CN112799120A - Double-channel electrostatic analyzer for ion and electron synchronous measurement - Google Patents

Double-channel electrostatic analyzer for ion and electron synchronous measurement Download PDF

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Publication number
CN112799120A
CN112799120A CN201911106108.8A CN201911106108A CN112799120A CN 112799120 A CN112799120 A CN 112799120A CN 201911106108 A CN201911106108 A CN 201911106108A CN 112799120 A CN112799120 A CN 112799120A
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electrode
channel
hemispherical
ions
electrons
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CN112799120B (en
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孔令高
苏斌
张爱兵
高俊
王文静
刘斌
田峥
郑香脂
关燚炳
刘超
丁建京
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National Space Science Center of CAS
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National Space Science Center of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2907Angle determination; Directional detectors; Telescopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914Measurement of spatial distribution of radiation

Abstract

The invention relates to the technical field of space physics and space environment detection, in particular to a double-channel electrostatic analyzer for synchronously measuring ions and electrons, which comprises: the electrostatic deflection device, the track guide device, the double-channel hemispherical electrostatic analyzer, the separation electrode device, the signal pre-amplification device, the electronic processor (17) and the device shell (1); the device shell (1) is arranged on an electronics processor (17), and is internally provided with an electrostatic deflection device, a track guide device, a double-channel hemispherical electrostatic analyzer, a separation electrode device and a signal preamplification device; a track guide device is arranged below the electrostatic deflection device and is connected with the track guide device; the double-channel hemispherical electrostatic analyzer is arranged below the track guide device and is connected with the track guide device; and a separation electrode device and a signal pre-amplification device are sequentially arranged below the double-channel hemispherical electrostatic analyzer and are connected with an electronic processor through cables.

Description

Double-channel electrostatic analyzer for ion and electron synchronous measurement
Technical Field
The invention belongs to the technical field of space physics and space environment detection, and particularly relates to a dual-channel electrostatic analyzer for synchronously measuring ions and electrons.
Background
Currently, charged ions and electrons are present everywhere in earth space, interplanetary, and other planetary spaces of the solar system. These charged particles are one of the main environmental elements in space, and the charged particles can interact with an in-orbit spacecraft to cause various spatial environmental effects such as charging and discharging. The detection of charged particles can be used to study fundamental physical problems of human interest, such as how low energy particles accelerate to high energy particles, how the sun affects the formation and dissipation of the planetary atmosphere, and the like. The solution of these problems helps people to know and understand the unknown world and also provides guarantee for the safe development of various space activities. Charged particle detection is an essential detection item for space environment detection, such as a clouster satellite, an american MMS satellite, a Mars Express (Mars Express) of the cloust, and an MAVEN in the united states, and an ion detector and an electron detector are arranged on the cloust and the MAVEN to detect ions and electrons.
Currently, a common method for measurement of low energy ions and electrons is: the direction and energy of the incident particles are analyzed by using an electrostatic analysis method, and then the microchannel plate is used as a signal amplification output to be processed by electronics, so that the energy, direction and flux information of the particles are obtained. The measurement methods of low-energy ions and electrons are basically consistent. However, since the ions and the electrons have different charge polarities, the ion detection and the electron detection are usually performed as two independent detection devices, and a single-channel electrostatic analyzer structure is adopted. This method results in a large total weight and power consumption of the instrument. On a small satellite detection platform, especially a deep space detection-oriented satellite platform, the weight and power consumption of a carried instrument are required to be as low as possible so as to reduce the emission cost. Therefore, the method of using two independent devices to measure ions and electrons separately limits its application to small satellite platforms.
Disclosure of Invention
The invention aims to solve the defects of the existing method, provides a double-channel electrostatic analyzer for synchronously measuring ions and electrons, solves the technical problem that the current space low-energy ion and electron detection cannot be integrated into one device, and particularly provides a double-channel hemispherical electrostatic analyzer which can integrate the measurement functions of ions and electrons in one device, realizes the synchronous measurement of the ions and the electrons, greatly reduces the weight and the power consumption of the device, improves the miniaturization level of a space low-energy particle detection instrument, and expands the application field of the low-energy particle detection instrument.
In order to achieve the purpose, the invention provides a dual-channel electrostatic analyzer for synchronously measuring ions and electrons, which solves the technical problem of synchronously measuring ions and electrons in one device in space environment detection.
The dual channel electrostatic analyzer includes: the device comprises an electrostatic deflection device, a track guide device, a double-channel hemispherical electrostatic analyzer, a separation electrode device, a signal pre-amplification device, an electronic processor and a device shell;
the device shell is arranged on the electronic processor, and is internally provided with an electrostatic deflection device, a track guide device, a double-channel hemispherical electrostatic analyzer, a separation electrode device and a signal preamplification device; the lower part of the static deflection device is arranged on the track guide device and is connected with the track guide device; the double-channel hemispherical electrostatic analyzer is arranged below the track guide device and is connected with the track guide device; and a separation electrode device and a signal pre-amplification device are sequentially arranged below the double-channel hemispherical electrostatic analyzer and are connected with an electronic processor through cables.
As an improvement of the above-described technical solution, the electrostatic deflection apparatus includes: an upper deflection plate and a lower deflection plate; the upper deflection plate is of a bowl-shaped structure, the bowl opening of the upper deflection plate is upward, and the bottom of the upper deflection plate is provided with an opening; the lower deflection plate is of a vase bottleneck-shaped structure, and the bottleneck of the lower deflection plate is upward; the upper deflection plate and the lower deflection plate are two arc plates with 45-degree cross sections and are symmetrically arranged, and an incident channel is formed;
wherein the upper deflection plate and the lower deflection plate scan ions and electrons in any direction within a range of 90 ° by means of voltages applied thereto while being incident along the incident channel.
As one improvement of the technical scheme, an incident channel formed by the upper deflection plate and the lower deflection plate is of a circumferential horn-shaped structure, and the opening of the circumferential horn-shaped structure faces to the device shell; the included angle between the symmetrical central line of the upper deflection plate and the lower deflection plate and the upper side line of the electronic processor is 45 degrees.
As an improvement of the above technical solution, the trajectory guide device includes: an upper electrode, a middle electrode and a lower electrode;
the upper electrode and the lower electrode are respectively positioned at the upper position and the lower position of the middle electrode; the three parts form a cylindrical space with openings at the upper end and the lower end; the upper electrode is arranged at the opening at the bottom of the upper deflection plate; the lower electrode is arranged above the double-channel hemispherical electrostatic analyzer, and a first opening and a second opening are arranged above and below the cylindrical space; the upper electrode can be applied with high voltage, the middle electrode and the lower electrode are grounded to form a specific electric field to introduce the ions and electrons emitted by the electrostatic deflection device into a double-channel electrostatic analyzer connected at the rear end of the electrostatic deflection device.
As an improvement of the above technical solution, the dual-channel hemispherical electrostatic analyzer is configured to perform energy analysis on ions and electrons entering the electrostatic analyzer through a voltage applied to the dual-channel hemispherical electrostatic analyzer, screen and output ions and electrons having energies corresponding to numerical values of the voltage, and emit the ions and electrons from different channels respectively;
wherein the dual-channel hemispherical electrostatic analyzer comprises: the electrode structure comprises an outer hemisphere electrode, a middle hemisphere electrode and an inner hemisphere electrode;
the middle hemispherical electrode is positioned between the outer hemispherical electrode and the inner hemispherical electrode; the middle hemispherical electrode forms an outer channel and an inner channel for ions and electrons to deflect between the outer hemispherical electrode and the inner hemispherical electrode respectively; the step scanning voltage is applied to the middle hemispherical electrode, the outer hemispherical electrode and the inner hemispherical electrode are grounded, periodically-changing electric fields are respectively formed between the middle hemispherical electrode and the outer hemispherical electrode and between the middle hemispherical electrode and the inner hemispherical electrode, ions and electrons with energy corresponding to the value of the step scanning voltage are screened and output, and the screened and output ions and electrons are respectively emitted along the corresponding outer channel and the corresponding inner channel.
As one improvement of the technical scheme, the outer hemispherical electrode, the middle hemispherical electrode and the inner hemispherical electrode are all hemispherical electrodes; the outer side channel and the inner side channel are both circumferential bowl-shaped structures with downward openings, and the tops of the bowl-shaped structures are provided with openings.
As an improvement of the above technical solution, the separation electrode device includes: an outer ring electrode and an inner ring electrode; the outer ring electrode and the inner ring electrode are both in annular structures;
the polarity of the voltage applied by the outer ring electrode is the same as that of the voltage applied by the middle hemispherical electrode; the polarity of the voltage applied by the inner ring electrode is opposite to that of the voltage applied by the middle hemisphere electrode.
As an improvement of the above technical solution, the signal pre-amplifying device includes: the device comprises an outer ring microchannel plate, an inner ring microchannel plate, an outer ring anode and an inner ring anode;
the outer ring micro-channel plate is provided with an outer ring electrode which is used for amplifying the charge signal of ions output by the outer channel of the electrostatic analyzer, outputting a corresponding charge pulse signal and being received by an outer ring anode which is positioned below the outer ring micro-channel plate and is separated by a distance;
the inner ring micro-channel plate is provided with an inner ring electrode which is used for amplifying an electric charge signal of electrons output by an inner channel of the electrostatic analyzer, outputting a corresponding electric charge pulse signal and being received by an inner ring anode which is positioned below the inner ring micro-channel plate and is separated by a distance;
and the outer ring anode and the inner ring anode are used for collecting corresponding charge pulse signals and inputting the charge pulse signals to the electronic processor through cables respectively.
As an improvement of the above technical solution, the electronic processor includes: the system comprises a signal pre-amplification circuit, a high-voltage circuit, a low-voltage circuit, a power supply system, an interface circuit and an FPGA processor;
the signal pre-amplification circuit is used for amplifying corresponding charge pulse signals output by the outer ring anode and the inner ring anode through connected cables to obtain amplified ionic electric signals and amplified electronic electric signals;
the FPGA processor is used for calculating the pulse count in unit time by combining the voltage data applied by the electrostatic analyzer and the voltage data applied by the electrostatic deflection device according to the obtained amplified ion electric signal and electronic electric signal to obtain the energy, direction and flux information of ions and electrons;
the high-voltage circuit is used for providing required multi-path high voltage; wherein the multi-path high voltage further comprises: positive high voltage and negative high voltage;
the low-voltage circuit is used for cooperating with the FPGA to control the operation of the whole electronic processor, comprises the communication with the outside through the FPGA control interface circuit and can be used for communicating with a satellite bus; the high-voltage circuit outputs the required high voltage through the FPGA and the DA converter.
The power supply system is used for supplying power.
Compared with the prior art, the invention has the beneficial effects that:
the invention fully integrates ion and electron measurement, synchronously realizes the measurement of the ion and the electron in one device, greatly reduces the weight and the power consumption requirements of the instrument, and has wide application requirements in the space detection field with insufficient resources such as the weight, the power consumption and the like, particularly the deep space detection field.
Drawings
FIG. 1 is a schematic cross-sectional view of a dual channel electrostatic analyzer for simultaneous measurement of ions and electrons in accordance with the present invention;
FIG. 2 is a schematic diagram of a three-dimensional cross-sectional structure of a dual channel electrostatic analyzer for simultaneous measurement of ions and electrons in accordance with the present invention;
FIG. 3 is a schematic diagram of a dual channel electrostatic analyzer for simultaneous measurement of ions and electrons according to the present invention mounted on a satellite platform;
fig. 4 is a schematic diagram of the electronic processor of a dual channel electrostatic analyzer for simultaneous measurement of ions and electrons in accordance with the present invention.
Reference numerals:
1. device housing 2, upper deflector plate
3. Lower deflection plate 4, upper electrode
5. Middle electrode 6, lower electrode
7. Outer hemisphere electrode 8, middle hemisphere electrode
9. Inner hemisphere electrode 10, outer ring electrode
11. Inner ring electrode 12 and outer ring micro-channel plate
13. Inner ring micro-channel plate 14 and outer ring anode
15. Inner ring anode 15, inner ring anode
16. Cable 17 and electronic processor
18. First opening 19, second opening
Detailed Description
The invention will now be further described with reference to the accompanying drawings.
As shown in fig. 1, the present invention provides a dual-channel electrostatic analyzer for synchronously measuring ions and electrons, which overcomes the problem that the existing space low-energy ion and electron detection equipment cannot synchronously measure ions and electrons in a single equipment, and realizes the synchronous measurement of ions and electrons by adopting the design of a dual-channel hemispherical electrostatic analyzer; the voltage setting of the track guiding device is utilized to change the detection sensitivity of the instrument, and the detection dynamic range is expanded; by utilizing the design of the double-separation electrode, ions and electronic signals are fully separated, and mutual interference is avoided.
The dual channel electrostatic analyzer includes: the electrostatic deflection device, the track guide device, the double-channel hemispherical electrostatic analyzer, the separation electrode device, the signal pre-amplification device, the electronic processor 17 and the device shell 1;
the device shell 1 is arranged on an electronics processor 17, and is internally provided with an electrostatic deflection device, a track guide device, a double-channel hemispherical electrostatic analyzer, a separation electrode device and a signal preamplification device; the lower part of the static deflection device is arranged on the track guide device and is connected with the track guide device; the double-channel hemispherical electrostatic analyzer is arranged below the track guide device and is connected with the track guide device; and a separation electrode device and a signal pre-amplification device are sequentially arranged below the double-channel hemispherical electrostatic analyzer and are connected with an electronic processor through cables.
The electrostatic deflection device is used for expanding a pitch angle detection field of view and introducing ions and electrons incident from the space into the track guiding device;
wherein the electrostatic deflection device comprises: an upper deflector 2 and a lower deflector 3; the upper deflection plate 2 is of a bowl-shaped structure, the bowl opening of the upper deflection plate is upward, and the bottom of the upper deflection plate is provided with an opening; the lower deflection plate 3 is of a vase bottleneck-shaped structure, and the bottleneck of the lower deflection plate is upward;
the upper deflection plate 2 and the lower deflection plate 3 are two arc plates with 45-degree cross sections and are symmetrically arranged, and an incident channel is formed; wherein the upper deflection plate 2 and the lower deflection plate 3 scan ions and electrons in any direction within a range of 90 ° simultaneously incident along the incident path by the applied voltages thereof. Wherein the incident channel formed by the upper deflection plate 2 and the lower deflection plate 3 is in a circumferential horn-like structure, and the opening of the circumferential horn-like structure faces the device housing 1 and outwards for introducing electrons and ions.
The included angle between the symmetrical central line of the upper deflection plate 2 and the lower deflection plate 3 and the upper edge line of the electronic processor 17 is 45 degrees, and the measurement of the 2 pi field of view of ions and electrons can be realized.
The track guiding device is used for introducing ions and electrons incident from the space and introducing the ions and the electrons into the double-channel hemispherical electrostatic analyzer, and the detection sensitivity of the instrument is changed by applying voltage to the double-channel hemispherical electrostatic analyzer, so that the detection dynamic range of the instrument is expanded;
wherein the trajectory guide comprises: an upper electrode 4, a middle electrode 5, and a lower electrode 6;
the upper electrode 4 and the lower electrode 6 are respectively positioned at the upper position and the lower position of the middle electrode 5; the three parts form a cylindrical space with openings at the upper end and the lower end; the upper electrode 4 is arranged at the bottom opening of the upper deflection plate 2; the lower electrode 6 is arranged above the double-channel hemispherical electrostatic analyzer, and a first opening 18 and a second opening 19 are formed at the upper end and the lower end of the cylindrical space; the upper electrode 4 can be applied with high voltage, the middle electrode 5 and the lower electrode 6 are grounded to form a specific electric field to introduce ions and electrons emitted by the electrostatic deflection device into a dual-channel electrostatic analyzer connected with the rear end of the electrostatic deflection device, and the number of the passing ions and electrons can be controlled by adjusting the high voltage value of the upper electrode 4 to change the detection sensitivity of the analyzer. The instrument has the highest sensitivity with no voltage applied to the electrodes 4 for low flux ion and electron measurements. The electrode 4 will reduce the sensitivity of the instrument after being applied with voltage, and is used for measuring ions and electrons with higher flux, thereby preventing the instrument from being saturated.
Wherein, the outlets of the circumferential incident channels formed by the upper deflection plate 2 and the lower deflection plate 3 positioned at the two sides of the track guiding device are respectively communicated with the first opening 18; the second opening 19 communicates with the two-channel electrostatic analyzer inlet;
the double-channel hemispherical electrostatic analyzer is used for carrying out energy analysis on ions and electrons entering the electrostatic analyzer through the applied voltage, screening and outputting the ions and the electrons with energy corresponding to the numerical value of the voltage, and respectively emitting the ions and the electrons from different channels;
wherein the dual-channel hemispherical electrostatic analyzer comprises: an outer hemispherical electrode 7, a middle hemispherical electrode 8 and an inner hemispherical electrode 9;
the middle hemispherical electrode 8 is positioned between the outer hemispherical electrode 7 and the inner hemispherical electrode 9; an outer channel and an inner channel for deflecting ions and electrons are formed between the middle hemispherical electrode 8 and the outer hemispherical electrode 7 and between the middle hemispherical electrode 9 and the inner hemispherical electrode respectively; by applying a step scanning voltage to the middle hemispherical electrode 8, the outer hemispherical electrode 7 and the inner hemispherical electrode 9 are grounded, periodically changing electric fields are respectively formed between the middle hemispherical electrode 8 and the outer hemispherical electrode 7, and between the middle hemispherical electrode 8 and the inner hemispherical electrode 9, ions and electrons with energy corresponding to the value of the step scanning voltage are screened and output, and the screened and output ions and electrons are respectively emitted along the corresponding outer channel and inner channel.
Wherein, the outer hemispherical electrode 7, the middle hemispherical electrode 8 and the inner hemispherical electrode 9 are all hemispherical electrodes. The outer channel and the inner channel are both circumferential bowl-shaped structures with downward openings, and the tops of the bowl-shaped structures are provided with openings; the third opening 20 and the fourth opening 21 are provided at the top of the outside passage and the inside passage and communicate.
In this case, a voltage of a certain magnitude allows only ions and electrons of a certain energy to pass through the respective channels, thereby performing energy analysis on the incident ions and electrons, respectively. Ions and electrons can pass through different channels depending on the polarity of the step scanning voltage applied to the middle hemispherical electrode 8.
The separation electrode device is used for fully separating ions and electrons screened and output in the emission of the double-channel hemispherical electrostatic analyzer by utilizing the inner electrode and the outer electrode with different polarities so as to avoid signal mutual interference;
wherein the separation electrode device comprises: an outer ring electrode 10 and an inner ring electrode 11; the outer ring electrode 10 and the inner ring electrode 11 are both in annular structures;
the polarity of the voltage applied by the outer ring electrode 10 is the same as that of the voltage applied by the middle hemispherical electrode 8; the polarity of the voltage applied by the inner ring electrode 11 is opposite to that of the voltage applied by the middle hemispherical electrode 8; wherein, outer ring electrode 10 and inner ring electrode 11 are about 15mm with the export distance of binary channels hemisphere electrostatic analyser respectively, can ensure that electrostatic analyser emergent ion and electron carry out abundant separation, avoid the mutual interference of signal.
The signal preamplification device is used for correspondingly amplifying the charge signals of the separated ions and electrons by utilizing the microchannel plate and outputting corresponding charge pulse signals;
wherein the signal pre-amplifying device comprises: an outer ring microchannel plate 12, an inner ring microchannel plate 13, an outer ring anode 14 and an inner ring anode 15;
the outer ring micro-channel plate 12 is provided with an outer ring electrode 10 for amplifying a charge signal of ions output by an outer channel of the electrostatic analyzer, outputting a corresponding charge pulse signal, and receiving the charge pulse signal by an outer ring anode 14 which is positioned below the outer ring micro-channel plate 12 and is spaced at a distance;
the inner ring micro-channel plate 13 is provided with an inner ring electrode 11 for amplifying the charge signal of the electrons output by the inner channel of the electrostatic analyzer, outputting a corresponding charge pulse signal, and receiving the charge pulse signal by an inner ring anode 15 which is positioned below the inner ring micro-channel plate 13 and is separated by a distance;
the outer ring anode 14 and the inner ring anode 15 are used for collecting corresponding charge pulse signals and inputting the charge pulse signals to an electronic processor 17 through a cable 16 respectively.
The electronic processor is used for respectively processing the corresponding charge pulse signals output by the signal pre-amplification device and respectively obtaining the direction, energy and flux information of ions and electrons;
as shown in fig. 3, the electronic processor 17 includes: the system comprises a signal pre-amplification circuit, a high-voltage circuit, a low-voltage circuit, a power supply system, an interface circuit and an FPGA processor;
the signal pre-amplification circuit is used for amplifying corresponding charge pulse signals output by the outer ring anode 14 and the inner ring anode 15 through a connected cable 16 to obtain an amplified ionic electric signal and an amplified electronic electric signal;
the FPGA processor is used for calculating the pulse count in unit time by combining the voltage data applied by the electrostatic analyzer and the voltage data applied by the electrostatic deflection device according to the obtained amplified ion electric signal and electronic electric signal to obtain the energy, direction and flux information of ions and electrons;
the direction information of the ions comprises azimuth angles and pitch angles of the ions; the direction information of the electrons includes an azimuth angle and a pitch angle of the electrons. Because the anode is of an annular structure, the azimuth angle of ions and the azimuth angle of electrons are obtained by the circumferential position of an electric signal on the anode, and the pitch angle of the ions and the pitch angle of the electrons are obtained by calculating the voltage value applied to the upper deflection plate 2 of the electrostatic deflection device; the flux information of the ions and the electrons can be obtained by counting the electric signals collected on the anode in unit time. The above calculation processes are all obtained by using the prior art known in the art.
The high-voltage circuit is used for providing required multi-path high voltage; wherein the multi-path high voltage further comprises: positive high voltage and negative high voltage;
the low-voltage circuit is used for cooperating with the FPGA to control the operation of the whole electronic processor 17, comprises the communication with the outside through an FPGA control interface circuit and can be used for communicating with a satellite bus; the high-voltage circuit outputs the required high voltage through the FPGA and the DA converter.
And the power supply system is used for supplying power to the whole device.
The device housing 1 is used for providing a mounting platform.
The upper deflection plate 2, the lower deflection plate 3, the upper electrode 4, the middle hemispherical electrode 8, the outer ring electrode 10, the inner ring electrode 11, the outer ring microchannel plate 12, the inner ring microchannel plate 13, the outer ring anode 14 and the inner ring anode 15 can be insulated by polyimide materials.
The upper deflection plate 2, the lower deflection plate 3, the upper electrode 4, the middle hemispherical electrode 8, the outer ring electrode 10, the inner ring electrode 11, the outer ring microchannel plate 12, the inner ring microchannel plate 13, the outer ring anode 14 and the inner ring anode 15 are fixed with the device shell 1 through polyimide materials.
The middle electrode 5, the lower electrode 6, the outer hemisphere electrode 7 and the inner hemisphere electrode 9 can be directly fixed with the device shell 1.
The outer ring electrode 10, the inner ring electrode 11, the outer ring anode 14 and the inner ring anode 15 are made of beryllium copper materials.
Based on the measuring apparatus of the above-described structure, all the components shown in fig. 1 except the outer ring electrode 10, the inner ring electrode 11, the outer ring microchannel plate 12, the inner ring microchannel plate 13, the outer ring anode 14, the inner ring anode 15, the cable 16, and the electronics processor 17 are made of an aluminum material.
As shown in fig. 2, the dual-channel electrostatic analyzer for simultaneous measurement of ions and electrons in space of the present invention is embedded on the surface of a satellite, and the part above the dual-channel hemispherical electrostatic analyzer (including the dual-channel hemispherical electrostatic analyzer) is extended out of the surface of the satellite, so that the detection window is as far away from the surface of the satellite as possible, thereby reducing the interference of the charged state of the surface of the satellite on the measurement, and meanwhile, the electronic processor 17 is placed in the satellite compartment, thereby facilitating the temperature control of the working environment of the electronic processor.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and are not limited. Although the present invention has been described in detail with reference to the embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (9)

1. A dual channel electrostatic analyzer for synchronized measurement of ions and electrons, comprising: the electrostatic deflection device, the track guide device, the double-channel hemispherical electrostatic analyzer, the separation electrode device, the signal pre-amplification device, the electronic processor (17) and the device shell (1);
the device shell (1) is arranged on an electronics processor (17), and is internally provided with an electrostatic deflection device, a track guide device, a double-channel hemispherical electrostatic analyzer, a separation electrode device and a signal preamplification device; the lower part of the static deflection device is arranged on the track guide device and is connected with the track guide device; the double-channel hemispherical electrostatic analyzer is arranged below the track guide device and is connected with the track guide device; and a separation electrode device and a signal pre-amplification device are sequentially arranged below the double-channel hemispherical electrostatic analyzer and are connected with an electronic processor through cables.
2. The dual channel electrostatic analyzer for simultaneous measurement of ions and electrons of claim 1, wherein said electrostatic deflection means comprises: an upper deflector (2) and a lower deflector (3); the upper deflection plate (2) is of a bowl-shaped structure, the bowl opening of the upper deflection plate is upward, and the bottom of the upper deflection plate is provided with an opening; the lower deflection plate (3) is of a vase bottleneck-shaped structure, and the bottleneck of the lower deflection plate is upward; the upper deflection plate (2) and the lower deflection plate (3) are two arc plates with 45-degree cross sections and are symmetrically arranged, and an incident channel is formed;
wherein the upper deflection plate (2) and the lower deflection plate (3) scan ions and electrons in any direction within 90 degrees through applied voltage and are incident along the incident channel simultaneously.
3. The dual-channel electrostatic analyzer for the simultaneous measurement of ions and electrons according to claim 2, characterized in that the incident channel formed by the upper deflection plate (2) and the lower deflection plate (3) presents a circumferential flared structure with its opening facing the device housing (1); the included angle between the symmetrical central line of the upper deflection plate (2) and the lower deflection plate (3) and the upper side line of the electronic processor (17) is 45 degrees.
4. The dual channel electrostatic analyzer of claim 1, wherein the trajectory guide comprises: an upper electrode (4), a middle electrode (5) and a lower electrode (6);
the upper electrode (4) and the lower electrode (6) are respectively positioned at the upper position and the lower position of the middle electrode (5); the three parts form a cylindrical space with openings at the upper end and the lower end; the upper electrode (4) is arranged at the opening at the bottom of the upper deflection plate (2); the lower electrode (6) is arranged above the double-channel hemispherical electrostatic analyzer, and a first opening (18) and a second opening (19) are formed in the upper part and the lower part of the cylindrical space; the upper electrode (4) can be applied with high voltage, the middle electrode (5) and the lower electrode (6) are grounded, and a specific electric field is formed to introduce ions and electrons emitted by the electrostatic deflection device into a double-channel electrostatic analyzer connected at the rear end of the double-channel electrostatic analyzer.
5. The dual-channel electrostatic analyzer for simultaneous measurement of ions and electrons according to claim 1, wherein the dual-channel hemispherical electrostatic analyzer is configured to perform energy analysis on the ions and electrons entering the electrostatic analyzer by the applied voltage, and to screen out the ions and electrons that output energy corresponding to the value of the voltage and to exit from different channels respectively;
wherein the dual-channel hemispherical electrostatic analyzer comprises: an outer hemispherical electrode (7), a middle hemispherical electrode (8) and an inner hemispherical electrode (9);
the middle hemispherical electrode (8) is positioned between the outer hemispherical electrode (7) and the inner hemispherical electrode (9); the middle hemispherical electrode (8) forms an outer channel and an inner channel for ions and electrons to deflect between the outer hemispherical electrode (7) and the inner hemispherical electrode (9) respectively; by applying step scanning voltage on the middle hemispherical electrode (8), the outer hemispherical electrode (7) and the inner hemispherical electrode (9) are grounded, periodically-changing electric fields are respectively formed between the middle hemispherical electrode (8) and the outer hemispherical electrode (7) and between the middle hemispherical electrode (8) and the inner hemispherical electrode (9), ions and electrons with energy corresponding to the value of the step scanning voltage are screened and output, and the screened and output ions and electrons are respectively emitted along the corresponding outer channel and inner channel.
6. The dual channel electrostatic analyzer for simultaneous measurement of ions and electrons according to claim 5, characterized in that the outer hemispherical electrode (7), the middle hemispherical electrode (8) and the inner hemispherical electrode (9) are all hemispherical electrodes; the outer side channel and the inner side channel are both circumferential bowl-shaped structures with downward openings, and the tops of the bowl-shaped structures are provided with openings.
7. The dual channel electrostatic analyzer for simultaneous measurement of ions and electrons of claim 1, wherein said split electrode arrangement comprises: an outer ring electrode (10) and an inner ring electrode (11); the outer ring electrode (10) and the inner ring electrode (11) are both in annular structures;
the polarity of the voltage applied by the outer ring electrode (10) is the same as that of the voltage applied by the middle hemisphere electrode (8); the polarity of the voltage applied by the inner ring electrode (11) is opposite to that of the voltage applied by the middle hemisphere electrode (8).
8. The dual channel electrostatic analyzer for simultaneous measurement of ions and electrons of claim 1, wherein said signal pre-amplifying means comprises: the device comprises an outer ring microchannel plate (12), an inner ring microchannel plate (13), an outer ring anode (14) and an inner ring anode (15);
the outer ring micro-channel plate (12) is provided with an outer ring electrode (10) which is used for amplifying a charge signal of ions output by an outer channel of the electrostatic analyzer, outputting a corresponding charge pulse signal and being received by an outer ring anode (14) which is positioned below the outer ring micro-channel plate (12) and is separated by a distance;
the inner ring micro-channel plate (13) is provided with an inner ring electrode (11) which is used for outputting an inner channel of the electrostatic analyzer, amplifying a charge signal of an electron, outputting a corresponding charge pulse signal, and receiving the charge pulse signal by an inner ring anode (15) which is positioned below the inner ring micro-channel plate (13) and is separated by a distance;
the outer ring anode (14) and the inner ring anode (15) are used for collecting corresponding charge pulse signals and inputting the charge pulse signals to an electronic processor (17) through cables (16).
9. The dual channel electrostatic analyzer for the simultaneous measurement of ions and electrons according to claim 1, characterized in that said electronics processor (17) comprises: the system comprises a signal pre-amplification circuit, a high-voltage circuit, a low-voltage circuit, a power supply system, an interface circuit and an FPGA processor;
the signal pre-amplification circuit is used for amplifying corresponding charge pulse signals output by the outer ring anode (14) and the inner ring anode (15) through a connected cable (16) to obtain an amplified ion electric signal and an amplified electronic electric signal;
the FPGA processor is used for calculating the pulse count in unit time by combining the voltage data applied by the electrostatic analyzer and the voltage data applied by the electrostatic deflection device according to the obtained amplified ion electric signal and electronic electric signal to obtain the energy, direction and flux information of ions and electrons;
the high-voltage circuit is used for providing required multi-path high voltage; wherein the multi-path high voltage further comprises: positive high voltage and negative high voltage;
the low-voltage circuit is used for cooperating with the FPGA to control the operation of the whole electronic processor (17), comprises the communication with the outside through an FPGA control interface circuit and can be used for communicating with a satellite bus; the high-voltage circuit outputs the required high voltage through the FPGA and the DA converter;
the power supply system is used for supplying power.
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