CN204086141U - Local laser mass spectrum spectroscopic simultaneous analyzer - Google Patents
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- CN204086141U CN204086141U CN201420490811.XU CN201420490811U CN204086141U CN 204086141 U CN204086141 U CN 204086141U CN 201420490811 U CN201420490811 U CN 201420490811U CN 204086141 U CN204086141 U CN 204086141U
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Abstract
The utility model relates to elemental analyser, particularly laser ablation flying time mass spectrum analysis instrument and Laser-induced Breakdown Spectroscopy analyser.A kind of local laser mass spectrum spectroscopic simultaneous analyzer, its principal feature is to include target sample and is located on the lens combination axes intersect point of central axis in the laser beam of laser optical system, Laser time-flight MS measurement mechanism and Laser-induced Breakdown Spectroscopy measurement mechanism; Described laser optical system includes laser instrument, and beam transmission passage is provided with ultraviolet quartz prism, ultraviolet quartz condenser lens and characteristic wavelength high reflection mirror, and focusing laser pulses produces plasma plume on the surface of target sample; Also to be provided with the location semiconductor laser of monitor CCD and target sample in the front end of the vacuum chamber of described Laser time-flight MS measurement mechanism in order to accurately control laser beam foucing position, be located at the both sides of target sample axis respectively, CCD and location semiconductor laser axis all point to target sample.The utility model has the advantages that with same beam of laser ablation target material under the same conditions, under identical ablation condition can be obtained, the mass spectrum of ablation resultant and spectral information.
Description
Technical field
The utility model relates to elemental analyser, particularly laser ablation flying time mass spectrum analysis instrument and Laser-induced Breakdown Spectroscopy analyser.
Background technology
Elemental analysis has a wide range of applications demand in every field such as metallurgy, food security, environmental monitoring, space explorations.Conventional analysis means comprises x-ray fluorescence analyzer, inductively-coupled plasma spectrometer, icp ms, atomic absorption spectrophotometer (AAS), isotope mass spectrometer, inorganic mass spectrometer and organic mass spectrometer etc.But the many needs of most ultimate analysis instrument are sampled, and just can analyze after carrying out pre-service to sample, and some analytical approach all has larger restriction to sample morphology, institute's kind such as analytical element, molecule etc.
Laser-induced Breakdown Spectroscopy (LIBS) technology utilizes light laser to focus on sample surfaces to form plasma, analyzed the analysis means of elemental composition in sample by the characteristic spectral line measured in plasma emission spectroscopy.Extensive work has been carried out in the qualitative and quantitative analysis applied research of the trace element of the method in the samples such as metal, liquid, gas.Compared with traditional analysis, still the feature that developing LIBS technology is maximum be need hardly preparation, little to sample broke, sensitivity high, and because this analytical approach only has the contact of light beam and target target, thus multielement, in-situ study can be realized.
Laser ablation flight time mass spectrum (LA-TOF-MS) technology is a kind of analytical approach measured in conjunction with laser ablation sample introduction and flight time mass spectrum that development in recent years is got up, it utilizes the ablation of Laser Focusing target surfaces to produce plasma, utilize electric field first to slow down to charged particle and after again accelerating, calculate the mass spectrometric analysis method of particle specific charge by measuring the particle flight time.It has sample equally without the need to preparation or the advantage only needing simple preparation.LA-TOF-MS adopts reflective TOF mass spectrometer usually, and such design can improve mass resolution greatly, for the fragment such as atom, the ion even molecular radical of the minute differences in addition quantitative test that organism ablation produces.John Hopkins University of the U.S. is that the situ laser ablation flight time mass spectrum device of mars exploration development successfully obtains target elemental composition in laboratory.
The spectral measurement ranges of tradition LIBS technology concentrates on 200 ~ 800nm, mainly analyzes neutral atom in the plasma of light laser generation, part monovalent ion and a few molecules (such as CN, C
2deng) spectrum.Therefore, the constituent analysis not in this spectral range to molecule or characteristic spectral line, the application of LIBS technology is extremely restricted.
The advantage of laser ablation flight time mass spectrum (LA-TOF-MS) technology to detect charged atom, molecule or even macro-radical etc., and have higher resolution and quantitative test ability.But this mass-spectrometric technique can not detect neutral atom, molecule.And in low power density laser-produced plasma, there is a large amount of neutral atom, molecule, losing these composition informations for accurate analysis sample composition, Study of Laser Ablation mechanism etc. has significant limitation; And traditional LA-TOF-MS needs to work in high vacuum conditions, all more complicated such as sample preparation, vacuum sample control, being applied in in-situ study aspect still has some difficulties.
Laser spectral analysis technology being combined with analytical technique of mass spectrum, to carry out sample composition analysis be solution that is very effective, that have complementary advantages.It can measure neutral atom, moieties and charged particle etc. simultaneously, can obtain laser ablation resulting information more comprehensively, and the mass spectral results of spectral results and synchronous acquisition can confirm mutually, improves precision of analysis.Up to now, almost do not have LIBS technology to be combined with mass-spectrometric technique and measure laser ablation complex material spectrum and mass spectrographic Experimental report simultaneously.The T.Lippert group of Switzerland adopted the combined measurement of mass spectrum based on electric quadrupole mass spectrograph, spectrum in the research of micro-laser plasma thruster material ablation mechanism, by ablation material velocity of propagation, fragment kinetic energy measuring study organism ablation mechanism.But due to they adopt be four pole mass spectrographs, can not once obtain whole mass spectrums, in the experiment that they deliver, only measure H (α) spectrum and C+ mass-spectrometer measurement, this just greatly reduces its analysis efficiency.LIBS technology and LA-TOF-MS combine with technique are got up to carry out original position, harmless ultimate analysis, there is no bibliographical information at present.
Summary of the invention
The purpose of this utility model is, for avoiding the deficiencies in the prior art, provides a kind of local laser mass spectrum spectroscopic simultaneous analyzer.The purpose of this utility model is combined with LA-TOF-MS technology at LIBS technology, sets up the laser mass spectrometry spectroscopic simultaneous measurement and analysis instrument that can realize sample in-situ and analyze.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of local laser mass spectrum spectroscopic simultaneous analyzer, and its principal feature is to include target sample and is located on the lens combination axes intersect point of central axis in the laser beam of laser optical system, Laser time-flight MS measurement mechanism and Laser-induced Breakdown Spectroscopy measurement mechanism; Described laser optical system includes laser instrument, and beam transmission passage is provided with ultraviolet quartz prism, ultraviolet quartz condenser lens and characteristic wavelength high reflection mirror, and focusing laser pulses produces plasma plume on the surface of target sample; Also to be provided with the location semiconductor laser of monitor CCD and target sample in the front end of the vacuum chamber of described Laser time-flight MS measurement mechanism in order to accurately control laser beam foucing position, be located at the both sides of target sample axis respectively, CCD and location semiconductor laser axis all point to target sample.
Described local laser mass spectrum spectroscopic simultaneous analyzer, described Laser time-flight MS measurement mechanism comprises cylindrical linear high-vacuum chamber, and its top is provided with ram charging valve; Front end in high-vacuum chamber is provided with center perforated metal anode strip successively, center microchannel plate with holes (MCP), and the aperture plate of structure is reticulated by welded wire, the center that is provided with in its back-end is the deceleration accelerating field region of the metal electrode film composition of circular port, is the drift region of vacuum chamber between aperture plate and metal electrode film; High-vacuum chamber flange in the bottom is provided with signal output interface, and is connected with oscillograph acquisition channel by cable; High-vacuum chamber is also connected with vacuum pump system by vacuum corrugated pipe.
After when measuring, plasma plume enters high-vacuum chamber by pulse valve, successively by center perforated metal anode strip, center microchannel plate with holes (MCP), and the aperture plate of structure is reticulated by welded wire, more than 90% particle can pass through the drift region that aperture plate enters vacuum chamber, and along orbiting motion, arrive the deceleration accelerating field region that the metal electrode film being circular port by center forms, particle is after this electric field region is first decelerated to zero, oppositely accelerate again, and again clash into MCP detector through after aperture plate, exported to the signal output interface on cavity bottom flange by vacuum electric cable after being collected by sheet metal anode after being amplified by particle signal by MCP detector, and be connected to oscillograph acquisition channel by cable, chamber is connected to keep chamber to be operated in high vacuum environment by vacuum corrugated pipe with vacuum pump system.
Described local laser mass spectrum spectroscopic simultaneous analyzer, described Laser-induced Breakdown Spectroscopy measurement mechanism comprises the spectral collection coupled system be made up of quartz lens, lens combination orientation of its axis target sample, optical fiber is connected with spectrometer, and spectrometer output terminal connects multiplex pulse signal delayer.Be transmitted through the fiber to spectrometer after the surface of target sample being produced the spectrum Efficient Collection of plasma plume transmitting, thus obtain the elemental composition information of target sample by spectral analysis.
Described local laser mass spectrum spectroscopic simultaneous analyzer, also include electronic delay time controlled system, include multiplex pulse signal delayer, its signal output part is connected with pulse valve controller, pulsed laser power supply, spectrometer and oscillograph trigger end respectively by cable.Regulate the sequential such as accurately control, pulse valve air inlet switch time, laser pulse time of origin, spectrometer collection time and flight time time measurement commencing signal just can complete the synchro measure analysis of laser mass spectrometry spectrum time delay by pulse delay signal device.
The beneficial effects of the utility model:
1) with same beam of laser ablation target material under the same conditions, under identical ablation condition can be obtained, the mass spectrum of ablation resultant and spectral information.
2) flight time mass spectrum is utilized can to obtain the information of ablation resultant intermediate ion, charged molecule, large molecule and group etc., utilize spectral measurement can obtain neutral atom in ablation resultant, molecule and monovalent ion information, the two data is combined and can obtain laser ablation process and resulting information more comprehensively, thus help people better Study of Laser Ablation target material physical process and promote organism discriminatory analysis ability.
3) adopt pulse valve to connect the atmospheric environment of laser ablation target material and microchannel plate (MCP) to work necessary high vacuum environment, the normal work of detector can be ensured, do not utilize other carrier gas again, thus avoid plasma plume and other gas interacts, cause product to change.
4) adopt the reflective TOF design of conllinear, reduce the volume of TOF system, and adopt corrugated tube to be connected with molecular pump, make equipment set have mobility, be convenient to in-situ study.
This device adopts the equipment such as reflective TOF structure, pulse valve air inlet control and pulse signal chronotron, realization is measured the laser ionization flight time mass spectrum of laser ablation product in target material under atmospheric environment and Laser-induced Breakdown Spectroscopy simultaneously, acquisition comprises neutral atom, molecule, the products such as monovalent ion, high valence ion and charged fragment in interior more fully information, thus provide new tool for the experimental study of laser ablation macromolecule organic physical mechanism, organic substance classification in situ detection etc.And this measuring equipment has higher accuracy of detection, stronger analysis ability, can be widely used in the multiple key areas such as food safety monitoring, environmental monitoring, space exploration.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of the utility model local laser mass spectrum, spectroscopic simultaneous analyzer;
Fig. 2 electrode slice structural representation;
Fig. 3 wire-grid structure schematic diagram;
Fig. 4 local laser mass spectrum spectroscopic simultaneous analyzer each several part sequential control figure;
Several organic polymer molecules structure of Fig. 5.
In figure: 1 target sample; 2 plasma plumes; 3 characteristic wavelength high reflective mirrors; 4 target spot monitoring CCD; 5 ultraviolet quartz condenser lenses; 6 ultraviolet quartz prisms; 7 pulse laser beams; 8 gas pulses gas admittance valves; 8-1 pulse valve controller; 9 target spot location semiconductor lasers; Coupled lens group collected by 10 optical fiber; 11 fiber couplers; 12 optical fiber; 13 spectrometers; 14 vacuum pump groups; 15 corrugated tubes; 16 pulse delay signal devices; 17 particle flight tracks; 18 electrode slices; 18-1 electrode slice main body; 18-2 support bar screw; 18-3 particle flight hole; 19 detector anode strips; 20 micro-channel plate detectors (MCP); 21 shielding aperture plates; 21-1 aperture plate metallic support sheet; 21-2 welded wire net; 21-3 support bar screw; 22 vacuum chambers; 23 high pressure load and signal output connector; 24 Nd:YAG pulsed lasers; 25-1 ground connection aperture plate; 25-2 V1 aperture plate; 25-2 V2 aperture plate.
Embodiment
Below in conjunction with accompanying drawing shownschematically preferred example be described in further detail:
Embodiment 1: see Fig. 1, a kind of local laser mass spectrum spectroscopic simultaneous analyzer, its principal feature is to include target sample 1 and is located on the lens combination axes intersect point of central axis in the laser beam of laser optical system, Laser time-flight MS measurement mechanism and Laser-induced Breakdown Spectroscopy measurement mechanism; Described laser optical system includes laser instrument 24, and beam transmission passage is provided with ultraviolet quartz prism 6, ultraviolet quartz condenser lens 5 and characteristic wavelength high reflection mirror 3, and focusing laser pulses produces plasma plume 2 on the surface of target sample 1; Also to be provided with the location semiconductor laser 9 of monitor CCD4 and target sample 1 in the front end of the vacuum chamber 22 of described Laser time-flight MS measurement mechanism in order to accurately control laser beam foucing position, be located at the both sides of target sample 1 axis respectively, CCD4 and location semiconductor laser axis all point to target sample 1.
Embodiment 2: see Fig. 1, described local laser mass spectrum spectroscopic simultaneous analyzer, described Laser time-flight MS measurement mechanism comprises cylindrical linear high-vacuum chamber 22, and its top is provided with ram charging valve 8; Front end in high-vacuum chamber 22 is provided with center perforated metal anode strip 19 successively, center microchannel plate with holes (MCP) 20, and the aperture plate 21 of structure is reticulated by welded wire, the center that is provided with in its back-end is the deceleration accelerating field region that the metal electrode film 18 of circular port forms, and is the drift region of vacuum chamber between aperture plate 21 and metal electrode film 18; High-vacuum chamber 22 flange in the bottom is provided with signal output interface 23, and is connected with oscillograph acquisition channel by cable; Vacuum chamber 22 is also connected with vacuum pump system 14 by vacuum corrugated pipe 15, can realize 10
-6the high vacuum condition of mbar level, all the other structures are identical with embodiment 1.
After when measuring, plasma plume 2 enters high-vacuum chamber 22 by pulse valve, successively by center perforated metal anode strip 19, center microchannel plate with holes (MCP) 20, and the aperture plate 21 of structure is reticulated by welded wire, more than 90% particle can pass through the drift region that aperture plate enters vacuum chamber, and move along track 17, arrive the deceleration accelerating field region that the metal electrode film 18 being circular port by center forms, particle is after this electric field region is first decelerated to zero, oppositely accelerate again, and again clash into MCP detector 20 through after aperture plate 21, exported to the signal output interface 23 on chamber 22 flange in the bottom by vacuum electric cable after being collected by sheet metal anode 18 after being amplified by particle signal by MCP detector, and be connected to oscillograph acquisition channel by cable, chamber is connected to keep chamber to be operated in high vacuum environment with vacuum pump system 14 by vacuum corrugated pipe 15.
Embodiment 3: see Fig. 1, described local laser mass spectrum spectroscopic simultaneous analyzer, described Laser-induced Breakdown Spectroscopy measurement mechanism comprises the spectral collection coupled system 10 be made up of quartz lens, lens combination orientation of its axis target sample 1, optical fiber 12 is connected with spectrometer 13, and spectrometer 13 output terminal connects multiplex pulse signal delayer 16.Is transferred to spectrometer 13 by optical fiber 12 after the spectrum Efficient Collection that the surface of target sample 1 generation plasma plume 2 is launched, thus obtain the elemental composition information of target sample 1 by spectral analysis.All the other structures are identical with embodiment 2 with embodiment 1.
Embodiment 4: see Fig. 1, described local laser mass spectrum spectroscopic simultaneous analyzer, also include electronic delay time controlled system, include multiplex pulse signal delayer 16, its signal output part is connected with pulse valve controller 8-1, pulsed laser 24 power supply, spectrometer 13 and oscillograph trigger end respectively by cable.Regulate the sequential such as accurately control, pulse valve air inlet switch time, laser pulse time of origin, spectrometer collection time and flight time time measurement commencing signal just can complete the synchro measure analysis of laser mass spectrometry spectrum time delay by pulse delay signal device.All the other structures and embodiment 1, embodiment 2 are identical with embodiment 3.
Sequential control figure when described local laser mass spectrum spectroscopic simultaneous analyzer works as shown in Figure 4, first utilizes vacuum pump system that chamber 22 is extracted into 10
-6the high vacuum condition of mbar magnitude, to ensure that micro-channel plate detector (MCP) can normally work, after each system worked well, pulse-delay unit 16 gating pulse valve 8 continues to open tens of microseconds, pulse valve postpones few tens of nano-seconds output nanosecond laser pulses after opening acts on sample 1 surface, produce the plasma plume 2 of sustainable several microsecond, after most of composition of plasma plume enters vacuum chamber by pulse valve 8, pulse valve cuts out, charged particle along track (17) fly several delicate after reach micro-channel plate detector 20 and export electric signal.The time arriving detector by recording impulse laser start time and particle can obtain the flight time of particle, and obtains its specific charge information, and the flight time of recording all particles can obtain complete Information in Mass Spectra; Meanwhile, the starting signal that pulse delay signal device exports a relative laser pulse daley hundreds of nanosecond starts the time gathered as spectrometer 13, and by spectrometer record plasma emission spectroscopy information, can obtain the spectrum of sample ablation resultant.Owing in mass spectrum collection and spectra collection being all obtaining of carrying out under the same conditions, and under target material sample is in atmospheric environment, therefore instrument described in the utility model can carry out the synchro measure analysis of local laser mass spectrum spectrum.
Embodiment 5: see Fig. 1, a kind of local laser mass spectrum spectroscopic simultaneous analyzer, includes laser optical system, Laser-induced Breakdown Spectroscopy measurement mechanism, Laser time-flight MS measurement mechanism and electronic-controlled installation.Described laser optical system includes at laser instrument 24, beam transmission passage is provided with a ultraviolet quartz prism 6, one piece of ultraviolet quartz condenser lens 5 and a characteristic wavelength high reflection mirror 3, focusing laser pulses can be produced plasma plume 2 on the surface of target sample 1; In order to accurately control laser beam foucing position, described analyser is also equipped with monitor CCD4 and target spot location semiconductor laser 9 in the front end of vacuum chamber 22, be located at the both sides of plasma plume 2 axis respectively, CCD and location semiconductor laser axis all accurately point to laser target spot.
Described Laser time-flight MS measurement mechanism comprises a cylindrical linear high-vacuum chamber 22, its top is provided with ram charging valve 8, after plasma plume 2 enters chamber 22 by pulse valve, with holes by center successively, aperture 5mm, metal anode sheet 19, see Fig. 2, center (aperture 8mm) microchannel plate (MCP) 20 with holes, and three aperture plates 21 of structure are reticulated by welded wire, see Fig. 3, more than 90% particle can pass through the drift region that aperture plate enters vacuum chamber, and move along track 17, arriving by center is the electric field region that the stainless steel of circular port or copper metal electrode film 18 and aperture plate 25 form, charged particle is after this electric field region is first decelerated to zero, oppositely accelerate again, and again clash into MCP detector 20 through after aperture plate 21, exported to the signal output interface 23 on chamber 22 flange in the bottom by vacuum electric cable after being collected by sheet metal anode 18 after being amplified by particle signal by MCP detector, and be connected to oscillograph acquisition channel by cable, chamber is connected to keep chamber to be operated in high vacuum environment with vacuum pump system 14 by vacuum corrugated pipe 15.Pulse valve is arranged on stream outlet, and under controlling atmospheric environment, laser ablation product enters mass-spectrometer measurement system, has both kept laser ablation resultant state in an atmosphere, can ensure again the high vacuum condition needed for micro-channel plate detector work.
Described local laser mass spectrum spectroscopic simultaneous analyzer, described Laser-induced Breakdown Spectroscopy measurement mechanism comprises the spectral collection coupled system 10 be made up of one group of quartz lens, lens combination axis accurately points to pulse laser on sample 1 and the overlapping target spot of semiconductor laser, spectrometer 13 can be transferred to after plasma emission spectroscopy Efficient Collection by optical fiber 12, thus obtain the elemental composition information of target sample 1 by spectral analysis.
Described local laser mass spectrum spectroscopic simultaneous analyzer, described electronic delay time controlled system includes high precision multiplex pulse signal delayer 16, adopt the DG645 of Stamford company of the U.S., its signal output part by cable respectively with pulse valve controller 8-1, pulsed laser 24 power supply, fiber spectrometer and oscillograph trigger end connect, accurately control is regulated time delay by pulse delay signal device, the pulse valve air inlet switch time, laser pulse time of origin, the sequential such as spectrometer collection time and flight time time measurement commencing signal just can complete the synchro measure analysis of laser mass spectrometry spectrum.
Sequential control figure when described local laser mass spectrum spectroscopic simultaneous analyzer works, see Fig. 4, first utilize vacuum pump system that chamber 22 is extracted into high vacuum condition, to ensure that micro-channel plate detector (MCP) can normally work, after each system worked well, pulse-delay unit 16 gating pulse valve 8 continues to open tens of microseconds, pulse valve postpones few tens of nano-seconds output nanosecond laser pulses after opening acts on sample 1 surface, produce the plasma plume 2 of sustainable several microsecond, after most of composition of plasma plume enters vacuum chamber by pulse valve 8, pulse valve cuts out, charged particle along track 17 fly several delicate after reach micro-channel plate detector 20 and export electric signal.The time arriving detector by recording impulse laser start time and particle can obtain the flight time of particle, and obtains its specific charge information, and the flight time of recording all particles can obtain complete Information in Mass Spectra; Meanwhile, the starting signal that pulse delay signal device exports a relative laser pulse daley hundreds of nanosecond starts the time gathered as spectrometer 13, and by spectrometer record plasma emission spectroscopy information, can obtain the spectrum of sample ablation resultant.Owing in mass spectrum collection and spectra collection being all obtaining of carrying out under the same conditions, and under target material sample is in atmospheric environment, therefore instrument described in the utility model can carry out the synchro measure analysis of local laser mass spectrum spectrum.
Experiment test example 1: laser ablation target material Mechanism Study
In Laser-induced Breakdown Spectroscopy application, the charged particle that usual hypothesis laser ablation target material produces is mainly monovalent ion, and material ablation meets chemical fractionation, thus elemental composition and the percent information thereof of material can be obtained comparatively accurately by spectral analysis.But strict laser ablation target material, also may produce the above ion of some divalence, and laser ablate material is under different laser parameter, target material, environmental gas, be difficult to the ideal conditions that can realize chemical fractionation.These can cause the actual constituent of Laser-induced Breakdown Spectroscopy measurement result and material to have difference.But, utilize local laser mass spectrum spectroscopic simultaneous analyzer described in the utility model, Laser-induced Breakdown Spectroscopy can be utilized to measure neutral atom, moieties and monovalent ion information, obtain monovalent ion under the same terms by Laser time-flight MS measurement simultaneously, the information of the above ion of divalence and charged molecule or group etc., in conjunction with both data analysis, comprehensive ablation resultant information can be obtained, and by changing laser parameter, change environmental gas and adopt heterogeneity target etc. to carry out more deep analysis and research to the physical mechanism of laser ablation material.
Experiment test example 2: organism differentiates classification
In rubbish, refuse etc. reclaim, the organic quick in situ of Plastic is differentiated that classification is a thorny problem.The spectral range of tradition LIBS technical research concentrates on 200 ~ 950nm, mainly studies light laser plasma Atom, ion and a few molecules (such as CN, C
2deng) spectrum.For the differentiated material of component, tygon (PE), Polyvinylchloride (PVC) then can differentiate this bi-material very soon according to Cl element spectral line as shown in Figure 5, but for the material that the components such as tygon, poly-third ethene are identical, then need to carry out statistical study to element spectral line intensity and provide correct C, H element than the accurate discriminating bi-material of ability.And to polyethylene terephthalate, tygon, polystyrene, polyolefin etc., need Measurement accuracy C1, H, N, O, C
2, CN content ratio, can correct discriminatory analysis material category.But be subject to the impact of laser parameter and LIBS spectral measurement ranges, spectrum stability, utilize simple LIBS technology fast, these organic materials of Measurement accuracy are also subject to a definite limitation.If utilize simple laser ablation flight time mass spectrum, owing to can not obtain the information of some simple molecules of the elements such as neutral C, H in ablation resultant or its composition etc., element ratio analysis result accuracy also can be affected.Further, common flight time mass spectrum all needs to complete in high vacuum conditions, sample preparation and analyze ageing being restricted, and is difficult to meet reclaim the on-the-spot application demand differentiated fast.
The technology adopting LIBS spectrum to be combined with LA-TOF-MS mass spectrum in local laser mass spectrum spectroscopic simultaneous analyzer, by more fully element, a few class Common Polymers of ablation debris measuring study laser ablation (such as going up described polyolefin, aromatic hydrocarbon etc.) laser ablation decomposition product, can all kinds of product ratio in accurate quantitative analysis laser ablation product, and pass through the normalization of mass spectrum, results of spectral measurements, thus reduction target material molecular composition composition, differentiate with the express-analysis of realize target material.This device target material ablation environment is air, and mass spectrum partial design is compact, has certain locomotivity, without the need to sample preparation, can realize quick discriminatory analysis demand
Experiment test example 3: the quick detection of occurring in nature ore, geology etc.
Local laser mass spectrum spectroscopic simultaneous analyzer described in the utility model is owing to have employed pulse valve design, make laser mass spectrometry measuring system can measure the resulting information of laser ablation target material under atmospheric environment, and described analyser adopts orthoscopic reflection TOF design, compact conformation (TOF length can be less than 20 centimetres), connects vacuum system by corrugated tube and also makes mass-spectrometer measurement more flexible.Therefore, real-time analysis is carried out at the scene that analyser described in the utility model is movable to mineral exploration, geology research etc.
In addition, the resolution of traditional Laser-induced Breakdown Spectroscopy spectrometer used is lower, can only differentiate the elemental composition in material, but can not differentiate isotope further.Select the spectrometer of super-resolution, price is very expensive, and the efficiency that LIBS measures can reduce greatly.And the mass spectrometer in local laser mass spectrum spectroscopic simultaneous analyzer described in the utility model can carry out mass spectrophotometry to the isotope of most elements, this advantage also makes described analyser can play larger effect in mineral exploration, geology research.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (4)
1. a local laser mass spectrum spectroscopic simultaneous analyzer, is characterized in that including target sample and is located on the lens combination axes intersect point of central axis in the laser beam of laser optical system, Laser time-flight MS measurement mechanism and Laser-induced Breakdown Spectroscopy measurement mechanism; Described laser optical system includes laser instrument, and beam transmission passage is provided with ultraviolet quartz prism, ultraviolet quartz condenser lens and characteristic wavelength high reflection mirror, and focusing laser pulses produces plasma plume on the surface of target sample; Also be provided with the location semiconductor laser of monitor CCD and target sample in the front end of the vacuum chamber of described Laser time-flight MS measurement mechanism, be located at the both sides of target sample axis respectively, CCD and location semiconductor laser axis all point to target sample.
2. local laser mass spectrum spectroscopic simultaneous analyzer as claimed in claim 1, it is characterized in that described Laser time-flight MS measurement mechanism comprises cylindrical linear high-vacuum chamber, its top is provided with ram charging valve; Front end in high-vacuum chamber is provided with center perforated metal anode strip successively, center microchannel plate with holes, and the aperture plate of structure is reticulated by welded wire, the center that is provided with in its back-end is the deceleration accelerating field region of the metal electrode film composition of circular port, is the drift region of vacuum chamber between aperture plate and metal electrode film; High-vacuum chamber flange in the bottom is provided with signal output interface, and is connected with oscillograph acquisition channel by cable; High-vacuum chamber is also connected with vacuum pump system by vacuum corrugated pipe.
3. local laser mass spectrum spectroscopic simultaneous analyzer as claimed in claim 1, it is characterized in that described Laser-induced Breakdown Spectroscopy measurement mechanism comprises the spectral collection coupled system be made up of quartz lens, lens combination orientation of its axis target sample, optical fiber is connected with spectrometer, and spectrometer output terminal connects multiplex pulse signal delayer.
4. local laser mass spectrum spectroscopic simultaneous analyzer as claimed in claim 1, characterized by further comprising electronic delay time controlled system, include multiplex pulse signal delayer, its signal output part is connected with pulse valve controller, pulsed laser power supply, spectrometer and oscillograph trigger end respectively by cable.
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