CN207763825U - Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles - Google Patents
Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles Download PDFInfo
- Publication number
- CN207763825U CN207763825U CN201721737534.8U CN201721737534U CN207763825U CN 207763825 U CN207763825 U CN 207763825U CN 201721737534 U CN201721737534 U CN 201721737534U CN 207763825 U CN207763825 U CN 207763825U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- ion
- cross direction
- time
- ultraviolet light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The utility model discloses one kind being based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, and the measuring device includes：Vacuum part, ion Transmission system, ion flight time detector, high speed acquisition system, data processing system.The utility model can be by changing gaseous species, the online cross direction profiles for measuring vacuum-ultraviolet light.It can ensure that measuring signal is maintained at optimum range by the gaseous species for choosing different, simultaneously as the sensitivity of ion detector is very high, and is not influenced by external electromagnetic signal and mechanical oscillation, very high measurement accuracy can be obtained.
Description
Technical field
The utility model is related to one kind being based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles.
Background technology
In vacuum ultraviolet energy area (the utility model middle finger 50-150nm ranges), since air is strong to the absorption of light, very
The experiment in empty ultraviolet wastewater area must be completed under vacuum.In order to obtain vacuum-ultraviolet light distributed data, generally use flicker
Crystal (generally Ce:YAG the method for) directly observing fluorescence or metal blade cutting measurement photoelectric effect electric current.
The fluorescence efficiency of scintillation crystal at different wavelengths has prodigious difference, causes to can measure the not big dynamic of wavelength
Range, and distribution measuring results can be caused less than normal at the low wavelength of efficiency, in addition such method is the measurement side of intercept type
Method is unable to real-time online measuring parameter.Although metal blade cutting, which measures photoelectric effect current methods, can ensure to measure wavelength
Dynamic range is big, but the measurement difficulty of weak current (generally in pico-ampere magnitude) is larger, and external environment has measured value very big
Interference, so precision is difficult to ensure, this method can only measure the boundary information of hot spot in addition, cannot obtain point of entire hot spot
Cloth information.
Utility model content
The purpose of this utility model is to provide one kind and measuring dress online based on time of flight spectrum vacuum-ultraviolet light cross direction profiles
It sets.
The technical solution of the utility model is：Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles,
Including：
Vacuum part, the vacuum part is interior, and there is vacuum chamber 11, the wall of the vacuum chamber 11 to be equipped with flange-interface, pass through method
Blue interface is equipped with vacuum generator 13, vacuum measurement component 12 and air charging system 14；Three's combination can be used for accurately controlling
Gas pressure intensity in measuring device；
Ion Transmission system, when the ion that photoelectricity to be measured separates out is transferred to ion flight by the ion Transmission system vertically
Between at detector；
Ion flight time is converted to high speed acquisition by ion flight time detector, the ion flight time detector
The collectable signal of system, the ion flight time detector are vertical with the holding of ion transmission direction；
High speed acquisition system, the high speed acquisition system is for acquiring signal；
Data processing system, the data processing system are used for deriving ion and generate spatial position, the collected letter of fitting
Number, and then derive the cross direction profiles of light to be measured.
Preferably, the vacuum generator 13 is molecular pump.
Preferably, the vacuum measurement component 12 is vacuum gauge.
Preferably, the air charging system 14 is microleak valve or gas flowmeter.
Preferably, the ion Transmission system includes parallel electrode plate, and the parallel electrode plate is by 21 He of positive voltage pole plate
Negative voltage pole plate 22 forms；The positive voltage pole plate 21 is simple metallic plate, and the negative voltage pole plate 22 has for intermediate region
The wire-grid structure of certain transmitance, the positive voltage pole plate 21 and negative voltage pole plate 22 are drawn conducting wire by vacuum feedthroughs device
Vacuum chamber 11 is outer to be connect with power supply 23.
Preferably, the ion flight time detector is microchannel plate 31.
Preferably, the high speed acquisition system is High-Speed Data Acquisition Board.
The utility model has following beneficial effect：
The utility model can be by changing gaseous species, the online cross direction profiles for measuring vacuum-ultraviolet light.Pass through choosing
Take different gaseous species that can ensure that measuring signal is maintained at optimum range, simultaneously as the sensitivity of ion detector is very
Height, and do not influenced by external electromagnetic signal and mechanical oscillation, very high measurement accuracy can be obtained.
Description of the drawings
Fig. 1 is in the utility model embodiment based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles
Structural schematic diagram；
In figure：11, vacuum chamber；12, vacuum measurement component；13, vacuum generator；14, air charging system；21, positive voltage pole
Plate；22, negative voltage pole plate；23, power supply；31, microchannel plate；4, computer.
Specific implementation mode
The utility model is described in detail with reference to the accompanying drawings and examples.
Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, including：
Vacuum part, vacuum part is interior, and there is vacuum chamber 11, the wall of vacuum chamber 11 to be equipped with flange-interface, be pacified by flange-interface
Equipped with vacuum generator 13, vacuum measurement component 12 and air charging system 14；Three's combination can be used for accurately controlling measuring device
Interior gas pressure intensity；
The ion that photoelectricity to be measured separates out is transferred to ion flight time and visited by ion Transmission system, ion Transmission system vertically
It surveys at device；
Ion flight time is converted to high speed acquisition system by ion flight time detector, ion flight time detector
Collectable signal, ion flight time detector are vertical with the holding of ion transmission direction；
High speed acquisition system, high speed acquisition system is for acquiring signal；
Data processing system, data processing system are used for deriving ion and generate spatial position, the collected signal of fitting, into
And derive the cross direction profiles of light to be measured.
Wherein：Vacuum generator 13 be molecular pump, vacuum measurement component 12 be vacuum gauge, air charging system 14 be microleak valve or
Gas flowmeter.Ion Transmission system includes parallel electrode plate, and parallel electrode plate is by positive voltage pole plate 21 and negative voltage pole
Plate 22 forms；Positive voltage pole plate 21 is simple metallic plate, and negative voltage pole plate 22 is the aperture plate that there is certain transmitance in intermediate region
Structure, positive voltage pole plate 21 and negative voltage pole plate 22, which are drawn conducting wire by vacuum feedthroughs device, to be connected outside vacuum chamber 11 with power supply 23
It connects.Ion flight time detector is microchannel plate 31.High speed acquisition system is High-Speed Data Acquisition Board.High speed acquisition system and
Data processing system is integrated into inside computer 4.
Measurement method is：
Vacuum-ultraviolet light is incident in measuring device, minimum gas is filled in measuring device, gaseous species are by wave to be measured
It is long to determine；Add certain bias in ion Transmission system, forms a uniform electric field, uniform electric field is vacuum ultraviolet ionized
Gas cation pulls out ionized space, flies towards ion flight time detector and bumps against ion flight time detector following table
Face, ion flight time detector output end can the output phase induced current, with high-speed collection card acquire output end electric current, according to from
Quality, accelerating potential and the ion flight time of son can derive position in space when the ion generates, according to difference
The number of ions that time generates, can derive that corresponding space is ionized number of particles, the i.e. laser intensity of this position；By to swashing
Light intensity distributions are fitted processing, can derive laser center position, are used for the position that monitoring is lateral in real time.
Specific operation process is as follows：
1, in-process measurement device vacuum part；Vacuum chamber 11, vacuum measurement component 12, vacuum generator 13, air charging system 14
The combination of four parts can obtain arbitrarily desired equally distributed gas density, can be obtained by changing gas different in 14
Obtain the environment of gas with various.
2, ion Transmission system is installed；It is simple to install positive voltage pole plate 21 and negative voltage pole plate 22, positive voltage pole plate 21
Metallic plate, conducting wire is drawn by vacuum feedthroughs device and is connected with power supply 23 outside vacuum cavity, negative voltage pole plate 22 is centre
There is the wire-grid structure of certain transmitance in region, can not only ensure electric fields uniform, but also can ensure that cation can be with certain proportion
Fly out ionized space.
3, ion flight time detector is installed；A piece of microchannel plate 31 is installed.
4, high speed acquisition system is installed；The signal of microchannel plate 31 is inputted into high-speed signal acquisition by vacuum feedthroughs device
Card；
5, log-on data processing system adjusts two-plate voltage, gas pressure intensity and high-speed collection card synchronization time, to obtain
Clearly there is the ion flight time spectrum being centainly distributed, by Mathematical treatment, obtain the cross direction profiles information of vacuum-ultraviolet light.
The collected ion flight time spectrum simple process of the utility model high speed data acquisition card can be obtained vacuum
Ultraviolet light lateral dimension and location information.Voltage and high-speed collection card obtain synchronization time between adjustable gas type, two-plate
The cross direction profiles information of the light of different wave length and varying strength.
Above-described embodiment is only the technical concepts and features for illustrating the utility model, and its object is to allow be familiar with technique
Personage can understand the content of the utility model and implement according to this, the scope of protection of the utility model can not be limited with this.
It is all according to equivalent change or modification made by the spirit of the present invention essence, should all cover the scope of protection of the utility model it
It is interior.
Claims (7)
1. being based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, which is characterized in that including：
Vacuum part, the vacuum part is interior, and there is vacuum chamber (11), the wall of the vacuum chamber (11) to be equipped with flange-interface, pass through method
Blue interface is equipped with vacuum generator (13), vacuum measurement component (12) and air charging system (14)；
The ion that photoelectricity to be measured separates out is transferred to ion flight time and visited by ion Transmission system, the ion Transmission system vertically
It surveys at device；
Ion flight time is converted to high speed acquisition system by ion flight time detector, the ion flight time detector
Collectable signal, the ion flight time detector are vertical with the holding of ion transmission direction；
High speed acquisition system, the high speed acquisition system is for acquiring signal；
Data processing system, the data processing system are used for deriving ion and generate spatial position, the collected signal of fitting, into
And derive the cross direction profiles of light to be measured.
2. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the vacuum generator (13) is molecular pump.
3. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the vacuum measurement component (12) is vacuum gauge.
4. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the air charging system (14) is microleak valve or gas flowmeter.
5. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the ion Transmission system includes parallel electrode plate, and the parallel electrode plate is by positive voltage pole plate (21) and negative voltage pole
Plate (22) forms；The positive voltage pole plate (21) is simple metallic plate, and the negative voltage pole plate (22), which is intermediate region, one
Determine the wire-grid structure of transmitance, the positive voltage pole plate (21) and negative voltage pole plate (22) are drawn conducting wire by vacuum feedthroughs device
Go out vacuum chamber (11) to connect with power supply (23) outside.
6. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the ion flight time detector is microchannel plate (31).
7. according to claim 1 be based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles, feature
It is, the high speed acquisition system is High-Speed Data Acquisition Board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721737534.8U CN207763825U (en) | 2017-12-13 | 2017-12-13 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721737534.8U CN207763825U (en) | 2017-12-13 | 2017-12-13 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207763825U true CN207763825U (en) | 2018-08-24 |
Family
ID=63186871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721737534.8U Expired - Fee Related CN207763825U (en) | 2017-12-13 | 2017-12-13 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207763825U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109916510A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles and method |
| CN109916509A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
| CN112130192A (en) * | 2020-09-14 | 2020-12-25 | 中国科学院国家空间科学中心 | Anti-interference method and system for space neutral atomic composition analyzer |
-
2017
- 2017-12-13 CN CN201721737534.8U patent/CN207763825U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109916510A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles and method |
| CN109916509A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles |
| CN112130192A (en) * | 2020-09-14 | 2020-12-25 | 中国科学院国家空间科学中心 | Anti-interference method and system for space neutral atomic composition analyzer |
| CN112130192B (en) * | 2020-09-14 | 2021-04-09 | 中国科学院国家空间科学中心 | Anti-interference method and system for space neutral atomic composition analyzer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207763825U (en) | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles | |
| CN103575638B (en) | A kind of light scattering type particle counter and size distribution algorithm thereof | |
| CN102706914B (en) | Measurement system and measurement method of secondary electron emission yield of dielectric material | |
| CN104165639B (en) | A kind of method and device of X-ray pulse detector test calibration light source | |
| CN107329006A (en) | A kind of microwave electric field strength measurement method and measurement apparatus | |
| CN102253029A (en) | Apparatus and method for measuring electron temperature of plasma in gas based on laser induction | |
| Kalashnikov et al. | Diagnostics of peak laser intensity based on the measurement of energy of electrons emitted from laser focal region | |
| CN109916510A (en) | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles and method | |
| CN207763824U (en) | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging | |
| CN110243723A (en) | A method of detection lithium battery positive-negative plate ceramic coating density | |
| CN208443697U (en) | A kind of nano particle diameter distribution detector | |
| CN109916509A (en) | Based on the online measuring device of time of flight spectrum vacuum-ultraviolet light cross direction profiles | |
| CN106547016B (en) | A kind of ion gun beam diagnostics emittance instrument probe | |
| CN109916507A (en) | The online measuring device of vacuum-ultraviolet light cross direction profiles and method based on ion imaging | |
| Shi et al. | Analysis of influence of RF power and buffer gas pressure on sensitivity of optically pumped cesium magnetometer | |
| CN108169803B (en) | A kind of broadband measurement system and method for alternating magnetic field | |
| Mazzoni et al. | JACoW: Progress on Transverse Beam Profile Measurement Using the Heterodyne Near Field Speckles Method at ALBA | |
| CN107462896B (en) | Pulse laser lateral capturing and measuring system and method | |
| CN110095806A (en) | A kind of scintillator response upper limit measuring system and method based on electronic beam current | |
| CN109916508A (en) | The online measuring device of vacuum-ultraviolet light cross direction profiles based on ion imaging | |
| CN102841368B (en) | Method and system for measuring relation curve between charge number collected by gas nuclear radiation detector and applied voltage | |
| CN205027442U (en) | Strong laser power density appearance of high accuracy | |
| CN108663295B (en) | Nanoparticle particle size distribution tester and testing method | |
| CN210514594U (en) | Magnetic field measuring device | |
| CN207811262U (en) | A kind of nanometer of mass spectrograph |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180824 Termination date: 20211213 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |