东莞市盟拓光电科技有限公司 用于表面为镜面或透明表面的被测物的三维成像系统
CN204831219U (zh) * 2015-04-27 2015-12-02 宁波频泰光电科技有限公司 手持三维扫描装置和移动终端
CN105753334A (zh) * 2016-02-01 2016-07-13 广州视睿电子科技有限公司 镀膜玻璃及其制备方法
CN107388994A (zh) * 2017-06-14 2017-11-24 武汉华星光电技术有限公司 一种测量多晶硅粗糙度的方法及装置

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Publication number Priority date Publication date Assignee Title
CN100573040C (zh) * 2008-03-17 2009-12-23 南京航空航天大学 物体表面三维轮廓结构光测量系统的标定方法
CN203732043U (zh) * 2013-10-12 2014-07-23 石泉 检测仪以及具有该检测仪的测量系统
WO2017148665A1 (en) * 2016-03-01 2017-09-08 Asml Netherlands B.V. Metrology apparatus, method of measuring a structure and lithographic apparatus
CN107131847B (zh) * 2017-06-15 2024-04-09 宁波九纵智能科技有限公司 一种可应用于3d曲面玻璃面形检测的测量装置及方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950027420A (ko) * 1994-03-25 1995-10-16 다떼이시 요시오 광학식 감지장치
JP2007062219A (ja) * 2005-08-31 2007-03-15 Canon Inc 記録装置及び距離検出方法
CN104114976A (zh) * 2011-12-27 2014-10-22 株式会社Sumco 氧化硅玻璃坩埚的三维形状测量方法、单晶硅的制造方法
CN104729420A (zh) * 2015-03-24 2015-06-24 中国科学院上海技术物理研究所 一种测量红外焦平面模块低温形变的装置及方法
CN204831219U (zh) * 2015-04-27 2015-12-02 宁波频泰光电科技有限公司 手持三维扫描装置和移动终端
CN105091784A (zh) * 2015-06-30 2015-11-25 东莞市盟拓光电科技有限公司 用于表面为镜面或透明表面的被测物的三维成像系统
CN105753334A (zh) * 2016-02-01 2016-07-13 广州视睿电子科技有限公司 镀膜玻璃及其制备方法
CN107388994A (zh) * 2017-06-14 2017-11-24 武汉华星光电技术有限公司 一种测量多晶硅粗糙度的方法及装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
韩伟军等: "无反射蒙砂玻璃", 《玻璃》 *

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