WO2014110699A1 - Codirectional dual-channel time-of-flight mass spectrometer - Google Patents

Codirectional dual-channel time-of-flight mass spectrometer Download PDF

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WO2014110699A1
WO2014110699A1 PCT/CN2013/000639 CN2013000639W WO2014110699A1 WO 2014110699 A1 WO2014110699 A1 WO 2014110699A1 CN 2013000639 W CN2013000639 W CN 2013000639W WO 2014110699 A1 WO2014110699 A1 WO 2014110699A1
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ion
channel
dual
time
mass spectrometer
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PCT/CN2013/000639
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French (fr)
Chinese (zh)
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秦正波
唐紫超
张世宇
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中国科学院大连化学物理研究所
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Priority to RU2014146381A priority Critical patent/RU2646860C2/en
Publication of WO2014110699A1 publication Critical patent/WO2014110699A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/004Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H01J49/009Spectrometers having multiple channels, parallel analysis
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers

Definitions

  • the invention relates to the field of cascade time-of-flight mass spectrometry, and in particular to a co-directional dual-channel time-of-flight mass spectrometer.
  • the time-of-flight mass spectrometer is an instrument for recording molecular mass-to-mass ratio. According to the information provided by the mass spectrometer, qualitative and quantitative analysis of various organic and inorganic substances, structural analysis of complex compounds, determination of various isotope ratios in samples, and solid surface can be performed. Structure and composition analysis, etc.
  • Photoelectron spectroscopy (or photoelectron imaging) is a UV laser that irradiates molecules or ions, and the photoelectron velocity is recorded to reflect the electrons, vibrations, or rotational energy levels and structure types of the molecular orbitals. Time-of-flight mass spectrometry Since 1955, W. C. Wiley and I. H. McLaren (Rev. Sci. Instrum.
  • Time-of-flight mass spectrometry and photoelectron spectroscopy can study the structure and properties of complex compounds, and is of great significance for the study of molecular electronic energy levels and even vibration and rotational energy levels.
  • Time-of-flight mass spectrometry - Photoelectron spectroscopy (or photoelectron imaging) Composite spectroscopy plays a key role in the research of organic molecules, free radicals, and clusters.
  • the electrode plate of the accelerator uses a single-hole metal grid to transport ions.
  • the ion signal detector is located at a certain distance from the accelerator, which we call " Focus point.”
  • Focus point The flight time of different ions can be separated.
  • the arriving ion signals are ion signals of the same mass. But it has a fatal weakness: when coupling photoelectron spectroscopy (or photoelectron imaging) theoretically needs to be placed at that "focus point", it will actually conflict with the ion signal detector.
  • the invention provides a co-directional two-channel time-of-flight mass spectrometer, which is compact and compact, and includes a parallel two-channel accelerator (1), a small vacuum chamber (2), a laser sputtering ion source (3), an ion signal.
  • the small vacuum chamber (2) is divided into two parts, and a laser sputter ion source (3) is installed 5 cm directly above the sub-collimator (6), and is installed vertically 10 cm directly below the collimator.
  • a set of parallel two-channel accelerators (1) wherein the laser sputter ion source (3) exit, the ion collimator (6) hole center, and the dual channel accelerator (1) are at the same centerline axis.
  • Two ion signal detectors (4) and (5) are placed at 43.5 cm to the right of this central axis, respectively, for detecting the ion time-of-flight mass spectra of the upper and lower channels.
  • the laser sputtering ion source (3) irradiates the laser plasma generated by the metal target surface with the laser, and then the ion complex generated by the action of the ultrasonic molecular beam is ejected through the nozzle.
  • the ion beam passes through the ion collimator (6) and flies for a period of time into the center of the two-channel accelerator (1).
  • the ion beam Since the ion beam has a certain length in the flight path, the ion beam is taken up by the upper and lower channels of the accelerator (the diameter of the hole is 1.6 cm, The spacing of 4.5 cm) is divided into two segments, and is accelerated laterally, deflected, and focused to the ion signal detectors (4) and (5) for detection. Finally, the ion time-of-flight mass spectra of the upper and lower channels are recorded.
  • the invention provides a co-directional two-channel time-of-flight mass spectrometer, the laser sputtering ion source
  • a pulsed laser ultrasonic molecular beam negative ion source is used.
  • the electrode plate of the two-channel accelerator (1) adopts a double hole and a grid, two upper and lower parallel deflection plates, and two upper and lower parallel ion lenses.
  • the same-direction dual-channel time-of-flight mass spectrometer adopts the same pulse accelerating voltage when the parallel two-channel accelerator (1) is used in both upper and lower sections, and the ion signal detectors (4) and (5) detect the same pole. Sex ion signal.
  • the upper and lower holes adopt positive and negative pulse acceleration voltages respectively, and the ion signal detectors (4) and (5) detect ion signals of opposite polarity.
  • the invention provides a co-directional two-channel time-of-flight mass spectrometer, which is small in size and simple in structure.
  • the present invention provides a co-directional two-channel time-of-flight mass spectrometer that can be used to couple other spectroscopy instruments for multi-task parallel operation.
  • the mass spectrometer is coupled with the photoelectron spectrum;
  • the ion signal detector (4) coupled above is replaced by an electron spectrometer or a photoelectron imager (7) (as shown in Figure 3), and a single mass can be performed.
  • the electron energy spectrum of the ion is measured, and the ion signal detector (5) below can simultaneously detect the ion signal.
  • This coupling method allows us to perform the ion spectrum detection while collecting the energy spectrum of a certain mass of ions.
  • the same-direction dual-channel time-of-flight mass spectrometer provided by the invention, when the electron energy spectrum of an ion is measured by the upper channel electron energy spectrometer (7), the laser light-emitting time is equal to that of the lower channel detector (4). Ion time-of-flight mass spectrometry plus a time constant (which is the circuit delay inside the irradiated laser, typically a few hundred nanoseconds).
  • the photoelectron spectrometer is at the "focus point” of the upper channel time-of-flight mass spectrometer, and the "probe area” is also the "focus point”.
  • the ionic strength is at least one order of magnitude higher than that of the conventional time-of-flight mass spectrometry "detection zone", which improves the signal collection efficiency and improves the signal-to-noise of the electronic signal. Ratio and resolution of electron energy.
  • Figure 1 shows the structure of a single-hole accelerator used in traditional time-of-flight mass spectrometry.
  • (b) A schematic diagram of the structure of a two-hole accelerator used in the same-direction two-channel time-of-flight mass spectrometer of the present invention
  • FIG. 2 is a general structural view of a co-directional two-channel time-of-flight mass spectrometer of the present invention
  • FIG. 3 is a general structural view of a coupled photoelectron spectrometer (or photoelectron imager) of the same-direction dual-channel time-of-flight mass spectrometer;
  • Figure 4 is a mass spectrum of the reaction of gold and iodine anion collected in the lower channel time-of-flight mass spectrometer with water;
  • Figure 5 is a time-of-flight mass spectrum based on the reaction of gold and iodine anion with water. The photoelectron spectrum of each mass spectrum peak is obtained on the upper channel.
  • the accelerator electrode plate is processed by double holes and attached to the metal grid as shown in (1 b).
  • the accelerator (1) adopts the electrode plate structure in the figure (1 b), and two sets of deflection plates are used, and two sets of ion lenses are used.
  • the ion signal detectors (4) and (5) are placed at the upper and lower "focus points", respectively, for mass spectrometry analysis.
  • the ion signal detectors (4) and (5) detect the same polarity ion signals; when the parallel two-channel accelerator (1)
  • the upper and lower holes adopt positive and negative pulse acceleration voltages respectively, and the ion signal detectors (4) and (5) detect ion signals of opposite polarity.
  • electron energy spectrum measurement of ions can be performed when the ion signal detector (4) is replaced by a photoelectron spectrometer (or photoelectron imager) (7) as shown in (3).
  • the whole workflow is: the negative ion beam generated by the ion source is divided into upper and lower parts by the two-channel time-of-flight mass analyzer through the collimator, and is respectively accelerated laterally, deflected, and focused to reach the upper and lower "focus points", and the lower channel is placed.
  • (5a) is a photoelectron spectroscopy of ⁇ ( ⁇ 2 0) collected by a conventional photoelectron imaging apparatus (Chin. J. Chem. Phys. 23, 373 (2010)), Fig. (5b) and Fig. (5c)
  • the photoelectron spectroscopy of A (H 2 0) and ⁇ is collected by the instrument of the present invention, and the electronic energy level information and the vibration peak characteristic of each mass spectrum peak are reflected.
  • the present invention increases the signal intensity by about 5 times, and the noise-to-noise ratio is improved ( ⁇ (3 ⁇ 40), and the small vibration peak to the right of the AuO' main peak can be clearly detected).
  • the invention can be applied to the field of mass spectrometry, and the ion beam generated by the ion source is divided into upper and lower parts by a two-channel time-of-flight mass analyzer, and is respectively accelerated laterally. Deflection, focus to the upper and lower detectors, record the ion flight time.
  • the whole set of instruments is compact and compact, the structure is simple, the operation is convenient, the obtained electron energy spectrum of the ion spectrum is ⁇ , and the resolution is ⁇ .

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  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

A codirectional dual-channel time-of-flight mass spectrometer. The mass spectrometer comprises parallel dual-channel accelerators (1), a miniature vacuum cavity (2), a laser sputtering ion source (3), two ion signal detectors (4, 5), and an ion collimator (6). Ion beams generated by the laser sputtering ion source (3) pass through the ion collimator (6) and are divided by the dual-channel accelerators (1) into an upper part and a lower part, and the two parts are respectively transversely accelerated, deflected, and focused to the two upper and lower ion signal detectors (4, 5); therefore, an ion time-of-flight mass spectrum of two upper and lower channels is obtained. One ion signal detector (4) can be replaced by an electron energy analyzer, to carry out a photoelectron energy spectrum experiment for selecting a certain ion at the same time. The whole instrument is compact, small and exquisite, simple in structure, and convenient to operate. The electron energy spectrum of the acquired ion has a high signal to noise ratio and a high resolution.

Description

说 明 书 一种同向双通道飞行时间质谱仪  Description A co-directional two-channel time-of-flight mass spectrometer
技术领域 Technical field
本发明涉及串级飞行时间质谱技术领域,具体涉及一种同向双通 道飞行时间质谱仪。  The invention relates to the field of cascade time-of-flight mass spectrometry, and in particular to a co-directional dual-channel time-of-flight mass spectrometer.
背景技术 Background technique
飞行时间质谱仪是记录分子荷质比的仪器,根据质谱图提供的信 息可以进行多种有机物及无机物的定性和定量分析、复杂化合物的结 构分析、 样品中各种同位素比的测定及固体表面的结构和组成分析 等。光电子能谱(或光电子成像技术)是一束紫外激光去辐照分子或 离子,产生的光电子速度被记录下来, 反映分子轨道的电子, 振动或 者转动能级、 结构类型等信息。 飞行时间质谱自 1955年 W. C. Wiley and I. H. McLaren (Rev. Sci. Instrum. 26, 1150 (1955))采用双场加速 技术以来发展快速,在许多领域有重要应用。飞行时间质谱与光电子 能谱(或者光电子成像)结合可以研究复杂化合物的结构和性质, 对 于分子电子能级水平甚至振动, 转动能级水平研究有着重要的意义。 飞行时间质谱 -光电子能谱(或者光电子成像) 复合谱技术在研宄有 机分子, 自由基, 团簇领域里起着关键作用。  The time-of-flight mass spectrometer is an instrument for recording molecular mass-to-mass ratio. According to the information provided by the mass spectrometer, qualitative and quantitative analysis of various organic and inorganic substances, structural analysis of complex compounds, determination of various isotope ratios in samples, and solid surface can be performed. Structure and composition analysis, etc. Photoelectron spectroscopy (or photoelectron imaging) is a UV laser that irradiates molecules or ions, and the photoelectron velocity is recorded to reflect the electrons, vibrations, or rotational energy levels and structure types of the molecular orbitals. Time-of-flight mass spectrometry Since 1955, W. C. Wiley and I. H. McLaren (Rev. Sci. Instrum. 26, 1150 (1955)) have developed rapidly using dual-field acceleration techniques and have important applications in many fields. The combination of time-of-flight mass spectrometry and photoelectron spectroscopy (or photoelectron imaging) can study the structure and properties of complex compounds, and is of great significance for the study of molecular electronic energy levels and even vibration and rotational energy levels. Time-of-flight mass spectrometry - Photoelectron spectroscopy (or photoelectron imaging) Composite spectroscopy plays a key role in the research of organic molecules, free radicals, and clusters.
这种传统的飞行时间质谱 -光电子能谱 (或者光电子成像) 技术 中,加速器的电极板采用单孔贴金属栅网来传输离子,离子信号探测 器坐落于加速器的一定距离处, 我们称为 "聚焦点 (Space focus spot)"。 这样不同离子的飞行时间就能分开。 我们通过探测同一时间 到达的离子信号为同一质量的离子信号。但是它有一个致命的弱点就 是, 耦合光电子能谱(或者光电子成像)时在理论上需要把它放置在 那个"聚焦点 "处, 那么实际上就会与, 离子信号探测器冲突。通常 世界上许多研究组(Rev. Sci. Instrum. 77, 123901 (2006); Rev. Sci. Instrum. 70, 1957 (1999); J. Phys. Chem. A 2003, 107, 8215-8224; Chin. J. Chem . Phys. 23, 373 (2010); Chin. J. Chem , Phys. 22, 655 (2009).)的做法是把光电子能谱(或者光电子成像)放置在离 "聚焦 点"一定距离的地方(一般 5-20厘米), 称之为 "探测区"。 根据双 场加速原理, 在这个探测区, 离子的时间分布和空间分布相对于 "聚 焦点"很散。 这样导致以下几方面的弱点: 在脉冲工作方式研宄中, 特别是利用纳秒激光去辐照 "探测区"的离子进行研宄时, 需要很好 的时间聚焦和空间聚焦特性。 然而在 "探测区", 由于时间上相对于 "聚焦点"加宽了 2倍以上, 空间离子分布体积增大了至少 8倍, 那 么 "探测区"的单位体积离子相比于 "聚焦点", 其强度要弱至少一 个量级, 从而降低了采集效率, 电子信号的信噪比, 和电子能量的分 辨率。 In this conventional time-of-flight mass spectrometry-photoelectron spectroscopy (or photoelectron imaging) technique, the electrode plate of the accelerator uses a single-hole metal grid to transport ions. The ion signal detector is located at a certain distance from the accelerator, which we call " Focus point." The flight time of different ions can be separated. We detect the same time The arriving ion signals are ion signals of the same mass. But it has a fatal weakness: when coupling photoelectron spectroscopy (or photoelectron imaging) theoretically needs to be placed at that "focus point", it will actually conflict with the ion signal detector. Often many research groups in the world (Rev. Sci. Instrum. 77, 123901 (2006); Rev. Sci. Instrum. 70, 1957 (1999); J. Phys. Chem. A 2003, 107, 8215-8224; Chin. J. Chem. Phys. 23, 373 (2010); Chin. J. Chem, Phys. 22, 655 (2009).) is the practice of placing photoelectron spectroscopy (or photoelectron imaging) at a distance from the "focus point" The place (usually 5-20 cm) is called the "probe area". According to the two-field acceleration principle, in this detection zone, the time distribution and spatial distribution of ions are scattered relative to the "focus point". This leads to the following weaknesses: In the pulse working mode, especially when using nanosecond laser to irradiate the ions of the "detection zone", good time focusing and spatial focusing characteristics are needed. However, in the "probe area", since the time is more than twice as wide as the "focus point" and the spatial ion distribution volume is increased by at least 8 times, the unit volume ion of the "probe area" is compared to the "focus point". Its intensity is weak by at least an order of magnitude, thereby reducing acquisition efficiency, signal-to-noise ratio of electronic signals, and resolution of electron energy.
发明内容 Summary of the invention
为了克服现有技术存在的缺陷,本发明的目的是提供一种同向双 通道飞行时间质谱仪。  In order to overcome the deficiencies of the prior art, it is an object of the present invention to provide a co-directional two-channel time-of-flight mass spectrometer.
本发明提供了一种同向双通道飞行时间质谱仪,该质谱仪紧凑小 巧, 包括并行的双通道加速器(1 )、 小型真空腔体(2)、激光溅射离 子源(3)、 离子信号探测器(4)、 (5)和离子准直器(6); 离子准直 13 000639 The invention provides a co-directional two-channel time-of-flight mass spectrometer, which is compact and compact, and includes a parallel two-channel accelerator (1), a small vacuum chamber (2), a laser sputtering ion source (3), an ion signal. Detector (4), (5) and ion collimator (6); ion collimation 13 000639
3  3
器(6)将小型真空腔体(2) 分割成两部分, 距离子准直器 (6) 正 上方 5cm处安装激光溅射离子源(3), 距准直器正下方 10 cm处垂 直安装一组并行的双通道加速器(1 ), 其中激光溅射离子源 (3 ) 出 口、 离子准直器(6)孔中心和双通道加速器(1 )两加速片中点处于 同一中线轴线上。 距这一中心轴线右方 43.5cm处分别放置上下两个 离子信号探测器(4)、 (5), 分别用于探测上下两通道的离子飞行时 间质谱。 (6) The small vacuum chamber (2) is divided into two parts, and a laser sputter ion source (3) is installed 5 cm directly above the sub-collimator (6), and is installed vertically 10 cm directly below the collimator. A set of parallel two-channel accelerators (1), wherein the laser sputter ion source (3) exit, the ion collimator (6) hole center, and the dual channel accelerator (1) are at the same centerline axis. Two ion signal detectors (4) and (5) are placed at 43.5 cm to the right of this central axis, respectively, for detecting the ion time-of-flight mass spectra of the upper and lower channels.
本发明提供的同向双通道飞行时间质谱仪,激光溅射离子源(3 ) 由激光照射金属靶面产生的激光等离子体,再与超声分子束作用产生 的离子复合物经喷口喷出, 该离子束经过离子准直器(6) 后飞行一 段时间进入双通道加速器(1 ) 中心, 由于离子束在飞行路径上具有 一定的长度, 离子束被加速器的上下两个孔道(孔道直径 1.6 cm, 间 距 4.5 cm) 分割成两段, 并且分别被横向加速, 偏转, 聚焦至离子 信号探测器(4)和(5 )探测, 最后记录的是上下两通道的离子飞行 时间质谱。  The same-direction dual-channel time-of-flight mass spectrometer provided by the invention, the laser sputtering ion source (3) irradiates the laser plasma generated by the metal target surface with the laser, and then the ion complex generated by the action of the ultrasonic molecular beam is ejected through the nozzle. The ion beam passes through the ion collimator (6) and flies for a period of time into the center of the two-channel accelerator (1). Since the ion beam has a certain length in the flight path, the ion beam is taken up by the upper and lower channels of the accelerator (the diameter of the hole is 1.6 cm, The spacing of 4.5 cm) is divided into two segments, and is accelerated laterally, deflected, and focused to the ion signal detectors (4) and (5) for detection. Finally, the ion time-of-flight mass spectra of the upper and lower channels are recorded.
本发明提供的同向双通道飞行时间质谱仪,所述激光溅射离子源  The invention provides a co-directional two-channel time-of-flight mass spectrometer, the laser sputtering ion source
(3 )采用脉冲激光超声分子束负离子源。所述双通道加速器(1 )的 电极板采用双孔并贴栅网,上下两组并行的偏转板,上下两组并行的 离子透镜。  (3) A pulsed laser ultrasonic molecular beam negative ion source is used. The electrode plate of the two-channel accelerator (1) adopts a double hole and a grid, two upper and lower parallel deflection plates, and two upper and lower parallel ion lenses.
本发明提供的同向双通道飞行时间质谱仪,当并行的双通道加速 器(1 )上下两段都采用同一脉冲加速电压, 离子信号探测器(4)和 (5 )探测得到的都是同一极性离子信号。当并行的双通道加速器(1 ) 上下两孔分别采用正负脉冲加速电压, 离子信号探测器(4)和 (5) 探测得到的是相反极性的离子信号。 The same-direction dual-channel time-of-flight mass spectrometer provided by the invention adopts the same pulse accelerating voltage when the parallel two-channel accelerator (1) is used in both upper and lower sections, and the ion signal detectors (4) and (5) detect the same pole. Sex ion signal. When parallel dual channel accelerators (1) The upper and lower holes adopt positive and negative pulse acceleration voltages respectively, and the ion signal detectors (4) and (5) detect ion signals of opposite polarity.
本发明提供的同向双通道飞行时间质谱仪, 该质谱仪设备小巧, 结构简单。  The invention provides a co-directional two-channel time-of-flight mass spectrometer, which is small in size and simple in structure.
本发明提供的同向双通道飞行时间质谱仪,该质谱仪能被用来耦 合其它光谱学仪器来进行多任务并行操作。例如:所述质谱仪和光电 子能谱耦合; 耦合方式为上方的离子信号探测器(4)被电子能谱仪 或者光电子成像仪(7) (如图 3所示)代替, 可以迸行单一质量离子 的电子能谱测量, 而下方的离子信号探测器(5)可以同时进行离子 信号的探测,这种耦合方式使得我们进行离子信号探测的同时进行某 一质量离子的能谱采集。  The present invention provides a co-directional two-channel time-of-flight mass spectrometer that can be used to couple other spectroscopy instruments for multi-task parallel operation. For example, the mass spectrometer is coupled with the photoelectron spectrum; the ion signal detector (4) coupled above is replaced by an electron spectrometer or a photoelectron imager (7) (as shown in Figure 3), and a single mass can be performed. The electron energy spectrum of the ion is measured, and the ion signal detector (5) below can simultaneously detect the ion signal. This coupling method allows us to perform the ion spectrum detection while collecting the energy spectrum of a certain mass of ions.
本发明提供的同向双通道飞行时间质谱仪,由上通道电子能谱仪 (7)进行某一离子的电子能谱测量时, 其激光出光时间等于下通道 探测器(4)测得某一离子飞行时间质谱加上一个时间常数(为辐照 激光内部的电路延时, 一般为几百纳秒)。  The same-direction dual-channel time-of-flight mass spectrometer provided by the invention, when the electron energy spectrum of an ion is measured by the upper channel electron energy spectrometer (7), the laser light-emitting time is equal to that of the lower channel detector (4). Ion time-of-flight mass spectrometry plus a time constant (which is the circuit delay inside the irradiated laser, typically a few hundred nanoseconds).
本发明中,光电子能谱仪在上通道飞行时间质谱的"聚焦点 "处, "探测区"也是 "聚焦点"。 当对 "聚焦点"的离子进行脉冲激光辐 照时, 其离子强度要比传统的飞行时间质谱 "探测区"要髙至少一个 量级,提高了信号的采集效率,提高了电子信号的信噪比和电子能量 的分辨率。  In the present invention, the photoelectron spectrometer is at the "focus point" of the upper channel time-of-flight mass spectrometer, and the "probe area" is also the "focus point". When pulsed laser irradiation is applied to the "focus point" ions, the ionic strength is at least one order of magnitude higher than that of the conventional time-of-flight mass spectrometry "detection zone", which improves the signal collection efficiency and improves the signal-to-noise of the electronic signal. Ratio and resolution of electron energy.
附图说明 DRAWINGS
图 1 中 (a)为传统飞行时间质谱技术采用的单孔加速器结构示 意图; (b)为本发明同向双通道飞行时间质谱仪所采用的双孔加速器 结构示意图; Figure 1 (a) shows the structure of a single-hole accelerator used in traditional time-of-flight mass spectrometry. (b) A schematic diagram of the structure of a two-hole accelerator used in the same-direction two-channel time-of-flight mass spectrometer of the present invention;
图 2为本发明同向双通道飞行时间质谱仪的结构总图; 图 3为本发明同向双通道飞行时间质谱仪耦合光电子能谱仪(或 者光电子成像仪) 的结构总图;  2 is a general structural view of a co-directional two-channel time-of-flight mass spectrometer of the present invention; FIG. 3 is a general structural view of a coupled photoelectron spectrometer (or photoelectron imager) of the same-direction dual-channel time-of-flight mass spectrometer;
图 4为在下通道飞行时间质谱采集的金和碘负离子与水反应的 质谱图;  Figure 4 is a mass spectrum of the reaction of gold and iodine anion collected in the lower channel time-of-flight mass spectrometer with water;
图 5为根据金和碘负离子与水反应的飞行时间质谱图,在上通道 采集得到相应每个质谱峰的光电子能谱。  Figure 5 is a time-of-flight mass spectrum based on the reaction of gold and iodine anion with water. The photoelectron spectrum of each mass spectrum peak is obtained on the upper channel.
具体实施方式 detailed description
下面结合附图和实施例对本发明做进一步详细说明,不能认定本 发明的实施方式仅限于以下说明。对本发明所属技术领域的普通技术 人员来说,在不脱离本发明构思的前提下,还可以做出简单的推演及 替换, 都应当视为本发明的保护范围。  The present invention will be further described in detail below with reference to the drawings and embodiments, and the embodiments of the present invention are not limited to the following description. It will be apparent to those skilled in the art that the present invention can be made without departing from the spirit and scope of the invention.
本实施例中, 加速器电极板如图 (1 b) 中所示, 采用双孔加工 并贴金属栅网。 图 (2) 中加速器(1 )采用图 (1 b) 中的电极板结 构, 并且采用上下 2组偏转板, 上下 2组离子透镜。末端上下"聚焦 点"分别放置离子信号探测器(4)和 (5), 可以进行质谱分析。 当 并行的双通道加速器(1 ) 上下两段都采用同一脉冲加速电压, 离子 信号探测器(4)和(5 )探测得到的都是同一极性离子信号; 当并行 的双通道加速器 (1 )上下两孔分别采用正负脉冲加速电压, 离子信 号探测器(4)和 (5)探测得到的是相反极性的离子信号。 本实施例中, 如图(3)中所示当离子信号探测器(4)被光电子 能谱仪(或者光电子成像仪)(7)代替时可以进行离子的电子能谱测 量。整个工作流程是:离子源产生的负离子束经过准直器被双通道飞 行时间质量分析器分割成上下两部分, 并且分别被横向加速, 偏转, 聚焦到达上下两个"聚焦点", 下通道放置探测器(5)记录离子飞行 时间质谱。 根据质谱图选择出需要探测光电子能谱的离子 M的飞行 时间 Tf, 脉冲激光辐照的出光时间由公式 T ft=Tf -T aw (T aw为激光 器内部电路延时,为一个固定值,事先由光电探测器测定: 0.22微秒) 决定,这样我们就很方便快速地定位脉冲激光出光时间精确地辐照质 谱中的所有离子,无偏差地来探测所有离子的光电子能谱信号。如图In this embodiment, the accelerator electrode plate is processed by double holes and attached to the metal grid as shown in (1 b). In the diagram (2), the accelerator (1) adopts the electrode plate structure in the figure (1 b), and two sets of deflection plates are used, and two sets of ion lenses are used. The ion signal detectors (4) and (5) are placed at the upper and lower "focus points", respectively, for mass spectrometry analysis. When the parallel two-channel accelerator (1) uses the same pulse acceleration voltage in both the upper and lower sections, the ion signal detectors (4) and (5) detect the same polarity ion signals; when the parallel two-channel accelerator (1) The upper and lower holes adopt positive and negative pulse acceleration voltages respectively, and the ion signal detectors (4) and (5) detect ion signals of opposite polarity. In this embodiment, electron energy spectrum measurement of ions can be performed when the ion signal detector (4) is replaced by a photoelectron spectrometer (or photoelectron imager) (7) as shown in (3). The whole workflow is: the negative ion beam generated by the ion source is divided into upper and lower parts by the two-channel time-of-flight mass analyzer through the collimator, and is respectively accelerated laterally, deflected, and focused to reach the upper and lower "focus points", and the lower channel is placed. The detector (5) records ion time-of-flight mass spectrometry. According to the mass spectrum, the time-of-flight T f of the ion M to be detected by the photoelectron spectrum is selected, and the light-emitting time of the pulsed laser irradiation is determined by the formula T ft =T f -T aw (T aw is the internal circuit delay of the laser, which is a fixed value. , determined by photodetector in advance: 0.22 microseconds), so that we can conveniently and quickly locate the pulsed laser light extraction time to accurately irradiate all the ions in the mass spectrometer, and to detect the photoelectron spectrum signals of all ions without deviation. As shown
(4)所示是图(3)中下通道记录的金和碘负离子与水反应的质谱图。 从谱图中既可以看到单一的质量峰(金和碘负离子), 也可以看到复 杂的多质量峰的离子, 如 AuO', Au(OH)", Au'(H20)。 图(5)是在 相同信号累加次数,相同的离子源实验条件下得到的光电子能谱。图(4) is a mass spectrum of gold and iodine anion recorded in the lower channel in Fig. 3 and water. From the spectrum, you can see a single mass peak (gold and iodine anion), as well as complex multi-mass peaks such as AuO', Au(OH)", Au'(H 2 0). (5) is the photoelectron spectrum obtained under the same ion source experimental conditions with the same number of signal accumulation times.
(5a) 是用传统的光电子成像仪器 (Chin. J. Chem . Phys. 23, 373 (2010))采集得到的 Αιι·(Η20)的光电子能谱, 图(5b)和图 (5c)是 利用本发明的仪器所采集到 A (H20) , ΑυΟ·的光电子能谱, 反应了 相应每个质谱峰的电子能级信息和振动峰特点。 对比图 (5a) 和图(5a) is a photoelectron spectroscopy of Αιι·(Η 2 0) collected by a conventional photoelectron imaging apparatus (Chin. J. Chem. Phys. 23, 373 (2010)), Fig. (5b) and Fig. (5c) The photoelectron spectroscopy of A (H 2 0) and ΑυΟ· is collected by the instrument of the present invention, and the electronic energy level information and the vibration peak characteristic of each mass spectrum peak are reflected. Comparison chart (5a) and figure
(5b), 和图 (5c)本发明在信号强度上提高了 5倍左右, 性噪比提 高了(ΑιΓ(¾0), AuO'主峰右边的小的振动峰也可以清晰地探测到)。 (5b), and Fig. (5c) The present invention increases the signal intensity by about 5 times, and the noise-to-noise ratio is improved (ΑιΓ(3⁄40), and the small vibration peak to the right of the AuO' main peak can be clearly detected).
本发明可以应用于质谱分析领域,利用双通道飞行时间质量分析 器将离子源产生的离子束分割成上下两部分, 并且分别被横向加速, 偏转, 聚焦到达上下两个探测器, 记录离子飞行时间。整套仪器紧凑 小巧, 结构简单, 操作方便, 获得的离子的电子能谱信噪比髙, 分辨 率髙。 The invention can be applied to the field of mass spectrometry, and the ion beam generated by the ion source is divided into upper and lower parts by a two-channel time-of-flight mass analyzer, and is respectively accelerated laterally. Deflection, focus to the upper and lower detectors, record the ion flight time. The whole set of instruments is compact and compact, the structure is simple, the operation is convenient, the obtained electron energy spectrum of the ion spectrum is 信, and the resolution is 髙.

Claims

权 利 要 求 书 claims
1、 一种同向双通道飞行时间质谱仪, 其特征在于: 该质谱仪紧 凑小巧, 包括并行的双通道加速器(1 )、 小型真空腔体(2)、激光溅 射离子源(3)、 离子信号探测器(4)、 (5 )和离子准直器(6); 1. A co-directional dual-channel time-of-flight mass spectrometer, characterized by: The mass spectrometer is compact and small, including a parallel dual-channel accelerator (1), a small vacuum cavity (2), a laser sputtering ion source (3), Ion signal detectors (4), (5) and ion collimators (6);
离子准直器(6)将小型真空腔体(2)分割成两部分, 激光溅射 离子源(3)位于离子准直器(6)的上方, 并行的双通道加速器(1 ) 位于离子准直器(6)的下方; 激光溅射离子源(3 ) 出口、 离子准直 器(6)孔中心和双通道加速器(1 )两加速片中点处于同一中线轴线 上; 离子信号探测器(4)、 (5)分别位于这一中心轴线的左右处。 The ion collimator (6) divides the small vacuum chamber (2) into two parts. The laser sputtering ion source (3) is located above the ion collimator (6), and the parallel dual-channel accelerator (1) is located at the ion collimator. Below the collimator (6); the outlet of the laser sputtering ion source (3), the center of the hole of the ion collimator (6) and the midpoint of the two accelerating sheets of the dual-channel accelerator (1) are on the same centerline axis; the ion signal detector ( 4) and (5) are respectively located on the left and right of this central axis.
2、 按照权利要求 1所述同向双通道飞行时间质谱仪, 其特征在 于: 激光溅射离子源(3)由激光照射金属靶面产生的激光等离子体, 再与超声分子束作用产生的离子复合物经喷口喷出,该离子束经过离 子准直器(6)后飞行一段时间进入双通道加速器(1 )中心, 由于离 子束在飞行路径上具有一定的长度,离子束被加速器的上下两个孔道 分割成两段,并且分别被横向加速,偏转,聚焦至离子信号探测器(4) 和 (5)探测, 最后记录的是上下两通道的离子飞行时间质谱。 2. The co-directional dual-channel time-of-flight mass spectrometer according to claim 1, characterized in that: the laser sputtering ion source (3) generates laser plasma by irradiating the metal target surface with laser, and then reacts with the ultrasonic molecular beam to generate ions The complex is ejected through the nozzle, and the ion beam flies for a period of time after passing through the ion collimator (6) and enters the center of the dual-channel accelerator (1). Since the ion beam has a certain length on the flight path, the ion beam is moved by the upper and lower sides of the accelerator. Each channel is divided into two sections, and are respectively laterally accelerated, deflected, and focused to the ion signal detectors (4) and (5) for detection. The final record is the ion time-of-flight mass spectrum of the upper and lower channels.
3、 按照权利要求 1或 2所述同向双通道飞行时间质谱仪, 其特 征在于: 所述激光溅射离子源(3 )采用脉冲激光超声分子束负离子 源。 3. The co-directional dual-channel time-of-flight mass spectrometer according to claim 1 or 2, characterized in that: the laser sputtering ion source (3) adopts a pulsed laser ultrasonic molecular beam negative ion source.
4、 按照权利要求 1或 2所述同向双通道飞行时间质谱仪, 其特 征在于: 所述双通道加速器 (1 ) 的电极板采用双孔并贴栅网, 上下 两组并行的偏转板, 上下两组并行的离子透镜。 4. The co-directional dual-channel time-of-flight mass spectrometer according to claim 1 or 2, characterized in that: the electrode plate of the dual-channel accelerator (1) adopts double holes and is attached to a grid, and there are two parallel sets of upper and lower deflection plates, Two sets of parallel ion lenses, upper and lower.
5、 按照权利要求 1或 2所述同向双通道飞行时间质谱仪, 其特 征在于: 当并行的双通道加速器(1 ) 上下两段都采用同一脉冲加速 电压, 离子信号探测器(4)和(5)探测得到的都是同一极性离子信 号。 5. The co-directional dual-channel time-of-flight mass spectrometer according to claim 1 or 2, characterized in that: when the upper and lower sections of the parallel dual-channel accelerator (1) adopt the same pulse acceleration voltage, the ion signal detector (4) and (5) All detected ion signals are of the same polarity.
6、 按照权利要求 1或 2所述同向双通道飞行时间质谱仪, 其特 征在于: 当并行的双通道加速器(1 ) 上下两孔分别采用正负脉冲加 速电压, 离子信号探测器(4)和(5)探测得到的是相反极性的离子 信号。 6. The co-directional dual-channel time-of-flight mass spectrometer according to claim 1 or 2, characterized in that: when the parallel dual-channel accelerator (1) uses positive and negative pulse acceleration voltages in the upper and lower holes respectively, the ion signal detector (4) And (5) detects ion signals of opposite polarity.
7、 按照权利要求 1或 2所述同向双通道飞行时间质谱仪, 其特 征在于:所述质谱仪能被用来耦合其它光谱学仪器来进行多任务并行 操作。 7. The co-directional dual-channel time-of-flight mass spectrometer according to claim 1 or 2, characterized in that the mass spectrometer can be used to couple other spectroscopic instruments to perform multi-task parallel operations.
8、 按照权利要求 7所述同向双通道飞行时间质谱仪, 其特征在 于:所述质谱仪和光电子能谱耦合;耦合方式为上方的离子信号探测 器(4)被电子能谱仪或(7)者光电子成像仪代替, 进行单一质量离 子的电子能谱测量, 而下方的离子信号探测器 (5) 同时进行离子信 号的探测,这种耦合方式使得进行离子信号探测的同时进行某一质量 离子的能谱采集。 8. The co-directional dual-channel time-of-flight mass spectrometer according to claim 7, characterized in that: the mass spectrometer is coupled to the photoelectron spectrometer; the coupling mode is that the upper ion signal detector (4) is connected to the electron spectrometer or ( 7) is replaced by a photoelectron imager to measure the electronic energy spectrum of a single mass ion, while the ion signal detector (5) below detects the ion signal at the same time. This coupling method allows the ion signal to be detected and a certain mass to be detected at the same time. Energy spectrum collection of ions.
9、 按照权利要求 8所述同向双通道飞行时间质谱仪, 其特征在 于: 由上通道电子能谱仪(7)进行某一离子的电子能谱测量时, 其 激光出光时间等于下通道探测器(5 )测得某一离子飞行时间质谱加 上一个时间常数。 9. The co-directional dual-channel time-of-flight mass spectrometer according to claim 8, characterized in that: when the electron spectrum of a certain ion is measured by the upper channel electron spectrometer (7), the laser light emission time is equal to the lower channel detection The instrument (5) measures the time-of-flight mass spectrum of a certain ion and adds a time constant.
10、按照权利要求 9所述同向双通道飞行时间质谱仪,其特征在 于: 所述的时间常数为辐照激光内部的电路延时, 一般为几百纳秒。 10. The co-directional dual-channel time-of-flight mass spectrometer according to claim 9, characterized in that Yu: The time constant described is the circuit delay inside the irradiation laser, which is generally several hundred nanoseconds.
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