CN112705543A - Anti-vibration liquid inlet system and method for wet cleaning equipment - Google Patents
Anti-vibration liquid inlet system and method for wet cleaning equipment Download PDFInfo
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- CN112705543A CN112705543A CN202011632278.2A CN202011632278A CN112705543A CN 112705543 A CN112705543 A CN 112705543A CN 202011632278 A CN202011632278 A CN 202011632278A CN 112705543 A CN112705543 A CN 112705543A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses an anti-vibration liquid inlet system of wet cleaning equipment, which comprises an installation frame, a valve fixing plate and a heater fixing plate, wherein the valve fixing plate and the heater fixing plate are fixedly arranged on the installation frame, the valve fixing plate is arranged on two sides of the installation frame, the heater fixing plate is arranged on the top of the installation frame, an adjusting electromagnetic valve is integrally arranged on the valve fixing plate, a heater is arranged on the heater fixing plate, a filter is arranged on the side of the heater, and a medium delivery pump is arranged at the bottom of the installation frame and is positioned between the heater and the filter. According to the invention, the valves are integrally arranged on the valve fixing plate, the heater is arranged on the heater fixing plate, and then the valve fixing plate and the heater fixing plate are arranged on the installation frame body, so that the installation stability of the liquid inlet device can be effectively improved, and bubbles generated during liquid medium transmission can be avoided.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and particularly relates to an anti-vibration liquid inlet system and method for wet cleaning equipment.
Background
In the working process of semiconductor wet equipment, acid liquor, alkali liquor and organic liquid are used, and liquid solution or gas solute needs to be transported by a pump or other conversion transport media. In the process of conveying the medium, the medium needs to pass through a plurality of pipelines and a plurality of conveying devices, a pump, a heating device and a valve piece can generate a large amount of vibration in the operation process, bubbles can be generated in a liquid solution or the condition of non-uniformity of liquid occurs due to the generation of vibration, the cleaning liquid is invalid, the cleaning quality of a wafer product is influenced, a cleaning blind area is formed on the surface of the wafer product, and then the wafer product is invalid.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides an anti-vibration liquid inlet system of wet cleaning equipment, which can ensure the liquid inlet stability of the wet cleaning equipment, improve the stability of a cleaning solution and ensure the cleaning quality of a wafer product. In addition, the invention also provides an anti-vibration liquid inlet method for the wet cleaning equipment.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides an anti-vibration liquid inlet system of wet cleaning equipment, which adopts an anti-vibration liquid inlet system, the anti-vibration liquid inlet system comprises an acid liquid inlet pipeline, a pure water inlet pipeline, a liquid distribution tank, a medium delivery pump, a heater, a filter, a liquid discharge pipeline and an adjusting valve, wherein the inlet of the acid liquid inlet pipeline is connected with an external liquid supply system, the pure water inlet pipeline is connected with pure water, the outlets of the acid liquid inlet pipeline and the pure water inlet pipeline are connected with the inlet of the liquid distribution tank, the outlet of the liquid distribution tank is connected with the inlet of the medium delivery pump through a first delivery pipeline, a concentration detector is arranged in the liquid distribution tank, the outlet of the medium delivery pump is connected with the inlet of the heater through a second delivery pipeline, the outlet of the heater is connected with the inlet of the filter through a third delivery pipeline, and a temperature sensor is arranged, the outlet of the filter is connected with the cleaning tank through a liquid discharge pipeline, the liquid inlet pipeline, the first conveying pipeline, the second conveying pipeline, the third conveying pipeline and the liquid discharge pipeline are all provided with adjusting electromagnetic valves, and the adjusting electromagnetic valves, the concentration detector and the temperature sensor are connected with a PLC (programmable logic controller);
still include installation frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the installation frame, the valve member fixed plate install in the both sides of installation frame, the heater fixed plate install in the top of installation frame, the regulation solenoid valve is integrated install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the axis of filter the axis of heater the triangle-shaped structure is formed between the third conveying pipeline, the medium delivery pump install in the bottom of installation frame is located the heater with between the filter.
According to the preferable technical scheme, a filter mounting frame is arranged at the top of the filter, the filter mounting frame is of a U-shaped structure, a clamping groove is formed in the bottom of the filter mounting frame, the top of the filter is fixed in the clamping groove, and the top of the filter mounting frame is mounted on a main frame of the wet process equipment.
As the preferred technical scheme, a plastic movable clamp spring is arranged between the filter and the filter mounting frame.
Preferably, the valve fixing plate, the heater, and the main frame are mounted in a bolt-nut manner, the bolt is a buffer nut, and triangular buffer teeth are disposed on two sides of the buffer nut along a circumferential direction of the nut body.
As a preferred technical solution, one side of the mounting frame close to the heater fixing plate is provided with a valve fixing plate, and the other side is provided with two valve fixing plates.
As a preferred technical scheme, the installation frame is installed in the cleaning unit of wet cleaning equipment, and each cleaning unit is provided with 1 or 2 anti-vibration liquid inlet systems.
In a second aspect of the present invention, an anti-vibration liquid inlet method for a wet cleaning apparatus is provided, where the anti-vibration liquid inlet system for the wet cleaning apparatus includes the following steps:
firstly, conveying acid liquid and pure water into a liquid preparation tank according to a specific proportion through an acid liquid inlet pipeline and a pure water inlet pipeline, and mixing the acid liquid and the pure water in the liquid preparation tank;
secondly, the concentration detector detects the concentration of the acid liquor in the liquor blending tank in real time, and feeds a concentration signal back to the PLC, and the PLC controls the opening angles of the electromagnetic valves on the acid liquor inlet pipeline and the pure water inlet pipeline according to concentration information;
thirdly, conveying the mixed cleaning liquid in the liquid preparation tank to a cleaning tank through a medium conveying pump, a heater and a filter in sequence by a liquid discharge pipeline;
and step four, sensing the temperature signal of the cleaning liquid in real time by the temperature sensor and feeding the temperature signal back to the PLC, and controlling the temperature of the heater by the PLC according to the temperature information.
As a preferred technical scheme, in the second step, the acid liquor inlet pipeline and the pure water inlet pipeline are connected to the main liquid distribution tank, the acid liquor and the pure water are mixed in the main liquid distribution tank and then enter the auxiliary liquid distribution tank, an outlet of the main liquid distribution tank and an outlet of the auxiliary liquid distribution tank are connected with a liquid inlet end of the first conveying pipeline through two branch pipes, adjusting electromagnetic valves are arranged at an outlet of the main liquid distribution tank and an outlet of the auxiliary liquid distribution tank, and the mixed cleaning solution is conveyed to the first conveying pipeline through the auxiliary liquid distribution tank in a normal working state.
Preferably, if the flow value of the first delivery line is smaller than the set value, the regulating solenoid valves at the outlet of the main liquid mixing tank and the outlet of the auxiliary liquid mixing tank are opened simultaneously.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the invention, the valves are integrally arranged on the valve fixing plate, the heater is arranged on the heater fixing plate, and then the valve fixing plate and the heater fixing plate are arranged on the installation frame body, so that the installation stability of the liquid inlet device can be effectively improved, and bubbles generated during liquid medium transmission can be avoided.
(2) According to the invention, a triangular structure is formed among the filter, the heater and the third conveying pipeline, so that simple harmonic vibration generated by equipment can be effectively absorbed, and the vibration of the equipment can be effectively relieved.
(3) According to the invention, the buffer nut is arranged, and the triangular buffer teeth are arranged on the two sides of the buffer nut, so that the stress generated by vibration can be effectively dispersed, the vibration is prevented from being transmitted among different structures, and the stability of the liquid inlet device is improved.
(4) According to the invention, the filter mounting frame is arranged, the top of the filter is fixed on the main frame through the filter mounting frame, and the medium delivery pump is arranged at the bottom of the mounting frame, so that the gravity center of the whole device is reduced, and the liquid inlet device is prevented from shaking back and forth in the working process.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an anti-vibration liquid inlet system of a wet cleaning device according to the present invention.
Fig. 2 is a second schematic structural diagram of the anti-vibration liquid inlet system of the wet cleaning equipment of the present invention.
Fig. 3 is a third schematic structural view of the anti-vibration liquid inlet system of the wet cleaning apparatus of the present invention.
Fig. 4 is an explosion-proof schematic diagram of the anti-vibration liquid inlet system of the wet cleaning equipment.
Fig. 5 is a schematic structural diagram of a buffer nut in the anti-vibration liquid inlet system of the wet cleaning equipment of the invention.
Wherein the reference numerals are specified as follows: the device comprises an installation frame 1, a valve fixing plate 2, a heater fixing plate 3, a medium conveying pump 4, a heater 5, a filter 6, an acid liquor inlet pipeline 7, a pure water inlet pipeline 8, a first conveying pipeline 9, a second conveying pipeline 10, a third conveying pipeline 11, a liquid discharge pipeline 12, a filter installation frame 13, a buffer nut 14 and triangular buffer teeth 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
Example 1
The embodiment provides a vibration-proof liquid inlet system of wet cleaning equipment, which is used for solving the problem that pipelines and parts are easy to vibrate in the wet cleaning equipment in the prior art. And each cleaning unit of the wet cleaning equipment is provided with 1 or 2 liquid inlet systems.
The anti-vibration liquid inlet system of the wet cleaning equipment comprises a liquid inlet pipeline, a liquid distribution tank, a medium delivery pump 4, a heater 5, a filter 6, a liquid discharge pipeline 12 and an adjusting electromagnetic valve. The liquid inlet pipeline comprises two liquid inlet pipelines, namely an acid liquid inlet pipeline 7 and a pure water inlet pipeline 8, a liquid inlet of the acid liquid inlet pipeline 7 is connected with an acid supply system at the front end, a liquid inlet of the pure water inlet pipeline 8 is connected with pure water, and the acid liquid inlet pipeline 7 and the pure water inlet pipeline 8 are both provided with adjusting electromagnetic valves for adjusting the proportion of acid liquid to pure water. The outlet of the acid liquor inlet pipeline 7 and the outlet of the pure water inlet pipeline 8 are both connected with the inlet of the liquid preparation tank, and the acid liquor and the pure water are uniformly mixed in the liquid preparation tank. The acid liquor inlet pipeline 7 and the pure water inlet pipeline 8 are both connected with a main liquid distribution tank, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid inlet ends of the first conveying pipelines 9 through two branch pipes, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with adjusting electromagnetic valves, and the opening and closing or the opening size of the adjusting electromagnetic valves are controlled according to working requirements. The first conveying pipeline 9 is also provided with an adjusting electromagnetic valve for adjusting the flow of the liquid medium, the outlet of the first conveying pipeline 9 is connected with the medium conveying pump 4, the outlet of the medium conveying pump 4 is connected with the inlet of the heater 5 through the second conveying pipeline 10, the outlet of the heater 5 is connected with the inlet of the filter 6 through the third conveying pipeline 11, the outlet of the filter 6 is connected with the cleaning tank through the liquid discharge pipeline 12, and the adjusting electromagnetic valves are arranged on the second conveying pipeline 10, the third conveying pipeline 11 and the liquid discharge pipeline 12. The cleaning liquid mixed by the liquid preparation tank is conveyed to a heater 5 through a medium conveying pump 4, and the heated cleaning liquid enters a filter 6 for filtering and then enters a cleaning tank for cleaning the wafer. Wherein, still be provided with the concentration detection appearance in the liquid mixing groove in this embodiment, be provided with temperature sensor in the heater, adjust solenoid valve, concentration detection appearance, temperature sensor and connect the PLC controller.
In mechanical structure, this embodiment includes installation frame 1, valve fixing plate 2, heater fixing plate 3, valve fixing plate 2 heater fixing plate 3 all fixed mounting in installation frame 1 is last, valve fixing plate 2 install in the both sides of installation frame 1, heater fixing plate 3 install in the top of installation frame 1, installation frame 1 is close to one side of heater fixing plate 3 is provided with one valve fixing plate 2, and the opposite side is provided with two valve fixing plates 2. The adjusting electromagnetic valve is integrally installed on the valve fixing plate 2, the heater 5 is installed on the heater fixing plate 3, the filter 6 is arranged on the side of the heater 5, a triangular structure is formed among the central axis of the filter 6, the central axis of the heater 5 and the third conveying pipeline 11, and the medium conveying pump 4 is installed at the bottom of the installation frame 1 and located between the heater 5 and the filter 6. The top of filter 6 is provided with filter mounting bracket 13, filter mounting bracket 13 is the U-shaped structure, and its bottom is provided with the block groove, the top of filter 6 is fixed in the block groove, the top of filter mounting bracket 13 is installed on the main frame of wet process equipment. And a plastic movable clamp spring is arranged between the filter 6 and the filter mounting frame 13. The installation between the valve fixing plate 2 and the installation frame 1, the installation between the heater 5 and the installation frame 1, and the installation between the filter installation frame 13 and the main frame are all installed in a bolt-nut type, the bolt is a buffer nut 14, and triangular buffer teeth 15 are arranged on two sides of the buffer nut 14 along the circumferential direction of the nut main body.
For the pipeline arrangement mode in this embodiment, any pipeline distribution can be adopted according to actual working requirements.
Example 2
The embodiment provides an anti-vibration liquid feeding method for wet cleaning equipment, which comprises the following steps:
firstly, conveying acid liquid and pure water into a liquid preparation tank according to a specific proportion through an acid liquid inlet pipeline 7 and a pure water inlet pipeline 8, and mixing the acid liquid and the pure water in the liquid preparation tank;
secondly, the concentration detector detects the concentration of the acid liquor in the liquor blending tank in real time, and feeds a concentration signal back to the PLC, and the PLC controls the opening angles of the electromagnetic valves on the acid liquor inlet pipeline 7 and the pure water inlet pipeline 8 according to the concentration information; the acid liquor inlet pipeline 7 and the pure water inlet pipeline 8 are connected to the main liquid distribution tank, mixed in the main liquid distribution tank and then enter the auxiliary liquid distribution tank, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid inlet ends of the first conveying pipelines 9 through two branch pipes, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with adjusting electromagnetic valves, and under a normal working state, the mixed cleaning liquid is conveyed to the first conveying pipelines 9 through the auxiliary liquid distribution tank. If the flow value of the first conveying pipeline 9 is smaller than the set value, the regulating electromagnetic valves at the outlet of the main liquid mixing tank and the outlet of the auxiliary liquid mixing tank are opened simultaneously;
thirdly, conveying the mixed cleaning liquid in the liquid preparation tank to a cleaning tank through a liquid discharge pipeline 12 after the cleaning liquid sequentially passes through a medium conveying pump 4, a heater 5 and a filter 6;
and step four, sensing the temperature signal of the cleaning liquid in real time by the temperature sensor and feeding the temperature signal back to the PLC, and controlling the temperature of the heater 5 by the PLC according to the temperature information.
Although the present invention has been described in detail with respect to the above embodiments, it will be understood by those skilled in the art that modifications or improvements based on the disclosure of the present invention may be made without departing from the spirit and scope of the invention, and these modifications and improvements are within the spirit and scope of the invention.
Claims (9)
1. An anti-vibration liquid inlet system of wet cleaning equipment is characterized in that the anti-vibration liquid inlet system is adopted and comprises an acid liquid inlet pipeline, a pure water inlet pipeline, a liquid distribution tank, a medium delivery pump, a heater, a filter, a liquid discharge pipeline and an adjusting valve, wherein the inlet of the acid liquid inlet pipeline is connected with an external liquid supply system, the pure water liquid inlet pipeline is connected with pure water, the outlet of the acid liquid inlet pipeline and the outlet of the pure water inlet pipeline are connected with the inlet of the liquid distribution tank, the outlet of the liquid distribution tank is connected with the inlet of the medium delivery pump through a first delivery pipeline, a concentration detector is arranged in the liquid distribution tank, the outlet of the medium delivery pump is connected with the inlet of the heater through a second delivery pipeline, the outlet of the heater is connected with the inlet of the filter through a third delivery pipeline, and a temperature sensor is arranged in the heater, the outlet of the filter is connected with the cleaning tank through a liquid discharge pipeline, the liquid inlet pipeline, the first conveying pipeline, the second conveying pipeline, the third conveying pipeline and the liquid discharge pipeline are all provided with adjusting electromagnetic valves, and the adjusting electromagnetic valves, the concentration detector and the temperature sensor are connected with a PLC (programmable logic controller);
still include installation frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the installation frame, the valve member fixed plate install in the both sides of installation frame, the heater fixed plate install in the top of installation frame, the regulation solenoid valve is integrated install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the axis of filter the axis of heater the triangle-shaped structure is formed between the third conveying pipeline, the medium delivery pump install in the bottom of installation frame is located the heater with between the filter.
2. The anti-vibration liquid inlet system for the wet cleaning equipment according to claim 1, wherein a filter mounting rack is arranged at the top of the filter, the filter mounting rack is of a U-shaped structure, a clamping groove is arranged at the bottom of the filter mounting rack, the top of the filter is fixed in the clamping groove, and the top of the filter mounting rack is arranged on a main frame of the wet cleaning equipment.
3. The anti-vibration liquid inlet system of the wet cleaning equipment as claimed in claim 2, wherein a plastic movable clamp spring is arranged between the filter and the filter mounting frame.
4. The anti-vibration liquid inlet system for the wet cleaning equipment according to claim 2, wherein the installation between the valve fixing plate and the installation frame, the installation between the heater and the installation frame, and the installation between the filter installation frame and the main frame are all installed in a bolt-nut manner, the bolt is a buffer nut, and both sides of the buffer nut are provided with triangular buffer teeth along the circumferential direction of the nut body.
5. The anti-vibration liquid inlet system of the wet cleaning equipment as claimed in claim 1, wherein one side of the mounting frame close to the heater fixing plate is provided with a valve fixing plate, and the other side is provided with two valve fixing plates.
6. The anti-vibration liquid inlet system of the wet cleaning equipment as claimed in claim 1, wherein the mounting frame is mounted on the cleaning units of the wet cleaning equipment, and each cleaning unit is provided with 1 or 2 anti-vibration liquid inlet systems.
7. An anti-vibration liquid inlet method for wet cleaning equipment, which adopts the anti-vibration liquid inlet system for the wet cleaning equipment as claimed in any one of claims 1 to 6, and is characterized by comprising the following steps:
firstly, conveying acid liquid and pure water into a liquid preparation tank according to a specific proportion through an acid liquid inlet pipeline and a pure water inlet pipeline, and mixing the acid liquid and the pure water in the liquid preparation tank;
secondly, the concentration detector detects the concentration of the acid liquor in the liquor blending tank in real time, and feeds a concentration signal back to the PLC, and the PLC controls the opening angles of the electromagnetic valves on the acid liquor inlet pipeline and the pure water inlet pipeline according to concentration information;
thirdly, conveying the mixed cleaning liquid in the liquid preparation tank to a cleaning tank through a medium conveying pump, a heater and a filter in sequence by a liquid discharge pipeline;
and step four, sensing the temperature signal of the cleaning liquid in real time by the temperature sensor and feeding the temperature signal back to the PLC, and controlling the temperature of the heater by the PLC according to the temperature information.
8. The anti-vibration liquid feeding method for wet cleaning equipment according to claim 7, wherein in the second step, the acid liquid feeding pipeline and the pure water feeding pipeline are connected to the main liquid distribution tank, and after mixing is completed in the main liquid distribution tank, the acid liquid and the pure water are fed into the auxiliary liquid distribution tank, an outlet of the main liquid distribution tank and an outlet of the auxiliary liquid distribution tank are connected to liquid feeding ends of the first conveying pipeline through two branch pipes, and regulating solenoid valves are respectively arranged at an outlet of the main liquid distribution tank and an outlet of the auxiliary liquid distribution tank, so that in a normal working state, the mixed cleaning liquid is conveyed from the auxiliary liquid distribution tank to the first conveying pipeline.
9. The anti-vibration liquid feeding method for wet cleaning equipment according to claim 8, wherein if the flow value of the first delivery pipe is less than the set value, the regulating solenoid valves at the outlet of the main liquid dispensing tank and the outlet of the auxiliary liquid dispensing tank are simultaneously opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011632278.2A CN112705543B (en) | 2020-12-31 | 2020-12-31 | Vibration-proof liquid inlet system and method for wet cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011632278.2A CN112705543B (en) | 2020-12-31 | 2020-12-31 | Vibration-proof liquid inlet system and method for wet cleaning equipment |
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| Publication Number | Publication Date |
|---|---|
| CN112705543A true CN112705543A (en) | 2021-04-27 |
| CN112705543B CN112705543B (en) | 2023-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011632278.2A Active CN112705543B (en) | 2020-12-31 | 2020-12-31 | Vibration-proof liquid inlet system and method for wet cleaning equipment |
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| JP2005038897A (en) * | 2003-07-15 | 2005-02-10 | Dainippon Screen Mfg Co Ltd | Substrate processing method and device thereof |
| CN102437050A (en) * | 2010-09-29 | 2012-05-02 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method |
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| CN209496835U (en) * | 2019-04-16 | 2019-10-15 | 德淮半导体有限公司 | Wet-cleaning device |
| CN209935364U (en) * | 2019-03-28 | 2020-01-14 | 德淮半导体有限公司 | Cleaning device |
| CN210837673U (en) * | 2019-11-26 | 2020-06-23 | 长江存储科技有限责任公司 | Liquid mixing device |
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2020
- 2020-12-31 CN CN202011632278.2A patent/CN112705543B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005038897A (en) * | 2003-07-15 | 2005-02-10 | Dainippon Screen Mfg Co Ltd | Substrate processing method and device thereof |
| CN102437050A (en) * | 2010-09-29 | 2012-05-02 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method |
| US20130048609A1 (en) * | 2011-08-25 | 2013-02-28 | Norihiro Ito | Liquid processing apparatus, liquid processing method and storage medium |
| CN206924491U (en) * | 2017-07-04 | 2018-01-26 | 京东方科技集团股份有限公司 | Purging system and the wet-method etching equipment with the purging system |
| CN208256617U (en) * | 2018-06-25 | 2018-12-18 | 世巨科技（合肥）有限公司 | A kind of clean processing equipment of the precision for high-order semiconductor |
| CN209935364U (en) * | 2019-03-28 | 2020-01-14 | 德淮半导体有限公司 | Cleaning device |
| CN209496835U (en) * | 2019-04-16 | 2019-10-15 | 德淮半导体有限公司 | Wet-cleaning device |
| CN210837673U (en) * | 2019-11-26 | 2020-06-23 | 长江存储科技有限责任公司 | Liquid mixing device |
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| Publication number | Publication date |
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| CN112705543B (en) | 2023-07-04 |
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