CN214638942U - Anti-vibration wet cleaning equipment inlet means - Google Patents
Anti-vibration wet cleaning equipment inlet means Download PDFInfo
- Publication number
- CN214638942U CN214638942U CN202023315871.2U CN202023315871U CN214638942U CN 214638942 U CN214638942 U CN 214638942U CN 202023315871 U CN202023315871 U CN 202023315871U CN 214638942 U CN214638942 U CN 214638942U
- Authority
- CN
- China
- Prior art keywords
- heater
- filter
- fixed plate
- pipeline
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses an anti-vibration wet cleaning equipment inlet means, including installation frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the installation frame, the valve member fixed plate install in the both sides of installation frame, the heater fixed plate is installed in the top of installation frame, the integration of adjusting solenoid valve install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the medium delivery pump install in the bottom of installation frame is located the heater with between the filter. The utility model discloses an install each valve integration on the valve fixing plate, install the heater on the heater fixed plate, install valve fixing plate and heater fixed plate in the installation framework again, can effectively improve inlet means's installation stability, avoided liquid medium gassing when the transmission.
Description
Technical Field
The utility model belongs to the technical field of semiconductor equipment, concretely relates to anti-vibration wet cleaning equipment inlet means.
Background
In the working process of semiconductor wet equipment, acid liquor, alkali liquor and organic liquid are used, and liquid solution or gas solute needs to be transported by a pump or other conversion transport media. In the process of conveying the medium, the medium needs to pass through a plurality of pipelines and a plurality of conveying devices, a pump, a heating device and a valve piece can generate a large amount of vibration in the operation process, bubbles can be generated in a liquid solution or the condition of non-uniformity of liquid occurs due to the generation of vibration, the cleaning liquid is invalid, the cleaning quality of a wafer product is influenced, a cleaning blind area is formed on the surface of the wafer product, and then the wafer product is invalid.
SUMMERY OF THE UTILITY MODEL
Problem to exist among the prior art, the utility model provides an anti-vibration wet cleaning equipment inlet means, the utility model discloses can guarantee the stability of wet cleaning equipment's feed liquor, improve cleaning solution's stability, guarantee the cleaning quality of wafer product.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides an anti-vibration wet cleaning equipment inlet means, including liquid inlet pipe way, liquid distribution groove, medium delivery pump, heater, filter, drainage pipeline, governing valve, the access connection external feed liquid system of liquid inlet pipe way, the exit linkage the import of liquid distribution groove, the export of liquid distribution groove is connected through first delivery line the import of medium delivery pump, the export of medium delivery pump is connected through second delivery line the import of heater, the export of heater is connected through third delivery line the import of filter, the export of filter is connected the washing tank through drainage line, liquid inlet pipe way, first delivery line, second delivery line, third delivery line, all be provided with the regulation solenoid valve on the drainage line;
still include installation frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the installation frame, the valve member fixed plate install in the both sides of installation frame, the heater fixed plate install in the top of installation frame, the regulation solenoid valve is integrated install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the axis of filter the axis of heater the triangle-shaped structure is formed between the third conveying pipeline, the medium delivery pump install in the bottom of installation frame is located the heater with between the filter.
According to the preferable technical scheme, a filter mounting frame is arranged at the top of the filter, the filter mounting frame is of a U-shaped structure, a clamping groove is formed in the bottom of the filter mounting frame, the top of the filter is fixed in the clamping groove, and the top of the filter mounting frame is mounted on a main frame of the wet process equipment.
As the preferred technical scheme, a plastic movable clamp spring is arranged between the filter and the filter mounting frame.
Preferably, the valve fixing plate, the heater, and the main frame are mounted in a bolt-nut manner, the bolt is a buffer nut, and triangular buffer teeth are disposed on two sides of the buffer nut along a circumferential direction of the nut body.
As a preferred technical solution, one side of the mounting frame close to the heater fixing plate is provided with a valve fixing plate, and the other side is provided with two valve fixing plates.
As the preferred technical scheme, the liquid inlet pipeline is arranged into two paths, and comprises an acid liquid inlet pipeline and a pure water inlet pipeline.
As a preferred technical scheme, the installation frame is installed on cleaning units of the wet cleaning equipment, and each cleaning unit is provided with 1 or 2 liquid inlet devices.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model discloses an install each valve integration on the valve fixing plate, install the heater on the heater fixed plate, install valve fixing plate and heater fixed plate in the installation framework again, can effectively improve inlet means's installation stability, avoided liquid medium gassing when the transmission.
(2) The utility model discloses form the triangle-shaped structure between filter, heater, third conveying pipeline, the vibrations of equipment can be alleviated effectively to the simple harmonic vibration that can the production of effective absorption equipment.
(3) The utility model discloses a set up buffer nut, buffer nut's both sides are provided with triangle-shaped buffer gear and can disperse the produced stress of vibration effectively, avoid vibrations to transmit between the structure of difference, have improved inlet means's stability.
(4) The utility model discloses set up the filter mounting bracket, fixed the top of filter on the main frame through the filter mounting bracket, set up the bottom at the installation frame with the medium delivery pump, reduced the focus of whole device, avoided the inlet means to make a round trip to rock at the in-process of work.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is one of the schematic structural diagrams of the liquid inlet device of the anti-vibration wet cleaning equipment of the utility model.
Fig. 2 is a second schematic structural diagram of the liquid inlet device of the anti-vibration wet cleaning apparatus of the present invention.
Fig. 3 is the third structural schematic diagram of the liquid inlet device of the anti-vibration wet cleaning equipment of the present invention.
Fig. 4 is the explosion schematic diagram of the liquid inlet device of the anti-vibration wet cleaning equipment of the utility model.
Fig. 5 is the utility model discloses buffer nut's among anti-vibration wet cleaning equipment inlet means structural schematic.
Wherein the reference numerals are specified as follows: the device comprises an installation frame 1, a valve fixing plate 2, a heater fixing plate 3, a medium conveying pump 4, a heater 5, a filter 6, an acid liquor inlet pipeline 7, a pure water inlet pipeline 8, a first conveying pipeline 9, a second conveying pipeline 10, a third conveying pipeline 11, a liquid discharge pipeline 12, a filter installation frame 13, a buffer nut 14 and triangular buffer teeth 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without any creative effort belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
The embodiment provides a liquid inlet device of anti-vibration wet cleaning equipment, which is used for solving the problem that pipelines and parts are easy to vibrate in the wet cleaning equipment in the prior art. The cleaning unit of each wet cleaning device is provided with 1 or 2 liquid inlet devices.
The liquid inlet device of the anti-vibration wet cleaning equipment comprises a liquid inlet pipeline, a liquid distribution tank, a medium delivery pump 4, a heater 5, a filter 6, a liquid discharge pipeline 12 and an adjusting electromagnetic valve. The liquid inlet pipeline comprises two liquid inlet pipelines, namely an acid liquid inlet pipeline 7 and a pure water inlet pipeline 8, a liquid inlet of the acid liquid inlet pipeline 7 is connected with an acid supply system at the front end, a liquid inlet of the pure water inlet pipeline 8 is connected with pure water, and the acid liquid inlet pipeline 7 and the pure water inlet pipeline 8 are both provided with adjusting electromagnetic valves for adjusting the proportion of acid liquid to pure water. The outlet of the acid liquor inlet pipeline 7 and the outlet of the pure water inlet pipeline 8 are both connected with the inlet of the liquid preparation tank, and the acid liquor and the pure water are uniformly mixed in the liquid preparation tank. The acid liquor inlet pipeline 7 and the pure water inlet pipeline 8 are both connected with a main liquid distribution tank, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid inlet ends of the first conveying pipelines 9 through two branch pipes, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with adjusting electromagnetic valves, and the opening and closing or the opening size of the adjusting electromagnetic valves are controlled according to working requirements. The first conveying pipeline 9 is also provided with an adjusting electromagnetic valve for adjusting the flow of the liquid medium, the outlet of the first conveying pipeline 9 is connected with the medium conveying pump 4, the outlet of the medium conveying pump 4 is connected with the inlet of the heater 5 through the second conveying pipeline 10, the outlet of the heater 5 is connected with the inlet of the filter 6 through the third conveying pipeline 11, the outlet of the filter 6 is connected with the cleaning tank through the liquid discharge pipeline 12, and the adjusting electromagnetic valves are arranged on the second conveying pipeline 10, the third conveying pipeline 11 and the liquid discharge pipeline 12. The cleaning liquid mixed by the liquid preparation tank is conveyed to a heater 5 through a medium conveying pump 4, and the heated cleaning liquid enters a filter 6 for filtering and then enters a cleaning tank for cleaning the wafer.
In mechanical structure, this embodiment includes installation frame 1, valve fixing plate 2, heater fixing plate 3, valve fixing plate 2 heater fixing plate 3 all fixed mounting in installation frame 1 is last, valve fixing plate 2 install in the both sides of installation frame 1, heater fixing plate 3 install in the top of installation frame 1, installation frame 1 is close to one side of heater fixing plate 3 is provided with one valve fixing plate 2, and the opposite side is provided with two valve fixing plates 2. The adjusting electromagnetic valve is integrally installed on the valve fixing plate 2, the heater 5 is installed on the heater fixing plate 3, the filter 6 is arranged on the side of the heater 5, a triangular structure is formed among the central axis of the filter 6, the central axis of the heater 5 and the third conveying pipeline 11, and the medium conveying pump 4 is installed at the bottom of the installation frame 1 and located between the heater 5 and the filter 6. The top of filter 6 is provided with filter mounting bracket 13, filter mounting bracket 13 is the U-shaped structure, and its bottom is provided with the block groove, the top of filter 6 is fixed in the block groove, the top of filter mounting bracket 13 is installed on the main frame of wet process equipment. And a plastic movable clamp spring is arranged between the filter 6 and the filter mounting frame 13. The installation between the valve fixing plate 2 and the installation frame 1, the installation between the heater 5 and the installation frame 1, and the installation between the filter installation frame 13 and the main frame are all installed in a bolt-nut type, the bolt is a buffer nut 14, and triangular buffer teeth 15 are arranged on two sides of the buffer nut 14 along the circumferential direction of the nut main body.
For the pipeline arrangement mode in this embodiment, any pipeline distribution can be adopted according to actual working requirements.
Although the present invention has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that modifications or improvements based on the disclosure of the present invention can be made without departing from the spirit and scope of the present invention, and these modifications and improvements are within the spirit and scope of the present invention.
Claims (7)
1. The liquid inlet device of the anti-vibration wet cleaning equipment is characterized by comprising a liquid inlet pipeline, a liquid distribution tank, a medium conveying pump, a heater, a filter, a liquid discharge pipeline and a regulating valve, wherein an inlet of the liquid inlet pipeline is connected with an external liquid supply system, an outlet of the liquid distribution tank is connected with an inlet of the liquid distribution tank, an outlet of the liquid distribution tank is connected with an inlet of the medium conveying pump through a first conveying pipeline, an outlet of the medium conveying pump is connected with an inlet of the heater through a second conveying pipeline, an outlet of the heater is connected with an inlet of the filter through a third conveying pipeline, an outlet of the filter is connected with a cleaning tank through a liquid discharge pipeline, and the liquid inlet pipeline, the first conveying pipeline, the second conveying pipeline, the third conveying pipeline and the liquid discharge pipeline are all provided with regulating electromagnetic valves;
still include installation frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the installation frame, the valve member fixed plate install in the both sides of installation frame, the heater fixed plate install in the top of installation frame, the regulation solenoid valve is integrated install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the axis of filter the axis of heater the triangle-shaped structure is formed between the third conveying pipeline, the medium delivery pump install in the bottom of installation frame is located the heater with between the filter.
2. The inlet device of claim 1, wherein the filter is provided with a filter mounting bracket at the top, the filter mounting bracket is of a U-shaped structure, the bottom of the filter mounting bracket is provided with a clamping groove, the top of the filter is fixed in the clamping groove, and the top of the filter mounting bracket is mounted on the main frame of the wet cleaning equipment.
3. The inlet device of claim 2, wherein a plastic movable clamp spring is arranged between the filter and the filter mounting frame.
4. The inlet device of claim 2, wherein the installation between the valve fixing plate and the mounting frame, the installation between the heater and the mounting frame, and the installation between the filter mounting frame and the main frame are all installed by a bolt-nut type, the bolt is a buffer nut, and both sides of the buffer nut are provided with triangular buffer teeth along the circumferential direction of the nut body.
5. The inlet device of claim 1, wherein one side of the mounting frame near the heater fixing plate is provided with a valve fixing plate, and the other side is provided with two valve fixing plates.
6. The liquid inlet device for the anti-vibration wet cleaning equipment according to claim 1, wherein the liquid inlet pipeline is provided with two ways, and comprises an acid liquid inlet pipeline and a pure water inlet pipeline.
7. The liquid inlet device for the anti-vibration wet cleaning equipment according to claim 1, wherein the mounting frame is installed on cleaning units of the wet cleaning equipment, and each cleaning unit is provided with 1 or 2 liquid inlet devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023315871.2U CN214638942U (en) | 2020-12-31 | 2020-12-31 | Anti-vibration wet cleaning equipment inlet means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023315871.2U CN214638942U (en) | 2020-12-31 | 2020-12-31 | Anti-vibration wet cleaning equipment inlet means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214638942U true CN214638942U (en) | 2021-11-09 |
Family
ID=78506483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023315871.2U Active CN214638942U (en) | 2020-12-31 | 2020-12-31 | Anti-vibration wet cleaning equipment inlet means |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214638942U (en) |
-
2020
- 2020-12-31 CN CN202023315871.2U patent/CN214638942U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN214638942U (en) | Anti-vibration wet cleaning equipment inlet means | |
| CN218410287U (en) | A solution storage tank companion thermal system for urea is hydrolysised | |
| CN105019185A (en) | Washing machine | |
| CN106546015A (en) | Solar water heater | |
| CN112705543B (en) | Vibration-proof liquid inlet system and method for wet cleaning equipment | |
| CN205953707U (en) | Solar energy water body pollution purifies ship | |
| CN203959882U (en) | A kind of ion-exchanger | |
| CN104805652A (en) | Washer | |
| CN209926904U (en) | Oxidation steam heat transfer system | |
| CN209166192U (en) | A kind of starch-based product production plate heat exchanger structure | |
| CN212076564U (en) | MBR membrane sewage treatment plant | |
| CN208066147U (en) | A kind of ultrafiltration apparatus for colloidal sol concentration | |
| CN216304795U (en) | Full frequency conversion three-cavity non-negative pressure water supply equipment | |
| CN211526840U (en) | Cooling water return water cooling device | |
| CN210292523U (en) | Coolable circulating water station device | |
| CN211069049U (en) | Spray drying system | |
| CN215654402U (en) | A drip washing tower device for waste gas recovery for pesticide production | |
| CN216539864U (en) | Diamond wire liquid medicine washing water tank | |
| CN219112336U (en) | System for be used for reducing incomplete phosphorus of phosphogypsum | |
| CN216821302U (en) | Sturgeon hatching apparatus | |
| CN218620532U (en) | Ammonia nitrogen stripping pretreatment system | |
| CN211972447U (en) | Chemical liquid medicine energy-saving device for chemical gold melting tank | |
| CN214936740U (en) | Central dual water supply device for hospital | |
| CN214781286U (en) | Phenol device circulating water system | |
| CN217247167U (en) | Diamond wire-electrode cutting circulating water recovery finished product tank internal circulation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |