CN112831829A - 一种直拉法生产单晶中收尾阶段单晶收放趋势的判断方法 - Google Patents
一种直拉法生产单晶中收尾阶段单晶收放趋势的判断方法 Download PDFInfo
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- CN112831829A CN112831829A CN202011609839.7A CN202011609839A CN112831829A CN 112831829 A CN112831829 A CN 112831829A CN 202011609839 A CN202011609839 A CN 202011609839A CN 112831829 A CN112831829 A CN 112831829A
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- 239000013078 crystal Substances 0.000 title claims abstract description 66
- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000004804 winding Methods 0.000 title abstract description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 8
- 230000003796 beauty Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 6
- 239000010703 silicon Substances 0.000 abstract description 6
- 238000004364 calculation method Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 description 1
- YTAHJIFKAKIKAV-XNMGPUDCSA-N [(1R)-3-morpholin-4-yl-1-phenylpropyl] N-[(3S)-2-oxo-5-phenyl-1,3-dihydro-1,4-benzodiazepin-3-yl]carbamate Chemical compound O=C1[C@H](N=C(C2=C(N1)C=CC=C2)C1=CC=CC=C1)NC(O[C@H](CCN1CCOCC1)C1=CC=CC=C1)=O YTAHJIFKAKIKAV-XNMGPUDCSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
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CN202011609839.7A CN112831829A (zh) | 2020-12-29 | 2020-12-29 | 一种直拉法生产单晶中收尾阶段单晶收放趋势的判断方法 |
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CN202011609839.7A CN112831829A (zh) | 2020-12-29 | 2020-12-29 | 一种直拉法生产单晶中收尾阶段单晶收放趋势的判断方法 |
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CN112831829A true CN112831829A (zh) | 2021-05-25 |
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CN202011609839.7A Pending CN112831829A (zh) | 2020-12-29 | 2020-12-29 | 一种直拉法生产单晶中收尾阶段单晶收放趋势的判断方法 |
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CN (1) | CN112831829A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114318513A (zh) * | 2021-12-30 | 2022-04-12 | 山东有研半导体材料有限公司 | 一种精准控制单晶生长界面的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000060145A1 (en) * | 1999-04-07 | 2000-10-12 | Memc Electronic Materials, Inc. | Method and system of controlling taper growth in a semiconductor crystal growth process |
CN110512279A (zh) * | 2019-10-15 | 2019-11-29 | 宁夏银和新能源科技有限公司 | 能够提高收尾成功率的单晶炉收尾方法 |
CN112064109A (zh) * | 2020-07-23 | 2020-12-11 | 南京晶能半导体科技有限公司 | 一种对半导体硅材料晶体长晶放肩形状的控制方法 |
-
2020
- 2020-12-29 CN CN202011609839.7A patent/CN112831829A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000060145A1 (en) * | 1999-04-07 | 2000-10-12 | Memc Electronic Materials, Inc. | Method and system of controlling taper growth in a semiconductor crystal growth process |
CN1350602A (zh) * | 1999-04-07 | 2002-05-22 | Memc电子材料有限公司 | 在半导体晶体生长工艺中控制锥体生长的方法与系统 |
CN110512279A (zh) * | 2019-10-15 | 2019-11-29 | 宁夏银和新能源科技有限公司 | 能够提高收尾成功率的单晶炉收尾方法 |
CN112064109A (zh) * | 2020-07-23 | 2020-12-11 | 南京晶能半导体科技有限公司 | 一种对半导体硅材料晶体长晶放肩形状的控制方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114318513A (zh) * | 2021-12-30 | 2022-04-12 | 山东有研半导体材料有限公司 | 一种精准控制单晶生长界面的方法 |
CN114318513B (zh) * | 2021-12-30 | 2024-03-05 | 山东有研半导体材料有限公司 | 一种精准控制单晶生长界面的方法 |
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Address after: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Applicant after: Youyan semiconductor silicon materials Co.,Ltd. Applicant after: Shandong Youyan semiconductor materials Co.,Ltd. Address before: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Applicant before: GRINM SEMICONDUCTOR MATERIALS Co.,Ltd. Applicant before: Shandong Youyan semiconductor materials Co.,Ltd. |
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Application publication date: 20210525 |
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