CN109916509A - Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles - Google Patents
Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles Download PDFInfo
- Publication number
- CN109916509A CN109916509A CN201711332510.9A CN201711332510A CN109916509A CN 109916509 A CN109916509 A CN 109916509A CN 201711332510 A CN201711332510 A CN 201711332510A CN 109916509 A CN109916509 A CN 109916509A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- ion
- cross direction
- time
- ultraviolet light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 6
- 230000005622 photoelectricity Effects 0.000 claims description 3
- 230000010358 mechanical oscillation Effects 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 36
- 230000005684 electric field Effects 0.000 description 3
- 150000001768 cations Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910019990 cerium-doped yttrium aluminum garnet Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses one kind to be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, and the measuring device includes: vacuum part, ion Transmission system, ion flight time detector, high speed acquisition system, data processing system.The present invention can be by changing gaseous species, the cross direction profiles of online measurement vacuum-ultraviolet light.It can guarantee that measuring signal is maintained at optimum range by the gaseous species for choosing different, simultaneously as the sensitivity of ion detector is very high, and is not influenced by external electromagnetic signal and mechanical oscillation, very high measurement accuracy can be obtained.
Description
Technical field
The present invention relates to one kind to be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles.
Background technique
In vacuum ultraviolet energy area (middle finger 50-150nm range of the present invention), since absorption of the air to light is strong, vacuum is purple
The experiment in external enwergy area must be completed under vacuum conditions.In order to obtain vacuum-ultraviolet light distributed data, scintillation crystal is generallyd use
The method that (generally Ce:YAG) directly observes fluorescence or metal blade cutting measurement photoelectric effect electric current.
The fluorescence efficiency of scintillation crystal at different wavelengths has very big difference, causes to can measure the not big dynamic of wavelength
Range, and will lead at the wavelength of low efficiency that distribution measuring results are less than normal, in addition such method is the measurement side of intercept type
Method is unable to real-time online measuring parameter.Although metal blade cutting measurement photoelectric effect current methods can guarantee to measure wavelength
Dynamic range is big, but the measurement difficulty of weak current (generally in pico-ampere magnitude) is larger, and external environment has measured value very big
Interference, so precision is difficult to ensure, furthermore this method can only measure the boundary information of hot spot, cannot obtain point of entire hot spot
Cloth information.
Summary of the invention
The object of the present invention is to provide one kind to be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles.
The technical scheme is that being based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, comprising:
Vacuum part, the vacuum part is interior to have vacuum chamber 11, and the wall of the vacuum chamber 11 is equipped with flange-interface, passes through method
Blue interface is equipped with vacuum generator 13, vacuum measurement component 12 and air charging system 14；Three's combination can be used to accurate control
Gas pressure intensity in measuring device；
Ion Transmission system, when the ion that photoelectricity to be measured separates out is transferred to ion flight by the ion Transmission system vertically
Between at detector；
Ion flight time is converted to high speed acquisition by ion flight time detector, the ion flight time detector
The collectable signal of system, the ion flight time detector are vertical with the holding of ion transmission direction；
High speed acquisition system, the high speed acquisition system is for acquiring signal；
Data processing system, the data processing system are used to derive ion and generate spatial position, the collected letter of fitting
Number, and then derive the cross direction profiles of light to be measured.
Preferably, the vacuum generator 13 is molecular pump.
Preferably, the vacuum measurement component 12 is vacuum gauge.
Preferably, the air charging system 14 is microleak valve or gas flowmeter.
Preferably, the ion Transmission system includes parallel electrode plate, and the parallel electrode plate is by 21 He of positive voltage pole plate
Negative voltage pole plate 22 forms；The positive voltage pole plate 21 is simple metal plate, and the negative voltage pole plate 22 has for intermediate region
The wire-grid structure of certain transmitance, the positive voltage pole plate 21 and negative voltage pole plate 22 are drawn conducting wire by vacuum feedthroughs device
Vacuum chamber 11 is outer to be connect with power supply 23.
Preferably, the ion flight time detector is microchannel plate 31.
Preferably, the high speed acquisition system is High-Speed Data Acquisition Board.
The present invention has following beneficial effect:
The present invention can be by changing gaseous species, the cross direction profiles of online measurement vacuum-ultraviolet light.By choosing not
Same gaseous species can guarantee that measuring signal is maintained at optimum range, simultaneously as the sensitivity of ion detector is very high, and
And do not influenced by external electromagnetic signal and mechanical oscillation, very high measurement accuracy can be obtained.
Detailed description of the invention
Fig. 1 is in the embodiment of the present invention based on the online measuring device structure of time of flight spectrum vacuum-ultraviolet light cross direction profiles
Schematic diagram；
In figure: 11, vacuum chamber；12, vacuum measurement component；13, vacuum generator；14, air charging system；21, positive voltage pole
Plate；22, negative voltage pole plate；23, power supply；31, microchannel plate；4, computer.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.
Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, comprising:
Vacuum part, vacuum part is interior to have vacuum chamber 11, and the wall of vacuum chamber 11 is equipped with flange-interface, is pacified by flange-interface
Equipped with vacuum generator 13, vacuum measurement component 12 and air charging system 14；Three's combination can be used to accurate control and measure device
Interior gas pressure intensity；
The ion that photoelectricity to be measured separates out is transferred to ion flight time vertically and visited by ion Transmission system, ion Transmission system
It surveys at device；
Ion flight time is converted to high speed acquisition system by ion flight time detector, ion flight time detector
Collectable signal, ion flight time detector are vertical with the holding of ion transmission direction；
High speed acquisition system, high speed acquisition system is for acquiring signal；
Data processing system, data processing system are used to derive ion and generate spatial position, the collected signal of fitting, into
And derive the cross direction profiles of light to be measured.
Wherein: vacuum generator 13 be molecular pump, vacuum measurement component 12 be vacuum gauge, air charging system 14 be microleak valve or
Gas flowmeter.Ion Transmission system includes parallel electrode plate, and parallel electrode plate is by positive voltage pole plate 21 and negative voltage pole
Plate 22 forms；Positive voltage pole plate 21 is simple metal plate, and negative voltage pole plate 22 is the aperture plate that there is certain transmitance in intermediate region
Structure, positive voltage pole plate 21 and negative voltage pole plate 22, which are drawn conducting wire by vacuum feedthroughs device, to be connected outside vacuum chamber 11 with power supply 23
It connects.Ion flight time detector is microchannel plate 31.High speed acquisition system is High-Speed Data Acquisition Board.High speed acquisition system and
Data processing system is integrated into inside computer 4.
Measurement method are as follows:
Vacuum-ultraviolet light is incident in measuring device, minimum gas is filled in measuring device, gaseous species are by wave to be measured
It is long to determine；Add certain bias in ion Transmission system, forms a uniform electric field, uniform electric field is vacuum ultraviolet ionized
Gas cation pulls out ionized space, flies towards ion flight time detector and bumps against ion flight time detector following table
Face, ion flight time detector output end can output phase answer electric current, with high-speed collection card acquisition output end electric current, according to from
Quality, acceleration voltage and the ion flight time of son can derive position in space when the ion generates, according to difference
The number of ions that time generates, can derive that corresponding space is ionized number of particles, the i.e. laser intensity of this position；By to sharp
Light intensity distributions are fitted processing, can derive laser center position, for the position of real-time monitoring transverse direction.
Specific operation process is as follows:
1, in-process measurement device vacuum part；Vacuum chamber 11, vacuum measurement component 12, vacuum generator 13, air charging system 14
The combination of four parts can obtain arbitrarily desired equally distributed gas density, can be obtained by changing gas different in 14
Obtain the environment of gas with various.
2, ion Transmission system is installed；Positive voltage pole plate 21 is installed and negative voltage pole plate 22, positive voltage pole plate 21 are simple
Metal plate, conducting wire is drawn by vacuum feedthroughs device and is connected outside vacuum cavity with power supply 23, negative voltage pole plate 22 is centre
There is the wire-grid structure of certain transmitance in region, can not only guarantee electric fields uniform, but also can guarantee that cation can be with certain proportion
Fly out ionized space.
3, ion flight time detector is installed；A piece of microchannel plate 31 is installed.
4, high speed acquisition system is installed；The signal of microchannel plate 31 is inputted into high-speed signal acquisition by vacuum feedthroughs device
Card；
5, log-on data processing system adjusts two-plate voltage, gas pressure intensity and high-speed collection card synchronization time, to obtain
Clearly there is the ion flight time spectrum being centainly distributed, by Mathematical treatment, obtain the cross direction profiles information of vacuum-ultraviolet light.
The collected ion flight time spectrum simple process of high speed data acquisition card of the present invention can be obtained vacuum ultraviolet
Light lateral dimension and location information.Voltage and high-speed collection card synchronization time obtain different between adjustable gas type, two-plate
The cross direction profiles information of the light of wavelength and varying strength.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention.It is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.
Claims (7)
1. being based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles characterized by comprising
Vacuum part, the vacuum part is interior to have vacuum chamber (11), and the wall of the vacuum chamber (11) is equipped with flange-interface, passes through method
Blue interface is equipped with vacuum generator (13), vacuum measurement component (12) and air charging system (14)；
The ion that photoelectricity to be measured separates out is transferred to ion flight time vertically and visited by ion Transmission system, the ion Transmission system
It surveys at device；
Ion flight time is converted to high speed acquisition system by ion flight time detector, the ion flight time detector
Collectable signal, the ion flight time detector are vertical with the holding of ion transmission direction；
High speed acquisition system, the high speed acquisition system is for acquiring signal；
Data processing system, the data processing system are used to derive ion and generate spatial position, the collected signal of fitting, into
And derive the cross direction profiles of light to be measured.
2. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the vacuum generator (13) is molecular pump.
3. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the vacuum measurement component (12) is vacuum gauge.
4. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the air charging system (14) is microleak valve or gas flowmeter.
5. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the ion Transmission system includes parallel electrode plate, and the parallel electrode plate is by positive voltage pole plate (21) and negative voltage pole
Plate (22) composition；The positive voltage pole plate (21) is simple metal plate, and the negative voltage pole plate (22) is that intermediate region has one
Determine the wire-grid structure of transmitance, the positive voltage pole plate (21) and negative voltage pole plate (22) are drawn conducting wire by vacuum feedthroughs device
Vacuum chamber (11) is connect with power supply (23) outside out.
6. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the ion flight time detector is microchannel plate (31).
7. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the high speed acquisition system is High-Speed Data Acquisition Board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711332510.9A CN109916509B (en) | 2017-12-13 | Vacuum ultraviolet light transverse distribution on-line measuring device based on time-of-flight spectrum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711332510.9A CN109916509B (en) | 2017-12-13 | Vacuum ultraviolet light transverse distribution on-line measuring device based on time-of-flight spectrum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109916509A true CN109916509A (en) | 2019-06-21 |
| CN109916509B CN109916509B (en) | 2024-10-22 |
Family
ID=
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110147578A1 (en) * | 2009-11-30 | 2011-06-23 | Ionwerks, Inc. | Time-of-flight spectrometry and spectroscopy of surfaces |
| US20120112077A1 (en) * | 2010-11-10 | 2012-05-10 | Ushio Denki Kabushiki Kaisha | Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device |
| CN204086141U (en) * | 2014-08-28 | 2015-01-07 | 中国科学院近代物理研究所 | Local laser mass spectrum spectroscopic simultaneous analyzer |
| CN104713642A (en) * | 2013-12-13 | 2015-06-17 | 中国科学院大连化学物理研究所 | Measurement device for absolute energy of vacuum ultraviolet laser |
| WO2017087456A1 (en) * | 2015-11-16 | 2017-05-26 | Micromass Uk Limited | Imaging mass spectrometer |
| CN207763825U (en) * | 2017-12-13 | 2018-08-24 | 中国科学院大连化学物理研究所 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110147578A1 (en) * | 2009-11-30 | 2011-06-23 | Ionwerks, Inc. | Time-of-flight spectrometry and spectroscopy of surfaces |
| US20120112077A1 (en) * | 2010-11-10 | 2012-05-10 | Ushio Denki Kabushiki Kaisha | Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device |
| CN104713642A (en) * | 2013-12-13 | 2015-06-17 | 中国科学院大连化学物理研究所 | Measurement device for absolute energy of vacuum ultraviolet laser |
| CN204086141U (en) * | 2014-08-28 | 2015-01-07 | 中国科学院近代物理研究所 | Local laser mass spectrum spectroscopic simultaneous analyzer |
| WO2017087456A1 (en) * | 2015-11-16 | 2017-05-26 | Micromass Uk Limited | Imaging mass spectrometer |
| CN207763825U (en) * | 2017-12-13 | 2018-08-24 | 中国科学院大连化学物理研究所 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207763825U (en) | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles | |
| Kalashnikov et al. | Diagnostics of peak laser intensity based on the measurement of energy of electrons emitted from laser focal region | |
| CN105572005A (en) | Light-scattering-method-based PM2.5 monitor calibration method and device | |
| CN102253029A (en) | Apparatus and method for measuring electron temperature of plasma in gas based on laser induction | |
| CN109916510A (en) | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles and method | |
| Wagner et al. | On the accuracy of ion measurements using a Neutral cluster and Air Ion Spectrometer | |
| CN107064753A (en) | Bow net arc-plasma Multi-parameter Data Acquisition method and apparatus | |
| CN109580569A (en) | The detection device of coating slurry | |
| CN108032145B (en) | Radio-frequency ion source work layout method | |
| CN110243723A (en) | A method of detection lithium battery positive-negative plate ceramic coating density | |
| CN109813711A (en) | A kind of method of determining throrium ore metallogenic geochronology | |
| CN207763824U (en) | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging | |
| KR20120052350A (en) | Device and method for measuring an energy particle beam | |
| CN109916507A (en) | The online measuring device of vacuum-ultraviolet light cross direction profiles and method based on ion imaging | |
| CN109916509A (en) | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles | |
| CN208443697U (en) | A kind of nano particle diameter distribution detector | |
| Shi et al. | Analysis of influence of RF power and buffer gas pressure on sensitivity of optically pumped cesium magnetometer | |
| CN109916509B (en) | Vacuum ultraviolet light transverse distribution on-line measuring device based on time-of-flight spectrum | |
| CN203881709U (en) | Recognition device for laser-induced damage of optical thin film | |
| CN102768235A (en) | Ray sensor for detecting surface density of pole piece of lithium ion battery | |
| Mazzoni et al. | JACoW: Progress on Transverse Beam Profile Measurement Using the Heterodyne Near Field Speckles Method at ALBA | |
| CN109916508A (en) | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging | |
| Holt et al. | An Investigation of (d, p) Stripping Reactions I: Apparatus and Results for Aluminium | |
| Patrick et al. | Laboratory study of turbulence in collision‐free shocks | |
| CN108663295B (en) | Nanoparticle particle size distribution tester and testing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |