CN207763824U - The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging - Google Patents
The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging Download PDFInfo
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- CN207763824U CN207763824U CN201721737016.6U CN201721737016U CN207763824U CN 207763824 U CN207763824 U CN 207763824U CN 201721737016 U CN201721737016 U CN 201721737016U CN 207763824 U CN207763824 U CN 207763824U
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- vacuum
- ion
- cross direction
- direction profiles
- ultraviolet light
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Measurement Of Radiation (AREA)
Abstract
The utility model discloses the online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging, the measuring device includes：Vacuum part, ion Transmission system, ion position detector, optical transmission system, image capturing system, data processing system.The utility model can be by changing gaseous species, the online cross direction profiles for measuring vacuum-ultraviolet light.It can ensure that measuring signal is maintained at optimum range by the gaseous species for choosing different, simultaneously as the sensitivity of ion detector is very high, and is not influenced by external electromagnetic signal and mechanical oscillation, very high measurement accuracy can be obtained.
Description
Technical field
The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging that the utility model is related to a kind of.
Background technology
In vacuum ultraviolet energy area (the utility model middle finger 50-150nm ranges), since air is strong to the absorption of light, very
The experiment in empty ultraviolet wastewater area must be completed under vacuum.In order to obtain vacuum-ultraviolet light size and position data, usually adopt
With scintillation crystal (generally Ce:YAG the method for) directly observing fluorescence or metal blade cutting measurement photoelectric effect electric current.
Scintillation crystal is a kind of a kind of crystal having fluorescence response to incident light, and fluorescence efficiency at different wavelengths has very
Big difference, this feature causes the dynamic range that can measure wavelength smaller, and can lead to size at the low wavelength of efficiency
Measurement result is less than normal, and in addition such method is the measurement method of intercept type, is unable to real-time online measuring parameter, and for a light
For source, real time position parameter is a very important parameter.
According to photoelectric effect, when metal is hit by high-energy photons, can fly out free electron, and metal blade cutting measures
Method is used with this principle.Although metal blade cutting, which measures photoelectric effect current methods, can ensure to measure wavelength dynamic
Range is big, however, to ensure that light beam can be more as possible is transferred to below, metal blade needs cutting beam as few as possible,
Cause photoelectric effect electric current very faint, and the measurement difficulty of weak current (generally in pico-ampere magnitude) is larger, external electromagnetic ring
Border, the unstable ambient environment such as mechanical oscillation has very big interference to measured value, so precision is difficult to ensure.
Utility model content
The purpose of this utility model is to provide a kind of vacuum-ultraviolet light cross direction profiles based on ion imaging and measures dress online
It sets.
The technical solution of the utility model is：The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging,
Including：
Vacuum part, the vacuum part is interior, and there is vacuum chamber 11, the wall of the vacuum chamber 11 to be equipped with flange-interface, pass through method
Blue interface is equipped with vacuum generator 13, vacuum measurement component 12 and air charging system 14；Three's combination can be used for accurately controlling
Gas pressure intensity in measuring device；
The ion that photoelectricity to be measured separates out is transferred to ion position and visited by ion Transmission system, the ion Transmission system vertically
It surveys at device；
Ion position detector, it is collectable that ion position is converted to image capturing system by the ion position detector
Signal, the ion position detector are vertical with the holding of ion transmission direction；
Optical transmission system, the optical transmission system can shield miscellaneous signal that external stray light may introduce to measuring
As a result influence；
Image capturing system, described image acquisition system is for acquiring and handling signal；
Data processing system, the data processing system are used for being fitted collected signal, determine the transverse direction of ion signal
Distribution, and then derive the cross direction profiles of light to be measured.
Preferably, the vacuum generator 13 is molecular pump.
Preferably, the vacuum measurement component 12 is vacuum gauge.
Preferably, the air charging system 14 is microleak valve or gas flowmeter.
Preferably, the ion Transmission system includes parallel electrode plate, and the parallel electrode plate is by 21 He of positive voltage pole plate
Negative voltage pole plate 22 forms；The positive voltage pole plate 21 is simple metallic plate, and the negative voltage pole plate 22 has for intermediate region
The wire-grid structure of certain transmitance, can not only ensure electric fields uniform, but also can ensure that cation can be flown out electricity with certain proportion
From region, the positive voltage pole plate 21 and negative voltage pole plate 22 are outer and electric by conducting wire extraction vacuum chamber 11 by vacuum feedthroughs device
Source 23 connects.
Preferably, the ion position detector is made of two panels microchannel plate 31 and a piece of phosphorescent screen 32.
Preferably, the optical transmission system is the cone 41 of inner wall black.
Preferably, described image acquisition system includes CCD51 and computer 52, and Image Acquisition is equipped in the computer 52
Card.
The utility model has following beneficial effect：
The utility model can be by changing gaseous species, the online cross direction profiles for measuring vacuum-ultraviolet light.Pass through choosing
Take different gaseous species that can ensure that measuring signal is maintained at optimum range, simultaneously as the sensitivity of ion detector is very
Height, and do not influenced by external electromagnetic signal and mechanical oscillation, very high measurement accuracy can be obtained.
Description of the drawings
Fig. 1 is the online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging in the utility model embodiment
Structural schematic diagram；
In figure：11, vacuum chamber；12, vacuum measurement component；13, vacuum generator；14, air charging system；21, positive voltage pole
Plate；22, negative voltage pole plate；23, power supply；31, microchannel plate；32, phosphorescent screen；41, cone；51、CCD；52, computer.
Specific implementation mode
The utility model is described in detail with reference to the accompanying drawings and examples.
The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging, including：
Vacuum part, vacuum part is interior, and there is vacuum chamber 11, the wall of vacuum chamber 11 to be equipped with flange-interface, be pacified by flange-interface
Equipped with vacuum generator 13, vacuum measurement component 12 and air charging system 14；Three's combination can be used for accurately controlling measuring device
Interior gas pressure intensity；
The ion that photoelectricity to be measured separates out is transferred to ion position detector by ion Transmission system, ion Transmission system vertically
Place；
Ion position is converted to the collectable letter of image capturing system by ion position detector, ion position detector
Number, ion position detector is vertical with the holding of ion transmission direction；
Optical transmission system, optical transmission system can shield miscellaneous signal that external stray light may introduce to measurement result
Influence；
Image capturing system, image capturing system is for acquiring and handling signal；
Data processing system, data processing system are used for being fitted collected signal, determine the cross direction profiles of ion signal,
And then derive the cross direction profiles of light to be measured.
Wherein：Vacuum generator 13 be molecular pump, vacuum measurement component 12 be vacuum gauge, air charging system 14 be microleak valve or
Gas flowmeter.Ion Transmission system includes parallel electrode plate, and parallel electrode plate is by positive voltage pole plate 21 and negative voltage pole
Plate 22 forms；Positive voltage pole plate 21 is simple metallic plate, and negative voltage pole plate 22 is the aperture plate that there is certain transmitance in intermediate region
Structure can not only ensure electric fields uniform, but also can ensure that cation can be flown out ionized space with certain proportion, positive voltage pole plate
21 and negative voltage pole plate 22 conducting wire drawn to vacuum chamber 11 is outer to be connect with power supply 23 by vacuum feedthroughs device.Ion position detects
Device is made of two panels microchannel plate 31 and a piece of phosphorescent screen 32.Optical transmission system is the cone 41 of inner wall black.Image is adopted
Collecting system includes CCD51 and computer 52, and image pick-up card is equipped in computer 52.
Measurement method is：
Vacuum-ultraviolet light is incident in measuring device, minimum gas is filled in measuring device, gaseous species are by wave to be measured
It is long to determine；Add certain bias in ion Transmission system, forms a uniform electric field, uniform electric field is vacuum ultraviolet ionized gas
The cation that body obtains pulls out ionized space, flies towards ion position detector and bumps against ion position detector lower surface, from
Sub- position sensor can show the corresponding position of the ion on fluorescent screen, and with image capturing system, in upper surface, observation can be with
See ionic bombardment position, clearly cross direction profiles information can be obtained by adjusting the image capturing system time for exposure.
Specific operation process is as follows：
1, in-process measurement device vacuum part；Vacuum chamber 11, vacuum measurement component 12, vacuum generator 13, air charging system 14
The combination of four parts can obtain arbitrarily desired equally distributed gas density, can be obtained by changing gas different in 14
Obtain the environment of gas with various.
2, ion Transmission system is installed；It is simple to install positive voltage pole plate 21 and negative voltage pole plate 22, positive voltage pole plate 21
Metallic plate, conducting wire is drawn by vacuum feedthroughs device and is connect with power supply 23 outside vacuum cavity；Negative voltage pole plate 22 is centre
There is the wire-grid structure of certain transmitance in region, can not only ensure electric fields uniform, but also can ensure that cation can be with certain proportion
Fly out ionized space.
3, ion position detector is installed；Two panels microchannel plate 31 and a piece of phosphorescent screen 32 are installed.
4, optical transmission system is installed；Optical transmission system is the cone 41 of inner wall black；
5, image capturing system is installed；CCD 51 is installed on 32 side of phosphorescent screen except vacuum part 11, and cone 41 is used in combination
It is closed, to ensure that the data lines of CCD 51 are connected with computer 52, for acquiring and handling signal without stray light.
6, log-on data processing system adjusts two-plate voltage, gas pressure intensity and CCD time for exposure, to obtain clearly
The cross direction profiles information of vacuum-ultraviolet light is obtained by Mathematical treatment with the image information being centainly distributed.
CCD the image collected simple process can be obtained vacuum-ultraviolet light horizontal direction size and position in the utility model
Confidence ceases.Voltage and CCD time for exposure obtain the cross of the light of different wave length and varying strength between adjustable gas type, two-plate
To distributed intelligence.
Above-described embodiment is only the technical concepts and features for illustrating the utility model, and its object is to allow be familiar with technique
Personage can understand the content of the utility model and implement according to this, the scope of protection of the utility model can not be limited with this.
It is all according to equivalent change or modification made by the spirit of the present invention essence, should all cover the scope of protection of the utility model it
It is interior.
Claims (8)
1. the online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging, which is characterized in that including：
Vacuum part, the vacuum part is interior, and there is vacuum chamber (11), the wall of the vacuum chamber (11) to be equipped with flange-interface, pass through method
Blue interface is equipped with vacuum generator (13), vacuum measurement component (12) and air charging system (14)；
The ion that photoelectricity to be measured separates out is transferred to ion position detector by ion Transmission system, the ion Transmission system vertically
Place；
Ion position is converted to the collectable letter of image capturing system by ion position detector, the ion position detector
Number, the ion position detector is vertical with the holding of ion transmission direction；
Optical transmission system, the optical transmission system can shield miscellaneous signal that external stray light may introduce to measurement result
Influence；
Image capturing system, described image acquisition system is for acquiring and handling signal；
Data processing system, the data processing system are used for being fitted collected signal, determine the cross direction profiles of ion signal,
And then derive the cross direction profiles of light to be measured.
2. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, the vacuum generator (13) is molecular pump.
3. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, the vacuum measurement component (12) is vacuum gauge.
4. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, the air charging system (14) is microleak valve or gas flowmeter.
5. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, the ion Transmission system includes parallel electrode plate, and the parallel electrode plate is by positive voltage pole plate (21) and negative voltage pole
Plate (22) forms；The positive voltage pole plate (21) is simple metallic plate, and the negative voltage pole plate (22), which is intermediate region, one
Determine the wire-grid structure of transmitance, the positive voltage pole plate (21) and negative voltage pole plate (22) are drawn conducting wire by vacuum feedthroughs device
Go out vacuum chamber (11) to connect with power supply (23) outside.
6. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, the ion position detector is made of two panels microchannel plate (31) and a piece of phosphorescent screen (32).
7. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, the optical transmission system is the cone (41) of inner wall black.
8. the vacuum-ultraviolet light cross direction profiles online measuring device according to claim 1 based on ion imaging, feature
It is, described image acquisition system includes CCD (51) and computer (52), and image pick-up card is equipped in the computer (52).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721737016.6U CN207763824U (en) | 2017-12-13 | 2017-12-13 | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721737016.6U CN207763824U (en) | 2017-12-13 | 2017-12-13 | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging |
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| CN207763824U true CN207763824U (en) | 2018-08-24 |
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| CN201721737016.6U Expired - Fee Related CN207763824U (en) | 2017-12-13 | 2017-12-13 | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109916508A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging |
| CN109916507A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | The online measuring device of vacuum-ultraviolet light cross direction profiles and method based on ion imaging |
-
2017
- 2017-12-13 CN CN201721737016.6U patent/CN207763824U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109916508A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging |
| CN109916507A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | The online measuring device of vacuum-ultraviolet light cross direction profiles and method based on ion imaging |
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Granted publication date: 20180824 Termination date: 20211213 |